contact - TU Ilmenau

Transcription

Gustav-Kirchhoff-Straße 7
98693 Ilmenau
Germany
Phone: +49 3677 69-3401
Fax:
+49 3677 69-3499
macronano@tu-ilmenau.de
www.macronano.de
BIANNUAL REPORT 2009 2010
Institute of Micro- and Nanotechnologies MacroNano®
at Technische Universität Ilmenau
SCIENTIFIC REPORT 2013
CONTACT
EDITOR:
Rector of Technische Universität Ilmenau
Univ.-Prof. Dr. rer. nat. habil. Dr. h.c. Prof. h.c. Peter Scharff
EDITORIAL OFFICE:
Heike Bartsch
William Donahue
Simone Gutsche
Nam Gutzeit
Martin Hoffmann
Stefan Krischok
Jens Müller
Stefano da Ros
Kirsti Schneider
Liliana Sendler
Stefan Sinzinger
Andreas Werner
COVER DESIGN:
formplusraum+, Erfurt
PUBLISHED BY:
Technische Universität Ilmenau
© 2013
IMN MacroNano®
IMPRINT
PRINTING:
PROOF „Druckproduktion“, Erfurt
COVER PICTURE:
3D-Hep G2-cells in a micro porous cavity by Michael Gebinoga,
PHOTOS, GRAPHS AND OTHER PICTURES:
Ingo Herzog, Wolfgang Rauprich, Michael Reichel (ari), Liliana Sendler,
Sebastian Trepesch, Bettina Wegner, Andreas Werner;
BMBF, TMBWK, TMSFG, IMN MacroNano®, Institut MNES, Institut PMS,
TU Ilmenau
Pictures, charts, drawings and text as used for the scientific articles are
property of the corresponding authors.
Any further use of text or images also in part requires the prior permission
of the authors.
Rücken derzeit:
16,7 mm
Bitte konkrete Angabe übermitteln
FACTS AND FIGURES
Fig. 1: AlN membrane lens for micro-optical systems
Fig. 2: Polymer solar cell
Contact
2
macronano@tu-ilmenau.de | www.macronano.de
Scientific Report 2013
FACTS AND FIGURES
Contents
Inhalt
Facts and Figures ........................................................................................................ 2
Preface ..................................................................................................................... 5
The Institute and its Bodies .................................................................................... 7
Highlights 2011/2012 ..............................................................................................
8
Presentation at Trade Fairs .....................................................................................
10
MicroNano-Broker.EU .............................................................................................
11
International Contacts and Cooperation ...............................................................
12
Invited Talks .............................................................................................................
14
Large Format Projects .............................................................................................
15
Scientific Projects ....................................................................................................
24
Project Statistics ......................................................................................................
29
Center for Micro- and Nanotechnologies ..............................................................
30
Members of the Institute ......................................................................................... 32
Research Activities ..................................................................................................... 76
Scientific Publications (only in electronic version) .......................................... 187
Contact
3
4
FACTS AND FIGURES
Preface
Vorwort
Univ.-Prof. Dr. rer. nat. habil. Dr. h.c.
Prof. h.c. Peter SCHARFF
Rector of Technische Universität Ilmenau
When we get to the very, very
small world ... say circuits of
seven atoms ... we have a lot
of new things that would happen that represent completely
new opportunities for design.
Atoms on a small scale behave like nothing on a large
scale, for they satisfy the laws
of quantum mechanics. So, as
we go down and fiddle around
with the atoms down there,
we are working with different
laws, and we can expect to do
different things.
Richard P. Feynman (1959)
Contact
In 2012 we celebrated not only the twentieth anniversary of our university but also the tenth birthday of the
Center of Micro and Nanotechnologies (ZMN), the cradle
of the current Institute of Micro- and Nanotechnologies
MacroNano®. It was an important strategic decision taken
by the TU Ilmenau to promote the basic research and to
advance market-oriented research in the field of Micro- and
Nanotechologies.
Today we can see that this decision is bearing fruit. At the
interdisciplinary Institute of Micro- and Nanotechnologies
IMN MacroNano®, scientists from more than 40 groups deal
with basic and applied research working in an interdepartmental manner.
In various research projects this scientists examined the new
properties of nanostructures or integrated the smallest nanodevices into microsystems to equip it with totally new features. In such way they develop for example highly efficient
energy storage for electric vehicles , explore technologies to
reduce the cost of photovoltaic systems, examine microfluidic process to press ahead with development in biochemistry or tread new paths in therapy with nano-biotechnology
and medical technology.
The institute is a shining example how our university addresses some of the major questions of the time with answers in
the emerging fields of life science, energy storage and new
materials and strengthen Thuringias technological competitiveness.
5
FACTS AND FIGURES
Preface
Vorwort
Univ.-Prof. Dr.-Ing.
Jens MÜLLER
current Director of the IMN MacroNano
Univ.-Prof. Dr.-Ing. habil.
Martin HOFFMANN
®
Interdisciplinary research with an emphasis on system integration is the major principle of operation of the IMN MacroNano®. As our trademark suggests, this research yields
macroscale systems capable of robust industrial application,
but with the sensitivity and precision that only our integrated micro and nanotechnology can provide.
Within the institute, we currently have more than 40 member departments specifically addressing the areas of life
science, energy efficiency, and photonics. The applications
from each area span from basic research via design and simulation, technology and material development to marketready samples.
As demonstrated in this report, our numerous projects and
publications frequently and necessarily contain at least two
or more of our member groups. During the last reporting
period our institute was further strengthened by the addition of two new groups: 3D Nanostructuring and Photovoltaics.
Due to the efforts of many scientists and technicians as well
as the financial support from the EU, the federal and the
Thuringian government, we have been able to significantly improve our technical platform. Space limitations for installations in clean rooms and laboratories in the Feynman
building were overcome with the support of the university
administration by adding adequate floor space in the neighbor Meitner building.
Contact
6
former Director of the IMN MacroNano
®
All these endeavors have led to an increased number of
research projects documented by the continuously increasing third party budget over the years as well as the improved scientific visibility based on international publications.
Please enjoy reading the short scientific papers which are
made in an extended abstract style and use the opportunities of our institute for common research no matter if you
work in academics or industry.
During the two-year period 2011/12, we achieved significant
steps forward: At first, a ZIK research group for 3D-nanostructuring was successfully established. Additionally, the
work of a number of larger research projects was continued
or new ones were started. To date the IMN MacroNano® is
the largest research facility within the TU Ilmenau with a
turnover of approx. 13,5 Mio. € in 2012 although it is a voluntary association of research groups. These groups benefit
from the fruitful exchange and the technical and administrative support of the institute. Following the latest statute
of the institute that limits the mandate to two consecutive
periods, a change of the directors took place in 2012. In parallel, the steering board was adapted to the increased size
of the institute. With the new statute, the IMN MacroNano®
is well prepared for its role as interdisciplinary core facility for micro- and nanotechnologies within the Technische
Universität Ilmenau and consequently follows its self-image
established within the last decade.
FACTS AND FIGURES
The Institute and its Bodies
Das Institut und seine Gremien
The Institute of Micro- and Nanotechnologies IMN MacroNano® is an inter-departmental Institute of the Technische
Universität Ilmenau founded in 2004. The governing body
of the Institute consists of the Institute Council (Institutsrat),
the Director of the Institute, and the Executive Board of the
Institute (Institutsvorstand).
The Institute Council is responsible for defining the longterm-goals and the developmental focus of the Institute.
Members of the council include both heads of membergroups of the institute and representatives of research
groups and junior research groups. Additionally there is one
non-academic representative and one representative of students.
The Director of the Institute is elected by the Institute Council and appointed by the Rector of the University for a term
of three years. The Director manages the Institute and represents it both inside and outside of the University. Since June
2012, the Director is Prof. Jens Müller and the vice Director
is Dr. Stefan Krischok. They continue the work of their predecessors, Prof. Hoffmann and Prof. Sinzinger.
The Executive Board of the Institute is also elected by the Institute Council, assisting and advising the Director. Members
of the Board with voting rights are the Director and his four
deputy department chairs (heads of member-groups: Prof.
Martin Hoffmann, Prof. Ivo Rangelow, Prof. Peter Schaaf,
Prof. Stefan Sinzinger) and three representatives of research
groups and junior research groups (Dr. Gernot Ecke, Dr. Michael Gebinoga, Dr. Marcel Himmerlich). The management
team of the Center of Micro- and Nanotechnologies are consultants of the Executive Board without voting rights.
The scientific spectrum of the Institute spans from theoretical physicists and specialists in advanced electromagnetics
to specialists in surface physics, polymer physics, chemistry
and nano-biosystems all the way to experts in electronics
technology, material science, optics and micromechanical
systems, only to list some examples. This wide range makes
the Institute unique at the national and international levels
and gives the opportunity to map the entire development
chain from simulation and design over fabrication of devices
and systems by micro- and nano-structuring up to their characterization.
Cutting-edge research and innovation are based on the high
level of education attained by qualified young scientists
and engineers at the Technische Universität Ilmenau. Consequently, the interdisciplinary approach of the Institute is
also reflected in the offered lectures and courses of study. In
the cross-faculty Master’s degree programs in “Micro- and
Nanotechnologies” and “Miniaturised Biotechnology”, students from different undergraduate disciplines can extend
their qualifications within the scope of the IMN MacroNano®.
Postgraduate education is improved by the establishment of
graduate research programs.
The Institute strengthens its PhD program with regular
events, including scientific colloquia and workshops on soft
skills for early career scientists. These activities simultaneously intensify the network among the PhD candidates. The
IMN MacroNano® offers direct support for early career scientists through the establishment of additional international groups.
With their high-level education, our graduates are often
employed in positions of responsibility in industry and research, often in regional and international companies.
Other graduates plan their own spin-off companies and become entrepreneurs themselves.
The multi-disciplinary research and development within the
IMN offers various opportunities for industrial cooperation
with small and medium sized enterprises as well as international companies. Among these are long term collaboration projects in consortia or projects with a single industrial
partner, just as short term services. The internal project management and controlling efficiently supports even complex
requirements.
Fig. 1: The celebration event for the 10th anniversary of the ZMN, the
cradle of the Institute of Micro- and Nanotechnologies (30. March 2012)
Das Institut für Mikro- and Nanotechnologien MacroNano® ist ein interdisziplinäres und fakultätsübergreifendes Institut der
TU Ilmenau und bündelt die Forschungsarbeiten auf den Gebieten Mikrosystemtechnik, Nanotechnologie und Mikro-NanoIntegration für die Applikationsfelder Life Sciences, Energie Effizienz und Photonik. Seine einzigartige Bandbreite ermöglicht
die Abbildung der kompletten Prozesskette von der Simulation bis hin zum fertigen System.
Contact
7
FACTS AND FIGURES
Highlights 2011 / 2012
Höhepunkte 2011 / 2012
1. January 2011
Start of the 2nd phase of BMBF-Unternehmen-Region Projekt „Kompetendreieck Optische Mikrosyssteme“ – Spitzenforschung und Innovation in den Neuen Ländern
22. February 2011
Final Meeting of the BMBF-funded Innovationsforum “Mikro-Nano-Integration”
8. April 2011
German Federation of Journalists is visiting the ZMN
1. January 2012
The group 3D nano-structuring starts at the ZIK MacroNano
20.-22. March 2012
6th Workshop „Chemical and Biological Micro Laboratory
Technology“
27. May 2011
Anniversary ceremony „50 Jahre Mikrowellentechnik“
30. March 2012
10th anniversary Center of Micro- and Nanotechnologies
(ZMN)
14.-18. June 2011
112th annual conference of the Deutschen Gesellschaft für
angewandte Optik (DGaO)
16.-19. April 2012
International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies
1. July 2011
Start of Wachstumskern BASIS (Unternehmen Region)
21. April 2012
Open House at the University with presentations and guided
tours in the ZMN laboratories
26.-27. September 2011
Workshop with the cluster from Hamamatsu/Japan
Seventh FLUXONICS RSFQ Design Workshop
24. November 2011
Workshop Micro-Nano-Integration at the „Innovationstag
Thüringen“
Fig. 1: The first Edmund Optics Research Award in Europe: Martin Weinacht,
Andreas Oeder, Prof. Stefan Sinzinger and Peter Smorscek (from left) at the
prize award ceremony (14. December 2011)
Contact
8
14. December 2011
Edmunds Optics Preis to the Group Optical Engineering
21. May 2012
Formation of the Thuringian office of the German Nanotechnology Association (DV Nano)
22. May 2012
Seminar about MNP-funding-topics with lecturers from the
national contact points
Fig. 2: Mr. Hiepe (left) from the BMBF, one of the key speakers at the 10th
anniversary celebration of the Center for Micro- and Nanotechnologies, is
visiting the cleanrooms (30. march 2012)
FACTS AND FIGURES
Highlights 2011 / 2012
Höhepunkte 2011 / 2012
22.-24. May 2012
5th International Symposium “Technologies of Polymer Electronics”
European Project Meeting of INTASENSE
30. May 2012
10th anniversary of the SFB 622 Nanopositioning and Nanomeasuring Machines
3. October 2012
„Maustag“,more than 100 children with their parents explore how to get the sun in the tank and take a closer look at
small things with the scanning electron microscope
18. June 2012
BMBF- Status Workshop NanoMiPu
19.-21. June 2012
Annual conference of BioMST e. V.
22. June 2012
Elections of the executive committee of the institute, election of Prof. Müller and Dr. Krischok as Director / Vice Director for the next three years
22. July 2012
The DLR TET-Satellite with KERAMIS-equipment is launched
in Baikonur
4. September 2012
Workshop „Mikro-Nano“ at the 57th International Scientific
Conference IWK
10. October 2012
At its annual conference the German Nanotechnology Association ranks the TU Ilmenau among the ten best NanoUniversities of Germany
18. October 2012
The Carl Zeiss Foundation supports the biosensor-project of
the groups Nano-Biosystems Technology, Nanotechnology
and Surface Physics of Functional Nanostructures with one
million Euro.
7.-23. November 2012
“Kinderuni”, several hundred children visit the university for
special lectured and visit the ZMN cleanrooms
8./9. November 2012
Project-Meeting 3 D Neuron
23rd
International
Workshop
MicroMechanics
Europe (MME 2012) combined with an European Brokerage
Event and Branchentag MNT e.V. at TU Ilmenau
10. December 2012
Status-Workshop of the ZIK group 3 D Nanostructuring
Fig. 3: Award winners of the MME 2012 together with Prof. Hoffmann
(Chair of the conference) and Prof. Franssila (Co-Chair)
Fig. 4: Interested prospective researchers: children at the scanning
electron microscope during „Maustag“ (3. October 2012)
Contact
9
FACTS AND FIGURES
Presentation at Trade Fairs
Messebeteiligungen
nano tech 2011, Tokyo
16.-18. February 2011
Hannover Fair, Hannover
4.-7. April 2011
Medtec Europe 2011, Stuttgart
22.-24. March 2011
Sensor + Test 2011, Nürnberg
5.-7. June 2011
Fig. 1: International fairs allow the distribution of research results and are
valuable to expand contacts (nano tech 2011, Tokyo)
MST- Kongress 2011, Darmstadt
10.-12. October 2011
Medtec Europe 2012, Stuttgart
13.-15. March 2012
Hannover Fair, Hannover
23.-27. April 2012
Clusterconference MicroTec Südwest, Stuttgart
14.-15. May 2012
Fig. 2: Discussion with the managing director of the AeroSpace Initiative
Saxony during Hannover Fair (2012)
International Engineering Fair MSV 2012, Brno
Fig. 3: The German ambassador at our booth during the MSV 2012 in Brno
Contact
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FACTS AND FIGURES
MicroNano-Broker.EU - industry and research come
together for the benefit of both
The IMN MacroNano® offers a wide range of technological services and outstanding opportunities for cooperation with
industrial partners and research institutes. To make collaboration between industry and science more efficient, the MicroNano-Broker.Eu acts as a “One-Stop-Shop“ for companies and research institutions in the field of micro- and nanotechnologies. The European competence platform provides a comprehensive overview of technologies and know-how also of the
IMN MacroNano® and guides you to the right contact persons.
MicroNano-Broker.EU
Our offers - your advantage:
•
The transfer of technology and research results into the market is promoted by the MicroNano-Broker.EU, which is funded by the EFRE-Fonds of Thuringia. The MicroNano-Broker.
EU brings together technology requests and offers in the
field of Micro- and Nanotechnologies. The MicroNano-Broker.EU acts as an international communication, cooperation,
and technology transfer platform in 4 languages. The involved partners are from 10 European countries. They have
developed a common internet-based European information
and know-how transfer portal of Micro- and Nanotechnologies. This portal may be used to find new partners from
industry or research institutions in order to build up international cooperation projects.
•
•
•
•
•
•
The aim of MicroNano-Broker.EU is to make information
available and to network scientific and technical information via this European Platform. It is also focused on the
pro-active acquisition of potential partners for specific areas in micro- and nanotechnologies. The portal’s innovative
approach is that the technical subjects are linked on an international level. At the same time, the companies and researchers in the participating regions are directly integrated.
Fig. 1: MicroNano-Broker.EU at European SME Conference in Stuttgart
•
Networking of users and suppliers of microsystems
technology, nanotechnology, ultra-precision, and innovative materials for R&D cooperation and technology
partnerships
Presentation of excellence in research, development
and production at national and international trade
fairs, conferences, and brokerage events
Training courses and workshops on current topics
Comprehensive research tool for companies and research institutions
User and product oriented database of expertise in
know-how, technologies, available special equipment
and laboratory infrastructure, services from R&D to serial production
Pioneering research topics from interdisciplinary basic
research to industry application
Market overview of key players, compendium of expertise
Career platform
Fig. 2: Presentation at the German
booth at BSV trade fair in Brno
Das IMN MacroNano® bietet Entwicklern, die nach Lösungen für ihre konkreten Fragestellungen suchen, eine exzellente Ausgangsbasis für wissenschaftliche Kooperationen. Um die Kooperation von Wirtschaft und Wissenschaft effektiver zu gestalten,
nutzen Sie bitte gerne den MicroNano-Broker.EU, der als „One-Stop-Shop“ den Technologietransfer des Instituts koordiniert.
Im KompetenzAtlas und auf der Online-Plattform werden die Technologien und Kompetenzen des IMN MacroNano® für Sie als
potenzielle Nutzer übersichtlich dargestellt. Er hilft bei der Suche nach den richtigen Ansprechpartnern.
Kontakt: www.micronano-broker.eu.
Contact
11
FACTS AND FIGURES
International Contacts and Cooperation
Internationale Kontakte
Peru
The first double degree master graduation „Werkstoffwissenschaft/ Ingenieria y Ciencias de los Materiales“ was accomplished in March 2013 together with the partner University Pontificia Universidad Catòlicva del Perù.
Poland
Prof. Ivo W. Rangelow (Dept. Micro- and Nanoelectronic
Systems) was awarded „Meritorious for the Faculty of Microsystem Electronics and Photonics“ and received the medal
of merit from the Faculty of Micro Systems Electronics and
Photonics of Wroclaw Technical University in March 2012
for his outstanding research in the field of nanoelectronics.
At the Wroclaw University of Technology and the research
institution EIT+ an innovation workshop under the direction
of the MicroNano-Broker.EU was realized in April 2011 to
improve the young researcher’s innovation potential.
China
Prof. Dr. Lei, the research group leader of the ZIK-group 3DNanostructuring was appointed deputy chair of the recently
inaugurated Herbert Gleitner Institute of Nanoscience (HGI)
in Nanjing/China. He will also chair one research group with
two to four associated professors.
Dr. Wu-lien Wei, the representative of Taipei Representative
Office in Germany and several delegates from Taipei visited
the institute in September 2012 (Fig. 1). Their main objective
was to learn about current activities in photovoltaics at the
IMN MacroNano®.
Norway
The department of Physics and Technology of the University
of Bergen and the Michelsen Centre for Industrial Measurement Science and Technology are active partners in the
project MicroNano-Broker.EU. In this framework the IMN
MacroNano® and the Norwegian partners co- organized
workshops with representatives from research institutions
and industry in Ilmenau and in Bergen, Norway
Japan
Under the direction of the Bavarian Cluster Nanotechnology the IMN MacroNano® together with some other German
universities participated at the 2nd German-Japanese Workshop on Nanoanalytics in Osaka, Japan, as well as at various
scientific workshops on Nanotechnology at the University
of Tokyo and in Kyoto in February 2011. The institute attended with an exhibition booth also at the “nanotech 2011”
in Tokyo.
During the return visit of Prof. Ota from Osaka University the
workshop “UD Ceramics” was organized in Ilmenau in March 2012, where a number of Thuringian micro- and nanotechnology companies and research institutions discussed
about innovative damping materials for nanoprecision applications.
In cooperation with the industry cluster “Optonet” the IMN
MacroNano® was hosting two business delegations from
Hamamatsu, Japan in January 2011 and also in September
2011.
France
About one dozen students are already using the opportunity to enrol in the joint German-French master program
Micro-mechatronics between Technische Universität Ilmenau and École Nationale Supérieure de Mécanique et des
Microtechniques de Besançon (ENSMM) which was initiated
by Prof. Martin Hoffmann. Graduated students can achieve
the grade „Diplôme d’Ingénieur de l’ENSMM“in addition to
the German master degree within one semester.
Fig. 1: Dr. Wu-lien Wei, the Representative of Taipei Representative Office
in Germany visits the ZMN (20. September 2012).
Der Aufbau guter internationaler Beziehungen auf dem Gebiet der Mikro- und Nanotechnologien gewinnt zunehmend an
Bedeutung: Forschung und Anwendungen überschreiten die nationalen Grenzen. Als Beispiele gelungener internationaler Zusammenarbeit seien genannt: Das Projekt MicroNano-Broker.EU, die Ausrichtung internationaler Workshops und Konferenzen,
die Kooperationsabkommen mit zahlreichen Einrichtungen, Gastprofessuren oder internationale Gäste im Institutskolloquium
(siehe folgende Seiten). Eine besondere Stellung nehmen landesübergreifende Studiengänge ein, etwa der Doppel-Master mit
der französischen Eliteuniversität ENSMM in Besançon oder der University Pontificia Universidad Catòlicva del Perù.
Contact
12
FACTS AND FIGURES
International Contacts and Cooperation
Internationale Kontakte
Austria
The workshop „Printed electronics – chances and risks for
SMEs“ was held in Erfurt in February 2011 with the key
speaker Prof. List from the University of Technology Graz,
Austria. He is also the head of the NTC Weiz. Lab visits and
discussions about future cooperation issues followed in Ilmenau.
Training workshops „Technology Brokerage and further
business development” for facilitation coaches from 10 European countries with support of the MicroNano-Broker.EU
were realized in Kapfenberg, Austria in May 2011.
Prof Peter Schaaf was invited as keynote speaker at the Austrian “Future Conference on Nanosciences and Nanotechnology 2011” in Graz.
Various international guests and delegations visited
the IMN MacroNano® in the reporting period:
Morocco
Based on the invitation of Prof. Gobsch (dept. Experimentalphysik I) and with the support of the VDI/VDE-IT- organisation a Moroccan delegation consisting of representatives
of research institutions and the ministry of education of science came to visit the on November 27th, 2012. Badr Ikken,
Directeur General des IRESEN (Institut de Recherche en Energie Solaire et Energies Nouvelles) discussed opportunities of
potential cooperations in research and education together
with several department chairs of the IMN MacroNano®.
India
Dr. Mailadil T. Sebastian, author of the book “Dielectric
Materials for Wireless Communication” from the National
Institute for Interdisciplinary Science & Technology (NIIST)
in Trivandrum visited the RF and Microwave Research Laboratory (Prof. Hein) and the Electronics Technology Labs
(Prof. Müller) and discussed common research interests on
microwave ceramic materials.
coatings: challenges and opportunities“ (CERAMAX), from
September 23 to 27, 2012. This workshop took place at the
Cockcroft Institute, STFC Daresbury Laboratory, Daresbury,
UK.
11th IUVSTA School on Lasers in Materials ScienceSLIMS
Prof. Schaaf also organized the 11th IUVSTA School on Lasers in Materials Science- SLIMS, 8-15 July 2012, Isola di S.
Servolo, Venice/Italy.
MicroMechanics Europe 2012 - MME
The international conference MicroMechanics Europe 2012
was organized under the leadership of Prof. Hoffmann in
September 2012. More than 100 participants from 21 countries followed the 75 research work presentations which
were given in short talks and poster presentations.
International conference on Ceramic Interconnect
and Ceramic Microsystems Technologies - CICMT
The International Microelectronics and Packaging Society
(IMAPS), the American Ceramics Society (ACerS) and IMN
MacroNano® co-organized the international conference on
Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT) in April 2012 in Erfurt. The general co-chair
Prof. Müller (dept. Electronics Technology) welcomed more
than 170 delegates who attended the conference program
with 92 presentations and 19 posters. The conference was
complemented by the third International MacroNano® Colloquium.
International Workshop „Energy and material efficiency by MNI – Approaches and Concepts”
The workshop Micro-Nano-Integration was organized in the
framework of the Thuringian Innovation Day and trade fair
in November 2011.
Organization of relevant International Conferences
and Workshops (excerpt)
67th IUVSTA WORKSHOP
Prof. Schaaf (dept. Materials for Electronics) was organizer
and chairman of “THE 67th IUVSTA WORKSHOP High temperature amorphous and nanostructured ceramic
Fig. 2: Delegates from Marocco (27. November 2012)
Contact
13
FACTS AND FIGURES
Invited Talks
Vorträge im Instituts-Kolloquium
The institute continuously invites international colleagues to present their research results in the framework of a series of invited talks. Usually, approaches and results of conjoint projects are shown as well as research topics of the
invited speaker with a direct relation to the foci of the IMN MacroNano®. If you are interested in detailed information about the topics and guest speakers, please contact the advisory committee (zmn@tu-ilmenau.de)
Prof. Dr. -Ing. habil. Jürgen Czarske
Technische Universität Dresden
„Smart-Laser-Doppler-Sensor für hochaufgelöste
Geschwindigkeits- und Distanzmessungen“
Prof. Dr. Wolfgang Mehr
Leibniz Institut für Innovative Mikroelektronik (IHP)
Frankfurt (Oder)
„Graphen- Transistoren”
MSc. Andrés Guerra
Pontificia Universidad Catolica del Peru
„Concentration quenching and thermal activation of the
luminiscence of Tb doped a-SiC:H and c-AIN thin films“
Prof. Dr. J. C. Rueda
„Synthesis of Thermo Commutable Hydrogels based on NIsopropylacrylamide and 2-Methyl-2oxazoline“
Dipl.-Phys. Martin Hermenau
Instritut für Photophysik
Technische Universität Dresden
„Degradation studies on small-molecular organic
photovoltaics“
Prof. Dr. Ludwig Schultz
Leibniz IFW Dresden
„Supraleitendes Schwebesystem für den spurgebundenen
urbanen Individualverkehr - die wundersame Welt der
Supraleiter”
PhD Ran Ji
SUSS MicroTec Lithography GmbH, Garching
„UV enhanced Substrate Conformal Imprints Lithography
(UV-SCIL) and its applications“
Dr. Mailadil T. Sebastian
NIIST-CSIR, Trivandrum / India
„Dielectric Materials for Wireless Communications“
Dr. Polina Kapitanova
University of Information Technologies, Mechanics and
Optics, St. Petersburg
„Optically-controllable magnetic metamaterials“
Dipl.-Ing. Mark Kielpinski
Institut für Photonische Technologien IPHT, Jena
„Absorbance Imaging“
Prof. Dr. Roland Weingärtner
„Rare earth doped wide bandgap semiconductors for light
emission applications“
Prof. Guangping Zhang
Shenyang National Laboratory for Materials Science (SYNL),
Chinese Academy of Sciences (CAS)
„Interface strengthening ability and plasticity stability of
metallic nanolayers“
Prof. M. D. Levi
Bar-Ilan University, Israel
„Electroadsorption of electrolytic ions in high surface area
nanoporous carbons studied by quartz crystal impedance
technique“
Contact
14
FACTS AND FIGURES
Center for Innovation Competence
Zentrum für Innovationskompetenz (ZIK)
The program „Center for Innovation Competence“ turns outstanding research approaches at universities and
research institutions in the New German areas into internationally renowned centers. Excellent and internationally
competitive research, as well as „innovation competence“ or the ability to transfer research findings to the economy, are essential for these centers, which should also act as a magnet for young scientists.
(Quotation from the BMBF-Website: www.unternehmen-region.de/en/350.php)
The foundation of the Center for Innovation Competence
“ZIK MacroNano®” in 2005 enabled the implemention of
new research topics at the Institute of Micro- and Nanotechnologies (IMN). The first phase of ZIK began with two
Junior Research Groups, Functionalised Peripherics and
Microfluidics & Biosensors, and was joined two years later
by the Junior Research Group Mikrokunststoffformen. Since
their inception, these research groups have now been permanently integrated into the University structure and two
former research group leaders are now full professors at
the University.
In 2009 the BMBF initiated a second funding phase for established ZIKs with a focus on sustainability and long term
science strategy. Within this program, ZIK MacroNano® was
able to set up the Junior Research Group 3D Nanostructuring, in 2012 and to further enhance the technological
infrastructure. Federal funding was accompanied by Thuringian Government support of approximately 1.8 Million
Euro which enabled the installation of three machines for
nanoprocessing and analytics. Dr. Yong Lei, a distinguished
scientist in the area of nano-structuring, was appointed the
junior research group leader and fills simultaneously a tenure-track position as an Associated Professor in the Faculty
of Mathematics and Natural Sciences.
Junior Research Group: 3D Nanostructuring
Due to their ever decreasing size, nano-devices are allowing
researchers to exploit in more completeness the technological capabilities of electronic, magnetic, mechanical, biological and other systems. This is important as such systems
have a great deal of impact in energy conversion, controlling
pollution, producing food, and improving human health. In
order to better exploit the nanometer-scale phenomena in
these nano-devices, one should have a better understanding
of the electronic, magnetic, and photonic interactions that
occur on this size scale. Therefore, the realization of different
three-dimensional nanostructures on suitable substrates to
better understand these nanoscale interactions and to better
exploit the nano-device properties is not only a challenging
topic, but also very important. The Junior Research Group
3D-Nanostructuring is responsible for developing efficient
and low cost processes to design and fabricate exactly such
three-dimensional (3D) nanostructures and nano-devices.
UTAM surface patterning technique provides an approach
to prepare large-scale ordered surface nano-patterns. Combined with advanced equipment (e.g., atomic layer deposition, physical vapor deposition and electrochemical deposition), various sophisticated 3D nano-devices are fabricated
and integrated, including gas sensors, flexible electronics,
high performance super-capacitors and solar cells. Appropriate simulation methods are utilized for better understanding and optimizing of the properties of nano-devices. Most
importantly, the properties of nano-devices are systematically investigated and their fabrication processes are well
engineered for potential commercial products. After only
one year of the project running, the group has successfully begun developing new 3D nano-structuring methods and
has already published several scientific publications, including papers accepted in high impact international journals.
Fig. 1: Configurations of core/shell nanotube arrays for supercapacitors.
Das BMBF wird das ZIK MacroNano® für weitere fünf Jahre fördern. Die TU Ilmenau richtete mit Hilfe dieser Fördermittel eine
weitere Nachwuchsforschergruppe ein. Sie wird sich mit der 3D-Nanostrukturierung befassen, d. h. mit der effizienten Erzeugung von dreidimensional ausgedehnten Nanostrukturen in Mikrosystemen aus unterschiedlichen Materialien. Der neue
Gruppenleiter ist als W2-Professor an die TU berufen worden und wird das neue Forschungsgebiet auch in der Lehre nachhaltig
etablieren.
Contact
15
FACTS AND FIGURES
Collaborative Research Center SFB 622
„Nanopositioning and Nanomeasuring Machines“
Spokesman:
Prof. Dr.-Ing. habil. Eberhard Manske
Institute of Process Measurement and Sensor Technology
http://www.tu-ilmenau.de/sfb622/ Funding: German Research Foundation (DFG)
The collaborative research center (SFB) 622 “Nanopositioning and Nanomeasuring Machines” at the Technische
Universität Ilmenau has been supported by the German Research Foundation (DFG) since 2002 (Fig. 1).
The current sponsorship period comprises the period from
2009 to 2013.
Nanopositioning and nanomeasuring technology is a primary research area at the Technische Universität Ilmenau. The
collaborative research center 622 is integrated into two of
the six research clusters at the university:
•
•
Nanoengineering and
Precision technology and precision metrology.
The enormous potential of cutting-edge technologies, such
as nanotechnology and high-end optical technology, represents one of the primary foundations for mastering the
economic and social challenges of the 21st century. For these technologies, speed and efficiency are increasingly determined by the availability of high-performance devices.
The production and even moreso the analysis of larger
and larger objects with nano-sized structures and properties - from semiconductor and microsystems technology
to precision optics and bioanalysis – require new concepts
in three-dimensional nanopositioning and nanomeasuring
technology. While 2-D positioning and 2.5-D measuring
technology have been sufficient up to now for the semiconductor industry, additional traceable positioning and nanoprecision measurements in the third dimension have been
gaining significance due to the increasingly complex spatial
structures in micro-systems technology, precision optics and
semiconductor metrology.
Therefore, the goal of SFB 622 for the next years involves the
formulation of the scientific fundamentals for a technological
apparatus allowing the positioning, contact, measurement,
analysis, modification and manipulation of three-dimensional objects with a volume range up to 450 x 450 x 80mm³
with nanometre precision. In order to achieve this goal, sophisticated theoretical and experimental investigations must
be performed concerning innovative components and the
entire behaviour of nanomeasuring machines (Fig. 2).
Contact
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Fig. 1a: Close-up of the Nanopositioning and Nanomeasuring Machine
Fig. 1b: Nanopositioning and Nanomeasuring Machine
Fig. 2: Networking of projects in the Collaborative Research Center 622
FACTS AND FIGURES
Sonderforschungsbereich SFB 622
„Nanopositionier- und Nanomessmaschinen“
The nationally and internationally published results of
SFB 622 to date, regarding nanopositioning and nanomeasuring systems with a measuring volume of 200 x 200 x 5
mm³ and a reproducibility of 1 nm, were the driving force
for the intensive, globally relevant research work in the area
of 3-D nanopositioning and nanomeasuring technology.
SFB 622 is able to fulfil its leading technological role by the
consistent analysis and implementation of low-error metrological and device-oriented fundamentals for simultaneous
measurement and active control of the guide deviations, as
well as for the usage of innovative high-performance optical measurement and probe systems. Successful handling of
the demanding, complex tasks has become possible not only
through the competency and the tight integration of the
scientists within the SFB itself, but also through the intensive
scientific contacts of the SFB members with national and
international research institutes.
The Center’s ambitious goals can only be met through optimal cooperation among many different subject areas, including metrology, measurement technology, nanoanalytics,
drive technology, mechanics, optics, electronics, design,
materials science, control engineering and signal processing.
•
Solution of metrological problems in the micro- and
nano-ranges;
Metrological services:
•
•
•
•
Measurement of micro- and nano-objects and structures with various contact and non-contact sensors
Probing methods: focus sensors, white-light microscopy, metrological atomic force microscopy, profiling sensor, 3-D microsensor
Measurement of microelectronics structures as well as
structures formed using nanoimprint technology
Measurement of precision optics (aspheres, free-form
surfaces) with the help of fast surface scans (5 mm/s)
with nanometer uncertainty
Contact:
SFB 622
Capabilities of SFB 622:
P.O. Box 10 05 65
98684 Ilmenau
•
•
Expertise in the development of new and adapted measurement, probe and positioning systems for microand nanotechnologies;
Integration of customer-specific contact sensors and
micromachining tools into the Nanopositioning and
Nanomeasuring Machine;
Phone
+49 3677 69-5051
Fax
+49 3677 69-5052
SFB622@tu-ilmenau.de
http://www.tu-ilmenau.de/sfb622/
Fig. 3: Spokesman Prof. Manske at the Nanopositioning and Nanomeasuring Machine
Seit 2002 besteht an der TU Ilmenau der Sonderforschungsbereich 622 „Nanopositionier- und Nanomessmaschinen“.
Aufgabe ist es, technische, technologische und analytische Operationen mit höchster Präzision und Dynamik auszuführen.
Die großen Herausforderungen bestehen darin, dass die Nanopositionier- und Nanomessmaschinen Forderungen nach immer
größeren Bewegungsbereichen mit extremen Genauigkeiten und hohen Positioniergeschwindigkeiten genügen müssen (Messvolumina von 350 mm x 350 mm x 5 bis 50 mm). Außerdem sind zu entwickelnde neuartige Antastsysteme und Nanotools
(Bearbeitungstools) in die Nanopositionier- und Nanomessmaschinen einzubinden.
Contact
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FACTS AND FIGURES
Triangle of Expertise Optical Microsystems
Kompetenzdreieck OptiMi
Scientific goals
Optical microsystems combine optical functionality with
sensors and actuators on the microscale, but the systems
design has always to pay attention to the fields of application.This requires highly interdisciplinary cooperation.
Within the triangle of expertise, the Ilmenau partners are
responsible for the systems integration aspects as well as for
the micromechanical component development.
On one hand, optical microsystems allow for compact
devices in production technology: a new mirror module
Is developed that allows phase correction in high power laser systems, e.g. in laser welding or cutting. Combining at
least three interferometers with low-power lasers and beam
deflecting mirrors results in a microtracker system that can
follow a moving tool center point efficiently by trilateration.
On the other hand, light is an efficient tool investigating the
behavior of biological system. Within the subproject Optoflutronics microfluidic systems, especially cultivation systems
for cells are equipped with a multi-wavelength sensor platform. The unification of complex microoptics and biocompatible microfluidics in a single component is still today a
challenging task..
Interdisciplinary research
As the chosen demonstrators are complex systems, new
ways of cooperation are proven. At first, the strength of the
three sites in Jena, Erfurt and Ilmenau are combined. But
also within the IMN MacroNano® the expertise of several
research groups is involved in this project: Technologically oriented partners design and fabricate different types of
mirrors, interferometers and microfluidic systems. Further
groups combine these components into systems and develop systems software for control. And finally, partners set
up test environments for demonstrators with their unique
expertise in applications. Here, the strong interdisciplinary
structure of the IMN MacroNano® is a key to success for the
projects.
The second phase started in the beginning of 2011 and an
industrial advisory board has been established that follows
the progress in research and gives helpful support in defining relevant up-to-date goals. It is planned to continue
the most relevant tasks in industrial joint research projects
which will be defined in the last year of the project in 2013.
Project funding
in the framework
program „Microsystems“
Federal Ministry of
Education and Research
FKZ: 16SV3700
Project period:
01.07.2008 to 31.03.2011
Extension filed
Total amount:
ca. 7.8 mil. Euro
Project coordinator:
Friedrich Schiller University Jena
Prof. Dr. Andreas Tünnermann
Project partners:
• Friedrich Schiller University Jena
• Ilmenau University of Technology
• CiS Research Institute for Micro Sensors and Photovoltaics GmbH , Erfurt
Strategic partnership:
• Institute of Photonic Technology (IPHT Jena)
• Application Centrer of Micro-Optical Systems (amos)
• Center for Advanced Microsystems and NanoOptics
(CMN)
• Important national co-operation partners include several Max Planck Institutes, such as the MPI for Quantum
Optics in Munich, MPI for Applied Computer Science
(Karlsruhe Institute of Technology), MPI for Gravitational Physics (Albert Einstein Institute) in Hannover and
the Max Planck Working Group Optics, Information and
Photonics Erlangen-Nuremberg
• Multiple institutes of the Fraunhofer-Society are also
important partners in research: the Fraunhofer Institute
for Applied Optics and Precision Engineering (IOF, Jena),
the Fraunhofer Institute for Physical Measurement Techniques (IPM, Freiburg) and the Fraunhofer Institute for
Applied Solid State Physics (IAF, Freiburg)
Contact at Technische Universität Ilmenau:
Prof. Dr. Martin Hoffmann
Institute of Micro- und Nanotechnologies
TU Ilmenau
Gustav-Kirchhoff-Str. 7
D-98693 Ilmenau
Germany
martin.hoffmann@tu-ilmenau.de
Phone: +49 3677 69-3402
Fax:
+49 3677 69-3499
Ziel des Projektes OPTIMI ist der Aufbau von gemeinsamen Technologieplattformen und insgesamt fünf Demonstrator-Systemen, die Anwendungen in den Bereichen Produktion/Maschinenbau, Lebenswissenschaften und Umwelt adressieren. Im
Demonstrator D2 werden neue optische Mikrosysteme entwickelt, die in einzigartiger Weise mechanische, optische, fluidische
und elektronische Funktionen vereinigen.
Contact
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FACTS AND FIGURES
Optical Microsystems Technology (OMITEC) Graduate Research School
The cooperative research project „Kompetenzdreieck Optische Mikrosysteme (OptiMi)“ (“triangle of expertise in optical microsystems”) which is funded within the framework
of the “Programm Spitzenforschung und Innovation in den
neuen Ländern (PROSIN)” by the German “Bundesministerium für Bildung und Forschung (BMBF)” is promoting fundamental and applied research in the field of photonics and
microsystems technologies. A further goal is to cope with
the shortage in highly qualified employees which is already
affecting industry in the fields and which is considered as
the major challenge for future development. To this end the
Thüringer Ministerium für Bildung, Wissenschaft und Kunst
(TMBWK)“ provided funding for the establishment of the
graduate schools „Optical Microsystems Technologies“ and
“Green Photonics” which are organized jointly by the Friedrich-Schiller-University, Jena and Technische Universität Ilmenau. These graduate schools form the common academic
home for numerous graduate students working in research
projects in the fields of microsystems technologies, photonics as well as optical engineering in the participating institutions. A limited number of PhD grants funded through the
graduate schools as well as other institutions (DAAD, DFG
etc. ) helps to integrated additional graduate students into
the programs. The invitation of distinguished lecturers and
research scientists from around the world as well as the organization of seminars and workshops in close cooperation
with industry helps to internationally promote Thuringia
as the heart of German optics and microsystems industry.
One of the specific highlights within the course framework
of the Graduate Schools is the annual course on “Modellierung Optischer Abbildungen”. In this application oriented
course on the fundamentals of optics design we bring together members of the graduate schools with participants
form industry. During an intense week of learning the theoretical background of optical design and modeling as well
as cooperating when solving design problems using optical
design software, the participants directly learn about the
practical challenges of optical systems design in industry.
The international network in the field of optical microsystems has been significantly extended by the foundation
and successful establishment of the llmenau student chapter of the Optical Society of America. Members of the chapter have been engaged in regional as well as national and
international activities in the field of optics.
Fig. 1: Training course: „Ilmenauer Lehrgang Modellierung optischer
Abbildungen“.
Fig. 2: Visit of Prof. Jannick Rolland, University of Rochester and Dr. Kevin Thompson, Optical Research Partners, Tucson, USA
Die Graduiertenschule OMITEC richtet sich an Doktoranden, die auf dem Gebiet der optischen Mikrosysteme forschen. Speziell
angepasste Lehrveranstaltungen, Vorträge und Workshops sind nicht nur auf die Vermittlung von Fachwissen und Soft Skills
ausgelegt, sondern bieten gleichzeitig eine Plattform für einen gemeinsamen Ideen- und Erfahrungsaustausch. Die Graduiertenschule trägt somit dem großen Engagement Rechnung, mit dem die Doktoranden zum Erfolg des IMN MacroNano®
beitragen.
Contact
19
FACTS AND FIGURES
Biomimicking the brain - towards 3D Neuronal Network Dynamics (3DNeuroN)
3DNeuroN is an international collaborative research project funded by the European Commission’s Future and Emerging
Technologies (FET) scheme.
Since July 1st 2012 the Technische Universität Ilmenau, namely the Institute of Biomedical Engineering and Informatics
(BMTI), and the Center for Micro- and Nanotechnologies
(ZMN) have been cooperating with the Fraunhofer Institute
for Digital Media Technology (IDMT) and international partners such as the Tampere University of Technology (Finland),
University of Tampere, and the Swiss Federal Institute of Technology Zurich.
During the project period of 2.5 years an in-vitro model of
a three-dimensional neuronal network will be developed.
The cells will be stimulated and closely monitored during
their evolution in order to measure the model response and
changes in the neuronal network topology over time. Our
aim is to get a deep understanding of the functionality and
information processing of neuronal structures. The Biosignal
Processing Group of the BMTI, and the ZMN are developing a
new kind of sensor to measure if and how the neuronal cells
are growing, how they are communicating, and how they are
contacting each other.
Furthermore, we will stimulate the novel 2D and 3D neuronal
networks as well as layered structures using modeled human
auditory sensory inputs. Subsequently we measure and model the responses and changes of the network topology and
dynamics. Thus, we aim to provide in vitro prove for the concept of transition from neuronal 2D cultures to 3D controlled
multi-cell-type neuronal structures. These structures actually
mimic the in-vivo 3D development of neuronal dynamics.
Our in-vitro 3D Multi Electrode Array (MEA) will provide a
new level of elaboration. In addition to biological and clinical outcomes, the basic knowledge on the organization and
functioning of the 3D neuronal cell networks have considerable potential for applications in the discipline of artificial neuronal networks, and will result in BIO-ICT convergence.
Fig. 1: Layout of a commercial 2D-MEA with cultivated neuronal cells
based on Multichannelsystems
Fig. 2: Model of a biocompatible 3D-MEA sensor structure which will be
used as 10 x 10 x 8 sensor
Contact at Technische Universität Ilmenau
Phone
+49 3677 69-3387
Prof. Dr. Andreas Schober
Fax
+49 3677 69-3379
P.O. Box 10 05 65
andreas.schober@tu-ilmenau.de
98684 Ilmenau
http://www.tu-ilmenau.de/nbs/
Contact
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FACTS AND FIGURES
OpMiSen
Optical Microsystems for Hyperspectral Sensing
Spokesman:
Prof. Dr. rer. nat. habil. Stefan Sinzinger
Institute of Micro- and Nanotechnologies
http://www.tu-ilmenau.de/to/
Hyperspectral imaging systems combine the high spatial resolution of diffraction limited optical imaging systems with
the high spectral resolution of optical spectrometers. Such
detailed knowledge about the local distribution of the spectral properties of specimen is interesting for a huge variety of
applications e.g. in life and medical sciences, environmental
and food monitoring or production and quality control. In
order to record this multidimensional information consisting
of spatial and spectral information on the areal 2D CCD or
CMOS detector normally used in camera systems multiplexing
schemes are of great significance.
In our collaborative research project with partners from the
Friedrich-Schiller Universität Jena (Institut für Angewandte
Physik, Dr. Kley) and the Albert-Ludwigs-Universität Freiburg
(Gisela and Erwin Sick Chair of Micro-optics, Prof. Zappe), we
investigate innovative hardware and software solutions for
hyperspectral imaging based on optical microsystems and active microoptics. By bringing together experts in micro- and
nanooptics, active microoptics, micromechanics and image
processing we are performing research on compact innovative spatially resolving hyperspectral sensors.
For the implementation of prototype systems for compact
and partially integrated hyperspectral imaging systems we
Funding: BMBF FKZ: 16SV5575K
pursue two fundamental concepts. On the one hand we explore the fabrication, actuation and integration of locally resolved nanooptical spectral filters. In combination with highly
resolved CCD sensors and a micromechanical actuation these
filters are capable of providing a means to discriminate a large
number on different wavelengths.
Alternatively tunable microoptical elements may be used to
manipulate the local position of the image formation. To this
end we design so-called hyperchromatic optical systems, i.e.
systems which exhibit a large (axial) chromatic error. In combination with tunable lenses and spatial filters such as pinhole
arrays, such hyperchromatic lenses can be used for spectrally
resolved imaging. We investigate tunable optical elements based on membrane lenses as well as freeform optical elements
[1] M. Hillenbrand, B. Mitschunas, Chr. Wenzel, A. Grewe, X. Ma, P. Feßer, M. Bichra, S.
Sinzinger, “Hybrid Hyperchromats for Chromatic Confocal Sensor Systems” Advanced
Optical Technologies Advanced Optical Technologies. 3, S. 187-194 (2012).
[2] A. Grewe, M. Hillenbrand, S. Sinzinger, „Bildgebende hyperspektrale Sensorik unter
Einsatz verstimmbarer Optiken“, Photonik, 1/2013, 38-41.
[3] A. Grewe, M. Hillenbrand, S. Sinzinger, “Adaptive Confocal approach to hyperspectral
imaging”, EOS Annual Meeting, Aberdeen, 25.-28.9. 2012.
[4] M.Hillenbrand, A. Grewe, M. Bichra, B. Mitschunas, R. Kirner, R. Weiß, S. Sinzinger,
(invited talk) „Chromatic information coding in optical systems for hyperspectral imaging
and chromatic confocal sensing“, SPIE Conference on “Optical Systems Design”, Barcelona,
2012.
Fig. 1: Schematic platform of the microsystem for hyperspectral sensor technology
Contact:
Phone
+49 3677 69-2490
Fax
+49 3677 69-1281
P.O. Box 10 05 65
stefan.sinzinger@tu-ilmenau.de
98684 Ilmenau
http://www.tu-ilmenau.de/to/
Contact
21
FACTS AND FIGURES
DFG Research Unit FOR 1522 MUSIK
Multiphysical Synthesis and
Integration of Complex RF Circuits
Spokesman:
Prof. Dr. rer. nat. habil. Matthias Hein
http://www.tu-ilmenau.de/musik/ The key constituents of micro-electromechanical system
(MEMS) are mechanically flexible devices on the micrometre
scale, where the mechanical motions can be excited and detected by electrical signals. The research unit MUSIK aims at
including the basic functions of MEMS at high frequencies,
such as amplifying, controlling, oscillating, and switching,
into the design of complex radio frequency (RF) circuits.
Through the combination of micro-electronic and micro-mechanic properties at device, circuit, and system levels, a novel
circuit technology “RF micromechatronics” is made accessible. As a consequence, the research focus on RF-MEMS is
steered from the technology and single-device levels to an
application-oriented system level, e.g., for mobile communications.
Funding: German Research Foundation (DFG)
simulations and tests crossing multiple abstraction levels;
micro-mechanic and micro-electronic integration in SiCer
substrate technology; demonstration of the approach in
terms of selected subsystems.
The research unit MUSIK consist of eight projects carried
out at the RF & Microwave Research Laboratory (HMT), the
Chair for Electronic Circuits and Systems (ESS), the Chair for
Micromechanical Systems (MMS) and the Chair for Electronics Technology (ET) at Technische Universität Ilmenau; at
the Chair for Technical Electronics at the Friedrich-AlexanderUniversity Erlangen-Nuremberg; and at the IMMS Ilmenau.
Resulting from the co-operation of researchers from different
scientific disciplines, a core approach of MUSIK is the multiphysical modelling and simulation, which explicitly accounts
for the coupled electric and mechanic properties of MEMS in
relation to their mathematical description as well as the physically different effects of electronic and mechanic functions,
including their unwanted and wanted parasictics. This fundamental approach is accompanied by a substrate technology tailored to the simultaneous implementation of microelectronic and micro-mechanic devices, namely by merging
silicon and ceramic technologies into a novel compound substrate (SiCer), originally investigated at the IMN MicroNano®
at Technische Universität Ilmenau.
Fig. 1: Schematic overview on the multi-physical and level-overlapping design
and analysis process in RF-MEMS-based systems.
The following objectives are jointly addressed, investigated
in complementary sub-projects, and verified respectively demonstrated jointly: Model and system design and system
analysis of complex RF circuits; integrated micro-electronicmicro-electromechanic RF components and circuits; system
simulation and integration analysis of non-ideal RF MEMS;
Contact
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Contact:
FOR MUSIK
P.O. Box 10 05 65
98684 Ilmenau
Phone
+49 3677 69-2831
Fax
+49 3677 69-1586
musik@tu-ilmenau.de
http://www.tu-ilmenau.de/musik/
FACTS AND FIGURES
Bactocat
Micro reaction technologies for the discovery of new synthesis strategies by coupling of bacteria-secondary metabolism and nano-catalysis
Spokesman:
Prof. Dr. rer. nat. habil. Michael Köhler
http://www.tu-ilmenau.de/mrt/
Funding: BMBF FKZ: 031A161A
Bacteria play a key role in industrial biotechnology for the
synthesis of pharmaceutical active substances and effect materials. Aim of the project BactoCat is the screening for new
bacteria which can be used for innovative synthesis strategies
combining bacteria biosynthesis and nano-catalysis.
Heavy-metal-resistant Streptomyces strains were isolated
from uranium mining area soil, showing high tolerances
against toxic metals such as nickel and cadmium [1]. These
Streptomyces strains possess intense antibiosis against pathogenic bacteria and fungi as a result of the heavy metal
stimulated secondary metabolite production [2]. The use of
their remarkable biosynthetic potential in combination with
nano-catalysis gain access to innovative strategies for new
synthesis pathways.
Heavy-metal-resistant strains seem to be perfectly suited because of their expected tolerances against catalytic nano-materials. A systematic investigation of the complex parameter
fields demand for a suited screening technique capable to
face the necessary high throughput requirements. Dropletbased screening routines are of great advantage for this purpose. New monitoring strategies such as particle based surface-enhanced raman scattering as well as integrated fluidic
systems will be developed and used for the screening.
[1] Schmidt A. et al: Heavy metal resistance to the extreme: Streptomyces strains from a
former uranium mining area. Chemie der Erde 2009, 69, S2, 35-44.
[2] Haferburg G et al: Arousing sleeping genes: shifts in secondary metabolism of metal
tolerant actinobacteria under conditions of heavy metal stress.
Biometals 2009, 22, 225-234.
Fig. 1: Proceeding strategy for the investigation of the biosynthetic potential
of heavy metal resistant bacteria combined with nano-catalysis.
Contact:
P.O. Box 10 05 65
98684 Ilmenau
Phone
+49 3677 69-3629
Fax
+49 3677 69-3173
michael.koehler@tu-ilmenau.de
http://www.tu-ilmenau.de/mrt/
Contact
23
FACTS AND FIGURES
Scientific Projects
Wissenschaftliche Projekte
European Union (EU)
3DNeuroN
„Biomimiking the brain - towards 3D neuronal network
dynamics”
2012 - 2014
FKZ: 296590
INTASENSE
“Integrated air quality sensor for energy efficient enviroment
control”
2012 - 2014
FKZ: 285037
NANOHEAT
“MultidomaiN plAtform for iNtegrated MOre-tHan-MoorE/
Beyond CMOS systems charActerisation & diagnosTics”
2012 - 2015
FKZ: 318625
Federal Funding DFG
AdaScan
„Realisierung eines integrierten Mikroauges aus elektrisch
verstimmbaren Membran-Mikrolinsen und -prismen sowie
variablen Blenden und Filtern“
2012 - 2014
FKZ: HO 2284/1-2; SI 573/7-2
DINTOR
„Grundlagen der Darstellung und Messung dynamischer
Drehmomente“
2012 - 2014
FKZ: FR 2779/2-1
DEBRATOR 2
„Wissenschaftliche Grundlagen zur Darstellung und
Messung kleiner Drehmomente – Entwicklung einer
Drehmoment-Normalmesseinrichtung für kleine
Drehmomente mit reduzierte Messunsicherheit“
2012 - 2014
FKZ: TH 845/3-1
HAUT
„Hochtemperatur-Funktionalisierung von adaptiven
Oberflächen-Mikrostrukturen – Haifischhaut
(Strömungsoptimierung) und Selbstreinigung“
2010 - 2011
FKZ: SCHA 632/9-2
InN-Transistorstrukuren
„Untersuchungen von InN-basierenden Transistorstrukturen“
2008 - 2011
FKZ: SCHA 435/25-1, SCHW 729/9-1
Ionische Flüssigkeiten
„Temperature dependence of the surface electronic
structure, solvation properties of simple atoms and ions
Contact
24
and irradiation induced degradation of Ionic Liquids studied
by electron spectroscopy and density functional
theory”
2008 - 2012
FKZ: KR 2228/5-1, KR 2228/5-2
KuNiFETs
„FETs aus nichtpolaren kubischen III-Nitrid Nanostrukturen“
2008 - 2012
FKZ: PE 624/7-1, SCHW 729/7-1
MAXCoat
„Synthese und Eigenschaften von MAX-Funktionsschichten“
2011 - 2013
FKZ: SCHA 632/10-2
MOSFETs
„Experimentelle und theoretische Untersuchung der
Wirkungsweise von Silizium-Nanodraht-MOSFETs“
2009 - 2011
FKZ: SCHW 729/10-1
MOSFETs
„Experimentelle und theoretische Untersuchung der
Wirkungsweise von Silizium-Nanodraht-MOSFETs“
2012 - 2013
FKZ: SCHW 729/10-2
MUSIK - Forschergruppe 1522
„Multiphysikalische Synthese und Integration komplexer
Hochfrequenz-Schaltungen“
2012 - 2015
FKZ: HE 3642/6-1; SO 1032/1-1 TP1; HE 3642/5-1 TP3; HO
2284/3-1 TP6; MU 3171/1-1 TP7
Nanoskalige OFETs
„Nanoskalige OFETs für die Anwendung in Schaltkreisen“
2011 - 2013
FKZ: SCHE 645/9-1
OFET´s
„Charakterisierung und Optimierung von Kontakten in
OFETs: Spektroskopie und elektrische Bauelementefunktion“
2008 - 2011
FKZ: SCHE 645/5-1
SFB 622 Nanopositionierung
A2: Nanomesstechnik
A5: Nanopositioniersysteme großer Bewegungsbe
reiche
A11: Dynamische Nanopositionierung für kleine
Bewegungsbereiche
A12: Multifunktionale Nanoanalytik
B2: Nanokonstruktion
B5: Tribologische Eigenschaften
B7: Nanotools für Nanoposionier- und Nanomessmaschinen
C6: Modularer Entwurf modellbasierter
Regelungen
2009 – 2013
FACTS AND FIGURES
Scientific Projects
Stress-OFETs
„Hysterese und Reaktionen auf Stress in organischen
Feldeffekt-Bauelementen“
2010 - 2013
FKZ: SCHE 645/7-1
Syntheseleistungen durch Kopplungmikroorganismischer
und Metallnanopartikel-katalysierter Prozesse in der
Mikroreaktionstechnik“
2012 - 2015
FKZ: 031A161A
ThermInO
”Tuning of the thermoelectric properties of Inx(M)2-xO3 –
nanoparticles”
2009 - 2012
FKZ: KR 2228/6-1
BalticSea
„Programm „Auf- und Ausbau innovativer FuE-Netzwerke
mit Partnern in Ostseeanrainerstaaten
Projekt: Innovationsnetzwerk Mikro-Nano-Integration“
2012 - 2013
FKZ: 01DS12024
THz-Emitter
„Intensive wellenleitergebundene Terrahertz-Strahlenquelle
auf InN-Basis“
2010 - 2013
FKZ: SCHW 729/13-1
TuCoLens
„Abbildende optische Systeme mit unabhängig verstimmbaren Membran-Mikrolinsen (-arrays) auf Diamant/AlN
Basis“
2008 - 2011
FKZ: HO 2284/1-1, SI 573/7-1
VopSys
„Verallgemeinerte optische Abbildungssysteme“
2012 - 2015
FKZ: SI 573/9-1
CarboSens
„Verbundprojekt: Integration massengedruckter Carbon
Nanotube Sensorelemente in Mikrosysteme - CarboSens Teilvorhaben: Chemische Sensorik“
2010 - 2013
FKZ: 16SV5326
CorDew
„Korrosionsfestes LTCC-basiertes Taupunktsensorsystem für
in-line Betrieb und hohe Gastemperaturen“ - Teilprojekt:
„Korrosions- und temperaturfeste Funktions- und
Passivierungsschichten
auf LTCC/Termische Modellierung“
2008 - 2011
FKZ: KF2007402WM8
3D Cellprint
„3D Cellprint; Biologische Verifizierung für 3D Cellprint“
2011 - 2012
FKZ: KF2731201MD0
EOS
„Entwicklung innovativer polymerer Solarzellen für
energieautonome Systeme. Teilprojekt: Photonische
und morphologische Materialcharakterisierung und
Testsolarzellen“
2008 - 2012
FKZ: 03X3516F
3DNanoDevice
„Zentrum für Innovationskompetenz - Nachwuchsgruppe:
Drei-Dimensionale Nanostrukturierung zur Realisierung von
Hochleistungs-Nano-Bauelementen“
2012 - 2016
FKZ: 03Z1MN11
ForMaT 2
„ARCH Type Infrarotsensoren: Verwertungsstrategien
für ARCH Type-Sensoren im Bereich bildgebender
Infrarotanwendungen“
2009 - 2011
FKZ: 03FO2272 (Format)
AIMS in OPV
„Analytik mittels Imaging Methoden und Simulationen in
der OPV“
2012 - 2016
FKZ: 03EK3502
Geräteausstattung ZIK II
„Zentrum für Innovationskompetenz MacroNano: Spezifische Geräteausstattung für die
3D-Nanostrukturierung“
2010 - 2012
FKZ: 03Z1MI1
Federal Funding (BMBF or BMWi)
AINTEN
„Entwicklung einer autarken elektrischen Stromquelle
für Sensor und Datentransfer, die sich aus körpereigenen
Energien des Menschen versorgt“
2009 - 2012
FKZ: 16SV3853
BactoCat
„Basistechnologien Kooperationsprojekt: Neue
Contact
IMAS
„Entwicklung eines mehrfach verwendbaren, auf einem
Glasträger integrierten, parallelen Elektrodenarrays für
die Zellkontaktierung in einem Mikrobioreaktor für die
Medikamentenentwicklung - Multi-CellCon“
2008 - 2011
FKZ: 01GG0723
25
FACTS AND FIGURES
Scientific Projects
IPMC-Aktuatoren
„Verbund vorstrukturierter Polymeraktoren zu
Bewegungssystemen und Festlegung funktioneller
Parameter“
2009 - 2011
FKZ: 13N10279
ISWSensors VIP
„Validierung des Innovationspotenzials wissenschaftlicher
Forschung Interferometrische Stehende-Wellen-Sensoren“
2012 - 2015
FKZ:16V0235
KD OptiMi
„Kompetenzdreieck: Optische Mikrosysteme – optofluidische
und optomechanische Mikrosysteme“
2008 - 2011
FKZ: 01GG0723
KD OptiMi20
„Zweite Phase Kompetenzdreieck: Optische Mikrosysteme optofluidische und optomechanische Mikrosysteme“
2011 - 2013
FKZ: 16SV5473
KERAMIS II
„Keramische Mikrowellenschaltkreise für die
Satellitenkommunikation“
2006 - 2011
FKZ: 50YB0622
Keramis-GEO
„Entwicklung, Aufbau und Test weltraumtauglicher
Technologiedemonstratoren für die On-Orbit-Verfikation auf
dem H2SAT - Kommunikationssatelliten“
2011 - 2013
FKZ: 50YB1112
MicroNano Integration
„Innovationsforum: Mikro-Nano-Integration“
2010 - 2011
FKZ: 01HI1003
N-SENS
„Miniaturisiertes Messsystem zur spektroskopischen
Stickstoffanalytik im angeregten Gaszustand“
2010 - 2011
FKZ: KF 2007405DFO
O2-Sens
„Niedrigenergie-Sensor zum Nachweis von Sauerstoff in
Verpackungen mittels RFID - O2-SENS Teilvorhaben: Erforschung Passiver Sensorkonzepte“
2011 - 2013
FKZ: 16SV5277
OK-Tech
„Das Projekt OK-tech hat zum Ziel eine On-OrbitVerifikation an Bord des TET-1-LEO-Satelliten
durchzuführen und den Reifegrad der keramischen
Mikrowellenschaltungstechnologie für Satellitennutzlasten
zu erhöhen“
2012 - 2013
FKZ: 50 YB 1222
OpMihySen
„Optische Mikrosysteme für ultrakompakte hyperspektrale
Sensorik
Teilprojekt: Systemintegration und Anwendung“
2011 - 2014
FKZ: 16SV5575K
OXIvent
„Bedarfsgerechte Sauerstoffabgabe in der klinischen
Ventilation
Teilprojekt: Patientennahe IR-Atemgasanalyse mit
optofluidischer Messzelle“
2011 - 2014
FKZ: 16SV5606
Nano-III-V-PIN´s
„NanO-III-V-PINS´s: Nanoskalige II-V/Silizium
Heterostrukturen für hocheffiziente Solarzelllen
Teilprojekt: Nanoskalige III-V-Strukturen auf
Siliziumsubstraten“
2010 - 2014
FKZ: 03SF0404A
Pharm Test
„Systementwicklung zur Simulation von Halbwertszeiten
von Testsubstanzen/Pharmazeutika in der dreidimensionalen
Zellkultur; Entwicklung und Systemintegration von
3D-Zellkultivierungssystemen in ein modulares,
gradientenfähiges Pumpsystem“
2011 - 2013
FKZ: KF2731202AK0
NaMiFlu
„Nanotechnologie basiertes Mikrosystem zum insituFluidmonitoring
Teilvorhaben: Mikro-Nano-Interfaces für Hochdruckküvetten
mit IR-Sensorik“
2011 - 2014
FKZ: 16SV5360
PPP
„Polymer Photovoltaics Processing - Untersuchungen einer
industriellen Prozess- und Produktionstechnologie für
polymere Solarzellen - Teilvorhaben: Materialdefinition,
Charakterisierung und Optimierung der Solarmodule“
2008 - 2012
FKZ: 13N9843
Contact
26
NanoMiPu
„Virtuelle Membranaktoren auf Nanostrukturen in MikroPumpen“
2010 - 2013
FKZ: 16SV5368
FACTS AND FIGURES
Scientific Projects
SESeFA
„Sortierstation auf Basis des Electrowettings für SegmentedFlow-Anwendungen“
2010 - 2011
FKZ: 16SV5058
Green-Photonics
„OptiMi 2020 - Graduate Research School “Green
Photonics””
2011 - 2013
FKZ: B514-10062
SINOMICS
„Skalenübergreifende Integration von NanodrahtHeterostrukturen mit Optischen Mikrosystemen
für Innovative Chemische Sensoren
Teilprojekt: Freiraumoptische Systemintegration zur
Gestaltung des Mikro-Nano-Interfaces für chemische
Sensoren auf der Basis von Nanodraht-Heterostrukturen“
2011 - 2014
FKZ: 16SV5384
Forschungsinfrastruktur
„OptiMi 2020 - Ausbau der Forschungsinfrastruktur“
2011 - 2012
FKZ: B715-10064
SONNTEX
„Entwicklung flexibler Polymersolarzellen für
Funktionstextilien“- Teilprojekt: „Photophysikalische
Materialcharakterisierung und der Solarzellen“
2008 - 2011
FKZ: 03X3518G
WK Basis
„Wachstumskern BASIS - BioAnalytics and Surfaces for
Integrations in Systems
Teilprojekt: Strukturierung und Modifikation von Oberflächen
sowie Realisation einer Bio-Mikrosystem-Testumgebung für
hydrogelbeschichtete Trägerelemente“
2011 - 2014
FKZ: 03WKCB01O
ZEKUSE
„Extrahierung von Stoffen in einer 3D Zellkultur auf der Basis
von MatriGridstrukturen“
2012 - 2014
FKZ: KF2731203MD2
Federal Funding Thuringia
Ausstattung 3DNanoDevice
„Spezifische IT-Ausstattung für die zweite Förderphase des
Zentrums für Innovationskompetenz“
2012
FKZ: B515-11052
BioMacroNano
„BioMacroNano 2020 - Nano-Analytik zur Untersuchung
dreidimensionaler Nanostrukturen“
2010 - 2012
FKZ: B715-10009
EU Broker
„European Micro Nano Broker Platform”
2010 - 2013
FKZ: TNA VI-1/2010
Contact
KerFunMat
Keramische Funktionsmaterialien für integrierte Mehrlagenbauelemente“ProExzellenz”
2009 - 2012
FKZ: B514-06016
NanoZellkulturen
„Biotechnisches Multiskalenengineering am Beispiel der
Mikroreaktiorenentwicklung zur Modellierung der
NanoNische für spezialisierte Zellkultursysteme“
2010 - 2013
FKZ: B714-09064
MBU
„Entwicklung eines kompakten und einfachen
GaN-basierenden pH-Sensorsystems zur fetalen
Mikroblutuntersuchung“
2009 - 2012
FKZ: 2008 FE 9088
NanoBatt
„Steigerung der Energie- und Materialeffizienz
elektrochemischer Energiespeicher durch Nanostrukturierung
von Werkstoffen und Oberflächen“
2012 - 2013
TNA VII-1/2012
OMITEC
Graduate Research School - Optical Microsystem
Technologies “ProExzellenz”
2009 - 2014
FKZ: PE 104-1-1
PiezoMEMS
„Entwicklung von hochpräzisen piezoelektrischen
Akuatorsystemen und Integration mit der Si-MEMSTechnologie“
2010 - 2012
FKZ: 2009 FE 9100
PRIMOS
„Piezoelektrische Resonatoren aus integrierbaren MEMS für
HF-Referenz-Oszillator-Anwendungen“
2010 - 2012
FKZ: 16SV5326
27
FACTS AND FIGURES
Scientific Projects
SiCeram
„Entwicklung eines vertikal integrierten 3D-Verbundsubstrates aus Silizium und Keramik als Plattform für das
Bauelemente-Packing“
2009 - 2012
FKZ: B514-09026
SENCERA
„Neuartige Sensor-/Aktormodule auf Basis von MehrebenenKeramik“
2010 - 2012
FKZ: 2009 FE 9016
Siliziumtiefenätzanlage
„Förderung der Infrastruktur in Forschung und Entwicklung
„Siliziumtiefenätzanlage““
2012 - 2014
FKZ: 11039-715
SITAW
„Neuartige 3D-Taster und Wägezellen auf der Basis von
Silizium-Messchips“
2012 - 2014
FKZ: 2012 FE 9019
USENEMS
„Ultrasensitive Materialien für Nanoelektromechanische
Systeme“
2010 – 2013
KKZ: B714-10048
XPS-Analytik
„Photoelektronenspektroskopie mit lateraler Auflösung und
Tiefenprofilierung“
2012 - 2013
FKZ: 12021-715
Zwanzig20
„Unterstützung der Förderinitiative Zwanzig20 des Bundes“
2012 - 2013
FKZ: 12057-514
Industry
EASY-A-IHP
„Enabler for Ambient Services and Systems“
2008 - 2011
IHP
EASY-A-IMST
„Enabler for Ambient Services and Systems“
2008 - 2011
IMST
LED-Leuchten
„Aktive/Adaptive Optik“
2008 - 2011
OSRAM
OSRAM
„Fluidic Self-Assembly of Area lighting LED Arrays”
2012 - 2015
FKZ: 7700046871
Qualitative Untersuchung des
Verhaltens von Ge Substraten
2012 - 2013
AZUR SPACE
Foundation
In-situ
„In-situ Untersuchung der Oberflächeneigenschaften von
nichtpolarem Indiumnitrid und Galliumnitrid“
2010 - 2012
FKZ: 21-0563-2.8/273/1
Carl-Zeiss-Stiftung
Federal Funding DAAD
IPID
„Autonome Mikrosysteme für die Biosensorik“
2010 – 2013
DAAD
Contact
28
FACTS AND FIGURES
Project Statistics
Projektstatistiken
Revenues in research projects (2008 - 2012)
Funding of research projects (2006 - 2012)
Trusts
1%
Federal Funding (DFG)
6%
13,1 Mio.€
European Union 5%
10,1 Mio. €
7,1 Mio.€
6 Mio.€
Federal Funding (BMBF or BMWI)
60%
Federal Funding (DAAD)
1%
6,5 Mio.€
Industry
4%
Thuringia
25%
2008
2009
2010
2011
2012
Fig. 1: The revenues from research projects doubled during the last five years from 6 mil.
