CoVap Handout.ai

Angstrom CoVap Series
Thermal, Sputter or Electron Beam
The Angstrom CoVap Series can be configured as either a 2-source resistive evaporator
(type-R), a single magnetron sputter coater (type-S) or an electron beam evaporation
system (type-E). All CoVap systems can be integrated seamlessly into a glove
box environment and are built with quality components and workmanship upon
which Angstrom Engineering Inc. has founded its reputation.
CoVap Series systems are the ideal solution for thin film deposition research or
pilot production on an economical budget. Advanced deposition rate control with
options including codeposition configuration and shadow mask indexing all in a
compact package set the CoVap Series apart from the competition.
With complete system solutions offered at economical prices the CoVap Series
provides unparalleled equipment features when compared to competitive
technologies. At no additional charge, Angstrom Engineering Inc. includes up to
2 days of on site system operation training at our facility with every purchase.
CoVap Series Base System
• Ø10" x 17"H aluminum chamber
• Enclosed frame w/19" electrical rack
• Pfeiffer turbo pumping package
• Base pressure < 9x10-7 Torr
• Sigma SQC deposition controller
• Single quartz crystal rate sensor
• Source to substrate distance ~12"
• Continuous rotation substrate stage
• Choice of deposition technology
CoVap type-R (Thermal)
• 2 resistive evaporation sources
• Co-deposition option
CoVap type-S (Sputter)
• One 2" magnetron sputter source
• Downstream partial pressure control
• RF and DC power supply options
Sigma Instruments
CoVap type-E (Electron Beam)
• Four pocket MDC e-beam source
• 3kW power supply & sweep controller
CoVap type-R Options
• Codeposition process control
• Resistive source clamp extension
CoVap type-S Options
• 1.2kW DC Glassman supply
• 300W RF VII power supply
• 600W RF VII power supply
• 3" MAK US Inc. sputter source
• Additional process gas control
Common System Options
• Process automated shutter
• Substrate mask support plate
• Vacuum chamber debris shields
• Glove box integrated design
• 2-port glove box configuration
• Glove box component upgrades
• On site system installation
SQC Codeposition Controller
• Stores up to 25 multi-layer recipes
• Monitors two 4-6 MHz quartz sensors
• Controls codeposition processes
• Large active matrix color LCD display
• RS232 computer interface port
• Windows compatible software
A
e
angstrom
engineering
91 Trillium Drive
Kitchener, ON N2E 1W8
www.angstromengineering.com