Scanner Calibration Document

Transcription

TECHNICAL SUPPORT BULLETIN
Scanner Calibration File Edit Guide
Tech. Support Bulletin
No. (NBSB-0058)
Page 1 of 10
Products:
Revision
A
Description
Initial Release – Achilles Carnewal
3/2/2009
3/2/2009
Subject: Scanner Calibration File Edit Guide
System(s) Affected: NanoScope Software versions 4x, 5x, 6x, 7x and 8x
Action Category: Next Use
Summary: Guide for transposing scanner calibration parameters from
printed form to software scanner file edit in NanoScope software.
SECTION 1
Open Loop Multimode and Dimension
Scanners
Users of Open Loop Scanners Multimode A, E, J and Dimension G will receive a
Scanner Calibration File printed form, from the factory, that looks similar to the one
below: Note: Edit old scanner file, of same name, or create new. For creating a new
scanner file, for your list of available scanners, see end of document.
Figure 1-1
THE INFORMATION IN THIS DOCUMENT IS PROPRIETARY TO VEECO INSTRUMENTS
No. (NBSB-0058)
Page 2 of 10
Products:
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3/2/2009
Note that the file can be separated into three sections, top left is for the X
parameters and top right is for the Y parameters. The middle section is for Z only.
The bottom section is available for editing by selecting “Detector” (fig. 1-2) they are
default parameters and will vary depending on type of scanner and/or software. If
there are differences, leave original settings in software do not copy as they are
generated on a different microscope, unless it is a brand new scanner.
For version 4x & 5x software Open Loop calibration file parameters can be
accessed using the following process: click “Microscope”, on the top row of the
toolbar, accessing the drop-down menu, then click Scanner for X-Y scan parameters.
As displayed below:
Figure 1-2
For version 6x & 7x software Open Loop click “Tools” on the top row of the tool
bar then click “Calibrate” and select X-Y. For closed loop scanners go to SECTION 2.
Figure 1-3
The software Calibration Parameters dialog box (v5.x left, v6.x right) is now
available:
Fig. 1-4
No. (NBSB-0058)
Page 3 of 10
Products:
Revision
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Description
3/2/2009
3/2/2009
Edit the left column (X parameters) and then the right column fields according the
new parameters provided on the printed sheet that came with the refurbished
scanner. Note the top section of the sheet pertains to the X & Y parameters as
below:
Figure 1-6
Next open Calibrate Z in Software (fig.1-2 & 1-3) to access Z parameters dialog box:
Figure 1-7
Edit the Z Calibration with the parameters on the Z section of the Scanner
Calibration sheet as below:
Figure 1-8
END SECTION 1 for open loop Multimode and Dimension
scanners, the scanner calibration file is now updated and ready
for use.
No. (NBSB-0058)
Page 4 of 10
Products:
Revision
A
Section 2
Description
3/2/2009
3/2/2009
XY Closed Loop & Hybrid XYZ Dimension
Scanners
Users of Dimension Closed Loop XY and Hybrid Closed Loop XY & Z Dimension G
Scanners will receive a Scanner Calibration File printed form, from the factory, that
looks similar to the one below: Note that the Hybrid XYZ Closed Loop Scanner has a
few more parameters in XY & Z sections. Note: Edit old scanner file of same name or
create new. For creating a new scanner file, for your list of available scanners, see
end of document.
Figure 2-1
Breakdown of the printed form as follows: Top section Open Loop X on left and Y on
the right. Next section (Top Center) is Closed Loop X on left and Y on right.
Next section (Lower Center) a mix of open and closed loop parameters for Z piezo.
No. (NBSB-0058)
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Products:
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Description
3/2/2009
3/2/2009
The bottom section is available for editing by selecting “Detector” (fig. 2-1) they are
default parameters and will vary depending on type of scanner and/or software. If
there are differences, leave original settings in software do not copy as they are
generated on a different microscope, unless it is a brand new scanner.
In v6 or v7 software, in real-time, in the “Scan Parameters List” dialog box, select
“XY Closed Loop” to OFF position, options shown in fig. 2-2 below:
Figure 2-2