EUR in 2008 up to 13 mil. EUR in 2012
Fig. 2: Most important are the revenues from federal funding BMBF (>25 mil. EUR, DFG
>2.4 mil. EUR, EU >1.9 mil. EUR) and Thuringia (>10.7 mil. EUR)
Die Drittmitteleinnahmen aus den wissenschaftlichen Projekten haben sich in den vergangenen fünf Jahren weiterhin positiv
entwickelt. Die gesamt Fördersumme konnte von 6 Mio. EUR in 2008 auf rund 13 Mio. EUR erhöht werden. Wichtigste Fördermittelgeber sind der Bund mit mehr als 25 Mio. EUR (Anteil 60%), das Land Thüringen (mehr als 10,7 Mio. EUR, Anteil rund
25 %) und die Deutsche Forschungsgemeinschaft (DFG, mehr als 2,4 Mio. EUR, Anteil rund 6 %).
Application of Revenues (2008 - 2012)
Material Expenses; 8%
Employees in projects (2008 - 2012)
Subcontracts; 8%
Others; 3%
80
60
40
40
Students; 1%
Technical Staff; 5%
Fig. 3: The largest positions are assigned to scientific staff (> 15,7 mil. EUR), investments
(> 14 mil. EUR) and material expenses (> 3 mil. EUR)
Members of
Technical
Staff (left
columns)
52
50
Scientific Staff; 40%
73
69
68
70
Investments; 36%
30
20
10
8
10
10
10
9
Scientists
(right
columns)
0
2008
2009
2010
2011
2012
Fig. 4: The scientists´ headcout in projects increased from 40 to 73 during the last five
years.
Auf der Ausgabenseite dominieren die Personalkosten für wissenschaftliche Mitarbeiter, technisches Personal und studentische Hilfskräfte. Die Anzahl der durch Drittmittel finanzierten wissenschaftlichen Mitarbeiter konnte von 40 (2008) auf
73 (2012) erhöht werden. Ferner werden derzeit 9 Techniker und Laboranten aus Drittmitteln bezahlt (Vollzeitäquivalente).
Für investive Maßnahmen konnten mehr als 14 Mio. EUR aus Drittmitteln bereitgestellt werden. Dies resultiert in einem umfangreichen und modern ausgestatteten Technologiepark, der in den Laboren des ZMN verfügbar ist.
Contact
29
FACTS AND FIGURES
Center for Micro- and Nanotechnologies
Zentrum für Mikro- und Nanotechnologien (ZMN)
The Center for Micro- and Nanotechnologies (ZMN) acts as an operational unit of the Technische Universität Ilmenau and offers the technological platforms for basic and applied research in the field of micro- and nanotechnologies.
Overall, the center comprises more than 2.500 m² of laboratory space, including more than 1180 m² of clean rooms
in different classes and a class S1 lab for handling biological samples.
The ZMN started operation in 2002 as an interdisciplinary
infrastructural unit hosting the equipment, clean rooms and
technologies for the nine founding research groups from
three different faculties. Soon after, the doors of ZMN were
opened to the entire university by converting the status to
an operational unit which was accompanied by the founding
of the interdisciplinary Institute of Micro- and Nanotechnologies MacroNano®. At the 10th anniversary in March 2012
we were pleased to say that the ZMN made a very successful
development with regard to the installed technological and
analytical scientific equipment and the management of its
operation. Today, one can find technologies for structuring,
deposition and surface treatment for a broad material spectrum (e.g. silicon, group III based semiconductors, metals,
oxides, glasses, ceramics and polymers) and high-end analytical instruments with a resolution on the scale of single atoms.
The success story of the ZMN is closely linked to the research
efforts of the IMN MacroNano® departments which define
the scientific profile as well as the future strategy. Research
without barriers is promoted by the spatial closeness of and
the ease of access to different technologies within the Feynman building. The many bi- and multilateral research cooperations within the IMN MacroNano® are an evidence of
the intensive scientific exchange in a creative surrounding.
In addition to the possibilities of joint and contract research, ZMN’s infrastructure is also offered to intere-
Fig. 1: Feynmanbuilding (left) and
Meitnerbuilding (right), the home
of the ZMN
Fig. 2: Wet etching of silicon wafers
inside the clean room area
sted partners, such as companies or research institutions.
During the reporting period 2011 / 2012 we were able to
improve our technology portfolio by the acquisition of new
equipment and the installation of new process technologies. In addition the ZMN has been given the responsibility
to operate the cleanrooms in the Meitnerbuilding in 2012.
Cleanroom Labs:
Polymer Electronics
Layer Measurement
Optical and E-Beam Lithography
Wet Chemical Processes
PVD / RIE
High Temperature Processes
Assembly and Packaging Technologies I
Electrical Characterisation
MBE and Surface Analytic Lab
Analytics of the Solid State
Backend Technologies
Non-cleanroom Labs:
Assembly and Packaging Technologies II
Fluidics and Bionics Lab
Electron Microscopy
Optical Measurement
Nanomeasurement Technology
AFM / FIB
X-Ray Analytics
Printed Circuit Boards
Antenna Measurement
Microwave Lab
Mobile Radio Lab
Wafer Prober
Optical Spectroscopy and Photovoltaics
Central Ellipsometry Labs
Experimental Physics
Das Zentrum für Mikro- und Nanotechnologien (ZMN) ist eine Betriebseinheit der TU Ilmenau. Es steht als Technologieplattform sowohl für die grundlagenorientierte, als auch für die angewandte Forschung im Bereich der Mikro- und Nanotechnologien zur Verfügung. Das ZMN verfügt über mehr als 2500 m² Laborfläche mit ca. 1180 m² Reinraumfläche in unterschiedlichen
Klassen sowie einem S1-Labor für die Forschung an biologischen Materialien.
Contact
30
FACTS AND FIGURES
Center for Micro- and Nanotechnologies
Zentrum für Mikro- und Nanotechnologien (ZMN)
Thin Film Preparation and Testing
Materials Testing
Plastics Lab
Ultra Precision Processing
New equipment in 2011 / 2012
Nanoanalytics for the characterization of 3D-nanostructures
• Atomic force microscopy system for multi-functional
surface characterization and scanning probe
manipulation Cypher/MFP 3D (Asylum)
• Cross-beam workstation for sample preparation and
3D-material analysis equipped with energy disperse
X-ray diffraction and electron backscatter diffraction
Auriga 60 (Zeiss)
• Ultra high-resolution nanofocus X-ray inspection
system for inspecting micro- and nanosystems with
full 3D computed tomography nanome|x 180 (General
Electrics)
• Atomic force microscopy extension Nanosurf for white
light interference profilometer Wyko NT 9300 (Veeco)
• Combined scanning probe and confocal Raman
imaging and spectroscopy system with three laser
sources NTEGRA (NT-MDT)
Optical characterization
• Stray light measurement system for characterizing of
optical surfaces and devices with reflective and transmission mode AlbratrossTT (Fraunhofer IOF)
• 3D shape measurement system with physical RayTracing for optical surfaces with high resolution RaySense
(Photonic Metrology)
• Computer controlled supercontinuum white light laser
sources with high spectral power density and tunable
wavelength filter for hyper spectral imaging applications SuperK Extreme/Select (NKT Photonics)
Thin film deposition
• Atomic layer deposition with thermal reactor and six
precursor lines Sunale R-150 (Picosun)
• Physical vapor deposition system with electron beam
evaporation source and low temperature evaporation source for polymer evaporation PVD225 (KJLC)
Assembly and Packaging Technologies
• Sintering furnace for low temperature cofired ceramics
PEO 603 (ATV)
• Experimental electroplating system for surface finish
of silver conductors on low temperature cofired ceramic substrates with nickel/palladium/gold Compacta L
(Lemmen)
Nanoengineering
• Dual beam microscope with extended etching and deposition capabilities for engineering of nanostructures
with integrated scanning probe module Helios Nanolab
(FEI)
Ongoing acquisitions (to be available during 2013):
• X-ray Photoelectron Spectroscopy system for chemical
analysis
• Deep Reactive Ion Etching system for micro- and nanostructures
Fig. 3: Daily routines in the clean
room
Fig. 5: MOCVD under operation
Fig. 4: High resolution nanolithography at the centers new AFM
Fig. 6: On-site discussion of results
among different scientists
For further information about the Center for Micro- and Nanotechnologies, please consult our homepage:
Für weitergehende Informationen nutzen Sie bitte unsere Homepage:
http://www.tu-ilmenau.de/zmn (German)
Contact
http://www.tu-ilmenau.de/en/zmn (English)
31
MEMBERS OF THE INSTITUTE
Research Topics
Fig. 1: Surface analytical system
Contact
Fig. 2: Ordered array of nano porous gold nanoparticles for plasmonics
Internet
Contact
32
Contents
Inhalt
Facts and Figures ........................................................................................................ 2
Members of the Institute .........................................................................................32
Advanced Electromagnetics Automotive Engineering Biomechatronics Biomedical Engineering Biosignal Processing Chemistry Design of Mechatronic Actuators Electrochemistry and Electroplating Electronic Measurement Research Lab Electronics Technology Electrothermal Energy Conversion Engineering Design Experimental Physics I Experimental Physics II Inorganic-Nonmetallic Materials Machine Elements Materials for Electronics and Electrical Engineering Mechatronics Metallic Materials and Composites Micro- and Nanoelectronic Systems Micromechanical Systems Nano-Biosystems Technology Nanotechnology Optical Engineering Optical Design, Simulation and Modelling of Optical Systems Photovoltaics Physical Chemistry / Microreaction Technology Plastics Technology Power Electronics and Control in Electrical Enginering Precision Engineering Precision Metrology Process Metrology Production Technology RF and Microwave Research Lab Solid State Electronics Surface Physics of Functional Nanostructures System Analysis Technical Physics I / Surface Physics Technical Physics II / Polymer Physics Theoretical Physics I Theoretical Physics II / Computational Physics Three-Dimensional Nanostructuring Internet
Contact
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Advanced Electromagnetics
Theoretische Elektrotechnik
Research
Topics
Research Topics
•
Ultra-sensitive superconductive sensors with quantum accuracy
•
Single-flux-quantum electronic circuits
•
Lorentz-force and eddy-current techniques for material characterization
•
Solution of inverse problems in electromagnetics
•
Capacitive sensors
•
Analysis of non-linear systems
Department
The Department of Advanced Electromagnetics has a focus
on theory and computation of electromagnetic fields as
well as simulation of heterogeneous systems with the aim of
utilising physical principles in innovative applications. Currently, emphasis is put on various fields of electromagnetic
sensor technology.
Research
Research in the department is devoted to such physical relationships and mathematical approaches which can be utilised suitably for solving practical problems and tasks in the
professional practice of electrical engineering. This naturally
implies a close connection to applications and implementations. For a better practical utilization of the theoretical findings, the department operates four research laboratories.
In particular, experimental investigations are carried out in
the cryoelectronics laboratory with measurement equipment for superconductive sensors and circuits, in the magnetics laboratory for material characterization, the Lorentz
force laboratory of a DFG Research Training Group, and in
the lab for capacitive sensor systems. In addition, equipment
for signal characterization is available. The infrastructure
for research and education also includes a computer pool
for field computation, for simulation, and design of sensor
structures and microelectronic circuits. The department
maintains national and international research relationships .
Education
The department provides lectures in theory and application
of the electromagnetic field in the academic basic education
of the BS degree courses. The courses of the BS education,
as well as the main course “General and Theoretical Electrical Engineering“ of the MSc degree courses, aim at an
enhancement of fundamental knowledge with the intention that students are well-prepared for a quick and successful transition into positions of their further career. For this,
courses in the specialization phase introduce topics such as
electromagnetic CAD, numerical computation of electromagnetic fields, basics of modeling and simulation, optimization, non-linear systems, and superconductive microelectronics. The training of skills and abilities for scientific work in
electrical engineering, as well as for solving interdisciplinary
problems, completes this educational phase. The final phase
is dedicated to the training of research work both in projects and teams. For this, the students are integrated, at an
early stage, into research groups and thus become familiar
with topics of fundamental research and R&D cooperation
with industrial partners. A special activity is devoted to the
academic training of PhD students in a Research Training
Group. Furthermore, the department is as a partner within
the “German Engineering Faculty MEI-TU-Ilmenau“ and is
responsible for the scientific management of an academic
network with several universities from South-Eastern Europe. For school classes, experimental courses are provided.
Contact
Contact
Fig. 2: Fodel parallel lines. Line width/space 30 μm/30 μm (l. – green/
REM;
r. –cofired/REM)
Fakultät
für Elektrotechnik und
Hannes Töpfer
Informationstechnik
TU Ilmenau
Internet
Internet
34
Telefon +49 3677 69-2630
Helmholtzplatz 2
Telefax +49 3677 69-1152
Helmholtzbau, Raum 2545
hannes.toepfer@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/it-tet
Automotive Engineering
Kraftfahrzeugtechnik
Research Topics
Research
Topics
•
Brake and chassis engineering (Experiments and Analysis)
•
Alternative powertrains
•
The human-machine interface in the vehicle
•
Active safety optimization through progress in driver assistance systems
•
Studying particle flows
•
Optimization of powertrain efficiency
•
Development design, engineering, production and functional testing of stationary and mobile measuring and
test equipment
Services offered
• Brake tests: The performance of wheel brakes, brake
noise studies, the fine dust emission of brake systems,
vibration and dynamic properties of brake components,
tribology and material studies
• Performance of transmission and drivetrain elements
• Noise emission from drive systems
• Studies on vehicle dynamics
• Theoretical analysis: FEM structural analysis, MKS system analysis and system simulation (brake systems,
hydraulic/mechatronic systems and drivetrain)
• Virtual reality studies
• Consulting
• CFD calculations: analysing particle flows
• Experimental analysis of flow processes in vehicle systems
• Designing alternative powertrains
• Development design, production and installation of
component test rigs and special test vehicles
• Development of sensors and measuring systems
Special equipment
• Test Center for Chassis and Brake Engineering
• Drivetrain Test Field (Axle Distortion Test Field)
• Servohydraulic Test Stand (Hydropulser)
• Component/actuator test stands (chassis):
• ABS/ESP control equipment
• Steering test stand
• Life cycle tests, sealing
• Hardware in the loop (HiL)
• Coating compression and shearing test rig
• Brake systems
• Pedal operating system (brake robot)
• Flow channel
• Tyre test equipment
• PIV system
• 3-D laser scanning vibrometer
• Digital high-speed camera
• Real-time systems for measuring and controlling, hardware in the loop
• Signal recording
• Measuring devices for vehicle dynamics
• Vibration and acoustic measuring systems
• Infrared camera
• Engine tester
• Axle measuring system
Contact
Contact
REM;
r. –cofired/REM)
Fakultät
für Maschinenbau
Klaus Augsburg
TU Ilmenau
Internet
Telefon +49 3677 69-3842
Gustav-Kirchhoff-Platz 2
Telefax +49 3677 69-3840
Newtonbau, Raum 2220
klaus.augsburg@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/kft
35
Biomechatronics
Biomechatronik
Research Topics
•
Mechatronics in biomedical engineering (Bio-MEMS):
Prevention, diagnostics, therapy, rehabilitation
Assistance systems for special groups of users with restricted mobility, e.g. elderly and handicapped people
•
Robotics: non-conventional motion systems
•
Cell handling in microfluidic systems
•
Bionics focussed on microsystems:
Actuators
Sensors incl. adaptorics
Material
•
Biocompatible design
Department
The Department of Biomechatronics was founded in 2002
as the first chair of biomechatronics in Germany and is still
the only one. Biomechatronics is the development and improvement of mechatronic systems under support of application of bio-medical knowledge. On one hand specific
mechatronic products and methods have to be adapted to
applications for, on and in biological systems and human
beings, focussing on their demands – mechatronics for Biomedical Engineering. On the other hand mechatronic design
is “biologically inspired”. This process is based on principles
of biomimetically oriented methods of engineering (“Technical Biology” and “Bionics”). In conclusion – biomechatronics is not an opposing strategy to existing high technology;
it complements and expands the method repertoire of engineering sciences.
Research
BioMEMS housing cell cultures in micro systems is an expanding field of research. Analysis of the human auditive system
with focus on prevention of hearing loss is a biomedical core
theme.
The dominating research topic is the analysis of living and
the design of technical motion systems, in which the size
spectrum of biological paragons from small to large organis-
ms is considered. Great interest is directed towards kinematics and dynamics of animals and human beings, the latter
as well as an object of human medicine. Their locomotion
including the use of the trunk, the gripping, and manipulation is studied with focus on prevention, diagnostics, and
therapy, as well as an example of biological inspiration for
adaptive mechanisms in the field of robotics. Robotic strategies are used for e.g. touristic and senior assistance systems
with a focus on human-machine-interfaces.
Education
Expertise for research and teaching in cooperation
with other departments at the TU Ilmenau and external
specialists:
• Basic medical education (anatomy and physiology)
• Bionics of construction and material, with a focus on micro systems and robots
• Compliant, biologically inspired mechanisms
• Ecological Models / environment analytics
• Ergonomic design of Human-Machine-Interfaces (HMI)
• Mechatronics for Bio-Medical Engineering
• Robotics
• Technical Biology
Contact
Univ.-Prof. Dipl.-Ing. Dr. med. habil.
Fakultät für Maschinenbau
Hartmut Witte
TU Ilmenau
Internet
36
Telefon +49 3677 69-2456
Max-Planck-Ring 12
Telefax +49 3677 69-1280
Haus F, Raum 3190
hartmut.witte@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/biomechatronik
Biomedical Engineering
Biomedizinische Technik
Research Topics
•
Medical technology for ophthalmology
Technology, signal and image processing for fundus imaging, microcirculation diagnostics
and retinal vessel analysis
Metabolic mapping of the retina
Neuro-ophthalmology
•
Biomedical measurement and stimulation technologies
•
Biomedical data analysis, modeling and inverse methods
Analysis, forward and inverse modeling of bioelectric and biomagnetic data
Investigation of active and passive bioelectric and biomagnetic phenomena
Numerical computation of bioelectric and biomagnetic fields
•
Medical imaging and radiological equipment
Department
The Technische Universität Ilmenau has a long and
successful tradition in the field of Biomedical Engineering. The Institute of Electromedical and Radiological
Engineering was established in 1953 and introduced the first
University education program of Biomedical Engineering in
Europe. Today, the Institute of Biomedical Engineering and
Informatics offers a Bachelor and Master Degree program in
Biomedical Engineering, as well as a comprehensive PhD
program.
Research
The group has extensive experience in development of dry
biomedical electrodes and medical electronics. In combination these technologies allow for multichannel recording
of bioelectric signals without the need for application of
electrode pastes and thus enabling instantaneous measurements. We develop algorithms for biomedical signal analysis, including on-line signal processing for brain-computerinterfaces. Our technologies enable the decomposition of
very complex, multidimensional data for artifact detection,
sparse signal representation and parameterization of multivariate data in neuroscience.
We develop imaging technologies for magnetic nanoparticles, which enable the quantitative determination
of the distribution of the particles in-vivo from magnetic
measurements. Targeted structures can also be localized
with the technology. The technology enables promising
applications in the diagnosis and monitoring of different diseases, e.g. cancer.
High resolution electromagnetic finite element modeling for
neuroscientific applications is another research topic. From
an electro- and/or magnetoencephalogram of a patient the
electric brain activity is reconstructed on the basis of such
models. This technique can be used to decompose spatiotemporal brain activity patterns, localize brain activity and
discover connectivity networks.
Education
The group provides courses in the fields of (selection):
•
Biomedical Measurement and Instrumentation
•
Bioelectromagnetism
•
Radiological equipment and radiation protection
•
Imaging systems and processing in medicine
Contact
Fakultät für Informatik und
Jens Haueisen
Automatisierung
TU Ilmenau
Internet
Telefon +49 3677 69-2860
Telefax +49 3677 69-1311
Bionikgebäude, Raum 112
jens.haueisen@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/bmti
37
Biosignal Processing
Biosignalverarbeitung
Research Topics
•
New methods of dynamic space-time-frequency in medical engineering (multidimensional signals)
•
Biosignal processing (ECG, EEG, electromyography-EMG) in medical metrology
•
Clinical information systems and quality assurance
•
Extremely rapid image processing (CMOS sensors, FPGA porting)
•
Objective diagnostics of psychical and neurological diseases
•
Contact-less energy-autarkic implantable or wearable sensors
•
Medical electronics for extremely high input impedance, capacitive sensing
•
MEMS for in-vitro measurement in 3D
•
3D-image processing with high accuracy and extreme short time
Department
The department of Biosignal Processing deals with research
and development of medical sensors and electronics, develops new biosignal and image processing methods and
tools for process modelling in medical information systems
for more than 20 years. It is a member of the Institute for
Biomedical Engineering and Informatics (BMTI) and of the
Institute of Micro- and Nanotechnologies (IMN) at the Technische Universität Ilmenau. In numerous research projects
it cooperates with experts across technological and methodical borders in micro-technology, integrated electronics,
biomechanics, nanobiology, neurology, cardiology, ophthalmology and audiology. The results of this research and development are applied in industry for biomedical engineering,
automotive and media technology.
Research
Every link of the measurement chain is a focus of our research and development: New energy-autarkic implantable sensors are developed for contactless measurement of
pressure (eye, heart), for optical non-invasive measurement
(fetal Spo2), for wearable electrodes and capacitive sensors
(EKG/HRV, EMG, Breathing). New electronic devices are developed for medical instrumentation and amplification with
extremely high input impedance, full-band amplifiers, and
very fast signal and image processing (CMOS/FPGA, DSP).
New methods are developed for decomposition and/or separation in multimodal (EEG, ECG, EMG, EOG, breathing,
video, skin conductance, temperature) and multidimensional signals in time-frequency-space-shift. Innovative approaches for diagnosis and therapy by neuro-implants are
developed (cochlea implant, new audiology technologies).
New techniques for process modelling in information systems are designed.
Education
Our students receive a broad basic education in engineering and natural sciences, anatomy, physiology and biomedical engineering. Following this, the students spezialize, in
the Masters Program, in one (or more) of five directions:
ophthalmology, radiology, assist systems, biomagnetism,
electrical devices. The study time is strictly connected to
practical work in the 7th semester as well as to laboratory
lectures. Students optionally take part in research projects,
where they can obtain knowledge and experience in complex problems over an extended period of time.
Contact
Peter Husar
Automatisierung
TU Ilmenau
Internet
38
Telefon +49 3677 69-2863
Telefax +49 3677 69-1311
Bionikgebäude, Raum 108
gabi.hey@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/bsv
Chemistry
Chemie
Research Topics
• Fullerenes and carbon-nanotubes
Production of fullerenes and carbon nano tubes, studies on their formation
Preparation of catalysts for production of aligned carbon nanotubes
Exploration of colloidal fullerene solutions for medical applications
Polymerisation of fullerenes for organic photovoltaics
• Electrochemistry
Preparation and analysis of fullerene derivatives
Analysis of formation and degradation mechanisms of fullerene derivates
Aligned carbon nanotubes as sensor materials
Electrochemical impedance measurements for detection of biomolecules
• Gas sensors and gas analytics to characterise volatile organic compounds
Carbon nanotubes (CNTs) are the interesting, new members
of the carbon family, offering unique mechanical and electronic properties combined with chemical stability. Since
their discovery, much experimental and theoretical research
has been directed toward their production, purification,
mechanical and electronic properties, and electrical conductivity. Considering the importance of CNTs in the fields
of nanoscience and nanotechnology, our research interest
is focused on the study of CNT synthesis and growth mechanisms upon thermal chemical vapour deposition, and
their electrochemical properties. The functionalization of
CNTs, through a chemical attachment of either molecules
or functional groups to their sidewalls, is an effective way
to improve their solubility and to enhance their physical properties that make them of potentially useful for technological applications ranging from nanoelectronics, sensors and
electrochemical devices to composite materials.
The department of chemistry, in collaboration with other
academic and industrial partners, is involved in production
of new carbon compounds and nanomaterials via functionalization of either CNTs (single- and multi-walled) or fullerenes and their potential application in different fields.
The scientific goal, is to gain a better understanding of the
dependence of the chemical properties of the carbon materials on the extent and the type of functionalization. Specifically, the purpose of our research work is to establish a
controlled way for the modification of the electrochemical
properties of CNT and fullerenes based on the type and the
degree of their functionalization.
To accomplish the aim of the research work, carbon nanomaterials with better designed parameters are produced,
functionalized and used further for the construction of new
devices.
Services offered
• Production of carbon nano structures and derivatives
• Electrochemical explorations
• Chemical analytics by means of AAS, HPLC, GC/MS,
MALDI-TOF, IR, Raman, NMR
• MALDI-TOF analysis of macromolecular substances
(protein analysis)
• Synthesis chemistry
Special equipment
• Electrochemistry (cyclic voltammetry, electrochemical
impedance spectroscopy)
• Fullerene and nano tube generators
• MALDI-TOF: Measurement of MALDI-TOF spectra of organic and inorganic substances
• AAS, HPLC, GC-MS (gas chromatograph mass spectrometer), IR, Raman, NMR
Contact
apl. Prof. Dr. rer. nat. habil.
Fakultät für Mathematik und
Uwe Ritter
Naturwissenschaften
TU Ilmenau
Internet
Telefon +49 3677 69-3603
Weimarer Straße 25
Telefax +49 3677 69-3605
Curiebau, Raum 208
uwe.ritter@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/chemie
39
Design of Mechatronic Actuators
Entwurf mechatronischer Antriebe
Research Topics
•
Design of integrated magnetic direct drives
•
Magnetic measuring techniques
•
Simulation- and design software for electromagnetic systems
•
New drive concepts to be integrated
•
Development methodology, procedural model (VDI guideline No. 2206)
•
Integrated software engineering
•
Notation beyond the domain limits
•
Electromagnetic drive engineering and microactuators
Department
The department works in the field of magnetic energy converters, especially with integrated direct drive technology,
on the therefor needed modelling and simulation, on the
design of extremely fast acting or low power solenoids, as
well as on magnetic metrology.
Education
The education is closely related to the department of Mechatronics and pursues the target to impart knowledge
about the special challenges of mechatronic products based
on integration, heterogeneity and complexity.
The department has the requirement to teach the needed
theoretical background as well as practical orientated capabilities. In the courses Drive Technology and Electrical Motors and Actuators, physical principles, technical properties
and applications of state-of-the-art direct drive technology
are explained and consolidated by calculations and practical
labs. The course Electromagnets shows the efficient design
procedure of electromagnetic energy converters, exemplarily in current research projects with the automotive and
industrial automation industry, which are to be reproduced
by the students themselves. In project courses and Diploma,
Master‘s and Bachelor‘s theses, the students are involved in
research and development work.
Research
On the one hand, the department‘s research focuses on establishing prerequisites for the model based design of actuators working close to the limits of physics. For this aim the
software tool SESAM, which was developed at the department, is subject to continuous improvement. On the other
hand, new actuators are designed and realised in numerous
industry projects. In certain aspects, their performance lies
far beyond the state of the art.
Therefore, examples include solenoids for low power pneumatic valves, fast acting solenoids for automotive applications or magnetic bearings for rotatory high speed BLDC
drive sections.
In addition to magnetic design, electronic development and
micro processor programming with the goal of highest integration is done. Furthermore the field of magnetic metrology is covered in a joint research project (MagHyst) with the
STZ Mechatronik Ilmenau.
Contact
Priv.-Doz. Dr.-Ing. habil.
Tom Ströhla
TU Ilmenau
Internet
40
Telefon +49 3677 69-2448
Max-Planck-Ring 12
Telefax +49 3677 69-1801
Haus F, Raum 4120
tom.stroehla@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/mechatronik
Electrochemistry and Electroplating
Elektrochemie und Galvanotechnik
Research Topics
• Fundamental and applied electrochemistry
• Electrochemical preparation and characterization of functional coatings with tailored properties
• Electrochemical process technology (e.g. in situ monitoring of process parameters, novel plating technolo gies)
• Electrochemical storage and conversion of energy (batteries, fuel cells, electrolysers)
• Ionic liquids as novel reactive media for electrochemical processes
• Numerical simulation of electrochemical processes
• Electrochemical sensors
• Magneto-electrochemistry
Special equipment
Services offered
•
Evaluation and optimization of electrochemical pro-
•
Characterization of layers (e.g. thickness, compositi-
•
Particle characterization (size, zeta potential)
•
Lab scale plating line
•
Characterization of batteries, fuel cells and electroly-
•
Layer characterization (e.g. optical microscopy, XRF,
cesses
•
on, hardness, wear resistance, corrosion behavior)
crystal microbalance, ion chromatography)
sers
•
Chemical and electrochemical measuring techniques
(e.g. potentiostats, impedance analyzers, quartz
internal stress, micro hardness, wear resistance)
Electrochemical characterizations and preparations
•
Corrosion test cabinet
in inert gas atmosphere (argon filled glove box,
•
Particle characterisation (zetasizer, acoustosizer)
1 ppm O2, 1 ppm H2O)
•
Gloveboxes with integrated electrochemical measuring facilities
•
Vibrating sample magnetometer
•
Multi-channel battery tester
Contact
Contact
Contact
apl. Prof. Dr.-Ing. habil.
Fakultät für Elektrotechnik
Christine Jakob
und Informationstechnik
TU Ilmenau
Telefon +49 3677 69-3106
Telefax +49 3677 69-3104
Arrheniusbau, Raum 210
christine.jakob@tu-ilmenau.de
98693 Ilmenau
Univ.-Prof. Dr. rer. nat. habil.
Andreas Bund
Contact
TU Ilmenau
Internet
Internet
Telefon +49 3677 69-3107
Telefax +49 3677 69-3104
andreas.bund@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/wt-ecg
41
Electronic Measurement Research Lab
Elektronische Messtechnik
Research Topics
•
Measurement and modelling of mobile radiotelephone channels
•
Direction resolved optimal signal processing for mobile radiotelephone systems with several antennae on both
sides of the transmission line (Turbo-MIMO)
•
Link- and system-level simulation of mobile radiotelephone systems with adaptive antennae
•
Ultra-broadband (UWB) sensor technology and applications
•
Hybrid and monolithic integration of RF circuits for ultra-wideband and mm-wave systems
Research
Communications, RF engineering, signal processing, and
electronic measurement engineering are very distinct disciplines. While their respective methods and applications
appear to be quite different, they share common problems
in measurement data acquisition, sensor interface design,
signal processing, parameter identification, data analysis
and information extraction. The Electronic Measurement
Research Laboratory is currently conducting several research
projects that lie in the crossroad of these disciplines. The
main goal is to apply advanced digital signal processing and
RF circuit design methods for solving leading edge measurement problems in mobile radio and RF sensing.
Education
Ultra-wideband sensing applied for
search and rescue of earthquake victims
(top) and medical imaging (left)
The Electronic Measurement Research Lab offers undergraduate and graduate courses aimed at a highly qualitative
education of the students. The spectrum comprises courses
and labs on fundamental and specific topics of electric and
electronic measurements as well as advanced approaches to
process measurement data.
Contact
Reiner S. Thomä
TU Ilmenau
Internet
42
Telefon +49 3677 69-2622
Helmholtzplatz 2
Telefax +49 3677 69-1113
Helmholtzbau, Raum 1516a
reiner.thomae@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/it-emt
Electronics Technology
Elektroniktechnologie
Research Topics
•
LTCC Technology for 100 GHz + Circuits
•
Packaging Technologies for Harsh Environment Applications
•
Advanced Module Technology for Satellite Communication Systems
•
Functional 3D-Integration (System-in-Package) based on LTCC
•
Silicon-Ceramic-Composite Substrate Technology
•
Mesoscale Fluidic Toolbox
•
Packaging for Nanosystems
Department
The department of Electronics Technology covers the field of
microelectronic packaging between integrated circuits and
systems. This includes electronic layout design, substrate
manufacturing technologies and component assembly
processes. Packaging of microelectronic components and
systems is becoming more and more important to achieve
the desired ever-increasing functionality. Particular reasons
for this are related to the systems‘ technical specifications
(e.g. working frequency, power loss, miniaturisation) and
the environmental working conditions, such as temperature
or temperature gradient, vibration or radiation. Handling of
such systems requires an interdisciplinary approach considering material property investigation, design optimisation
(electrical, thermal and thermal-mechanical) and process
technology development.
Research
Our research activities focus on the exploitation of Low Temperature Cofired Ceramic (LTCC) materials for various purposes. High resolution patterning technologies are being developed to close the gap between the macro world and nano
technology and to be able to achieve better functionality for
microwave circuitry. Further integration based on embedding functional materials (high-k dielectrics, ferroelectrics,
ferrite) is under research and will be used for RF-System-in-
Package solutions.
Other areas of interest are driven by harsh operating environments for microelectronics. Aspects like high temperature interconnect technology, cooling solutions for power
electronics or high ampacity are in the focus of these fields.
Silicon-on-ceramics composite substrate technology (SiCer),
which is based on a novel bonding process between nano
structured silicon and unfired LTCC, is another focal point of
interest. Process and application related projects are being
pursued for this technology.
Education
The department offers lectures for undergraduates and
graduate students as well as training courses for external
industrial customers. The internal lectures are available for
students in electrical engineering, mechanical engineering,
micro- and nanotechnology and industrial engineering. The
courses cover the basics of electronics technology, such as
printed circuit board materials, design and manufacturing
technologies or component assembly. Further lectures put
emphasis on microelectronic component packaging, specific
technology requirements for high power or high frequency
& microwave circuitry and ceramic based substrate materials. Students are also offered workshops in our department
labs to manufacture printed circuit boards, thick film circuits
or LTCC substrates.
Contact
Jens Müller
TU Ilmenau
Internet
Telefon +49 3677 69-2606
Telefax +49 3677 69-1204
Kirchhoffbau, Raum 1055
jens.mueller@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/mne-et
43
Electrothermal Energy Conversion
Elektrothermische Energiewandlung
Research Topics
•
Induction heating and melting
•
Electromagnetic control of electrically conducting liquids
•
Solidification and crystallisation in strong magnetic fields
•
Dielectric capacitor heating, microwave heating
•
Electromagnetic shielding by modified building materials
•
Numerical simulation of electromagnetic fields and of coupled fields
•
Temperature field simulation, flow field simulation
Department
Concerning both teaching and research, the Electrothermal
Energy Conversion Group deals with methods and processes
of using electrical energy to directly treat various materials
including metal melts, semi-finished parts, and work pieces.
We combine electrical power engineering and material science, resulting in system knowledge for the technological
use of the related electro-physical processes. We have close
scientific connections to other divisions: the Power Electronic Group, Thermodynamics Group, Fluid Dynamics Group,
Materials Science Group, Automatic Controls Group, and
the Theoretical Electrical Engineering Group. Our future
plans include the development of new materials, components, appliance systems, and control techniques. Thus, we
can fulfill the state-of-the-art requirements set by materials
and micro-technologies as well as by environmental and recycling technologies. The equipment and processes utilized
for teaching and research are highly energy intensive and
specific. Therefore, it is of greatest scientific importance that
the theoretical, numerical, and experimental studies be interdisciplinary.
Research
An important research topic regarding electro-mobility was
the investigation of the thermo-management of lithium ion
batteries. Since the aging process of lithium ion cells is temperature dependent, controlled cooling is necessary to sta-
bilize the entire available power and energy the cells provide
during their lifespan.
Currently, we are investigating the numerical simulation of
Lorentz force enhanced flow patterns within glass melts.
The process of efficiently melting, refining, and homogenizing the melted glass is strongly dependent on the melt
flow within the tank. In order to improve the glass quality
and melting process efficiency, Lorentz forces influenced by
externally generated magnetic fields are used to create additional flow components.
We are involved in two projects within the Research Training Group “Lorentz Force Velocimetry and Lorentz Force
Eddy Current Testing”: A4 - RANS/LES simulation of the interaction of real magnet systems and liquid metal flow using
commercial codes, and also project B4 - Numerical simulation and optimization of high-Tesla magnet systems. The Research Training Group is measuring the Lorentz forces with
values between 10 -11 N and 1 N while solving inverse problems to obtain the desired parameters in fluids and solids.
Education
We offer master courses in „Electrical Power Engineering“
and „Electro and Material Technology“ as well as bachelor
courses in „Control and Power Engineering“ and „Micro and
Nanoelectronics and Electrotechnology“. The students will
be enabled to develop and design electro-technological devices and machines, including controlling and handling.
Contact
Dr.-Ing.
Ulrich Lüdtke
TU Ilmenau
Internet
Internet
44
Telefon +49 3677 69-1510
Telefax +49 3677 69-1552
fg.elektrowaerme@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/ees-eew
44
Engineering Design
Konstruktionstechnik
Research Topics
•
Design theory and methodology
•
Modelling of functional structures and technical principles
•
Variational and modularised design, feature technology, constraint-solving, knowledge-based engineering
•
Use of audiovisual VR technologies in product development
•
Fundamentals of embodiment design in product development
•
Integration of embodiment design and calculation/simulation
•
Cost analysis and cost reduction in product development
•
Adjustment concepts for precision engineering products
Services offered
Special equipment
•
•
•
•
•
•
Conceptual design and detailed design
Consulting in the selection, use and integration of CAx
systems
Design reviews, error analysis of design documents and
products
Development, simulation and automation of adjustment processes
Use of Virtual Reality (VR) in product development
•
•
•
CAD lab: Laboratory with workstation and PC workstations for AutoCAD, Autodesk Inventor, Solid Works,
Catia, software for cost estimation, Pro/ENGINEER,
Techoptimizer
Flexible audiovisual stereo projection device (FASP):
3-sided CAVE unit with adjustable screens, wave field
synthesis to generate realistic audio impressions
Acoustic measuring equipment (structure-borne and
airborne sound)
Adjustment laboratory: Comprehensive measuring and
controlling equipment to develop and simulate efficient adjustment techniques for mechanical and optical
components
Contact
Christian Weber
TU Ilmenau
Internet
Telefon +49 3677 69-2472
Max-Planck-Ring 12
Telefax +49 3677 69-1259
Haus F, Raum 4250
christian.weber@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/konstruktionstechnik
45
Experimental Physics I
Experimentalphysik I
Research Topics
•
Optical, electronic and structural properties of inorganic semiconductors
•
Semiconductor hetero- and nanostructures for optoelectronic devices, sensors and solar cells
•
Structure-property relation of thin films made by conjugated polymers
•
Design, preparation and investigation of novel polymer solar cells
•
Evaluation of photovoltaic and solarthermal components
•
Further development of several optic-spectroscopic methods
Department
The department is made up of three research groups dealing
with inorganic semiconductors and devices, organic semiconductors and corresponding optoelectronic devices, and
solar-energy components.
Research
A variety of experimental methods for the investigation of
optical, spectroscopic, optoelectronic and structural properties are applied to a wide range of problems taken from
semiconductor physics, polymer physics, photovoltaics, optics and material science. The department possesses all necessary technological equipment for the production and the
validation of polymer solar cells. Recent research results and
publications address bandstructure, optoelectronic properties and application of group-III nitrides, metal-oxide and
chalcopyrite semiconductors; the nanostructure-property
relation of polymer composite films; the charge separation,
carrier transport and absorption at polymer heterojunctions;
the production and investigation of novel polymer solar
cells. Many results have been obtained from close collaboration with world-wide leading research groups.
Education
The staff of the department is provides lectures at the master and bachelor level. Regularly offered lectures are e.g.
experimental physics, semiconductor physics, laser physics,
photovoltaics, organic photovoltaics, physical optics and
optoelectronic devices. Furthermore, the department is in
charge of the organization and execution of the lab training
“Experimental physics”. The PhD-Graduate School for Photovoltaics „PhotoGrad“ - From cell to system is managed by
the department . At the moment, more than 9 PhD students
are accomplishing their doctoral thesis with topics on, e.g.,
polymer solar cells, Si-solar cells, optics and superconductivity.
Contact
Gerhard Gobsch
Naturwissenschaften
TU Ilmenau
Internet
46
Telefon +49 3677 69-3701
Langewiesner Str. 22
Telefax +49 3677 69-3173
K&B expert, Raum 32
gerhard.gobsch@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/exphys1
Experimental Physics II
Experimentalphysik II
Research Topics
•
Ultrafast phenomena in advanced solids
•
Light-matter interactions
•
Femtosecond electron diffraction
•
Linear and time-resolved terahertz and optical spectroscopy
•
Correlated electron systems
Department
The department „Experimental Physics II“ is engaged in research concerning Optics and Photonics and is a member
of the IMN MacroNano® and the Institute of Physics. The
department is also committed to teaching physics courses,
from basic classes in experimental physics to specialized
classes in non-linear optics and modern spectroscopic
techniques.
Research
The department’s research focus lies in the field of ultrafast
phenomena in advanced solids, ranging from metals, metallic nanostructures, organic and anorganic semiconductors,
with emphasis on photovoltaic applications, to correlated
electron systems. In many of these solid state systems the
material’s functional properties are being controlled by
the particularities of the interaction/interplay between the
different subsystems (electrons, spin, crystal lattice). To
study and understand these interactions the time-resolved techniques, which were (and are being) developed in
the last decades, could make a decisive contribution. Here
a femtosecond pulse is used to drive the system out of
equilibrium, while the suitably delayed light (from Terahertz to X-ray range) or electron pulse is used to track the
relaxation back to equilibrium. Thereby different excita-
tions can be tracked in real-time clarifying their role in the
functional properties of the material/system under scrutiny.
Importantly, experiments can be performed both in the
low perturbation limit, where the system is close to thermal
equilibrium, as well as in the strong excitation regime. In the
latter case various phase transition can be optically driven,
enabling both new insights into these materials as well as
external control of their functional properties.In the department several experimental techniques are being developed,
optimized and utilized, ranging from time-resolved THz
spectroscopy, enabling access to low energy excitations, to
femtosecond electron diffraction, where atomic motion is
investigated on the femtosecond timescale.
Education
The department of Experimental Physics II offers lectures,
problem classes and laboratory courses on fundamentals
of physics for students of engineering disciplines as well as
lectures on experimental physics for bachelor students in
Physics, Optronics and Materials Science. It also contributes
to the master-degree programs Physics and Optronics with
laboratory courses in photonics and lectures in Photonics
and optoelectronics.
Contact
Univ.-Prof. Dr. rer. nat.
Jure Demsar
Telefon +49 3677 69-3672
Telefax +49 3677 69-3770
jure.demsar@tu-ilmenau.de
Internet
Fakultät für Mathematik und Naturwissenschaften
TU Ilmenau
Unterpörlitzer Straße 38
Gebäude V, Raum 202
98693 Ilmenau
www.tu-ilmenau.de/exphys2
47
Inorganic-Nonmetallic Materials
Anorganisch-nichtmetallische Werkstoffe
Research Topics
•
Glass and ceramics
•
Materials in magnetic fields
•
Microstructuring
•
Surfaces and coatings
•
Materials development, production, post-processing and recycling
Department
The department is a member of the Institutes of Micro- and
Nanotechnologies and of Materials Engineering. Our team
is specialized in the science and engineering of glassy and
ceramic materials. The equipment comprises special furnaces for glass processing and a broad spectrum of chemical,
thermal, optical, and electrical analysis methods for glasses,
ceramics and powders. Some particular assets to be quoted are electromagnetic disintegration, quenching and fine
annealing, laboratory cliché printer, mask aligner and dip
coater.
Research
Three highlight topics of our research are magnetic fields,
microstructuring and surfaces.
The use of magnetic fields in glass processing and in process
control is investigated in close cooperation with industrial
partners as well as in fundamental research projects. Nanoscaled magnetic fine powders with tailored properties for
electromagnetic shielding are produced via a glass crystallization technique.
The glass crystallization route is also exploited in microstructuring: a photostructurable glass has been developed in our
department.Using photolithograpy, geometrical design and
optical properties of this material can be trimmed for applications such as microactuators, microfluidic systems and
as a cliché for gravure printing. Another microstructuring
process is redrawing glass for capillaries and holey fibers.
The surface research is focussed on first reactions on juvenile glasses, degradation, prerequisites for proper coating,
and development of coatings.
Education
Lectures and practical courses are given for bachelor and
master students in materials science as well as in optronics,
micro- and nanotechnologies, mechatronics, as well as biomedical, regenerative energy technology, automotive and
mechanical engineering. Mandatory lectures cover, e.g.,
fundamentals of material science and technology of glasses
and ceramics. Optional courses on electromagnetic processing, recycling, biocompatible materials, glass coatings and
production of optical materials are also offered.
Contact
Edda Rädlein
TU Ilmenau
Internet
48
Telefon +49 3677 69-2802
Telefax +49 3677 69-1436
edda.raedlein@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/anw
Machine Elements
Maschinenelemente
Research Topics
•
Calculation and numerical simulation of springs
•
Exploring the spring manufacturing process
•
Engineering of measurement devices for static and dynamic parameters
•
Experimental determination of static and dynamic spring parameters
•
Exploring the forming characteristics of spring wire
•
Tribologic explorations of springs and pumps
Services offered
Special equipment
•
•
•
•
•
•
•
•
•
•
•
Testing and assessment of the initial material (wire) for
spring manufacturing
Calculations of spring functions and strength (incl. FEA
and MBS)
Consulting on spring manufacturing, design and use of
springs
Spring inspection (characteristics, transverse forces, relaxation, durability)
Torsion tests of material and components (static and
dynamic)
Conceptual design, engineering and installation of test
benches
Execution and evaluation of high-speed video records
FEA calculations (static, vibration behaviour)
Tribologic material- and part studies
Software engineering for spring calculation (dimensioning)
•
•
•
•
•
•
•
•
•
•
•
Digital high-speed camera: monochromic 4500 images/
sec, 256x256 pixels
50 kN-, 10 kN universal testing machines: tensile-/pressure tests on parts, springs, wire materials
Torsion testing machine: for (wire) material samples
and parts up to 100 Nm
Tribometric measuring system (translational, rotatory)
for higher loads: determining friction coefficient and
wear for material samples and parts at normal forces
from 100 N to 1500 N
Determining wear due to vibration (translational) at frequencies up to 50 Hz
Servohydraulic test machine for dynamic loads
Vibration stability testing machine for springy elements
(swing arm by IABG)
Torsion test bench for push loaded rotating parts: for
clutches, cardan shafts and similar parts up to 200 Nm
peak value at 50 Nm nominal torque
Rotating bending test stand for straight rod-like specimens
Optical image processing measuring station for springs
Test benches for dynamic spring tests
Optical microscope with colour camera
Contact
Ulf Kletzin
TU Ilmenau
Internet
Telefon +49 3677 69-2471
Max-Planck-Ring 12
Telefax +49 3677 69-1259
Haus F, Raum 4260
ulf.kletzin@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/maschinenelemente
49
Materials for Electronics and Electrical Engineering
Werkstoffe der Elektrotechnik
Research Topics
•
Thin Films, Surface and Coatings Technology, Material Deposition Technologies, PVD
•
Multilayered, compound and composite films, metallisation, functional films, contacts, bonding, and lead-free
soldering for microelectronics and micromechanics
•
Materials for sensors, actuators, photovoltaic, energy conversion and energy storage
•
Materials for Electrical Engineering, contacts, isolation, magnets, dielectrics
•
Materials Analysis and Materials Testing; thin film measuring technologies, Non-Destructive Testing (NDT) of
Materials; Testing Center for thin film- and material properties Ilmenau (state inspection authority, certified after
DIN EN ISO/IEC 17025).
•
Development of new materials and new processes for advanced technical applications
•
Design, Processing and Properties of micro- and nanostructured materials
Department
The chair „Materials for Electronics and Electrical Engineering“ is thoroughly engaged in teaching and research concerning all materials related topics at the TU Ilmenau. The
chair is a member of the IMN MacroNano® and the Institute
of Materials Engineering (IWT). It is also a founding member
of the Centre for Micro- and Nanotechnologies (ZMN), where
it operates the central lab for materials analysis and thin film
measurement and several facilities for thin film deposition.
port, energy conversion and improved energy efficiency. Our
analytical methods – besides conventional methods – include, for example: X-ray diffraction (XRD), stress and strain
analysis, analytical scanning electron microscopy (SEM, EDX,
EBSD), analytical transmission electron microscopy (TEM,
EDX, EELS, STEM), scanning microprobes (STM, AFM), glow
discharge spectroscopy (GDOS), X-ray fluorescence analysis
(XRF), non-destructive testing (NDT) and mechanical testing
by nanoindenter measurements.
Research
The research topics of the chair cover a wide field of materials for electronics and electrical engineering, ranging from
basic materials science to materials engineering for industrial
applications, covering new material development, materials
testing and analysis, and the processing of advanced materials systems. Research projects (DFG, AiF, State of Thuringia,
and Industry) are dealing with production, properties, structuring and modification of thin films and functional materials. Further research aspects lie in the development of new
materials and processes for micro- and nanotechnologies.
The chair also hosts and runs the Thuringia Testing Center
for Thin Film and Materials Properties (MFPA ). Some topics
are, for example: development of materials and processes for
micro- and nanotechnology, materials for sensors, contacts,
actuators, optoelectronic parts, materials for energy trans-
Education
The chair Materials for Electronics and Electrical Engineering
is actively participating in teaching for many degree programs (Materials Science and Engineering, Electrical Engineering and Information Technology, Micro- and Nanotechnology, Mechanical Engineering, Mechatronics, Optronics,
Automotive Technology, Biomedical Technology, etc.). This
comprises lectures, exercises, seminars, lab courses, projects, bachelor and master theses, PhD theses, colloquia and
even labs for school classes. Starting with the basic fundamentals of materials science and engineering, we teach all
courses in an illustrative manner by including many practical
examples and actual research topics. We also host many foreign guests and students.
Contact
Peter Schaaf
TU Ilmenau
Internet
50
Telefon +49 3677 69-3610
Telefax +49 3677 69-3171
Meitnerbau, Raum 1.2.114
peter.schaaf@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/wet
Mechatronics
Mechatronik
Research Topics
•
Drives, engines and actuators
•
Piezotechnology and magnet technology
•
Vehicle systems technology and driver assistance systems
•
Passive and active vibration damping
•
Vibration technology
•
Structural dynamics
•
Design of mechatronic and adaptive systems
Services offered
•
•
•
•
•
•
•
Modelling of mechatronic systems (structural dynamics, FEA, MATLAB, Simulink)
Simulation of mechatronic systems
Model analysis and identification
Study of vibrations
Nonlinear vibrations (modelling, explorations)
Conceptual design of actuators, engines and drives
Controller engineering
Special equipment
•
•
•
•
•
•
•
•
•
Laser vibrometer
Lab for multi-coordinate drives
Lab for fluid mechatronics
Test vehicle
dSpace systems
Thermocabinets
Differential GPS
Inertia platform (acceleration values, rotary rates)
Load platform for force measurement with 6 degrees
of freedom
Contact
Thomas Sattel
TU Ilmenau
Internet
Telefon +49 3677 69-2486
Max-Planck-Ring 12
Telefax +49 3677 69-1801
Haus F, Raum 2120
thomas.sattel@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/mechatronik
51
Metallic Materials and Composites
Metallische Werkstoffe und Verbundwerkstoffe
Research Topics
•
Characterisation and application of metallic materials, analysis and optimisation of materials
•
Mechanical behavior of metallic materials
•
Analysis and optimization of manufacturing processes
•
Materials with combined characteristics, material systems, multi-material-design
•
Cellular metals
•
Hybrid materials and structures
•
Lightweight design
Department
The department of Metallic Materials and Composites
(MWV) was founded in 1996 at the Technische Universität
Ilmenau. The department MWV is engaged in teaching and
research concerning all metallic materials related topics, especially hybrid materials, composites and multi materials design. The department is a member of the IMN MacroNano®
and the Institute of Materials Engineering (IWT). Concerning
both teaching and research, the department deals with the
characteristics, analysis and development of metallic, hybrid
and cellular materials.
Currently metallic materials are the most used materials in
the world. The development of new metallic materials and
multi-material-systems, with at least one part made up of
metallic materials, is of crucial importance for future applications.
production and characterization of cellular metals.
The research is based on cooperation with other departments at the Technische Universität Ilmenau, academic and
industrial partners in Germany and with international partners.
Education
MWV offers lectures in many degree programs (i.e. mechanical engineering, automotive engineering and materials
science). These programs include lectures, exercises, seminars, lab courses, projects, bachelor and master theses, PhD
theses and colloquia. To develop a student´s expertise, all
activities within the MWV are individually coordinated to
either allow the students to specialize in a topic or to become a generalist, with an excellent understanding of the
basic concepts. We also host foreign guests and students.
Research
The research topics of the department cover a wide field
of materials for lightweight application in automotive and
mechanical engineering, ranging from basic materials science to materials engineering for industrial applications,
covering new material development and materials testing
and analysis. The core expertise of the department can be
found in the area of characterization of metallic materials,
development of multi-material-systems and development,
Contact
Univ.-Prof. Dr.-Ing. habil. Dr. h. c.
Heinrich Kern
TU Ilmenau
Internet
52
Telefon: +49 3677 69-2450
Telefax: +49 3677 69-1597
heinrich.kern@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/mwv
Micro- and Nanoelectronic Systems
Mikro- und nanoelektronische Systeme
Research Topics
•
Nanostructure technology and characterisation
•
Nanometer electronics and NEMS design
•
Micro- and nanoelectronic systems and their implementation
•
Software tools for the design and simulation of MEMS, NEMS and integrated circuits
•
Nanotechnology for single-electron-and quantum-devices
•
Nanomechanics
•
Nanosensors
•
Scanning Probe Microscopy
•
Scanning Probe Lithography
•
Mirco-Nano-Integration
Department
The Department of Micro- and Nanoelectronic Systems is
engaged in the further development of micro- and nanoelectronic systems in basic research as well as in applied
research. The integration and functional combination of
extremely miniaturized electric and nonelectric micro- and
nanotechnologies tend to result in a synergetic combination
of efficiencies.
Research
The core expertise of the department can be found in the
area of micro- and nanofabrication, plasma etching, nanolithography, nanoelectronics, single ion implantation,
cantilever-microsystems, nanoresonators, microactuators,
developement of nanostructures and cantilever-based sensors (AFM, electronic nose, ARCH infrared sensors). More
than 360 scientific papers, 38 funded projects, 62 invited
lectures, 120 conference presentations and 42 patents show
the internationally recognized research of around 34 scientific workers in the Department of Micro- and Nanoelectronic
Systems.
Education
Among the fields for which the Institute is responsible,
the Department of Micro- and Nanoelectronic Systems is
in charge of the following main fields of teaching: System
theory of micro- and nanotechnologies, Circuits manufactured according to the customer‘s requirements (ASICs), Research seminar – Micro- and nanoelecronic systems, Physical
principles and applications of scanning probe technology,
Micro- and nanosensor technologies, Optoelectronics, Integrated Circuits Design, Acoustoelectronics/microacoustics,
Integrated analog and digital circuits and dimensioning of
photovoltaics systems.
Contact
Ivo W. Rangelow
TU Ilmenau
Internet
Telefon +49 3677 69-3718
Telefax +49 3677 69-3132
ivo.rangelow@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/mne_mns
53
Micromechanical Systems
Mikromechanische Systeme
Research Topics
•
Integration of nanostructures into microsystems (micro-nano-integration)
•
Nanocrystalline AlN as a mechanical and piezoelectric material
•
Optical and RF MEMS integration
•
Energy-efficient sensor concepts and energy harvesting for food safety and life sciences
•
Innovative functional blocks for microfluidics in life sciences
Chair
The Chair for Micromechanical Systems is embedded in the
mechatronics part of the Faculty of Mechanical Engineering.
Members of the chair are responsible for the silicon-based
core technologies within the Center of Micro- and Nanotechnologies.
Research is focused on systems integration in micro-electromechanical systems ( MEMS) for life sciences, photonics and
energy-efficiency. Another important topic is the extension
of systems properties by integration of nanostructures into
microsystems.
Research
On one hand, silicon in combination with new functional
materials such as piezoelectric aluminium nitride (AlN) or
nanostructured interfaces (Si grass, also in combination
with nanocrystals) offers new opportunities for MEMS, but
still needs further research. AlN turned out to be an ideal
material for ultrathin but robust membranes and for efficient actuators. It is explored for Optical MEMS as well as
for energy harvesting in biocompatible implantable sensors.
The reproducible etching of tailored silicon grass is also part
of the research. Especially in combination with the deposition of functional polymers or nanocrystals grown from
PVD, it opens a wide variety of new interfacial properties to
solids, liquids and gases.
On the other hand, systems integration may be one of the
most important topics of the future as smart subsystems
become a key issue for complex systems addressing global
challenges. Most of these projects require interdisciplinary
research in cooperation with colleagues from science and
industry as complex microsystems push forward into new
areas of application and simplify our daily life.
Optical MEMS are developed in cooperation with optics and
system partners and allow for highly integrated optical systems.
As efficiency becomes more and more important, ultralow-power sensor systems are investigated that use nonelectrical energy for measurement, but we also investigate
mechanical energy storage for MEMS.
Additionally, new microfluidic components for life sciences
applications are investigated, which add new functionality
to lab-on-chip systems. They usually make use of nanostructured interfaces.
Education
The department offers lectures for all micro- and nanotechnology-oriented degree programmes including micro-mechatronics. Key lectures are “Microsystems Technology”, “Design
of Microsystems”, “Microsensors”, “Microactuators” and
“MEMS”. Also a broad range of Ba and Ma-theses is offered,
which allow working on state-of-the-art research topics within the clean room laboratory.
Contact
Martin Hoffmann
TU Ilmenau
Internet
54
Telefon +49 3677 69-2487
Max-Planck-Ring 12
Telefax +49 3677 69-1840
Haus F, Raum 3110
martin.hoffmann@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/mms
Nano-Biosystems Technology
Nano-Biosystemtechnologie
Research Topics
•
Microfluidics, Microreactor research with biological and chemical applications
•
Polymer scaffolds for 3D cell cultivation
•
Process optimization
•
Biosensor development e.g. AlGaN/GaN nanosensor
•
3D structuring of glass and hybrid systems
•
Assay development e.g. for cancer research
•
Nanosystemintegration
Applications of nanotechnology and microtechnology lead
to a field which could be called nanosystemintegration. The
next step is the development of nanobiotechnological systems, which could reflect the hierarchical organization of
biological systems that utilise scales and laws of nature on
all metric levels.
As one example of such systems, we present the design and
construction of a new class of micro bioreactors. It has been
shown that 3D cell culture systems reveal the in vivo situation much better than the cultivation of one cell type alone.
For this purpose we have to construct and arrange fluidic
devices and a cell-biological environment in such a way
that living cells can survive in a three-dimensional, organlike structure, enabled by technical devices. Such organ-like
cell structures may lead to new ways in medicinal chemistry
for the determination of ADME/Tox properties of potential
drugs. One part of the construction principle is the integration of sensors, preferably novel AlGaN/GaN nanosensors.
The latter nanosensors offer the possibility to estimate
reactions of cells attached to the sensor surface in a nondestructive and label-free manner. These sensors are highly
sensitive and biocompatible to cells. Furthermore, they are
transparent in order to enable microscopic and other optical observations of the cells. In an advanced version, the
sensor is to be integrated to give a better insight into cellular processes of the cells that are cultivated in such micro
bioreactors.
Within this framework is the development of hybrid systems
for the cultivation and the measurement of electrogenic
cells e.g. cocultivation of microfluidic two chamber systems.
Further extensions of these research approaches are novel,
hybrid 3D structures such as 3D multielectrode systems applicable for microbioreactor systems or in medical devices.
Such systems are based on assembly and connection technology and on variants in structuring glass, which has some
extraordinary features, with respect to biological application, such as biocompatibility and optical transparency.
For the development of biomedical and pharmaceutical test
devices, we need an interdisciplinary approach involving biological, chemical and biochemical expertise. Therefore, the
new department nanobiosystem research consists of engineers, (bio)chemists and physicists. The research on technical devices is attended by basic research efforts concerning
the underlying chemical and biological processes as well as
adaptations regarding biological assays or chemical surface
modifications.
Contact
Andreas Schober
Naturwissenschaften
TU Ilmenau
Internet
Telefon +49 3677 69-3387
Prof.-Schmidt-Straße 26
Telefax +49 3677 69-3379
Heliosbau, Raum 2102
andreas.schober@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/nbs
55
Nanotechnology
Nanotechnologie
Research Topics
Thrust 1: Emerging nanotechnologies targeting heterogeneous integration:
• Enable - integration of functional devices across traditional length scales & material boundaries
• Through - invention of printing-transfer-& engineered-self-assembly processes
• Incorporating – micro and nanoscopic devices including nanoparticles / wires-microscopic-dies & chiplets
Applications:
• Cost effective production of solid state lighting panels
• Novel stretchable and conformal electronics for bio-diagnostics including „ Electronic Tattoos“.
• Nanoxerographic printers to enable low cost printing of 3D nanostructures for energy conversion / sensor applications
• Novel detection of airborn threads targeting the efficient collection of airborn particles.
Thrust 2: Support of established Nanotechnologies: Epitaxial growth of group III-Nitrides, SiC and graphene,
Nanolithography, nanostructuring, structural and electrical heterostructure characterization, AES nanoanalytics,
Applications: high electron mobility transistors, pH sensors, MEMS/NEMS
Thrust 1 is a new research area that is being established by
Prof. Jacobs. The goal is to extend the application range of
nanostructured materials and devices that we have learned
to produce over the past 10 years. The challenge today is no
longer the fabrication of a single device but the manufacturing and integration of functional materials and devices in
heterogeneous systems. Applications that require integration over large areas, in three dimensions, or on novel material independent substrates including flexible or stretchable
materials are particular challenging. This requires a new set
of nanomanufacturing tools. Thrust 1 aims to discover and
develop the required solutions.
Thrust 2 is a more established area since it uses commercially available processes or processes that are no longer classified as emerging. Specifically, Trust 2 supports the growth,
characterization and optimization of hetero-and nanostructures processed from group III-nitrides, silicon carbide, and
metal oxides on different substrates.
The research requires both front and back-end processing
to facilitate integration into heterogeneous systems. In a
broader context the research supports cooperation within
IMN MacroNano® on nanoelectronics, sensor systems,
and smart materials. The nanostructured materials and
deposition processes find applications in areas that deal
with energy efficiency (Solid state lighting), energy storage,
and energy conversion which are key strategic issues of the
department and the university.
The scientific research also provides the basis for a
well-founded and practically oriented education for students in the field of advanced semiconductor materials, nanotechnology, clean room technology, and nanoanalytics.
Both thrusts require a collaborative effort and continuous refinement of In-Situ and Ex-Situ analytical methods
to study the materials, structures, and devices. We commonly use ellipsometry, Auger electron spectroscopy,
depthprofiling, and high resolution XRD.
Contact
Prof. Dr. sc. techn. (ETH)
Heiko O. Jacobs
Telefon +49 3677 69-3723
Telefax +49 3677 69-3709
heiko.jacobs@tu-ilmenau.de Internet
56
www.tu-ilmenau.de/mne_nano
TU Ilmenau
98693 Ilmenau
Optical Engineering
Technische Optik
Research Topics
•
Optics design
•
Microoptical system integration
•
Optical platform for Micro-Integration
•
Freeform surfaces in optics - design, optimisation and manufacturing
•
Optimisation of optical image systems with microstructured optics
•
Modelling of optical imaging systems
•
Optical micromanipulation and micro-optofluidic systems
•
Digital holography
•
Active optical microsystems
Department
Historically at the Technische Universität Ilmenau, research
work in optics has been focused on addressing problems
that arise in both mechanical and precision engineering.
While always at the cutting edge, under the direction of
Prof. Heinz Haferkorn, the role of educating and teaching
students was enhanced and incorporated more prominently into the research structure of the university with notable
education-focused lectures such as “Theory of optical imaging systems”. Specifically during the 60’s and 70’s physical aspects of optics were linked to the engineering and
manufacture of precision mechanical systems through the
development of 5th order aberration theory and the analytic descriptions of imaging systems. While over the years
personal changes have brought new faces to Ilmenau (Prof.
Truckenbrodt in 1993, Prof. Sinzinger in 2002) and new developments have shifted the focus of optical research, the
same long-term dedication to education and the development of the next generation of scientists and engineers has
been preserved. Modern research challenges have moved
on to examining “microstructured and freeform optics for
design and optimization of optical systems”.
Research
We, the Department of Optical Engineering and the junior
research group “Optik Design, Simulation und Modellierung
optischer Systeme” (funded by the Carl-Zeiss-Stiftung), are
Contact
responsible for adapting research in classical optical engineering and lens design into innovative optical (micro-)
system technologies. We specifically focus on design, integration, tolerancing, fabrication, and characterization of
freeform optical elements in optical (micro-)systems. To realise novel prototype systems, we rely on our unique fabrication facility that combines both ultraprecision mechanical
and laser machining in a single machining centre. Here we
have developed many novel freeform elements and systems,
e.g. for head-up displays for the automotive industry or for
optical tweezing and optofluidic microsystems for biomedical applications. In such a manner is our optical design
specialization focused on broader multi-disciplinary goals.
Education
To ensure continued future success, our interdisciplinary research activities are complemented by a variety of graduate and undergraduate degree programs. Young students
taking the engineering Bachelor programs at TU Ilmenau
(e.g. Optronics, Mechatronics, Electrical and Mechanical
Engineering, Technical Physics) are exposed to interdisciplinary projects through a broad course selection. Challenges
in optical engineering and microsystems are addressed in
subsequent Master (e.g. Master of “Micro- and Nanotechnologies”) and PhD programs like the Graduate School on
“Optical Microsystems (OMITEC)” and “Green Photonics”
funded by the Thuringian Ministry for Education, Science
and Culture (TMBWK).
Stefan Sinzinger
TU Ilmenau
Internet
Telefon +49 3677 69-2490
Am Helmholtzring 1
Telefax +49 3677 69-1281
Haus M, Raum 201
stefan.sinzinger@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/optik
57
Optical Design, Simulation and Modelling of Optical
Systems
Research Topics
•
Classical optical problems in diffraction and propagation
•
Statistical optics with an emphasis on speckle fields
•
Modeling and characterization of paraxial optical systems
•
Speckle metrology systems
•
Digital optics including digital holography and phase retrieval techniques
•
Coherent and incoherent imaging systems
•
Signal processing, including Fourier transform, fractional Fourier transform, Linear Canonical transform, Wigner
distribution function, sampling and signal representation
•
Propagation of light in turbid media such as biological tissue
•
Modeling and simulation of broad-band optical sources
In praise of analytical solutions:
Historically modeling the propagation and diffraction of
light has been an active research area. A major advance
took place in 1816 in Paris, where a young Fresnel proposed
a novel way of describing diffraction with the assumption
that light was wave like in nature. His initial draft was submitted for consideration by the French Academy of Sciences
on the topic of diffraction. There would have been resistance to this wave description of light on the Academy’s
committee, which included the formidable cast of Poisson,
Laplace and Biot. Fresnel provided analytical solutions
for several diffraction problems including diffraction by a
straight edge whose predictions were confirmed by experiment. Poisson, in a bid to overturn Fresnel’s results, realized
that one of his solutions could be extended to describe the
diffraction field behind an opaque disk. Poisson’s solution
made the improbable prediction that a bright spot should
appear in the center of a shadow cast by the opaque disk.
Befriended by Arago, further experiments were conducted
and the celebrated Poisson spot was discovered!
Now nearly 200 years later much has happened as can be
seen from the huge variety of research being conducted in
TU Ilmenau alone. It is therefore remarkable that the principals of diffraction espoused by Fresnel are still being widely
used today. Paraxial optical systems can be designed and
analyzed within this framework. Speckle systems, widely
used today in non-contact metrology, rely on these con-
Contact
Jun.-Prof. Dr. Eng.
cepts. Signal processing theory can be used to reinterpret
Fresnel diffraction, and the effects of sampling can now be
considered. Numerical algorithms based on the fast Fourier
transform, have been developed so that the propagation of
light can be efficiently calculated. Imaging without lenses
is common in digital holography where Fresnel diffraction is
calculated numerically. In this group, we pursue fundamental theoretical questions relating to the performance limits
of digital imaging and speckle metrology systems. Developing robust numerical calculation techniques, confirmed
with special analytical solutions, mean that we can develop
novel metrology systems. Confirming numerical and analytical predictions with experimental results is the ultimate test.
