NANOTECHNOLOGY AND ITS ADVENT IN ELECTRONICS AND
Transcription
NANOTECHNOLOGY AND ITS ADVENT IN ELECTRONICS AND
NANOTECHNOLOGY AND ITS ADVENT IN ELECTRONICS COMMUNICATION AND NETWORKS Maansi Bhasin', Kasturi Mishra2 Mrs. S.P. Gaikwad", Mrs. S.P. Tondare4 , Bharati Vidyapeeth Deemed University College of Engineering, Pune-411043 (MS), India 1maansi _bhasin@yahoo.co. in, 2 mishrakasturi02@yahoo. co. in 3*spgaikwad@bvucoep.edu. in ,4 tondaresharda@yahoo.com Abstract: The world is on the brink of a new Switching and Interference which consists .technological revolution beyond any human of Quantum experience. A new, more powerful industrial Waveguides and The 3-Terminal(Y-Branch) revolution capable of bringing wealth, health Switching Devices. Point Contacts, Electronic and education, without pollution, to every person on the planet. This is the promise of One of the central visions of the wireless industry aims at ambient intelligence are nanotechnology. Nanotechnology has gained computation increased popularity and communication always largely due to the available and ready to serve the user in an design, creation" utilization whose constituent of materials structures exist at Nanoscale i.e. physical dimensions that are intelligent way. This requires that the devices are mobile. Core requirements for this kind of ubiquitous ambient intelligence in the range of 'one-billionth (1O~ of a are that the devices are autonomous and meter.Nanotechriology applications can be robust. The nanotechnology is developing discussed in both the field of electronics as briskly in telecommunications area. well as telecommunications. The The devices which have been discussed in the paper devices talked over include Sensors, Nanotubes, Nanoscale Antennae. Towards include Nan.o-Materials, Nanoscale the end a brief overview of emerging Transistors, Semiconductor Flash Memory, Wave Interference Electronic Devices Wave guiding and including commercial applications of Nano electronics bas been inculcated in the paper. Quantum. Interference Devices. Some light bas been The applications m the field of communications can be found in association thrown on The Basics-of -Coherent to Network concepts communication, Nano applications-Healthcare drug Nano ill communication (e.g. micro-surgery, delivery/target networks), aeronautics,transportation,communication, environmental communication therefore principle for the semiconductor industry for over 30 years. The sustaining of Moore's Law, however, requires continued transistor scaling and performance improvements. The monitoring, Nano pervasive computing used in the 90 nm logic generation node is Nanotechnologies ~ 30 nm. It is projected that transistor length for (e.g. pervasive sensing). are every 24 months, and it has been the guiding expected to enable the physical gate length of the Si transistors will reach - 10 nm in 2015. By way of production of smaller, cheaper and powerful innovation in silicon technology, devices with increasing efficiency. strained-Si Keywords: Moore's law, Nantenna, Y- high-x/metal-gate stacks, and the non-planar Tri-gate CMOS transistor branch devices, quantum point, NEMS. channels, architecture, CMOS . scaling and performance I INTRODUCTION Molecular nanotubes, and Nanodevices address the state of the art in nanoelectronics. The semiconductor industry a transition from standard silicon interconnects to novel nanowires that include carbon nanotubes. New exciting opportunities in emerging materials will take system performance beyond that offered by traditional CMOS-based Nanofabrication microelectronics. possibilities are bright for will continue at Recently, a lot of interest has been generated and good progress has been made in the study of novel nanoelectronic Sinanowire silicon devices, field-effect carbon-nanotube V compound and non-silicon including transistors (FETs), FETs (CNTFETs) and 1II- semiconductor quantum-welt FETs (QWFETs), in the capacity of future computation applications. These devices hold promise as candidates for integration with the ubiquitous silicon platform in order future technologies. to A. transistor least until the middle of the next decade. Electronics, is undergoing such as enhance simultaneously MOORE'S LAW circuit functionality enabling while the extension of Moore's Law well into the next decade and According to Moore's transistors Law, the number of per integrated circuit doubles beyond. II NAND-ELECTRONIC of less than 100nm in diameter. Fullerenes DEVICES (carbon 60): Spherical molecule formed of Below are mentioned presently used devices in the field of electronics. A. Nanomaterial polymeric nanomaterial can't be really