For version 6x & 7x software Closed Loop Dimension Scanners on the top row
of the main menu bar click “Tools” then click “Calibrate” and select X-Y.
Figure 2-3
The software Calibration Parameters, for the open loop section of the calibration
dialog box is now available (fig. 1-4). Edit the software parameters as per the
printed form (fig. 2-1) top section for XY Open Loop.
Next change the “Scan Parameters List” dialog box, select “XY Closed Loop” to ON
position, as in fig. 2-2. On the top row of the main menu bar click “Tools” then click
“Calibrate” and select X-Y (fig. 2-3). Now EDIT the dialog box for closed loop XY
parameters, located on the top center section of printed form (fig. 2-1). Note the
dialog box on the left below is for XY CL and the right is XYZ Hybrid.
No. (NBSB-0058)
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Figure 2-5
On the top row of the main menu bar click “Tools” then click “Calibrate” and select Z
(fig. 2-3). Now EDIT the dialog box for closed loop Z parameters, located on the
bottom center section of printed form (fig. 2-1).
Figure 2-6
END Section 2 for Closed Loop XY and Hybrid XYZ Dimension
scanners, the scanner calibration file is now updated and ready
for use.
No. (NBSB-0058)
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Section 3
Description
3/2/2009
3/2/2009
Dimension ICON Closed Loop Scanner
Users of Version 8.x Nanoscope Software will receive a Scanner Calibration File
printed form, from the factory, that looks similar to FIG. 2-1. Note: Edit old scanner
file of same name or create new. For creating a new scanner file, for your list of
available scanners, see end of document.
First step, configure the “Experiment” for Contact or Tapping mode. Select XY
Feedback Control “Adaptive” in Feedback section of parameters as below:
Figure 3-1
From top menu bar, click Calibrate and select Scanner XY as below.
Figure 3-2
The software Calibration Parameters, for the XY Open Loop section of the calibration
dialog box is now available (fig. 3-3). Edit the parameters as per the printed form
(fig. 2-1) top section for Open Loop XY.
No. (NBSB-0058)
Page 8 of 10
Products:
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Description
3/2/2009
3/2/2009
Figure 3-3
Select XY Feedback Control “on” in Feedback section of parameters (Fig. 3-1).
From top menu bar, click Calibrate and select Scanner XY (fig. 3-2).
The software Calibration Parameters, for the XY Close Loop section of the calibration
dialog box is now available. Edit the parameters as per the printed form (fig. 2-1)
top center section for Closed Loop XY.
Figure 3-4
From top menu bar, click Calibrate and select Scanner Z (fig. 3-2).
No. (NBSB-0058)
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Products:
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The software Calibration Parameters, for the Z section of the calibration dialog box is
now available. Edit the parameters as per the printed form (fig. 2-1) bottom center
section for Z.
Figure 3-5
END Section 3 for Dimension Icon scanners, the scanner
calibration file is now updated and ready for use.
CREATING A NEW SCANNER FILE:
It may be desirable to retain a copy of the old file unless there is an existing default
file available for troubleshooting. Default files are typically named with three xxx
instead of a serial number of a scanner. The scanner files for NanoScope software
are located in drive D:\<version number or SPM>\EQUIP\<serial number>.scn. To
keep the old copy, merely change the name of the old file. Example: 3453g.scn to
3453g_old.scn.
Create a new file by opening Windows Explorer. See two examples of Windows
Explorer for drive D:\ <contents>, v5 or v6 on left and for v7 software on right.
No. (NBSB-0058)
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Choose scanner file (example above 3453jv) highlight/select, right click “copy”, then
keeping the mouse cursor in same position right click and click “Paste”. A new file
will be placed in the same directory (Equip) with a new name “Copy of 3453jv.scn”
now edit the file name to 3453jv_old.scn. Now you have either a new scanner file or
a copy of the old scanner file, which can now be edited using the Nanoscope
Calibration dialog box editor.
END

Scanner Calibration Document

Transcription

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