This is our guiding research principal, theoreticians using
numerical and analytical models make predictions that our
experimentalists confirm or disconfirm. As it was in 1816,
so it is today, plus ca change, plus c’est la meme chose!
Education
Several courses are taught in this group during the Winter
and Summer semesters, including Introduction to Fourier
optics and holography, Digital holography and Design optischer Systeme zur Energiebündelung. There is a strong
emphasis on practical lab work in the courses and students are exposed early on to current research topics. Hence
students pursuing Bachelor and Master thesis programs are
therefore well prepared for conducting their own research
projects.
Damien Peter Kelly
TU Ilmenau
Internet
58
Telefon +49 3677 69-2491
Am Helmholtzring 1
Telefax +49 3677 69-1281
Haus M, Raum 201
damien-peter.kelly@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/od
Photovoltaics
Photovoltaik
Research Topics
• Inorganic semiconductors and device structures:
- III-V-semiconductors, silicon, germanium; III-V-, Si-, Ge-based photovoltaics (PV); - (100)- and (111)-surfaces
- crystalline, µ-crystalline, amorphous materials for photovoltaics (PV); bulk and interface properties,
preparation and analytics
• Solar cells, opto-electronic devices:
- high-efficiency, 3rd generation, concentrator PV; tandem/multi junction solar cells
- nanowire- and quantum well solar cells; silicon /thin film solar cells
• Analytics/characterization:
- Optical in situ-spectroscopy (u. a. reflection anisotropy/difference spectroscopy, RAS/RDS)
- Benchmarking of the optical in-situ signals employing surface science tools in ultra-high vacuum (UHV), also in collaboration with external partners: XPS, UPS, LEED, FTIR, STM, LEEM
Department
Preparative and analytical work is devoted to preparing new
highly efficient solar cells, in the form of thin epitaxial multilayer systems and nanowires of III-V materials, epitaxial silicon
and epitaxial germanium. Multi-junction solar cells are prepared with III-V materials applying the MOCVD/MOVPE technique and representing the most efficient solar cell material.
Research
Solar energy conversion: Growth processes are monitored via
optical in-situ signals allowing for systematic monitoring and
for systematic improvements of the growth procedures. The
in-situ measured optical signal shows whether desired interface and bulk properties and a specific surface reconstruction
have been realized in the MOCVD reactor. A direct relationship is established between a specific optical signal and the
corresponding surface reconstruction. This strategy is successful with a unique experimental tool. The latter enables
contamination free sample transfer from the MOCVD reactor
to ultra-high-vacuum. Thus, signals like LEED, UPS, XPS, AES,
STM images, FTIR, and again RDS are measured in ultra-highvacuum that characterize the specific surface reconstruction.
More cost effective III-V solar cells can be realized by depositing III-V materials on Si-wafers.
Education
The department is in charge of the new Master course “Renewable Energie Techniques” (MRET). Here, basics of
renewable energy conversion, novel concepts of energy conversion, thin film and 3rd generation photovoltacis, photoelectrocatalysis, epitaxial preparation and analysis of high-performance opto-electronic device structures, etc. are taught.
Bachelor, Master and PhD students are supervised and new
students are searched for new ideas and projects.
Special equipment:
-Metal-organic chemical vapor deposition/vapor phase
epitaxy (MOCVD/MOVPE)
-MOCVD-to- UHV-transfer system involving UHV-transport chambers, transfer to various UHV-based measure
ment opportunities;
-surface science: low energy electron diffraction (LEED),
UV- and x-ray photoemission (UPS, XPS), Fourier
transform infrared spectroscopy (FTIR), scanning
tunnelling microscopy (STM), 4-probe-STM; optical
in-situ spectroscopy (reflectance anisotropy spectroscopy, RAS)
Atomic resolution (STM) image of unusual (100) silicon
Contact
Thomas Hannappel
Naturwissenschaften
TU Ilmenau
Internet
Telefon +49 3677 69-2566
Telefax +49 3677 69-2568
Meitnerbau, Raum 1.3.106
thomas.hannappel@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/pv
59
Physical Chemistry / Microreaction Technology
Physikalische Chemie / Mikroreaktionstechnik
Research Topics
•
Micro segmented flow technique/ droplet-based microfluidics
•
Application of microfluidics in chemistry and miniaturized biotechnology
•
Flow chemistry for nanoparticle synthesis
•
Nanoparticles in heterogeneous micro flow catalysis
•
Cell cultivation in micro fluid segments
•
Micro toxicology at the nanoliter level
•
Characterization of microreactors
•
Chemical sensing in micro fluid segments
Department and Cooperations
The department was founded in 2001 as an endowed professorship of the Deutsche Bundesstiftung Umwelt (DBU,
German Environmental Foundation) at the Faculty of Mathematics and Natural Sciences. The foundation of the department was motivated in response to the rapidly growing
importance of micro reaction technology and its high potential for the further development of sustainable chemical
technologies. In addition to research on microreactors and
miniaturized microfluidic arrangements for chemical and
biological applications, the development of educational experiments using microreactor was one goal of the department. In the following years, several laboratory techniques
have been established such as flow chemistry, cell cultivation, micro PCR, contact angle measurements, LCMS, fluorescence microscopy, SEM, AFM, centrifugal sedimentation
spectroscopy, and optical spectroscopy.
The research is based on cooperations with other departments in Ilmenau, academic and industrial partners in Thuringia and in Germany, and with international partners.
Research projects are (were) financially supported by DBU,
DFG, BMBF, BMWi, STIFT and the state of Thuringia.
Research
The research is focussed on the exploration of specific advantages of micro fluidics, in particular for multiphase sys-
tems for laboratory operations in biology and chemistry.
Therefore, the plug-flow transport and the stepwise variation of concentrations in a larger series of nanoliter fluid
segments is used for multistep synthesis with very narrow
residence time distribution and for bioscreenings with highly resolved effector concentrations. Thus, binary metal nanoparticles and ZnO nanoparticles can be prepared with
high homogeneity. The flow chemistry is applied for the realization of new process windows of special organic reactions
in a much shorter reaction time and with high yield. The
connection between micro dosing and cell cultivation inside
fluid segments allows the determination of combinatorial
toxic effects on procaryotic microorganisms and eucaryotic
cells with smallest amounts of substances.
Education
The department is involved in the education of engineers in
technical physics, material sciences, micro and nanotechnologies and miniaturized biotechnology. Lectures on physical
chemistry, instrumental analytics, microreaction technology,
molecular cell biology and nanotechnology as well as seminars
and practical microreaction technology training are offered
in these bachelor and master programs. In addition, recent
general aspects of sciences were discussed in lectures concerning general concepts of natural evolution and ecogenesis.
Contact
Michael Köhler
Naturwissenschaften
TU Ilmenau
Internet
60
Telefon +49 3677 69-3700
Gustav-Kirchhoff Str. 1
Telefax +49 3677 69-3173
michael.koehler@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/mrt
Plastics Technology
Kunststofftechnologie
Research Topics
•
Industry (value chain management and manufacturing systems)
•
Energy Efficiency in plastics processing technology (machines, processes, drive technology)
•
Functionalisation (material characteristics and process correlations, compression molding)
•
Hybrid structures (fiber reinforced plastics, multi-component injection molding)
•
PET Technology (packaging applications, cold straining)
Additional topics
Lightweight design, manufacturing technology, biopolymers, lifecycle analysis, industrial services
Department and Cooperations
The department of Plastic Technologies Ilmenau (KTI) was
founded in early 2009 at the Technische Universität Ilmenau as an endowed professorship answering the growing
importance of plastics technologies in Thuringia and thus
closing the gap in the local research community. One of the
defined goals is to support the local industry by increasing
cooperation between research and industry; therefore the
three relevant areas of plastics technologies are covered application technologies, machines and tooling and processing technologies. To support the relevant topics, the KTI
has widely used plastics processing technologies available,
such as mold injection, extrusion, and blow forming as well
as processing of thermosets. Furthermore, a variety of analyzing technologies has been set up to determine material
and processing characteristics. Another important element
is industrial services; the focus here lies on small and medium sized companies that dominate the industrial landscape
in Thuringia. The scope enfolds laboratory services, mold
trials, R&D projects up to management consulting. KTI is
part of an interdisciplinary network, which is activated correspondingly to the individual tasks and projects.
Research
The research topics given above can be seen as cross subjects regarding application technologies, machines and tooling, processing technologies as well as industrial services.
Research projects are executed on a scientific basis. The
activities mostly originate from industry oriented tasks. Research projects are generally conducted either as publicly
funded projects or as industrial research mandates. In addition, joint research projects offer the possibility to combine
both approaches. If required KTI offers project management capacities to ensure the project’s success. Addressed
industry segments are automotive, packaging, MedTec and
EET(OP).
Education
KTI offers lectures in the degree programs mechanical engineering, automotive engineering, mechatronics, optronics
and materials science. Currently, a master program in Plastic
Technologies is offered.
Student projects are usually set up according to current
research activities. To develop a student´s competence, all
activities within the KTI are individually coordinated to either specialize in a topic or to become a generalist, with an
excellent understanding of the basic concepts.
Contact
Michael Koch
TU Ilmenau
Internet
Telefon +49 3677 69-2450
Telefax +49 3677 69-1597
michael.koch@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/KTI
61
Power Electronics and Control in Electrical Enginering
Leistungselektronik und Steuerungen
Research Topics
•
Application of power electronic components
•
Design of hardware- and software assemblies based on DSP, microcontrollers, FPGA and special ASICs
•
Modelling and system simulation
•
Bidirectional DC/DC converters
•
Controls for electrical drive engineering
•
Active filters, automotive test bench equipment, on-board electrical systems for automobil
Member until 2011
Department
The department Power Electronics and Control deals with
power converter topologies for active power filters and power converter systems and their applications. The use of
simulation tools shows possibilities for loss reduction in power semiconductors, parallel and series cascading and gives
the possibility to predefine the thermal conditions. Microcontrollers and digital signal processors in combination
with programmable logic act as a control unit for electrical
drives, distributed energy sources and other power electronic systems. The department examines EMI-effects and its
mechanism.
Research Fields
• application of power electronic elements
• design of hard- and software modules on the basis of
DSP, microcontroller, FPGA and special Asic‘s
• digital feedback control of power electronic correcting
elements
• circuit technology
• modelling and simulation of the system
• thermal and EMC-conform construction of converter
modules, system integration
• decentral energy supply
• vehicle electrical systems of 12V, 24V, 48V voltage levels
• technology to charge a battery
Contact
•
•
•
•
•
•
•
•
•
•
bi-directional dc/dc-converters
isolated current supply, single- and three-phase 400 V
ac mains
integration of back-up batteries and fuel cells
power engines on the basis of rotating machines and
linear motors
multicomputer- control systems (DSP, microcontroller,
Tricore)
chasis dynamometer technology
active filters
quality of electrical energy
EMC
sensorless and adaptive control of electrical machines
Bachelor and Master Courses
The department supports several study directions concerning electrical engineering.
• power electronics and control
• modelling and simulations
• power converter topologies
• information techniques
• methods of control
• microcontroler and digital signal processor techniques
• active power filters and power flow control
• rating of power electronic devices
• control of electrical drives
• power electronic energy conversion
Jürgen Petzoldt
TU Ilmenau
Telefon +49 3677 69-2851
Telefax +49 3677 69-1469
fg-lest@tu-ilmenau.de
98693 Ilmenau
Internet
62
www.tu-ilmenau.de/lse
Precision Engineering
Feinwerktechnik
Research Topics
•
Design, installation and testing of ultra high precision positioning and measurement systems (for instance nanopositioning and nanomeasuring machines)
•
Creation and development of design principles applied for precision and ultra-precision technology
•
Development methods and tools for precision technology
•
Design, build up and testing of mechatronic functional units for precision technology; (for example mechanical
and optical probes)
•
Aerostatic and spring guidances
•
Development of principles to suppress (eliminate) mechanical vibrations of lowest amplitudes
•
Mechanical-optical devices
Department
The Department of Engineering Design, the Department of
Machine Elements and the Department of Precision Engineering together form the Institute of Design and Precision
Engineering (Institut für Maschinen- und Gerätekonstruktion, IMGK).
Research and education are focused on the field of precision
instruments and machines.
Education
Lecture series are provided in the fields of Mechanical and
Optical Components for Precision Engineering, and the Design of Precision Instruments and Devices.
The contents of the lecture series is being continuously updated in regard to the technological progress.
High value is placed on self-reliant design work of students in small project groups based on industry related design
tasks.
Research
Research work is concentrated in the area of ultra precision
techniques. In particular, concentration is focused on the
DFG funded collaborative research center SFB 622 “Nano
Positioning and Nano Measuring Machines (NPM)”.
Joint research work is also done together with the department of Engineering Design. The goal is to establish
fundamentals for the design and development of NPM.
Main topics are the development of design strategies, general design of nano machines and sensor-actuator integrated
mechanical subunits.
The department keeps close contact to national and
international research institutes, universities and industrial
partners.
Key words of further fields of activities are: aerostatic and
kinematical guidings, ultra precise probe heads and high
precision drive systems.
The z-axis actuation of the Nanomeasuring Machine in tetrahederal orientation (patent pending)
Contact
REM;
r. –cofired/REM)
Fakultät
für Maschinenbau
René Theska
TU Ilmenau
Internet
Telefon +49 3677 69-3957
Gustav-Kirchhoff-Platz 2
Telefax +49 3677 69-3823
Newtonbau, Raum 2030
rene.theska@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/fwt
63
Precision Metrology
Präzisionsmesstechnik
Research Topics
•
Nanomeasuring and nanopositioning technology (lead institute of the special research field SFB 622)
•
Nanometrology
•
Fibre coupled planar mirror interferometer and corner cube prism interferometer
•
Multi-coordinate measuring systems
•
Optical and tactile nanoprobe systems
•
Calibration technology and calibration standards for nanomeasuring machines
The Endowed Professorship
The Endowed Professorship of Precision Metrology forms
a part of the Institute of Process Measurement and Sensor Technology, together with the Department of Process
Measurement and the Department of Mechanical Engineering Measurement and Production Measurement. At the
Technische Universität Ilmenau, this Institute is in charge
of teaching in the areas of process measurement, production measurement, sensor technology for automation engineering, computer-aided processing of measuring values,
measurement dynamics, laser and precision measurement,
analysis and environmental measurement, and calibration
techniques. The Institute fulfils its teaching assignments for
the faculties of Mechanical Engineering, Electrical Engineering and Information Technology, Computer Science and
Automation as well as Economics Science. The Institute is
also responsible for the academic training in the branch of
study “Process Measurement and Sensor Technology”. The
highly qualified and practically oriented student training is
based on extensive research work in co-operation with a
number of partners from industry and the BMBF (German
Research Ministry), the DFG (German Research Society) and
the Thuringian Ministry of Science, Research and Culture.
Education
Among the fields for which the Institute is responsible, the
Endowed Professorship of Precision Metrology is in charge
of the following main educational areas:
• Nanopositioning and nanomeasurement technology
• Displacement and angle measurement technology
• Alignment and directional measurement technology
• Surface metrology
• Interferometric and laser measurement processes
• Nanometrology and nanomeasurement
• Nanoprobes, scanning probe microscopy, structural
analysis
• Optical and tactile probe systems.
Research
Within the framework of the joint research work conducted
by the Institute, the Endowed Professorship of Precision Metrology focuses its activities on the following main topics:
• Nanometrology
• Nanopositioning and nanomeasurement technology
(spokesman of the SFB 622)
• Fibre-coupled laser interferometers
• Multi-coordinate measuring systems
• Optical and tactile nanoprobe systems
• Calibration techniques and measurement standards
for nanomeasuring machines.
Contact
Eberhard Manske
TU Ilmenau
Internet
64
Telefon +49 3677 69-2822
Telefax +49 3677 69-1412
eberhard.manske@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/sfb622
Process Metrology
Prozessmesstechnik
Research Topics
•
High precision and dynamic force measurement and weighing technology
•
Micro and precision weighing technology
•
Development and investigation of high-resolution comparator scales
•
Dynamic and static behaviour of temperature sensors
•
Field calculation by means of FEA (temperature, mechanical stress)
•
Self-calibrating temperature sensors and miniature fixed-point cells
•
Investigation and modelling of the influence of microclimate on precision measuring instruments
•
Signal filtering and disturbance quantity correction
The Department of Process Measurement is a part of the
Institute of Process Measurement and Sensor Technology,
together with the Department of Mechanical Engineering
Measurement and Production Measurement.
At the Ilmenau University of Technology, this Institute is in
charge of teaching in the areas of
• Process measurement
• Production measurement
• Sensor technology for automation engineering
• Computer-aided processing of measurement values
• Measurement dynamics
• Laser and precision measurement
• Analysis and environmental measurement
• Calibration techniques.
Mass comparator system to determine 1 kg with the accuracy of 100 ng
(standard deviation 10-10)
The Institute fulfils its teaching assignments for the faculties
of Mechanical Engineering, Electrical Engineering and Information Technology, Computer Science and Automation as
well as Economics Science. The Institute is also responsible
for the academic training in the branch of study “Process
Measurement and Sensor Technology”.
Contact
Thomas Fröhlich
TU Ilmenau
Internet
Telefon +49 3677 69-2822
Telefax +49 3677 69-1412
Kirchhoffbau, Raum K 2005
info.pms@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/pms
65
Production Technology
Fertigungstechnik
Research Topics
•
Joining technology, especially for light weight materials and hybrid fonds
•
Cladding technology
•
Laser manufacturing welding and cutting
•
Machine tools
•
Micromanufacturing / precision technology
•
Material and component testing
•
Cutting technologies at will and turning for new lightweight materials
•
Process simulations
Department
The department of „Production Technology“ is situated in
the faculty of Mechanical Engineering and engaged manyfold in teaching and research concerning classical as well as
new production technologies. The department has a long
history regarding research at the interface between materials and production technology.
Research and Education
The working structure in the department consists of a
strong correlation between materials and their suitability to
be processed, production technologies and their properties
as well as manufacturing and its requirements to processes
in order to achieve an efficient result in terms of money and
product quality. Regarding this structure, the department
focuses its research on cutting, joining and cladding technologies with the aim to develop technologies and methods
in order to process new materials for innovative products
and constructions.
The department is equipped with turning and milling machines for macro- and for micromachining. Materials, cutting tools and their geometry and coating are assessed in
order to achieve high reliability and lifetime. Furthermore, a laser lab is part of the department, where welding,
soldering, brazing and cutting activities for light weight
constructions are carried out for research purposes or in
direct cooperation with industrial companies. Regarding joining technologies, a unique proposition of the department
is the solid state welding process, as for example diffusion
or friction stir welding. In the field of joining, the synergies
between melting and solid state processes allows true understanding of the mechanics and the metallurgy when joining different materials with each other as for example aluminum with steel, copper with aluminum or aluminum with
titanium. Arc welding ( GMA ) as well as cladding (Arc and
Plasma augmented arc) are perfomed on a robot in order to
process 3D-parts as well. Welding of magnesium and cladding with tungsten and valladium carbider are one focus at
the moment.
Education
Research and education are strongly connected in the department of production technology. The department is engaged in giving lessons, seminars and labs in the areas of
materials, technologies and manufacturing as for example
in Materials Science and Engineering, Electrical Engineering
and Mechanical Engineering, Mechatronics, Optronics, Automotive Technology, Biomedical Technology etc.
Contact
Jean Pierre Bergmann
TU Ilmenau
Internet
66
Telefon +49 3677 69-2981
Neuhaus 1
Telefax +49 3677 69-1660
Schützenhaus, Raum 109
jeanpierre.bergmann@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/fertigungstechnik
RF and Microwave Research Lab
Hochfrequenz- und Mikrowellentechnik
Research Topics
•
Antennas : Ultra-wideband (UWB), millimeter wave, vehicular, tracking and navigation, antennas, compact
antenna arrays, antenna for cognitive radio, and measurements (anechoic chamber, near- and far-field measurements)
•
High-frequency micro electromechanical (MEMS) devices and circuits
•
RF and microwave circuit and system design: Fronted architectures, switch-mode amplifiers passive and active
devices, integrated circuits, reconfigurable circuit elements,metamaterial devices
•
RF and microwave circuit technologies: Ceramic microwave-multi-layer modules (LTCC), hybrid integration, expertise in space qualification and on-orbit verifaction, frequency-domain and time-domain measurements
The RF and Microwave Research Lab deals with the propagation, interactions, and technical applications of electromagnetic waves, and circuits, signals, and systems based on
them, at frequencies between 100 kHz and 100 GHz. Methods include experimental precision measurements, numerical design, simulations, and theoretical analyses. The Research Lab, which is equipped with a modern infrastructure,
forms part of the Institute for Information Technology in the
Department for Electrical Engineering and Information
Technology. Reflecting the interdependences between technologies, devices, and systems, the Research Lab is also a
member of the interdepartmental Institute for Micro- and
Nanotechnologies and the Thuringian Centre of Innovation
in Mobility.
The RF and Microwave Research Lab contributes a highlevel education for the study programes of „Electrical Engineering and Information Technology“, „Computer Engineering“, „Communications and Signal Processing“, „Media
Technology“ and „Optronics“, featuring classical and modern aspects of RF and microwave techniques. In addition to
compulsory courses, in-depth studies of mobile or satellite
communications, antennas and wave propagation, audioand video-technology, and radar are offered. The lecture
courses are complemented and supported by illustrations,
seminars, instructions to problem solving, labs, and possibilities to join the research team. In the framework of labora-
Contact
tory programs, Bachelor-, Master-, and dissertation theses,
students gain professional knowledge and experiences, and
relevant skills like time management, team work, presentation, and project administration.
Antennas: Smaller – better – invisible. These claims lead to
challenges in the miniaturisation of antenna elements and
arrays, increasing operational frequencies and frequency
bandwidths, and adding adaptivity or functionality. Applications concern, cognitive radio, mobile communications,
radar techniques for biomedical diagnosis, satellite-based
navigation and communication, and wireless sensor technologies.
Circuits: Speed – efficiency – integration. Topics include
novel circuit architectures on the basis of the latest semiconductor technologies. Novel natural and artificial materials
are investigated for compact and low-loss passive and active
circuits like high-efficiency amplifiers and tunable filters. Fabrication techniques like ceramic multilayers combined with
silicon technologies play a key role for hybrid or monolithic
integration of complex modules.
The research and development of RF-MEMS holds fascinating promises for circuit layout, performance, and integration. Functions earlier achieved solely by semiconductor electronics can now be accomplished also by micromechanical
effects. Prominent examples include switches, controllable
resonators, filters, and oscillators.
Uni.- Prof. Dr. rer. nat. habil.
Fakultät für Elektrotechnik und In-
Matthias Hein
formationstechnik
TU Ilmenau
Internet
Telefon +49 3677 69-2831
Helmholtzplatz 2
Telefax +49 3677 69-1586
Helmholtzbau, Raum 2553
hmt@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/hmt
67
Solid State Electronics
Festkörperelektronik
Research Topics
•
Theoretical and experimental investigation on carrier transport
•
Material characterization and parameter extraction
•
Device simulation, modeling, and design,
•
Device processing (together with partners at TU Ilmenau and external partners),
•
Electrical device characterization
Department
The department is engaged in teaching and research on
preparation, measurement and simulation of semiconductor devices and circuits. The main topics of our work are
nano-MOS- and high frequency devices, power electronic
devices and circuits and devices of the polymerelectronics.
These topics are also reflected in our courses for the students in the faculty of Electrical Engineering and Information Technology in graduate education.
Research
The research focus is on the preparation, characterization
and optimization of semiconductor devices.
The polymer electronic research group is developing organic
field effect devices. The activities comprise the preparation
of low cost devices. While the organic light emitting diode is already in the commercial application, there are basic
problems to solve in the field of organic transistors. Consequently , the goal of our investigations is the optimization of
the device behavior.
The power electronics research group is developping complex circuits (embedded systems). The main topic is concerned with sensor circuits, digital and analogous circuits,
driver circuits and power electronic systems. The research
activities are closely enforced by industry. As an example
from CMOS technology, voltages up to 650V can now be
used. The RF & Nano Devices research group is developing
extremely small and fast transistors. To this end we investigate non-classical device concepts like multiple-gate MOSFETs and nanowires as well as novel materials like III-nitrides
and graphene. The group closely collaborates with leading
national and international groups in the field. Several ongoing research projects are financially supported by the EU,
by national funding agencies, and by the industry.
Education
The department offers undergraduate and graduate courses
to realize a high quality education for the students. The
spectrum comprises fundamental electronics courses and
labs with the main topic on semiconductor devices. In our
labs the students gain practical experiences. Already in the
fundamental courses the students gain a first insight in the
method of experimental investigation of semiconductor devices. In our graduate courses, we offer special courses in
the lab to increase the knowledge of experimental methods
in the investigation of semiconductor devices and circuits.
In our theoretical fundamental courses, we impart a competent knowledge of the function and operation of semiconductor devices. In addition to these courses, we offer
courses for nanoelectronics, high frequency devices, power
semiconductor devices and circuits and polymer electronics.
Contact
PD Dr.-Ing. habil.
Susanne Scheinert
TU Ilmenau
Internet
Internet
68
Telefon +49 3677 69-3714
Telefax +49 3677 69-3132
Kirchhoffbau, Raum 2013 b
susanne.scheinert@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/mne-fke
Surface Physics of Functional Nanostructures
Oberflächenphysik funktioneller Nanostrukturen
Research Topics
•
Surface and interface analyses
•
Molecular beam epitaxy
•
Materials:
Group III-nitrides
Oxides
Ionic liquids
•
Study of clean surfaces, material-molecule interaction and chemical reactions at surfaces
•
Surface functionalization and passivation
•
Chemical and electronic properties
•
Thermoelectrics
•
Sensors
The study of properties of surfaces and their interaction with
molecules is in the focus of the research group. Knowledge
about these topics on a molecular level is of key importance
for the application of most materials – in particular due to
the ongoing trend of miniaturization.
In particular, we intensively investigate the properties of
III-nitrides and heterostructures thereof, oxides (in particular
In2O3), and Ionic Liquids (ILs) by combining different experimental methods in ultra high vacuum.
Nitride growth for subsequent in-situ analysis is performed
by plasma assisted Molecular Beam Epitaxy controlled by Reflection High Energy Electron Diffraction. For surface investigation, X-ray and Ultraviolet Photoelectron Spectroscopy,
Metastable Induced Electron Spectroscopy, Auger Electron
Spectroscopy, Low Energy Electron Diffraction, Photoelectron Emission Microscopy, Scanning Tunnelling and Atomic
Force Microscopy are applied.
Our Research focuses on a detailed understanding of surface properties and processes in particular of semiconductors and ILs. By analysing chemical surface composition,
chemical bonds, and structural as well as the electronic properties of clean and adsorbate covered surfaces, important
insights are obtained.
Our studies on group III-nitrides provide information on the
electronic structure of clean surfaces including surface band
bending, surface reconstruction, interface band offsets and
molecule-surface interactions. This information is particularly important for improvement of electronic devices (e.g.
transistors) and sensors and also for optoelectronic applications.
Our studies on indium oxide are motivated by its potential
as a gas sensing material and the hope to tune the thermoelectric properties by varying structure and stoichiometry in
order to produce self-sustaining gas sensing devices.
Finally, ILs are a class of material with promising properties
for many applications. Their low vapour pressure enables
the material characterisation under vacuum conditions. Our
studies aim for an understanding of the surface orientation of the molecular constituents, the behaviour of dissolved species as well as the chemical analysis of nanoparticles
produced by the interaction of plasma with ILs containing
metal ions.
Our group is addressing the mentioned topics within several
third party funded projects, including two priority projects
of the DFG and in close collaboration with partners.
The research group is involved in the Education of students.
This includes regular lectures and seminars as well as supervision of students during their studies for a Bachelor, Master
and PhD degree. Besides regular teaching, the head of the
group is the consultant for the students of Technical Physics.
Contact
Internet
PD Dr. rer. nat. habil.
Stefan Krischok
Naturwissenschaften
Telefon +49 3677 69-3202
TU Ilmenau
Gustav-Kirchhoff-Str. 7
+49 3677 69-3405 (ZMN)
Telefax +49 3677 69-3365
Feynmanbau, Raum 312
stefan.krischok@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/funktof
69
System Analysis
Systemanalyse
Research Topics
•
Implementation of signal processing in embedded systems
•
Model based data analysis by means of techniques from automated classification, artificial neural networks and
the fuzzy theory
•
Signal and system models for deterministic and stochastic processes
•
Knowledge based systems for decision making to solve complex tasks in engineering and environment
•
System engineering for mechatronic systems and dimensional measuring systems in the nanometer range
•
Assistance systems
•
Microcontroller solutions
Services offered
•
•
•
Mathematic models and numerical simulation for systems and microsystems in mechatronics (optics, electronics, mechanics)
Model based signal processing, system monitoring and
signal analysis
Design of embedded systems
Special equipment
•
•
•
Robot systems by the firms Festo and Kuka
d-space systems for rapid control prototyping (test of
signal processing on prototypes)
Measuring station for laser tracker systems
Contact
Christoph Ament
Automatisierung
TU Ilmenau
Internet
Internet
70
Telefon +49 3677 69-2815
Helmholtzplatz 5
Telefax +49 3677 69-1434
Zusebau, Raum 3006
christoph.ament@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/systemanalyse
Technical Physics I / Surface Physics
Technische Physik I / Oberflächenphysik
Research Topics
•
Charge and Spin Transport through Single-Atom and Single-Molecule Contacts
•
Magnetism at the Nanometre Scale
•
Quasi-Particle Behaviour of Electronic and Vibrational Excitations
•
Spectroscopic Investigation into the Organic-Inorganic Interface
•
Advancement of Spin-Polarized Scanning Tunnelling Microscopy and Spectroscopy
Department
The department of Technical Physics I performs basic research in solid state physics of surfaces and interfaces. To
this end, a home-built scanning tunelling microscope operated in ultrahigh vacuum and at low temperatures has become operational in October 2012. A second low-temperature apparatus is being set up and will be mainly used for
combined scanning tunnelling and atomic force microscopy.
Vibrational spectroscopy using an Ibach-type spectrometer
is the second main analysis technique of the department.
Research
The department addresses modern solid state physics at
surfaces. In particular, the spin-dependent conductance of
low- dimensional conductors is investigated with a rather
unconventional approach: the tip of the scanning tunnelling
microscope controllably contacts single atoms or molecules
adsorbed to surfaces. These measurements enable the investigation into charge and spin transport in the ballistic
transport regime. With these experiments we have recently
built an atomic spin valve. Moreover, we have demonstrated
the tunnelling anisotropic magnetoresistance at the atomic
limit. The impetus for this main research direction of the department is unravelling opportunities and limits of molecular and spin electronics at a fundamental level. In addition,
excitation spectra of single atoms and molecules are used to
understand interactions between electronic, magnetic and
vibrational degrees of freedom, which are at the base of the
quasi-particle picture in solid state physics.
The second main research activities of the department aim
at the understanding of the charge transfer at the organicinorganic interface. The Carl Zeiss foundation has recently
funded a research project dealing with vibrational properties of this interface.
Education
Teaching is provided at the bachelor and master level. Lectures, problem classes and seminars in Experimental Physics,
Solid State Physics, Surface Physics, Scanning Probe Methods
and Physics of Nanostructures are examples for regularly
offered teaching activities.
Pseudo - three - dimensional presentation of a scanning tunnelling microscopy
image of 14 Pb-phthalocyanine molecules on Ag (111). The molecules were
arranged with the tip of the instrument to show the initials of the Technische
Universität Ilmenau.
Contact
Jörg Kröger
Naturwissenschaften
TU Ilmenau
Internet
Telefon +49 3677 69-3609
Langewiesener Straße 22
Telefax +49 3677 69-3205
K&B expert, Raum 30
joerg.kroeger@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/techphys1
71
Technical Physics II / Polymer Physics
Technische Physik II / Polymerphysik
Research Topics
•
NMR on polymers and soft matters
•
Characterisation of porous media: Geophysics, ceramics, glass materials
•
Noncontacting measurement of reaction and polymerisation
•
Coatings, lacquers, films: Drying, aging and composition
•
X-ray scattering on polymers and layer structures
•
Imaging of transport in complex fluids
•
Microfluidics and microreaction technology
•
Modelling the dynamic behaviour of molecules in limited geometry
•
Design of methodologies in low field-NMR
•
Parameter imaging of disease-realted degradation in cartilage and investigations of its biopolymeric compunds
The department of Technical Physics II / Polymer Physics is
specialized on research in the field of polymer science and
complex fluids in its bulk state as well as under confinement.
Research involved both theory and experimental parts. The
main experimental area in the department is Nuclear Magnetic Resonance (NMR). The applications of NMR span a
wide range of scientific disciplines, from physics to biology
and medicine. The department is equipped with a complete set of last generation NMR scanners and spectrometers
covering both high and low magnetic fields. A strong expertise in X-ray technique is also offered; the department
is equipped with two X-Ray Diffractometers. The research
group has a strong international profile and is currently collaborating with scientific groups in several countries around
the world.
Currently, biopolymers comprise an important area of research in the department. Biopolymers films are studied
using NMR, X-ray diffractometry and calorimetric techniques. Interesting features found in these kinds of materials regarding structure and dynamics are stimulating further
research in this area. We have shown how some microscopic
properties vary both in function of space and time during
film formation.
Polymeric materials by thermal processes and ionizing radiation undergo structural changes (aging) leading to marked
modification of their mechanical, dielectric and optical properties. Currently, aging studies are performed in both synthetic and natural polymers (biopolymers) using the combination of several techniques available in the department
and mentioned above. In this way, the problem is tackled
from different fronts and the study of static (structural) and
dynamic properties can be performed.
Teaching includes a wide spectrum of classes, tutorials and
labs in experimental physics.
For master students and PhD candidates the focus is put
on soft matter physics and NMR in both theoretical and experimental aspects. The research projects that are currently
developed in the department are the best foundation for
education, by transferring personal research experiences to
it as well as by engaging students as fellow-researchers in
current and tangible projects
Contact
Siegfried Stapf
Naturwissenschaften
TU Ilmenau
Internet
72
Telefon +49 3677 69-3671
Unterpörlitzer Straße 38
Telefax +49 3677 69-3205
Gebäude V, Raum 212
siegfried.stapf@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/techphys2
Theoretical Physics I
Theoretische Physik
Research Topics
•
Semiconductor physics
•
Plasmonics
•
Ultrafast nanooptics
•
Many-particle theory
•
Modelling and simulation
•
Computer-aided physics
•
Material physics
•
Theory of nanostructures
•
Disordered systems
•
Quantum chemistry
•
Energy research and photovoltaics
Department
Besides pursuing research as l’art pour l’art, the members
of the department enjoy the interaction with experimental
physicists and engineers in Ilmenau and elsewhere. They
suggest experiments, predict their outcome and help in the
interpretation of unexpected results. Most research activities are related to the study of the light-matter interaction.
Education
Teaching on the bachelor level includes the full spectrum
of classes, tutorials and computer labs in theoretical and
computational physics. Research-based classes for master
students and PhD candidates focus on solid state physics,
optics, material science, statistical physics as well as numerical methods and algorithms.
Research
A variety of analytical and numerical methods are applied
to a wide range of problems taken mostly from solid state
physics, nanooptics, nanostructure physics and material
science. Recent publications address the exciton-plasmon
coupling in hybrid systems of organic or anorganic semiconductors, second-harmonic generation in transparent oxides,
charge and energy transport in organic materials for photovoltaic applications, ionic liquids, and near-field optical
energy transfer. They result from close collaborations with
researchers in Ireland, Japan, Korea, Sweden, the USA and
several German groups. Further research interests are the
development of a theory of attosecond electron emission
in strong laser fields, statistical properties of disordered systems and optimization in high-dimensional spaces.
Illustration of linear and nonlinear light-matter interaction with plasmons
in disordered metal islands and excitons in a semiconductor quantum well
structure.
Contact
Erich Runge
Naturwissenschaften
TU Ilmenau
Internet
Telefon +49 3677 69-3707
Weimarer Straße 25
Telefax +49 3677 69-3271
Curiebau, Raum 320
erich.runge@tu-ilmenau.de
98693 Ilmenau
www.tu-ilmenau.de/theophys1
73
Theoretical Physics II / Computational Physics
Theoretische Physik II / Computational Physics
Research Topics
•
Numerical simulations
•
Mesoscopic systems
•
Optical microcavities, graphene, quantum dots
•
Many-body effects in the mesoscopic regime
•
Microlaser with directional emission
•
Semiclassical corrections to the ray picture
•
Quantum chaos and complex wave phenomena
Professor Martina Hentschel joined the Technische Universität
Ilmenau in April 2012 as head of the group Theoretical Physics II/Computational Physic. In June 2012, the group became
member of the Institute of Micro- and Nanotechnologies.
The group of Prof. M. Hentschel is particularly interested in
mesoscopic systems. With sizes typically in the micrometer
range, mesoscopic systems such as quantum dots, optical
microcavities, or graphene are too big for a full quantum mechanical description, yet small enough to see quantum signatures in the form of interference effects such as weak localization. In this sense and because of the typical length scales,
their place is in between the microscopic and the macroscopic
world (Greek meso: in between).
Interference effects are a typical sign of quantum and wave
phenomena, respectively. Examples include quantum transport phenomena and many-body effects in electronic microsystems (such as Fermi-edge singularities or the Kondo effect
in quantum dots of different geometric shape studied in the
group), and also deviations from the ray picture in form of
the Goos-Hänchen effect and the so-called Fresnel filtering
(see figure).
The latter lead to corrections of the well-known laws of reflection and refraction and destroy the principle of ray-pathreversibility.
Their implications are already visible in nowadays microoptical devices, and will become more relevant as the system size
is further reduced. Furthermore, the group is interested in
applications of microlasers, where miniaturization requires
new approaches to ensure the characteristic directional light
emission that is essential for their functionality. Here ideas
from quantum chaos and the principle of ray-wave correspondence are very useful. The research of the Computational Physics group has strong links to other active groups of
the Institute for Micro- and Nanotechnologies, in particular
to the group of Prof. M. Hoffmann (Micromechanical Systems) and of Prof. S. Sinzinger (Technical Optics). Here joint
activities on the interface between miniaturized and microoptics are ongoing.
Prof. M. Hentschel is leader of the DFG funded Emmy-Noether-Research Group “Many-body effects in mesoscopic
systems”.
Semiclassical corrections in near‐critical total internal reflection
reflected
ray
reflected
wave
Deviation of the reflected wave from the ray picture expectation:
•
lateral shift Goos‐Hänchen effect
•
angular shift
Fresnel filtering
42o
42o
42o
incident ray
= incident wave
air
Contact
Prof. Dr.
Martina Hentschel
Naturwissenschaften
TU Ilmenau
Internet
74
Telefon +49 3677 69-3612
Weimarer Straße 25
Telefax +49 3677 69-3271
Curiebau, Raum 308
martina.hentschel@tu-ilmenau.de
98693 Ilmenau
http://www.tu-ilmenau.de/theophys2
glass
Three-Dimensional Nanostructuring
Dreidimensionale Nanostrukturierung
Research Topics
•
Functional three-dimensional nanostructure design, fabrication and integration
•
Semiconductor and metallic materials synthesis based on template surface nano-patterning techniques
•
Large-scale addressable nano-optoelectronic and memory devices and systems
•
Novel solar fuels, energy storages, and sensing devices based on functional nanostructures.
•
Simulation and evaluation of nano-devices and systems
Department
The Department “Three-Dimensional Nanostructuring” is engaged on research topics concerning scalable functional nanostructures (especially of three-dimensional nanostructures)
and nano-patterns, with motivations on the realization of the
next generation of applicable highly efficient nano-devices
and systems. The department is a new member of the Institute of Micro- and Nanotechnology and of the Institute of
Physics.
Research
Nano systems or devices built from three-dimensional (3D)
nanostructures offer a number of advantages over those based on two-dimensional (2D) surface nano-patterns, such as
large surface area to enhance the sensitivity of sensors, to
collect more sunlight to improve the efficiency of solar cells
or fuels, and to supply higher density emitters for increased
resolution in flat panel displays. Therefore, the realization of
different kinds of scalable three-dimensional nanostructures
on substrates is a very important challenge topic within the
nanotechnology research field. Our department that is mainly
funded by BMBF ZIK-II and ERC are responsible for adapting
scalable template techniques that combine with advanced
equipments (e.g., Atomic layer deposition, Chemical vapor
deposition, Physical vapor deposition and Electrochemical
deposition) to fabricate and integrate different novel threedimensional structures.
Contact
Univ.-Prof. Dr.
Yong Lei
Telefon +49 3677 69-3748
Telefax +49 3677 69-3746
yong.lei@tu-ilmenau.de
Internet
There are three major surface-patterning templates derived
from self-assembly processes: ultra-thin alumina membranes (UTAMs), monolayer polystyrene (PS) sphere arrays, and
block copolymer (BCP) patterns. The feature size of the surface structures prepared using BCP, UTAM, and PS templates
can be adjusted within the range of about 5-50 nm, 5-500
nm, and 50 nm-4.5 µm, respectively, which covers a range
from quantum size to nanometer size and micrometer size.
Especially, the UTAM surface patterning technique provides
an efficient approach to prepare large-scale ordered surface
nano-patterns with well-defined structures, which provide
an efficient way for 3D nanostructuring. The UTAM and PS
nano-patterning methods are main surface nano-structuring
techniques in our department for 3D nanostructuring process.
Various interesting device-related properties, such as gas sensing, super-capacity, solar fuels and surface enhanced Raman
spectroscopy are investigated. Additionally, appropriate simulation methods (e.g., First Principle and Finite-difference timedomain) are utilized for better understanding and optimizing
of the electronic and optical properties of semiconductor
nano-devices.
Education
The Department “Three-Dimensional Nanostructuring” is actively participating in teaching of the cutting-edge knowledge
and the advanced equipments. Lectures, practical courses and
theses are given for bachelor, master and PhD students in material physics as well as in nanostructure physics.
Fakultät für Mathematik und Naturwissenschaften
TU Ilmenau
Prof.-Schmidt-Straße 26
Heliosbau, Raum 1102
98684 Ilmenau
www.tu-ilmenau.de/nanostruk
75
Research Activities
Fig. 1: Latest results from our Nano Rose Growers
Fig. 2: Scheme of microsegmented flow: transport, transformation and mixing
Contact
76
Research Activities
Contents
Inhalt
Facts and Figures ........................................................................................
2
Members of the Institute ...........................................................................
32
Research Activites .......................................................................................
76
Materials Science ..................................................................................................... 78
Technology ............................................................................................................... 102
Design & Simulation ................................................................................................ 122
Devices ..................................................................................................................... 133
Systems .................................................................................................................... 153
Nanomeasurement ..................................................................................................
163
Biotechnology & Life Science ..................................................................................
172
Scientific Publications (only in electronic version) ................................... 187
Contact
77
Materials Science
Surface Electronic Properties of Polar and Nonpolar
Indium Nitride (InN)
A. Eisenhardt, S. Krischok and M. Himmerlich
Research Group Surface Physics of Functional Nanostructures
Funding: Deutsche Forschungsgemeinschaft under
grant Scha 435/25 and Carl-Zeiss-Stiftung
Introduction
Investigating the surface electronic properties of indium
nitride (InN) is of great interest due to a strong electron
accumulation layer generally observed at InN surfaces. The
microscopic origin, the universality as well as posibilities to
manipulate the high electron densities of this layer have not
been well understood until now, even though they are very
important for future InN-based device fabrication [1]. New
experimental results indicate that the formation of a downward band bending at InN surfaces strongly depends on the
surface orientation [2], possible surface reconstructions and
corresponding surface states [3,4] as well as surface adsorbates [5].
Therefore, we are investigating polar and nonpolar InN
surfaces in-situ directly after epitaxial growth to evaluate
the surface electronic properties – particularly the surface
band bending in correlation with surface electronic states.
Subsequently, we are able to manipulate these surfaces by
exposure to different kinds of reactive molecules to evaluate
changes in the surface electronic properties that might be
important for future device fabrication and surface manipulation [5].
Experimental
Thin stoichiometric InN(0001)-2×2 (In-polar), InN(000-1)
(N-polar), InN(1-100) (m-plane) and InN(11-20) (a-plane)
samples were grown by plasma-assisted molecular beam
epitaxy and in-situ characterized by reflection high electron
energy diffraction (RHEED) as well as photoelectron spectroscopy (XPS, UPS).
Results
The 2×2 reconstructed In-polar InN surface shows a valence
band maximum (VBM) to Fermi-level distance (EF - VBM) of
1.4 eV indicating a strong surface downward band bending.
Furthermore, a reconstruction-induced surface state is observed that pins the Fermi-level above the conduction band
minimum and explains the surface electron accumulation at
InN(0001)-2×2 surfaces [3]. At N-polar and non-polar InN
surfaces no additional RHEED spots as indication for the
formation of surface reconstructions are observed and also
no surface states that might pin the Fermi-level above the
conduction band minimum (CBM). In good agreement to
theoretical investigations [4], the occupied surface states are
located close to the VBM at 1.6 eV, 2.1 eV and 1.8 eV for Npolar, m-plane and a-plane InN, respectively. The (EF-VBM)distance for N-polar, m-plane and a-plane InN is ~ 1.0 eV,
revealing a reduced surface downward band bending compared to reconstructed In-polar InN. With these measurements, we could confirm that surface electron accumulation
is not a universial feature of all InN surfaces and strongly
depends on surface reconstructions and the corresponding
surface electronic structure.
Fig. 1: (a) Schematic diagram of the surface band bending. (b) RHEED pattern of different InN surface orientations. The InN(0001) surface shows additional
diffraction structures (white arrows) corresponding to a 2×2 reconstruction. (c) UPS (HeI) spectra showing characteristic surface states.
[1] Anderson, P. A. et al. Appl. Phys. Lett. 89, 184104 (2006).
[2] Eisele, H. et al. Phys. Status Solidi RRL 6, 359 (2012).
[3] Himmerlich, M. et al. Phys. Status Solidi B 246, 1173 (2009).
[4] Van de Walle, C. et al. J. Appl. Phys. 101, 081704 (2007).
[5] Eisenhardt, A. et al. Phys. Status Solidi A 209, 45 (2012).
Contact
78
Stefan Krischok | +49 3677 69-3202 | stefan.krischok@tu-ilmenau.de
Materials Science
Reactive Elements: a Challenge to Obtain by
Electrodeposition in Their Elemental Form
A. Zühlsdorff, A. Ispas, A. Ulbrich, S. Krischok and
A. Bund
Funding: DFG, grants EN 370/14-1 and BU 1200/19-1 and SPP1191
(Kri2228/5-2).
Reactive elements such as Al, W, Ti, Ta or Nb, are difficult
to be obtained in their pure form by techniques that do not
imply sputtering, plasma vapor deposition or metallurgical casting. Electrodeposition is a technique that allows obtaining
many metals, semiconductors or polymers in different shapes,
with different thickness or roughness at reduced costs when
compared to metallurgical or sputtering techniques. On one
hand, those elements are very interesting for many industrial
processes. They are used in their elemental or in their oxidized
form, but also as components of alloys, in capacitors, in dental prosthesis or orthopedic implants, in pace-makers, in the
construction of buildings, airplanes, space-shuttles, submarines or cars - just to mention some few applications. On the
other hand, it is rather challenging to electroplate pure layers
of reactive metals.
Our work focuses on obtaining new insights into the electrochemical reduction mechanism of halides of some reactive
metals in a special class of solvents which are called ionic
liquids, and to obtain good deposits at relatively low costs
and with physico-chemical properties that would allow their
use in industrial applications [1]. We combine classical electrochemical techniques with X-Ray Photoelectronspectroscopy (XPS) in order to shed more light on the reduction mechanism of reactive metals and to learn more about the chemical
nature of the deposited layers [2,3]. Furthermore, we investigate the chemical state of the dissolved species and their role
in the electrodeposition mechanism ([3], fig. 1). It is possible
to investigate solutions of ionic liquids under UHV conditions
as these compounds - although being liquid - have a very
low vapor pressure. We could show that the electroreduction
of tantalum halide is a complex process that implies at least
two intermediate reduction steps. The deposits were usually
rough and cracked. XPS analysis showed that elemental tantalum can be obtained. The surface always has a high content
of tantalum oxides due to the quick oxidation of such reactive
metals in air.
Fig.1: a) SEM image of a Ta layer electrodeposited by pulse plating from 0.5 M TaF5 in 1-methyl-3-propyl imidazolium bis(trifluoromethylsulfonyl) amide. b)
changes of the Ta XPS spectra of the layer from a) with increasing sputtering time
[1] N. Borisenko, A. Ispas, E. Zschippang, Q. Liu, S. Zein El Abedin, A. Bund and F. Endres, Electrochim. Acta 54 (2009) 1519.
[2] A. Ispas, B. Adolphi, A. Bund and F. Endres, Phys. Chem. Chem. Phys. 12 (2010) 1793.
[3] S. Krischok, A. Ispas, A. Zühlsdorff, A. Ulbrich, A. Bund, and F. Endres, ECS Trans. 50 (11) (2012) 229.
Contact
Andreas Bund | +49 3677 69-3107 | andreas.bund@tu-ilmenau.de
79
Materials Science
Strain Modification in AlN
R. Nader1, J. Pezoldt2
Groupe d‘Etude des Semi-Conducteurs, CNRS-UMR, Universite de
Montpellier II
2
FG Nanotechnologie
1
Funding: Agence Universitaire de la Francophonie P6-411/3089
AlN is an important and exciting multifunctional material.
Due to its wide band gap of 6.2 eV, high thermal conductivity,
low thermal expansion coefficient, high chemical and thermal stabilities, high breakdown dielectric strength, and high
surface acoustic wave velocity it has applications in advanced electronic devices, micro- and nano-electromechanical
systems, surface acoustic wave devices, optoelectronics and
field emitters as well as for heat sink and energy harvesting
applications. However, the synthesis and the epitaxial growth
are a challenging task. Especially for electronic and optoelectronic applications of this material, the use of substrates such
as sapphire, SiC or Si, due to unavailability of large area single
crystal AlN substrates, has to be involved. As a consequence,
the substantial lattice mismatch and thermal expansion coefficient difference result in large stress fields in the AlN layer.
This significantly effects the material properties and the performance of AlN-based devices.
μ-Raman and FTIR spectroscopies are versatile, non-invasive
and sensitive techniques to obtain information about stress
and strain fields in epitaxial semiconductor layers and device structures. The measurement of different elastic fields
requires knowledge of phonon frequency position. It is well
known that phonon frequencies are related to the stress or
strain values in the layers . The residual stress of the grown layer effects the surface properties, in terms of morphology and
surface roughness, which retroact on the reflectivity spectrum
and reflection intensity.
The influence of the silicon surface modification prior to the
3C-SiC (111)/Si(111) formation was systematically studied
using the impact of structural and morphological changes on
the optical properties of the grown AlN layer.
The thickness of the 3C-SiC (111) decreases with increasing
Ge content deposited prior to the SiC formation process. If
the Ge deposition exceeds 1ML, the thickness of the formed
3C-SiC reduces from 3 to 4 nm to a value of around 2 nm (Fig.
1). At the same time, the strain in the 3C-SiC(111) decreases
from 10-2 down to values below 10-3 at 2 ML Ge. The strain
reduction occurs for Ge amounts exceeding 0.5 ML Ge. At the
same time, the surface roughness of the 3C-SiC(111)/Si(111)
pseudo-substrate reduces from 1.1 nm to approximately 0.4
nm [1, 2]. If AlN is grown on Ge modified 3C-SiC(111)/Si(111)
pseudo-substrates, the crystalline quality and surface morphology is increased, evidenced by an increase of the infrared reflectivity and the reduction of the residual tensile stress in the
2H-AlN(0001) epitaxial layers obtained by the phonon peak
positions (Fig. 2). The present investigation indicates that a
coverage of 1 Ml Ge prior to the formation of the SiC(111)/
Si(111) pseudo-substrate achieves the strongest effect.
Fig. 1: 3C-SiC(111) epitaxial layer thickness and strain in [111] direction versus
Ge precoverage prior to the Si(111) to 3C-Si [2]
Fig. 2: Variation of the LO phonon peak position and the intensity of the TO
phonon peal of AlN versus Ge predeposition [2].
[1] R. Nader, M. Kazan, E. Moussaed, Th. Stauden, M. Niebelschütz, P. Masri, J. Pezoldt, Surf. Interface Anal. 40, 1310 (2008).
[2] R. Nader, J. Pezoldt, Diam. Related Mater. 20, 717 (2011).
Contact
80
Jörg Pezoldt | +49 3677 69-3412 | joerg.pezoldt@tu-ilmenau.de
Materials Science
Graphene Mobility Improvement on SiO2
J. Pezoldt1, Ch. Hummel1, F. Schwierz2
1
2
FG Nanotechnologie
FG Festkörperelektronik
Funding: Excelence Research Grant TU Ilmenau 21410671 and
214100010
The carrier transport in graphene is affected by interlayer
scattering, impurity scattering at graphene edges and at the
graphene – insulator interfaces. The latter is unavoidable
because the active material graphene in conventional device structures is embedded in an insulating environment.
Recently it was shown that the carrier drift mobility in top
gated graphene field effect transistors can be improved if
an additional intermediate layer is inserted between the
high-k gate dielectric and the active graphene layer in the
graphene field effect transistor (GFET). Furthermore, for improved graphene properties it is necessary to avoid defect
formation during bonding and insulator deposition, because they detrimentally affect the graphene properties. Therefore, decoupling of graphene from the underlying substrate
may improve the electronic properties of graphene. This was
achieved by modifying the silicon dioxide surface with hexamethydisilazan (HMDS) prior to the graphene exfoliation
and bonding on silicon dioxide covered silicon wafers.
Highly oriented polycrystalline graphite (HOPG) was used as
source material for graphene fabrication. Prior to graphene
exfoliation and bonding, the silicon dioxide surface was modified using three different techniques: (1) RCA wet cleaning, (2) RCA wet cleaning followed by an oxygen chemical plasma treatment, (3) RCA wet cleaning combined with
oxygen chemical plasma treatment finished with HMDS deposition.
The graphene field effect devices were fabricated using
electron beam lithography combination of oxygen plasma,
and HMDS treatment of the silicon surface showed the largest positive impact on the hole carrier mobility (Fig. 1).
The low field carrier drift mobility is believed to be limited
by scattering with charged impurities, multiadsorbate scattering, microscopic ripples and intrinsic phonons.
Therefore, the increased drift mobility can be attributed to
a reduced multiadsorbate and charged impurity scattering.
The reduction of the multiadsorbate scattering is also supported by the shift of the Dirac point to lower voltages due
to the fact that adsorbates cause an increasing p-type charge transfer doping. Another contribution of HMDS deposition to the improved transport properties might be related
to the decoupling of the graphene from the silicon dioxide
surface. This reduces scattering by charged traps in the silicon dioxide and surface phonons. This improves the transport properties in a similar way as observed in case of free
standing graphene. The influence of the intermediate HMDS
might be similar to the observed effect of field effect carrier
drift mobility improvement in top gated GFETs, where an organic polymer buffer layer was inserted between graphene
and conventional gate dielectrics [2].
Fig. 1: Room temperature low filed carrier mobilities of graphene field effect
devices [1]
[1] J. Pezoldt, Ch. Hummel, F. Schwierz, Physica E 44, 985 (2012)
[2] D.B. Farmer, H.-Y. Chiu, Y,-M. Lin, K.A. Jenkins, S. Xia, Ph. Acouris, Nano Lett. 9, 4474 (2009)
Contact
Jörg Pezoldt | + 49 3677 69-3412 | joerg.pezoldt@tu-ilmenau.de
81
Materials Science
Polytype Transitions and Defect Interactions
J. Pezoldt1, A.A. Kalnin2
1
2
FG Nanotechnologie
Saint Petersburg Electrotechnical University
Polytypism is a special one dimensional form of polymorphism and a general behavior of layered structures. Physically
the phenomena of polytypism and polymorphism are quite
different from each other. Different polytypes of a given material appear under identical conditions of temperature and
pressure and display syntactic coalescence of polytypes, while
polymorphic phases appear in a well defined parameter range. It has to be noted that polytype transitions (PTs) are not
only a specific feature of growth processes, but occur also
during plastic deformation, diffusion, ion implantation, ion
milling and oxidation of SiC in metal semicondutor contact
systems. Therefore, PTs are a general phenomena occurring in
all relevant device processing steps and act as a special defect
formation process [1]. Furthermore, especially in the case of
high power devices, PTs can be stimulated during electrical
operation of electronic devices.
Generalizing the experimental evidence, it can be stated that
PTs are caused by relaxation processes or energy dissipation in
the stationary state of processing steps or device operation.
The energy dissipation is related to thermodynamic fluxes and
forces of the physical process and can be described within the
framework of nonequilibrium thermodynamics. As a consequence of the dissipated energy disorder is generated in the
stacking sequence of the polytype structure (PS). The disorder
in the stacking sequence is linked to stacking faults (SF) and
partial dislocation (PD) formation, which can be traced back
to the energy dissipation process. The local changes of the PS,
evoked by the SF, are elements of a new PS. So, the energy
dissipation in the PS led to an excess of structural information.
Collective and selective interactions between theses defects
result in a stability loss of the initial PS. The collapse of the
initial structure and the rearrangement of the defect system,
containing structural information excess, results in a new and
better adapted PS.
A simple birth-death model is assumed able to describe the
changes in the stacking sequence of the PS. Within this model only one stable solution for a specific defect type or a
set of defects generated by a certain physical process was
found (Fig. 1). This refers to the possibility of only one defined
stationary state of the PS with a given disorder caused by
SF. The simulation results can be summarized as follows: (1)
inceasing dimensions of the generated defects decreases the
critical defect generation rate due to an increase of the defect
selfannealing time scaling with defect dimension, (2) increased Burgers vector modules and SF energies increases critical
defect generation rate caused by a decrease of the defect selfannealing increased by higher dislocation line tension and
therefore selfannealing forces, (3) external or internal stress
fields reduces critical defect generation rate and if the stress
fields approach the line tension and SF energy the developed
model transfers into the model of Olson and Cohen.
Fig. 1: Normalized mean defect distance versus normalized defect generation rate [2]
[1] A.A. Kalnin, F. Neubert, J. Pezoldt, Yu.M. Tairov, I.E. Yaryomenko, Wiss. Tag. TU Chemnitz 11, 52 (1987).
[2] J. Pezoldt, A. A. Kalnin, Adv. Mater. Res. 324, 217 (2011).
Contact
82
Materials Science
Mechanical Properties of Cubic Wide Gap Materials
(USENEMS)
J. Pezoldt1, R. Grieseler2, T. Schupp3, D.J. As3, P. Schaaf2
FG Nanotechnologie
FG Werkstoffe der Elektrotechnik
3
Department Physik, Universität Paderborn
1
2
The knowledge and control of the mechanical properties and
the residual stress are essential for micro- and nanoelectromechanical systems (MEMS and NEMS). They are covering a
wide application range with varying designs from cantilevers/
bridges up to membranes. Due to their physical properties SiC
and group III-Nitrides, especially AlN, are preferable materials
for MEMS and NEMS applications. Compared to non piezoelectric materials the piezoelectricity adds an additional energy dissipation path affecting the vibration properties and the
quality factor of the MEMS device. From this point of view,
the applications of the cubic modifications of these materials
as non piezoelectric materials offer the advantageous use of
these materials without piezoelectric effects. The mechanical
and dissipative properties are affected by the epitaxial layer
quality, their dislocation densities and the residual stress. These quantities in turn depend on used substrate and growth
technology. However, the growth of cubic III-nitrides on Si
substrates is a challenging task, and the mechanical properties of heteroepitaxial grown cubic III-ntrides are not well studied.
3C-AlN and 3C-GaN were grown by plasma assisted molecular beam epitaxial growth on Si(100) substrates, as well as on
3C-SiC grown on Si(100) and Si(111). The III-nitride epitaxial
Fig. 1: Indentation modulus versus germanium precoverage prior to 3CSiC(100) on Si(100) epitaxy [3].
Funding: TMBWK contract B714-09065
Fig. 2: Indentation modulus versus germanium precoverage prior to
3C-SiC(111) on Si(111) epitaxy [3]
growth uses RHEED transients to control the stable growth
front on 3C-SiC(100)/Si(100) and to achieve reproducible optimal growth conditions. The 3C-SiC(100) and 3C-SiC(111)
heteroepitaxial layers were grown by solid source molecular
beam epitaxy using a specific interface design technique based on the incorporation of Ge into the 3C-SiC/Si interface
and into the near interface region [1, 2].
The hardness and the elastic modulus of the grown heteroepitaxial cubic III-nitride and 3C-SiC layers were determined
by nanoindentation experiments. From the load-displacement
curves, the elastic and plastic response as well as the compliance was determined. At low loads, the samples showed
an elastic response, whereas at higher loads a plastic deformation was observed. The reduced Young modulus of the
3C-AlN(100) was in the range between 130 and 260 GPa
and showed a strong dependence on the substrate as well as
on the indentation orientation. For 3C-GaN, values ranging
from 200 GPa to 250 GPa were obtained. In the case of 3CSiC(100) and 3C-SiC(111), the reduced Young modulus showed a dependence on the amount of Ge incorporated into
the SiC/Si interface (FiG. 1 and 2).
[1] Ch. Zgheib, L.E. McNeil, M. Kazan, P. Masri, F.M. Morales, O. Ambacher, J. Pezoldt, Appl. Phys. Lett. 87, 041905 (2005).
[2] Ch. Zgheib, L.E. McNeil, P. Masri, Ch. Förster, F.M. Morales, Th. Stauden, O. Ambacher, J. Pezoldt, Appl. Phys. Lett. 88,
211909 (2006)
[3] J. Pezoldt, R. Grieseler, T. Schupp, D.J. As, P. Schaaf, Mater. Sci. Forum, 717-720, 513 (2012).
Contact
83
Materials Science
Interaction of Potassium with InN(0001)-(2x2)Surfaces
S. Reiß, A. Eisenhardt, S. Krischok, M. Himmerlich
Funding: Deutsche Forschungsgemeinschaft under grant
Scha 435/25
Introduction
InN is a semiconductor material whose small band gap and
high electron mobility promise the effective use in optoelectronic and high speed electronic devices. Furthermore, its high
biocompatibility and sensitivity [1] makes it an interesting material for biosensoric devices. Potassium is one of the most
important elements in living cells. Therefore, its impact on
InN surfaces is important for the realisation of InN-based biosensors. Additionally, the interaction processes of InN and
Potassium might also be interesting for the realisation of InN
based MOS-devices (MOS: Metal-Oxide-Semiconductor) with
potassium as a catalyst for the formation of ultra thin oxide
films [2]. A challenge in realising InN-based devices is to control the unintenionally high n-type doping of the material and
the strong surface electron accumulation layer. In this context, the manipulation of the surface electron concentration
with adsorbates seems very promising especially with regards
to sensor applications [3, 4].
Epitaxial growth and in-situ characterisation of InN
The InN-films are grown by plasma-assisted molecular beam
epitaxy on GaN/Sapphire-templates. The epitaxial growth
was controlled by reflection high electron energy diffraction. Depending on the growth parameters, a 2x2-surface
reconstruction could be prepared [5]. Immediately after the
epitaxy the samples were in-situ characterised by photoelectron spectroscopy (PES) without interrupting the ultra-high
vacuum condition. The Potassium was offered via an alkali metal dispenser in the analysis chamber while performing
PES-measurements.
Interaction of InN with potassium atoms
The potassium adsorption leads to a strong reduction of the
work function of the InN films. This indicates the formation of
a positive potassium-induced surface dipole acting as electron
donator. Furthermore, a core level and valence band (VB) maximum shift of 0.2 eV to lower binding energies is observed
during the potassium adsorption. This energetic shift can be
associated with a reduction of the downward surface band
bending and hence the reduction of the electron concentration at the surface. The reduction in electron concentration
cannot be directly explained by the assumed donor-type behaviour of Potassium. Therefore, further investigations are necessary to understand the whole adsorption process. Besides
the changes in the surface electronic properties, new Potassium induced states were identified in the PES-spectra. One of
them is a new nitrogen core level state at 398.2 eV, and the
other two states are close to the Fermi edge at 1.2 eV and 0.6
eV. Degenerate InN bulk states in the VB region split up due
to the potassium interaction and form additional peaks in the
VB spectrum.
Fig.1: RHEED pattern of InN(0001)-(2x2). The white arrows mark additional
diffraction fringes caused by the 2x2-surface reconstruction.
Fig. 2: Shift of core level states to lower binding energies and the formation of
a new nitrogen core level state at 398.2 eV.
[1] Yuh-Hwa Chang et al., IEEE Sensors Journal 11(5), 1157 (2011)
[2] J. E. Gayone et al., Surface Science 519(3), 269 (2002)
[3] Lebedev et al. J. Appl. Phys. 101 (2007) 123705.
[4] A. Eisenhardt et al. Phys. Status Solidi A 207 (2010) 1037 – 1040.
[5] M. Himmerlich et al. Phys. Status Solidi B 246 (2009) 1173-1176
Contact
84
Stefan Krischok | +49 3677 69-3202 | stefan.krischok@tu-ilmenau.de
Materials ScienceS
Ionic Liquid Surfaces - Theory Meets Experiment
M. Reinmöller1, A. Ulbrich2, S. Krischok2 W. J. D. Beenken1, E. Runge1
1
2
Funding: DFG-SPP 1191 “Ionic Liquids”
Ionic Liquids (ILs), i.e. salts with melting points below approx.
100°C, are of great technological interest as solvents, electrolytes, lubricants, and for many other applications. In order to understand the IL properties, the surfaces-structure,
which is expected to be significantly different from the bulk,
is of particular interest. It is experimentally studied using Xray photoelectron spectroscopy (XPS), ultraviolet photoelectron spectroscopy (UPS), and metastable induced electron
spectroscopy (MIES) in the Research Group Surface Physics of
Functional Nanostructures.
In a common DFG project (SPP 1191 “Ionic Liquids”,
Kr2228/5), the quantum chemistry group of Theoretical Physics I supports the interpretation of these experiments with
quantum-chemical DFT calculations of single ion pairs. Based
on these calculations, we reconstructed XPS and UPS valence
spectra [1]. These reconstructions allow us to identify the contributions of each atom to the XPS spectrum separately and
thus to correlate the observed features to functional groups
in the ion structure.
In the figure, this is demonstrated for the valance states of
a series of imidazolium cloride based ILs [XMIm]Cl, where X
stands for one alkyl side chain varied from ethyl (X=E) over
butyl (X=B) and hexyl (X=H) to octyl (X=O) [2].
Usually, one would utilize for the discrimination of surface
and bulk signals the different inelastic mean free path of the
photoelectrons in ultraviolet and X-ray photoelectron spectroscopy - UPS HeII has the lowest and XPS the highest information depth. However, in the present case the much higher cross-section of the Cl-anion for XPS, which results in the
XPS-dominating peak at 4eV, prevents a simple analysis along
these lines. Nevertheless, by a detailed comparison of the reconstructed spectra with the measured more surface-sensitive
UPS spectra, we were able to obtain information on the dominating groups at the surface. In agreement with angularresolved XPS measurements from another group in the SPP
1191 [3], we could confirm that the alkyl chains dominate
at the outermost surface, whereas the chlorine signal at 4eV
decreases with increasing alkyl chain length in the measured,
but not in the reconstructed spectra. This means that the concentration of Cl-anions is reduced at the surface.
An analysis based on the even more surface-sensitive MIES
method shows that in the case of [OMIm]Cl - in contrast to
UPS and XPS - no clorine-related features are detectable at
the surface: the MIES spectra are dominated by the alkyl chain
of the imidazolium cation [2].
Fig. 1: a) Valence-band spectra of [XMIm]Cl detected with XPS, UPS He I and
UPS He II. b) Reconstructed XPS, DOS, and UPS (He II) spectra.
[1] M. Reinmöller, A. Ulbrich, T. Ikari, J. Preiß, O. Höfft, F. Endres, S. Krischok, W. J. D. Beenken, Phys. Chem. Chem. Phys., 13
(2011) 19526-19533.
[2] A. Ulbrich, M. Reinmöller, W. J. D. Beenken, S. Krischok, ChemPhysChem, 13 (2012) 1718-1724.
[3] C. Kolbeck, T. Cremer, K. R. J. Lovelock, N. Paape, P. S. Schulz, P. Wasserscheid, F. Maier, H. P. Steinrück, J. Phys. Chem. B 113
(2009) 8682-8688.
Contact
Wichard J. D. Beenken | +49 3677 69-3258 | wichard.beenken@tu-ilmenau.de
85
Materials Science
DphotoD - Quantumchemical Calculations of
Dendrimers with Tetrapyrrolic Cores
W. J. D. Beenken, M. Presselt, P. Keck, E. Runge
Funding: EU FP7-PEOPLE–2009-IRSES ‚DphotoD‘ and Carl-Zeiss-Stiftung
DphotoD is an EU-project (FP7-PEOPLE –2009-IRSES) dealing with dendrimers built up from tetrapyrrolic cores like
porphyrin or corrole with aromatic dendrons connected at
the meso or beta positions of the core. The aim of the project is to explore the potential of such dendrimers as building blocks for photonic devices or optical nanomarkers.
These concepts exploit the fact that the chemical environment influences the dendrimer conformation (e.g. a rod-tocoil transition) resulting in a significant change of the absorption and fluorescence spectra by specific chromophoric
core-dendron interactions.
We provide quantum-chemical calculations of the dendrimer
conformation to our project partners from the Department
of Chemistry at the Katholieke Universiteit Leuven, Belgium
(Prof. Wim Dehaen) and the School of Porphyrin Chemistry
at the Institute of Solution Chemistry of the Russian Academy of Sciences in Ivanovo, Russia (Prof. Nugzar Marmadashvili), which within DPhotoD are in charge of the syntheses of
the dendrimers. Furthermore, we calculate the corresponding spectra for our partners at the B.I. Stepanov Institute
of Physics of the National Academy of Sciences of Belarus
in Minsk and the Single Molecule Spectroscopy Group of
the Department of Chemical Physics of Lunds Universitet,
Sweden, which perform the spectroscopic characterization.