considered as a new material considering that have been developed and used for decades in fields such as electronic device Nanomaterials Two dimensional tubes in two dimension: nanomaterials such and wires. Halloysite nanotubes as are hollow tubes with high aspect ratios that are tens to hundreds of nanometers (billionths of a meter) in diameter, with lengths typically ranging from about 500 nanometers to over 1.2 microns. Nanowires are ultrafine arrays of dots, formed wires or Iinear by self-assembly. They can be made from a wide range of materials. Semiconductor of silicon, gallium nanowires nitride phosphide has demonstrated optical, electronic and made indium remarkable and magnetic three dimensions: characteristics. 3. Nanoscale Nanoparticles in are spherical formed hierarchical through a self-assembly. 4. Nanocomposite Nanoparticle materials: silicate nanolayer (clay nanocomposites) and nanotubes can be used as reinforced mechanical filler not only to increase properties of nanocomposites but also to impart new properties (optical, manufacture, chemistry and engineering. 2. recently process. (trivial definition: 3d polymer) as thin films and engineered surfaces. This of structure molecules, nanoscale in one dimension: In this category belong nanomaterialssuch type carbon discovered 1986. Dendrimers NAND-MATERIALS 1. hexagonal are often defined as particles electronic etc.) 5. Nanocoatings: surface coating with nanometre thickness of nanomaterial can be used to improve properties like wear and scratch-resistant, optoelectonics, hydrophobic properties. Several key emerging nanoelectronic devices, such as Si nanowire field-effect transistors (FETs), carbon nanotube FETs, and III-V compound semiconductor quantum-well assessed for their potential performance, low-power FETs, are in future highcomputation applications. Furthermore, these devices are benchmarked against CMOS technologies. state-of-the-art Si B. NANOSCALE TRANSISTORS The smaller transistors, scale variations their affect silicon chips and corresponding products using unreliable and variable devices. in their size and structure and thus performance of reliability the more atomic- complex circuit. whole a the FIGURE 2: NANOTRANSISTORS F MOLECULAR 1: FIGURE Currently the manufacturer is producing microchips with by comparison 1 shows the different molecular 100 ,000 nanometres computers which variability presents continued a huge IS a problem barrier scaling of microchips development of ever-more to develop methodology the nanoscale manufacturing electromagnetic hair is around wide - but future new design and the powerful tools and for transistors and circuits at which will of reliable, enable the low cost, low interference, are to continue to increase in power. the computers and electronic systems. The focus is to a human transistors will hav~ to be even smaller if transistor structures. This increased semiconductor transistors less than 30 nanometres in size - TRANSISTORS Figure lead high-yield C. SEMICONDUCTOR FLASH MEMORY Semiconductor memory IS an important component of modem microelectronics. In . Flash memories , the absence or presence of stored charge in the floating gate changes the threshold voltage of a transistor, and as such indicates logic levels 1 or O. Flash "-";''''''devices have their own s~ issues: The high ._he.lDw the' Fermi energy in two of }he 3 ~~_;o' jamrge~ft11he11o~vng .inject gate makes ,gate/drain possible diroc1Ums_ ~ \ 1 dimensional wavegnffie- Da;mar,'., 'P¥BF \ waveguideer j unction. susceptible to HCI damage. a single- moded optical fibre. It is a natural question to ask, to what extent Radiation from may eject the trapped electrons the floating nodes, with the corresponding loss of the information stored at the node. And finally, Stress induced leakage current (SILC, precursor to TDDB) caused by formation of bulk oxide defects is a major problem for Flash transistors. The SILC-related defects do not completely short the floating gate to the channel but the stored charge may be lost due to leakage, eventually resulting in memory failure. The the well-known devices used for manipulating, RF radiation or light signals can be rediscovered and employed electrons in electronic for Waveguide devices. Indeed, it turns out that such an analogy is very useful and has' given inspiration to many beautiful electronic and devices nanotechnologies nanometer potentially useful fabricated by to match the short (~ 40 (nm)) electron wavelength normally encountered. bits with such excessive leakage are called "Anomalous bits" and even a small fraction Electronic waves have a cut-off in electron of energy bel~w which