Our calculations already show that first generation dendrimers like 10-(4,6-dioxopyrimidin-5-yl)-5,15-dimesitylcorrole
provide a wide variation in the conformation with dendrons
either fanning-out or sheltering the core (Fig. 3 left and
right, respectively).
Fig. 1: Absorption spectra for the “fanning-out” conformation
Contact
86
Fig. 2: Absorption spectra for the “sheltering” conformation
The corresponding spectra in Fig. 1 and 2 show significant
differences for the two conformers for both NH-tautomers
of the corrole core (read and blue spectra correspond to the
third H position as marked in the same color in the structure
formula of Fig. 3). Most prominent is the presence of the
absorption band at 2.3 eV for the “shelter” conformer. For
the other conformer, it is much less intense and red-shifted.
Our calculations of related second-generation dendrimers
exhibit the same feature (not shown). Next, our partners
will functionalize the leaves of this dendrimer with sensitive
groups, promoting either “fanning-out” or “shelter” in the
presence of specific chemical environment. For these compounds, the band at 2.3 eV can be used as a very sensitive optical indicator for the corresponding conformational
changes.
Fig. 3: “Fanning-out” (left) and “sheltering” (right) conformations of 10-(4,6-dioxopyrimidin-5-yl)-5,15-dimesitylcorrole
Wichard J. D. Beenken | +49 3677 69-3258 | wichard.beenken@tu-ilmenau.de
Materials Science
UseNEMS- Ultreasensitive Materials for MEMS and
NEMS Devices
R. Grieseler, K. Tonisch, J. Klaus, M. Stubenrauch, St. Michael,
J. Pezoldt, P. Schaaf
Funding: Thuringian Minister of Education, Science and Culture (TMBWK),
(UseNEMS: B714-0965)
Wide-bandgap semiconductor materials, such as SiC, AlN,
GaN and AlGaN/GaN heterostructures, are prospective materials for MEMS/NEMS devices due to their superior mechanical, thermal and chemical properties and biochemical
stability. In device design, the knowledge of mechanical properties of new thin film materials is essential for the design
of MEMS/NEMS, because the resonant frequency and the
quality factor depend critically on the material properties
as well as on the residual stress. Especially for sensors and
actuators based on freestanding structures, residual stress
of the active material can lead to limited usability and reliability causing failures in MEMS and NEMS devices. Mechanical properties of micro- and nanoelectromechanical systems
can be significantly different from those of the bulk or the
thin film material properties, from which they are made of.
To determine the internal stress of both a thin film and a
structure, different methods could be applied [1]. Determining the internal stress common methods are X-ray diffraction as well as FTIR-Ellipsometry or, as used on wafer level,
wafer bow measurements. Determining the internal stress
of devices is rather difficult. In order to show the change of
the internal stress on device level an idealized device was
used. For that, doubly-clamped beams were produced using
chlorine and fluorine based plasma etching processes. The
gained structures are shown in fig. 1. Following, the mecha-
Fig. 1: Freestanding doubly-clamped beams
nical properties of these structures were investigated by applying indirect parameter identification by modal frequencies using Laser-Doppler-Vibrometry. Simultaneously a FEM
simulation was applied as shown in Fig. 2 correlating modal
frequencies to the internal stress of the doubly-clamped beams. A first indication of residual stress could be shown by
wafer bow; however, this depends on precise knowledge of
the Young’s modulus and the Poisson’s ratio of the substrate
and further restrictions and geometrical parameters. Furthermore, it is a very integral measurement over a full wafer.
Local differences and gradients could not be measured with
this method.
FTIR-ellipsometry seems to be a quite better pre-determination tool for residual stress. Depending on the applied
model, the residual stress of a part of the thin film could be
determined precisely. The Laser-Doppler vibrometrie in combination with FEM simulation is a good tool for determination of the internal stress of free standing doubly-clamped
beams.
The applied methods showed a good correlation. Furthermore the influence of the liberation process of the beams
could be shown. Further investigations should show the applicability of the used methods to other high-tech materials
such as nanolaminate MAX-phases or graphene.
Fig. 2: FEM simulation of the 3rd Eigenmode of a doubly-clamped beam
[1] R. Grieseler, J. Klaus, M. Stubenrauch, K. Tonisch, S. Michael, J. Pezoldt, and P. Schaaf, “Residual stress measurements and
mechanical properties of AlN thin films as ultra-sensitive materials for nanoelectromechanical systems,” Philosophical
Magazine, vol. 92, no. 25–27, pp. 3392–3401
Contact
Peter Schaaf | +49 3677 69-3611 | wet@tu-ilmenau.de
87
Materials Science
Complementary Analytical Investigations of Ti-Si-C
Multilayer Structures Deposited by PLD
Th. Kups, M. Hopfeld, M. Wilke and P. Schaaf
Materials for Electronics
Funding: DFG under grant DFG Scha 632/10
Mn+1AXn (MAX) phases are a group of ternary carbides or
nitrides with M being an early transition metal (mainly of
the groups IVB and VB), A being an A group element (IIIA,
IVA) and X being either C or N [1]. They combine metallic
and ceramic properties as relative high electrical conductivity and high oxidation resistance, due to their nanolaminated
structure [1,2]. These properties give rise to many potential
application of MAX phases in thin films – for instance wear
and corrosion resistant coatings of electrical (high temperature) contacts on different substrates.
The growth of crystalline MAX phase thin films however is
not trivial. Various groups reported the growth by magnetron sputtering and pulsed laser deposition (PLD) of MAX
phase thin films whereby only PLD on the formation of crystalline TiC x films with incorporated amorphous Si was confirmed [3,4].
Evidence for the formation of MAX-phases by PLD has not
yet been presented. Concerning the advantages of PLD, an
idea is to create a multilayer structure of Ti, C and Si and
to investigate the Ti3SiC 2 phase formation, depending on
interface-mixing and diffusion of the elemental layers at different temperatures [5,6,7].
In this work, PLD of Ti-, C- and Si-multilayers is investigated
in detail. The defects generated by pulsed laser ablation like
dislocations and lattice vacancies support the diffusion of Si
between the layers with increasing substrate temperature.
Thus, different sample-sets were prepared with varied single layer thicknesses at substrate temperatures of 550°C and
700°C onto amorphous Si3N4 substrates.
The multilayers prepared at substrate temperatures of 550°C
and 700°C were analysed using several techniques. Diffusion profiles and elemental distribution were determined by
glow discharge optical emission spectroscopy (GDOES) and
by electron energy loss spectroscopy (EELS) in transmission
electron microscopy (TEM, Tecnai 20S-Twin). The structure
and the phase formation of the deposited and thermal treated films were investigated by X-ray diffraction using the
grazing incidence method (GI-XRD) and TEM by diffraction
patterns and FFT-analysis of high resolution images.
TEM bright field images of samples deposited at 700°C
show the multilayer character in a thick layer sample design
(Fig. 1a) in the upper layer part, and the annealed thin sample shows a grainy structure at the substrate surface (Fig.
1b). EELS (e. g. Ti-L at 35 eV) clearly show the remaining
multilayer character of the samples (Fig. 2).
Fig. 1: TEM bright field images of samples deposited at 700°C in a thick (a)
and thin (b) layer sample design
Fig. 2: Ti energy filtered TEM images (Ti-L, energy loss: 35eV) show the
remained multilayer character of the samples
[1] M.W. Barsoum, Prog. Solid State Chem., 28 (2000), p. 201
[2] Th. Kups, et al., EMC 2009, Vol. 3 Materials Science (2009), p. 471
[3] P. Eklund et al., Thin Solid Films 518 (8) (2010), p. 1851
[4] C. Lange, et al., Appl. Surf. Sci. 254 (4) (2007), p. 1232
[5] M. Hopfeld et al., Materials Science and Engineering 2010, Darmstadt, 2010.
[6] R. Grieseler et al., Materials Letters 82 (2012) 74-77.
[7] M. Hopfeld et al., Advanced Engineering Materials (2012) in press. doi:http://dx.doi.org/10.1002/adem.201200180
Contact
88
Thomas Kups | +49 3677 69-3403 | werkstoffe@tu-ilmenau.de
Materials Science
Dewetting of Bilayer Thin Films for Fabrication of
Novel Alloy Nanostructures
A. Herz, D. Wang, P. Schaaf
Thin films undergo agglomeration upon annealing due to
their high surface-to-volume ratio which produces a large
driving force for reduction of surface area. This process is
also known as dewetting and can occur well below the melting temperature of the layer material in the solid state. In
recent years, dewetting of thin metal films has therefore become a promising method for fabricating various nanostructures with potential applications in catalysis, plasmonics, or
magnetic devices.
However, nanoalloys may reveal new or even unique properties due to the combination of size and composition. Thus,
thin bilayer systems consisting of a pair of metals could be
a convenient basis for the self-organized synthesis of novel
alloy nanostructures via dewetting.
Fig. 1: (a) Au-Ni bi-metallic nanoparticles
Fig. 1: (c) Supersaturated Au-Ni nanoparticles
Fig. 1: (b) Supersaturated Au-Ni nanostructures
Fig. 1: (d) Nanoporous Au nanoparticles
[1] D. Wang, P. Schaaf, Materials Letters, 70 (2012) 30-33
[2] D. Wang, P. Schaaf, Journal of Materials Chemistry, 22 (2012) 5344-5348
Contact
Peter Schaaf | +49 3677 69-3611 | materials@tu-ilmenau.de
89
Materials Science
Chemical Functionalization of Polymer Scaffold
Surface: Step Towards Biochemical Functionalization
S. Singh 1, U. Fernekorn 1, A. Groß 2, A. Schober
1
Nano-Biosystems-Technology
2
Micro Reaction Technology
1
Funding: Thuringian Ministry of Culture
(Nanozellkulturen, FKZ: B714-09064)
There is a constant response of multitude signals in an in
vivo microenvironment of the cells. From the system biology
perspective, there is nearly endless complexity in the crosstalk between cells and dynamic functional materials. Yet it
may be possible to clarify the situation somewhat by stepping back from biology and treating both the cell and the
material surface as chemical systems. The surface of a cell
is composed of different lipids, proteins and carbohydrates,
all are arranged in the three dimensional space. Engineering
the surface chemistry of a material so that it can interface
with cells and/or cell membrane is challenging.
One straight forward way is to use natural derived polymers
for this purpose because of the advantage provided by their
inherent biocompatibility. However, inconsistent purity arising from lot to lot variability and potential contamination
of pathogens in case the material is obtained from non-human sources is disadvantagous. Therefore, man-made polymers have been engineered to serve as scaffolds for stem
cell differentiation, tissue engineering and pharmaceutical
testings. The synthetic polymers possess high purity and reproducibility, controlled chemical composition and mechanical properties, and application specific degradation rate.
However, unlike natural polymers, these polymers can be
inert and lack biological cues for cellular adhesion and
proliferation. In this case, the surface functionalization of
synthetic polymers with bioactive species could provide the
best solution.
In our lab we have engineered a polycarbonate based polymer scaffold called MatriGrid®, which is able to provide
perfused 3D microenviornment to grow cells in miniaturized
bioreactor [1]. On the other hand, we have developed solution phase and flow chemistry based chemical strategies
to produce combinatorial libraries of bioactive molecules
[2-4]. In this work we are presenting a chemical strategy
by which polycarbonate surfaces can be functionalized with
various bioactive molecules (Figure 1). The carbonate functional group of the polymer has been utilized to react with
amine nucleophile of polyamine, which upon further reaction with fluorescent electrophile like dansyl chloride provides functionalized surfaces. The surface modification has
been characterized by contact angle measurement, fluorescence, ATR-IR and SIMS-ToF analysis. Previously synthesized
combinatorial libraries of bioactive molecules will be utilized
for surface functionalization and be screened for their cell
adhesion modulation activity.
Figure 1: Method for chemical functionalization of polycarbonate scaffold surface
[1] Fernekorn, U., Hampl, J., et al. (2011) Engineering in Life Sciences 11, (2), 133-139.
[2] Singh, S.; Schober, A., et al. (2011) Tetrahedron Letters 52, (29), 3814-3817.
[3] Singh, S.; Schober, A., et al. (2009) Tetrahedron Letters 50, (16), 1838-1843.
[4] Singh, S.; Koehler, J. M., et al. (2011) Beilstein Journal of Organic Chemistry 7, 1164-1172.
Contact
90
Sukdeep Singh | +49 3677 69-1172 | sukhdeep.singh@tu-ilmenau.de
Materials Science
Sputtered TiO2 Thin Films with NiO Additives for
Hydrogen Detection
I. Kosc 2, I. Hotovy 2, V. Rehacek 2, R. Griesseler 1,
M. Predanocy 2, M. Wilke 1, L. Spiess 1,
1
2
Materials for Electronics,
Slovak University of Technology Bratislava
In our work, new combination of gas sensitive materials for
detection of H2 based on TiO2 films and NiO additives, which
is revealing unconventional behavior, is presented.
Two main layouts of prepared metal oxides sensing films
based on NiO and TiO2 were prepared. The difference between the layouts is in the sequence of the top two functional layers. In the first layout the structure was consisted of
100 nm TiO2 thin film with 10 nm NiO additives on the top.
Afterwards the sequence was altered and the thin 10 nm
NiO film was deposited before 100 nm TiO2 so as to get the
opposite layout. Both NiO and TiO2 thin films were deposited by dc reactive magnetron sputtering technique in a mixture of Ar and O2 from Ni, Ti target, respectively.
The GDOES depth profiles yield exact knowledge about elemental composition of prepared thin films and thereby confirm their thickness. Furthermore, enhanced interdiffusion
of incorporated thin films with raising annealing temperature was observed. The influence of rapid thermal annealing
on the properties of compound oxides based on thin TiO2
films with NiO additives was investigated. In the range of annealing temperatures from 500 °C to 700 °C, crystallization
started and the structure of the films changed from
amorphous to polycrystalline (anatase TiO2, rhombohedral
NiO or cubic Ni). In our work, conductively combined p/n
Fig. 1: XRD difractograms of as-deposited and annealed samples (layout 1).
Funding: DAAD 50755098
type gas sensitive material was presented. Unconventional
H2 detection behavior of gas sensitive material based on
TiO2 films with NiO additives annealed at 500 °C and 600 °C
was identified. Various conductivity response types of these
compound sensing films at various gas concentrations were
recorded. Inversion of conductivity response type due to
different gas concentrations was observed. The critical H2
concentration limit causing change of behavior from p-type
to n-type was uncovered to be a function of operating
temperature. Additionally, different types of response were
recorded for the same set of samples annealed at different
temperatures: p-type like response for lower (up to 400 °C)
annealing temperatures and n-type like response for higher
(700 °C) annealing temperatures. For the sample layout 1,
maximum response was more than one order of magnitude
for 10 000 ppm H2 concentration at 200 °C operation
temperature. The sensitivity of sample layout 2 is much
more complex due to inversion of response from p-type
to n-type. The best sensitivity for sample layout 2 was
given at 200 °C operating temperature. It was found that
the optimal operating temperature for both investigated
layouts was at 200 °C.
Fig. 2 : Response characteristics of compound film: TiO2 with NiO additives
due to injection of different H2 concentrations at 250 °C.
[1] I. Kosc I. Hotovy, V. Rehacek, R. Griesseler, M. Predanocy, M. Wilke, L. Spiess, Appl. Surf. Sci. (2012),
/10.1016/j.ap susc.2012.09.06.
Contact
Lothar Spiess | +49 3677 69-3134 | lothar.spiess@tu-ilmenau.de
91
Materials Science
Nondestructive Investigations on Brass-materials
with Different Pb-content
L. Spieß 1 ; M. Wilke 2; A. Kais 2; G. Teichert 2;
Materials for Electronics; 2 MFPA Weimar, Prüfzentrum Schicht und
Materialcharakterisierung an der TU Ilmenau; samples Fa. Aurubis
Stolberg GmbH
1
Brass is a well known and often used material in engineering.
The behavior strongly depends on the formation of the different brass phases. To improve the mechanical machining,
e.g. drilling and milling, 1 to 4 wt% of Pb is added. Thereby
the soft Pb segregations at the grain boundaries enable a
breakage of the elongated flakes during machining. To use
this mechanism, the Pb must be equally distributed. If the
Pb segregations are to big, they can act as an initial point
for crack formation. In fig. 1 the distribution of Pb in a brass
material is presented, measured by micro computertomography. The voxel size here was 4 µm3. The content of Pb is
only 2.11 wt%, measured by X-Ray fluorescence spectrometry (XFA). In the comparative metallographic specimen we
also found larger segregations of Pb [1].
To prove the applicability of the micro CT analysis technique for the confirmation of homogeneous distributed
Pb segregations in brass, we analysed 6 charges of brass
material with a content of 1.7 - 3.5 wt% Pb. For the microCT measurements, samples with a suitable geometry were
prepared. The content of Pb, Cu and Zn was determined
by XFA and glow discharge emission spectroscopy (GDOES).
Using XFA and GDOES the Pb content was determined to be
between 1.31 - 2.79 wt% and 1.68 - 3.17 wt%, respectively.
From all materials, we prepared metallographic specimens
perpendicular and in the direction of rolling.
Fig. 1: Micro-CT and the volume reconstruction, visible the Pb-segregations
(dark)
By using area analysis, the Pb content in the microscopy
images was determined to be between 1.64 - 3.48 % in
the direction of rolling and between 1.76 - 3.97 % perpendicular to this direction. It was found that the material with
1.31 wt% of Pb showed no short chips during machining.
In micro-CT no Pb segreagations were visible. On the other
side, the samples with contents of 2.21 wt% Pb and above
showed a very homogenous distribution in the metallographic specimen. The CT measurements also revealed a equal
distribution of Pb segreagations. As a consequence, very
small chips were formed during machining.
The accumulated brass chips were also analysed by XRDmeasurements in Brag-Brentano-Geometry. The diffractometer is equipped with multilayer monocromator in parallel
beam geometry. Using a LaB6 sample, we determined the
instrument parameters for the TOPAS programm, Bruker
AXS, based on the RIETVELD method. After fixing those parameters, we performed a RIETVELD analysis on the brass
diffractograms to determine the amount of alpha- and beta-phases. Furthermore we calculated the amount of Pb to
be 1.46 - 3.28 wt% for the 6 brass materials, which is in
good agreement with the metallographic, XFA and GDOES
measurements [2].
Fig. 2: RIETVELD-XRD diagramm and estimated phases and there amount of
Pb [wt%]
[1] Spieß, L.; Wilke, M.; Kais, A.; Teichert, G.: Materialcharakterisierung an Messing-Legierungen, Nano-Computertomographie
zur Gefügebeurteilung; DGZfP-Jahrestagung Graz 2012, Poster P20
[2] Spieß, L.; Teichert, G.; Schwarzer, R.; Behnken, H.; Genzel, Ch.: Moderne Röntgenbeugung; Vieweg-Teubner, 2009, 2. Auflage
Contact
92
Lothar Spieß | +49 3677 69-3134 | lothar.spiess@tu-ilmenau.de
Materials Science
Nondestructive Investigations at a Historical Object
from 1597 to find out the Production Method
L. Spieß 1 ; U. Weidauer 2 ; A. Kais 3 ; G. Teichert 3 ;
Materials for Electronics;
Zentrale Restaurierungswerkstätten Erfurt,
3
MFPA Weimar, Prüfzentrum Schicht und
Materialcharakterisierung TU Ilmenau
1
2
The Angermuseum in Erfurt is the owner of a horse muzzle
from the year 1597. This muzzle was restored and integrated
into the art-historical collection into the also reconstructed
rooms of the museum. These muzzles served as protection
against the bites of the aggressive horses in the Middle
Ages. The muzzles were also status symbols on the other
side and partly contained figures of the emblem of the respective principality.
By means of the radiograph fluorescence analysis the composition was determined. The horse muzzle consists of 70.8
wt % Cu, 27.4 wt % Zn and 1.8 wt % Pb. The typical composition is alpha-brass alloying, also called yellow Tombak.
Was the used semi-finished product rolled/milled or hammered/beaded? Strip mills were already described by da Vinci (1471 – 1528) and A. Dürer (1471 – 1528). Since the year
1600 strip mills, driven by water-power, were often used.
A distinctive mark between rolled and beaded material can
be seen by looking at the texture of the material. Semi-finished product after rolling shows a texture. This is a preferred
direction of the grains in one direction. Such big strengths
are not transferred during hammering, on the other hand.
The disorder density increased in the grains after hamme-
Fig. 1: Non destructive Bragg-Brentano measurement at the historical object
to estimate texture of material
ring. To comparison tests complete pole figures were taken in a X-Ray difractometer, equipped with an open Euler
cradle. The difference between rolled and beaded material
can be clearly seen [1].
However, the muzzle doesn‘t fit into the texture goniometer. Therefore comparison measurements were also carried
out in Bragg-Brentano geometry in parallel beam geometry
to find out the texture degree [2]. The texture degree of
rolled probes are considerably different from the beaded
probes. The muzzle could be measured in this order nondestructively, figure 1. Figure 2 shows a very good agreement
with the beaded probes. If one determines the FWHM of
the peaks, then the beaded probes are broader than the rolled ones. The FWHM at the muzzle agree with the beaded
probes. The RIETVELD phase analysis yields the softer alpha
brass as a matter of priority.
These three corresponding results show that the horse muzzle was manufactured from beaded sheet brasses. Furthermore, these examinations show the efficiency of the X-Ray
difractometer analysis as a nondestructive measurement
procedure in the materials characterization.
Fig. 2: XRD diagramms at several points and in comparison a textured and a
not textured brass material
[1] Spieß, L.; Weidauer, U..; Kais, A.; Teichert, G.:Zerstörungsfreie Materialuntersuchungen an einem Pferdemaulkorb aus dem
Jahr 1597 aus dem Angermuseum Erfurt; DGZfP-Jahrestagung Graz 2012, Plenarvortrag Session Materialcharakterisierung
[2] Spieß, L.; Teichert, G.; Schwarzer, R.; Behnken, H.; Genzel, Ch.: Moderne Röntgenbeugung; Vieweg-Teubner, 2009, 2. Auflage
Contact
Lothar Spieß | +49 3677 69-3134 | lothar.spiess@tu-ilmenau.de
93
Materials Science
Theoretical and Experimental Evidence for
Correlations in Complex Fluids
N. Fatkullin, A. Gubaydullin, C. Mattea, S. Stapf
Funding: DAAD and DFG
The understanding of all aspects of dynamics in polymer
melts remains, after significant experimental and theoretical
progress over several decades, an ongoing research topic
with a number of open questions to be solved. Ever since
the pioneering works by Flory, de Gennes and Doi and Edwards, a statistical approach to the dynamic behaviour of
large (i.e. in particular those exceeding the entanglement
length) polymers has been sought after, a task that is comparatively simple for dilute solutions but difficult for melts.
Dynamics are known to exist on a wide range of timescales
covering local librations and rotations up to center-of-gravity diffusion, and possibly even beyond. Apart from neutron
scattering and dielectric spectroscopy, NMR is the most suitable experimental approach to access these timescales by a
combination of different measurement protocols.
NMR variable-field relaxometry has been the method of
choice for covering several orders of magnitude of polymer
reorientation times (see Figure 1 for a typical example), but
care must be taken to separate out the intra- and intermolecular contributions to the dipolar correlation modulation
and to extract the actual motion parameters. This has previously been achieved by isotopic dilution with deuterated
compounds, but new tracer compounds are being tested,
and a more fundamental approach is currently followed by
extending the conventional Anderson-Weiss model of
relaxtion,a task which is followed in close collaboration with
Prof. Nail Fatkullin of Kazan Federal University.
Much can be learnt about the state of equilibrium polymers
by subjecting them to constraining conditions, such as geometrical confinement in porous media or by dynamic deformation (shear). To this end, the group exploits its expertise
in porous media research, and is combining rheological setups with the NMR investigations. One main goal is the identification of molecular correlation mechanisms and local as
well as global order such as may be introduced by confining
walls or shear fields, but which have also be proposed to
exist in the equilibrium melt.
A further aspect of correlated motions are found in complex
fluids which can be two- or multicomponent substances
such as Ionic Liquids (IL). Furthermore, correlations have also
been identified on a molecular level in viscous fluids such
as glycerol or oligomers. Figure 2 demonstrates an example
of the two components of the IL bmim-Tf2N which can be
measured separately by addressing either the 1H or the 19F
nucleus, respectively. Again, bulk IL and those confined in
mesoscale pores (several nm) differ drastically in their apparent dynamic behavior but become comparable near the
glass transition temperature.
Fig. 1: Relaxation times dispersion of bulk PDMS and sub-monolayer thin films
of PDMS on alumina substrate.
Fig. 2: Relaxation time dependence on temperature and field strength for 1H
signal in a commercial ionic liquid.
Contact
94
Siegfried Stapf | +49 3677 69-3671 | siegfried.stapf@tu-ilmenau.de
Materials Science
Size Effect on the Mechanical Behavior of Al/Si3N4
Multilayers under Nanoindentation
M. Wang, D. Wang, P. Schaaf
Funding: supported by the Carl-Zeiss-Stiftung
Nanoscaled multilayers are largely applied in the areas of
microelectronics, optoelectronics and nano-electro-mechanical systems (NEMS). The reliability of these systems
depends partially on their mechanical properties. It is well
known that the mechanical properties in thin metallic films
are very different from their bulk counterparts as film thickness decreases to the submicron or nanometer range [1].
This means that the yield stress increase with decreasing film
thickness or grain size due to the inhabitation of dislocation
motion and limitation of dislocation nucleation by the small
thickness and grain size [2]. There are, however, few systematic studies on the length-scale effect on the mechanical
properties of metal/ceramics multilayered composites. The
variation of hardness with individual layer thickness has already been studied, including Al/Al2O3 multilayers [3], Al/Al3Sc
multilayers [4] and Al/SiC multilayers [5]. But the deformation behavior of these composites has not yet been investigated. In this work, the deformation behavior and the mechanical properties of Al/Si3N4 multilayers fabricated
Fig. 1: The load-displacement curve of Al/Si3N4 multilayers with different individual layer thickness under maximum load P=250 mN.
by magnetron sputtering on Si substrates have been studied
using nanoindentation testing, as schematically seen in Fig.
1. The individual layer thickness t for both Al and Si3N4 layers
is equal and varies from 500 nm down to 10 nm. There is
a significant size effect on the Al/Si3N4 multilayer strength,
and the strength of the multilayers increases with decreasing layer thickness. This size effect can be described by the
famous Hall-Petch effect when the individual layer thickness
is still larger than 100 nm. However, as the thickness becomes smaller than 100 nm, the trend of the strength deviates
from the Hall-Petch relation, as seen in Fig. 2. The Hall-Petch
slope of the metal/ceramic system is much higher than that
of metal/metal multilayers at sub-micron scale. The specific
hardening rate increased with decreasing t as long as t ≥
100 nm, and decreased with decreasing t as t ≤100 nm.
There is a transition in the deformation mechanisms from
sub-micron scale to nanometer scale under nanoindentation. The dominating mechanism changes from dislocation
mediated to grain boundary mediated plasticity.
Fig. 2: The hardness as a function of the individual layer thickness t. The insets
show cross-sectional SEM images.
[1] D. Wang, Th. Kups, J. Schawohl, P. Schaaf. J. Mater. Sci. 2012; 23: 1077-1082.
[2] E. Arzt, G. Dehm, P. Gumbsch, O. Kraft, D. Weiss. Prog. Mater. Sci. 2001, 46: 283-307.
[3] A.T. Alpas, J.D. Embury. J. Mater. Sci. 1990, 25: 1603.
[4] M.A. Phillips, B.M. Clemens, W.D. Nix. Acta Mater. 2003, 51: 3171.
[5] X. Deng, C. Cleveland, N. Chawla, T. Karcher, M. Koopman, K. Chawla, J. Mater. Eng. Perform. 2005, 14: 417.
Contact
Peter Schaaf | +49 3677 69-3611 | peter.schaaf@tu-ilmenau.de
95
Materials Science
Electrical Activation and Electron Spin Resonance
Measurements of Implanted Bismuth in Silicon-28
C. D. Weis
1,2
, I. W. Rangelow 1, T. Schenkel 2
Micro- and Nanoelectronic Systems
2
Lawrence Berkeley National Laboratory, Berkeley, CA (USA)
1
Introduction
Electron and nuclear spins of donor atoms in silicon are excellent qubit candidates for quantum information processing. Isotope engineered substrates provide a nuclear spin
free host environment, resulting in long electron and nuclear spin coherence times of several seconds [1]. Spin properties of donor qubit candidates in silicon have been studied mostly for phosphorous and antimony [1,2]. Bismuth
donors in silicon are unique in exhibiting a relatively large
zero field hyperfine splitting of 7.4 GHz. Thus, they have attracted attention as potential nuclear spin memory and spin
qubit candidates that could be coupled to superconducting
resonators. Bismuth is the deepest donor in silicon with a
binding energy of 70 meV and a corresponding small Bohr
radius. The small Bohr radius and bismuth’s reduced effective gyromagnetic ratio can make it less susceptible to interface noise at a given implant depth and make bismuth very
desirable for quantum logic implementation via magnetic
dipolar coupling. Furthermore, bismuth is also the heaviest
donor in silicon and thus shows the least ion range straggling during ion implantation, which enables donor qubit
placement with high spatial resolution.
Experimental/Results
Bismuth-209 is implanted at room temperature into isotopically enriched silicon-28 under a tilt angle of 7°. A total fluence of 1.1x1012cm2 is implanted at different kinetic energies
resulting in a peak concentration of 9x1016cm3 (see fig. 1).
Fig. 1: Implantation depth profiles.
Fig. 2: Electrical activation yields;
annealing times: red-5min,
blue-15min, green-20min.
Funding: NSA 100000080295 & DOE DE-AC02-05CH11231 (LBNL)
No bismuth segregation towards the interface is observed as
had been observed for higher annealing temperatures.
Electrical activation levels increase with annealing temperature and reach a value of 67% for annealing at 900°C (see
fig. 2). Fig. 3 shows simulations of the expected line positions
and our cw-ESR data at T= 25 K. All measured lines match
the predicted field positions, which verifies the successful implantation and activation of bismuth into silicon-28. An additional line is visible at B=335.4 mT, which results from dangling bonds (db) at the silicon surface. The Gaussian line fit
for the mI=1/2 hyperfine line yields a peak-to-peak line-width
of 12µT (see inset fig. 4). Electron spin echo decay measurements at T=8K are used to determine the electron spin coherence time. The data is fitted to a single exponential decay
over the first 0.5ms of the spectrum, which is not distorted
by phase noise. The decay yields a spin coherence lifetime of
T2e=0.7ms (see fig. 4).
The obtained narrow linewidths and long electron spin coherence lifetimes are comparable to other implanted donor
species in silicon. This shows that the intense implantation
damage from heavy ion implants to the host lattice is repaired
effectively and does not affect the spin coherence properties
negatively. Our results qualify implanted bismuth donors as a
very promising candidate for spin qubit integration in silicon.
Fig. 3: Electron spin resonance
scan showing electrically active
bismuth dopants.
Fig. 4: Electron spin coherence
measurements.
[1] A. M. Tyryshkin, S. Tojo, J. J. L. Morton, H. Riemann, N. V. Abrosimov, P. Becker, H. J. Pohl, T. Schenkel, M. L. W. Thewalt,
[2] K. M. Itoh, and S.A. Lyon, Nature Mater. 11, 143 (2012).
[3] T. Schenkel, J. A. Liddle, A. Persaud, A. M. Tyryshkin, S. A. Lyon, R. de Sousa, K. B. Whaley, J. Bokor, J. Shangkuan, and I.
Chakarov, Appl. , Phys. Lett. 88, 112101 (2006).
[4] C. D. Weis, C. C. Lo, V. Lang, A. M. Tyryshkin, R. E. George, K. M. Yu, J. Bokor, S. A. Lyon, J. J. L. Morton and T. Schenkel, Appl.
Phys. Lett. 100, 172104 (2012).
Contact
96
Ivo W. Rangelow | +49 3677 69-3718 | ivo.rangelow@tu-ilmenau.de
Materials Science
Non-enzymatic Analysis of Glucose on Printed
Carbon Nanotube-based Film
N. G. Tsierkezos and U. Ritter
Funding: BMBF (CarbonSens, contract number: 16SV5326)
The purpose of this research work was the combination of
excellent electrocatalytic properties of multi-walled carbon
nanotubes (MWCNTs) [1,2] and the fine electrical properties
and flexibility of polycarbonate (PC) material for the fabrication of novel, simple, sensitive, and low-cost electrochemical nonenzymatic glucose (Glu) sensor. The fabrication of
printed MWCNT-based film, further denoted as MWCNT-PC,
was done by means of mass flexographic printing process
that is based on a transfer of water dispersed MWCNTs
onto PC substrate [3,4]. Representative CVs recorded for
MWCNT-PC in the absence and presence of Glu, are shown
in Fig. 1. As it can be seen, in the presence of Glu the CVs
exhibit an anodic peak corresponding to oxidation of Glu at
low positive potential of about 0.30 V vs. Ag/AgCl that was
strongly dependent on Glu concentration. Consequently, it
can be concluded that Glu is easily oxidized on MWCNTPC due to the great electrocatalytic activity and the large
active surface area of MWCNTs. A comparison of oxidation
potential of Glu measured on MWCNT-PC with those reported for other electrodes in literature reveal a significant
decrease of anodic overpotential of Glu (about 400 mV)
on MWCNT-PC, confirming the strong catalytic function of
MWCNTs towards Glu oxidation. To study the concentration range of Glu that can be measured on MWCNT-PC, CVs
were recorded in large concentration range (0.01-0.12 mM).
The anodic peak current increases linearly with the increase
Fig. 1: CVs of Glu on MWCNT-PC (background, 0.0161 mM, 0.0313 mM)
of Glu concentration demonstrating the possibility of using
MWCNT-PC as non-enzymatic sensor for analytical determination of Glu in unknown samples (Fig. 2). The detection
limit and sensitivity of MWCNT-PC towards Glu were estimated as 2.16 μM and 1045 μA∙mM-1∙cm-2, respectively [5].
It is very interesting that the detection ability and sensitivity
of MWCNT-PC seems to be significantly greater compared
to those of other films reported in literature. This demonstrates that our novel film is quite suitable for sensing Glu.
The method’s repeatability was also studied by carrying out
numerous successive measurements. The obtained relative
standard deviation (less than 3%) demonstrates the enhanced response and reproducibility of MWCNT-PC.
It is remarkable that electrochemical impedance experiments reveal that the barrier for electron transfer on MWCNT-PC is significantly slower compared to other electrodes.
The findings demonstrate that the interfacial charge transfer
on MWCNT-PC is faster compared to other materials, and
thus, it can be concluded that the electrochemical quality
of MWCNT-PC is excellent. Considering that the costs for
the fabrication of the printed films are quite low and that
their production is relative simple and requires much less
time compared to other fabrication techniques, one can recognize how important these printed MWCNT-based films
for sensing applications are.
Fig. 2: Effect of Glu concentration on anodic current density
[1] N.G. Tsierkezos, U. Ritter, J. Solid State Electrochem. 2012, 16, 2217.
[2] N.G. Tsierkezos, U. Ritter, J. Nanosci. Lett. 2012, 2, 25.
[3] N.G. Tsierkezos, N. Wetzold. U. Ritter, Ionics 2013, 19, 335.
[4] N.G. Tsierkezos, N. Wetzold, U. Ritter, A.C. Hübler, J. Nanosci. Lett. 2013, 3, 6.
[5] N.G. Tsierkezos, U. Ritter, N. Wetzold, A.C. Hübler, Microchim. Acta 2012, 179, 157
Contact
Uwe Ritter | +49 3677 69-3603 | uwe.ritter@tu-ilmenau.de
97
Materials Science
TiO2:Nb Sol-Gel Electrode Materials for Polymer Solar
Cells
M.-C. Machalett1, R. Rösch², U. Brokmann1, S. Engmann²,
H. Hoppe², G. Gobsch², E. Rädlein1
1
2
Inorganic-Nonmetallic Materials
Experimental Physics I
Introduction
In organic photovoltaics (OPV), doped titania offers an alternative for established transparent conductive oxides (TCO)
like indium tin oxide. It can also be added in current systems
as an n-conducting interlayer to adopt band gap energies of
the bulk heterojunction materials and the non-transparent
Al back electrode. A further benefit could be a UV blocking
function for the protection of the polymer materials.
Experiments
Synthesis routes for TiO2:Nb sols have been developed which
can be easily integrated into current OPV production processes [1]. 3% to 6% proved to be an ideal doping rate as
has been shown for TiO2:Nb layers with different coating
methods before (e.g. sputtering, [2]). Different coating methods for the sols have been realized, namely dip and spin
coating and gravure printing. One route is the direct application of a sol. The second route offers great advantages:
a solid and soluble intermediate powder is generated [3],
which can be stored much better than liquid precursor sols.
Further treatment steps can be applied to this powder to
optimize the layer properties, independent of the thermal
resistance of the other OPV materials.
One critical point for optimized electrical behaviour is the
crystalline microstructure of the TiO2. For low sheet resistance, anatase modification is preferred to rutile. The final
phase content depends on the solid content in the sol, on
the thermal treatment (temperature and heating rate) and
on the atmosphere during consolidation.
Fig. 1: Conductivity test sample,
TiO2:Nb coating with Al electrodes
Results
Nb doping did not impede the anatase formation. Model
substrates, Indium tin oxide coated borosilicate glass, and
PET foil could be coated, entire OPV cells with TiO2:Nb interlayers were prepared. Fig. 1 shows the test configuration for
measuring electrical properties with Al electrodes. Homogeneous coatings with good optical properties, a well-suited
band gap an a high open circuit voltage Ul > 800 mV have
been obtained [4], comparable to reference materials. The
short circuit current density of IK = 0,08 mA/cm², however,
is still much to low for TCO electrodes. A microstructure of
poorly connected primary particles with average diameters
of some 10 nm has been identified as the main reason for
the low conductivity.
The sols could be used as printing inks in gravure printing,
which openes the way for roll-to-roll application on flexible
substrates. With glass gravure printing clichés, closed layers
and patterns with line widths above 100 µm have been printed on PET (see Fig. 2) . Optimization of the primary particle
diameters and the sol viscosity promises microstructured
patterns with the advantage of high material efficiency, as
no material is lost by subsequent structuring.
The next step of the research will be a modification of the
sol preparation to obtain fine-grained anatase and coatings
with higher density and lower thickness.
Fig. 2a: Detail of a gravure printing
glass cliché
Fig. 2b: Printed pattern
[1] Machalett, M.-C.: Sol-Gel basierte Elektrodenmaterialien für Polymer-Solarzellen. Master Thesis. TU Ilmenau. 2012. (Ilmenau)
[2] Junghähnel, M.: Herstellung und Charakterisierung von transparenten, elektrisch leitfähigen TiO2:Nb-Dünnschichten durch
Gleichstrom- und Puls-Magnetron-Sputtern. Dissertation. TU Ilmenau. 2011. Ilmenau.
[3] Löbmann, P.: Soluble powders as precursors for TiO2 thin films. Journal of Sol-Gel Science and Technology. 3. 2005. 275–282.
Löbmann, P.; Röhlen, P.: Industrial processing of TiO2 thin films from soluble precursor powders. Glass Sci. Technol. (Glass
Science and Technology). 76. 2003. 1–7.
[4] Engmann, S.; Machalett, M-C.; Turkovic, V.; Rösch, R.; Rädlein, R.; Gobsch, G.; Hoppe, H.: Photon recycling across a ultravioletblocking layer by luminescence in polymer solar cells. Journal of Applied Physics. 112. 2012. 034517-1-4.
Contact
98
Edda Rädlein | +49 3677 69-2802 | edda.raedlein@tu-ilmenau.de
Materials Science
Investigation of Polymer Solar Cells by Means of
Spectroscopic Ellipsometry
S. Engmann, V. Turkovic, H. Hoppe,
G. Gobsch,
Funding: Europäischer Fond für regionale Entwicklung (EFRE B715-08015),
BMBF Projects: “SonnTex” & “EOS” (FKZ: 03X3518G & 03X3516F)
Organic photovoltaics, based on bulk-hetero junctions consisting of a polymer and a fullerene derivative, have shown
an impressive progress over the last decades and currently
exceed 10% of power conversion efficiency. Solution processing enables fast and cost effective solar cell production
via roll-to-roll coating techniques.
In order to produce solar cells with maximum performance,
it is necessary to control the morphology of the active layer, as the charge generation, separation and extraction are
strongly affected by the nanoscopic blending of the polymer
and fullerene component [1]. Often, time consuming and/
or desctructive measurement techniques, such as atomic
force microscopy, transmission electron microspcopy, or secondary ion mass spectroscopy are used to reveal the blend
composition across the film. At TU Ilmenau, spectroscopic
ellipsometry (SE), as an optical and thus fast, cheap and
non-destructive measurement technique, has been used to
quantitatively determine the spatial distribution and temporal development of the phase segregation of both blend
components in detail, see Figure 1. The observed concentration profile across the film thickness is a signature of surface-induced spinodal decomposition [2].
Fig. 1: Relative PCBM volume fraction across the film (thickness ~100nm) for
a film aged between 1day and 43days [1]
In combination with an elaborate optical model, SE was
successfully applied to the quantitative description of the
degree of spatial order of the polymer phase across the polymer/fullerene blend films, resulting with valuable information complementary to X-ray diffraction technique. For the
first time, the distribution of higher and lower ordered polymer regions within 100nm thick films after annealing was
resolved via SE [3]. The reported results have clearly shown
that the local fullerene concentration, and thus spinodal
decomposition of the blend, determines and limits the local fraction of higher ordered polymer domains, and that
polymer crystallization is only a second order effect to the
morphology evolution in polymer/fullerene thin films.
As the surface energy of the electrode interfaces strongly
determines the phase segregation within the active layer,
it is of utmost interest to measure complete solar cell devices. This challenge was sucessfully accomplished via SE,
see Figure 2. So it is possible to characterize complete and
encapsulated organic solar cells, thus enabling an in-situ
characterization of morphological changes as e.g. needed
for long- term studies.
Fig. 2: In-depth volume distribution of the fullerene phase and the higher
ordered polymer domains in a complete solar cell [3]
[1] H. Hoppe & N.S. Sariciftci, “Polymer Solar Cells” DOI: 10.1007/12_2007_121
[2] S. Engmann, V. Turkovic, H. Hoppe, G. Gobsch, “Aging of polymer/fullerene films: Temporal development of composition
profiles”, DOI: 10.1016/j.synthmet.2011.09.013
[3] S. Engmann, V.Turkovic, H. Hoppe, G. Gobsch, “Direct correlation of the organic solar cell device performance to the in-depth
distribution of highly ordered polymerdomains in polymer/fullerene films”, DOI: 10.1002/aenm.201300158
Contact
Gerhard Gobsch | +49 3677 69-3700 | gerhard.gobsch@tu-ilmenau.de
99
MATERIALS SCIENCE
Single-Molecule Chemistry and Spectroscopy of
Acoustic Plasmons
A. Sperl, R. Berndt, M. Jahn, M. Müller, M. Endlich,
N. Néel, V. Chis, B. Hellsing, J. Kröger
Single-Molecule Chemistry [1]
Spectroscopy of Acoustic Plasmons [2]
Phthalocyanine (Pc) molecules exhibit an intriguing variety
of functional properties in biological and artificial systems.
Owing to their electronic and optical properties, they are
perceived as promising building blocks for nanotechnology. We have recently demonstrated the controlled metalation of single H2Pc to AgPc using low-temperature scanning
tunnelling microscopy. The reaction requires several steps
(Fig. 1), namely atom-by-atom dehydrogenation of the inner
macrocycle of the molecule and subsequent implantation
of a silver ion. Dehydrogenation is induced by injection of
electrons with sufficient energy. Along with the metalation
process, hydrogen tautomerization of H2Pc and hopping of
a single hydrogen atom in the inner macrocycle of HPc were
likewise induced by electron injection from the microscope
tip. The implantation of the Ag ion into the centre of the
metal-free phthalocyanine is performed via the controlled
contact of the molecule with the tip of the scanning tunnelling microscope. At its apex, the tip carries the Ag atom that
on contact is transferred to the molecule. This work clearly
shows the high degree of precision and control a state-ofthe-art scanning tunnelling microscope has reached over
atoms and molecules.
Beryllium exhibits many technologically relevant properties
such as a high melting point and low weight. Moreover, its
easy oxidation has made beryllium a preferred getter material for oxygen and water in nuclear fusion reactors. The
Be(0001) surface has attracted further interest owing to its
two-dimensional plasmon with soundlike dispersion. The
acoustic surface plasmon is a collective electron excitation
that involves a partially occupied surface state band and the
continuum of bulk electrons. In general, this kind of excitation exhibits low energies and is likely to participate in electron-phonon coupling phenomena such as superconductivity and in electron-photon interactions that are at the base of
plasmonics. Using vibrational spectroscopy with inelastically
scattered electrons and density functional calculations, we
have recently identified oxygen vibration modes of initially
oxidized Be(0001), Fig. 2. Oxidation proceeds via a Be-O mixing layer that has been imaged with a scanning tunnelling
microscope. The persistence of the acoustic surface plasmon
in the initial stage of oxidation is due to a weak variation of
the Be(0001) surface electronic structure.
Fig. 1: Individual steps of the atom-by-atom conversion of a H2Pc to a
AgPc on Ag(111).
Fig. 2: Vibration spectra of intially oxidized Be(0001) and
identification of oxygen vibration modes.
[1] A. Sperl, J. Kröger, R. Berndt, Angew. Chem. 123, 5406 (2011)
[2] M. Jahn, M. Müller, M. Endlich, N. Néel, J. Kröger, V. Chis, B. Hellsing, Phys. Rev. B 86, 085453 (2012)
Contact
100
Jörg Kröger | +49 3677 69-3609 | joerg.kroeger@tu-ilmenau.de
MATERIALS SCIENCE
Electrical Conductivity of Thermoplastics Material
Through Addition of Carbon Fibre Segments
St. Schneidmadel, M. Koch
Fachgebiet Kunststofftechnologie
Carbon fibre (CF) segments are blended into polypropylene
(PP) in the extrusion process. Basic parameters and their influence on electrical conductivity are analyzed. Processing
parameters as well as screw geometry and fibre content
are varied, and the impact on the compounding results are
identified.
The conductivity of material results from the specific electric
resistance r. Polypropylene is intrinsically not conductive;
in fact with 1014Ωm, the material shows an isolating characteristic. r is influenced by the content of fibre additive. To
realize electric conductivity, the percolation barrier must be
exceeded. In this experiment the first conductive channels
are formed from a fibre content of 10-15%.
The essential influence factors for improving the specific
electric resistance are fibre content and length, screw configuration and speed and melt temperature. These factors led
to a DOE set-up. First granules of PP and CF are compounded in a twin screw extruder. There are two screw configurations (S1/ S2), and the speed is varied from 100 to 300rpm,
and the temperature variation is 260°C ± 10°C. Fibre content ranges between 10 and 25%.
The specific electric resistance of the produced PP-strands
is examined. Subsequently, strands are granulated and processed through injection molding into test parts. These are
prepared with a conductive layer and their specific electric
resistance is examined (fig. 1). First, the prepared specimen
are analyzed (fig. 2). The distance between the electrodes is
from 2 to 10mm.
The manual addition of CF in the extrusion process results
in an unoriented structure of the fibres which does not lead
to a significant conductive pattern. However, in the subse-
Fig. 1: Breadboard construction measurement conductivity test piece
Contact
quent injection molding process, due to shear flow, a considerable orientation of fibres can be obtained to result in
measurable conductivity. (fig. 3). The oriented fibre content
is higher because of better mixing of low- and high-content
areas in the melt flow.
Alternatively, CF was added as a roving in the extrusion process leading to lower specific resistance and a more consistent and higher level of fibre content. Better conductivity
is also achieved by a screw configuration with shearing elements that lead to better mixing of fibre and melt; however,
this also results in shorter fibres.
Prior to the experiments, it was assumed that high shear
rates lead to low conductivity due to shorter fibre length. On
the contrary, it was shown that a high shear rate increases
the conductivity because of better distribution with a higher
potential to be orientated for a conductive network in the
thermoplastic matrix.
Fibre length is not a critical factor to induce conductivity. In
fact, the average length was measured to be between 0.5
and 1 mm. The orientation of the CF in the material is the
dominant factor to create conductivity.
Fig. 2: Conductivity wrought material
Fig. 3: Conductivity test piece
Michael Koch | +49 3677 69-2450 | michael.koch@tu-ilmenau.de
101
TECHNOLOGY
ECR-Etching of Submicron and Nanometer Sized
3C-SiC(100) Mesa Structures
L. Hiller, T. Stauden, and J. Pezoldt
Department of Nanotechnology
3C-SiC (100) grown on o allows for the combination of the
outstanding properties of SiC with the large area capabilties
of silicon technology. Generally, the formation of controlled
surface morphologies or lateral structures with dimensions
down to sub 100 nm feature size is required. Therefore we
present an anisotropic etching process for mesa structure
formation using fluorinated plasma atmospheres in an electron cyclotron resonance (ECR) plasma etcher. Novasic substrates with 10 µm thick 3C-SiC(100) grown on Si(100) were
used.
Structures were defined with a Raith 150 EBL system at 10
kV acceleration voltage using a 30 μm aperture. The samples
were loaded into the ECR chamber and pumped down to a
pressure less than 5×10 -6 mbar. To remove residues from the
PMMA lift off mask, an O2 cleaning process was performed.
All SiC etching processes were carried out at an ECR power
of 640 W with an RF bias applied to the substrate in a SF6/
Ar mixture. The anisotropy is known to depend on a set of
parameters including plasma power, platen power, working
pressure, gas flows and composition of the gas atmosphere
[1,2,3,4]. Due to the large projected etching depth, conventional EBL resists such as PMMA or HSQ are not capable of
withstanding the SiC dry etching process. Al and Ni were
tested, but only the Ni mask satisfied the need for high selectivity to SiC as well as fine grains, and was removable by
wet chemical etching.
During the first step, the gas composition was varied. Gas
additions such as oxygen, as well as CF4, CHF3 and C 2H4,
do not increase the sidewall slope of the mesa structures
substantially. As a second parameter, the platen power was
varied from 2 W to 100 W resulting in bias voltages ranging from 100 V to 400 V, respectively. The dependence
of the side wall slope on the platen power is given in Fig.
1. The steepness of the mesa sidewalls does not increase
considerably at bias values above 200 V. It can be seen that
the slope will not exceed 83 deg, even with higher bias. In
addition to the platen power, the influence of the working
pressure was studied (Fig. 2). It is evident that a decrease in
pressure led to an increase of the mesa profile’s abruptness.
The steepness of the side wall reaches values higher than 84
deg at a process pressure of 1.5×10 -4 mbar. In contrast to
conventional RIE or ICP etching setups, stable plasma conditions can be realized at pressures below 1×10 -3 mbar in ECR
etching machines. In order to reach low working pressures
the gas flows had to be reduced, resulting in a slight loss
in etching rate because of a lower concentration of radicals. Also, due to the low pressure, which causes a higher
mean free path length of the species, the flow of the ions
and radicals is parallelized and the amount of non-normal
approaching species is reduced. This leads to the observed
increase in the steepness.
Fig. 1: Side wall slope vs. bias voltage (graph) and lattice structure with line
width of 50 nm (SEM image)
Fig. 2: Side wall slope vs. pressure (SF6 /Ar mixture at 640 W ECR power, 20
W platen power, nickel mask) Side wall slope vs. pressure (SF6 /Ar mixture at
640 W ECR power, 20 W platen power, nickel mask)
[1] J.W. Palmour, R.F. Davis, T.M. Wallett and K.B. Bhashin: J. Vac. Sci. Technol. A, Vol.4 (3) (1986), p. 590
[2] D.F. McLane and J.R. Flemish: Appl. Phys. Lett., Vol. 68 (1996), p. 3755
[3] G. McDaniel, J.W. Lee, E.S. Lambers, et al.: J. Vac. Sci. Technol. A, Vol.15 (1997), p. 885
[4] J.J. Wang, E.S. Lambers, S.J. Pearton, et al.: Solid-State Electronics, Vol.42 (1998), p. 2283
Contact
102
Lars Hiller | +49 3677 69-3408 | lars.hiller@tu-ilmenau.de
TECHNOLOGY
AlGaN/GaN-based T-shaped Three Terminal Junction
Devices on (111) 3C-SiC/Si Pseudo Substrates
L. Hiller, K. Tonisch, and J. Pezoldt
We present the realization of Three Terminal Junction (TTJ)
devices based on AlGaN/GaN heterostructures grown on silicon substrates using a SiC transition layer [1]. The growth
of AlGaN/GaN heterostructures on Si (111) was performed
using metalorganic chemical vapour deposition (MOCVD).
Electron Beam Lithography (EBL) was used to structure the
T-shaped active region of the TTJ devices. As masking material a CoPMMA/PMMA system of about 400 nm thickness
was chosen to realize the contact structures. For the active
part a 100 nm thick PMMA resist was used solely with a
higher acceleration voltage and smaller aperture for the EBL.
The etching process was done in an Inductively Coupled
Plasma (ICP) chlorine plasma to form the mesas for device
isolation. The contacts to the 2DEG were realised with a Ti/
Al/Ti/Au system. They were annealed and thus alloyed by
Rapid Thermal Processing (RTP) in an argon-hydrogen gas
mixture at atmospheric pressure at 825°C. With this process
TTJ structures were formed with bar width in the active part
of the device between 45 nm and 900 nm.
The density of the two dimensional electron gas was
1.4×1013cm-2 measured with the van der Pauw Hall measurement. Electron mobility was found to be 1120 Vs/cm2.
With increasing horizontal branch width, the voltage rectification effect turns from negative voltage rectification for
branch width below 200 nm (Fig. 1) to positive voltage rectification at branch widths above this value (Fig. 2). This effect
might be caused by the reversible accumulation of surface
charging in the horizontal and vertical branch of the device.
The ballistic transport is a widely accepted theory to explain
the measured negative voltage at the central contact, but it
does not explain the observed positive rectification of devices with bar width above 200 nm. Surface and sidewall
charges of the etched devices, e.g. used for self switching
devices, could be the reason for those effects as well as the
charging of a virtual gate, as described in the current collapse theory. A third approch of explanation could be trapping at the AlGaN/GaN heterointerface. [2-4].
Moreover, the devices were measured in a transistor-like
configuration, where the center-contact acted as gate and
the left and right branch as source and drain, respectively.
For central branch width below 50 nm, a transistor like behaviour was revealed. For gate voltages above -3 V, the device behaviour follows the characteristic of a unipolar device
with a constant leakage current between source and drain.
For lower gate voltages, the output characteristic is determined by the current flow between the source and the gate.
Fig. 1: Symmetric narrow bar AlGaN/GaN TTJ device (SEM image) and
negative voltage rectification (graph)
Fig. 2: Symmetric wide bar AlGaN/GaN TTJ device (SEM image) and positive
voltage rectification (graph)
[1] Ch. Förster, V. Cimalla, O. Ambacher and J. Pezoldt, Mater. Sci. Forum 483-485 (2005) 201-204.
[2] A.M. Song, M. Missous, P. Omling, A.R. Peaker, L. Samuelson and W. Seifert, Appl. Phys. Lett. 83 (2003) 1881-1883.
[3] R. Vetury, N.Q. Zhang, S. Keller and U.K. Mishra, IEEE T-ED 48 No. 3 (2001) 560-566.
[4] J.J. Freedsman, T. Kubo and T. Egawa, Appl. Phys. Lett. 101 (2012) 013506.
Contact
Lars Hiller | +49 3677 69-3408 | lars.hiller@tu-ilmenau.de
103
TECHNOLOGY
Fabrication of Micro- and Nanostructured Si as
Efficient Anode Materials for Li-ion Battery
Y. Yan, C. A. Vlaic, D. Wang, S. D. Ivanov, A. Bund,
and P. Schaaf
Funding: NanoBatt TNA VII-1/2012, TMWAT by LEG Thüringen and
European Funds for Regional Development (EFRD)
The development of high performance electrode materials
for Li-ion batteries is of great importance for electronic devices and renewable energy storage [1]. Si is considered as
a promising anode material due to its high specific capacity
and low discharge potential. However, the significant volume expansion of Si results in mechanical instability of the
electrode and loss of capacity during cycling, which strongly hinders its practical application [2]. In order to solve this
problem a number of different approaches for material nanostructuring including formation of nanoparticles, nanowires, nanotubes, hollow spheres and 3D porous particles
have been undertaken [3].
Herein, we fabricated ordered arrays of Si nanopillars with
uniform nanoporous structure by using a combination of
Fig. 1: Schematic presentation of the fabrication of
Si nanopillars.
nanoimprint lithography and metal-assisted chemical etching (Fig. 1 and Fig. 2). The pore size of the nanoporous
pillars is about 10 nm, the diameter of the pillars is 300 nm
and the length can be up to 20 µm. The morphology transformation of these nanopillars before and after lithiation is
investigated by SEM, which indicates that this structure is
very stable and can accommodate the significant volume
expansion (Figure 2). This result might be attributed to the
sufficient space in the nanopores [4,5]. Furthermore surface
nanostructured Si showed stable discharge capacity of 43
μAh/cm2 in the initial 10 cycles, and its electrochemical performance will be further investigated.
Fig. 2: SEM images of ordered arrays of Si nanopillars
and its porous structure with different etching time:
(a,b) 3 min, (c,d) 6 min.
Fig. 3: SEM image of ordered arrays of Si
nanopillars after lithiation.
[1] M. Armand and T. M. Tarason, “Building better batteries”, Nature 451, 652 (2008).
[2] R. A. Huggins, “Lithium alloy negative electrodes”, J. Power Sources 81-82, 13 (1999).
[3] H. Li and L. Q. Chen, “Research on advanced materials for Li-ion batteries”, Adv. Mater. 45, 4593 (2009).
[4] D. Wang, R. Ji, S. Du, A. Albrecht, and P. Schaaf, “Ordered Arrays of Nanoporous Silicon Nanopillars and Silicon Nanopillars
with Nanoporous Shel”, submitted (2012).
[5] C. A. Vlaic, et al., Workshop Materials for energy and power engineering, 17 (2012).
Contact
104
Peter Schaaf | +49 3677 69-3611 | materials@tu-ilmenau.de
TECHNOLOGY
Embedded Ceramic Capacitors in LTCC
H. Bartsch1, J. Müller1, S. Barth2
1
2
TU Ilmenau, IMN
Fraunhofer IKTS Hermsdorf
Funding: Thuringian Ministry of Education, programm ProExzellenz,
No PE214-2
The demand of higher densities, fewer external interconnects, faster clock rates and higher reliability in electronic
packaging pushes the integration of passive elements in ceramic interconnect devices. Low Temperature Co-fired Ceramics (LTCC) provides the possibility for integration of passive
components in a cost effective way. This fact motivated several tape manufacturers to develop LTCC compatible high-k
tapes. Their k-values vary from 65 to 250.
Embedded capacitors with a capacitance in the range of 50
pF were successfully integrated into rf modules using printed high-k pastes. However, printed dielectrics feature large
tolerances as a consequence of the thickness variation. It
was shown that the inset of high-k tape patches into standard tapes leads to more accurate embedded capacitors.
The technique allows the design of complex integrated rfcircuits, but the k-value of the used tapes limits the achievable capacitance. Barium titanate dielectrics are known for
their high k-values and it has been shown that the sintering
temperature can be lowered to a LTCC compatible value
in the range of 900°C, and k-values of 2000 or more can
be achieved at the same time. Thus, the technological approach was applied to barium titanate tapes, which are provided by Fraunhofer IKTS Hermsdorf, Germany. Patches with
different sizes are embedded into DP 951 (provided by DuPont®). It was observed, that the used barium titanate tape
shows high k behavior, but the material strongly interacts
with the DP 951 tape. Further investigations have shown
that the use of CT 700 (provided by Heraeus) leads to higher
permittivity of embedded tapes. Figure 1 depicts the sche-
matic cross section through such a component. The presented work investigates crucial process parameters for the manufacturing of embedded barium titanate capacitors in CT
700. A statistical analysis of sintering conditions including
pressure assisted sintering is performed and recommendations for a stable process are worked out.
The statistical analysis has demonstrated that the strongest
influence on the capacitance of embedded capacitors with
a high-k barium titanate dielectric in CT 700 is the applied
pressure during the sintering process. Despite of the fact that
very high k-values up to 2300 are achievable using pressure
assisted sintering with pressures up to 1 MPa, the results
show that stable conditions require tight process control.
Stable capacitor characteristics are achieved using pressureless constraint sintering. The obtained components show
a narrow distribution across the substrate. Figure 2 shows
the temperature dependency of the embedded capacitors.
A permittivity as high as 475 was achieved at a frequency of
1 kHz. The equivalent series resistance decreases greatly at
frequencies above 1 kHz. Therefore, an application as blocking capacitor seems to be suitable for such components.
Fig. 1: Schematic cross section through an embedded capacitor
Fig. 2: Temperature dependency of the capacitance
[1] H. Bartsch, S. Barth, J. Müller, “Embedded Ceramic Capacitors in LTCC”, In 8th International Conference and Exhibition on
Ceramic Interconnect and Ceramic Microsystems Technologies, Erfurt, Germany, April 16-19 2012, 5 pp.
Contact
Heike Bartsch | +49 3677 69-3440 | heike.bartsch@tu-ilmenau.de
105
TECHNOLOGY
Fabrication of a Si- Measurement Cuvette Usable at
High Pressures
S. Günschmann 1, M. Fischer 1, L. Müller 2,J. Müller
1
Department of Electronic Technologies
2
Department of Micromechanic Systems
1
Funding: BMBF (project: “NaMiFlu”; 16SV5360)
Introduction
Often, regularly scheduled oil changes after a particular
working period, especially at big machines such as hydraulic
systems, marine diesel engines or airplane engine are not
necessary because the quality of the oil is still acceptable.
To prevent such unneeded procedures, real-time oil quality
monitoring is necessary. Furthermore, such a technique can
prevent late oil changes which may jeopardize the function
of such machines. One possibility would be a micro fluidic
high pressure oil sensor, which is able to measure the real-time status of lubricating oil. In Fig. 1 a supposable construction of such a sensor is presented.
Principle and Technology
Due to the high infrared transparency and the mechanical
strength, silicon is a suitable substrate to fabricate such a
micro-fluidic device. To withstand typical hydraulic pressures
(up to 400 bars), the system has to be designed with a minimum wall thickness of 2 mm. However, because of the typically high wafer convexity and the inflexibility of the 2 mm
wafers, it is not possible to utilize standard wafer bonding
techniques, such as anodic bonding or silicon fusion bonding. To realize the mentioned requirements a combination of
the technology fields silicon micromachining and LTCC was
applied using a novel bonding technique [1]. Green LTCC,
which was specially developed to match the TCE of silicon,
is used as a soft bonding material and carrier for the fluidic
channels. The wafer assembly is shown in Fig. 2.
A stack of three single pre-laminated LTCC-tapes including
different fluid channels is cut out by laser. At the same time,
the uniformly distributed nano-structures are generated by
a 2-step, self organized RIE process. Using a standard lamination process, the LTCC stack is joined with the nanostructured surface of the 2 mm wafers. Due to the highly
increased surface area, a form-fit bonding and a material
connection between the glass-phase of the LTCC and the
silicon is generated by the following pressure assisted sintering step at 850 °C with a pressure force of 6.1 kN. [2]
Fig. 1: Principle of a measurement system for real time oil monotoring
Fig. 2: Wafer assembly for fabricating infrared silicon measuring cells
[1] M. Fischer, H. Bartsch de Torres, B. Pawlowski, R. Gade, S. Barth, M. Mach, M. Stubenrauch, M. Hoffmann, and J. Müller:
“Silicon on Ceramics – A New Integration Concept for Silicon Devices to LTCC” Journal of Microelectronics and Electronic
Packaging (2009)6; 1-5
[2] S. Günschmann, M. Fischer, T. Bley, I. Käpplinger, W. Brode, H. Mannebach and J. Müller “Fabrication of a Si- measurement
cuvette using a new multifunctional bonding method” MME September 2012
Contact
106
Sabine Günschmann | +49 3677 69-2782 | sabine.guenschmann@tu-ilmenau.de
TECHNOLOGY
Controlled Silicon Grass Generation Using Optical
Plasma Emission Spectroscopy
S. Leopold, C. Kremin and M. Hoffmann
Chair for Micromechanical Systems
Silicon grass (cf. figure 1), which is generated in deep reactive ion etching (DRIE) processes, can for example be used
for bonding of two silicon devices or silicon to ceramic or
polymer surfaces [1]. Technical applications require a controllable and instantaneous onset of silicon grass generation. For a dedicated process quality, design rules have to
be taken into account. A changed exposed area for example can either inhibit silicon grass generation or change the
resulting needle geometry. We present an efficient online
monitoring of the silicon grass generation, which enables an
easy process adjustment.
Prior investigations show that the nano-mask for silicon
grass generation is formed during the etching of the passivation layer in the cyclic DRIE process [2]. Carbon-rich
clusters occur, which cover the underneath silicon. Since,
during this “breakthrough” the surface-plasma-interaction
changes dramatically, we monitor the plasma composition
by optical emission. In the passivation step, a fluorine - carbon (FC) - film is deposited. During the following step, the
FC-film is etched physically. In figure 2 the time-resolved
plasma emission during the etch step is shown [3]. In the
beginning, the concentration of fluorine in the plasma is
Fig. 1: Silicon grass generated in cyclic deep reactive ion etching process.
dominated by the fragmented etch gas SF6. Therefore, the
corresponding plasma emission at 703.8 nm stays constant.
At the same time, The FC-film is etched. Hence, CS, CF, CF2
compounds are sputtered and contribute to the plasma
emission at 257.6 nm. When the FC-film is fragmented, the
plasma-surface-interaction changes significantly. Since the
FC-film does not cover the entire substrate surface anymore, the CS, CF and CF2 emission decreases rapidly. Silicon
is now exposed to the plasma. As silicon etchings starts,
volatile SiF4 compounds are formed, which consume fluorine. Hence the emission of fluorine decreases rapidly. If the
complete FC-film and all residues are removed, the exposed
silicon surface and the fluorine concentration in the plasma
stay constant. Thus, the change of the emission can be used
as an indicator for the necessary etch time for silicon grass
generation or its complete removal.
The presented technique can be used for online monitoring
of the process conditions, while changing the desired feature sizes and the exposed area, for instance. Furthermore,
the technique can be used for DRIE of silicon as well. This
may enable a sophisticated control of the etch profile.
Fig. 2: Time-resolved plasma emission during the etching step.
[1] M. Stubenrauch et al., M. Fischer, C. Kremin, S. Stoebenau, A. Albrecht, and O. Nagel: J. Micromech. Microeng. 16,
(2006).
[2] S. Leopold, C. Kremin, A. Ulbrich, S. Krischok and M. Hoffmann: J. Vac. Sci. Technol. B 29(1), (2011).
[3] S. Leopold, C. Kremin and M. Hoffmann: In: Proceedings of the 23rd MicroMechanics Europe Workshop, Ilmenau,
Germany September 2012
Contact
Steffen Leopold | +49 3677 69-3372 | steffen.leopold@tu-ilmenau.de
107
TECHNOLOGY
Black Silicon Nanophotonics
J. Pezoldt 1, Th. Kups 2, M. Stubenrauch 1 and M. Fischer
3
FG Nanotechnologie
2
FG Wekstoffe der Elektrotechnik
3
FG Elektroniktechnologie
1
If the geometrical confinement of solid state materials reaches the characteristic length scale determining the macroscopic mechanical, chemical, optical and electronic
properties, a drastic change in the behavior of the material
occurs. The most known effect is the quantization of the
density of states and confinement effects in semiconductor materials. These effects, as well as surface trapping and
doping, are responsible for the visible room temperature luminescence of the indirect band gap material silicon. They
are used to demonstrate a wide range of electronic and
optoelectronic devices. Low dimensional silicon structures
can be fabricated using the classical top down approach.
Alternatively, confined and nanostructured systems can be
fabricated using the bottom up approach. This method uses
the principles of self organization at nano- and microscopic scale to form structured systems in homogeneous environments. Zero, one and two dimensional confined silicon
structures emitting visible light can be fabricated using deposition, ion implantation, etching or laser ablation of silicon surfaces.
In the current study a bottom up approach was demons-
Fig. 1: XTEM images of balck Silicon
trated leading to self formation of dense arrays of silicon
needles with scalable properties – the so called Black Silicon
method [1]. The needle forest of black silicon is a fascinating
multipurpose modification of bulk silicon. The smallest dimension of the tips approaches values between 1 and 2 nm
as confirmed by transmission electron microscopy (Fig. 1).
The silicon nanostructure exhibits an extremely low diffuse
reflectivity below 1 % in the spectral region between 190
and 1000 nm. The cathodoluminescence (CL) spectra contains main peaks in the blue, green, red and infrared regions
at 410, 500 650 and 730 nm, respectively (Fig. 2). The blue
and green luminescence peaks can be assigned to quantum
confinement effects in the nanoshaped silicon needles. The
observed red and infrared bands can be assigned to nonbridging oxygen hole centres in oxygen deficient silica environments or recombination via Si-nanocrystal-SiO2 interfacial defects. Therefore, the nanosized tips and their coating
with fluorine doped nonstoichiometric silicon dioxide are
responsible for cathodoluminescence in the blue-green and
red regions of the visible spectra [2].
Fig. 2: Cathodoluminescence spectra of black silicon
[1] H. Jansen, M. de Boer, R. Legtenberg, and M. Elwenspoek, J. Micromech. Microeng. 5, 115 (1995).
[2] J. Pezoldt, Th. Kups, M. Stubenrauch, M. Fischer, Phys. Status Solidi C 8, 1021 (2011)
Contact
108
TECHNOLOGY
Silicon-metal Nanostructures with High Infrared
Absorption
L. Müller, M. Hoffmann
Funding: Bundesministerium für Bildung und Forschung (BMBF)
16SV5360
Introduction
Surfaces with high absorption / emission in the infrared are
widely used for applications such as infrared cameras or IR
sources in sensor systems [1]. In microsystems, it is challenging to integrate such surfaces due to the limitations
of technology and materials. For wavelengths up to about
1100 nm, microstructured silicon, so called black silicon, can
be used to improve the absorption, e.g. for solar cells or
photodiodes [2]. For higher wavelengths, black silicon works
as broadband antireflective coating while the absorption remains very low. This is caused by the fundamental band gap
of silicon.
We present a novel technique which combines the antireflection properties of microstructured silicon and the material properties of metals with their high extinction coefficients resulting in high absorbing surfaces in the wavelength
range 800 nm up to 2500 nm (currently the limit of reliable
measurements available) [3].
Experimental
The etching of silicon grass is based on a modified cyclic
deep reactive ion etching (cDRIE) process. By varying the
process parameters, the resulting needle-like structures can
be influenced in size and shape for matching our needs. The
process itself is described in [4].
Figure 1 shows a SEM image of the silicon structures which
are used for the further modifications. These structures have
been deposited with Ti by electron beam evaporation. The
influence of the equivalent film thickness and deposition
Fig. 1: SEM image of silicon grass
after etching
Fig. 2: SEM image of Ti coated
silicon grass
rate on the structural appearance and the absorption properties of the resulting micro-nano-structures has been investigated. In Figure 2 the cross sectional view of Ti coated
silicon grass with a film thickness of 400 nm is shown. The
Titanium forms nano-needles on top and at the flanks of the
silicon structures with a width of about 30 nm to 60 nm and
a length of several hundred nm.
Transmission and reflection measurements were performed
with an integrating sphere using unpolarized light to take
both specular and diffuse radiation into account. The absorption and thereby the emission of the samples was calculated by Kirchoff’s Law A = 1 – (R + T).
Results
Figure 3 shows the absorption of 3 samples coated with
different thicknesses of Ti compared to a reference sample
without Ti (see figure 1). Samples Ti-1 and Ti-2 reach very
high absorption values of more than 97 % at wavelengths of
about 1000 nm and 2200 nm, respectively. In comparison,
sample Ti-3 has a slightly decreased, but still good absorption between 84 % and 88 % over the entire wavelength
range. All three samples show great enhancement of the
absorption for wavelengths starting at about 1100 nm and
higher compared to the reference sample without Ti.
Taking the easy fabrication and integration into microsystems into account, these novel micro-nano-structures are
predestinated for IR sources or IR sensor systems.
Fig. 3: Calculated absorption of Ti coated and uncoated silicon
grass
[1] J. Hildenbrand, C. Peter, F. Lamprecht, A. Kürzinger, F. Naumann, M.Ebert, R. Wehrspohn, J. G. Korvink, and J. Wöllenstein,
Microsys. Technol. 16 (2010), S. 745-754
[2] S. Koynov, M. S. Brandt, and M. Stutzmann, Applied Physics Letters 88, 203107 (2006)
[3] L. Müller, and M. Hoffmann, 4. GMM Workshop Mikro-Nano-Integration, 2012
[4] C. Kremin, S. Leopold, and M. Hoffmann, Nanotech Europe 2009, 28-30 September Berlin, Germany
Contact
Lutz Müller | +49 3677 69-1860 | l.mueller@tu-ilmenau.de
109
TECHNOLOGY
On-line Monitoring in Reaction Engineering
Q. Gong, S. Stapf
Funding: DFG and Carl-Zeiss-Stiftung
A popular field of application of NMR imaging, apart from
medical diagnosis and pre-clinical studies, has emerged during the last decade in the shape of chemical engineering.
Transport processes in different types of reactors can either be visualized directly and non-invasively, or statistical
parameters can be obtained by means of pulsed-field gradient (PFG) methods. For instance, the propagator, i.e. the
probability density of velocities, or the effective dispersion
coefficient are easily available and can be compared to fluid
dynamics simulations of flow through complex geometries.
The situation becomes somewhat more complicated in the
presence of reactions where simulations may be impossible
and where a statistical description of mass transfer and reaction efficiency needs to be obtained experimentally.
In a direct approach towards mass transport, we have monitored the catalytically accelerated decomposition of H2O2
within a model fixed-bed reactor with different proportions
of active and passive pellets. Since the oxygen solubility in
water is easily exceeded during this reaction, total fluid and
gas transport is dominated by the growth and release of
oxygen bubbles in the reactor. Blockage of such bubbles in a
densely-packed fixed bed would be one reason for excessive
heat build-up due to the exothermic process. Depending on
the encoding time in relation to the structural size in the system, dispersion coefficients exceeding bulk diffusivity many
thousand times have been observed both in the direction
parallel and perpendicular to the net mass flow (see Fig. 1).
Fig. 1: Dispersion coefficients during H2O2 decomposition in a fixed bed parallel and perpendicular to the fluid transport axis.
Contact
110
The dependence of these parameters, and of the corresponding propagators, is investigated as a function of bed properties and solvent concentration.
A much more relevant reaction class is the case of hydrogenations, where as an example we are studying hexene hydrogenation in cooperation with the group of Prof. Andreas
Jess, Dept. of Chemical Engineering, University of Bayreuth.
In hexane hydrogenation, bubbles are not expected to form
outside the porous catalyst pellet except near critical conditions, where microbubbles inside the pellet are proposed.
The mass transfer properties are therefore mostly empirically accessible, and deviations from classical models were
identified. Within the NMR equipment, temperatures of
about 100 °C and pressures of about 10 bar are currently
accessible, i.e. conditions are well sub-critical and reaction
rates are small. Still, NMR spectroscopy was instrumental in
computing the conversion factors (see fig. 2), and studies
are currently under way that exploit novel hyperpolarization techniques such as Para Hydrogen Induced Polarization
(PHIP) for which hexene hydrogenation serves as a test case
to demonstrate the increase of measurement sensitivity by
several orders of magnitude.
Fig. 2: Schematic of the NMR spectrum used for quantification of conversion
rate of hexene into hexane.
TECHNOLOGY
Micro Thermoforming Technology for Scaffold
Design in Advanced Cell Culturing
J. Hampl, U.Fernekorn, F. Weise and A. Schober
Funding: BMBF contract 03ZIK465 & 03ZIK062 project nano cell culture
(FKZ B714 09 064).
Within the last decade a vast knowledge increase in the
field of human biology took place. Among the knowledge
driving fields, novel cell culturing technique bear promising
approaches both for new drug developments and tissue
engineering. A vital point of all advanced ex vivo culturing
technology is a linking part, a scaffold which should help to
mimic at least the spatial arrangement of the in vivo situation. Hence, various scaffold designs and additional functionalities have developed in common with the culturing
techniques. Polymeric scaffolds seem to be a compromise
between an organic material, possibility of optical inspection, a wide range of processing technologies and low cost.
Through this guideline we developed and enhanced an easy
manufacturing process for polymeric 3D - cell culturing
scaffolds.
These scaffolds could be made of various polymeric materials in order to meet the demands of the cells, which should
be cultured in the experimental setup. One basic material is
polycarbonate because it is fully biocompatible, has superior thermoforming properties and the optical transparency
provides inspection possibilities. Due to previous heavy ion
irradiation, it is possible to create customized pores inside
the material to enhance nutrient and oxygen supply.
For biological application in cell culture a scaffold need to
have accurate reproducible properties, otherwise a continuous and multiple use in comparable experiments is not possible. The manufacturing technology presented here creates
reproducible scaffolds with well determined proprieties.
Due to its single step manufacturing operation, an effective
production of scaffolds is possible through parallelization.
The basic manufacturing process consists of etching and for-
ming an irradiated Polycarbonate foil to achieve the desired
porosity and shape. While heating the porous substrate in
vacuum to glass transition temperature, a high pressure
pulse of air (up to 300 bar) is charged to the foil, transmitted
by an additional anti sticking Fluor polymer. After the foil
has stretched to the micro mold, which provides the desired
shape, the cooling is started. To obtain short cycle time, we
developed a special tool design by decoupling heating and
cooling elements and decreasing the thermal mass.
To achieve more complex and functional modified structures, we expanded the basic manufacturing cycle by different steps of adding non-irradiated thin foils, using a woven
fabric instead of a micro mold and processing biodegradable and conventional polymers together. The results show
a wide spread diversity of shapes. Figure 1A shows a SEM
image of a basic MatriGrid® consisting of a single formed
porous foil. A semipermeable structure is shown in 1B,
where a thin foil was stacked to the porous PC-membrane.
During the process the foil is laminated to a single piece.
Due to a second etching step after forming, the thin foil can
be removed in the stretched areas. To realize a multitude
of shapes without requiring a dedicated mold we choose
a fabric with plain weave as mold for the plasticized foil.
A combination between fabric and porous biodegradable
polymer (Polylactic micro foam) leads to a structure which
might be utilized as scaffold structure for tissue engineering
(see fig. 1C).
The experiments show that advanced micro thermoforming
technology can provide a multitude of structures to realize
e.g. spatial distribution of pores or structured material combinations.
Fig. 1: A- structure from porous PC-membrane, B- structure from porous/
nonporus PC-membrane, C- structure from fabric and PLA foam
Contact
Jörg Hampl | +49 3677 69-3364 | joerg.hampl@tu-ilmenau.de
111
TECHNOLOGY
Bonding of Ceramics by Reactive Aluminum/Nickel
Multilayers
T. Welker 1, R. Grieseler 2, J. Müller 1, and P. Schaaf
2
Department of Electronics Technology
2
Department of Materials for Electronics
1
Funding: internal excellence initiative of TU Ilmenau
Introduction
In many technical applications, alumina ceramics and low
temperature co-fired ceramics (LTCC) have to be bonded to
heat spreaders. A main disadvantage of common bonding
techniques is the fact that the coefficient of thermal expansion limits the selection of heat spreader materials. Reactive soldering by the use of reactive component material
(RCM) is a promising method to solve the thermal mismatch
problem. The RCM is based on aluminum/nickel multilayer,
which reacts in strong exothermic reaction after ignition.
High reaction speeds (6.5 to 8 m/s) as well as high reaction temperature (>1400°C) can be achieved. Hence, RCM is
used as a local heat source during bonding instead of heating the whole package.
Experimental & Results
Ceramics with a silver metallization are joined by the use of
a commercial RCM (NanoFoil® by Indium Corp.). The RCM
is placed between the ceramics. After ignition, the RCM develops the necessary heat to melt the metallization of the
ceramics, which forms the bond. During bonding, a pressure of ~40 MPa was applied to the ceramics. LTCC and
alumina substrates are used for this purpose. The used RCM
has a thickness of 40 µm with a single layer thickness of
25 nm and is covered with 5 µm tin on each side. The tensile strength of the package is measured with a tension test
(see Fig. 1). The combination of alumina carriers with a silver
metallization and a tin covered RCM lead to a very strong
bond. LTCC carriers show cracks within the LTCC after bonding with RCM. These cracks led to a poor tensile strength
of the bond. Further investigations have to clarify if the exothermic reaction or the bond pressure is responsible for the
cracks. The thermal performance of the bond is tested employing a thermal test chip (PST1-02/5PU by Delphi) bonded
with a tin covered RCM on an alumina carrier with a silverpalladium metallization. The thermal test chip generates a
thermal source and measures the junction temperature. The
junction to ambient resistance of this package is measured
and compared to packages with common bonding agents
(see Fig. 2). The thermal performance of bond interface produced by RCM is comparable to the thermal performance
of common glued or soldered bonds. Objectives of further
investigations should be to determine important parameters
of the bond such as the thermal conductivity and the leaktightness. These parameters, besides the tensile strength,
are prerequisites for a wide applicability of the presented
bonding technique.
Fig. 1: Tensile strength of bonded ceramics
Fig. 2: Junction to ambient temperature of alumina packages with common
bonding agents and RCM
[1] Welker, T., Grieseler, R., Müller, J., and Schaaf, P., “Bonding of ceramics using reactive NanoFoil®”, Proc 4th Electronics
System Integration Technologies Conference (ESTC), Amsterdam, Sep. 2012, 26.1
[2] Grieseler, R., Welker, T., Müller, J., and Schaaf, P., “Bonding of low temperature co-fired ceramics to copper and to ceramics
blocks by reactive aluminum/nickel multilayers”, Phys. Status Solidi A, Vol. 209, No. 3 (2012), pp. 512-518
Contact
112
Tilo Welker | +49 3677 69-3385 | tilo.welker@tu-ilmenau.de
TECHNOLOGY
Improved Single Ion Implantation with Scanning
Probe Alignment
M. Ilg
1,2
, C. Weis
1,2
, I. W. Rangelow 2 ,T. Schenkel
1
Ion Beam Technology Group, Lawrence Berkeley National Laboratory
2
Fachgebiet Mikro- und Nanoelektronische Systeme, TU Ilmenau
1
Single dopant atoms can affect transport properties in scaled semiconductor devices and are used to explore quantum
computer architectures with qubits based on the spins of
electrons and nuclei of dopant atoms in silicon or of color
centers, such as the negatively charged nitrogen-vacancy
center (NV-) in diamond.
Single ion implantation into nanoscale devices, combined
with scanning probe alignment, is a technique for ascertainable one-by-one placement of single dopant atoms with
high spatial resolution for formation of deterministic implant structures.
Ions are generated in a microwave driven ion source, which
gives flexibility in ion species and energy. Desired solid materials, such as Bi or Sb, can be inserted directly into the plasma chamber, while gases get introduced through a needle
valve. Ions are extracted from the ion source through a 2mm
aperture at an extraction bias up to 10 kV, and can be further accelerated up to 40 kV. A mass analysis by a Wien
filter with 1.5 Tesla permanent magnets allows the selection
of the desired ion species at different charge states, which
then reach the 10‘‘ implant chamber through focusing and
bending devices. Figure 1 shows the schematic of the ion
implantation beamline.
There, the non-contact atomic force microscope (nc-AFM)
ensures non-invasive, in-situ imaging of the to-be-implanted devices and can align the ion beam to the region of
interest. The effective ion beam spot size is determined by
an aperture that collimates the broad ion beam and which
is formed in the cantilever close to the imaging tip with variable diameters (down to 10 nm) by iteration of focused
ion beam drilling and deposition of thin metal films. Figure
2 shows a schematic of the AFM setup and an example of
an in situ nc-AFM image of a 100 nm scale silicon nanowire
device.
The ion impacts in silicon nanowire devices cause large
steps in the drain source current either through gate voltage
changes by positively charged defects in the oxide layer or
through mobility degradation by the accumulation of lattice
damages in the silicon layer. Sensing of upsets in the device
current allows the counting of single, low energy ions. Bismuth donors in silicon are promising candidates for a spin
qubit architecture and have minimal range straggling, which
enables high placement accuracy.
This setup allows to non-invasively image in-situ in high vacuum with a nc-AFM, the alignment of the ion beam to the
desired implantation area and to monitor the implantation
of single Bismuth ions into the device during the formation
of selected single dopant placement patterns.
Fig. 1: Schematic of the (single) ion implantation beamline
Fig. 2: Ion implantation setup with an in situ nc-AFM image (3x3 μm2,
512x512 pixel) of a readout device with a 60nm x 300nm channel
[1] C.D. Weis et al., “Single atom doping for quantum device development in diamond and silicon”,
J Vac Sci Technol B, 26, 2596 (2008)
[2] T. Schenkel, et al., “A spin quantum bit architecture with coupled donors and quantum dots in silicon”,
arXiv:1110.2228v1, (2011)
[3] C.D. Weis et al., “Electrical activation and electron spin resonance measurements of implanted bismuth in isotopically
enriched silicon-28”, Appl Phys Lett 100, 172104 (2012)
Contact
113
TECHNOLOGY
Ultra-thin Molecular Resist Films for Nanolithography
Y. Krivoshapkina, M. Kaestner and I. W. Rangelow
New lithographic technologies and resist materials are being
developed to meet the growing demand for higher resolution and sensitivity. In the last few years, more and more
attention is being payed to low molecular weight resists.
The ultimate resolution of resist is largely determined by the
size and geometrical structure of an individual molecule.
The smallest molecule size also provides the reduced edge
and surface roughness of the patterns. Various molecular
glass resists have been studied in the past decade. Much attention is being payed to resist materials based on calixarene
derivatives, which due to their aromatic structure and small
dimensions (d≈1nm [1]), have the potential to form patterns
down to the 10 nm regime or below.
The group of Prof. Rangelow is using scanning proximal probe lithography (SPPL) method and calixarenes as positive resists. This technique is developer-free direct patterning and
provides better line edge roughness. As a result, sub-10 nm
features were demonstrated [2]. Furthermore, it was shown
that to achieve the highest resolution the resist film should
be thinner and with smaller surface roughness. Now this is
the priority task that faces us.
The fastest and cheapest film preparation technique is spincoating. The best result we obtained using this method is
9.5 nm thick c-methylcalix[4]resorcinarene film with Ra
(arithmetic average roughness) = 0.364 nm [2]. Afterwards
we tested tert-butylcalix[4]arene and tert-butylthiacalix[4]
arene. Solutions in various solvents (such as methyl isobutyl
ketone, monochlorobenzene, dichloromethane, etc.) were
tried, but the film quality was unsatisfactory. Carrying out
spin-coating and prebake parameters tuning did not give
better results. The main reason for this was due to low solubility of these derivatives in organic solvents. Another reason
might be as a result of a poor ability of some of the solvents
to wet the substrate. Based on these facts and demands of
spin-coating technique, the following requirements should
be met for solvents: relatively high boiling point, ability to
wet substrate, sufficient solubility of calixarenes and fit viscosity. Prebake parameters are important as these can cause
crystallization outbreak. Experiments with other calixarene
derivatives and appropriate solvents are underway.
Our next steps involve trying such techniques of film preparation as vapor deposition and Langmuir-Blodgett method.
Due to chemical structure of calixarenes they can be vaporized and have melting points in range 300-500°C (depending on molecular weight). Vapor deposition can provide
thin uniform films that can be crystalline or amorphous depending on process conditions. When preparing resist films
by this method, attention should be paid to glass transition
temperature, the symmetry of the molecules of using resist
material and the purity level of an agent [5]. These factors
influence dramatically on film structure – its crystallinity,
grain-forming processes and edge and surface roughness
as a result.
Using Langmuire-Blodgett technique, molecular layers may
be obtained, but it requires special amphiphilic molecules.
There are calixarene derivatives with long chain substitutes,
however they may not provide sufficient resolution. At the
same time, derivatives with substitutes with the smaller Cnumber (for example tert-butylcalix[4]arene) have shown
the ability to build monomolecular layers on water surface,
so they can fit LB-method terms and at the same time can
provide higher resolution.
Fig. 1: Topographic AFM image showing the surface morphology of ≈9.6 nm
thick c-methylcalix[4]resorcinarene layer after the prebake step.
[1] C. D. Gutsche, Calixarenes Revisited, Monographs in Supamolecular Chemistry, Cambridge, UK, 1998
[2] M. Kaestner, I. W. Rangelow, Scanning proximal probe lithography for sub-10 nm resolution on calix[4]resorcinarene,
JVST B 29, 2011;
[3] Yang, Chang, Ober, Molecular glass photoresists for advanced lithography, JMC, 2006;
[4] B. Bilenberg, M. Schoeler, Comparison of high resolution negative electron beam resists, JVST B 24, 2006;
[5] M. Ishida, J. Fujita, Fourier analysis of line-edge roughness of calixarene fine patterns, M&N Conf. 2001
Contact
114
TECHNOLOGY
Towards Single Nanometer Manufacturing (SNM):
Scanning Probe Nanolithography on Molecular Resist
M. Kaestner, M. Holz, I.W. Rangelow
MNES
Funding: Ministerium für Wirtschaft, Technologie und Arbeit, Thüringen,
“EFRE-Projekt: “NanoLith”2009-2010“ and EU-Pronano
Moore’s self-fulfilling prophecy of scaling down requires the
continuous improvement and redevelopment of lithographic methods and strategies. Lithography down to single
nanometer level [1] with high overlay alignment accuracy,
acceptable throughput, costs, and reliability is an enabling
technology for future development of new devices in nanoelectronics (single electron devices), nanophotonics, and
NEMS. To date, state-of-the-art lithographic technologies
are far away from meeting the requirements necessary to
realize lithography down to the single nanometer digit level.
Within this highly topical research field, the group of Prof.
Rangelow investigates novel “single nanometer manufacturing (SNM)” technologies using scanning probes for maskless & development-less patterning of novel molecular resist
materials [1-4]. Scanning probes using ultimate sharp tips
are capable to confine nanoscale interactions for imaging,
probing of material properties as well as for lithography to
the single nanometer scale or even below. Moreover, the
MNES group has recently demonstrated a closed loop tipbased nanolithographic method [4] using the same nanoprobe for: (i) AFM pre-imaging for pattern overlay alignment; (ii) direct writing of features into calixarene molecular
resist applying a highly confined, development-less removal
process in true non-contact; and (iii) AFM post-imaging
as final in-situ inspection. According to that, we have demonstrated two-level lithography, where second level was
precisely overlaid with the first lithography image. Within
the lithographic process, we apply a non-uniform electric
field within the tip-resist-gap, which induces a highly localized Fowler-Nordheim field emission current of low energy
electrons, resulting in direct patterning of calixarene with
positive tone behavior. Thereby, the resolution of the direct
patterning process can be precisely controlled by exposure
parameters incorporating the applied bias voltage, bias polarity, line dose as well as the tip shape and tip radius.
Herein, we are using molecular resist materials which feature
well-defined molecular structure, size, molecular weight,
and chemical composition, and can be tailored to meet the
certain requirements of the lithographic approach. Owing
to their small size (<1 nm) and truly monodisperse nature, a
more uniform and smaller pixel size can be defined in comparison to conventional polymeric resist systems.
Following this pathway, a promising route towards reliable
Single Nanometer Lithography (SNL) seems to be possible.
By employing parallel, self-actuated and self-sensing probe
arrays [5], the throughput can be drastically increased. In
conclusion, probe-based closed loop lithography represents
a promising technology for sub-5 nm fabrication of Nanoimprint templates as well as for rapid nanoscale prototyping of
beyond CMOS nanoelectronic devices.
Fig. 1: SEM image of a lithographic
test feature
Fig. 3: Imaging, analysis and writing of features at the single nanometer digit
regime using self-actuated & self-sensing scanning probes
Fig. 2: AFM image of a lithographic test
feature
[1] Rangelow, I.W. et. al., Proc. SPIE-Int. Soc. Opt. Eng. 7637, 10pp (2010).
[2] Kaestner, M. & Rangelow, I.W., J. Vac. Sci. Technol. B 29, 06FD02 (2011).
[3] Kaestner, M. & Rangelow, I.W., Microelectron. Eng. 97, 96-99 (2012).
[4] Kaestner, M. & Rangelow, I.W., Proc. SPIE-Int. Soc. Opt. Eng. 8323, 9pp (2012).
[5] K. Ivanova et al., J. Vac. Sci. Technol. B 26, 2367 (2008).
Contact
115
TECHNOLOGY
Realization of Bow-tie Antennas towards 3D
Integrated Plasmonics
D. Staaks1, D. Olynick 2 and I. W. Rangelow1
1
2
MNES
LBNL
Funding: DAAD Promos and TU Ilmenau
The use of nano-plasmonic devices with nanoplasmonic
structures such as nanoantennas is well known when it comes to energy and informantion technologies. Applications
range from spectroscopy or high resolution microscopy [1]
over optical communication and integration to energy harvesting for 3rd generation Solarpanels [2]. There is a rising
interest for such antennas because of their ability of strong
spacial field confinement and local field enhancement.
In this respect, bow-tie shaped antennas offer very good
properties [3]. Those antennas work according to the principle that incoming light from the far-field excites plasma
oscillations in the antenna structure which results in a very
strong localized field in the gap of the antenna. However,
a limitation of those antennas is given by the inplane layout, which restricts waveguides to be on the same plane
which reduces the integration density. In addition there is an
interest for implementation in standard nanophotonics for
coupling between different layer- or system-levels.
At the Molecular Foundrys Nanofabrication Facility at LBNL,
nano bow-tie antennas are being fabricated by the use of
thermal nanoimprint technology [4]. This nanofabrication
technique is suitable for high resolution nanostructuring
with high throughput and very low costs, because of stamp
durability and reusability.
The negative silicon imprinting molds are being fabricated
by e-beam lithography followed by Reactive Ion Etching. To
obtain a positive stamp as imprint template, we use Ormostamp, a UV curable resist (micro resist technology, GmbH).
The following imprinting process is done on low molecular
weight PMMA covered silicon.
Good imprints have been achieved so far. The challenges
here lay in reduction of the residual layer after imprinting
and also in adjusting the imprinting-regime to achieve bowtie structures with 75nm edge length and 10nm to 30nm
gap. After imprinting of the PMMA resist, the bow-tie shapes are deposited by evaporation of gold with titanium as
adhesive layer. The metallic bow-ties are fabricated by a subsequent lift-off process.
A new structure is being developed to meet the vertical integration. It consists of a bow-tie antenna with an ultrasmall
vertical waveguide which is located above the gap in the
bow-ties hot spot region. The main challenge of this structure is the alignment of the vertical rod just above the gap.
To achieve this high resolution alignment of the rods, we
plan to use a self alignment process. After this we want to
spin a calixarene based resist layer on top of the wafer. By
excitation of the bow-ties through laser light, a resulting
strong localized field will occur over the hot spot and thus
locally modify the resist layer. The so created holes can be
filled in with material for creating the vertical rod after a
lift-off process.
[1] A. Weber-Bargioni, A. Schwartzberg, M. Schmidt, B. Harteneck, D.F. Ogletree, P.J. Schuck, S. Cabrini: Nanotechnology,
Vol 21, 2010, pages 1-6
[2] M. Gallo, L. Mescia, O. Losito, M. Bozzetti, F. Prudenzano: Energy, Vol. 39, 2012, pages 27-32
[3] L. Novotny, N. Hulst: Nature Photonics, Vol 5, 2011, pages 83-90
[4] S.Y. Chou, P.R. Krauss: Microel. Eng., Vol.35, 1997, pages 237-240
Contact
116
TECHNOLOGY
Optimized Micro-fabrication Method for a
Micromechanical Thermal Infrared Sensor Array
M. Steffanson, K. Gorovoy, T. Ivanov, M. Holz
and I. W. Rangelow
Funding: BMBF 03FO2272
We report on the methodology of analyzing key parameters and the choice of the correct micro-fabrication process
using the example of a successfully micro-machined innovative IR sensor array. The results of this work can be implemented on a wide range of micro-sensors and MEMS.
In the last two decades, micro-fabrication has become a distinctively important industry with the production of MEMS
and micro-sensors for automotive, safety, energy, consumers, telecommunication, etc. [1]. Through miniaturization,
economy of scale and effective fabrication, our society benefits from the reliability, preciseness and cost-efficiency of
these devices. One important detector for safety, security,
quality assurance or automotive applications is an uncooled
infrared (IR) sensor, which is currently represented by the
micro-bolometer array. The fabrication technology of those sensors is complex and hence expensive. Within our research and development activities, we were able to develop
and micro-fabricate a low-cost alternative: a micromechanical thermal sensor [2-4].
At the very beginning of optimizing or designing a novel
type sensor, critical parameter and objective performance
need to be defined. In the case of a micromechanical thermal
sensor, parameters such as sensitivity, responsivity, dynamics (imaging rate) and pixel-size are crucial. To understand
these key parameters, which are in most cases interrelated,
a theoretical analysis is fundamental. After analyzing and
defining sensor characteristics, a method of micro-fabrication needs to be chosen. Next, the sensor materials must
be selected. Lastly, the process flow has to be developed.
These last two tasks are most critical due to consideration of
sensor characteristics and process compatibility of the materials. Within our micro-fabrication activities, a number of
scientific findings were gained, which were until then not to
be found in literature.
Dependent on sensor design, an optimized micro-fabrication method in particular for a high-density micromechanical cantilevers IR sensor array includes polyimide sacrificial
layer, nitride plasma enhanced chemical vapor deposition,
Al evaporation and sacrificial layer dry release etch for realizing free-standing and fully functional sensor structures
(see Fig. 1 and 2). Alternatively high temperature low pressure deposition can be implemented as well.
This project gave us great specific insight into microfabrication technology. We were able to implement our skills and
knowledge and successfully fabricate an innovative IR microsensor.
Please see “Low cost uncooled infrared detector” in section
» Systems / Photonics « for full system description, and “Numerical design of micromechanical thermal sensor” in
» Design&Simulation / MicroNanoIntegration « for theoretical background of this device.
Fig. 1: Electron microscope detail of micro-fabricated micromechanical IR
sensing pixel arrays
Fig. 2: Photograph of IR sensor chip with 640 x 480 IR pixels
[1] M. Perlmutter, L. Robin, PLANS, IEEE/ION 2012.
[2] K. Ivanova, T. Ivanov, I. W. Rangelow, J. Vac. Sci. Technol. B 23 (6), Vol. 2005.
[3] M. Steffanson, T. Ivanov, F. Shi, H. Hartmann, I.W. Rangelow, Sensoren und Messsysteme, VDE (2010) 339.
[4] M. Steffanson et al., Microelectron. Eng., Vol. 98, 2012.
Contact
117
TECHNOLOGY
Nanotransfer of Micro- and Nanoscopic Objects
between Substrates by Interfacial Surface Force
J. J. Cole 1, C. R. Barry 1, and H. O. Jacobs
2
University of Minnesota, EE department
2
Ilmenau University of Technology
1
Funding: National Science Fund CMMI-0755995 and CMMI-0621137
This project studies the transfer of ionic charges, nano, and
microscopic objects from one surface to another through
controlled delamination of interfaces. A recent focus has
been to investigate the role uncompensated surface charges
play on the interfacial force that forms during and after
delamination of dissimilar nanostructured materials that
are brought into contact. The process produces charged
surfaces and associated fields [1-2]. In particular, last years
publication in the area reports high levels of uncompensated charges that approach the theoretical limit that is set
by the dielectric breakdown strength of the air gap that
forms as the contacted nanostructured surfaces are separated through delamination [3]. The understanding of the
process involves force distance curve measurements in combination with Kelvin probe force microscopy measurement
which leads to an estimate of the charge concentration and
lateral distribution. The process is presently used to produce
charge patterned surfaces which can attract nanoparticles
with 100 nm lateral resolution, transfer micrometer- and
millimeter-sized silicon chips from an initially rigid substrate
onto flexible substrates, and alter the threshold voltage of
transistors locally across the surface of an integrated circuit.
Fig 1: Contact electrification process and measuring procedure.
Fig 2: Demonstration of the utility of printed charges.
[1] H. O. Jacobs and G. M. Whitesides, Science 291(5509), 1763-1766 (2001).
[2] Jesse J. Cole, Chad R. Barry, Xinyu Wang and Heiko O. Jacobs, ACS Nano 4(12), 7492-7498 (2010).
[3] Jesse J. Cole, Chad R. Barry, Robert J. Knuesel, Xinyu Wang, and Heiko O. Jacobs, Langmuir 27(11), 7321-7329 (2011).
Contact
118
Heiko O. Jacobs | +49 3677 69-3723 | heiko.jacobs@tu-ilmenau.de
TECHNOLOGY
Gas Phase Nanoxerographic Printers
En-Chiang Lin 1, Jun Fang 1, and Heiko O. Jacobs
1,2
ECE, University of Minnesota
2
Fachgebiet Nanotechnologie, Technische Universität Ilmenau
1
Funding: NSF DMI-0755995.
This project studies a successful development of the envisioned aspects which would enable the production of arbitrary 3D (instead of 2D) and heterogeneous multimaterial
composite nanostructured deposits (instead of homogenous and unimaterial/function) with unsurpassed resolution (~10 nm). The basic idea of the research is to utilize
the interplay between (i) high mobility gas ions, (ii) lower
mobility particles, and (iii) a patterned substrate to shape
the electric potential landscape and to guide the deposition
process over extended periods of time [1]. The main goal
of this proposal is to gain fundamental understanding and
control of a recently discovered atmospheric pressure gas
phase deposition process which has the potential to enable
the production of nanostructured deposits beyond what is
currently possible. As an example, Figure 1 illustrates a process that has been developed within this program where the
metal nanoparticles self-assemble and deposit at the center
of photoresist guides. At this point the group also has applied this developed processes to make a multi-functional
sensor chip [2], nanostructured bulk heterojunction solar
cell [3]. Figure 2 depicts the mechanism of our proposed 3
dimensional nanostructured bulk heterojunciton photovoltaic cells.
Fig. 1: SEM micrograph of nanolense arrays formed using a patterned
photoresist layer (PR).
Fig. 2: The fluorescent microscopy image shows the green fluorescence of
large macromolecular anti-mouse IgG proteins.
[1] Jesse J. Cole, En-Chiang Lin, Chad R. Barry and Heiko O. Jacobs, Applied Physics Letters 95, 113101 (2009).
[2] Jesse J. Cole*, En-Chiang Lin*, Chad R. Barry and Heiko O. Jacobs, Small 6(10), 1117-1124 (2010).
[3] En-Chiang Lin, Jesse J. Cole, Heiko O. Jacobs, Nano Letters 10, 4494 (2010)
Contact
119
TECHNOLOGY
Self-Assembly Based Component Assembly and
Interconnection Processes
R. J. Knuesel 2, S. Park 2, and H. O. Jacobs
1
2
University of Minnesota, EE department
1
Funding: National Science Fund-EECS-0822202 and 0601454.
This project studies the assembly of highly miniaturized semiconductor chips onto surfaces, by using methods of fluidic
self-assembly instead of conventional robotic machines. The
motivation for this research is that it is difficult to use conventional robotic methods to manipulate and interconnect
micro or nanoscopic objects in cases where large quantities,
distribution over large areas, or assembly in three dimensions
is required. Instead of using robotic machines, this project
builds machines that use the mechanisms of self-assembly
to enable the assembly and interconnection of microscopic
semiconductor chiplets (500 – 20 µm). The project goal is
to establish a knowledge base to enable the engineering of
self-assembly processes. The research investigates potential
solutions and establishes fundamental scaling laws of the
forces, required agitation, receptors/binding sites, interconnection strategies, and component delivery mechanisms to
enable the engineering of self-assembly processes.
As an example, Figures 1 illustrates a self-assembly process
that has been developed within this program where the
components self-assemble and attach at receptor sites on
a surface. At this point, the group has developed processes
and machines to assemble/and connect GaAs/GaAlAs lightemitting diodes onto silicon wafers [1], produce cylindrical
displays [2], package semiconductor chips [3], or produce
mechanically flexible photovoltaic modules [4,5] as shown
in Figure 2.
Fig. 2: Heterogenerous integration with different semiconductor chiplets
Fig 1: Solder-directed self-assembly using a stepwide surface energy reduction of triple interface
[1] R. J.Knuesel, Sechul Park, Wei Zheng, and Heiko O. Jacobs, JMEMS, 85-99 (2012), 21
[2] Heiko O. Jacobs, A.R. Tao, A. Schewarts, D.H. Gracias, and G. M. Whiteside, Science, 323-325 (2002) 296(5509)
[3] Wei Zheng, P. Buhlmann, and Heiko O. Jaxobs, PNAS, 12814-12817, (2004), 101
[4] R. J.Knuesel, and Heiko O. Jacobs, PNAS, 993-998, (2011), 107
[5] R. J.Knuesel, and Heiko O. Jacobs, Adv. Mater., 2727-2733 (2011) 23.
Contact
120
TECHNOLOGY
Towards Roll-to-roll Processing of Polymer Solar Cells
and Modules
R. Rösch, G. Gobsch, H. Hoppe
Funding: BMBF-Projects “PPP” and “AIMS in OPV” (FKZ 13N9843 and
03EK3502)
Organic photovoltaics matured rapidly during the last decade, and they are currently exceeding 10% of power conversion efficiency, while the device stability is reaching more
than 10000 hours on glass substrate. Both values are sufficient for entering markets with good commercial prospects.
Nevertheless a broad commercialisation has not happended
yet, although organic and escpecially polymer photovoltaics
have some particular advantages over classical silicon photovoltaics since the photoactive materials are soluble and
thus printable in large scale roll-to-roll dimensions: The modules are flexible, light weight, deliverable in many different
colors and potentially producible in a much more cost effective way.
The disadvantages of this approach are the requirements
that are made to the high speed roll-to-roll production: very
thin layers (~100 nm) have to be apllied with high lateral
and longitudinal precision and all functional layers have to
be separated into sub-cells simultaneously with the web
speed in order to produce solar cell modules.
These challenges have been faced at TU Ilmenau within the
joint project “Polymer Photovoltaics Processing - PPP” together with several research institutes and industrial partners
all over Germany from October 2008 until March 2012. The
high speed roll-to-roll application of the functional materials
Fig. 1: Thermography images of fully or partial laser structured polymer solar
modules on glass (left) or plastic (right) substrate
was done by slot-die coating [1] and structuring of the dried
layers was conducted via laser ablation [2]. As a result of
this joint project, fully and partially laser processed polymer
solar modules on glass and plastic substrates were produced
with ~1.5% and ~3% power conversion efficiency with rollto-roll compatible processes [3].
To support the efforts of the above-named project and
many other consortia dealing with the same topic, another
BMBF-project called “Analytik mittels Imaging Methoden
und Simulationen in der OPV - AIMS in OPV” was launched
at TU Ilmenau in September 2012. This project, on the one
hand, addresses the quality control of OPV-devices by imaging methods to localize production and degradation defects and, on the other hand, provides a full electro-optical
modeling of the devices to optimize their production.
Exemplary results of the characterization of the device quality, thermography images of the above-named laser processed solar modules, are shown in Fig. 1. Deficiencies of
laser processing are elucidated here [3].
First conclusions of the device modelling are presented in
Fig. 2: an effective serial interconnection of thin film solar
cells is strictly limited by the lenghts of the cell and cell-tocell interconnection [4].
Fig. 2: The detector model in Solidworks™
[1] R. Rösch et al., “Towards Roll-to-Roll Processing of Flexible Polymer Solar Cell Modules”, EUPVSEC Proceeding (2009)
[2] J. González Moreno et al., “Thin-Film Organic Solar Modules – Processing and Laser Ablation”, EUPVSEC Proceeding (2011)
[3] M. Bärenklau et al., “Polymer Solar Modules: Laser Structuring and Quality Control by Lock-In Thermography”,
MRS Proceeding, 2011
[4] H. Hoppe et al., “Optimal geometric design of monolithic thin-film solar modules: Architecture of polymer solar cells”,
SOLMAT 97, 119 (2012)
Contact
Harald Hoppe | +49 3677 69-3711 | harald.hoppe@tu-ilmenau.de
121
DESIGN & SIMULATION
Multi-scale Simulation of Nucleation and Growth of
Nanoscale SiC on Si
J. Pezoldt 1, D.V. Kulikov 2, V.S. Kharlamov 2, M.N. Lubov 2,
Yu.V. Trushin 2
1
2
FG Nanotechnologie
St. Petersburg Academic University and Ioffe Physical Technical
Institut
Growth of the silicon carbide on silicon allows to combine
the advantages of silicon carbide physical properties with
the well-developed silicon technologies. The SiC/Si heterostructure could be used as a material for sensors operating
at high temperatures, for implementation as substrates for
the III-nitride epitaxy, etc. The main technical problem of
creating a SiC/Si device is the fact that the lattice and thermal expansion constants mismatches for these materials are
as high as 20 % and 8 %, respectively. It leads to creation of
multiple nanoclusters on the surface. Also the quality of SiC/
Si heterojunction suffers because of the presence of voids
at the interface.
Growth of SiC clusters on silicon can be divided on several
stages. First stage of growth corresponds to the initial period of SiC cluster formation, second stage – transition from
2D to 3D cluster growth, and last stage – overgrowing of
space between SiC clusters and formation of SiC layers. It
should be noted that the quality of the growing SiC layers
mainly depends on the density and size distribution of SiC
clusters. So it is important to understand the physics of silicon carbide formation.
Although molecular beam epitaxy allows growing high quality nanosized structures, further progress is hampered by
absence of physical understandings of various processes
occurring during silicon carbide growth. In addition, purely theoretical investigation of silicon carbide growth is not
possible due to complexity of the growth processes and due
to the considerable difference in time and spatial scales of
different stages of the growth. A rate of the diffusion process is much higher than nucleation stage rate, which in turn
is much faster than stationary stage of cluster growth. The
same applied to spatial scale of above mentioned stages.
Furthermore, another obstacle of implementing numeri-
cal simulations for the prediction of nucleation and epitaxy growth is the variety of physical processes with a considerable difference in time and spatial scales. During the
growth of nanostructures and epitaxy deposition of atoms,
surface and bulk diffusion, nucleation of two-dimensional
and three-dimensional clusters, transitions from two dimensional to three dimensional growth, stress relaxation occur.
Thus, it is challenging to describe all of them in the framework of a single physical model. In the present work a multiscale simulation of the epitaxial growth of silicon carbide
nanostructures on silicon using three numerical methods,
namely Molecular Dynamics, kinetic Monte Carlo, and the
Rate Equations was implemented. Molecular Dynamics was
used for the estimation of kinetic parameters of atoms and
stress fields at the surface, which are input parameters for
the other simulation methods. Kinetic Monte Carlo simulations allowed investigating basic nucleation processes and
the transition from two dimensional nucleation to three
dimensional cluster growth as well as the ordering of nanoclusters. Additionally, the influence of impurities on the
nucleation of nanoscale SiC was studied. The energy barriers
values obtained in Molecular Dynamics and the physical model used in the rate equation simulations was validated by
Kinetic Monte Carlo. The Rate Equation simulation allowed
studying the growth process at larger time scales taking into
account the surface stress fields. As a result, a full time scale description spanning over a large substrate area of the
morphological and structural surface evolution during SiC
formation on Si was developed [1].
[1] J. Pezoldt, D.V. Kulikov, V.S. Kharlaov, M.N. Lubov, Yu.V. Trushin, J. Comput. Theoretical Nanosci. 9, 1941 (2012)
Contact
122
DESIGN & SIMULATION
Simulation Study of Application of Multi-Frequency
Transconductance Technique on OFET’s
I. Hörselmann, S. Scheinert
Solid State Electronics

C 
g
g
D =
−

 with
e  KVDS + g mLF KVDS + g mHF 
"
it
"
ox
LF
m
HF
m
the implemented interface density N”it . Furthermore, the
comparison of Fig. 1 and 2 clearly shows that the variation
in gmLF is caused by the recharging process of the traps. The
total value of interface trap density N”it itself can easily be
determined by integration the difference of gmHF and gmLF
over the gate voltage. The results of are listed in tab. 1. The
calculated interface trap densities are lower than 1.5×1012
cm-2, because not all states changed the occupation during
the gate sweep.
Tab.1: Calculated interface trap densities N”it
ET-EV (eV)
0.1
N”it (cm )
0.2
0.45×10
-2
12
1.38×10
0.3
0.4
1.26×10
12
12
1.01×1012
Summarizing the results, we can conclude that the modified MFT-technique is applicable on OFET‘s and it is possible
to calculate the trap density per unit energy and area D”it
and the total interface trap density N”it.
3 E -E (eV)
t
V
Re(gm) (nS/µm)
the interface trap state density. In our contribution we demonstrate the necessary modification of the MFT-technique
for the application on OFET’s with two dimensional numerical simulation methods.
The simulated bottom contact transistor is similar to that in
[1], only the channel length was reduced from 50 to 2µm
and the mobility of the semiconductor increased, to ensure
the channel transit time is small against trap time constant.
The semiconductor material is a 35nm thin P3HT layer. The
drain-source voltage for all following simulation results is
VDS=-0.2V. The donor-like interface trap density was set to
N”it=1.5×1012cm-2. Fig. 1 illustrates the influence of different trap levels to the difference of the transconductance for
high- (gmHF) and low- (gmLF) frequencies. At high frequencies
the trap states are not able to follow the ac-signal. Consequently, gm increases at frequencies higher then trap time
constant.
The formula in article [1] is only valid for weak inversion and
the calculated trap densities are too high. Consequently,
we modified the MFT-technique to be applicable on OFET‘s
operating in accumulation and depletion. As described in [2]
with our method the trap density per energy and area can
be calculated with following eq.:
w
K=
µ Cox" (1)
L
trap free
0.1
0.2
0.3
0.4
2
1
VDS=-0.2V
NF
gm f=1Hz
NF
5
gm f=10 Hz
0
-40
-30
-20
-10
0
VGS (V)
Fig. 1: Transconductance in case of donor like interface trap states simulated
for 1 and 105 Hz.
6
4
ET-EV (eV)
VDS=-0.2V
0.1
0.2
0.3
0.4
12
-1
-2
Dit (10 eV cm )
2
"
Fig. 2 shows the D”it as a function of the gate voltage calculated by this modified MFT-method (eq. 1). As expected, the
maximum value of the calculated trap densities multiplied by
the energetic distribution of 2kBT are not higher than
The characterization of the interface properties is important
to improve the performance of organic field effect transistors (OFET’s). In [1] the application of the multi-frequency
transconductance (MFT) technique, developed for silicon
based MOSFET’s [2], on OFET’s was described to estimate
0
-40
-30
-20
-10
0
VGS (V)
Fig. 2: D”it calculated by modified MFT-method.
[1] P. Srinivas et al. A simple and direct method for interface characterization of OFETs. In Proceedings of 14th IPFA 2007,
Bangalore, India, pages 306–309, 2007.
[2] I. Hörselmann and S. Scheinert. Multi-Frequency Transconductance Technique on OFET’s. Proceedings of Large-Area, Organic
and Polymer Electronics Convention 2011 (LOPE-C 11), Frankfurt/M., June 2011, ISBN 978-3-00-034957-7.
Contact
Ingo Hörselmann | +49 3677 69-3406 | ingo.hoerselmann@tu-ilmenau.de
123
DESIGN & SIMULATION
Design and Optimization of an Integrated Digital
Sensor for Magnetic Fields
I. Haverkamp, H. Toepfer
Funding: Thuringian Ministry of Economy, Employment and Technology,
EFRE project ‘IDMS‘
Sensor Operation Principle
Several technical tasks require measurements of very weak
magnetic fields where traditional devices such as those based on magneto-inductive und magneto-resistive principles
reach their limits. Non-invasive measurements in clinical
diagnostics or in geo-exploration are of special interest. In
such situations, superconducting quantum interference devices (SQUIDs) can be applied as they allow for measurements down to the femto-Tesla range. SQUID sensors are
unsurpassed with respect to their sensitivity to magnetic
flux. Because of this, however, using conventional SQUIDs
in magnetically unshielded environments and mobile applications is challenging because of the wide dynamic range of
the signals. Therefore, a different approach utilizing a sensor called Digital SQUID has been elaborated. It is based on
the fact that magnetic flux represents a physical quantity
which underlies a quantization with the flux quantum Φ0
being defined as Φ0 = h/2e ~ 10 -15Vs (h: Planck’s constant,
e: elementary charge). The Digital SQUID takes advantage
of the effect of flux quantization in a superconducting loop
and measures magnetic field by counting single flux quanta. As the sensor itself digitizes the signal, no analogue-todigital converter is required. The least significant bit of the
Digital SQUID is determined by Φ0. Since Φ0 is a physical
constant and as a consequence not subject to deviations,
there is a high potential of this sensor type in terms of linea-
rity. The Digital SQUID follows the principle of a delta modulator which, theoretically, has no upper limit with respect to
the signal amplitude. Thus, it can outperform its analogue
counterpart in terms of dynamic range which is especially
interesting for highly sensitive and mobile magnetic field
measurements in a magnetically unshielded environment.
Furthermore, it is of potential use as a digital-to-analogue
converter measuring a current inductively coupled to the digitalization loop.
Parameter Studies and Results
After a research phase leading to a proof-of principle, the
complex and non-linear interdependencies of the design
parameters have been studied both by means of simulation
and experimentally. Especially, the influence of the comparator grey zone and of the input loop inductance on the
system performance was analyzed. Evaluation criteria were
based on the power spectral density, as is common in characterizing semiconductor analogue to digital converters.
This led to design guidelines for an optimum field-sensing
inductance depending on the comparator grey zone and finally for attaining an optimum system performance with respect to noise and distortion. As a result, a well-understood
sensor concept has been made available for implementation
in high-performance magnetic field measurement systems.
Fig.1: Integrated Digital SQUID sensor on a chip carrier, fabricated by
FLUXONICS Foundry at IPHT Jena.
Fig. 2: Schematic representation of the Digital SQUID sensor with flux sensing
loop (red),on-chip (blue) and off-chip input coils.
[1] I. Haverkamp, O. Mielke, J. Kunert, R. Stolz, H.-G. Meyer, H. Toepfer and T. Ortlepp:, Linearity of a Digital SQUID
Magnetometer. In: IEEE Transactions on Applied Superconductivity 21 (2011) No. 3, pp. 705-708
[2] I. Haverkamp, O. Wetzstein, J. Kunert, T. Ortlepp, R. Stolz, H.-G. Meyer and H. Toepfer, Optimized input configuration of a
digital SQUID magnetometer in terms of noise and distortion. In: Superconductor Science and Technology 25 (2012), pp.
065012
Contact
124
Hannes Töpfer | +49 3677 69-2630 | hannes.toepfer@tu-ilmenau.de
DESIGN & SIMULATION
Methods development in low-field NMR
C. Mattea, S. Stapf
Developing new hardware and new methods represents
a cornerstone of research activities of the group. Since its
inception in Ilmenau the group has dedicated itself in the
broadening of availabilities of low-field methods, which are
not only more cost-efficient than standard high-field NMR
systems, but often also provide contrast that is much more
favourable compared to conventional approaches.
a commercial Bruker Minispec, two single-sided scanners
“NMR-MOUSE” (Magritek) and a 0.5 T-magnet following
the Halbach design. On the hardware side, temperatureand humidity controlled sample cells are being developed as
part of undergraduate student projects. Rheological units
have been designed for several of these devices and are currently being employed for the study of complex fluids.
Worth mentioning in particular is the so-called field-cycling
method, which allows the determination of relaxation times
at magnetic fields, and therefore Larmor frequencies, covering about four orders of magnitude in field down to approximately the Earth's magnetic field level. For many studies of
molecular dynamics, this technique has been instrumental
in finding suitable models of molecular motion and correlation. The group is using two relaxometers for the study
of, among others, fluids in porous media, cement research,
solid and molten polymers, crude oil and biological tissue.
Figure 1 shows the so-called quadrupole dips (1H-14N crossrelaxation with amino acid nitrogens) in bovine articular cartilage before and after dosage of contrast agent.
Current development includes field-cycling relaxometers as
well as the other low-field devices available in the group, i.e.
Methods development involves the design of optimized
pulse sequences for the various conditions of the low-field
scanners, such as the programming of diffusion spectrum
measurements to quantify mobility and exchange in multicomponent systems, and two-dimensional exchange and
correlation sequences for the identification of connectivities
in broad relaxation times/diffusion distributions. As an example of experimental design, Figure 2 shows the evolution
of relaxation times in a curing film of gelatine as measured
by the NMR-MOUSE which helped to quantify the renaturation and subsequent crystallization process in hydrated
gelatine.
Fig. 1: Relaxation dispersion and quadrupolar dips for bovine cartilage after
enzymatic treatment.
Contact
Fig. 2: Spatially resolved relaxation times for drying gelatin film during
renaturation
125
DESIGN & SIMULATION
Analytical Approach for Capillary Pressure Drop in
Rectangular Channels
M. Schneider, M. Hoffmann
In many microfluidic solutions one of the main effects causing a flow is the capillary drag of a fluid along a wetted
surface. It is used e.g. in drug delivery [1] or time-temperature-integration [2]. Parameters influencing the capillary
force are material constants such as density, viscosity or the
contact angle also the size and geometry of the channel.
Since it is well known how to calculate velocity and acceleration of a fluidic meniscus at the phase boundary for cylindrically shaped channel, it is much more challenging for
quadratic or rectangular channels. Yet the pressure drop in
a rectangular channel is modeled due to a plane sheet in
the cross section of the channel and thus the area of the
meniscus is independent of the contact angle. An analytic
approach for the pressure drop at the phase boundary especially for rectangular channels has been introduced and
compared to common solutions. The model shows the complex dependence of the contact angle on the surface of the
meniscus and capillary force to improve accuracy in further
modeling steps.
The movement of a meniscus within any channel can be described by the Navier-Stokes-Equation .
For the example of a fluid dragged inside laminar and onedimensional by capillary force, the assumption of a newton
fluid in a constant cross section channel and neglecting gravitational effects allow a simplified and analytically solvable
form of the Navier-Stokes-Equation.
A main part of this equation ist the pressure drop as the driving effect of the capillary flow. This pressure is a quotient
of the capillary force and the corresponding area of the fluid
meniscus.
The common approach for the analytical evaluation of a
simplified Navier-Stokes-Equation describes the area of the
meniscus in channels with a rectangular cross section as a
plain square. Thus the circumference in the capillary force
is displayed as the circumference of the channel itself. That
way the only dependence of pressure drop and contact angle is the cosq in the expression of the capillary force from
equation.
In fact the meniscus itself is strongly depending on the
contact angle itself. The smaller the angle becomes the
bigger the surface of the meniscus and at the same time
the bigger the capillary force and the surface are. The dependence between contact angle and the capillary force
respectively pressure are far more complex than the cosq
relation.
Fig. 1: Comparison of capillary force with common and new approach
Fig. 2: Parabolic shaped meniscus with parabel shaped contact line between
channel walls and fluid
[1] Ran Liu, Xiaohao Wang, Yanying Feng, Guangzhi Wang, Jing Liu, Hui Ding: “Theoretical Analytical Flow Model in
[2] Hollow Microneedles for Non-forced Fluid Extractions”, 2006 1st IEEE International Conference on Nano/Micro Engineered and
Molecular Systems, Zhuhai, China, 18-21 January 2006
[3] Mike Schneider, Martin Hoffmann: “Non-electrical-power temperature-time integrating sensor for RFID based on microfluidics”
In: Proceedings SPIE 8066, 80661V (2011) DOI: 10.1117/12.886768
Contact
126
Martin Hoffmann | +49 3677 69-2487 | martin.hoffmann@tu-ilmenau.de
DESIGN & SIMULATION
Theoretical Approach to Nanolithography using
Electron Field Emission from Nanotips
S. Lenk, M. Kästner, T. Ivanov and I. W. Rangelow
Funding: Carl-Zeiss-Stiftung
Electron beam lithography is a promising tool to produce
nanometer-scale semiconductor devices. One limiting factor
of conventional electron beam lithography is the scattering
of high-energetic electrons. By using a nanotip (e.g. from
an atomic force microscope, see fig. 1) as electron emitter, low-energetic electrons can be produced with a high
spatial localization at the tip apex. A possible approach to
nanostructure fabrication using nanotip emitters is the lowenergy exposure of a resist material. Thus, the feature size
and resolution are dependent on the spatial properties of
the electron beam and the interactions of the electrons with
the dielectric resist.
We study the electron emission from metallic nanotips with
regards to the application in nanolithography. The calculation for electron field emission is typically based on the
Fowler-Nordheim theory or on the Richardson equation
for thermionic emission [1]. The operation regime for the
electron lithography, i.e. typical applied voltages up to 50V
and operation at room temperature, is between field and
thermionic emission and is sometimes called thermionic
field emission [1]. In addition to the calculation of the field
emission current, we are solving Laplace’s equation for the
electric field around the nanotip and the trajectories of the
emitted electrons. In fig. 2, we show the calculated trajectories of emitted electrons from the nanotip to the sample and
(color-coded) the electric potential due to an applied electric
field. For metal nanotips, the electron beam diameter is proportional to the applied voltage, seen in fig. 3 (black curve),
and the tip radius. Similar results were found by Mayer et al.
[2]. To achieve an additional focusing of the electron beam,
Fig. 1: Si nanotip sharpening
by focused ion beam.
Fig. 2: Electron trajectories and the electric
field.
we include a volcano-type gate as shown in fig. 4 [3]. The
volcano gate changes the beam diameter and can yield an
extra focusing. The focusing depends on the voltage applied
to the volcano gate as well as the height of the volcano relative to the nanotip. In fig. 3 (red curves), the gate bias relative to the applied bias voltage at the tip is held constant.
The different curves relate to different relative heights. The
curve with the best focusing effect belongs to a volcano
gate which is 10nm above the tip apex.
In nanolithography applications semiconductor tips are often used. Therefore, we want to use doped silicon (Si) nanotips. Thus, the band structure has to be considered additionally in the calculation. In particular, we want to consider
the effects of field-induced changes of band bending, surface charges as well as the effect of screened image charges
and emission from surface states together with a volcano
gate. These calculations will be the basis to study the interactions of the emitted electrons with the resist material and,
thus, to the mechanisms of nanolithography.
Fig. 3: Dependence of electron beam diameter on bias voltage.
Fig. 4: Micrograph of a volcano
gated field emitter.
[1] R. Fischer, H. Neumann, Fort. d. Phys. 14 (1966) 603
[2] T. Mayer, et al., J. Vac. Sci. Technol. B14 (1996) 2438
[3] T. Ivanov, J. Vac. Sci. Technol. B 19 (2001) 2789
[4] Q.-A. Huang, J. Appl. Phys. 81 (1997) 7589
Contact
127
Design & Simulation
Modelling and Optimization of Micromechanical
Thermal Sensor for Infrared Detection
K. Gorovoy, M. Steffanson, T. Ivanov and I. W. Rangelow
We report on modelling and optimization of a novel Micromechanical Thermal Sensor for Infrared Detection. In the
last few years, uncooled infrared technology has been dominated by bolometer sensor arrays. This technology has a
distinct advantage over a cooled infrared system since there
is no necessity for cryogenic cooling of the sensor chip. On
the other hand, the production of the bolometer is associated with a costly and very complex technological effort. A
promising low-cost alternative to the bolometer is a micromechanical thermal detector [1-3].
A micromechanical thermal sensor consists of three main regions: the insulator, the bimorph and the absorber. These regions need to be implemented in the sensor design. In fact,
the sensor design, along with the correct choice of functional materials (thin films) and fabrication technology, is the
key issue for high sensitivity operation. In this study several
designs have been numerically analyzed. Considering several boundary conditions and sensor parameters, which are
fully described in this paper, an optimum design was found
(see Fig. 1). All sensor design details, e.g. interconnecting
parts, structure stiffening region, etc. were fully analyzed
and their influence on the sensors’ behavior is described.
In modeling the sensor, two important aspects must be considered: geometry ratios and materials with mechanical and
thermal properties. To allow for an accurate simulation of
the optimized sensor, the following material properties of
chosen materials are required: Young‘s Modulus, Poisson‘s
Ratio, Coefficient of Thermal Expansion (CTE), Thermal Conductivity and Specific Heat Capacity. These properties were
measured of real sensor thin films with special metrological
tools and devices and have shown that thin film material
properties can greatly differ from bulk material values.
With regards to the numerically found optimized design and
the investigated materials, a micromechanical thermal sensor has been micro-fabricated via surface micromachining
(see Fig. 2). We examined static and dynamic behavior of
manufactured sensors and compared it with the numerical
calculations. From the calculated and measured data we
were then able to abstract for the infrared sensor important
characteristics: NETD and Thermal Time Constant.
This work gave us deep insight into the operation of a novel
IR sensitive micromechanical thermal device. Due to the results found in this study, we are now able to model a wide
range of micromechanical sensors and micro-electro-mechanical-systems (MEMS) which leads to efficient, time and
cost saving sensor design and testing.
Please see “Optimized micro-fabrication method for IR sensor” in section »Technology / MicroNanoIntegration« for
micro-fabricatication technology information, and “Lowcost uncooled IR detector” in »Systems / Photonics« for system operation details.
Fig. 1: Example of a numerically simulated temperature profile of a micromechanical thermal IR sensor
Fig. 2: SEM image of the micromechanical thermal IR sensor micro-fabricated with surface micromachining
[1] K. Ivanova, T. Ivanov, I. W. Rangelow, J. Vac. Sci. Technol. B 23 (6), Vol. Nov/Dec 2005.
[3] M. Steffanson, K. Gorovoy, V. Ramkiattisak, T. Ivanov, J. Król, H. Hartmann, I.W. Rangelow, Microelectron.
[4] Eng., Vol. 98, 2012
Contact
128
Design & Simulation
Concept and design of novel high speed wavefront
sensors for high resolution displacement analysis
S. Hauguth-Frank 1; T. Ivanov 1; K. Ivanova 1; M. Hofer 1; J.-P. Zoellner 1;
H.-J. Buechner 2; E. Manske 2 and I. W. Rangelow 1
1
2
FG MNES
FG PMS
Funding: BMBF, VIP
Introduction
Since its first introduction in 1887 [1], interferometry is
the most used method for high resolution displacement
measurements. Up to now, state of the art interferometry
devices are still based on the principle setup by Michelson
and Morley. This setup consists of an interfering measurement and reference beam employing special spatial requirements to light sources and relative position of optics. With a
growing demand for high precision displacement measurements, especially for industrial applications along with an
ongoing increase in system integration, smaller and cost effective solutions maintaining sub-nm resolution are needed.
One approach to overcome the geometrical limitations is a
interferometer based on the concept of a wavefront sensor[2], where the interference of a single wavelength incident and reflected beam is analyzed (Fig. 1). Due to a phase
change of the beam of π at the reflective surface, the intensity pattern along the optical path is fixed for a constant
wavelength. By variation of the distance between the light
source and the reflective surface, only the amplitude of intensity is changed. To use this effect for interferometry, the
setup of such system is reduced to a light source and a semitransparent photodetector within the optical path to sample
the intensity of the resulting standing wave. Therefore, the
main challenge is to develop a fast semi-transparent photo-
detector, which is able to recognize changes to the intensity
amplitude with a minimal effect on the incident beam.
For high frequency and high precision light detection, commonly PIN photodiodes are used. State of the art photodiodes
are fabricated as stacked layers vertical to the incoming light.
The diode characteristics are mainly controlled by the diode
diameter and the thickness of the intrinsic layer. To refine such
design to suit the optical and bandwidth requirements for
standing wave interferometry (SWI) would imply decreasing
the thickness of the intrinsic layer and the diode diameter and
hence the absorbing layer so drastically, that only signals up
to few 10kHz can be measured [3]. Therefore the scope of the
project is to determine a new design of a PIN photodetector
for SWI.
Fig.1: (a) A incident (red) and reflected (blue ) LASER beam and (b) the
resulting intensity (grey) sampled by a detector.
[1] A. A. Michelson and E. Morley, American Journal of Science, 1887, 34 (203): 333–345
[2] H.-J. Büchner and G. Jäger, Meas. Sci. Technol. 17, 2006, 746-752
[3] E. Bunte, V. Mandryka, K. H. Jun, H.-J. Büchner, G. Jäger, and H. Stiebig, Sens. Actuators A 113, 334 (2004).
Contact
129
Design & Simulation
Vision Aids for Patients Suffering from Age-related
Macular Degeneration
M. Hillenbrand, D. Link, S. Klee, B.Mitschunas, J. Haueisen,
S. Sinzinger
Funding: Thüringer Ministerium für Wirtschaft, Arbeit und Technologie
(TMWAT), European Social Fund (FKZ: 2012 FGR 0014 )
Worldwide, about 30 million people suffer from Age-Related
Macular Degeneration (AMD), a disease causing progressive
damage to the macula, the central part of the retina. People suffering from AMD usually experience growing dark or
blurred spots in the centre of their vision which render them
unable to read texts, to drive cars, or to recognise faces.
Current vision aids for AMD patients are mainly based on
the magnification and/or the redirection of the full field of
view which result in a loss of information at the outer parts
of the retina.
Our multidisciplinary research project is aimed at the development of passive vision aids for all-day use as well as
the evaluation of their influence on human perception. A
key concept is the redirection of the most important central
information onto the unimpaired parts of the retina. At the
same time the loss of information at the outer parts of the
retina has to be minimized in order to retain peripheral vision. Our focus is on highly integrated, nonelectric, spectaclelike systems.
perception. Owing to the reduced number of light sensitive
cells outside the macula, the central information has to be
magnified in order to e.g. restore the ability to read texts or
to recognize faces. Fig. 1 shows two concepts for redirection of the central information. The first principle is based
on the magnification and distortion of the full field of view.
The information density on the damaged areas is reduced
while peripheral vision is retained through deliberately induced barrel distortion. The second principle combines the
magnification and redirection of the central information to
an unimpaired part of the retina. The next step will be the
combination of the deflecting elements with magnifying
systems e.g. miniaturised Galilean telescopes.
Humans are used to automatically reorient their eyes in order to focus the most important information onto the macula. As AMD mainly affects this area including the centre
of sharpest vision, patients have to adapt to a new way of
As both methods change the principles of human vision,
the evaluation of their influence on human perception is a
central part of our research project. For this purpose a simulator system based on head-worn displays is developed.
In combination with an adopted analytical model it allows
us to evaluate the effects of different kinds of vision aids on
human perception. In addition, a magnified model of the
human eye is developed to demonstrate the image transformation principles in an objective manner. First experiments
with the image segmentation principle clearly indicate the
feasibility of this approach (Fig.2).
Fig. 1: Concepts for information redirection through image segmentation and
distortion.
Fig. 2: Experimental results showing the feasibiltiy of the image segmentation
approach.
[1] M. Hillenbrand, B. Mitschunas, S. Homberg, S. Sinzinger: “Novel vision aids for people suffering from Age-Related Macular
Degeneration”, 113 Jahrestagung der Deutschen Gesellschaft für angewandte Optik, Eindhoven (2012)
Contact
130
Matthias Hillenbrand | +49 3677 69-1276 | matthias.hillenbrand@tu-ilmenau.de
Design & Simulation
Design of a Integrated Multi-channel Fluorescence
Sensor
X. Ma, A. Grewe, M. Hillenbrand, S. Sinzinger
Funding: BMBF, Project OptiMi II (FKZ: 16SV5473) TMBWK,
Graduate School OMITEC and Green Photonics FKZ: PE 104-1-1;
FKZ: B514-10062; FKZ: E715-10064)
Introduction
In combination with (micro-)fluidic systems, fluorescence
detectors have a large variety of applications, e.g. in biological and medical research. They enable the dynamic measurement of very small sample volumes in so-called segmented
flow systems, which is beneficial for practical applications.
A single-channel fluorescence sensor using a planar integrated free space optical system has been developed in the past
[1]. Monolithic fabrication was realized in a PMMA substrate
by ultraprecision micromilling with a Kugler Microgantry™
nano5X ultraprecision machining center. In order to increase
the measuring flexibility and accuracy as well as to satisfy
more requirements, the extension to a multi-wavelength
and multi-channel sensor system is currently investigated.
Design principle
The major challenge for the design is to increase the system‘s
efficiency, which means to maximize the signal directed onto
the detector. Fig. 1 shows the principle set-up of the improved fluorescence detector [2]. The LED source is collimated
and split into two identical arms (one for the measurement
and the other one as the reference) by a biprism. Each excitation arm is focused by the parabolic mirror onto the fluid
segments in the tube to illuminate the fluorescence markers.
The center of the tube is placed in the focus of the parabolic
surface in order to realize a perfect focusing of the collimated light. This focal point which corresponds to the source
point of the fluorescence light is at the same time one focus
point of the elliptical surface. Thus, the excited light from
the fluorescing probe can be focused by the elliptical mirror
onto the detector located in the second focus point of the
ellipse most efficiently. The signal is deflected and filtered
before it reaches the detector. All the optical components
are integrated and will also be fabricated as one monolithic
PMMA-system.
Modeling and simulation
For the optical design, the 3D-CAD software Solidworks™and
the raytracing tool ZEMAX™ were used. At first, the whole
detector including the PMMA-system, the tube and the fluid
was modeled with SolidworksTM as shown in Fig. 2. After
that, all the components were imported separately into a
ZEMAX file, with which the simulations were done. According to the first simulation results, about 60% of the entire
fluorescence light can be collected by the elliptical mirror.
Due to the significantly extended useful area/angle to collect
the fluorescence light in comparison with earlier systems,
the efficiency and signal-to-noise ratio can be significantly
increased.
Compared to the first generation system, the new system
has more functionality and improved efficiency. However,
significant challenges remain for the fabrication. The unique
flexibility of ultraprecision milling process is currently exploited for this purpose.
Fig. 1: Schematic setup of the fluorescence detector.
Fig. 2: The detector model in Solidworks™.
[1] M. Amberg, S. Stoebenau, S. Sinzinger, “Integrated free-space optical fluorescence detector for microfluidic applications”,
SPIE Proc. 7716-27 (2010).
[2] X. Ma, A. Grewe, M. Hillenbrand, S. Sinzinger, “Design and integration of a multi-channel fluorescence detector”, DGaO
Proceeding (2012).
Contact
Xuan Ma | +49 3677 69-1895 | xuan.ma@tu-ilmenau.de
131
Design & Simulation
Observing the Localization of Light in Space and
Time by Ultrafast Second-harmonic Microscopy
D. Leipold1, E. Runge1, M. Silies2, M. Mascheck 2, C. Lienau2,
T. Yatsui3, K. Kitamura3, M. Ohtsu3
TU Ilmenau
University of Oldenburg
3
University of Tokyo
1
2
Funding: JST and DFG within the “Nanoelectronics” programme and
DFG SPP 1391
Multiple coherent scattering and the constructive interference of certain scattering paths form the common scheme
of several remarkable localization phenomena of classical
and quantum waves in randomly disordered media. The
arguably most spectacular effect is random lasing, where
constructive random interference play the role of the mirrors
of a conventional laser set-up. Further prominent examples
are electron transport in disordered conductors, the localization of excitons in semiconductor nanostructures, surface
plasmon polaritons at rough metallic films or light in disordered dielectrics. However, direct observation of the fundamental spatiotemporal dynamics of the localization process
remains challenging. This holds true, in particular, for the
localization of light occurring on exceedingly short femtosecond timescales and nanometre length scales.