no electronic wave can such bits may render a technology propagate;' above this energy a single-mode unsuitable for practical applications. I-dimensional D. WA VEINTERFERENCE 1) ELECTRONIC WAVEGUIDING QUANTUM INTERFERENCE AND DEVICES: DEVICES: energy electronic system is until a characteristic energy IS reached, above which two transverse modes can propagate. The transmission through such an electronic waveguide gives rise to a Semiconductor quantum observed (lD) heterostructures wells for electrons states directions heterostructure for the may define giving sharp electrons perpendicular to in the the interfaces. It is possible to fabricate channels for electrons with only one (or a few) Eigen energies (or modes) fundamental DC h/2e2=12.9 kOhm macroscopic electrical per resistance mode. of The leads normally contain many modes. The quantum resistance is due to the transition between this many-mode system to the ID electronic channel in question. Again this is qualitatively analogous to the matching. o£.~~-spiitC cledlOrnagnetic balance between two values as for insjance , . waves being guided into a square RF .a111 t#ilee,g "j"fiiU';~'8~~in - . the J• waveguide by a-so-called microwave horn. vicinity lead to -wedJ_£;s3in~e~~ The the wave resistance. Such a switching device does not properties of the electrons by controlling the rely on a capacitance and the switching may constructive or destructive interference of be potentially achieved without a transient two or more partial waves. For nanoscale current. devices these effects are generally much Electronic more utilized devices are based on sensitive to external electric field variation than the traditional field effect waveguides may therefore' be In much rrncrowaves m the a same way waveguide. as Some presently used in most electronics. preliminary waveguide devices do already III exist. Examples are standing electron wave THE BASICS OF COHERENT SWITCHING AND INTERFERENCE An electronic confinement such as patterns ill in quantum dots (cavities) or splitting electron waves and letting them quantum well structures leads to a set of subsequently Eigen energies that can be calculated from (directional couplers). the Schrodinger equation. The population of Phenomena are observed in so called stub the electron energy states (following the tuner structures, where effectively the length Pauli principle) has to be taken into account, of a reflecting arm is modulated, causing which adds extra charge to the quantum well interference via the reflected electron wave. . which alters the potential energy due to 1) QUANTUM capacitance or electron-electron interaction ELECTRONIC WAVEGUIDES effects. The calculation of Eigen energies This section introduces the quantum point therefore involves a simultaneous and self- contacts (QPCs) and electron waveguides as consistent solution of the Poisson equation the and the Schrodinger equation. The density waveguide devices. In the remaining parts of of electrons and hence the confmement IS this changed IS describe a set of different devices which necessary by an external gate and it to solve the new state self- interfere with each other 'r general POINT CONTACTS building section on contain blocks for AND the waveguide devices we different consistently. In a case where for instance the combinations of these ,~ building blocks, together having different electrical resistance comes out as a delicate functional properties. The fact~~t ". electrons are Fermi particles leads to a characteristic narrowed dissipation coupling contacts along less conductance dimensional higher through one- channels, where coupling to a dimensional background regions down by coupling Via two the 1D channels forming an artificial atom (quantum with a discrete energy dot) spectrum. This is leads to a characteristic "contact" resistances similar to the coupling via a cavity of h/2e2=12.9 traditional techniques. quantization kOhrn. The conductance is sharp for short pieces of rmcrowave system termed. differential conductance. quantization wave point contacts. This is a clear sign of electronic guiding that can be observed in The resonant coupling at a ID-OD-ID electron electronic waveguides, also called normally quantum in 2) has THE shown to exhibit 3-TERMINAL negative (Y-BRANCH) SWITCHING DEVICES 10 mm. "Artificial" This length sets the limit for the extension of electrostatic coherent electronic waveguide, but there is gas in the two lateral directions. To produce no reason to believe that this is an intrinsic a 3-termirtal device, such an "atom" must be limit. coupled channels up. to Lengths of about The quantized resistance nuisance the is III general a atoms can be made by confinement of a 2D electron to some leads in a waveguide structure. The simplest 3-terminal concept is applications, a confined free space waveguides leading into one middle region. impedance is 377 Ohm and typical strip line Due to its form it is generally called a Y- or coplanar waveguide branch device. The very open structure at impedance below for particularly interference practical because effect the have characteristic this with value. an For an electronic the region Y-junction blockade. with three electronic permits The extended states Coulomb ill modified the Y- waveguide at high (microwave) frequencies junction without extensive loss, a built-in amplifier transmission from source to either left or or a switch with a negative differential right drain is a delicate conductance, as found in resonant such are strongly no balance, depends on the full self-consistent and the which solution in this region. A slight change of geometry tunnel diodes, is required . • Two ID electron systems may couple to where a bias on the left or right gate may each other in several ways where the broad very quickly switch the two drains between band transmission through the waveguides is high (2e2/h) and low conductance. source-left drain and source - right drain can be observed The fact that the stem copies the most negative of the voltages applied to the two other electrodes rectification makes it a candidate for up to the 1Hz regime. Furthermore, it bas been shown that such Ybranch devices provide Properties suitable for logical circuits. Strictly speaking, this is, however, neither an interference device nor FIGURE 3: Y-BRANCH SWITCH a waveguide (Scanning electron microscope (SEM) energy is larger than the typical Fermi or sub picture of a hetero structure defined Y- band energies in the Y-j unction. branch switch.) The etched ridges support a ID electronic device, since the thermal waveguide, which carries currents from the This switch is a result of an amplified effect upper source region to either of the two of changing lower drain regions. The left or the right rearrangement the confinement; of charge i.e. a small on the gate gate voltages give rise to an abrupt capacitance has due to the wave-mechanics switching in resistance between the source a big influence on the transmission in one or and the left (or right) drain. The switching is both source-drain channels. The limitation governed by large wave guiding changes at of this device is its intrinsic low working the Y branch point and only indirectly due to temperature, charging effects. which is needs that the sub band and Fermi energies are larger than the IV. thermal energies, i.e. below 50 K. For such a DIFFICULTIES FOR ELECTRON Y-branch device, the mean free path length INTERFERENCE AND SWITCHING for ballistic coupling is in the order of 100- DEVICES 200 nm A. devices at room fulfilling temperature. this criterion Y-branch can be produced so that QPC coupling between the MAJOR Fabrication CHALLENGES tolerances AND and temperature limits: Quantum mechanical interference driven by a gate voltage or a magnetic field requires that the states that are responsible for the transmission line impedance of 50-400 Ohm interference have a coherence length that is will lead to a considerable longer than unless special measures are taken to match the region over which the coherence occurs. In order to have a simple impedances. type of interference with waveguide the geometry must be loss of signal The obvious way is to work devices with a built-in simple with a small number of unintended amplification electron scattering points in the sample. having The interference integrated in the designed waveguide circuit once the effect will be destroyed thermal energy becomes an (switching devices) amplifier (HEMn or by closely limiting the frequency response to about 0.1 comparable to the lowest energy differences THz. The impedance problem in the system causing the interference. In an major challenge for any nm. circuit that may ideal 1D-system become relevant for high frequencies in the difference it is the sub band. energy that sets the limit. For a ID waveguide with a corresponding· to a sub confmement band separation will be a future. C. Periodic versus on-off devices The interference phenomena discussed maximum above comes about as a quantum mechanical temperature will then be 5-50 K. To reach phase shift between two partial waves giving room temperature a periodic, often sinusoidal, variation of the energy of 1-10 meV, the the device sizes must be conductance smaller than 10 nm. with the externally applied magnetic or electrical