We combined in Ref. [1] second harmonic microscopy with
few-cycle time resolution to probe the spatiotemporal localization of light waves in a random dielectric medium. We
found lifetimes of the photon modes of several femtoseconds and a broad distribution of the local optical density
of states, revealing central hallmarks of the localization of
light.
To scrutinize our results, we have performed three-dimensional time-resolved simulations of Maxwell’s equations for
a model-nanorod structure. The spatial distribution of the
time-integrated second harmonic intensity for a typical si-
Fig. 1: Modeling of the ZnO sample
(based on SEM data)
Fig. 2: Multiple scattering of red light
and blue hot-spot emission
mulation run displays pronounced spatial fluctuations in the
SH intensity and local hot spots. The localized modes display
a multifractal character with field maxima mostly located in
between the cylinders. They show intensity variations on a
characteristic scale of 20 nm only, far beyond the experimental resolution. The calculated temporal dynamics of the
electric field amplitude with an overall decay of 20 fs matches well with experiment.
A remarkable observation both in the experimental data and
the simulations is the coexistence of modes with different
localization behavior in the same energy range. This issue
is addressed in Ref. [2]: We note that at least three aspects
oppose Anderson-type localization in real nano-wire array:
absorption, radiative loss into the vertical direction and inplane transport. For more insight on the latter, purely twodimensional systems of finite size were studied numerically.
Here, in-plane emission at the boundaries competes with localization and yields finite life times. Again, the coexistence
of modes with different localization behavior in the same
energy range is observed.
Finally, we remark that light localization by inherent disorder
is not only of great fundamental interest and the basis for
random lasing. It can be part of advanced photon management in solar cells containing, e.g., disordered transparent
oxids as electrodes.
Fig. 3: Second-harmonic generation
at hot spots
Fig. 4: 3D calculation of intensity
showing field localization
[1] Observing the localization of light in space and time by ultrafast second-harmonic microscopy, M.Mascheck, S. Schmidt,
M. Silies, T. Yatsui, K. Kitamura, M. Ohtsu, D. Leipold, E. Runge, and C. Lienau, Nature Photonics 6, 293 (2012)
[2] Ultrafast dynamics of localized light modes, D. Leipold, M. Silies, M. Mascheck, C. Lienau, and E. Runge, Special Issue on
Ultrafast Plasmonics, Annalen der Physik 2013 (accepted)
Contact
132
Erich Runge | +49 3677 69-3707 | erich.runge@tu-ilmenau.de
DEVICES
Multilayer MoS2 Back-Gate Transistor
M. A. Alsioufy 1, F. Schwierz 2 and J. Pezoldt
1
2
Department of solid-state electronics
1
Molybden disulfide is an alternative material for two-dimensional electronics allowing the fabrication of transistors
exhibiting real off operation not accessible for large area
graphene devices. A two-dimensional Molybdenum disulfide backgate MOSFET was realised. At first MoS2 thin flakes
were mechanically exfoliated by the classical scotch-tape
technique on a heavily doped Si substrate capped with 300
nm SiO2 [1]. Similar to graphene, MoS2 Nano sheets with
different layer numbers show distinguishable contrast on
the Si/SiO2 substrates, as observed by optical microscopy.
The thickness of the flakes were measured by atomic force
microscopy which showed that the flakes used for transistor
fabrication were between 1 Monolayer and 3 Monolayers.
Electrical contacts were fabricated using electron-beam
lithography followed by deposition of 80nm thick Ti elec-
trodes.
The Drain and Source contacts were evaporated. An example of a typical device is shown in Fig. 1. The electrical characterization of the device was carried out at room temperature in a nitrogen atmosphere. The output characteristic
of the fabricated transistor is presented in Fig. 2. The MoS2
transistor exhibits typical n-type channel MOSFET behaviour. This behaviour was observed regardless of the number
of layers or contacting material of the MoS2 transistors.
The output characteristic gives the ability to extract the
electron mobility of the molybden disulfide active layer. The
obtained values were in the range between between 5 and
20 [cm2 /Vs] at room-temperature and a current on/off ratio
exceeds 105 in the gate voltage range between -40V and
40V, which is in good agreement with the previous reports
[1, 2, and 4].
Fig. 1: REM micrograph of an MoS2 MOSFET.
Fig. 2: The output characteristic of an MoS2 MOSFET.
[1] B. Radisavljevic, A. Radenovic, J. Brivio, V. Giacometti, and A. Kis, Nature Nanotech. 6 (2011) 147.
[2] K.S. Novoselov et al., Proc. Natl Acad. Sci. USA 102 (2005) 10451.
[3] Han Liu and Peide D. Ye, IEEE Electron Devices Letters 33 (2012) 546.
[4] A. Ayari, E. Cobas, O. Ogundadegbe, M. S. Fuhrer, J. Appl. Phys. 101 (2007) 014507.
Contact
Mohamad Adnan Alsioufy | +49 3677 69-1875 | adnan.alsioufy@tu-ilmenau.de
133
DEVICES
Ultra-Low Noise and High Gain Amplifier for High
Frequency NEMS-Resonator with 2DEG-Read Out
1
2
, A. Albrecht
H. Bartsch,
Perrone,
Geiling, J. Müller
M.
Hofer, T.R.
Angelov
L. T.
Chervenkov,
M. Kästner,
A. Schuh,
Tz.
Ivanov, N.
and
I.W.Rangelow
1
Department
ofNikolov
Electronics
Technology
2 Center of Micro- and Nanotechnologies
A significant parameter of nanoelectromechanical systems
(NEMS) is achieving very high resonance quality factors in
vacuum, air or liquid. This yields in high mass sensitivity specified as frequency shift per added mass and high resonance
frequency stability essential for detecting single molecules
or gas-adsorbates. We developed high frequency NEMS-resonator- (cantilever) sensors with a piezoresistive read out.
These cantilever sensors are used as ultra-sensitive mass
sensing devices. We found experimentally that the cantilevers are capable of detecting a weight in the range of Femto-Grams (10 -15g) to Atto-Grams. The geometry of the cantilevers are designed in order to achieve an effective mass
of only a few pico-grams (10 -12g). Special spin-on doping of
the top silicon layer with a followed thermal annealing leads
to forming a stress in Boron doped shallow junction in the
Silicon cantilever (2DEG). An external piezo stack is driving
the cantilever at its resonance frequency. The strain sensitive
region generates a small amplitude voltage drop due to the
piezoresistive properties of the 2DEG. The fully integrated
Wheatstone bridge configuration on the chip reduces the
thermal noise. Moreover, according to our technology, a
useful device can be created using 2DEG read-out principle
and well established bimetal actuation [1].
The generated signal is fed into a high precision, low noise
and high gain amplifier, which was especially designed for
these sensitive measurements (Fig. 1). Due to the 4.8 MHz
resonance frequency of the cantilevers, the amplifier has a
wide bandwidth of 6.63 MHz and due to the small signal
a high gain of G=6800. Special care was taken to avoid
signal cross talks, the parasitic background and influences
at low and high frequencies of the electronic circuit and the
surrounding electronic equipment. The three stage amplifier
circuit board also incorporates a filtered power supply for the
integrated piezoresistive Wheatstone bridge. A combination
of high- and low pass filters are used to reduce the noise from
the cantilever and enhance the Signal to Noise Ratio after amplification. Since this introduces a linearity error in the
.
output signal, we designed the amplifier single ended instead
of differential. Due to small variations of the resistors in the
Wheatstone bridge, the cantilever also generates a DC offset component in the output, which is suppressed by an AC
coupling within the amplifier. Real experiments have confirmed the wide bandwidth and high gain capabilities of the
amplifier. Here, the recorded amplitude of the cantilever’s resonance frequency reached up to 1.2Vrms at an excited signal
of 400mV. The quality factor in vacuum reaches up to 4000,
compared to 950 in air. The corresponding phase shows a
typical change of around 180° (Fig. 1). The nanoresonator
sensor and the amplifier board can be used in air as well as
in vacuum and used for calibration of etching or deposition
characteristics of Focused Electron/Ion Beam Systems. NEMSresonators with micrometer sizes with high quality factors
enables exceptional, sub-attogram-scale mass resolution at
room temperature and atmospheric pressure. The self-sensing micro resonators are remarkably flexible and talented
tools for chemical, biological and high speed AFM sensing.
Fig. 1: Amplifier board with included resonator and piezoresistive read-out
signal of resonance frequency and phase.
[1] Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high[1] R. Perrone, H. Bartsch de Torres, M. Hoffmann, M. Mach and J. Müller, Miniaturized Embossed Low Resistance Fine Line Coils
speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes, R. Pedrak, at all, J. Vac. Sci. Technol. B
in LTCC, Journal of Microelectronics and Electronic Packaging (JMEP) - Volume 6, Number 1, pp. 42-48, 2009.
21, 3102 (2003)
[2] T. Geiling et. al. Coil design for a low-loss inductive proximity sensor in LTCC, IBERSENSOR 2008, 6th Ibero-American Con
gress on Sensors, November 24th - 26th, 2008, Sao Paulo, Brazil
Contact
134
Manuel Hofer | +49 3677 69-3352 | manuel.hofer@tu-ilmenau.de
DEVICES
A Low Loss Fully Embedded Stripline Parallel Coupled
BPF for Applications using the 60 GHz Band
A. Schulz, S. Rentsch, R. Müller, L. Xia and J. Müller
Funding: BMBF during R&D initiative “Enablers for Ambient Systems”
(EASY-A)
This contribution presents a low loss fully embedded bandpass filter (BPF) suitable for multilayer System-in-Package
(SiP) and Multi-Chip-Module (MCM) applications, e.g. wireless applications using the un-licensed 60 GHz band. Commercial millimeter-wave systems must feature compactness,
high performance and low manufacturing costs. LTCC technology provides excellent electrical properties and 3D capability. Hybrid integration of passive components, Monolithic
Microwave Integrated Circuits (MMICs) and antennas is easily feasible to achieve high performance RF systems in one
LTCC package.
For the BPF implementation, an embedded stripline parallel
coupled filter structure was selected. The advantages of stripline (SL) structures are compactness, low radiation loss and
very low dispersion effects. Solid metallization layers on top
and bottom as well as via fences on both filter sides were
used to suppress unwanted or higher order wave modes and
to avoid increased reflections and electromagnetic radiation. Furthermore, a fully embedded filter reduces unwanted
cross coupling to other RF structures. All optimizations were
done using the 3D full wave electromagnetic field (EM) simulation software HFSS™ (Ansys, Canonsburg, PA).
The primary objective of the filter design and optimization
process was to achieve a return loss of better than -18 dB
and a maximum insertion loss of 2.5 dB over the filter passband (Fig. 2). A grounded coplanar waveguide transmission
line (CPWg) to SL transition including a probe tip port for
the measurement equipment was also optimized to evaluate
the filter performance. The CPWg to SL transition is electrically connected to the embedded BPF. The major challenge in such an arrangement is maintaining the matching of
the characteristic impedance along the entire signal path to
avoid strong signal reflections. The BPF and the transition
(Fig. 1) were fabricated in a standard LTCC manufacturing
process using a low loss LTCC material. For the signal layers
a special fine line screen printing step was applied. The filter
including two CPWg to SL transitions was measured up to
67 GHz. The measured insertion loss of the filter ranges between 1.5 dB and 2.5 dB, including the transition losses, and
the measured return loss is better than -10 dB in the 11 GHz
wide passband. Beside the excellent measuring results (Fig.
2), the small dimensions of the BPF save substrate space for
miniaturization and cost reduction.
Fig. 1: Filter test substrate and separated filter structures (different transitions)
Fig. 2: Measured (solid line) and simulated (dotted line) return and insertion
losses of the BPF
[1] Alexander Schulz, Sven Rentsch, Lei Xia, Robert Müller and Jens Müller, “A Low-Loss Fully Embedded Stripline Parallel
Coupled BPF for Applications using the 60 GHz Band”, International Journal of Applied Ceramic Technology, New York, USA,
publication [Online] http://onlinelibrary.wiley.com/doi/10.1111/j.1744-7402.2011.02738.x/full, Wiley-Blackwell, 2012
Contact
Alexander Schulz | +49 3677 69-3376 | alexander.schulz@tu-ilmenau.de
135
DEVICES
DiLET - Differential Lorentz Force Eddy Current
Testing
M. Zec, R.P. Uhlig, M. Ziolkowski, H. Brauer
We report the invention of a new energy-autonomous and
fail-proof differential sensor for nondestructive electro-magnetic material inspection. The basic idea goes back to the
nondestructive testing technique Lorentz force eddy current
testing (LET) which has been developed at the Ilmenau University of Technology and has been under investigation within the framework of the research training group, “Lorentz
force velocimetry and Lorentz force eddy current testing”
(GK 1567).
The main idea has been to monitor perturbations in Lorentz
force (LF) in order to detect deep-lying defects in electrically conducting materials. Therefore, a permanent magnet is
set into relative motion to an electrically conducting specimen. The induced eddy currents interact with the magnetic field of the magnetic field source causing a braking LF.
The force is acting on the relative motion (electromagnetic brake) and on the permanent magnet due to Newton‘s
third axiom, “action = reaction” (LET-principle). This force
can be measured. Perturbations in the eddy current paths,
such as the presence of a defect, cause perturbations in the
measured LF.
It has been shown that the perturbations are small compared with the LF and depend strongly on the position and the
size of the defect. Even though defects in a depth of 8mm
within an aluminum specimen have been localized, the
detection in a rough industrial environment has not been
considered due to the strong dependence on a very good signal-to-noise ratio. Since the measurement technique relies
on the measurement of forces, all mechanical and electrical
disturbances have an impact on the signal.
In order to overcome the strong influence of mechanical disturbances and to increase the dynamics, a purely electrical
system has been considered. The magnetic field source is
represented again by a permanent magnet. Around the permanent magnet three induction coils are wound. These coils
are perpendicularly oriented to each other and represent the
three different directions of measurement. The permanent
magnet is set into motion relative to the electrically conduc-
ting specimen. Eddy currents are induced into the specimen
on the basis of Ohm‘s law for moving conductors. These
eddy currents create a secondary magnetic field which interacts with the primary magnetic field which is caused by the
permanent magnet. The secondary magnetic field does not
change as long as the path of the eddy currents is unperturbed. In the presence of a defect, the path is altered. The
induction coils detect the transient change of the secondary
magnetic field on the basis of Faraday‘s law of induction.
Each coil provides a voltage signal that is influenced by the
presence of a defect and corresponds to the time derivative
of the LF in all three components. The three different signals
allow a precise reconstruction of the detected defect in the
same manner as the LF does.
Fig. 2: Induced voltage in direction
of movement, for different velocities
(increasing with parameter Rm)
Fig. 1: Photography of the
differential Lorentz force eddy
current sensor (DiLET), three
perpendicular coils on a cubic
permanent magnet
Fig. 3: Induced voltage perpendicular
to the direction of movement, for
different velocities (increasing with
parameter Rm)
[1] M. Zec, R.P. Uhlig, M. Ziolkowski and H. Brauer; “Differentieller Sensor und Verfahren zur Detektion von Anomalien in
elektrisch leitfähigen Materialien”; patent pending, DE 10 2012 017 871.9
Contact
136
Hartmut Brauer | +49 3677 69-1189 | hartmut.brauer@tu-ilmenau.de
DEVICES
Uni- and Biaxial Micromirrors with Novel Aluminum
Nitride Hinges
S. Weinberger, M. Hoffmann
Funding: Federal Ministry of Education and Research, Grant No. 16SV5473
Although micromirrors are already well-known optical
MEMS, there‘s still a lack of statically adjustable mirror devices with mechanical tilt angles of more than ±10° and mirror plates >1mm2. Such devices are useful for endoscopes,
active beam deflection in free-space optics and measurement devices. The key application here is a microtracker
system that allows a precise optical position control by trilateration using a combination of at least three mirrors in
combination with optical interferometers.
Our research is focused on electrostatically driven uni- and
biaxial micromirrors hinged by torsion springs. Electrostatic
actuators enable a high dynamic, but the operating voltage
is limited by the electrical breakthrough. Therefore, the key
for large analog rotation angles are springs with low stiffness. Our solution is the use of aluminum nitride as novel
spring material. AlN is CMOS-compatible and can be inexpensively deposited by reactive sputtering. AlN crystallizes
in the oriented wurtzite structure. Because of the strong
chemical bonds and the nanocrystalline structure, AlN has
excellent mechanical properties. The nanocrystalline struc-
ture leads to high stability. This is a great benefit in comparison with monocrystalline or amorphous silicon-based materials. AlN has an elastic behavior, and fatigue of the material
hasn’t been observed during mechanical testing. The AlN
film stress is controlled by sputter parameters. Simulations
show an almost linear relation between the spring stiffness
and the intrinsic stress. This provides an opportunity for tuning the spring stiffness without changing the design. This
technology enables the use of just 400 resp. 600 nm thin
torsion springs including a 100 nm aluminum film. The aluminum film is used as conductive path, top electrode and
reflective surface but does not contribute to the mechanical
stability. The springs are up to 350 µm long with a width
between 20 and 40 µm and have radii in their fixing points
to reduce stress maxima. These compliant springs enable the
full actuation range. Fig. 1 and fig. 2 show mirror samples.
Fig. 3 shows the measured tilt angle of the sample in fig. 1
by applying a DC voltage between an actuating electrode
and the mirror surface. A maximum analog rotation angle of
±11.7 ° at 200 V is reached.
Fig. 1: Chip with uniaxial micromirrors
Fig. 3: Rotation angle vs. operating voltage (measurement result)
Fig. 2: Gimbal mounted micromirror
[1] Weinberger, Stefan; Cheriguen, Yahia; Hoffmann, Martin:, Static large-angle micromirror with aluminum nitride springs.
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012), ISBN: 978-3-938843-71-0
Contact
Stefan Weinberger | +49 3677 69-3421 | stefan.weinberger@tu-ilmenau.de
137
Devices
Preconcentrator for Trace Detection of Acetone
H. Bartsch1, J. Müller1, A. Rydosz2, M. Maziarz2,
T. Pisarkiewicz2
1
2
TU Ilmenau, IMN
AGH University of Science and Technology Krakow
Preconcentrators are used to achieve measureable concentrations of the ingredient if it is present in mixtures only in traces of ppb or even ppt. Acetone is a biomarker present in the human breath, which can be
correlated to certain diseases. In the present work, a
prototype of micropreconcentrator is manufactured
using LTCC technology for the use in portable devices.
The operation conditions for the module require a robust
technology, which allows for fluid management and the reliable integration of heaters in the immediate vicinity to the
processed fluid. Low temperature cofired ceramics (LTCC)
offer a proven technology for such applications. The material system 951 Green Tape™ is used. The module is made up
of three parts: the bottom, the channel part and the cover.
Buried heating elements are situated in the bottom and the
cover; thus, the gas flow passes with an excellent thermal
coupling and without direct contact to the heater metallisation, which allows to protect them against corrosion. Both
heaters are via-connected with the solderable pads at the
cover. The channels of the fluid conducting layers are laser
cut. It was necessary to modify the laser cut process because
of the channel spiral geometry, which is not mechanically
stable enough to guarantee a reproducible position during
Funding: LLP-Erasmus Programme 2011/2012
the lamination step. Therefore, these layers were supported
with a backing tape. The depth of the laser cut trenches was
adapted in this way so that the green tape was cut through
completely, but the backing tape remained uncut at the
backside. The laser cut channel layers were laminated one by
one on the prefabricated bottom, and the cover was laminated on the assembly in a second step. The green body was
sintered using the recommended profile of the tape manufacturer. The heater resistance was measured for all elements.
It amounts to 300 Ω, approximately. Temperatures up to
250°C where achieved with a power supply of 25 V or less.
The components were integrated in the experimental setup.
Different tests performed for low level acetone concentrations indicate the technology is suitable for manufacturing
gas concentration modules. The concentration factor is
highly dependent on adsorbent type and its properties such
as surface area or grain size, adsorption time, gas flow, and
desorption temperature. It is also related to adsorbent volume. A strong influence was found for the channel length.
As the LTCC technology provides the possibility to manufacture stacked multichip modules (MCM), further works
will be focused on the design of a MCM-micro preconcentrator generation. The MCM ensures a higher channel volume without a significant increase in power consumption.
Fig. 1: Design of the module (left), manufactured micropreconcentrator with assembled inlet/outlet nanoports (centre) and thermographic top view on
the module, fed with approx. 3 W (right)
[1] A. Rydosz, W. Maziarz, T. Pisarkiewicz, H. Bartsch, J. Müller:, The micropreconcentrator in LTCC technology for gas
preconcentration for acetone detection applications, IEEE Sensors Journal, paper in press: ID Sensors-7226-2012.R1
Contact
138
Heike Bartsch | +49 3677 69-3440 | heike.bartsch@tu-ilmenau.de
Devices
Sorting and Processing Station for Segmented Flow
Applications
L. Dittrich, M. Hoffmann
Funding: German Federal Ministry of Education and Research under
contract 16SV5058 (SESeFA)
Introduction
New microfluidic concepts such as digital microfluidics [1]
or segmented flow [2] have successfully been developed
in recent years. Both principles handle droplet-sized liquid
compartments typically featuring a volume in the nanoliter
range. The generation of a segment chain as well as segment manipulation and segment storage is enabled by the
appropriate structuring of microfluidic devices.
Within segmented flow systems a large number of segments
are processed in a serial manner. Though, it was reasonable
for many applications if the segment succession could be
modified in a simple manner as well as selecting, conducting
and manipulating single segments might be helpful whereas the main segment stream remains unhindered. Thereby,
merging of segments becomes feasible, e.g. in order to mix
or sort their content. Ideally, those operations are carried
out while the continous flow of the carrier medium is kept
up streaming.
Goals and Solution
The goal of the project was a feasibility study for an active
fluidic device which enables the manipulation of several segments in running segmented flow systems. A novel module for electrical segment manipulation was developed. The
particular challenge was to adapt the principle of electrowetting on dielectrics (EWOD) – which is common in digital
microfluidics on free surfaces – to continuously streaming
Fig. 1: Microfluidic chip
microfluidic systems within closed channels. Ideally, the
two-phase fluid flow consisting of aqueous segments and
nonpolar carrier medium is kept flowing during the actuation. Actually, the aqueous droplet is treated as moving dielectric fluid within a parallel plate capacitor which consists
of an array of controllable electrodes arranged vis-á-vis from
a shared ground electrode rather than actuated by electrowetting. Design rules were compiled for such a fluidic device
in order to pave the way for complex manipulation strategies and the integration into existing lab-on-a-chip (LoC) environments. The device draws upon standard microsystems
technology, i.e. standard MEMS materials such as silicon or
quartz glass are used. Typical actuation voltages range below 100 V DC. The main challenges amounted to appropriate system design and assembling technology, especially the
micro-macro fluidic interface as well as
suitable control algorithms for the sorting function.
Fig. 1 shows the described microfluidic chip: a silicon base
houses the microfluidic channels and the manipulation
chamber, and an ITO-coated glass cover contains the electrodes for segment manipulation as well as contact pads.
Fig. 2 shows one segment “overtaking” another one being
“parked” in a processing area of the chip.
Fig. 2: Segment in processing area of the chip
[1] R. B. Fair: Digital microfluidics: is a true lab-on-a-chip possible? In: Microfluid Nanofluid (2007) 3:245–281
[2] J. M. Köhler, Th. Henkel, A. Grodrian, Th. Kirner, M. Roth, K. Martin, J. Metze: Digital reaction technology by micro
segmented flow – components, concepts and applications In: Chemical Engineering Journal (2004) 101, 1-3:201–216
Contact
Lars Dittrich | +49 3677 69-1295 | lars.dittrich@tu-ilmenau.de
139
Devices
Deformable Mirrors with Integrated Sensors
1
1
2
, A. Albrecht2
H. Bartsch,
Perrone,
T. Geiling,
J. Müller
N.
Gutzeit1, R.
J. Müller
, M.
Appelfelder
,
3
S.
1 Department
Gebhardt of Electronics Technology
Ilmenau,
IMN and Nanotechnologies
2 TU
Center
of Micro2
Fraunhofer IOF
3
Fraunhofer IKTS
1
The aim of the project OptiMi 2 – part Green Manufacturing
– is the development and the production of deformable mirrors for wavefront correction of high energy lasers.
The base unit of this deformable mirror is a LTCC membrane
(220 µm) with integrated temperature sensors and heaters
[1]. Cooling solutions and strain gauges might also be integrated.
After the manufacturing of the highly integrated LTCC
membrane, PZT actuators for deformation and a copper film
for reflection will be deposited on the membranes rear and
front surface, respectively. The function of the membrane
and the integrated temperature sensors and heaters must
be guaranteed even after several sintering steps of up to
900°C during PZT actuator array processing.
For this purpose, different LTCC paste systems were screened, and the manufactured temperature sensors and heating structures were characterized.
To achieve a high productivity, LTCC substrates with a 4-up
array of membranes (Fig. 1) were manufactured. For this the
LTCC processes of the Department of Electronics Technology
were modified to allow substrate dimensions up to 150 mm.
The developed temperature sensors, made of NTC pastes,
endure the hard sintering process during the PZT production process. They show a good sensitivity with B factors
up to 2500 K. Figure 2 shows the temperature dependence
of temperature sensors made of the paste ESL NTC 2114
from Electro Science Laboratories before and after the PZT
Funding: Federal Ministry of Education and Research FKZ 16SV5473
The absorbed power of the high energy laser leads to a symmetrical temperature gradient from the warmer middle of the
membrane to the rim of the mirror which induces a warpage of the membrane. This can be minimized by a opposite
temperature gradient induced by the integrated heaters at
the outer radius of the membrane [2]. One circular and four
segmented heaters, placed in different quarters, were integrated. These heaters were made with the paste DP HF 515
from DuPont®.
Constraint sintering was used in order to prevent warpage
in the vicinity of the integrated sensors and heaters and to
achieve optimum alignment during screen printing of post
fire structures.
After the manufacturing steps at the Ilmenau University of
Technology, the PZT actuator array is applied at Fraunhofer
IKTS in Dresden. In the following, the membranes are laser cut
and polished at the Fraunhofer IOF in Jena.
To maintain a higher stability of the membrane, a LTCC rim is
applied on the outer radius of the membrane‘s front surface
at the IMN by using a glass sealing process.
Finally, a reflective copper layer is galvanically deposited and
polished on the front surface by the Fraunhofer IOF, and the
electrical contacts are realized. Figure 3 shows the completed
mirror.
Currently the research is focused on the integration of thin
film strain gauge arrays for deformation detection and heatpipes for cooling.
sintering process.
Fig. 1: Backlit substrate with four
membranes
Fig. 2: Comparison of the temperature dependence of temperature sensors
made of ESL NTC2114 before and after temperature treatment
Fig. 3: Completed deformable mirror
[1] N. Gutzeit, J. Müller, C. Reinlein, S. Gebhardt, “Manufacturing and Characterization of a Deformable Membrane with
[1] R.Integrated
Perrone, H.
Bartsch deSensors
Torres, M.
M. Machin
and
J. Müller,
Miniaturized
Fine Line Coils
Temperature
andHoffmann,
Heating Structures
Low
Temperature
Co-firedEmbossed
Ceramics”,Low
J. ofResistance
Applied Ceramic
in
LTCC, Journal
of Microelectronics and Electronic Packaging (JMEP) - Volume 6, Number 1, pp. 42-48, 2009.
Technology,
in press
[2]
et.„Thermo-mechanical
al. Coil design for a design,
low-lossrealization
inductiveand
proximity
in LTCC, IBERSENSOR
6th Ibero-American
Con
[2]T.C.Geiling
Reinlein,
testingsensor
of screen-printed
deformable2008,
mirrors”,
PhD Thesis,
gress
on
Sensors,
November
24th
26th,
2008,
Sao
Paulo,
Brazil
Ilmenau University of Technology, 2012
Contact
140
Nam Gutzeit | +49 3677 69-3453 | nam.gutzeit@tu-ilmenau.de
Devices
AlN-based Piezoelectric Energy Harvesting Utilizing
Human Ocular Motion
S. Hampl 1, D. Laqua 2, M. Hoffmann 1, P. Husar
2
2
Biosignal Processing
1
Funding: Federal Ministry of Education and Research (BMBF) 16SV3853
Introduction
Contemporary medical engineering shows an increasing demand for powering implantable sensors. These sensors are
used for the in-vivo long-term supervision of physiological
parameters. Batteries, percutaneous cables or bulky telemetric energy transmission are often inappropriate. The project
“AINTEN” aims to utilize human ocular motion (so-called
saccades) as the power supply of a wireless, minimally invasive monitoring system (Fig. 1) for intraocular pressure (IOP).
As lead-free piezoelectric material, nanocrystalline thin films
of aluminum nitride (AlN) allow for suitable kinetic micro
energy harvesting in medical applications, [2].
Measurements with the Integrated Eyetracker
Compared to technical vibration sources, kinetic energy harvesting from human-induced motions is particularly challenging. Vibrations of eyeballs are marked by their low frequency, unpredictable, mainly aperiodic and time-varying
signature. By measuring the dynamic characteristics of realistic gaze scenarios, harvester design and calculations of
energy content were ensured using the Integrated Eyetracker, [1]. It provides a contact-free 3D system for detecting
the gaze direction. With a current frame rate of 60 fps, two
camera modules on a FPGA perform the five-dimensional
parallel Hough-transform which detects the gaze direction
in real time, sending the results as 3D-coordinates to the
control unit. For an inertial kinetic harvester, determined
high angular saccadic eye movements (up to 25°) with high
Fig. 1: Modular system concept of a
self-sufficient IOP sensor
Fig. 2: Velocity plots for different
investigated gaze scenarios
circumferential velocities (Fig. 2) are favorable. They consistently provide the highest acceleration values (≤3.2 m/
s²) with a calculated saccadic pulse activity of around 40 Hz.
The determined values were used in the analytic and FEAbased design process for a miniaturized electromechanical
transducer.
Harvester concept, fabrication and characterisation
The chosen harvester concept uses surface micromachined
AlN-based multilayer microcantilevers in symmetric parallel
bimorph configuration (d31-transverse mode bender). With
maximized piezoelectric volume at high mechanical compliance, the structural design effectively exploits the excitation
spectrum by a low-frequent tuning. A process flow using
stack deposition, pattering and release was developed. [2].
Using a seismic tip mass of bulk silicon or electroplated nickel, very low fundamental resonant frequencies (<80 Hz)
can be achieved for beams of <1 µm thickness. Dynamically
characterised structures confirm the low resonance frequency at considerably high robustness, (Fig. 3). Single resonantly driven beams show piezo voltages and RMS-power values
in the double-digit mV- nW-Range, respectively. For succeeding prototypes, the output power will be increased by
vacuum packaging as well as serial and parallel assemblies,
heading for a µW-harvester.
Fig. 3: Microscopic photos of released bimorph harvester structures (50 nm
Mo/AlCu4 and 300-350 nm piezoelectric AlN)
[1] D. Laqua, S. Hampl, M. Hoffmann and P. Husar, “Proof of concept for energy harvesting using piezoelectric microstructures
for intelligent implants using eye-motion classified with the Integrated Eyetracker”, IFMBE 39 Proc. of World Congress on
Medical Physics and Biomedical Engineering, Beijing, China, May 26th-31st 2012, pp. 1397-1400.
[2] S. Hampl, D. Laqua, N. Heidrich et al., “AlN-basierte piezoelektrische Mikrogeneratoren zur Energieversorgung
miniaturisierter Implantate”, Proc. of MikroSystemTechnik KONGRESS, Darmstadt, 2011.
Contact
Stefan Hampl | +49 3677 69-3421 | stefan.hampl@tu-ilmenau.de
141
Devices
AlGaN/GaN Based HEMTs on SiC/Si Substrates:
Influences on High Frequency Performance
W. Jatal 1, K. Tonisch 1, U. Baumann 3, F. Schwierz 2, and
J. Pezoldt 1
Department of Festkörperelektronik
3
IMMS GmbH
1
2
Funding: Deutsche Forschungsgemeinschaft DFG PE 624/7-1.
AlGaN/GaN-heterostructures with high electron mobility transistors (HEMTs) containing 35% and 20% Al in the
barrier layer with a gate length (LG) varying from 1.2 to
0.08 μm were fabricated on silicon Si(111) substrates using
a 3C-SiC transition layer [1]. Metal organic chemical vapour
deposition (MOCVD) was used to grow the AlGaN/GaNheterostructures and a low pressure chemical vapour deposition (LPCVD) in order to create the 3C-SiC(111) transition
layer preventing Ga-induced melt back etching and Si-out
diffusion. The HEMT devices were realized using electron
beam lithography. First, the ohmic contacts were formed
using a Ti/Al/Ti/Au or Ti/TiN layer stack annealed for 50 s at
850°C. Device isolation was achieved by mesa dry etching
in chlorine plasma. The Schottky gate contact consisted of
evaporated Ni/Au.
The HEMTs with LG=0.08μm had a maximum drain current
density of 1.25 A/mm at Vgs = 0V and Vds = 10V and a peak
extrinsic transconductance gm of 400 mS/mm for a gate
voltage around -2.5V. A unity current gain cut-off frequency of 180 GHz and maximum frequency of 70 GHz were
measured on these devices.
Fig. 1 shows the short circuit current gain (|H21|2) and fig.
2 shows the maximum stable gain/maximum available gain
(MSG/MAG), and the unilateral gain (Ug) derived from onwafer S-parameter measurements as a function of frequency for the 0.08 μm gate-length device. It should be noted
that the AlGaN/AlN/GaN-HEMTs with 20% Al in the barrier
layer and LG = 0.08 μm exhibited the highest cut-off- and
oscillation-frequencies values in this study, respectively. The
HEMTs were biased at a drain-source voltage (Vds) of 20 V
and a gate-source voltage (Vgs) of -2.75 V. The cut-off frequency was determined by extrapolation of (|H21|2) using
a -20 dB/decade slope, and ƒmax was obtained from extrapolations of MSG/MAG with -20 dB/decade at 40 GHz and
of Ug with -20 dB/decade in the range of 10–40 GHz. The
cut-off- and oscillation-frequencies were determined to be
180 and 70 GHz, respectively.
In Fig. 3 and 4 the obtained results of the cut-off- and oscillation-frequencies (red dots) are compared with those of
other AlGaN/GaN-HEMTs grown on silicon substrates and
on other substrates (black squares). As can be shown, the
cut-off- and oscillation-frequencies increased as the gate
length decreases below 100 nm. The obtained results fit
well into the data obtained by other groups [2].
Fig. 1: |H21|2 of AlGaN/GaN-HEMT as Fig. 2: MSG/MAG and Ug of AlGaN/
a function of frequency.
GaN-HEMTs as a function of fr.
Fig. 3: Cut-off frequencies of AlGaN/
GaN HEMTS on silicon.
[1] Ch. Förster, V. Cimalla, O. Ambacher, and J. Pezoldt, Mater. Sci. Forum 483-485 (2005), 201
[2] K. Tonisch, W. Jatal, F. Niebelschutz, H. Romanus, U. Baumann, F. Schwierz, and J. Pezoldt,
Thin Solid Films 520 (2011) 491-496.
Contact
142
Wael Jatal | +49 3677 69-3409 | wael.jatal@tu-ilmenau.de
Fig. 4: Oscillation frequency of AlGaN/
GaN HEMTS on silicon.
Devices
Optoflutronics - Integrated Analysis Module for Multi
Parameter Screening
D. Kürsten 1, M. Baca 2, F. Ali 2, J. Hampl 2, A. Gross 1, JM. Köhler 1,
A. Schober 2
1
2
Technische Universität Ilmenau, Physik.Chemie/Mikroreaktionstechnik
Technische Universität Ilmenau, Nanobiosystemtechnik
High-throughput screening using segmented flow technology: Currently the majority of pharmaceutical, ecotoxicological and biotechnological analyses are performed under
application of cost-intensive and highly specialized analytic
devices. They use tremendous resources and provide technically accurate data but are often too detailed for a variety
of analytic tasks.
With the help of the integrated analytic module, which was
developed through the work of the projects OptiMi I and
II, an efficient and resource-saving platform was designed
for a wide variety of analysis tasks. Technologies that were
developed in the aforementioned projects have enabled the
design of a practical prototype of an integrated analytic system for toxicological research applications. Figure 1 shows
the prototype of an integrated system and outlines the core
technologies and modules. The system will accommodate
independent modules with autonomous analytic functions.
Thus, the user will be able to optimize the system for the
favoured analytical method.
The basis is a complex fluidic module, which provides the
base fluid circulation. It is composed of a modified micro bioreactor for the incubation of 3D cell aggregates, a bubbleresistant micro pump, a reservoir together with the required
valve technology and the control unit. Several modules that
are adapted to a specific method of analysis can be connected to the main board. The control unit provides a userfriendly interface to the operator.
In Figure 2 a segmented flow analytic module is shown,
which allows for the investigation of cell-derived analytes
using the “Segmented-Flow-Technology”. A fluid sampled in
the micro bioreactor is subdivided into several nanoliter-droplets in the analytic module. Fusion, separation and dosing
operations can be realized as well as the generation of concentration gradients inside these droplets. With the help of
integrated fluorescence and transmission sensors provided
by the Cis Forschungsinstitut für Mikrosensorik und Photovoltaik, multiple parameters can be read out.
Using this system, it is possible for the first time to perform
high-throughput screenings with minimal sample volume.
Fig. 1: Prototype of an integrated analysis system with Segmented-Flow
module
Fig. 2: Segmented-Flow module with electrodes
Contact
Dana Kürsten | +49 3677 69-3716 | dana.kuersten@tu-ilmenau.de
143
Devices
Tunable Micro-Lens Made of Aluminum Nitride
Membranes
S. Leopold 1, D. Pätz 2, S. Sinzinger 2 and M. Hoffmann
1
2
Chair for Technische Optik
1
Funding: German Research Foundation (DFG) within the priority program
1337 “Active micro-optics” - ADASCAN
Tunable lenses have been the subject of investigation for
a long time, e.g. for communication, imaging, sensing and
display applications. Classical approaches to achieve tunable
optical properties, e.g. changing the lens position, fail in the
dimensions of micro-opto-electro-mechanical systems (MOEMS). For tuning the focal length of a lens on the microscopic scale, new principles have been introduced. One of them
is to change the radius of curvature of the lens.
We present a tunable lens based on aluminum nitride (AlN)
membranes (c.f. figure 1). For generating a lens, we build
up a transparent chamber on a Si-Chip covered with an AlN
membrane and filled with immersion oil. An applied external pressure changes the membrane deflection; thus, we
can vary the power of the lens.
For membrane fabrication we use an approved process flow
based on a 500 nm thin AlN layer deposited on a (100) silicon wafer. A lithographic step defines the desired pattern
on the backside of the wafer. The 10 micron thick photoresist is used as a mask during deep reactive ion etching (DRIE)
through the silicon wafer. The etching stops when silicon
is removed, and the AlN is not damanged since no volatile
aluminum compounds can be generated in fluorine-based
plasmas. For a thin AlN membrane bending forces are negligible; thus, the deflection is almost spherical.
Fig. 1: AlN membranes on a silicon
wafer.
Fig. 2: Spherical deflection of an AlN
membrane at 20 kPa.
The resulting lens profile is measured with a white light interference microscope (c.f. figure 2). Within long-term tests we
observed no creep over a period of 15 hour membrane loading at 20 kPa. The deflection stays constant. All of 14 tested
membranes have endured the tests.
For optical verification, we use images of an USAF test chart
(c.f. figure 3). From position, magnification and contrast of
the image, we determine the achieved refractive power of
the lens as well as the resolution limit. In figure 4, the refractive power vs. pressure is shown. The optical properties of
the membrane lens strongly depend on their residual stress.
For compressively pre-stressed membranes, there is a residual
deflection, inhibiting refractive powers close to 0 dpt. Slightly
pre-stressed membranes show a nonlinear refractive power
vs. pressure characteristic. For highly tensile stresses, the characteristic becomes almost linear at the expense of a decreased maximum refractive power.
Within a model according to J. W. Beams [1], the influence
of the residual stress as well as the geometrical constants
are considered. The model can be used for tailoring the AlN
membrane lens properties for a desired application.
Fig. 3: Image of a test chart (USAF)
for focal length measurement.
Fig. 4: Refractive power vs. pressure
for stressed AlN membranes
[1] J. W. Beams: “Mechanical properties of thin films of gold and silver” In Structure and properties of thin films, John Wiley &
Sons, Inc. Editor: C. A. Neugebauer.
Contact
144
Steffen Leopold | +49 3677 69-3372 | steffen.leopold@tu-ilmenau.de
Devices
Piezoelectric ALN-MEMS-Resonators with Molybdenum Electrodes for GHZ Applications
H. Mehner, K. Brueckner, D. Karolewski, S. Michael,
M. A. Hein, M. Hoffmann
Funding: European Union (EFRE) and the Free State of Thuringia
(B714-09060 and B714-10048)
Introduction
Quartz crystals for oscillators can already be replaced by
MEMS resonators for frequency ranges up to 125 MHz in
industrial applications at the present day. MEMS resonators are based on a resonant mechano-acoustic oscillation
of a structural mass element, and they can be completely
integrated into microelectronic circuits. An integrated single-chip solution leads to a minimal size of the device and
simplifies the impedance matching between resonator and
microelectronic circuit at high frequency ranges.
Research Objective
Acoustic Lamb wave MEMS resonators on silicon (Si) substrates with the piezoelectric material aluminium nitride
(AlN) are the objective of this work. They are gaining more
and more attention for electronically reconfigurable RF applications as filters and oscillators. The piezoelectric excitation is an attribute unique to them. Thus, higher resonance
frequencies can be achieved in comparison with capacitively
coupled resonators. AlN features a high acoustic propagation velocity which is advantageous for RF applications. The
material can excellently be integrated in microtechnology
manufacturing chains.
Basically, the MEMS resonator consists of a piezoelectric AlN
layer sandwiched between top and bottom electrodes. The
top electrode features an interdigital structure with several
fingers to excite standing Lamb waves.
Results
Two types of resonators without (Fig. 1a) and with (Fig. 1b) a
silicon layer underneath the piezoelectrical stack were fabricated. A systematic comparison of the RF properties such as
the piezoelectric coupling factor and the quality factor was
achieved by equal layer composition in both designs. The design including the silicon layer is expected to reveal a higher
quality factor whereas the other one should show a higher
electromechanical coupling coefficient. Thus, depending on
the application, the optimal configuration can be chosen.
Molybdenum (Mo) was used as material for the bottom electrode since it is an excellent nucleation layer for sputtered
AlN with a strong c-phase orientation and therefore strong
piezoelectric coupling. Furthermore, by adding a thin (50 nm)
AlN nucleation layer underneath the Mo bottom electrode,
the crystalline quality of the AlN layer above was enhanced
significantly. The piezoelectric coupling is crucial for sufficient
electromechanical and coupling factors and therefore for the
performance of the resonator in the envisaged RF circuits.
Due to higher quality factors in our measurements, the MEMS
resonators with an additional Si layer are favoured for RF applications as oscillators and filters. At wavelengths of about
10 µm, the GHz range can be addressed with these structures
by accordingly downscaled electrode dimensions.
Fig. 1: Design of piezoelectric MEMS resonators without (a) and including (b)
a structural Si layer; SEM images of the resonators
Fig. 2: Image of a fabricated resonator chip (10 mm x 16 mm) which comprises 160 different AlN MEMS resonators
[1] H. Mehner, et al.: MME2012 Abstracts: 23st Micromechanics and Microsystems Europe Workshop,
University of Technology Ilmenau, Germany, 2012.
Contact
Hannes Mehner | +49 3677 69-1860 | hannes.mehner@tu-ilmenau.de
145
Devices
Optically Pulsed Microplasma Reactor for
Nanotomography
H. Mehner, C. Wystup and M. Hoffmann
Funding: Deutsche Forschungsgemeinschaft (DFG) SFB 622
Research Objective
“Nanotomography” is a highly interesting challenge. It can
help to understand the layer-by-layer properties of nanosystems and compound materials. With different AFM technologies it is possible to investigate the smallest domains
on surfaces. This can be performed with the Nanopositioning and Nanomeasurement machine (NPMM) within the
SFB 622.
For real nanotomography, it is also necessary to remove layer by layer. The objective of this work is the expansion of
the functional range of NPMM by a nanotomography tool
for different materials. An optically activated plasma source
with an extremely small spot size is investigated.
Experimental
At high optical energy densities, as found in short laser
pulses, gases such as oxygen or fluorinated carbon gases
are ionized and a microplasma is created. For this purpose,
a diode pumped laser with a pulse width of 2 ns and a pulse
energy of 2.5 mJ per pulse at a wavelength of 1064 nm is
used. Energy densities around 2.4 kJ/cm² are achieved. By
an additional electrical field across the created microplasma, reactive species within the plasma can be accelerated
towards the point of interest of the probe that shall be modified. As figure 1 illustrates, the microplasma has to be enclosed in a reactor chamber in order to minimize the required
gas quantities and thus the contamination of the vacuum
conditions with reactive gases. By using microtechnological
manufacturing technologies, a reactor volume of few cubic
millimeters is realized. Aluminium nitride membranes (AlN)
are applied as optical windows, since AlN shows almost no
absorption at the desired wavelength. The reduction of the
transmitted optical energy through the membranes by interference can be overcome by an appropriate thickness.
Due to high chemical resistance, AlN is used as a protection
layer against reactive fluorine-based species in the reactor
chamber. The nanocrystalline structure of the material does
not show fatigue or crack propagation, which enables the
fabrication of perforated membranes. Utilizing focused ion
beam technology, suitable apertures in the nanometer range in the outlet window can be fabricated to enable nanoselective modification by extraction of reactive species. Figure
2 illustrates the microplasma with different laser pulse intensities. The intensity reduction to 45 % results in a similar reduction in size. The plasma duration is around 10 µs; hence,
it extends the pulse width of 2 ns significantly.
Outlook
Experiments for local treatment of different probe materials
will be performed. At the first step, the probe placed under
the reactor chamber will be charged in order to attract reactive species. At the second step, the outlet AlN window
should adopt this task by an integrated electrode area.
Fig. 1: Schematic image of the designed microplasma reactor
Fig. 2: High speed images (230000 fps) of the microplasma in air with maximal (100 %) and minimal (45 %) laser pulse intensity
Contact
146
Hannes Mehner | +49 3677 69-1860 | hannes.mehner@tu-ilmenau.de
Devices
High Transconductance Side Gate Graphene Field
Effect Transistor
B. Hähnlein 1, B. Händel 2, J. Pezoldt 1, H. Töpfer 3,
R.Granzner 2, F. Schwierz 2
1
2
3
FG Nanotechnologie
FG Theoretische Elektrotechnik
Funding: Excellence Research Grant TU Ilmenau 21410671 and 214100010
Conventional top- and back-gate graphene field effect transistors (GFETs) are intensively investigated and show remarkable electrical performance. In contrast, side gate GFETs
as examined in the present paper have received much less
attention so far [1, 2]. The advantage of the side gate design
compared to top gate devices is that no deposition of a gate
dielectric that frequently leads to degraded channel mobility
is required.
Graphene was grown epitaxially on semi-insulating on-axis
Si-face 6H-SiC from II-VI Inc. according to [3]. The Hall mobility of the graphene was 1000 Vs/cm2.
The side gate devices were fabricated using electron beam
lithography and standard device processing steps. The fabricated transistors were printed in such a way that the channel
was parallel to the surface steps of the SiC substrate. The
measurements were carried out at room temperature. The
side gate transistor properties are influenced by three geometrical design parameters as shown in Fig. 1. These are the
gate-to-channel distance dG-Ch, the gate width B as well as
the channel width W. The device design parameters were
varied to study their effect on the transconductance (gm) of
the side gate transistor. The peak transconductance was extracted from the output characteristics of each device. Fig.
1 shows the dependence of the transconductance on the
gate width W and the gate-to-channel distance. The transconductance decreases with increasing gate width independently on the gate to channel distance dG-Ch. The gate width
in side gate transistors is equivalent to the gate length in
top gate transistors, where the transconductance decreases
with increasing channel length. Therefore, the observed behaviour reflects the decreasing of the transconductance of
top gate transistors with increasing channel length. Decreasing gate-to-channel distance affects the transconductance
to a smaller extent due to the weak dependence of the stray
capacitance between the channel and the gate on this design parameter. Fig. 2 displays dependency of the transconductance on the channel width W. It is evident that with
increasing channel width W the transconductance gm is decreasing in agreement with a decreasing stray capacitance
per unit area. Finally, it is worth mentioning that the achieved gm values are comparable to those of the state-of-theart top gate graphene field effect transistors. The highest
obtained transconductance was 600 S/m which is comparable to advanced top gate graphene field effect transistor
designs [4].
Fig. 1: Transconductance in dependence on the gate width at ap proximately
constant gate channel widths dG-Ch
Fig. 2: Transconductance in dependence on the channel length width W
[1] C.-T. Chen, T. Low, H.-Y. Chiu, W. Zhu, Electron Dev. Lett. 33, 330 (2012)
[2] X. Li, X. Wu, M. Sprinkle, F. Ming, M. Ruan, Y. Hu, C. Berger, W.A. de Heer, Phys. Status Solidi A 207, 286 (2010).
[3] R. Göckeritz, D. Schmidt, M. Beleitis, G. Seifert, S. Krischok, M.Himmerlich, J. Pezoldt, Mateer. Sci. Forum 679-680, 785 (2011).
[4] B. Hähnlein, B. Händel, J. Pezoldt, H. Töpfer, R. granzner, F. Schwierz, Appl. Phys. Lett. 101, 093504 (2012).
Contact
147
Devices
T- and Y- Branched Three-Terminal Junction
Graphene Devices
R. Göckeritz 1, B. Hähnlein 1, B. Händel 2, F. Schwierz 2, J. Pezoldt
1
FG Nanotechnologie
2
1
Funding: Excellence Research Grant TU Ilmenau 21410671 and
214100010
To overcome the limits of silicon based electronic devices,
new materials and device types for micro- and nanoelectronics are necessary. These are no longer based on the classical field-effect paradigm used up to now in most of the
electronic devices. This new class of nanoelectronic devices
can roughly be divided into devices exploiting tunnel transport, such as quantum dots devices, single electron transistors, tunneling and resonant tunneling devices, or devices
based on ballistic or diffusive-ballistic transport effects, like
T- or Y-shaped junctions operating as ballistic rectifiers or
logic gates. The T- or Y-shaped junctions belong to the device group of three-terminal junctions exploiting specific effects of the carrier transport of two dimensional electron
and hole gases in lateral confined channels. In this report,
the voltage rectification in T- or Y-shaped graphene based
three-terminal junctions will be reported.
Epitaxial graphene was formed on Si-face on-axis semi-insulating 4H-SiC. The graphene growth was carried out in
a high temperature furnace at 1800°C in an argon atmosphere at normal pressure. Before the graphitization procedure, the samples were pretreated using a direct capping
technique with a graphite cover placed directly onto the SiC
surface while annealing at 1800 °C for 1 min [1]. This preparation step was essential to achieve stepped silicon carbide
morphology. The graphene on SiC was grown using a heating rate of 10 K/min at the same Ar ambient conditions. The
quality of the graphene was assessed by Raman measurements. The devices were fabricated using electron beam
lithography. Fig. 1 and Fig. 2 display a Y- and a T-shaped
graphene three-terminal junction, respectively.
The electrical characterisation of the fabricated devices was
carried out at room temperature by a three point set up.
For the characterisation of the nonlinear electrical properties, the push-pull measurement technique was used. In this
configuration, a voltage VL = VO and VR = -VO or vice versa
is applied to the terminals on the left and on the right. The
voltage response is measured at the center terminal.
For both types of the fabricated devices, the electrical
measurements revealed rectification behaviour at room
temperature [2-4] in contrast to previous studies. The obtained parabolic shape of the potential in dependence on
the push-pull voltage can be explained by quasi-ballistic
electron transport in the two dimensional electron gases
as well as by the device geometry. Shifts of the obtained
maximum are due to device asymmetries. Increasing branch
width reduces the curvature of the voltage rectification response curve of the three-terminal junctions [4].
Fig. 1: Y-shaped three terminal junction device
Fig. 2: T-shaped three terminal junction device
[1] R. Göckeritz, D. Schmidt, M. Beleitis, G. Seifert, S. Krischok, M.Himmerlich, J. Pezoldt, Mateer. Sci. Forum 679-680, 785 (2011)
[2] R. Göckeritz, J. Pezoldt, F. Schwierz, Appl. Phys. Lett. 99, 173111 (2011)
[3] R. Göckeritz, K. Tonisch, W. Jatal, L.Hiller, F. Schwierz, J. Pezoldt, Adv. Mater. Res. 324, 427 (2011)
[4] J. Pezoldt, R. Göckeritz, B. Hähnlein, B. Händel, F. Schwierz, Mater. Sci. Forum 717-720, 683 (2012)
Contact
148
Devices
Compact Ka-band Reconfigurable Switch Matrix with
Power Failure Redundancy
S. Rentsch, S. Humbla, S. Kaleem, R. Stephan, D. Stöpel,
J. Müller, and M.A. Hein
Institute for Micro- and Nanotechnologies
Funding: DLR, contract no. 50YB1112, project acronym KERAMIS-geo
Low-temperature cofired ceramics (LTCC) is a widely used
cost-effective multilayer technology for microwave applications. The space-qualification of the LTCC technology is a
major R&D focus since smaller and lighter components are
desirable for achieving higher functional densities for future
satellite payloads, potentially at lower costs [1]. Consequently, different modules such as transceivers, synthesizers and
reconfigurable switch matrices (RSM) have been developed
for Ka-band (17 – 22 GHz) in the framework of KERAMIS®projects, to approve the technology for use in space. In
addition to advanced microwave design, rigorous space
qualification and on-orbit verification have been passed
successfully.
This work presents a new version of a RSM with a multiplicity of 4x4, which will be installed in the payload of the German geo-stationary satellite Heinrich Hertz [2]. Compared
to previous versions, the RSM module has been miniaturised
and equipped with new functions. It incorporates all functional microwave and driver blocks in an eight-layer stack
measuring only 25 mm x 25mm, as shown in figure 1. In
addition to eight single-pole four-throw (SP4T) active pindiode switch circuits and associated drivers, the switch matrix features embedded matching networks, optimised interconnects, and vertical transitions as well as different passive
components. A high level of integration was achieved by
shifting the matching networks into buried layers, resulting
in a surface area gain of approximately 40% compared to
previous versions.
For communication satellites on geo-stationary orbits, lifetimes of 15 years or more are required. Hence, the reliability
and redundancy of the individual components of the satellite are of great importance. Additional redundant modules
are used to ensure full or reduced functionality in case of
power failure. The next RSM version, presently under development, will incorporate pin-diode based multi-stage
redundancy paths, which induce reflective behavior in the
case of power failure at all four input ports and over the
entire operational bandwidth with minimal group delay variation. Figure 2 shows a practical implementation of this
redundancy concept.
In the framework of the public R&D project KERAMIS-geo,
jointly with industrial partners, the RSM module follows a
breadboard - engineering qualification - protoflight model philosophy within strict time frames. A successful outcome for the required space qualification including thermal,
shock, and radiation tests is anticipated, given that a previous version of the RSM is presently being tested successfully
on-orbit aboard the low-earth-orbiter satellite TET1.
This work has been funded by the German Federal Ministry
of Economics and Technology (BMWi) under the project management of the German Aerospace Center.
Fig. 1: 4x4 reconfigurable switch matrix - course of development
Fig. 2: Practical verification of the implemented redundancy concept
[1] S. Humbla, J. Müller, R. Stephan, D. Stöpel, J. F. Trabert, G. Vogt, and M. A. Hein, “Reconfigurable Ka-band Switch matrix for
on-orbit Verification”, Microwave Conference, EuMC, October 2009.
[2] Dr. Siegfried Voigt, “The German Heinrich Hertz Satellite Mission,” Proceedings of the 4th European Conference on Antennas
and Propagation, EuCAP, April 2010.
Contact
Matthias Hein | +49 3677 69-2831 | matthias.hein@tu-ilmenau.de
149
Devices
Planar Lens Systems with 3D Functionality Utilizing
Standard Planar Process Technology
E. Markweg, M. Hoffmann
Funding: Ministry of Education and Research (BMBF) under contract 16SV5473
Introduction
Beam shaping performance is often needed to optimize
the interconnection between integrated devices and fiber
or free space. The possibility of integrating planar lenses in
the technology process on the same substrate is a smart approach for cost reduction and miniaturization. For example,
collimating light of an edge emitting laser diode can be integrated with these kinds of lenses. For reaching an optical
3D functionality with 2 D structuring methods, we used a
variation of the refractive index during the layer deposition
process for determining a focus in the vertical direction to
the substrate. For the horizontal direction, parallel to the
substrate, the shape of perpendicular etched side walls determines the focus (Fig. 1). That procedure allows the independent control of light propagation in two perpendicular
directions with planar technologies.
Technology
We only used planar standard processes like UV Lithographie, DRIE and ICP - CVD. That method allows a wide range
of possible index progress. In our case, a symmetric change
of refractive index was deposited in a film of 20 µm by modifying the gas ratio of nitrogen and nitrous oxide. As silicon precursor, we used silan. A fluorine based ICP RIE deep
etching process defined the perpendicular side walls. This
technology allows the production of different lens forms.
We realized plano-convex, bi convex and Fresnel lenses. The
range of refractive index is between n = 1.47-1.85.
Design
To demonstrate the potential of the technology, we present optical elements for the collimation of fiber-based light
sources. The elements are designed using raytracing-based
optimization. The refractive index profile perpendicular to
the etching direction is modeled using a polynomial series.
The refractive surfaces are described by cylindrical, acylindrical and polynomial functions. Diffractive elements can be
easily realized as kinoform elements and are characterized
by the realized phase function. E.g., we demonstrate a hybrid plano-convex GRIN lens for collimation of a HeNe-beam
leaving a NA 0.10 fiber with a core diameter of 4.3µm. With
a peak-to-valley wavefront error of 0.03 wavelengths, the
lens shows diffraction limited performance. The variation of
the refractive index was done stepwise with 115 different
films with a minimum film thickness of 28 nm per film. A
produced lens system is shown in Fig. 2.
Experimental results
We used a fiber coupled He-Ne laser (633 nm) with a fiber
output beam diameter of 4.3 µm to collimate the beam.The
collimated beam shows a symmetric beam profile in both
directions. Thus, the distribution of the index gradient and
the etched profile of the lens match very well. The comparison between the simulated beam shape and the measured
beam profile at different distances from the surface of the
lens are shown in Fig. 3.
Fig. 1: Scheme of a planar lens with refractive index distribution
Fig. 2: SEM picture of a
produced planar lens
Fig. 3: Measurement
and simulation of the
collimated and the
uncollimated beam
[1] E. Markweg, M. Hillenbrand, S. Sinzinger, M. Hoffmann Planar plano-convex microlens in silica using ICP-CVD and DRIE,
proceedings of SPIE , Optical Systems Design, Barcelona 20-25.11.2012, pt. 1
Contact
150
Eric Markweg | +49 3677 69-3378 | eric.markweg@tu-ilmenau.de
Devices
Waveguides in Siliconoxynitride
E. Markweg, M. Hoffmann
Funding: Ministry of Education and Research (BMBF) under contract 16SV3701
Introduction
Waveguides featuring channels made of silicon oxynitride
(SiON) enable various applications in integrated optical devices. The waveguides can be used as interferometric sensors or network elements in optical communication systems
(e.g. splitters, multiplexers, switches etc.). They can easily be
fabricated by standard PECVD technologies and resist masked reactive ion etching (RIE).
SiON-Rib Waveguide-Technology
The single mode operation of waveguides depends on different parameters like core thickness, the rib height, rib waist
and the difference of the refractive index between core and
cladding. That is why the design of the waveguide is optimised for single mode operation, low loss propagation, and
high efficiency of coupling to single mode optical fibers by
changing these parameters. To obtain the optimal design,
3D Beam Propagation Method (BPM) has been performed.
The results are shown in Figure 1. The refractive index difference is fixed to 3.5 per cent to prevent scattering effects at
the edged sidewalls.
The SiO2 and SiON films were fabricated utilizing ICP-CVD
(inductively coupled plasma chemical vapour deposition).
This enables deposition at very low temperatures and offers the possibility to employ different substrate materials
substrates. By varying the gas flow ratio of N2O and N2 it is
possible to change the refractive index of the film beetween
1.47 (pure SiO2) to 2.0 (pure Si3N4), respectively. After deposition of the ground SiO2 film and the SiON core film, the rib
of the waveguide is etched in a standard reactive ion etching
process. Afterwards, the waveguides are covered with another cladding SiO2 film. A cross-section of a produced SiON
waveguide is schown in Figure 2.
Integrated Michelson Interferometer
A standard single-mode fiber operating at 632 nm is positioned to the mode-matched waveguide system. The guided
beam is split into two ways of light. At a 3 dB coupler these
two beams are splitted into two reference arms. The rest of
the light is combined and passes into free space by collimating via a grin lens. This measurement beam is reflected at
the target by a retroreflector. The returning beam is coupled
into the waveguide system through the lens and interferes
at the coupler with the beam from the reference arm. These interfered beams are analyzed at the end of the device
by two photodiodes. The movement of the target causes
a modulation of the measurement signal by changing the
elapsed time between reference and measurement arm. A
thermooptical modulator at one reference arm allows for
tuning the angular phase shift in order to reach ¼λ to perform a forward-backward detection. Also, the distribution
ratio of the used couplers can be tuned by a thin film heater
using the thermooptical effect. A drawing of the working
principal is shown in Figure 3.
Fig. 1: SEM picture of a
produced planar lens
Fig. 2: Measurement and
simulation of the
collimated and the
uncollimated beam
Contact
Fig. 3: Symmetric themooptical modulators for 3 dB SiON waveguides
Eric Markweg | +49 3677 69-3378 | eric.markweg@tu-ilmenau.de
151
Devices
An Electrowetting-based Microfluidic Pump Coping
without Moving Mechanical Components
L. Dittrich, C. Endrödy, M. Hoffmann
Funding: German Federal Ministry of Education and Research under
contract 16SV5368 (NanoMiPu)
Introduction
Pumping of small amounts of liquids requires new actuation methods that can be easily integrated into microfluidic
devices, especially for one-time use as typical for medical
or biological applications. Electrowetting on dielectrics in
combination with micropatterned surfaces is a novel concept providing a pump design without moving mechanical
components. The pumping membrane is thus formed by
the surface tension of the liquid itself. The use of batchcapable processes and “2.5D” design brings microfluidical
systems to the next level of miniaturization, realizing a lowcost disposable product with accurate low flow rate at the
micro-litre per-second range which is typical for pharmacy,
microreaction chemistry and healthcare science.
Concept and results
The interface of the liquid to be pumped is periodically deflected into cavities contained in a microstructure by electrostatic actuation, generating the pump stroke at the same
time. A preferred flow direction arises from the combination
of pumping microstructures and accordingly the resultant
periodic liquid flow with any type of (micro)valves. Fig. 1
illustrates the working principle of the pump.
The design and a technology concept for the fabrication of
the electrowetting-based micropump (EMP) was elaborated
and implemented, [1]. The superhydrophobic prismatic cavity matrices were designed based on a surface energy model
and support an initial Cassie-Baxter state [2] featuring high
stability.
Based on the design, a process sequence for the fabrication
of the described micropump was deduced. A silicon and an
ITO-coated glass wafer are combined for the layered microsystem. The bottom plate is coated with aluminum to ensure
a good electric contact for the bottom electrode which is a
low resistivity silicon wafer. The pump chamber with fluidic
nozzle-diffusor valves is defined with photopolymer SU-8
on the substrate. The through-silicon vias for the fluidic connection are processed by a backside deep reactive ion etch
(DRIE) step.
For the top electrode, the ITO-layer is isolated with a silicon
nitride layer deposited by chemical vapour deposition. The
cavity matrix is generated in an SU-8 layer and dip-coated
in a Teflon® AF solution for hydrophobization purposes. Fig
2. shows a test chip with mounted NanoPort™ connectors.
Further investigation of the pump is ongoing.
Fig. 1: Working principle of the electrowetting-based micropump
Fig. 2: Mounted laboratory sample of the first prototype
[1] Dittrich, L.; Endrödy, C.; Hoffmann, M.: Design and Technology Concept for a Novel Micropump Coping Without Moving
Mechanical Components. Proc. of 23rd MME, Ilmenau/Germany, 2012, ISBN: 978-3-938843-71-0
[2] Cassie, A. B. D.; Baxter, S.: Wettability of porous surfaces.Trans. Faraday Soc. 40, S. 546-551(1944)
Contact
152
Lars Dittrich | +49 3677 69-1295 | lars.dittrich@tu-ilmenau.de
SYSTEMS
Next Generation Force Detection
T. Michels, V. Aksyuk, and I. W. Rangelow
Funding: DAAD and NIST
It is desirable to have compact microfabricated agile nanoscale probes and nano-manipulators capable of stable vibration-insensitive motion in one or more dimension with subangstrom precision and very fine measurement and control
over the applied force. These probes would have integrated
sensing of position and reaction force and functionalizable
tips that can be used for sample manipulation as well as a
means of electrical, near field optical and mechanical access
to nanoscale samples. Ideally they would operate in a variety of ambient conditions and media (liquid, gas as well as
vacuum), over a wide temperature range. The design should
allow using multiple such probes to simultaneously access
the same sample volume.
Microfabricating probes with integrated electrostatic actuators and integrated optical interferometric position readout
structures provide the path to reach this goal. Due to their
minute size and mass, the microstructure can be made insensitive to ambient vibration. Electrostatic actuation provides stable and controllable forces. Multiple actuators can
be integrated with flexure joints for multiple degrees of
freedom of motion, e.g. direction or tip tool actuation. Excellent elastic properties of silicon, precision shape control
afforded by optical and e-beam lithography, static as well
as oscillating mechanical sensing and high-sensitivity compact optical position readout schemes provide the necessary
probing of motion and force. Control over actuator stiffness
can be implemented not only through fast feedback loop,
but also through special dedicated electrostatic actuation.
Such a miniaturized, integrated system of functional tips
could probe position, reaction forces and perform sample
manipulations; moreover, such a proposed system avails the
benefit of gaining access to nanoscale samples through different means: electrical, near field optical, and mechanical
access. A distinguishing merit is the system ability to operate
over a wide temperature range, and in a variety of ambient
conditions within different media (e.g. liquid, gas, vacuum,
etc.). The proposed design allows using multiple probes to
simultaneously access a control volume. Such agile actuated
elements can be combined with sharp tips, electrical leads
and optical/plasmonic resonators such as bow tie antenna
or metal nanoparticles and nanorods as well as integrated in
actuated nano-grippers, opening up vital new possibilities
in probing, imaging, and manipulation of nanoscale objects
in numerous settings. To the best of my knowledge, this
technology has not been fully explored to date, particularly
using advanced nanofabrication; and it will likely enable displacement and force ranges not previously accessible.
This project was a cooperation between MNES - Technische
Universität Ilmenau and CNST - National Institute of Standards and Technology (USA).
[1] T. Michels, Y. Sarov, I.W. Rangelow, et al. High-speed cantilever for Real-time Scanning Force Microscopy,
Microelectron. Eng. 97, (2012)
[2] T.J. Kippenberg, and K.J. Vahala, Cavity Opto- Mechanics, Optics Express 15, 17172-17205 (2007)
[3] K. Srinivasan, H. Miao, M. T. Rakher, M. Davanco, and V. Aksyuk, Optomechanical transduction of an integrated silicon
cantilever probe using a microdisk resonator, Nano Letters 11, 791-797 (2011)
Contact
153
SYSTEMS
A Micro Total Analytical System (µTAS) for
the Detection of Nitrogen Monoxide based on LTCC
T. Welker 1, T. Geiling 2, H. Bartsch 1, and J. Müller
1
Department of Electronics Technology
2
Department of Micromechanical Systems
1
Funding: ZIM - Federal Ministry of Economics and Technology
Introduction
The chemiluminescent reaction with ozone is the most sensitive method for measuring nitrogen monoxide (NO) concentrations in gas flows. In order to realize and measure the
chemiluminescent reaction, a measurement device must
consist of an ozone generator, which produces the necessary amounts of ozone, and a transparent reaction chamber, which enables the detection of emitted radiation. A so
called micro total analytical system (µTAS) is fabricated in
ceramics, which scales the measurement principle into the
realm of micro fluidics and micro sensors. Low temperature
co-fired ceramics (LTCC) has proven to be the ideal technology, since it offers high chemical and thermal stability as
well as high degree of freedom of design. In addition to the
above mentioned components, the system consists of two
additional parts: a second transparent reaction chamber,
which allows determination of ozone concentrations via UV
transmission measurements, and an exhaust gas treatment
in order to prevent buildup of hazardous amounts of ozone
in the vicinity of the device (see Fig. 1).
Experimental & Results
The ozone generator is a micro plasma device in which the
Fig. 1: Schematic layout of the µTAS design with ozone generator, ozone
measurement, CLD chamber, and exhaust gas treatment.
ozone is produced by the dielectric barrier discharge (DBD)
mechanism. Ozone up to a concentration of 15 µg/ml is produced in synthetic air. From the generator, the ozone is fed
into a chamber with an optical port, where the concentration is determined by UV transmission measurements. Then it
is brought into contact with the analyte gas containing NO
in a Y-structured mixer inside the reaction chamber, where
the chemiluminescent reaction occurs. The reaction chamber is outfitted with an optical port as well, so that the emitted radiation can be detected and analyzed with a photo
diode. The emission intensity depends on the NO concentration. In order to maximize the emission intensity, a mirror
is mounted on the bottom of the chamber. The gas mixture
leaving the reaction chamber is fed through a heated platinum catalyst, in order to disintegrate the excess ozone. The
components are realized as individual LTCC devices. A NO
concentration from 0.1 to 600 ppm can be detected. To verify joint manufacture and analyze interference between the
modules, a common substrate is manufactured (see Fig. 2).