fields. The periodic B. response leads to the same conductance for High frequency limitations The interest switching in coherence is particularly high frequency usage and several different external field values; this is pointing towards generally not desired and preferentially there phenomena The should be a one to one correspondence of 1D between input and output. Most application up to THz. existence of a minimum resistance devices, given by the resistance quantization will require a digital signal handling and the value h/2e2=12.9 switching intrinsic kOhm problem. This always appear in series value. between The strong 12.9 is however resistance will . with the modulated impedance kOhm an and mismatch the typical devices mentioned above may therefore be most suitable. V. EMERGING DEVICES A. Single Electron Tunneling Devices • A Single Electron Tunn~ce • A Yano-Type Memory is a two terytinal is a three terminal cdev2c.e ~~~::stBiM-~eF Coulomb .device based on .the b~-gf-Mrere-'lhe electrons o~. ap i~d _fttitMi::t~-:· (or dot) is controlled .. '" -TIapS in poly-~ .. • A Nano-Flash Memory is a three terminal by a gate. The island (or dot) may have up to device without thousands of electrons depending on the size source and drain but has a floating gate and material. between the driven gate and the transistor channel. a tunnel barrier between When fabricated at nanoscale dimensions, the increase of charge by one ~ •... -~ I--_Ur'~ .' .'/-: ~. electron causes an abrupt shift in the turn off _--'00{ voltage . VI. TELECOMMUNICATIO l .. .:\ r= -FIGURE 4: A. PRINCIPLE OF A· INFORMATION PROCESSING Information interpret SINGLE ELECTRON TRANSISTOR (a) no electrons 'S processors gathered manipulate or sensed and data. The exponential development of microelectronic integrated circuit technology throughout the may flow from one last half century has driven electrode to the other if the applied unprecedented voltage, V, is such that ~N+1 > ~I ;'This processing capacity and speed. revolution. an in information state is known as Coulomb blockade (b) If the voltage between the electrodes With is increased such that ~I > ~N+1 > W , introduction of 65nm complementary metal- then the empty states in the island are oxide-semiconductor populated the semiconductor and single electrons can the development and (CMOS) industry commercial technology, has already tunnel through the island. To change the crossed the nanoelectronics frontier.These Fermi level of the island a gate may be trends are expected to continue until the used that switches the single electron feature size of silicon based nano-electronics current on or off. reaches 22nm or perhaps even 16nm.Then the fundamental physical limits to the size of conventional devices and the power they dissipate will prevent additional technologies and cross-disciplinary research in many ways. Embedding intelligent and improvements. autonomous devices into physical objects of the world requires that devices adapt to their B. SENSORS How Can Nanotechnology environment Improve the Performance of Sensors? The application of nanotechnology ill should to sensors nanotechnology allow functionality. improvements In particular, technology combined nanofabrication technology micro a huge range of applications. They should also lead to much decreased size, enabling the integration of 'nanosensors' into many other devices. sensors became an Micromechanical elementary part of automotive technologies in mid 1990, roughly ten years later more miniaturized sensors are consumer ~ enabling electronics micromechanical novel features for and mobile devices within next ten years the development of truly on embedded nanostructures everyday based sensors will become a part of our intelligent Nanotechnologies environments. may also augment the sensory skills of humans based on wearable or embedded sensors and the capabilities to aggregate this immense global sensory data into meaningful everyday v life. information This requires for network of devices surrounding them. There is no way to configure this kind of a huge Nanotechnology can help to develop novel kind of intelligent devices where learning is and can deliver become a part of the system manually - top down. ill new biosensor with and our novel one of the key characteristic properties of the system, similarly to biological systems which grow and adapt to the environment autonomously. Nanotechnologies may open solutions for sensors that are robust in harsh environmental conditions and that are stable over long period of time. Today mechanical sensors - pressure and acceleration sensors are already demonstrated to fulfill these requirements, but we do not have chemical or biochemical robust enough. sensors that are stable or Furthermore, the future embedded sensors need to be so inexpensive and ecologically sustainable that they can be used in very large nwnbers. 