Future efforts focus on improving simultaneous operation
on one substrate.
Fig. 2: X-ray image of complete integration of all modules on one substrate.
[1] T. Geiling, T. Welker, H. Bartsch and J. Müller, ”Design and Fabrication of a Nitrogen Monoxide Measurement Device Based on
Low Temperature Co-Fired Ceramics,” Int. J. Appl. Ceram. Technol., 9 [1] 37–44 (2012).
[2] T. Welker, T. Welker, H. Bartsch and J. Müller, “Design and fabrication of gas tight optical windows in LTCC,” 8th Int. CICMT,
Erfurt, Germany, 16-19 April 2012.
Contact
154
Tilo Welker | +49 3677 69-3385 | tilo.welker@tu-ilmenau.de
SYSTEMS
Fine Dust Measurement with Electrical Fields
T. Geiling and M. Hoffmann
Funding: European Commission (Grant No. 285037 - INTASENSE)
Although it is obvious that fine dust exposure poses a high
risk on human health, fine dust measurements are only conducted at few locations in our daily environment to date. A
reason for this deficit is the lack of suitable measurement
systems, especially for indoor application. Of special interest
are particles with a dimension of less than 10 μm. They pose
the highest risk to human health as they are not filtered out
by the respiratory system. By miniaturizing particle detector
concepts, point-of-care applications are rendered possible
and production costs can be greatly reduced with microsystem fabrication technologies.
The pursued detector principle is depicted in Figure 1. It
is based on the interaction of single particles with electric
fields. One or several apertures are formed in a non-conducting substrate. Applying a voltage between two electrodes
positioned on both sides creates an electric field within the
aperture. A generated air flow feeds particles through the
aperture. Particle presence is either detected by an impe-
dance measurement or an induced breakdown event [1]. Careful optimization is required because resulting capacitance
changes induced by small particles are in the order of aF.
Alternatively, particle detection based on an induced breakdown requires that the applied voltage is set to a level where
a breakdown would not occur until it is triggered by a particle distorting the electrical field.
Realization of the sensor principle is achieved utilizing silicon
fabrication technologies. Apertures are created with bulk silicon micro machining. Electrodes are deposited and structured with thin film technologies. A hybrid interface module
based on low temperature co-fired ceramics (LTCC) serves
as the interface between individual particle counters and a
larger sensor platform. A complete detector is depicted in
Figure 2. Detailed investigations are ongoing.
A comprehensive network of particle sensors for indoor environments is the vision pursued by the INTASENSE project.
Find out more at www.intasense.eu.
Fig. 1: Principle of a particle detector based on electric field interactions
Fig. 2: Silicon chip with array of 256 apertures bonded on LTCC
module
[1] T. Geiling, S. Leopold, Y. Cheriguen and M. Hoffmann, “Fine Dust Measurement with Electrical Fields – Concept for a
Capacitive Setup,” Micromechanics and Microsystems Europe Workshop, September 9 – 12, 2012, Ilmenau,
Germany, Patent DE 10 2006 032 906 B4
Contact
Thomas Geiling | +49 3677 69-3372 | thomas.geiling@tu-ilmenau.de
155
SYSTEMS
Integrated Optofluidic System for Monitoring
Particle Mass Concentrations
M. Hofmann, R. Müller, S. Stoebenau, T. Stauden, O. Brodersen,
S. Sinzinger
Funding: OptiMi II, BMBF (FKZ: 16SV5473)
We demonstrate a planar integrated optofluidic system [1]
that is capable of measuring both the particle mass concentration and the mean Sauter diameter of polydisperse suspensions of standardized test dust and water. Fig. 1 shows
a schematic drawing of the whole system. A planar emitterreceiver-unit (parts 1-6), containing a multimode vertical cavity surface emitting laser (VCSEL) at 850 nm as light source and monolithically integrated segmented photodiodes,
comprises all active optical components on a planar chip.
The chip is integrated on a printed circuit board (PCB) that
is connected to an amperemeter. A 9V battery provides the
power for the VCSEL. In this planar system configuration no
additional instruments that are connected by optical waveguides to the system are required.
The optical system and the fluidic channel with a cross sectional area of 170 mm2 is integrated into a planar transparent PMMA substrate. The divergent light emerging from the
VCSEL is shaped and deflected by a single optical freeform
surface (7). Fig. 2 shows the surface fabricated by micromilling [2] which forms a tilted Gaussian beam. Reflective aluminium layers (8) fabricated by electron beam evaporation
direct the beam through the system along a zig-zag path in
order to reach the primary detector following the concept
of planar integrated free-space optical systems. Fig. 3 shows
the fabricated and mounted system.
During the propagation through the fluidic channel, the
light interacts with the particles. Elastic light scattering
leads to an attenuation of the transmitted light. Additionally scattered light reaches the secondary detectors which are
placed between the light source and the primary detector.
The measurement of the mean scattered light and its standard deviation allows for the determination of the particle
mass concentration and the mean Sauter diameter of the
three dust standards ISO 12103-A2 (fine test dust), -A3 (medium test dust) and -A4 (coarse test dust) with mean Sauter
diameters of 3.30 µm, 4.17 µm and 6.97 µm, respectively.
The measurements were carried out using suspensions of
test dust and water with mass concentration between 0 and
23 mg of test dust per one liter of deionized water. The detection limit for all three test dusts lies below 1 mg per liter.
The additional measurement of the mean value and standard deviation of the attenuated probe beam provides more
flexibility in different measuring regimes, e.g. particle concentration or particle size range. Improved robustness can
be achieved if e.g. the transmitted beam serves as reference
for the scattered light.
The integrated, compact and lightweight system offers a
huge potential for the sensitive monitoring of process parameters where large channel cross section are needed e.g. in
production technology, biomedical applications or for environmental screening.
Fig. 1: Schematic drawing of the system.
Fig. 2: Photograph of the optical
freeform surface.
Fig. 3: Photograph of the realized
system.
[1] M. Hofmann, R. Müller, S. Stoebenau, T. Stauden, O. Brodersen, and S. Sinzinger, “Integrated optofluidic system for
monitoring mass concentrations based on planar emitter-receiver-units”, Appl. Opt. 51, 7800-7809 (2012).
[2] S. Stoebenau, R. Kleindienst, M. Hofmann, and S. Sinzinger, “Computer-aided manufacturing for freeform optical elements
by ultraprecision micromilling”, Proc. SPIE 8126, 812614 (2011).
Contact
156
Meike Hofmann | +49 3677 69-1411 | meike.hofmann@tu-ilmenau.de
SYSTEMS
Low-cost Uncooled Infrared Detector Using
Thermo-mechanical Micro-mirror Array with Optical
Readout
M. Steffanson, K. Gorovoy, M. Holz, T. Ivanov, R. Kampmann,
R. Kleindienst, S. Sinzinger and I. W. Rangelow
We report on the realization and characterization of a novel
type of infrared camera using a thermo-mechanical micromirror array with an optical readout. The detector’s main
advantages, with respect to the well-established micro-bolometer technology are: a) low-cost fabrication using novel
micro-machining methods and inexpensive system components, b) powerless operation due to electronically passive
sensor, c) uniquely large pixel number possible due to good
scalability and d) potential for multi-band and short band IR
detection [1-3].
The working principle of this detector is a thermally sensitive
micro-mirror pixel. The micro-structure converts absorbed
infrared radiation into heat which is transduced into a mechanical motion (tilt of the mirror segments). This motion
can be detected at visual wavelength with a suitable optical
imaging system as read-out. Basically, this device serves as
an IR-to-VIS converter. All components possess highly linear
interrelations. The working principle in detail is the bi-material effect: the pixel exhibits a minute angular motion when
heated by IR irradiation.
The IR micro-mirror sensor array is operated under low pressure and is electronically passive, i.e. no electrical interconnections are implemented. This has several significant advantages: a) ease of micro-fabrication b) no self-heating, c)
no electronics noise and d) no power consumption. The IR
radiation is irradiated from the backside of the sensor due
to the IR transparent substrate. The front side of the sensor
pixel is covered with Al for visual light reflection. The optical
set-up consists of three optical lenses, a beam splitter, a spatial filter, a light source and a visual imager (see Fig. 1). The
specific design of the optical system allows for the detection
of mirror tilts in the range of mrads which is equivalent to a
nm-range of deflection of the micro-mirrors.
With such a configuration, we are able to perform real-time
thermo-graphic imaging (see Fig. 2). The laboratory prototype set-up camera delivers 30 frames per second and the
experimentally evaluated responsivity (noise equivalent temperature difference = NETD) in current “non-optimized”
configuration is <800 mK. Calculations and extensive analysis confirm that this set-up has a potential of a NETD <100
mK. IR sensor arrays of 640 x 480 pixels with 50 µm pixel pitch were successfully micro-fabricated. In conclusion,
we demonstrate first result of a novel low-cost IR detector
which has distinctive advantages for thermo-graphic imaging applications.
Please see in this report: “Optimized micro-fabrication method for IR sensor” in section »Technology / MicroNanoIntegration« for micro-fabricatication technology description,
and “Numerical design of micromechanical thermal sensor”
in »Design&Simulation / MicroNanoIntegration« for theory
background.
Fig. 1: Prototyp IR detector setup
Fig. 2: Generated raw thermal image
[1] K. Ivanova, T. Ivanov, I. W. Rangelow, J. Vac. Sci. Technol. B 23 (6), Vol. 2005.
[3] M. Steffanson et al., Microelectron. Eng., Vol. 98, 2012.
Contact
157
SYSTEMS
Laser Power Stabilization System for Optimized
ps-Laser Ablation
R. Kampmann, R. Kleindienst, F.Rose, N. Hartung, M. Naglatzki,
S. Sinzinger
Funding: Bundesministerium für Bildung und Forschung (BMBF)
“SINOMICS” (FKZ: 16SV5384)
Introduction
For a precisely controlled ps-laser ablation process stable
machining conditions are essential. Typical OEM-lasers for
this purpose have an output power stability of about 0.5%
RMS. The remaining power fluctuations result in a depth
variation of the fabricated microstructures. To improve the
fabrication process we exploit the linearly polarized output
radiation of our ps-laser (i.e. a frequency tripled Nd:YOV4
ps-laser with a wavelength of 355 nm and a linearly polarized output radiation) and stabilize the output power via
polarization optics. With our stabilization system we aim for
an output power stability of better than 1 per mill RMS.
Concept
The principle of the stabilization system is based on a manipulation of the polarization direction and a decoupling
of fluctuating laser power portions. In Fig. 1 the functional
principle of the stabilization system is shown. From the left
hand side the laser radiation passes a motorized rotational
half wave plate. In combination with the polarizing beam
splitter laser power portions can be coupled out of the system. The laser power is measured by means of an optical
detector via a beam sampler. The optical detector and the
motorized half wave plate are connected to a computer with
a stabilization routine implemented to control the rotation
direction and the increment of the motorized half wave
plate. Thus the detector can measure the fluctuating power
of the laser source and control the stabilization process.
Application
We realized this system as shown in Fig. 2. With a measurement setup consisting of the stabilization system, an optical
detector and our laser source we verify improved the laser
power stability.
Fig. 1: Functional principle of the stabilization system
The standard deviation from the not stabilized laser source
of 0.5748% RMS was improved to 0.0681% RMS. To check
the functionality of the system during the fabrication process we fabricated two gratings in copper, with and without
the stabilization system. To achieve an average target depth
of 284 nm (zero order ≈ 0% @ 532 nm and 45° angle of
incident) we apply a repetition rate of 100 kHz, a laser power of 20 mW and a scanning speed of 900 mm/min. With
a 1/e²-focus diameter of 9 µm we get a grating period of
6.5 µm.
Both gratings were analyzed by white light interferometry.
In Fig. 3 a three-dimensional profile recorded with an interferometric measurement of the grating fabricated with
the stabilized laser system is shown. The depth, period and
roughness of each grating were measured at different positions and the results are averaged. A roughness at the bottom of the grooves with 5 nm (RMS) was achieved in both
cases. Only the grating, which was fabricated with the stabilization system, however reaches nearly the target depth
with very sufficient precision 287 nm. We reached a standard deviation of the depth of ±9 nm which corresponds to
an improvement of 50% with respect
Fig. 2: On-axis hardware
setup
Fig. 3: Surface profile of the grating
[1] http://www.coherent.com/products/?1704/Quantum-EnergyMax-Sensors
[2] DGaO Proceedings 2012 – http://www.dgao-proceedings.de – ISSN: 1614-8436 – urn:nbn:de:0287-2012-B022-4
Contact
158
Ronald Kampmann | +49 3677 69-1849 | ronald.kampmann@tu-ilmenau.de
SYSTEMS
Precise Current to Voltage Converter and High
Voltage Bias Source for Nanolithography Systems
L. Chervenkov, M. Kästner, N. Nikolov,
and I. W. Rangelow
A current to voltage converter (fig. 1) is the main electronic module required for current-controlled nanolithography
systems using self-actuating and self-sensing cantilevers.
The current to voltage converter is required to convert the
current, which flows from the cantilever‘s tip through the
molecular-based resist to the sample, into a voltage signal
which can be further amplified. Afterwards, the output voltage signal can be read out from the system‘s controller. The
output voltage noise should be very low so no fluctuations
in the exposure dose appear. The transfer function should
be linear in the full input current range.
It should have low output voltage noise because bias voltage
fluctuations causes either fluctuations of the tip-sample spacing (constant current feedback of the lithography system)
which in turn causes fluctuations of the lithographic feature
width, or fluctuation of the exposure dose (constant height
feedback of the lithography system) which in turn causes fluctuations of the lithographic feature width. The output voltage
range should be about -100V to 100V with fixed or variable
gain. For its realization an operational amplifier as first stage
and a high voltage transistors‘ output stage can be used, as
well as a single high voltage operational amplifier.
The designed current to voltage converter complies with all
the above specifications. It has a linear transfer function of
0.2nA/V,
the input current range is -1nA to 1nA and the measured input noise is less than 1pA. Results from the tests done with
the converter show that it can be used in nanolithography
systems. The measured transfer function is shown in fig. 2,
where its linearity can be seen. The second important electronic module in nanolithography systems with cantilevers is
the High Voltage Bias Source (HVBS).
The second variant is chosen for this circuit. Using only one
chip makes the realization easier, with less noise sources.
Good power supply filtration is also required. A linear power
supply is used to prevent adding high frequency noise to the
power supply rails. The designed HVBS has a total gain of 10,
and it is placed in a metal box for shielding. The measured
output voltage noise is less than 3mVrms (Fig. 3).
Fig. 1: Current to voltage converter‘s
board
Fig. 2: Current to voltage converter‘s transfer function
Fig. 3: High voltage bias sourse output noise
[1] Rangelow, I.W. et. al., Proc. SPIE-Int. Soc. Opt. Eng. 7637, 10pp (2010).
[2] Kaestner, M. & Rangelow, I.W., J. Vac. Sci. Technol. B 29, 06FD02 (2011).
[3] Horowitz, P. (1994). The Art Of Electronics - 2nd Edition.
[4] Mancini, R. (2001). Op Amp for Everyone.
Contact
159
SYSTEMS
Optimized Systems for Energy Efficient Optical
Tweezing of Particles in Air
R. Kampmann, A. Oeder, R. Kleindienst, A. Grewe, S. Sinzinger
Funding: CRC 622 “Nanopositioning- and Nanomeasuring Machines”
Optical tweezers are a powerful and well established tool
for analysis and manipulation, e.g. in the fields of micro
biology, chemistry and physics. The contact free manipulation of micro- or nanocomponents is also interesting for
industrial applications such as microassembly in production
technology. There the requirements on optical tweezers are
different and may vary for each specific application. In many
practical applications microscopic objects have to be manipulated efficiently at large working distances. In previous
work, we demonstrated that customized optical tweezer
systems with unique properties are feasible by combining a
classical lens with optimized beam shaping and innovative
fabrication technology [1]. Here we present the design of
the next generation optical tweezer systems optimized for
trapping in air rather than fluidic environments.
Within the framework of a collaborative research centre
(CRC 622) funded by the German Science Foundation (DFG),
an optical tweezer setup has to be implemented inside a
Nano positioning- and Nano measuring machine (NPMM).
Fig. 1: Axial and lateral trapping
forces
Fig. 2: Optical trapping system
The optical manipulation takes place in a gaseous surrouding medium, like air. Therefore, the trapping force of the
system was simulated with a force simulation tool based on
geometrical optics (figure 1). For optimized trapping, efficient distribution in the focus of the system has been found
advantageous. This illumination is realized via a refractive
or diffractive double axicon and perfectly focused with an
annular parabolic mirror as can be seen from (figure 2). In an
iterative way, all optical components are adapted to get an
optimized intensity distribution resulting in maximum trapping force per photon.
The refractive double axicon (figure 3), as well as the parabolic mirror, are fabricated via an ultraprecision micromilling
process. Systematic fabrication errors can be taken into account by online monitoring and compensation of the environmental conditions. Alternatively, the double axicon is
manufactured lithographically as an 8 phase level diffractive
optical element. We compare the performance of both implementations with specific consideration of the integration
requirements in the NPMM environment.
Fig. 3: Double Axicon, fabricated by
ultra-precision micro milling
[1] A. Oeder, S. Stoebenau, S. Sinzinger. Optimized free-form optical trapping systems. Optics Letters / Vol. 37, No. 2 / January
15, 2012
Contact
160
Ronald Kampmann | +49 3677 69-1849 | ronald.kampmann@tu-ilmenau.de
SYSTEMS
Micro-Nano Integration of an Opto-chemical
Detector based on III-N Nanowires
R. Kleindienst, V. Cimalla, M. Eickhoff, A. Grewe, K. Holc,
J. Schätzle, U. Schwarz, J. Teubert, S. Sinzinger
Funded by BMBF (SINOMICS FKZ: 16SV5384 and KD-OptiMi (FKZ:
16SV3700, FKZ: 16SV5473)
Introduction
For many environmental gas monitoring applications, real
time sensors working at elevated temperatures are required
[1]. For this purpose III-N nanowire heterostructures (NWH,
Fig. 1) can be applied as opto-chemical transducers as they
show a highly sensitive photoluminescence (PL) response to
hydrogen and oxygen. The strong carrier confinement in IIIN NWHs reflected by a high thermal stability of the PL intensity allows measurements at temperatures up to 350°C.
Combined with other unique properties of nitride nanowires
such as the large surface to volume ratio and the high crystal
quality this provides the possibility to establish an all-optical
approach for chemical detectors. [2]
Micro Optical Integration Platform
Within the project SINOMICS, we miniaturized an existing
large scale laboratory sensor setup using an efficient micro
optical system which serves as platform for integrating the
electro-optical components, i.e. the laser diode for excitation and the photo diode for detection, as well as suitable
NWHs. As shown in Fig. 2, for highest detection reliability
the micro optical system was designed to isolate the electrooptical components from the investigated environment. In
our setup the excitation radiation at 405 nm is efficiently
delivered to the NWHs via a tilted, reflective ellipsoid. This
mirror surface is designed to image the output facet of the
laser diode onto the detection area. Coupling angles are
optimized according to ideal imaging conditions and maximum transmission efficiency. The PL signal is detected by a
Fig. 1: III-Nitride nanowire heterostructures [3]
photo diode placed close to the NWHs. Although the excitation radiation and the PL signal are spatially separated at
the photo diode, reflected and scattered excitation as well
as false light is suppressed by an additional interference filter. [4]
The micro optical system, shown in Fig. 3, was fabricated
in UV optimized PMMA using ultra-precision machining
providing the required flexibility and highest fabrication accuracy. Profilometric measurements of the optical surfaces
have shown a mean deviation from the design of < 180
nm and a surface roughness of < 18 nm. The good shape
accuracy and surface quality were proven by an investigation of the optical performance which has shown diffraction
limited focusing properties of the excitation beam shaping
components. [5]
Conclusion and Outlook
We have realized a micro optical system serving as integration platform for a NWH based opto-chemical detector. The
suitability of the applied design and fabrication approach
has been proven by profilometric measurements and optical
experiments.
Further work will concentrate on the integration process
and direct gas detection tests. To enable long term stability
and low cost mass production, the micro optical system will
be realized with a SiO2 replication process in cooperation
with Silicaglas Ilmenau GmbH.
Fig. 2: CAD model of the micro optical system
Fig. 3: Micro optical system in UV-optimized
PMMA under investigation
[1] R. Kleindienst et al., 6071, EOS Annual Meeting (EOSAM) 2012, Aberdeen
[2] J. Teubert et al., Nanotechnology 22, 275505, 2011
[3] F. Furtmayr et al., Phys. Rev. B 84, 205303, 2011
[4] R. Kleindienst et al., SPIE Photonics West 2013 (accepted)
[5] M. Bär et al., Photonik international, pp. 45-47, 2012
Contact
Roman Kleindienst | +49 3677 69-2488 | roman.kleindienst@tu-ilmenau.de
161
SYSTEMS
Adaptive Confocal Approach to Hyper Spectral
Imaging
A. Grewe, M. Hillenbrand, S. Sinzinger
Funding: BMBF (OpHymiSens FKZ: 16SV5575K), TMWAT,
European Social Fund (FKZ: 2012 FGR 0014 )
Introduction
Hyperspectral imaging allows for the recording of two dimensional spatial image data combined with highly resolved
spectral information. A thorough analysis of the specimen
under test is achieved by resolving wavebands which are
normally indistinguishable to the human eye or RGB sensors.
Hyperspectral data thus allows one to gain information not
only about the form and position of a probe but also e.g.
its material composition or the type and state of biological
tissue. Applications which significantly benefit from hyperspectral imaging are e.g. food safety and quality control, gas
detection, biochemical research and remote sensing.
Innovative hyperspectral imaging concept
The detection of three dimensional data (x,y,l) necessary for
hyperspectral imaging with a two dimensional detector, like
a CCD, requires multiplexing either in time or space [1]. To
this end, we suggest to combine tunable optics with a parallelized confocal system to achieve the high spectral resolution for each image point. The axial chromatic aberration
of the imaging optical system is used to produce multiple
foci (one for every wavelength) which are spread along the
optical axis. A pinhole placed in a specific focal plane blocks
most light except the wavelength which is ideally focused
Fig. 1: 2D confocal
separation of incoming
stectra
Fig. 2: Focussing effect of
Alvarez based phase plates
at the pinhole position [2]. Using pinhole arrays as shown in
Fig. 1 enables the capturing of an image scene at the desired
wavelength band. Scanning through different bands is realised by vaying the focal length of the system using tunable
optical elements.
Generalized Alvarez-Lohmann lenses and their
optimization for a hyperspectral setup
A well-known concept for tunable optical systems are socalled Alvarez-Lohmann lenses. They consist of two cubic
phase plates whose phase profiles compensate each other
if aligned properly. A lateral shift of the plates in opposite directions introduces a spherical phase function with a
curvature proportional to the displacement, see Fig. 2. Mathematically these phase plates can be described as polynomials [3], which allows the adjustment of the elements to
specific tasks, like a constant spot position and a positive
focal length over the whole tuning range.
Design, fabrication and experiments
For the purpose of hyperspectral imaging a two element refractive system layout was designed. The design is based on
a classical Alvarez surface enhanced by terms for aberration
correction to increase the spatial and spectral resolution.
The fabrication of the 7th order freeform surfaces was realized by ultra precision micro-milling, see Fig.3. The tuning
range of the system is tailored to the axial chromatic aberration of the lenses, which is about 2 mm. A wavelength
band of 100 nm FWHM is scanned over a spectral range of
450 – 750 nm by lateral shifting of the plates [4]. Differential measurements allow one to further enhance the spectral
resolution.
Fig. 3: Micro-milled phase plates imaging a grid, combination of the freeform
elements produces an even phase
[1] W.R. Johnson, M. Humayun, G. Bearman in Journal of Biomedical Optics 12(1) 2007[2] F. Goetz, G. Vane, J.E.
Solomon,“Imaging spectrometry for Earth remote sensing”, Science 1985
[2] M. Hillenbrand, C. Wenzel, X. Ma, P. Feßer, A.Grewe, B. Mitschunas, M. Bichra S. Sinzinger „Hybrid hyperchromats for
chromatic confocal sensor systems” Advanced Optical Technologies 2012
[3] L. W. Alvarez, U.S. Patent 3,305,294
[4] A.Grewe, M. Hillenbrand, S.Sinzinger, Proc. EOSAM, 2012
Contact
162
Adrian Grewe | +49 3677 69-1895 | adrian.grewe@tu-ilmenau.de
NANOMEASUREMENT
Novel Tactile Stylus Sensor on the Basis of a Focus
Sensor
F. G. Balzer1, T. Erbe2, A. Foullon1, E. Manske1, R. Theska2
1
2
Institute of Design and Precision Engineering
Introduction
Areal surface manufacturing is a crucial issue in the modern micro- and nanomanufacturing industry, in particular
due to the dominance of surface effects in the micro- and
nanometre scales. This has lead to an increasing demand
for traceable areal surface measurements. This contribution
focuses on the concept and the realisation of a novel tactile stylus sensor using the optical detection of the stylus‘
deflection.
Functional Principle and Measurement Results
A novel tactile stylus was developed by the Institute of Process Measurement and Sensor Technology and the Institute
of Design and Precision Engineering within the context of
Collaborative Research Centre 622. Conventional stylus sensors are based on lever designs for guiding the stylus. The
novel approach of the sensor described here is that the stylus is guided by two parallel flexure hinges in order to reduce the outer dimensions of the sensor. The stylus deflection
is optically detected using a focus sensor. The latter was previously developed at our Institute [1]. To enhance the optical
signal quality, a small mirror made of silicon is glued to the
backside of the stylus. A reduction of the outer dimensions
is necessary to use the sensor in the multisensor revolver under development [2] for application in the nanopositioning
and nanomeasuring machine SIOS NMM-1. The metrologi-
cal properties of the tactile stylus sensor were investigated
using the NMM-1. The resolution of the sensor is dependent
on the resolution of the focus sensor, the quality of the mirror on the stylus backside and the tilt of the mirror. In our
case, a resolution of about 0.8 nm was achieved. Parasitic
lateral movements deteriorate the signal quality and thus
the resolution. Using a set of two hundred measurements
and neglecting drift effects, the repoducibility of the working point is below 5 nm. The linearity deviations are on the
order of 2 to 3 % (16 to 21 nm) in the working range of the
sensor. The stiffness of the guide system was designed with
the help of FEM simulations to realise a resulting probing
force of 0.75 mN at the working point. The simulations were
compared with measurements using a force measurement
system [3], and good correlation were obtained exhibiting
deviations less than 10 % of the desired nominal force. Initial
scanning measurements using the NMM-1 showed a hysteresis of up to 4 nm between forward and backward scan.
This is caused by the tilt of the stylus when it is in contact
with the surface.
The investigation of the metrological properties has shown
great potential. Further research will look into improving
the system‘s dynamics by reengineering the guide system
and reducing the moveable mass. Furthermore the lateral
stiffness of the membranes will be optimised to reduce the
hysteresis effects.
Fig. 1: Tactile stylus sensor installed in the SIOS NMM-1
[1] Mastylo, R.; Dontsov, D.; Manske, E.; Jäger, G.: A focus sensor for application in a nanopositioning & nanomeasuring machine.
In: Proc. of SPIE, Vol. 5856
[2] Manske, E.; Jäger, G.; Hausotte, T.: Prospects of Multi-Sensor Technology for Large-Area Applications in Micro- and
Nanometrology. In: Proc. of NCSLI, 2011
[3] Hofmann, N.; Jäger, G.: Measuring the metrological properties of 3-D microprobes. In: 14th Int. Conf. On Mechatronics
Technology, 2010
Contact
Felix Balzer | +49 3677 69-5084 | felix.balzer@tu-ilmenau.de
163
NANOMEASUREMENT
Fibre-coupled Confocal Zero-point Sensor for a
Nanopositioning and Nanomeasuring Machine
F. G. Balzer1, U. Gerhardt1, T. Hausotte2, E. Manske1, G. Jäger1
1
2
Chair of Manufacturing Metrology, University Erlangen-Nuremberg
Introduction
A challenging topic in nanopositioning and nanomeasuring
technology is the zeroing location of the positioning system, which is the position at which the length measuring
systems are set to zero. Thus, this position represents the
point of origin of the device coordinate system. The current
generation of the SIOS NMM-1 uses tactile limit switches
as zero-point sensors. A set of one hundred measurements
has shown that the switching point exhibits micrometre-size
variations [1].
In accordance with the holistic approach of Collaborative
Research Centre 622 to minimise all error influences of the
base measurement chain and to push each component of
a nanopositioning and nanomeasuring machine (NPMM)
to its limits [2], a novel fibre-coupled monochromatic zero-point sensor was developed at the Institute of Process
Measurement and Sensor Technology.
Functional Principle and Measurement Results
The main development objective for the new zero-point
sensor is to reduce the standard deviation of the positioning system‘s reference position to a value below 10 nm.
Therefore, the sensor must be fixed to the overall metrological frame instead of being affixed to the guide or drive
system as the tactile limit switches are. Also, the reference
sensor measurements have to be performed on the same
mirror used to reflect the interferometer measuring beam,
Fig. 1: Measurement set-up with a confocal sensor installed in the
SIOS NMM-1
meaning only an optical sensor can be used. The use of the
confocal principle was decided upon, as it is simple and the
fibre coupling is state-of-the-art.
The confocal sensor consists of a proprietary-design probe
head and an electronics unit, both of which are coupled
over an optical fibre [3]. The electronics unit uses a bi-directional transmitter and receiver module with a wavelength
of 1330 nm, which is commercially available with fibre coupling in the telecommunications field. To keep the light
source emission constant, a diode integrated into the laser
module is used to monitor the current. The probe head contains a lens to collimate the divergent light coming out of
the fibre and a lens to focus the beam onto the surface. The
light reflected and scattered from the surface is collected by
the same lenses and transmitted back into the fibre and into
the electronics unit. Thus, the end of the fibre acts as both
the illumination and the micron-sized detection pinhole. The
focal distance of the sensor is approximately 4.6 mm.
The SIOS NMM-1 was used to investigate the sensor characteristics. Therefore, the confocal sensor was used as a
probe system in the NMM-1. A Zerodur® cube with reflective coating was used as the object under test. The point of
maximum intensity is a well-reproducible point, which allows it to be used as a reference signal for the interferometers. In a set of one hundred measurements, the standard
deviation of this point is below 4 nm. The main parasitic
influence is vibration of the optical fibre. Based on these
results, it was decided to use the confocal sensor as the
zero-point sensor for the interferometers in the NPMM-200
currently under development at our Institute.
One objective for future research is to investigate the use
of two wavelengths. Due to the chromatic dispersion of the
focus lens, the point of maximum intensity will vary along
the optical axis. This effect can be exploited for influencing
the difference in the signal between the two wavelengths
coupled into one fibre and for allowing the detection of direction.
[1] Hausotte, T.: Nanopositionier- und Nanomessmaschinen, post-doctoral thesis, Technische Universität Ilmenau
[2] Manske, E.; Jäger, G.; Hausotte, T.; Füßl, R.: Recent developments and challenges of nanopositioning and nanomeasuring
technology. In: Meas. Sci. Technol. 2012
[3] Balzer, F. G.; Gerhardt, U.; Hausotte T.; Manske E.; Jäger, G.: Fibre-coupled monochromatic zero-point sensor for precision
positioning systems using laser interferometers. In: Meas. Sci. Technol. 2012
Contact
164
Felix Balzer | +49 3677 69-5084 | felix.balzer@tu-ilmenau.de
Nanomeasurement
Resonant Uniaxial Nanoprobe
B. Goj, M. Hoffmann
IMN MacroNano
The demand of miniaturized tactile probing systems leads
to the requirement of a low stiffness and a small touching
element (e. g. ruby ball with d < 200 microns). Thus, challenges are incurred because of an increasing influence of the
“micro world” effects. Sticking is the most crucial effect. It
generates measurement errors due to snap back and false
triggering. The aim of the subproject A12 of the collaborative research center (SFB 622) is to design a highly accurate
probing system which operates at resonant motion.
The designed nanoprobe is an uniaxial probing system which
comprises an electrostatic actuator, two electrostatic sensors and four serpentine springs as passive suspension (cf.
Figure 1), [1]. All components are placed on a shared siliconon-insulator substrate. Therewith, the coupling elements
are reduced in comparison to common systems because the
touching element (ruby ball) is attached by gluing only at
the top of the stylus. During the measurements, the nanoprobe oscillates around an operating point so that sticking
between the measurement object and the ruby ball will be
avoided. If the probe comes in contact with the specimen,
the oscillation is damped and the resonance frequency of
the system changes (cf. Figure 2). Thus, two driving schemes
are possible: On the one hand, the nanoprobe can be driven
at a fixed frequency and the position of the probe is correla-
ted with the amplitude of the sensor output voltage. On the
other hand, the probe can be operated at a constant phase
shift so that the system is always running at resonance frequency. In connection with a spectrum analyser or a lock-in
amplifier, the position of the nanoprobe is determined by a
measurement of the frequency shift itself.
First experiments show that sticking is safely avoided utilizing resonant motions. Both driving schemes are suitable to
detect the nanoprobe position and evaluate the topography of the measurement object. Nevertheless, the constant
phase shift is more promising because the frequency is not
affected by disturbing harmonics or any type of noise. The
behaviour of the resonance frequency, depending on the
damping of the nanoprobe, is shown in Figure 2. If the nanoprobe is dampened, the resonance frequency increases
because of a temporarily increasing stiffness during the
contact of the ruby ball with the measurement object.
Further research activities will investigate biaxial (Figure 3)
and triaxial oscillating probing systems which should increase measurement accuracy and provide a wider range of
applications, [2]. Another focus will be the integration of
the probing systems into the nanopositioning and nanomeasurement machine (NPMM). First approaches with an
automatic changing system are presented in [3].
Fig. 1: Uniaxial nanoprobe with
attached ruby ball
Fig. 3: Biaxial nanoprobe with integrated actuators and sensors for the x- and
y-direction respectively
Fig. 2: Frequency dependent on impact
into the nanoprope oscillation
[1] Goj, B.; Hoffmann, M.: Resonant Nanoprobe with Integrated Measurement System. Bremen: Actuator, 2012
[2] Goj, B.; Hoffmann, M.: Design of a biaxial Nanoprobe utilizing Matlab Simulink. Ilmenau (Germany): 23rd Micromechanics
Europe Workshop 2012, 2012
[3] Goj, B.; Vorbringer-Dorozhovets, N.; Wystup, C.; Manske, E.; Hoffmann, M.: Electromagnetic Changer for AFM Tips. Ilmenau
(Germany): 23rd Micromechanics Europe Workshop 2012, 2012
Contact
Boris Goj | +49 3677 69-1295 | boris.goj@tu-ilmenau.de
165
Nanomeasurement
High Performance AFM tips
M. Kästner, M. Hofer, Tz. Ivanov, A. Ahmad
and I.W. Rangelow
Funding: SFB 622 in frame of TP1, „High-speed Cantilever for Real-time
Scanning Force Microscopy
In all atomic force microscopy (AFM) methods, the tip that
probes the sample plays a key role in microscope performance. Therefore, there is significant demand for a reliable
tip preparation method. Many different methods have been
developed. Tips are usually made of silicon or silicon nitride,
and they may be uncoated or coated with materials such as
Aluminum, a Chromium alloy, or diamond, depending on
their intended application. We developed a simple method
of tip fabrication from single crystal silicon, and we explored
three different approaches concerning the sharp tip fabrication:
(i)
The method only requires silicon oxide as a mask
and single dry etching step in SF6 -Plasma with one additional oxidation process (Fig. 1). Tips prepared following this
procedure have a radius of 3–15 nm ready to be used in the
AFM. Sharp AFM tips with this radius have been created in
a reproducible way. The development of this technique as a
source of creating micro-machined tips has created opportunities for improved quality and control in various micro
and nano-mechanical sensing and Scanning Probe based
lithography;
(ii)
We have combined deep reactive ion etching (DRIE)
and focused ion beam (FIB) in order to produce probes with
sharp silicon AFM tips (Fig. 2). The tip curvature was found
to be approximately 5 nm. This method is, therefore, also
suitable for fabrication of large tip arrays combined with
conventional CMOS processes. In a particular application,
the tips were also doped with boron to achieve highly conductive probes (Fig. 3);
(iii)
The EBID of the carbon of Platinum nano-tips is an
additional technique to fabricate nano-whiskers on the tip
(Fig. 4).
The herein presented tips are routinely integrated by the
microfabrication of the high resonance frequency (1MHz)
piezoresistive cantilevers with integrated actuation for scanning probe microscopy and proximal probe lithography.
Furthermore, the cantilever was used for imaging samples
in contact and dynamic mode, yielding results similar to
those obtained with commercial available probes but with
a significant higher scan rate. In combination with the fast
scanning stage and a custom-build AFM controller, we were
able to achieve an imaging- rate up to one image per second
with a resolution of 128x128 pixels [1].
Fig. 1: AFM-tip formed by dry
etching and wet oxidation
Fig. 3: AFM-tips formed by FIB
modification
Fig. 2: AFM-tips formed by
FIB modification
Fig. 4: AFM-tips formed with Carbon
nano-whiskers
[1] Thomas Michels , Elshad Guliyev, Michal Klukowski, Ivo W. Rangelow, “Micromachined self-actuated piezoresistive cantilever
for high speed SPM”, Microelectronic Engineering 97 (2012) 265–268
Contact
166
Marcus Kästner | +49 3677 69-1589 | marcus.kaestner@tu-ilmenau.de
Nanomeasurement
A Novel AFM Probe on the Basis of a Focus Sensor
R. Mastylo 1, E. Manske 1, D. Dontsov
2
2
SIOS GmbH
1
Introduction
The development and the wide variety of applications have
already been shown for a focus sensor in combination with
a nanopositioning and nanomeasuring machine [1]. A tactile
probing sensor on the basis of this focus sensor has also
been presented [2, 3]. Another kind of focus sensor is represented by its combination with the AFM principle. In
this case, the AFM head is arranged under the focus sensor
which acts as zero indicator of the cantilever. The first version and some measuring results of this probe have already
been shown [3]. A big disadvantage of this AFM Probe was
a complicated adjusting of the cantilever with respect to the
focused laser beam and also its relatively high time and thermal instability. In the following, we would like to present a
novel and more stable design of the AFM probe based on
focus senor.
Construction and working principle
Fig. 1 shows the internal structure of the new AFM probe
head. The adapter is used to connect the focus sensor to the
piezo ring actuator which is used for active probe operation
to achieve a higher measuring dynamic. A collimated laser
beam from the focus sensor goes through the central hole
of the piezo actuator and is focussed on the backside of the
cantilever to detect its deflection. The alignment chip is used
to align the cantilever after a cantilever replacement is required. The precision of such alignment is within 1 µm, thus
no further adjustments are required after a new cantilever is
installed on the probe.
Shaker piezo, cantilever connector and alignment chip are
glued together. A cantilever is put on the alignment chip
and fixed by a spring which is fastened by a screw. The cantilever is then connected to the adjustment part 1, which is
used for cantilever adjusting in Z direction. This part is used
as a moving part guided by three guiding pins which are
fixed to the lateral adjustment part 2. Part 1 can be fixed
by tightening fixing screw (3). After part 1 and 2 are connected, another three fixing screws (4) provide the possibility for horizontal movement because the corresponding
through-holes for those screws are larger than the screw
itself. The clearance between the screws and the holes represents the space for the adjustment.
In the Z direction, the alignment can be achieved by observing the focus error signal (FES) of the focus sensor and by
using an additional piezo to realize a nanometer fine Z-movement. The XY alignment can be done based on the image
from the build-in CCD camera microscope. After alignment
is finished, the structure is fixed by chemical glue. All adjustment parts are manufactured from Invar with high precision
requirements to achieve an accurate and stable adjustment.
Fig. 2 shows the practical realization of the novel AFM probe. First measurements demonstrated good repeatability
and stability of the new head design.
Fig.1: Internal structure of AFM head to be combined with a focus sensor
Fig. 2: AFM head with the focus sensor in the NPM-Machine
[1] Mastylo R., Dontsov D., Manske E., Jager G.: A focus sensor for an application in a nanopositioning and nanomeasuring
machine, Proc. SPIE Vol.5856, 2005, pp. 238-244.
[2] Mastylo R., Manske, E.; Jäger, G.: Optical and tactile probing with a focus sensor, Jahresbericht ZMN 2005.
[3] Mastylo R.: Optische und taktile Nanosensoren auf der Grundlage des Fokusverfahrens für die Anwendung in
Nanopositionier- und Nanomessmaschinen, Technische Universität Ilmenau, Dissertation, 2012
Contact
Rostyslav Mastylo | +49 3677 69-3442 | rostyslav.mastylo@tu-ilmenau.de
167
Nanomeasurement
Synchrotron Radiation - AFM
U. Wenzel 1,2, S. Kubsky 1, T. Ivanov 2, M. Kästner
and I. W. Rangelow 2
2
Synchrotron SOLEIL, L‘Orme des Merisiers, BP 48, Saint-Aubin,
91192 Gif sur Yvette, France
2
Department of Microelectronic and Nanoelectronic Systems,
Ilmenau University of Technology, Germany
1
Funding: EU-Pronano
Introduction
Up to now, it has been difficult or impossible to perform
analysis on a nanoscale, when a combination of different
methods is needed. The combination of local probe analysis
techniques such as Scanning Tunneling Microscopy (STM)
and Atomic Force Microscopy (AFM) with those yielding
additionally chemical information on the sample is a challenging methodological task. At Synchrotron SOLEIL we are
setting up an instrument to exploit a new combination of
AFM and the interaction of synchrotron radiation (SR) light
with matter [1].
Set-up
Traditionally, AFM suffers from the optical beam deflection
detection. Our instrument is based on self-actuating piezoresistive cantilevers fabricated at the Ilmenau University of
Technology [2, 3]. The deflection of these cantilevers is read
out via a Wheastone-bridge, integrated in the base of the
cantilever by a CMOS process. This way, instrument geometry has been optimised to grant physical access to the
sample. The compact design allows for integration of the
complete set-up into a small high vacuum chamber. The
electronics and the instrument itself are transportable and
can be adapted to different beamlines at the synchrotron
operating under high vacuum conditions or under atmospheric pressure. An aperture on the tip of the cantilever
permits light coming from the beamline to be transmitted
to the sample. The hole is prepared with Focused Ion Beam
(FIB).
A simplified alignment procedure is realised via the nanomechanical system, consisting of 3X3 linear axes. The first xyzblock serves to define aperture and can carry Fresnel-zone
plates, small optical lenses or just apertures. The second
xyz-positioner moves the cantilever, while the third xyzmanipulator holds the sample. All axes can be moved at the
same time and independently of each other. Each axis has
integrated encoders with a readout resolution of the order
of a few nanometers. The closed loop feedback uses these
values to hold the position. The coarse travel ranges are all
in the centimeter range. This allows for coarse alignment of
the set-up with the vacuum chamber and to perform nanoscale approach later. The AFM is capable of AM, FM and PM
mode, at least.
Application
The concept to employ a pierced cantilever for material modification on a nanoscale is already being applied successfully to ion beam applications [4]. To add further functionality,
the integration of metallic antennae will permit the exploitation of Surface Enhanced Raman Spectroscopy (SERS) [5] in
visible light, while instrumentation such as fiber-based light
amplifiers can be added to observe far field phenomena.
In general, all types of photonic phenomena using SR will
be observable on a nanoscale. Apart from analytical work,
sample modification is also possible: The irradiation of living
cells and their independent observation in-situ via AFM is
only one example.
Fig. 1: Photograph of the set-up in the vacuum chamber
Fig. 2: SEM image of the self-actuating piezoresistive cantilever
[1] S. Kubsky, D. Olynick, P. Schuck, J. Meijer, I. W. Rangelow, European Patent EP2218075, 2010.
[2] I. W. Rangelow et al., Surface and Interface Analysis, vol. 33, pp. 59-64, 2002.
[3] T. Ivanov et al., Microelectronic Engineering, vol. 67-68, pp. 550-556, 2003.
[4] S. Pezzagna et al., Small, vol. 6, pp. 2117-2121, 2010.
[5] A. Weber-Bargioni et al., Nanotechnology, vol. 21(6), p. 065306, 2010.
Contact
168
Nanomeasurement
Active Q Control in Atomic Force Microscopy for
Speed and Sensitivity Enhancements
A. Schuh1,2, K. Youcef-Toumi2, I. W. Rangelow1
1
2
TU Ilmenau
Massachusetts Institute of Technology
Funding: Samsung Electronics / SFB 622
Force sensitivity is an important consideration in the Amplitude Modulated Atomic Force Microscopy (AM-AFM). This
microscope compares the amplitude RMS of a vibrating cantilever beam to a given set point within a feedback loop, in
order to maintain a constant distance from the sample.
The cantilever of the AFM is traditionally used at one of its
resonances, typically the fundamental one. Analog to an
electronic band-pass filter, the mechanical resonance has an
associated bandwidth that can be expressed in terms of a Q
factor. This bandwidth, along with the resonance frequency,
determines the maximum reasonable imaging speed of the
cantilever and influences its force sensitivity.
In terms of imaging speed, an example is shown in figure 1a)
and b). At similar resonances, a cantilever with two different
Q factors is scanning above a falling edge of a sample structure (amplitudes normalized). The cantilever with the lower
Q factor, which is associated with the higher bandwidth,
is adapting faster to these changes. Thus, this behavior is
beneficial for the emergence of future High Speed AFMs, in
Fig. 1: Speeds
at different Q
factors and
control method.
particular in combination with low noise sensors.
In contrast, a relatively high Q factor, and its associated low
bandwidth, is desired in situations that require higher sensitivity. While having similar exciting signals for a low and high
Q factor cantilever, the cantilever with the higher Q factor
oscillates at higher amplitude at the tip. The sensitivity improvement comes from the increased amplitude gradient to
structural variations on the sample, also resulting in lower
imposed forces.
These two contradicting cases cannot be achieved simultaneously and depending on the application, a tradeoff is
necessary. Generally, the Q factor can be influenced by the
structure of the cantilever itself (e.g. internal losses), by its
environment (liquid, gas or vacuum) or by feedback control
means [1,2]. The former two are often difficult to adjust and
depend on the experimental environment, whereas the latter one is flexible and can be applied independently.
By modeling the cantilever as a simple second order system, the damping term can be influenced by feeding back
the (velocity proportional) derivative times a gain of the
cantilever’s sensor signal (figure 1c). This technique is completely independent of the used cantilever’s sensor and actuator configuration, as long as it is properly modeled. As an
example, figure 2 indicates the change of the Q factor of a
cantilever’s resonance. The natural and non-altered Q factor
of 230 is changed almost arbitrarily anywhere from very low
to high Q factors.
Figure 3 left is an image taken without Q control and Figure
3 right with a substantially raised Q factor of 1050, both
at a scan speed of 5 lines/s and a scan area of 2.5x2.5μm2.
The structures on the silicon wafer were clearly resolved in
opposite to the left image.
Fig. 2: Frequency
sweeps at different Q
factors.
Fig. 3:, Left: Without
Q-Control, Right:
Q-Control applied. Scan
area of 2.5x2.5μm2.
[1] D. Ebeling, H. Hölscher, H. Fuchs, B. Anczykowski and U. D. Schwarz, 2006. ”Imaging of biomaterials in liquids: a
comparison between conventional and Q-controlled amplitude modulation (‚tapping mode‘) atomic force microscopy”.
Nanotechnology 17 S221
[2] Paul D. Ashby, 2007. “Gentle imaging of soft materials in solution with amplitude modulation atomic force microscopy:
Q control and thermal noise”. Appl. Phys. Lett. 91, 254102
Contact
169
Nanomeasurement
Quadro-Cantilever Atomic Force Microscopy System
R. Benzig 1, M. Kaestner 1, Tzv. Ivanov 1, A.-D. Müller
and I.W. Rangelow 1
2
MNES 1, Anfatec Instruments AG 2
Funding: EU-Pronano
Since the invention of the atomic force microscope [1], AFM
techniques have grown up to a common measurement instrument for the nano-regime. Thereby, the cantilever itself
evolved from a simple passive deflection element to a complex MEMS-system through integration of functional elements such as piezoresistive detection & thermal, bimorphbased actuation [2].
However, the main problems of low speed and small scanning range have remained untouched for a long time. One
solution is the operation of an array of cantilevers [3]. Precise control of each individual cantilever would increase the
scanning range in one drive - and with it the scanning speed
- multiple times and with further adaptions, this is also a
way to enhance throughput of scanning probe lithography
leading it to a serious technique for sub-10 nm-lithography.
Therefore, we are developing and improving an AM-mode
system using four parallel cantilevers simultaneously. To
keep the system small and reach higher scanning speeds
for each individual cantilever, actuator and deflection sensors are integrated [4]. Oscillation and z-axis-actuation are
provided by a thermaly driven bimorph-layer structure. An
ac-biased voltage is used for oscillating the cantilever at the
resonance frequency while dc-biasing leads to a constant
deflection for the z-axis-actuation. The constant deflection
is controlled by a PID loop. The distance between sample
and tip is measured by integrated piezoresistive read-out
sensors.
They are positioned near the highest stressed location and
interconnected in a Wheatstone-bridge circuit. The amplified Wheatstone-bridge voltage signal, which is proportional to the deflection of the cantilever, is used as both measuring and feedback loop signal.
For simultaneous imaging, all four cantilever have to be in
the atomic force resolution regime. Herein, to adjust the tipsample distance, we apply a three-point bearing system to
regulate the tilt of the cantilever holder. In a first attempt
we were able to image parts of a test sample by using all
four cantilevers. For a simultaneous scan of four square areas with a scan size of 6µm and a spacing of 150µm determined by the cantilever spacing, less than one second was
required.
As most challenging quests for operation of multiple cantilevers in parallel turns out the minimization of: (i) electrical and mechanical cross-talk; (ii) drifting due to thermal
influences and (iii) tilt effects of the holder. Surmounting
these difficulties by designing stiffer cantilever holders, varied cantilever geometries and improved electronics could
establish a new era of faster AFM imaging far beyond stateof-the-art.
In conclusion, AFM cantilever-array systems demonstrate a
powerful perspective for faster AFM-imaging and lithography, expanding the AFM techniques towards novel application fields in metrology, process control and sub-10nm
nanofabrication.
Fig. 1: The AFM head, cantilever holder and cantilever array.
Fig.
2: Light microscopy image and simultaneous AFM measurement of a test
.
sample with all four cantilevers.
[1] G. Binnig, C.F. Quate and C. Gerber. Phys. Rev. Let., 56:930 - 934, 1986.
[2] R. Pedrak et al.. J. Vac. Sci. Technol. B, 21:3102 - 3107, 2003.
[3] S.C. Minne et al.. Appl. Phys. Let., 72:2340 - 2342, 1998.
[4] K. Ivanova et al.. J. Vac. Sci. Technol. B, 26:2367 - 2373, 2008.
Contact
170
Nanomeasurement
Femto- to Atto-Gram Mass Sensor
M. Hofer, T. Angelov, L. Chervenkov, K. Gorovoy, M. Kästner,
A. Schuh, N. Nikolov and I.W.Rangelow
The atomic force microscopy (AFM) is one of the most powerful and precise imaging and investigation tools, which is
nowadays available on the market. In previous years, new approaches and investigations have been done especially by our
group to improve and extend the usability of this powerful
technology. Our standard cantilever signal read out is realized
by piezoresistive sensors. Hence, no laser source and its detection unit are needed any more. Sizes range from 350nm
up to 150µm in total length. Besides imaging, the cantilever sensors can be used for different purposes, like mass and
pressure detection.
For ultra-sensitive mass measurements, we produced high
frequency cantilevers. The frequency of the cantilever mainly
depends on its stiffness and effective mass. In order to reach
frequencies up to 5 MHz the size of the cantilever has to
shrink to micrometer scale. At the same time, this decreases
the cantilever’s effective mass down to pico-grams (Fig 1).
To achieve piezoresistive signal read out, Boron doping was
applied to form ultra-shallow piezoresistors. The junction was
formed as two-dimensional electron gas (2DEG). Due to the
weak signal of the thin piezoresistive layer, it is processed by
a high gain und ultra-low noise amplifier.
To measure frequencies of around 5MHz, the amplifier was
designed with a high bandwidth of over 6 MHz. An integrated Wheatstone bridge configuration feeds the amplitude signal into the amplifier. After filtering and high amplification,
the signal is processed in a lock-in amplifier.
Calibrations of the cantilever have indicated a potentially high
sensitivity. The calibration was realized by the measurement
of the frequency shift due to the extracted mass during a focused ion beam (FIB) milling procedure. The removed volume
of 150nm x 150nm x 200nm had a mass of 10.5 fg, which
resulted in a frequency shift of 764Hz (Fig2). Since the Lock-in
amplifier is able to detect very small frequency shifts in noisy
environments, we can expect sensitivity to mass changes in
the order of a few atto-grams.
The piezoresistive read out enables easy usage of the cantilever in either air or vacuum. High Q-factors improve the
cantilever’s sensitivity and enables very precise mass sensors.
In vacuum, the cantilevers show Q-factors of up to 4000. In
conclusion, the characterization of the cantilever matches the
properties obtained in previous simulations, especially the resonance frequency and high Q-factor.
Fig 1: Piezoresistive Mass Sensor
Fig 2: Frequency shift due to FIB milled piece of silicon. Amplitude change is
caused because of different actuation signal.
Contact
Manuel Hofer | +49 3677 69-3352 | manuel.hofer@tu-ilmenau.de
171
BIOTECHNOLOGY & LIFE SCIENCE
Multiphoton Structuring of Native Polymers: A Case
Study for Structuring Natural Proteins
M. Gebinoga, U. Fernekorn, J. Katzmann, J. Hampl, M. Klett,
A. Läffert, F. Weise, Th. Klar, A. Schober
Funding: FKZ03ZIK062/465, FKZ 34 16SV3701, FKZ 16SV5473,
FKZ B714-09064, DFG KL 1432/5/SPP 1327
Introduction
The trend of mimicking the real biological world has brought
about an intensive search for methods which are able to
engineer three-dimensionally structured biological environments using nano- and microsystem technologies. Recently published methods show the design of 3D structures by
multiphoton induced polymerization of artificial polymers
such as chemically modified natural polymers. However, limitations of this approach are the long processing time and
the fact that no native polymers have been used up to date.
We report here a case study of multiphoton structuring of
unmodified, native proteins (e.g. collagen and fibrinogen),
and liquids such as natural human blood or cell culture medium supplements such as fetal calf serum (FCS) . Based on
a computer assisted process, the structures are polymerized
precisely. Even adhesion and gluing of cells with this technique are possible by using Femtolaser irridiation. These encouraging results open new avenues for further research.
Results and Discussion
In our research, we are seeking a family of methods to address
the problem of constructing sinusoidal 3D structures in polymer materials and in living cell cultures [1]. In order to avoid
using artificial or chemically modified natural polymers, we
investigate how 3D structures can be constructed out of
native materials. First experiments have proven that a direct structuring of collagen and blood is possible by using a
direct-laser-writing technique with a near-infrared femtosecond laser as light source [2]. The process leading to structure
formation is assumed to be a multiphoton absorption which
induces a polymerization of the material in the laser focus
and its near vicinity. During further and on-going experiments
some of us (MG and AS) demonstrated the polymerization of
native multi-component liquids, both whole blood and fetal
calf serum, by the same laser treatment [3].
In this article we prove that it is possible to polymerize natural
polymers such as native collagen, fibrinogen and even multicomponent liquids like blood and fetal calf serum by multiphoton laser absorption. By scanning the sample through
the laser focus, 3D structures are created with great precision. Furthermore, we show that we can immobilize (fibroblast) cells using laser-polymerized natural material acting as
glue. In order to prove that the polymerized structures are
still bio-active, degradation studies and immunofluorescence
methods are performed. We show that the results presented
here point to a wide variety of applications in 3D cultivation,
tissue engineering and stem cell research.
Fig. 1: Scheme of the reconstruction of a liver lobolus
[1] J. Hampl, A. Schober et al. “Struktur zur Nachbildung eines Sinusoids und Verfahren zu ihrer Herstellung” DE 10 2010 037
968.9-41 2010
[2] M. Gebinoga, A. Schober et al. “Multiphoton structuring of native polymers A case study for structuring natural proteins”
minor revisions by ELS 2012
[3] M. Gebinoga, A. Schober “Vorrichtung zum Verschliessen offener Wunden und zur Bearbeitung von Gewebe eines
menschlichen oder tierischen Körpers” DE 10 2011 057 184.1 2011
Contact
172
Andreas Schober | +49 3677 69-3387 | andreas.schober@tu-ilmenau.de
Thermoformed Polylactide 3D Scaffolds for Application in Cell Culture - Production and Comparison.
J.Tobola, M. Gebinoga, T.Elsarnagawy, A. Schober et al.
Funding: Basis BMBF 09-BIO (03WKCB01O) and partially funded by
NPST at King Saud University Project No. (09-BIO676-02)
New approaches to investigate cells interaction and behavior
in microfluidic environments that mimic in vivo conditions are
recently a major focus of cell culture technology. Our microbioreactor system for 3D cultivation of cells has possible applications in biotechnology and medicine, including stem cells
research [1]. In this device the cultivation of cells occurs in
scaffolds called MatriGrid®. This is the central element of our
3D cell culture equipment. We decided, in addition, to use
PLA as a new material for production of MatriGrid®, not only
due to its high biocompatibility and biodegradability, but also
due to its thermoplastic properties, which allows for the easy
thermoforming and possibility of producing porous films without etching steps.
Fig. 1: Porous PLA MatriGrid® a).top view; b). bottom view.
As a first step, porous films were obtained. Thermally induced
phase separation was chosen as a production method, due
to the ability to easily change the pores size, depending on
the solvent/nonsolvent ratio and quenching conditions. Pore
sizes ideal for our application, allowing perfusion of fluids,
but forming a barrier for the cells, were obtained by quenching in dry ice. As a solvent we used dioxane because it has
a relatively low toxicity and is easily removed by freeze-drying.
By application of a spin coating step before thermally induced
phase separation process, self-designed, very thin (50µm) foils
were achieved, which were ideal for shaping the MatriGrid®
during thermoforming. After choosing the appropriate thermoforming conditions, MatriGrid® with desired shape and in-
terconnected pores allowing fluidic perfusion were produced
(Fig. 1). In addition, due to processes, which consist of adding
PC –layers, the porosity of the MatriGrid® could be limited to
only the cavity.3D cell cultivation on PC and PLA MatriGrid®
was compared with conventional 2D cultures. Biological data
is presented in the graphs (Fig. 2). Results indicate high biocompatibility and good metabolic activity of PLA MatriGrid®,
increasing performance over the time. Long-term degradation of scaffolds was performed in physiological conditions and
parallel in cell cultures. Result shows the same degradation
rate and no significant influence of the cells on the degradation. After 6 months of testing in PBS solution in 37°C and
5.5% CO2 content, no significant change in pore size and shape was seen on REM pictures, but in the last mouth small PLA
crystals began to appear. Also permeability of the scaffolds
was rising with time and mechanical properties, measured as
a tensile strength needed to destroy the scaffolds, were deteriorated. However, given the long period of degradation,
these changes were relatively small and had no effect on cell
growth.
Discussed MatriGrid® can be easily used in long term cell cultivation. Such cell support structures may be designed and
adapted to specific requirements of different cell types, conditions and applications.
Fig . 2: Vitality, vital cell number and activity of 3D cultured HepG2 cells
performed on MatriGrid® made accordingly of PLA and PC.
[1] U. Fernekorn, J. Hampl, F. Weise, C. Augspurger, C. Hildmann, M. Klett, A. Läffert, M.Gebinoga, K.-F. Weibezahn,
G.Schlingloff, M.Worgull, A. Schober, “Microbioreactor design for 3-D cell cultivation to create a pharmacologica screening
system”, Eng. Life Sci. 2011, 11, No. 2, 133–139.
[2] J.Tobola, et al. “3D Polylactide scaffolds and Polylactic –Polycarbonate composite scaffolds manufactured through
thermoforming for application in advanced cell culture”, Jahrestagung der Deutschen Gesellschaft für Biomaterialien 2012
Contact
Justyna Tobola | +49 3677 69-3364 | justyna.tobola@tu-ilmenau.de
173
Molecular Dynamics in Biopolymers and Articular
Cartilage
E. Rößler, C. Mattea, S. Stapf
Funding: Carl-Zeiss Stiftung
Based on the fundamental understanding of model polymer
dynamics and structure that has been of continuing interest
to the group for many years, biologically relevant macromolecules have recently been preferentially investigated.
Film formation of biopolymers like gelatin, and biocompatible polymers like poly(vinyl) alcohol are studied using
low-field single-sided NMR scanners. This technique allows
exploring the microscopic dynamics of the biopolymers during their film formation at different heights with a spatial
resolution of several tens of micrometers. Local dynamics
and order are identified by magnetic field-dependent determination of cross-relaxation phenomena, and macroscopic
transport properties during film formation are also a subject of study. XRD (X-Ray Diffraction) techniques are used to
characterize the structural properties of such films.
The single-sided scanner geometry is particularly advantageous for the layered structure of mammal articular cartilage.
The collagen and protein components, being similar to the
gelatin base structure, show dynamics that can be investigated with the same techniques and be analyzed accordingly.
Fig. 1: Single-sided desktop NMR scanner and periphery during measurement.
Contact
174
Relaxation times, diffusion coefficients, diffusion anisotropy
and cross-relaxation all vary across the three layers of cartilage, and they are known to change due to degenerative
diseases such as osteoarthritis. Low-field NMR has been demonstrated to feature much improved contrast mechanisms
as compared to classical high-field MRI which is routinely
used in clinical scanners, but they often lack the required
information depth necessary to validate disease models.
Low-field NMR devices, like the single-sided NMR scanner
(figure 1), allows one to characterize this depth-dependent
structure by the use of different tissue contrast parameters.
The three-layer structure is evident from spatially resolved
relaxation times measurements (see figure 2 for an example
of bovine articular cartilage), which can further be enhanced
by the application of suitable contrast agents such as GdDTPA. These contrast agents allow for the quantification of
proteoglycane and water concentration in the tissue, which
are important parameters in the assessment of cartilage degeneration during osteoarthritis and ageing. Degradation is
simulated by enzyme-controlled depletion of collagen and
GAG. These studies aim at developing routines for the earlystage diagnostics of arthropathies in humans.
Fig. 2: Relaxation times for a bovine articular cartilage plug demonstrating its
layered structure and the connected bone tissue.
3D Multielectrode Arrays (3D-MEAs) for
Characterization of 3D Neuronal Networks
A. Williamson 1, U. Fernekorn 1, F. Klefenz 2, P. Husar
A. Schober 1
1
2
1,2
,
Institut für Mikro- und Nanotechnologien
Fraunhofer IDMT, Bio-inspired Computing
Funding: European Commission FP7 ICT FET-OP
When attempting to understand complex neuronal networks, from both acute brain tissue slices and 3D neuronal
cultures, the computational concepts currently used in the
analysis of the neuronal interactions lack the complexity of
the real high-level biological systems. Three key issues need
to be addressed to improve current biological computational concepts: Complete 3D electrophysiological characterization of the neuronal networks, better understanding of
the role and the interactions of various types of neural cells
(both in slices and in co-cultures), and the development of
3D neuronal tissue which is artificially organized, layered
and patterned.
This EU project aims to improve current biological computational concepts with an updated in vitro model of 3D
neuronal networks by addressing each of the key issues.
Construction of artificial 3D neuronal tissue is done using
layered biomaterial and human derived neural stem cells.
Co-cultures are used to begin to understand the role and
the interactions of astrocytes in neuronal populations. The
stimulation and monitoring of the evolution of these cell
cultures and their connections is done with a 3D-MEA, a
prototype of which is presented here.
The standard method of measuring the electroactivity of cell
cultures and slices is the use of a 2D-MEA, seen in Figure 1,
beneath the culture or slice, with a typical electrode diameter of 30-100 µm and a typical distance between electrodes
of 100 µm. However, the typical tissue thickness of a slice or
3D culture can exceed a few hundred micrometers. Clearly
for better 3D spatial and temporal resolution of tissue and
culture samples, one would ideally use a 3D-MEA.
For the development of a 3D-MEA there is an additional requirement. That is, there is a difference between electroactivity measurements of slices and of cultures when using the
standard 2D-MEA. For measuring slices, the sample must be
removed from an incubator and placed on the 2D-MEA, and
for measuring cultures the sample is grown on the 2D MEA
itself. In the case of slices, constant perfusion is necessary to
extend the sample lifetime. In the case of cultures, the MEA
on which the cells are growing is moved from the incubator
to the amplifier system each time a measurement is desired.
The ideal situation for both slices (acute or artificially grown)
and 3D cultures is a 3D-MEA which is compatible with the
incubator conditions and which is equipped with an integrated micro-perfusion system. Figure 2 shows the first 3DMEA prototype manufactured in Ilmenau. These 3D- MEAs
are made of low temperature co-fired ceramic (LTCC), a material which is both biocompatible (cultures can be grown
on the LTCC surface) and compatible with the incubator environment. Further work will attempt to integrate the microperfusion system.
Special thanks to Dirk Stoepel for the initial LTCC layouts
and sample.
Fig.1: (left) 2D-MEA made in Ilmenau using (right) the standard Multi-Channel
Systems layout for 60 electrodes.
Fig.2: (left) Ceramic micro-towers, each finger has an array of electrodes,
which fit through (right) the ceramic base plate.
Contact
Adam Williamson | +49 3677 69-1127 | adam.williamson@tu-ilmenau.de
175
Project 3D Cellprint
G. Schlingloff, A. Läffert, M. Klett, A. Schober
Funding: ZIM ( KF2731201)
The aim of the project is to develop an efficient automated
system for the filling of microstructured porous container
arrays (MatriGrid®) with eukaryotic cells for pharmaceutical
research and diagnostic tools. Therefore, a novel modular
fluid concept for applications in three dimensional cell cultivation has been developed. The system has to pipette the
cells in a defined manner.
The system includes handling of different cell sizes and various viscous substances like solutions of collagen, fibrinogen
or thrombin in order to obtain defined arrangements on the
carrier (e.g. layering). Here non-destructive and controlled
handling of the fragile cells is as important as the precise
placement of different cells to prevent (or assist) cell adhesions. The pipetting process should be able to handle large
dynamic volume range (pL to mL) of fluids.
The properties of the cells grown on two dimensional surfaces differ substantially from the cells grown in cavities of
MatriGrid®. Ordinary macroscopic filling or pipetting process have the disadvantage that cells are also placed on the
ligaments between the containers. Therefore, it cannot be
assured that the cells are cultivated in a 3D/manner. Due to
this a controlled filling of the micro container with diameter
of 200-300 µm is required.
Industrial partners include the companies m2-automation,
Berlin, and microdrop GmbH, Norderstedt. M2-Automation
optimizes production, test and research processes, from
software solutions to complex computerized automation.
M2-Automation can provide support from idea conception all the way through to completion of the automation
solution. M2-Automation provides individual, innovative
solutions, adapted to the needs of one‘s company. Highly
flexible, personalized service results in a solution tailored to
one‘s needs.
Microdrop Technologies is the leading provider of equipment, software and services for advanced microdispensing
and inkjet printing applications.
The team of scientists, engineers and technicians has more
than 15 years experience in inkjet-technology and microfluidics. Microdrop Technologies focuses on high quality
products and services for industrial applications as well as
for R&D purposes. The products range from single dispenser
systems up to sophisticated Autodrop Platforms (including
glove box and production systems).
Fig. 3: Capillaries for dispensing
provided by microdrop
Fig. 1: Dispensing head provided
by m2-automation
Contact
176
Fig. 2: MatriGrid®
Fig. 4: Prototype
Gregor Schlingloff | +49 3677 69-3381 | gregor.schlingloff@tu-ilmenau.de
System to Apply Alternating Drug Concentrations in
a Biomimetic, Three-dimensional Cell Culture
F. Weise, U.Fernekorn, M. Klett and A. Schober
Funding: ZIM (KF2731202AK0)
Introduction
Currently, no cell culture system exists that is capable of mimicking the pharmacological dynamics within an organism.
Our starting point was the cultivation of cells in a microbioreactor system, which allows for a three-dimensional
organotypic culture form. This form of cultivation is more
comparable to the in vivo state of tissues than conventional
two-dimensional culture methods. To retrieve relevant information of the efficacy of a drug in early drug development
and to replace animal studies (mouse or rat model), the project aims to develop both a fluidic and sensory system for
the testing of drugs.
In conventional cell culture, active ingredients are tested at
constant concentrations, while in the organism or in the target organ a plasma binding, degradation and metabolism
of the drug is amenable to kinetic reactions. By developing
a pump concept that is able to simulate these increasing
and falling drug concentrations in the organotypic tissuelike three-dimensional cell culture, a human-like examination condition is modeled (Fig. 1). This will be realized in a cell
culture laboratory-compliant system (cell culture incubator).
The scheme of the system is shown in Figure 2.
mation assays are mostly hydrophobic chemicals which may
be absorbed from polycarbonate-based bioreactor systems.
None of the substances tested showed about the respective incubation period, the disintegration and absorption in
glass jars. Due to the unpredictable absorption of reagents
in plastics, it is necessary that all parts that are in contact
to cell culture medium be made of stainless steel or glass.
For these purposes, a bioreactor made of stainless steel was
developed. This is still designed for the direct use of scaffolds MatriGrid®. In a later version, the MatriGrid® should be
applied to a carrier. This allows for better handling. Another
advantage of this support structure is that the microcavities
are protected against mechanical stress.
The system will be tested for its effectiveness on neuroblastoma at the DKFZ Heidelberg. It has been the effectiveness
in the classical neuroblastoma therapy a used chemotherapeutic agent (doxorubicin) was tested. In this case, those
three-dimensional cultured cells are much more resistant to
the chemotherapeutic treatment than two-dimensionally
grown cells. Then the selective HDAC8 inhibitor was tested.