1) Future Prospects We can also expect to see actuators that control movement Sensor/actuator 'smart' on the combinations and precise functions nanoscale. will deliver in products and processes. For example, nanofabrication and inspection actuator with tools require sensors and systems that can position objects nanometre sensors accuracy. and actuators In this way, constitute Nanotubes For nanotubes and their weight example, have ratio Applications because the highest of any carbon strength known to material, researchers at NASA are combining carbon nanotubes with composites that Nanotube networks other can materials be into used. to build are prepared by adsorbing nanotubes on surfaces (spraying, dip-coating, electroplating) or by mixing nanotubes into matrixes (polymers, metals, ceramics). transistors, cells, large-area transparent and heating elements based on nanotube networks. Following sections can be described: Companies to consider using them in several fields. solar another enabling technology. C. for This will give an introduction • Nanotube manipulate manipulation: We can the nanotube positions, change their shape, cut them and place them on electrodes. • Molecular mechanics: mechanical We can simulate the behavior nanotubes by calculating the forces acting between nanotubes and other objects such as the substrate. • Nanotube Field-Effect Transistor: We have successfully used semiconducting single and multi-walled nanotubes channels of field-effect transistors. into the physics of electrically conducting networks (charge carrier localization, interference phenomena, sample specific noise, thermally assisted tunneling), lightweight spacecraft. This will summarize the state of the art of material performance (interplay of optical transparency and electrical conductivity, microwave compatibility, shielding, dissipation electromagnetic of electrostatic FIGURE 5: NANOTUBE STRUCTURE charges), and will discuss selected industrial applications: transparent conducting films of as • normally D. are straight, we have devised In Nanotube nanotubes rings: While Nanotube theory of the theory: Computation electrical and telecom applications, the detection devices typically used for light detection are ways to prepare them in a ring form. • NANOSCALE ANTENNAE and mechanical well based on the semiconductor technology. A nantenna is an electromagnetic properties. collector designed to absorb specific wavelengths that Incredible improvements nanotechnologies nanonetworks m have enabled the vision of composed of a number of nanomachines. are proportional to the size of the nantenna. Currently, Idaho National Laboratories has designed a nantenna to absorb wavelengths in the range of 3-15 um . Communicating with each other for a specific nanoscale application. Due to size and capabilities of nanomachinesthat may constitute of molecules, just several traditional nanonetworks. Many communication paradigms investigation communication, or communication mechanisms are deemed under atoms inapplicable in novel such nanoscale are currently as molecular FIGURE 6: A nano antenna radio frequency receiver/transmitter. communication over carbon nanotubes and nanowires. Recent work has It measures only 10.Tmicrons long and 400 also nm wide. These wavelengths revealed that nanoscale physical correspond to with each photon energies of 0.08-0.4 eV. Based on other through various quantum phenomena, antenna theory, a nantenna can absorb any which makes nanoscale communication also wavelength of light efficiently provided that closely the size of the nantenna is optimized for that devices naturally communicate rel~ communica~ on princip~M to the quantum networks structured Af ~tum entanglement. based specific would wavelength. be wavelengths used between Ideally,. to absorb 0.4-1.6 ~ nanteaaas light at because these wavelengths have higher energy than infrared (shorter wavelength) and make up material can be approximated quite well by about 85% of the solar radiation spectrum. a low-cost solution, containing VII EMERGING COMMERCIAL APPLICATIONS OF NANO semiconductor create a bulk material this properties enable improved thermoelectric , NEMS gas sensors because of the scale on which they can function. nanocrystals to while retaining the technology semiconductor Nanoscale ink nano properties. Some of the first markets for ELECTRONICS using colloidal will industry, be in where the it could enable efficient, flexible, solid-state cooling for integrated circuits and LEOs. This could greatly reduce the size or need for a heat NEMS are expected to significantly impact many areas of technology and science and sink, he argues, and potentially improve .performance. eventually replace MEMS. First application The much-hyped the nanoscale properties of materials at are finally starting to be applied to some real electronics applications, ranging material from near-ideal thermoelectric based on spray-on semiconductor nanocrystals, to transparent conductive films made from on carbon nanotubes assembled silver and self nanopartic1es, to ultrasensitive nanoscale MEMS gas sensors. Nanoscale materials properties are enabling efficient, low-cost thermoelectric Though long studied , materials. thermoelectric conversion of heat to electricity has never been efficient enough to be practical for ,most applications. Modeling suggests that the most efficient structure would be point sources of excited evenly in a matrix-and electrons distributed that ideal efficient sophisticated is likely to be for less solid-state such as spot cooling cooling, though, for things like wine coolers. But eventual markets for low-cost roll-to-roll coated thermoelectric films could also include automobiles waste heat and central recovery power in stations, general heating and cooling, and even power generation .likely closer transparent conductive innovative nanomaterials to market films to are using potentially challenge. Pushing MEMS (Micro-ElectroMechanical Systems) to the nanoscale opens up new potential as well. This means MEMS-based detectors in an electronic nose can be made significantly more sensitive, as well as scaled xlown in size by about a million fold, compared to the existing state- of-the-art-and made with efficient wafer- nanodevices used in the field of electronics and telecommunication. scale processes. basics Alliance for Nanosystems VLSI for the final to integrate low-cost gas-phase coherent switching and interferences and discussed quantum pots as stage of developing the MEMS and CMOS processes of We also studied the well as electronic waveguides. them into practical chemical sensors, We briefly looked at some problems in the to monitor toxic industrial gases and gas phase implementation of switching systems. In the . processes, end, a or to analyze human breath to light was thrown on emerging commercial applications of nano-electronics. detect diseases. The detectors are essentially arrays of nanoscale MEMS resonators-fancy ACKNOWLEDGMENT versions of guitar strings-set within MEMS flow channels. The resonators are coated We would like to thank Prof. N. Srivastava with a kind of chemical sponge that absorbs for his the target material, which changes the mass completion of the document. sincere help leading us to the of the resonator. The gas is first sent through REFERENCES: a chip scale version of a gas chromatograph process, to simplify the [1] identification [2] military and industrial, the most interesting can though 45nrn would be made precursor systems [4] surface and Thess, VHl CONCLUSION discussed Using A. Pohm"l-Mb Giant Magneto' IEEE Trans on Centre for Ultra structure Research Ludwig Boltzmann Institute for Nanotechnology http://www.boku.ac.atlzu£. 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B.E.degree clocked operation of ultIalow powec inter band resonant tunneling diode pipelined from received in Electronics Shivaji University, logic gates" IEEE J. Solid State Circuits Kolhapur, M.E. degree in [25] Electronics Yano K.. et al, IEEE Trans.. On Vidyapeeth Electron Devices. Deemed form Bharati University. She is currently working as Assistant Professor in the Department of Electronics, BVDUCOE, Pune. She is interested in developing and Miss Maansi pursuing degree Bhasin is her B Tech in Electronics & studying new algorithms, architectures, and technologies that enhance network efficiency. Telecommunications from Bharati Deemed University. Vidyapeeth Her main Mrs.S.P. Tondare field of received B.E. and M.E. degree in " interest concerns the telecommunications Biomedical networks and has a mainline interest to work from in the area by making use of her analytical m and practical approach. Engineering Mumbai University 2003 and 2005 respectively. She is currently working as a Lecturer in the Department of Electronics, BVDUCOE, Pune. Her area of interest in the field of Biomedical Instrumentation and Miss Kasturi pursuing Misbia is her B Tech degree in Electronics & Telecommunications from Bharati Vidyapeeth Deemed University. Her orientation is towards research in Signal and Video Processing. Biomaterials,