The results confirm the promising anti-tumor potential of
the drug, since the cell growth of neuroblastoma cells are
also markedly restricted under 3D conditions.
Experiments and Results
Extensive studies of past projects showed that the compounds (inducers, substrates, products) used in biotransfor-
Fig. 1: Temporal concentration curve of drugs in the organism.
Contact
Fig. 2: Scheme of the Pharmtest platform
Frank Weise | +49 3677 69-3423 | frank.weise@tu-ilmenau.de
177
Gene Expression and Biofunctionality in 3D Cultured
HepG2 Cells
U. Fernekorn, J. Hampl, M. Klett, A. Läffert, K. Friedl,
F. Weise, A. Schober
Funding: FKZ: FKZ03ZIK062, FKZ03ZIK465, FKZB715-09064,
FKZ16SV5473 and FKZKF2731202AK0
Introduction
3D cell culture techniques have been predicted to have the
potential to become a valuable research tool in cell biology.
In this study, cultivation conditions for the human hepatocarcinoma cell line HepG2 under 3D conditions were evaluated. The scaffold MatriGrid® may be assembled with a new
developed bioreactor. Size and shape of cellular aggregates
are defined by the architecture of the MatriGrid®. The alterations observed in gene and protein expression levels draw
a complex picture of the scaffold based 3D cultivation of
HepG2 cells.
Methods
Cell culture
HepG2 cells were cultivated in high glucose MEM supplemented with 10% fetal calf serum, 100U/ml penicillin,
100µg/ml streptomycin, 2 mM L-glutamine and 1mM sodium pyruvate. Viability of cells was determined using the
CASY TT Cell Counter and Analyzer. To support adhesion,
the MatriGrid® was coated with collagen. After 25µl of a cell
suspension containing 1x106 cells was seeded per MatriGrid®,
cells pre- adhered for 2 hours at 37°C in a CO2 incubator. For
2D experiments, 0.25x106 cells were seeded per well of 24
well plate. The 3D experiments were performed with and
without perfusion. Cultivation period was 5 days with daily
medium exchange.
Cell culture based assays
For detection of apoptosis, metabolic activity, Glucose and
Albumin, commercially available assay kits were used according to the manufacturer’s instructions.
Microarray and Data Analysis
Microarray experiments of 2D, 3D statical and perfused cultures were performed by SIRS- Lab GmbH (SIRS- Lab GmbH,
Jena, Germany). Altogether, 9 RNA samples of hepatocyte
cultures and an internal control RNA were hybridized on two
HumanHT-12 v4 Expression BeadChips that were scanned
using BeadScan v3.6.17 and read out via GenomeStudio
data analysis software v2009.2. Genes were filtered on the
basis of fold change and p- value.
Results and Discussion
While the number of vital cells increased in a doubling time
of 24 hours in 2D, doubling in statical 3D experiments was
reached after 96 hours. Vitality of cells was found to have
reduced to approximately 70% in 3D experiments. The metabolic activities measured with the Alamar Blue assay corresponded to the number of vital cells in the experiment.
Expectedly, dynamic growth in 2D cultures of HepG2 cells is
negatively correlated with glucose concentration. Cell cycle
analyses showed a significant increase of cells in G0/1 phase
of cell cycle for both types of 3D cell cultivation. Albumin
is regarded as a differentiation marker for hepatocyte cultures. Its expression was moderately upregulated under statical conditions. After five days, the albumin ELISA detected
increased levels under 3D statical but not perfusive conditions and reduced protein expression of AFP was observed
under statically 3D cultivation. Li et al. hypothesized that
silencing AFP expression may play a role in growth arrest
and apoptosis in human hepatocarcinoma cells. Correspondingly, Caspase 3 activity was found enhanced in 3D statically cultivated cells. An important role in cancer cell adhesion and migration processes is played by integrins which
are receptors for extracellular matrix proteins capable of
triggering intracellular signals through signal transduction
pathways. Immunostainings of HepG2 cells showed a higher expression of beta1- integrin under 3D cultivation. Binding of integrins to their ECM ligands results in activation of
MMPs that degrade ECM proteins to promote extravasation
and vascularization processes. 3D statically cultured HepG2
cells included up regulated markers related to cellular interaction such as IGF, IGFBP-2 and 3, MMP11and VEGF-A.
Perfusion does maintain a constant flow of the cell culture
mediums constituent parts and involves continuous local
shear stress conditions. Hence, development of a strongly
angiogenesis- promoting genotype was not as pronounced.
The authors hypothesize that creating in vitro toxicity test
models of cancerous cells requires different premises than
creating an optimal milieu for healthy primary cells. Thus, it
will be motivating to study 3Dstat cultivated HepG2 cells as
a pathophysiologic model.
[1] Butcher EC (2005) Nat Rev Drug Discov 4: 461-467
[2] Leung M, Kievit FM, Florczyk SJ, Veiseh O, Wu J, Park JO, Zhang MQ (2010) Pharm Res-Dordr 27(9):1939-1948
[3] Olsavsky KM, Page JL, Johnson MC, Zarbl H, Strom SC, Omiecinski CJ (2007) Toxicol Appl Pharm 222(1):42-56
Contact
178
Uta Fernekorn | +49 3677 69-3486 | uta.fernekorn@tu-ilmenau.de
Analysis of Oxygen Consumptions of HepG2 Cells in
a Monolayer and 3D High Density Cell Culture
F. Weise, U.Fernekorn, J. Hampl, M. Klett and A. Schober
Funding: BMBF under contract 03ZIK465 & 03ZIK062, nano cell culture
project (FKZ B714 09 064)
Introduction
The consumption of oxygen by cells has been well examined
in the past. However, in our case we analyzed the behavior
of cells in a three-dimensional cell culture. A main advantage of the three-dimensional cell culture is its more organlike behavior in contrast to a monolayer culture. Because of
the high cell density of such cultures, we have to ensure that
the cells are provided adequate nutrients and oxygen. The
aim is to find the optimal cultivation condition for these high
density cell cultures. This depends on the kind of cells and
their spatial position in the organ.
We used HepG2 cells for this analysis of oxygen consumption under three types of cultivation conditions. For the first
type, to compare with our three-dimensional cell culture,
we measured a monolayer cell culture. The second type of
cultivation was a static three-dimensional cell culture in a
permeable polymeric scaffold called MatriGrid®. The last
type was an actively perfused three-dimensional cell culture
in a MatriGrid® with various oxygen flow rates.
We used a 4-channel device from PreSens called OXY-4, so
that we could measure simultaneously four different values.
The oxygen concentration is measured by an optical principle. The sensor is a small foil with a fluorescent layer which
is sensitive to oxygen.
Results
In comparison to the monolayer culture, a significantly smaller change in oxygen content was observed in the static 3D
cell culture . Also, in the case of our micro-bioreactor, we
compared the simulation with the measurement values. The
measured data fit well with the simulated data at an oxygen
consumption rate of qcell=0.1pmol/h (Fig. 1). In contrast to
the simulation, there was a strong correlation between the
flow rate and the sensor data (Fig. 2). At flow rates over
30μl/min, the medium has less time to reach equilibrium in
the incubator. Due do thermal variation in the incubator, a
thermal convection component was observed at low flow
rates.
When comparing the results of our experiments, one can
see that the performance of the actively perfused threedimensional cell culture is equivalent to the monolayer culture. The results also show that the oxygen consumption in
the three-dimensional cell culture is lower than in the monolayer. If the three-dimensional culture is not perfused, cells
will die as a result of hypoxia. This is demonstrated by the
lower vitality of the cells in the culture without perfusion.
Especially the oxygen consumption rate of our three-dimensional cell culture is close to the results of [1]. In contrast
to the literature, the cell density in our three-dimensional
experiments is approximately 100 times higher.
Fig.1: Simulated and measured oxygen difference at the active perfused
MatriGrid®
Fig.2: Comparison between simulation and measurement of the
concentrations at the inlet
[1] Nyberg, S.L., et al., Primary Hepatocytes Outperform Hep G2 Cells as the Source of Biotransformation Functions in a
Bioartificial Liver, Annals of Surgery, 1994. 220(1): p. 59-67.
Contact
Frank Weise | +49 3677 69-3423 | frank.weise@tu-ilmenau.de
179
Measures to Improve the Long-Term Reliability of
Biosensors – Preview of Current Work
S. Hanitsch 1, M. Stubenrauch 2, J. Tobola 3, M. Hoffmann 1,
H. Witte 2, A. Schober 3
1
² Biomechatronics
³ Nano-Biosystem Technology
Introduction
Why biosensors do fail and how failure can be prevented
is one of the key-questions the “Wachstumskern BASIS”
project is working on. New concepts for biosensors and
prototypes often work quite well under in-vitro conditions.
Implanted into a real biological system those sensors often
fail rapidly due to different complex mechanisms. The first
crux to take is biocompatibility to prevent the biological
system rejecting the implant directly by an inflammation
or other “defense” mechanisms [1]. If those problems are
overcome, the implant body with the sensor interface is still
mostly recognized as a foreign body and in the long run is
encapsulated by scar tissue [2]. Fig. 1 exemplarily shows the
mechanism of that sensor failure pathway: 1.) The sensor
is brought into contact with blood. 2.) Proteins adhere to
the surface. 3.) Blood-platelets bind to protein layer and get
activated. 4.) Activated platelets and red blood-cells form a
tissue layer bound together by fibrin fibers. The plaque separates the sensor from the media under examination. The
sensor fails.
If we think of other biological systems, the sensor could be
covered by biofilm e.g. produced by exo-polysaccharide excreting bacteria in unsterile water. In this case, the sensor
loses its’ contact to the media of interest and fails.
Furthermore a simple, stiff implant is hardly able to stay in
a steady position relative to soft and highly adaptive tissue.
This may also alter the bio-system locally and result in signal
drift, offset or phase shift. To overcome these problems, a
classical approach is to coat the sensor area with highly toxic agents such as cytostatic or anti-proliferative drugs. To
avoid biofilm formation and foreign body reaction without
such toxins, a new stage of biocompatibility is required.
Biocompatibility based on physical and chemical effects to
mask the implant from being recognized as a foreign body
or as a substrate for proliferation: The “biologically invisible”
implant.
Experiments
Different approaches to improve implant-tissue interfaces
Funding: BMBF, Wachstumskern BASIS, FKZ: 03WKCB010
are known in literature [3]. Based on common techniques
of surface modifications, interfaces between biological
systems and sensor implants are under examination within
this project. These techniques involve wet and dry chemical
structuring of different materials and coatings with different
inorganic or polymer materials. The latter are mostly new
materials and are also investigated in terms of their long
term stability in biological systems and of the use as sensor
components.
Future objectives
One aspect of the project “Wachstumskern BASIS” is to find
ways to help implanted sensors to gain reliable data without
any temporal restrictions due to surrounding biological processes. Furthermore, the implanted Sensor should be protected from mechanical and chemical stresses altering its
function. A state should be reached where implants provide
an interface which is like the one of the surrounding tissue
while, at the same time, keeping a sensor as close as possible to the medium under examination. Biocompatibility supposed, these tasks cannot be handled by a single solution
but by a toolbox filled with a set of surface modifications,
coatings and interface designs, all of which should be highly
specialized and optimized for one field of application. Within the project “Wachstumskern BASIS”, researchers from
different disciplines work together to fill this toolbox and to
provide industrial partners with solutions to develop new
innovative products.
Fig.1: Example mechanism of biosensor failure due to foreign body reaction
according to [2].
[1] Y. Onuki et al.; “A review of the biocompatibility of implantable devices: current challenges to overcome foreign body
response”; Journal of Diabetes Science and Technology, Vol. 2, pp 1003-1015, 2008.
[2] M. Frost et al.;”In-vivo Chemical Sensors: Tackling Biocompatibility”, Analytical Chemistry, Vol. 78 (21), pp 7370–7377, 2006
[3] P. Thevenot et al.; “Surface Chemistry Influences Implant Biocompatibility”, Current Topics in Medicinal Chemistry, Vol. 8,
pp 270-280, 2008.
Contact
180
Stefan Hanitsch | +49 3677 69-3424 | stefan.hanitsch@tu-ilmenau.de
Automatic Multichannel Analyzer for Biological
Applications
M. Baca, D. Kürsten, A. Schober
Funding: Federal Ministry of Education and Research, Grant No. 16SV5473
A series of bioreactors were developed under the previous
phase of the OPTIMI project. These allow, on the one hand,
the observation of the complex response behavior of 3D cellular aggregates. On the other hand, separate cultivation of
cells in larger series and the determination of the dose-dependent response behavior of cells to toxic substances and
substance combinations of pharmaceuticals and xenobiotics
are generally possible.
While a bioreactor provides an environment where the cell
culture can be tested for various substances, some means of
optical readout and controlling of the whole system is necessary as well. A majority of biological assays use either fluorescence or photometry techniques as a means of readout.
Recently a complex analyzer control unit which addresses all
above mentioned needs was developed. Its purpose is also
to control fluidic elements and to provide an interface to the
user and/or host system. The concept of the analyzer is very
universal and supports applications based on fluorescence
techniques (e.g. ELISA, live/dead assay, ROS assay, etc.) as
well as photometric techniques (LDH assay, Albumin TMB
product, etc.).
The possibility of interfacing with various types of syringe
pumps and capacitive sensors extend its applicability for
diverse segmented flow assays. One such possible application is mixing and segmenting diverse analyte samples with
microorganisms like E. Coli. After some incubation time a
spectroscopic analysis provides information about cells vitality, which indirectly indicates toxicity of the tested samples.
The integration of system control unit, bioreactor and fluidic elements allows online analysis of various cell culture
metabolites such as albumin. In this application a sandwich
variant of ELISA (Enzyme Linked Imunosorbent Assay) which
is well established for micro-titer plate techniques was modified for flow-chemistry setup.
In the analyzer setup, the analyte and other reactants are
pumped through the fluidic pathways (FEP / C-Flex hoses)
controlled by valves and peristaltic pumps into the PVC capillary where the detection takes place. The sequencing of
the whole assay is controlled by analyzer control unit.
Using this method it was possible to detect less than 100pM
concentration of albumin. Although very sensitive, the method is relative slow. The complete sequence for 1 point of
measurement takes nearly 3 hours. To make measurement
faster and more reliable, some means of paralleling are necessary. For that reason the analyzer is provided with 8-positions sample changer, which allows parallel measurement
of up to 8 samples or reference standards.
Future development of the system will provide support for
mesuring more samples. In general it can be adapted to almost any fluorimetric or photometric assay with the added
benefit of portability and automation.
Fig.1: ELISA Analyzer system layout - 5 channel version
Contact
Fig. 2: ELISA Analyzer - fluidic part
Fig. 3: ELISA Analyzer - electronic
control unit
181
Biotechnology & Life Science
Micro-Blood pH Analyzer
M. Donahue, M. Kittler, B. Lübbers, P. Mai, A. Schober
Nano-Bio System Technology
Funding: Thüringer Aufbaubank (TAB)
Oxygen is required for the aerobic metabolism of Glucose
and to ensure an energy supply which will maintain a healthy state of the fetus during labor and birth (Fig. 1). Periods
of time in which no oxygen is available result in anaerobic
metabolism of Glucose and very little resulting energy from
the store, which is rapidly depleted. This can quickly become
very critical during birth and result in asphyxiation of the
fetus, resulting in brain damage or even death. Cardiotocography is one routine way of assessing the well-being of the
baby during birth. This records the fetal heartbeat and uterine contractions. An abnormal heart rate during labor may
indicate a compromised oxygen supply of the fetus, in which
case fetal blood sampling can be used to further evaluate
the situation and allow for C-section decisions to be made
before permanent damage occurs [1].
The sampling technique for fetal blood analysis is difficult,
as the sampling site is at the scalp of the baby, and it is
necessary to work with extremely small volumes of blood.
State of the art blood gas analyzers require at least 35 µl of
blood whereas the system developed here successfully operates with a maximum sample volume of 10 µl. Air bubbles
present an additional problem in the measurement process.
Though this may also affect the micro-blood pH analyzer,
the low required sample volume aides in ensuring that the
blood sample may be successfully measured.
To measure the pH of acquired blood samples, sensors
based on AlGaN/GaN ion-sensitive field effect transistors
(ISFETs) are used. The sensor chip (Fig. 2) consists of two
ISFETs, a temperature meander and two metal electrodes.
The gate of these transistors is an open area between the
drain and source contacts where the GaN surface comes in
contact with the fluid to be analyzed. Due to spontaneous
and piezoelectric polarization within the AlGaN/GaN heterostructure, a two-dimensional electron gas (2DEG) with a
high sheet carrier concentration forms at the interface of
AlGaN and GaN [2]. This 2DEG acts as the channel of the ISFET and the current is influenced by the pH level of the fluid
sample at the gate surface making very accurate determination of the pH value possible. The AlGaN/GaN structure also
offers chemical stability, an important asset when working
with aggressive materials such as blood.
To demonstrate measurement accuracy and precision,
measurement series were carried out versus a commercial
blood gas analyzer. The RiLiBÄK requirement of < 0.4%
deviation from the true pH value has been fulfilled by the
developed micro-blood analyzer for several measurement
series, one example shown in Figure 3. In summary, a microblood pH-analyzer capable of accurate measurements with
blood sample volumes of less than 10µl has been realized;
however, clinical tests are still necessary to prove suitability
for daily use in labor and delivery.
Fig. 1: Healthy newborn
Fig. 3: Measurement results vs commercial blood gas analyzer
Fig. 2: AlGaN/GaN ISFET sensor chip
[1] E. Saling. Das Kind im Bereich der Geburtshilfe. Georg Thieme Verlag, Stuttgart, 1966.
[2] O. Ambacher, J. Smart, J. R. Shealy, N. G. Weimann, K. Chu, M. Murphy, W. J. Schaff, L. F. Eastman, R. Dimitrov, L. Wittmer, M.
Stutzmann, W. Rieger, and J. Hilsenbeck. Journal of Applied Physics, 85(6):3222–3233, 1999
Contact
182
BioMEMS – a Valuable Tool for Translational Research
in Life Sciences
R. Fischer, M. Stubenrauch, D. Voges, U. Fröber, H. Witte
Introduction
Due to regulatory and safety provisions, clinical and animal
studies for drug and biomaterial testing purposes are becoming more and more complex and costly in terms of time,
labor and finance. Hence, in-vitro-models are needed to
prevent stagnation of innovation. However, there is a lack
of transferability of experimental results from conventional
in-vitro-models to organisms.
Because of that, successful cultivation of biological cells and
tissues in artificial environments requires in-vivo-like ambient conditions. These can be characterized by physical and
chemical parameters like temperature, pressure, presence of
forces on the biological material and the availability of nutrients, growth factors as well as gases like O2 and CO2. Additionally, cell-cell-interactions and cell-matrix-interactions
affect growth and development of cells.
Cell and Tissue Culture in BioMEMS
To study the effects of those stimuli described above, silicon-glass Bio-Micro-Electro-Mechanical Systems (BioMEMS)
have been developed [1]. That kind of BioMEMS are miniaturized experimental platforms to maintain temperature
and nutrient supply as well as observation of cell cultures. In
contrast to standard cell culture systems like Petri dishes and
tissue culture flasks, BioMEMS allow for a dedicated and
precise variation of environmental parameters, so that their
impact on proliferation, differentiation and gene expression
of cells can be analyzed.
Biocompatibility of Materials, Surfaces and Processes
To demonstrate the suitability for cell and tissue culture for
those systems, it was necessary to verify the biocompatibility of materials and surfaces. By use of custom-tailored biocompatibility tests, we could provide evidence that silicon
and glass surfaces show biocompatibility properties resembling those of polystyrene, a common material for cell culture products. The viability of cells could even be increased
by application of adequate organic coatings [2]. Additionally, biocompatibility of processes like seeding, feeding and
measurement is necessary. Especially the formation of bubbles in liquid cell culture media is critical, since cell material
can be damaged by contact with the gas/liquid interface. To
prevent bubble formation, outgassing of culture media has
to be controlled by adjustment of media properties or introduction of micro air traps. Finally, the integration of hydrogel scaffolds [3] for 3D cell culture and the processing of sophisticated cell cultures (e.g. primary cells and co-cultures)
are further steps towards in-vivo-like growth conditions.
Taken as a whole, the use of BioMEMS gives us the opportunity to create micro-environments which are closer to the invivo-state, enabling for transferability of in-vitro experimental results. Thus BioMEMS represent a novel and valuable
tool for translational biological, medical and pharmaceutical
research.
Fig. 1: Silicon-glass BioMEMS featuring media supply channels and heat
exchanger, fluidic connections are realized by polymer connectors
Fig. 2: Primary human osteoblasts in a BioMEMS after four days, viable cells
are stained green, dead cells are stained red (fluorescence)
[1] Witte, H.; et al.. Integration of 3D cell cultures in fluidic microsystems for biological screenings. Engineering in Life Sciences
(2011), 11(2), S. 140–147
[2] Fischer, R.; et al.. Cell cultures in microsystems – biocompatibility aspects. Biotechnology and Bioengineering (2011), 108 (3),
S. 687–693
[3] Stubenrauch, M.; et al. BioMEMS for Processing and Testing of Hydrogel-Based Biointerfaces BMT 2012, 16. DGBMT
Jahrestagung, Jena, Germany (16.-19.09.2012)
Contact
Robert Fischer | +49 3677 69-4687 | robert.fischer@tu-ilmenau.de
183
Biological Inspiration of the Technical Design of
Tactile Sensors - the Tactile Hairs of Mammals
D. Voges, K. Carl, M. Haase & H. Witte
Many mammals use tactile hairs (the so-called vibrissae
or whiskers) for orientation in dark environments. The implementation of the biological principles into technical
developments enables machines to analyze and recognize
unknown environments. One base for the use in technology
is structural und functional analysis of the biological material. Our current studies aim at the analysis of mystacial vibrissae, the tactile hairs in the snout region of e.g. a rat. The
tactile hairs of the forelimb (carpal vibrissae) of rats are also
examined to be able to conclude from their properties on a
similar or identical behavior and therefore on a functionality
comparable to that of the yet more intensely studied mystacial vibrissae. In preparation of the measurements different
methods of mechanical vibrissa fixations were analyzed, to
ensure reproducible and non-destructible research. After
construction and manufacturing of the “ideal” fixation, single vibrissae were measured with the Basalt Must system
(Tetra GmbH Ilmenau).
The bending stiffnesses and bending lines of rats’ samples
were ascertained. Conclusions could be drawn from these
bending properties on the functionality and bending behavior of the tactile hairs. In comparison with the theoretical and practical examination of the mystacial vibrissae, a
qualitatively similar bending behavior could be shown for
the carpal vibrissae. The differentiation of both hair types
to body hairs is pointed out clearly. The importance of the
rat‘s spatial orientation is not only determined by the mystacial vibrissae, but also by the carpal vibrissae. Geometry
and mechanical characteristics of animal tactile hairs are of
great interest for the biologically inspired transfer to tactile
sensors. As a first step, they can be realized by a cone made
of uniform material. The control strategies and the function
of the medullary cavity are subject to present research.
Fig. 1: Carpal vibrissae (foreleg of a rat)
Fig. 2: Share of components of a macro vibrissa at base, mid and tip. SEM of
vibrissa tip.
Fig. 3: Measurement setup for the
bending stiffness of vibrissae
[1] Carl, K.; Hild, W.; Mämpel, J.; Schilling, C.; Uhlig, R.; Witte, H. (2012): Characterisation of statical properties of rat’s whisker
system. IEEE Sensors Journal, 12 (2), 340 - 349
[2] Voges, D.; Carl, K.; Klauer, G.; Uhlig, R.; Schilling, C.; Behn, C.; Witte, H. (2012): Structural characterisation of the whisker
system of the rat. IEEE Sensors Journal, 12(2), 332 - 339
Contact
184
Hartmut Witte | +49 3677 69-2456 | hartmut.witte@tu-ilmenau.de
An Alternative Fiber-interferometer for Audiological
Research
T. Schmidt; C. Kupper; U. Gerhardt, E. Manske; H. Witte
We introduce the concept of a fiber coupled vibrometer for
measurements in the human ear canal. The system consists
of two laser diodes which are coupled to an outgoing fiber
by a Y-connector. The laser light can be shifted in frequency.
The fiber transfers the light to a ferrule with an attached
(glued) graded-index (GRIN) lens. The ferrule-grin-lens-complex is attached to a probe (otoplastic) which additionally
contains a speaker and a microphone. The system forms a
Fabry-Perot setup. The resonator is built by the tympanic
membrane and the grin lens. When the laser beam passes
the grin lens, the light partly is reflected, propagates back
into the fiber and acts like a reference beam. If the tympanon vibrates as a consequence of stimulation by a sound
source, the reflected light is modulated due to the Doppler effect. A problem which occurs during measurements
in the human ear is random mechanical vibration. Those vibrations are mainly caused by heart activity and breathing.
The measurement system is mounted to an otoplastic. The
ear canal is sealed by the otoplastic. This causes the formation of a residual volume which is comparable to those
used in standard acoustical measurements. The measurement system proposed will not fit into standard ear plugs.
One solution could be the design of a “standard otoplastic”.
To account for the special form of the human ear canal, we
analyzed the geometrical parameters of the ear canals of
about 35 volunteers (70 ears). Those data built the basis for
the design of an otoplastic geometry which fits into nearly
90% of the human ear canals investigated. The design provides also a canal for endoscopic devices for visual inspection
of the tympanic membrane. The sensor head was tested at a
dry temporal bone. The intention of this work is to develop
a reasonably priced audiological measurement device based
on optical measurement techniques. A fiber based FabryPerot interferometer, with a high spatial and time resolution, could be a solution to this problem.
Fig. 2: “Individualized” probe geometry
Fig.1: General probe geometry
Fig. 3: Analysing the ear canal geometries at three measurement positions A,
B and C
[1] Schmidt, T. et al., “Fiber coupled laser Doppler vibrometer of auditory research”. MEMRO2012 - The 6th International
Symposium on middle-ear mechanics in research and otology. Daegu, Korea 27. June - 1. July 2012
[2] Schmidt, T.; Witte, H., „Qualitative Kontrolle des Einflusses individueller Außenohrgeometrien auf dem Schalldruck am
Trommelfellvergleich zwischen Simulation und Messung. Erfurter Tage, Erfurt, Germany, 29. Nov. - 1. Dec. 2012
Contact
Tobias Schmidt | +49 3677 69-4688 | tobias.schmidt@tu-ilmenau.de
185
Small Sized Robots for Mobile Sensing Tasks
M. Fremerey1, S. Gorb2, L. Heepe2, H. Witte1
1
2
Chair of Biomechatronics, Ilmenau University of Technology
Department of Functional Morphology and Biomechanics, University of Kiel
The demand for flexibility of sensor network structures
provokes the need for mobile sensor carriers, e.g. for
surveillance and maintenance tasks in natural and technical environments (e.g. for gas leakage detection). Current technology offers the chance to realize these carriers as miniaturized mobile robots. Thereby due to
modern communication technology these robots may
act autonomously as well as in a member of a swarm.
Accordingly, here two small sized robots for different terrains are introduced: 1.) MaTBot is able to climb technical
surfaces like glass [1], and 2.) wheg-driven robot WARMOR
is designed for locomotion in flat and structured terrain
[2]. Both robots are remote controlled using XBee modules in combination with an ARDUINO™ microcontroller.
MaTBot is a tank-like climbing robot driven by two tracks.
Each track is coated with a dry adhesive micropatterned
tape inspired by the tarsal hairs of the male Chrysomelidae beetles. The authors determined the contribution of
size and arrangement of the micropatterned tape to find
an optimum balance between adhesive force, angle of inclination, and maneuverability by the use of MaTBot. The
current version has a dimension of 90 mm ∙ 60 mm ∙ 13
mm, weighs some 60 g and is able to climb reproducibly on a glass surface inclined by 64° to the horizontal.
WARMOR focuses on the use of whegs (wheg = combination of wheel and leg(s) with the ability to overcome obstacles) as adaptive transmission elements to move as well in
even as in uneven terrain. Biomimetic analyses point to a
high potential of tunable elasticity for means of adaptivity to
ground structures, in order to smoothen locomotion and to
obtain optimized gait patterns. Therewith this approach is
an addition to existing wheg-driven robots like RHex (Boston
Dynamics). The current robot has a dimension of 85 mm ∙
100 mm ∙ 30 mm and a weight of 130 g. First experiments
show a good maneuverability on grassland and rough gravel.
Fig. 1: First outdoor tests of WARMOR performed on grassland and rough gravel
[1] Fremerey M, Djordjevic G S. & Witte H (2012). WARMOR: Whegs Adaptation and Reconfiguration of MOdular Robot with
Tunable Compliance, Biomimetic and Biohybrid Systems, Lecture Notes in Computer Science Volume 7375, 345-346
[2] Fremerey M, Gorb S, Heepe L, Kasper D & Witte H (2011). MaTBot: A Magneto Adhesive Track Robot for the inspection of
smooth artifical substrates. Proc. The 5th International Symposium of Animals and Machines (AMAM 2011), Awaji,
Japan, 19 – 20
Contact
186
Max Fremerey | +49 3677 69-1803 | maximilian-otto.fremerey@tu-ilmenau.de
SCIENTIFIC PUBLICATIONS
Contents
Inhalt
Facts and Figures …………………………………………………….……………………..
2
Members of the Institute ………………………………..………………………………
32
Research Activities .………………………………………………………..……………….
76
Scientific Publications ………………………………………………………………….…
187
Journal Articles …………………………………………………………………….
188
Books /Book chapters …………………………………………………………….
200
Selected Conference Proceedings ……………………………………….……..
202
Selected Invited Talks ………………………………………………….…………
207
Conference Contributions (selected) ………………………………….………
209
Venia Legendi ………………………………………………………….…………..
220
Doctorate Theses ………………………………………………………….………
220
Theses
Contact
187
Scientific Publications
Journal Articles
Abahmane, L.; Köhler, J.M.; Groß, G.A.
Gold nanoparticle-catalyzed synthesis of propargylamines: the traditional
A3-multicomponent reaction performed as a two-step flow process
Chemistry: a European Journal 17 (2011) 3005-3010
Abd El-Maksoud, R.H.; Hillenbrand, M.; Sinzinger, S.; Sasian, J.
Optical performance of coherent and incoherent imaging systems in the
presence of ghost images
Applied Optics 51 (2012) 7134-7143
Ahola, S.; Telkki, V.-V.; Stapf, S.
Velocity distributions in a micromixer measured by NMR imaging
Lab on a chip: miniaturisation for chemistry and biology 12 (2012) 1823
Al Mustafa, N.; Granzner, R.; Polyakov, M.; Racko, J.; Mikolasek, M.;
Breza, J.; Schwierz, F.
The coexistence of two-dimensional electron and hole gases in GaNbased heterostructures
Journal of Applied Physics 111 (2012) 044512
Alamin, B.; Jazizadeh, B.; Kherani, N.P.; Rangelow, I.W.
Development and modeling of an electrothermally MEMS microactuator
with an integrated microgripper
Journal of micromechanics and microengineering 21 (2011) 125026
Alay-e-Abbas, S.M.; Wong, K.M.; Noor, N.A.; Shaukat, A.; Lei, Y.
An ab-initio study of the structural, electronic and magnetic properties of
half-metallic ferromagnetism in Cr-doped BeSe and BeTe
Solid state sciences 14 (2012) 1525-1535
Alferenok, A.; Werner, M.; Gramss, M.; Luedtke, U.; Halbedel, B.
Numerical optimization of the magnet system for the Lorentz Force
Velocimetry of electrolytes
International Journal of Applied Electromagnetics and Mechanics 38
(2012) 79-92
Altenburg, J.; Kröger, J.; Wehling, O.; Sachs, B.; Lichtenstein, I.;
Berndt, R.
Local gating of an Ir(111) surface resonance by graphene islands
Physical Review Letters 108 (2012) 206805
Altmann, B.; Ahrens, R.; Welle, A.; Dinglreiter, H.; Schneider, M.;
Schober, A.
Microstructuring of multiwell plates for three-dimensional cell culture
applications by ultrasonic embossing
Biomedical microdevices : an international journal. 14 (2012) 291-301
Augustin, S.; Fröhlich, T.; Mammen, H.; Ament, C.; Güther, T.
Thermoelemente für den Einsatz in Abgassystemen von
Verbrennungsmotoren
tm - Technisches Messen 79 (2012) 472-477
Augustin, S.; Fröhlich, T.; Mammen, H.; Irrgang, K.; Meiselbach, U.
Determination of the dynamic behaviour of high-speed temperature
sensors
Measurement Science and Technology 23 (2012) 074024
Augustin, S.; Fröhlich, T.; Marin, S.; Lehmann, H.
Fixpunktthermometer für kleine Rohrquerschnitte
Baer, M.; Kleindienst, R.; Sinzinger, S.
Replication diffractive optical elements in synthetic quartz glass using the
sol-gel-process
Photonik international 7 (2012) 45-47
Baer, M.; Kleindienst, R.; Sinzinger, S.
Replikation diffraktiver optischer Elemente aus synthetischem Quarzglas
nach dem Sol-Gel-Verfahren
Photonik: Fachzeitschrift für die optischen Technologien 43 (2011) 6, 38
Balzer, F.; Gerhardt, U.; Hausotte, T.; Manske, E.; Jäger, G.
Fibre-coupled monochromatic zero-point sensor for precision positioning
systems using laser interferometers
Balzer, F.; Hausotte, T.; Vorbringer-Dorozhovets, N.; Manske, E.;
Jäger, G.
Tactile 3D microprobe system with exchangeable styli
Contact
188
Bartsch, H.; Geiling, T.; Müller, J.
A LTCC low-loss inductive proximity sensor for harsh environments
Sensors and Actuators A: Physical 175 (2012) 28–34
Bartsch, H.; Albrecht, A.; Hoffmann, M.; Müller, J.
Microforming process for embossing of LTCC tapes
Journal of Micromechanics and Microengineering 22 (2012) 015004
Belkhir, N.; Bouzid, D.; Lakhedari, F.; Aliouane, T.; Rädlein, E.
Characterization of glass surface damaged by alumina abrasive grains
Journal of non-crystalline solids 357 (2011) 2882-2887
Bergmann, J.P.; Stambke, M.
Potential of laser-manufactured polymer-metal hybrid joints
Physics Procedia 39 (2012) 84-91
Boškovic, D.; Löbbecke, S.; Groß, G.A.; Köhler, J.M.
Residence time distribution studies in microfluidic mixing structures
Chemical engineering & technology 34 (2011) 361-370
Brandel, O.; Wetzstein, O.; May, T.; Töpfer, H.; Ortlepp, T.; Meyer,
H.G.
RSFQ electronics for controlling superconducting polarity switches
Superconductor science and technology 25 (2012) 125012
Brückner, K.; Niebelschütz, F.; Tonisch, K.; Förster, H.; Cimalla, V.;
Stephan, R.; Pezoldt, J.; Stauden, T.; Ambacher, O.; Hein, A.
Micro- and nano-electromechanical resonators based on SiC and group
III-nitrides for sensor applications
physica status solidi A 208 (2011) 357-376
Brückner, S.; Barrigón, E.; Supplie, O.; Kleinschmidt, P.; Dobrich, A.;
Löbbel, C.; Rey-Stolle, I.; Döscher, H.; Hannappel, T.
Ge(100) surfaces prepared in vapor phase epitaxy process ambient
physica status solidi (RRL) 6 (2012) 178-180
Brückner, S.; Döscher, H.; Kleinschmidt, P.; Supplie, O.; Dobrich, A.;
Hannappel, T.
Anomalous double-layer step formation on Si(100) in hydrogen process
ambient
Physical Review B 86 (2012) 195310
Brückner, S.; Supplie, O.; Barrigón, E.; Luczak, J.; Kleinschmidt, P.;
Rey-Stolle, I.; Döscher, H.; Hannappel, T.
In situ control of As dimer orientation on Ge(100) surfaces
Applied physics letters 101 (2012) 121602
Buljubasich, L.; Blümich, B.; Stapf, S.
Monitoring mass transport in heterogeneously catalyzed reactions by
field-gradient NMR for assessing reaction efficiency in a single pellet
Journal of magnetic resonance 212 (2011) 47-54
Bund, A.
Elektrochemische Grundlagen der Pulsabscheidung
Galvanotechnik 103 (2012) 500-504
Bund, A.;
Waldfried Plieth: a tribute on the occasion of his 75th birthday
Journal of solid state electrochemistry 16 (2012) 3399-3400
Camargo, M.; Diaz, I.; Schmidt, U.; Bund, A.
Synthesis, characterization and corrosion resistance of electroless nickelphosphorus and nickel-phosphorus-SiC coatings: a comparative study
Cao, J.; Kürsten, D.; Schneider, S.; Knauer, A.; Günther, P.M.; Köhler,
J.M.
Uncovering toxicological complexity by multi-dimensional screenings in
microsegmented flow: modulation of antibiotic interference by
nanoparticles
Lab on a chip 12 (2012) 474-484
Cao, J.; Kürsten, D.; Schneider, S.; Knauer, A.; Martin, K.; Köhler, J.M.
A ternary toxicity study using microfluid segment technique
Toxicology letters 211 (2012), S, 148
Cao, J.; Kürsten, D.; Schneider, S.; Köhler, J.M.
Stimulation and inhibition of bacterial growth by caffeine dependent on
chloramphenicol and a phenolic uncoupler - a ternary toxicity study using
microfluid segment technique
Journal of biomedical nanotechnology 8 (2012) 770-778
Cârâc, G.; Ispas, A.
Effect of nano-Al2O3 particles and of the Co concentration on the
corrosion behavior of electrodeposited Ni-Co alloys
Ellrich J.; Kruk R.; Brand R.A.; Hahn H.; Hütten A.; Lei Y.
Mössbauer spectroscopy and magnetization of ordered arrays of ultrathin
FePt nanodisks with Perpendicular magnetization
Hyperfine Interactions 212 (2012) 135
Carl, K.; Hild, W.; Mämpel, J.; Schilling, C.; Uhlig, R.; Witte, H.
Characterization of statical properties of rat's whisker system
IEEE sensors journal 12 (2012) 340-349
Engmann, S.; Machalett, M.; Turkovic, V.; Rösch, R.; Rädlein, E.;
Gobsch, G.; Hoppe, H.
Photon recycling across a ultraviolet-blocking layer by luminescence in
polymer solar cells
Chory, C.; Riedel, I.; Kruska, C.; Heimbrodt, W.; Feser, C.; Beenken,
W.J.D.; Hoppe, H.; Parisi, J.
Synthesis and characterization of organically linked ZnO nanoparticles
Cole, J.J.; Barry, C. R.; Knuesel, R. J.; Wang, X.; Jacobs, H.O.
Nanocontact Electrification: Patterned Surface Charges Affecting
Adhesion, Transfer, and Printing
Langmuir 27 (2011) 7321
Crevecoeur, G.; Baumgarten, D.; Steinhoff, U.; Haueisen, J.; Trahms,
L.; Dupré, L.
Advancements in magnetic nanoparticle reconstruction using sequential
activation of excitation coil arrays using magnetorelaxometry
IEEE transactions on magnetics 48 (2012) 1313-1316
Cuibus, F.M.; Ispas, A.; Bund, A.; Ilea, P.
Square wave voltammetric detection of electroactive products resulting
from electrochemical nitrate reduction in alkaline media
Journal of electroanalytical chemistry 675 (2012) 32-40
Diethold, C.; Hilbrunner, F.
Force measurement of low forces in combination with high dead loads by
the use of electromagnetic force compensation
Measurement science and technology 23 (2012) 074017
Dondapati, S.K.; Ludemann, M.; Müller, R.; Schwieger, S.; Schwemer,
A.; Händel, B.; Kwiatkowski, D.; Djiango, M.; Runge, E.; Klar, T.A.
Voltage-induced adsorbate damping of single gold nanorod plasmons in
aqueous solution
Nano letters 12 (2012) 1247-1252
Döscher, H.; Supplie, O.; May, M.M.; Sippel, P.; Heine, C.; Muñoz,
A.G.; Eichberger, R.; Lewerenz, H.-J.; Hannappel, T.
Epitaxial III-V films and surfaces for photoelectrocatalysis
ChemPhysChem 13 (2012) 2899-2909
Duchačkova, L.; Roithova, J.; Milko, P.; Zabka, J.; Tsierkezos, N.;
Schröder, D.
Comparative study of mono- and dinuclear complexes of late 3d-metal
chlorides with N,N-dimethylformamide in the gas phase
Inorganic chemistry 50 (2011) 771-782
Eberle, C.; Ament, C.
Identifiability and online estimation of diagnostic parameters with in the
glucose insulin homeostasis
Biosystems 107 (2012) 135-141
Eberle, C.; Ament, C.
The unscented Kalman filter estimates the plasma insulin from glucose
measurement
Biosystems 103 (2011) 67-72
Engmann, S.; Turkovic, V.; Denner, P.; Hoppe, H.; Gobsch, G.
Optical order of the polymer phase within polymer/fullerene blend films
Journal of Polymer Science B 50 (2012) 1363-1373
Engmann, S.; Turkovic, V.; Gobsch, G.; Hoppe, H.
Ellipsometric investigation of the shape of nanodomains in
polymer/fullerene films
Advanced energy materials 1 (2011) 684-689
Engmann, S.; Turkovic, V.; Hoppe, H.; Gobsch, G.
Aging of polymer/fullerene films: temporal development of composition
profiles
Synthetic metals 161 (2012) 2540-2543
Erismis, H.; Nemec, D.; Geiss, M.; Skakalova, V.; Ritter, U.; Kolaric, I.;
Roth, S.
Penetration based CNT/Sol-Gel composite films and their remarkable
electrical properties
Microelectronic engineering 88 (2011) 2513-2525
Faber, C.; Attaccalite, C.; Olevano, V.; Runge, E.; Blase, X.
First-principles GW calculations for DNA and RNA nucleobases
Faber, C.; Janssen, J.L.; Côté, M.; Runge, E.; Blase, X.
Electron-phonon coupling in the C60 fullerene within the many-body GW
approach
Fang Y.G.; Wong K.M.; Lei Y.
Synthesis and field emission properties of different ZnO nanostructure
arrays
Nanoscale Research Letters 7 (2012) 197
Fatkullin, N.; Gubaidullin, A.; Mattea, C.; Stapf, S.
On the theory of the proton free induction decay and Hahn echo in
polymer systems: the role of intermolecular magnetic dipole-dipole
interactions and the modified Anderson-Weiss approximation
Journal of Chemical Physics 137 (2012) 224907
Fatkullin, N.; Mattea, C.; Stapf, S.
A simple scaling derivation of the shear thinning power-law exponent in
entangled polymer melts
Polymer 52 (2011) 3522-3525
Feierabend, M.; Fremerey, M.; Griebel, S.; Witte, H.; Zentner, L.
Adaptives Gewebe mit druckgesteuerter Steifigkeit
Wund-Management 8 (2012) 208-210
Eger, W.A.; Presselt, M.; Jahn, B.O.; Schmitt, M.; Popp, J.; Anders, E.
Metal-mediated reaction modeled on nature: the activation of
isothiocyanates initiated by zinc thiolate complexes
Inorganic chemistry 50 (2011) 3223-3233
Fernekorn, U.; Hampl, J.; Weise, F.; Augspurger, C.; Hildmann, C.;
Klett, M.; Läffert, A.; Gebinoga, M.; Weibezahn, K.-F.; Schlingloff, G.;
Worgull, M.; Schneider, M.; Schober, A.
Microbioreactor design for 3-D cell cultivation to create a
pharmacological screening system
Engineering in life sciences 11 (2011) 133-139
Eichardt, R.; Baumgarten, D.; Petković, B.; Wiekhorst, F.; Trahms, L.;
Haueisen, J.
Adapting source grid parameters to improve the condition of the
magnetostatic linear inverse problem of estimating nanoparticle
distributions
Medical & Biological Engineering & Computing 50 (2012) 1081-1089
Fiedler, J.; Heera, V.; Skrotzki, R.; Herrmannsdörfer, T.; Voelskow, M.;
Mücklich, A.; Facsko, S.; Reuther, H.; Perego, M.; Heinig, K.-H.;
Schmidt, B.; Skorupa, W.; Gobsch, G.; Helm, M.
Superconducting Ga-overdoped Ge layers capped with SiO2: structural
and transport investigations
Eisenhardt, A.; Eichapfel, G.; Himmerlich, M.; Knübel, A.; Passow, T.;
Wang, Y.; Benkhelifa, F.; Aidam, R.; Krischok, S.
Valence band offsets at oxide/InN interfaces determined by X-ray
photoelectron spectroscopy
physica status solidi C 9 (2012) 685
Fiedler, J.; Heera, V.; Skrotzki, R.; Herrmannsdörfer, T.; Voelskow, M.;
Mücklich, A.; Oswald, S.; Schmidt, B.; Skorupa, W.; Gobsch, G.;
Wosnitza, J.; Helm, M.
Superconducting films fabricated by high-fluence Ga implantation in Si
Eisenhardt, A.; Himmerlich, M.; Krischok, S.
Characterization of as-grown and adsorbate-covered N-polar InN surfaces
using in-situ photoelectron spectroscopy
physica status solidi A 209 (2012) 45
Fischer, R.; Steinert, S.; Fröber, U.; Voges, D.; Stubenrauch, M.;
Hofmann, G. O.; Witte, H.
Cell cultures in microsystems: biocompatibility aspects
Biotechnology & Bioengineering 108 (2011) 687-693
Contact
189
Fritzsche, P.; Niemöller, S.; Laqua, D.; Husar, P.
ECG-multichannel frontend for quick stimulus response based on FPGA
with implemented real-time, online QRS detection algorithm
Biomedizinische Technik 57 Suppl.1 (2012) 619-622
Göckeritz, R.; Schmidt, D.; Beleites, M.; Seifert, G.; Krischok, S.;
Himmerlich, M.; Pezoldt, J.
High Temperature Gaphene Formation on Capped and Uncapped SiC
Materials Science Forum 679-680 (2011), 785-788
Funfak, A.; Cao, J.; Knauer, A.; Martin, K.; Köhler, J.M.
Synergistic effects of metal nanoparticles and a phenolic uncoupler using
microdroplet-based two-dimensional approach
Journal of environmental monitoring 2 (2011) 410-415
Göckeritz, R.; Tonisch, K.; Jatal, W.; Hiller, L.; Schwierz, F.; Pezoldt, J.
Side gate graphene and AlGaN/GaN unipolar nanoelectronic devices
Advanced Materials Research 324 (2011) 427-430
Garcia-Ariza, A.-P.; Rubio, L.
Computing the closest positive definite correlation matrix for
experimental MIMO channel analysis
IEEE Communications Letters 15 (2011) 1038-1040
Garcia, A.; Trautwein, U.; Müller, R.; Wollenschläger, F.; Thomä, S.;
Kunisch, J.; de la Torre, I.; Felbecker, R.; Peter, M.; Keusgen, W.
60 GHz Short-Range Communications: Channel Measurements, Analysis
and Modelling
International Journal of Microwave and Wireless Technologies 3 (2011)
201
Gopakumar, G.; Brumme, T.; Kröger, J.; Toher, C.; Cuniberti, G.;
Berndt, R.
Coverage-driven electronic decoupling of Fe-Phthalocyanine from a
Ag(111) substrate
Journal of Physical Chemistry C 115 (2011) 12173
Granzner, R.; Tschumak, E.; Kittler, M.; Tonisch, K.; Jatal, W.; Pezoldt,
J.; As, D.; Schwierz, F.
Vertical design of cubic GaN-based high electron mobility transistors
Gattnar, E.; Ekinci, O.; Detschew, V.; Eck, R.
Interoperabilität in der Diagnostik und Behandlung zeitkritischer
Erkrankungen
MDI : Forum der Medizin-Dokumentation und Medizin-Informatik 14
(2012) 108-112
Grechnev, G.E.; Desnenko, V.A.; Fedorchenko, A.V.; Panfilov, A.S.;
Prylutskyy, Y.I.; Grybova, M.I.; Matzui, L.Y.; Ritter, U.; Scharff, P.;
Kolesnichenko, Y.A.
Magnetic properties of multi-walled carbon nanotubes modified with
cobalt = Magnetische Eigenschaften von mit Kobalt modifizierten
mehrwandigen Kohlenstoffnanoröhren
Materialwissenschaft und Werkstofftechnik 42 (2011) 29-32
Gebinoga, M.; Mai, P.; Donahue, M.; Kittler, M.; Cimalla, I.; Lübbers,
B.; Klett, M.; Lebedev, V.; Silveira, L.; Singh, S.; Schober, A.
Nerve cell response to inhibitors recorded with an aluminumgalliumnitride/galliumnitride field-effect transistor
Journal of neuroscience methods 206 (2012) 195-199
Grieseler, R.; Klaus, J.; Stubenrauch, M.; Tonisch, K.; Michael, S.;
Pezoldt, J.; Schaaf, P.
Residual stress measurements and mechanical properties of AlN thin films
as ultra-sensitive materials for nanoelectromechanical systems
Philosophical Magazine 92 (2012) 3392
Geiling, T.; Welker, T.; Bartsch, H.; Müller, J.
Design and Fabrication of a Nitrogen Monoxide Measurement Device
Based on Low Temperature Co-Fired Ceramics
International Journal of Applied Ceramic Technology 9 (2012) 37–44
Grieseler, R.; Kups, T.; Wilke, M.; Hopfeld, M.; Schaaf, P.
Formation of Ti2AlN nanolaminate films by multilayer-deposition and
subsequent rapid thermal annealing
Materials Letters 82 (2012) 74-77
Geinitz, V.; Kletzin, U.; Weiß, M.
Draht und Band im Blick
Draht: deutsche Ausgabe der Zeitschrift für die Feder-, Draht- und
Kabelindustrie 62 (2011) 34-36
Grieseler, R.; Welker, T.; Müller, J.; Schaaf, P.
Bonding of low temperature co-fired ceramics to copper and to ceramic
blocks by reactive aluminum/nickel multilayers
Physica status solidi A 209 (2012) 512-518
Gevorgyan, S.A.; Medford, A.J.; Bundgaard, E.; Sapkota, S.B.;
Schleiermacher, H.-F.; Zimmermann, B.; Würfel, U.; Chafiq, A.; LiraCantu, M.; Swonke, T.; Wagner, M.; Brabec, C.J.; Haillant, O.;
Voroshazi, E.; Aernouts, T.; Steim, R.; Hauch, J.A.; Elschner, A.;
Pannone, M.; Xiao, M.; Langzettel, A.; Laird, D.; Lloyd, M.T.; Rath, T.;
Maier, E.; Trimmel, G.; Hermenau, M.; Menke, T.; Leo, K.; Rösch, R.;
Seeland, M.; Hoppe, H.
An inter-laboratory stability study of roll-to-roll coated flexible polymer
solar modules
Solar Energy Materials & Solar Cells 95 (2011) 1398-1416
Grieseler, R.; Kups, T.; Wilke, M.; Hopfeld, M.; Schaaf, P.
Formation of Ti2AlN nanolaminate films by multilayer-deposition and
subsequent rapid thermal annealing
Ghoshal, S.; Denner, P.; Stapf, S.; Mattea, C.
Structural and dynamical heterogeneities in PVA films induced by
evaporation during the formation process
Chemical Physics Letters 515 (2011) 231-234
Ghoshal, S.; Denner, P.; Stapf, S.; Mattea, C.
Study of the formation of poly(vinyl alcohol) films
Macromolecules 45 (2012) 1913-1923
Ghoshal, S.; Mattea, C.; Du, L.; Stapf, S.
Concentration and humidity effect on gelatin films studied by NMR
Zeitschrift für physikalische Chemie 226 (2012) 1259-1270
Ginani, L. Selva; M., Jose Mauricio S.T.
Theoretical and practical aspects of robot calibration with experimental
verification
Journal of the Brazilian Society of Mechanical Sciences and Engineering
33 (2011) 1
Ginani, L.S.; Theska, R.
A novel approach to correction of optical aberrations in laser scanning
microscopy for surface metrology
Measurement Science & Technology 23 (2012) 074009
Göckeritz, R.; Pezoldt, J.; Schwierz, F.
Epitaxial graphene three-terminal junctions
Applied Physic Letters 99 (2011) 17311
Contact
190
Grimm, M.; Sharma, K.; Hein, M.; Thomä, S.
DSP-based mitigation of RF front-end non-linearity in cognitive wideband
receivers
Frequenz 66 (2012) 303-310
Großmann, M.; Schneider, C.
Groupwise frequency domain multiuser MMSE turbo equalization for
single carrier block transmission over spatially correlated channels
IEEE Journal of Selected Topics in Signal Processing 5 (2011) 1548-1562
Großmann, M.
Outage performance analysis and code design for three-stage MMSE
turbo equalization in frequency-selective Rayleigh fading channels
IEEE Transactions on Vehicular Technology 60 (2011) 473-484
Gubanov, V.O.; Biliy, M.M.; Rozhylo, O.V.; Strelchuk, V.V.; Nikolenko,
A.S.; Valakh, M.Y.; Prylutskyy, Y.I.; Ritter, U.; Scharff, P.
Low-frequency two-phonon modes step-like dispersion in resonance
raman scattering of single-walled carbon nanotubes
Guliyev, E.; Michels, T.; Volland, B.E.; Ivanov, T.; Hofer, M.; Rangelow,
I.W.
High speed quasi-monolithic silicon/piezostack SPM scanning stage
Guliyev, E.; Volland, B.E.; Sarov, Y.; Ivanov, T.; Klukowski, M.; Manske,
E.; Rangelow, I.
Quasi-monolithic integration of silicon-MEMS with piezoelectric actuators
for high-speed non-contact atomic force microscopy
Gutt, R.; Himmerlich, M.; Fenske, M.; Müller, S.; Lim, T.; Kirste, L.;
Waltereit, P.; Köhler, K.; Krischok, S.; Fladung, T.
Comprehensive surface analysis of GaN-capped AlGaN/GaN high electron
mobility transistors: Influence of growth method
Herber, A.; Hanisch, A.; Gnoerrlich, T.; Laqua, D.; Husar, P.
Design of power management in energy harvesting devices
Biomedizinische Technik 57 Suppl. 1 (2012) 251-254
Haensel, T.; Reinmöller, M.; Lorenz, P.; Beenken, D.; Krischok, S.;
Ahmed, U.
Valence band structure of cellulose and lignin studied by XPS and DFT
Cellulose 19 (2012) 1005
Herrmann, F.; Engmann, S.; Presselt, M.; Hoppe, H.; Shokhovets, S.;
Gobsch, G.
Correlation between near infrared-visible absorption, intrinsic local and
global sheet resistance of poly(3,4-ethylenedioxy-thiophene) poly(styrene
sulfonate) thin films
Applied Physics Letters 100 (2012) 253301
Haensel, T.; Zhang, X.; Wüstehoff, T.; Zhang, X.; Kosinskiy, M.;
Ulbrich, A.; Krischok, S.; Ahmed, U.
Kombinierte Fest- und Flüssigschmierung für Nanopositionier- und
Nanomessmaschinen
Tribologie + Schmierungstechnik 59 (2012)
Hesse, S.; Schäffel, C.; Mohr, H.-U.; Katzschmann, M.; Büchner, HansJ.
Design and performance evaluation of an interferometric controlled
planar nanopositioning system
Hähnlein, B.; Händel, B.; Pezoldt, J.; Töpfer, H.; Granzner, R.;
Schwierz, F.
Side-gate graphene field-effect transistors with high transconductance
Hillenbrand, M.; Mitschunas, B.; Wenzel, C.; Grewe, A.; Ma, X.; Feßer,
P.; Bichra, M.; Sinzinger, S.
Hybrid hyperchromats for chromatic confocal sensor systems
Advanced Optical Technologies 1 (2012) 187-194
Halbleib, A.; Gratkowski, M.; Schwab, K.; Ligges, C.; Witte, H.;
Haueisen, J.
Topographic analysis of engagement and disengagement of neural
oscillators in photic driving: a combined
electroencephalogram/magnetoencephalogram study
Journal of Clinical Neurophysiology 29 (2012) 33-41
Himmerlich, M.; Wang, Y.; Cimalla, V.; Ambacher, O.; Krischok, S.
Surface properties of stoichiometric and defect-rich indium oxide films
grown by MOCVD
Hartmann, C.; Blau, K.; Hein, A.
An integrated SiGe HBT pulselength modulator for class-S power
amplifiers in the UHF range
IEEE Transactions on Circuits and Systems 58 (2011) 62-69
Haueisen, J.; Fleissig, K.; Strohmeier, D.; Elsarnagawy, T.; Huonker, R.;
Liehr, M.; Witte, O.W.
Reconstruction of quasi-radial dipolar activity using three-component
magnetic field measurements
Clinical Neurophysiology 123 (2012) 1581-1585
Haueisen, J.; Funke, M.; Güllmar, D.; Eichardt, R.
Tangential and radial epileptic spike activity: different sensitivity in EEG
and MEG
Journal of Clinical Neurophysiology 29 (2012) 327-332
Hauke, A.; Krämer, J.; Laqua, D.; Ley, S.; Husar, P.
High performance triple LED driver with digitally controlled analog
dimming for reflection pulse oximetry
Hausotte, T.; Balzer, F.; Vorbringer-Dorozhovets, N.; Manske, E.
Surface and coordinate measurements with nanomeasuring machines
International Journal Nanomanufacturing 8 (2012) 467
Höche, D.; Schaaf, P.
Laser nitriding: investigations on the model system TiN ; a review
Heat and Mass Transfer 47 (2011) 519-540
Hochmuth, A.; Rädlein, E.; Conradt, R.; Prange, A.; Djambazov, P.
Creating a three component model glass surface with sol-gel chemistry: a
way to difficult meltable glass
Journal of the University of Chemical Technology and Metallurgy 47
(2012) 387-391
Hofherr, M.; Wetzstein, O.; Engert, S.; Ortlepp, T.; Berg, B.; Ilin, K.;
Henrich, D.; Stolz, R.; Töpfer, H.; Meyer, H.-G.; Siegel, M.
Orthogonal sequencing multiplexer for superconducting nanowire singlephoton detectors with RSFQ electronics readout circuit
Optics express 20 (2012) 28683-28697
Hofmann, A.; Laqua, D.; Husar, P.
Piezoelectric based energy management system for powering intelligent
implants and prostheses
Biomedizinische Technik. 57 Suppl. 1 (2012) 263-266
Hofmann, M.; Kampmann, R.; Sinzinger, S.
Perturbed Talbot patterns for the measurement of low particle
concentrations in fluids
Applied Optics 51 (2012) 1605-1615
Hausotte, T.; Percle, B.; Gerhardt, U.; Dontsov, D.; Manske, E.
Interference signal demodulation for nanopositioning and
nanomeasuring machines
Hofmann, M.; Müller, R.; Stoebenau, S.; Stauden, T.; Brodersen, O.;
Sinzinger, S.
Integrated optofluidic system for monitoring particle mass concentrations
based on planar emitter-receiver-units
Applied Optics 51 (2012) 7800-7809
Hausotte, T.; Percle, B.; Manske, E.; Füßl, R.; Jäger, G.
Measuring value correction and uncertainty analysis for homodyne
interferometers
Hoppe, H.; Seeland, M.; Muhsin, B.
Optimal geometric design of monolithic thin-film solar modules:
architecture of polymer solar cells
Solar Energy Materials & Solar Cells 97 (2012) 119-126
Hausotte, T.; Percle, B.; Vorbringer-Dorozhovets, N.; Baitinger, H.;
Balzer, F.; Gerhardt, U.; Manske, E.; Jäger, G.; Dontsov, D.
Interferometric Measuring Systems of Nanopositioning and
Nanomeasuring Machines
VDI-Berichte 2156 (2011) 343
Hoyer, D.; Nowack, S.; Bauer, S.; Tetschke, F.; Ludwig, S.; Moraru, L.;
Rudoph, A.; Wallwitz, U.; Jaenicke, F.; Haueisen, J.; Schleußner, E.;
Schneider, U.
Fetal development assessed by heart rate patterns - time scales of
complex autonomic control
Computers in biology and medicine 42 (2012) 335-341
Haverkamp, I.; Wetzstein, O.; Kunert, J.; Ortlepp, T.; Stolz, R.;
Meyer, H.-G.; Töpfer, H.
Optimization of a digital SQUID magnetometer in terms of noise and
distortion
Superconductor Science and Technology 25 (2012) 065012
Helbig, M.; Dahlke, K.; Hilger, I.; Kmec, M.; Sachs, J.
Design and test of an imaging system for UWB breast cancer detection
Frequenz 66 (2012) 387-394
Helbig, M.; Dahlke, K.; Hilger, I.; Kmec, M.; Sachs, J.
UWB microwave imaging of heterogeneous breast phantoms
Contact
Ilg, M.; Weis, C. D.; Schwartz, J.; Persaud, A.; Ji, Q.; Lo, C. C.; Bokor, J.;
Hegyi, A.; Guliyev, E.; Rangelow, I. W.; Schenkel, T.
Improved single ion implantation with scanning probe alignment
Journal of vacuum science & technology B 30 (2012) 06FD04
Ishchuk, V.; Volland, B.E.; Hauguth, M.; Cooke, M.; Rangelow, I.W.
Charging effect simulation model used in simulations of plasma etching
of silicon
Ispas, A.; Bund, A.
Pulse plating of tantalum from 1-butyl-1-methyl-pyrrolidinium
bis(trifluoromethylsulfonyl)amide ionic liquids
Transactions of the Institute of Metal Finishing 90 (2012) 298-304
191
Ivanov, V.; Shyrokau, B.
Fuzzy identification of uncertain ground parameters for autonomous
mobile machines
International journal of vehicle autonomous systems 9 (2011) 219-240
Ivanov, V.
Fuzzy architecture of systems with alterable information: case study for
tyre-ground friction estimators
International Journal of Reliability and Safety 5 (2011) 398-419
Jäger, G.; Manske, E.; Hausotte, T.
Performance and Limitation of Nanomeasuring Technology
International Journal of Nanomanufacturing 7 (2011) 54-62
Jäger, G.
Herausforderungen und Grenzen der interferometrischen
Präzisionsmesstechnik = Challenges and limits of the interferometric
precision measurement technique
Jahn, M.; Müller, M.; Endlich, M.; Néel, N.; Kröger, J.; Chis, V.;
Hellsing, B.
Oxygen vibrations and acoustic surface plasmon on Be(0001)
Jóźwiak, G.; Kopiec, D.; Zawierucha, P.; Gotszalk, T. Pawel; Janus, P.;
Grabiec, P. B.; Rangelow, I. W.
The spring constant calibration of the piezoresistive cantilever based
biosensor
Sensors and actuators B 170 (2012.) 201-206
Kaleem, S.; Humbla, S.; Müller, J.; Rentsch, S.; Stöpel, D.; Hein, M.
Reconfigurable 4×4 Switch Matrix for Ka-Band Geo-Stationary Satellite
Mission
Frequenz 66 (2012) 347–354
Kästner, C.; Susarova, D.K.; Jadhav, R.; Ulbricht, C.; Egbe D.A.M.;
Rathgeber, Silke; Troshin, P.A.; Hoppe, H.
Morphology evaluation of a polymer-fullerene bulk heterojunction
ensemble generated by the fullerene derivatization
Journal of Materials Chemistry 22 (2012) 15987-15997
Kästner, C.; Ulbricht, C.; Egbe D.A.M.; Hoppe, H.
Polymer BHJ solar cell performance tuning by C60 fullerene derivative alkyl
side-chain length
Journal of polymer science Part B: Polymer Physics 50 (2012) 1562-1566
Kästner, M.; Rangelow, I. W.
Scanning probe nanolithography on calixarene
Scanning proximal probe lithography for sub-10 nm resolution on
calix[4]resorcinarene
Journal of vacuum science & technology B 29 (2012) 06FD02
Keller, A.
Zum Übertragungsverhalten medizinischer Bilderzeugungssysteme
Medizintechnik 132 (2012) 152-157
Keller, A.; Herzog, S.
Zum Übertragungsverhalten medizinischer Bilderzeugungssysteme - Teil
2: Koordinatentransformation
Medizintechnik 132 (2012) 188-194
Kelly, P.; Healy, J.; Hennelly, M.; Sheridan, T.
Quantifying the 2.5 D imaging performance of digital holographic
systems
Journal of the European Optical Society - Rapid publications 6 (2011)
11034
Kelm, A.; Boerret, R.; Sinzinger, S.
Improving the polishing accuracy by determining the variance of the
friction coefficient
Journal of the European Optical Society - Rapid publications 7 (2012)
12049
Keppler, A.; Himmerlich, M.; Ikari, T.; Marschewski, M.; Pachomow,
E.; Höfft, O.; Maus-Friedrichs, W.; Endres, F.; Krischok, S.
Changes of the Near-Surface Chemical Composition of the [EMIm]Tf2N
Room Temperature Ionic Liquid under the Influence of Irradiation
Phys. Chem. Chem. Phys. 13 (2011) 1174
Contact
192
Klein, R.; Weidermann, H.; Wang, X.; Gramss, M.; Alferenok, A.;
Thieme, A.; Kolesnikov, Y.; Karcher, H.; Thess, A.
Lorentzkraft-Anemometrie für die berührungslose Durchflussmessung
von Metallschmelzen / Contactless Flow Measurement of Liquid Metals
Using Lorentz Force Velocimetry
tm - Technisches Messen 79 (2012) 394
Kleindienst, R.; Kampmann, R.; Stoebenau, S.; Sinzinger, S.
Hybrid optical (freeform) components - functionalization of nonplanar
optical surfaces by direct picosecond laser ablation
Applied optics 50 (2011) 3221-3228
Kletzin, U.; Reich, R.
Prognostizierte Lebensdauer
Kletzin, U.
FEM-Simulation Kugelstrahlen
Kletzin, U.
50 Jahre Federn-Forschung
Knauer, A.; Csáki, A.; Möller, F.; Hühn, C.; Fritzsche, W.; Köhler, J.M.
Microsegmented flow-through synthesis of silver nanoprisms with exact
tunable optical properties
Journal of Physical Chemistry C 116 (2012) 9251-9258
Knauer, A.; Thete, A.; Li, S.; Romanus, H.; Csáki, A.; Fritzsche, W.;
Köhler, J.M.
Au/Ag/Au double shell nanoparticles with narrow size distribution
obtained by continuous micro segmented flow synthesis
Chemical Engineering Journal 166 (2011) 1164-1169
Knöbber, F.; Zürbig, V.; Heidrich, N.; Hees, J.; Sah, R.E.; Baeumler, M.;
Leopold, S.; Pätz, D.; Ambacher, O.; Lebedev, V.
Static and dynamic characterization of AlN and nanocrystalline diamond
membranes
Knoblauch, M.; Stubenrauch, M.; Van Bel A.J.E.; Peters, W.S.
Forisome performance in artificial sieve tubes
Plant, Cell & Environment 35 (2012) 1419-1427
Köchert, P.; Flügge, J.; Weichert, C.; Köning, R.; Manske, E.
A fast phasemeter for interferometric applications with an accuracy in the
picometer regime
VDI-Berichte 2156 (2011) 251
Köchert, P.; Flügge, J.; Weichert, C.; Köning, R.; Manske, E.
Phase measurement of various commercial heterodyne He-Ne-laser
interferometers with stability in the picometer regime
Köhler, J.M.; Günther, P.M.; Funfak, A.; Cao, J.; Knauer, A.; Li, S.;
Schneider, S.; Alexander, G.
From droplets and particles to hierarchical spatial organization:
nanotechnology challenges for microfluidics
Journal of physical science and application 1 (2011) 125-134
Köhler, J.M.
Editorial: microtechnology for life science applications
Köhler, J.M.; Möller, F.; Schneider, S.; Günther, P.M.; Albrecht, A.;
Groß, A.G.
Size-tuning of monodisperse PMMA nanoparticles by micro-continuousflow polymerization using a silicon micro-nozzle array
The chemical engineering journal 167 (2011) 688-693
Köhler, K.; Müller, S.; Waltereit, P.; Pletschen, W.; Polyakov, V.M.; Lim,
T.; Kirste, L.; Menner, H. P.; Brückner, P.; Ambacher, O.; Buchheim, C.;
Goldhahn, R.
Electrical properties of AlxGa1-xN/GaN heterostructures with low Al
content
Journal of applied physics 109 (2011) 053705
Köhler, M.
Microtechnology in chemical engineering
Chemical Engineering & Technology 34 (2011) 330
Konkin, A.; Bounioux, C.; Ritter, U.; Scharff, P.; Katz, E.A.; Aganov, A;
Gobsch, G.; Hoppe, H.; Ecke, G.; Roth, K.-H.
ESR and LESR X-band study of morphology and charge carrier interaction
in blended P3HT–SWCNT and P3HT–PCBM–SWCNT solid thin films
Syntetic Metals 161 (2011) 2241
Lange C.; Hopfeld M.; Wilke M.; Schawohl J.; Kups T.; Barsoum M.W.;
Schaaf P.
Pulsed laser deposition from a presynthesized Cr2AlC MAX phase target
with and without ion-beam assistance
physica status solidi A 209 (2012) 545 - 552
Konkin, A.; Aganov, A.; Roth, H.-K.; Ritter, U.; Scharff, P.; Egbe,
D.A.M.
Photo-induced electron transfer in P3DDT, P3OT, M3EH-PPV conjugated
polymers blended with maleic anhydride in THF solution under UV flash
photolysis studied by means of CW TR ESR
Applied magnetic resonance 41 (2011) 195-203
Lange, G.
Aluminiumschaum und Kunststoff - ein neuartiger Hybridwerkstoff
Lightweight design (2011) 32-36
Kosch, O.; Thiel, F.; Schwarz, U. ; di Clemente, F.; Hein, M.; Seifert, F.
UWB cardiovascular monitoring for enhanced magnetic resonance
imaging
Handbook of ultra-wideband short-range sensing: theory, sensors,
applications (2012) 714-726
Kosinskiy, M.; Ahmed, S.I.-U.; Liu, Y.; Gubisch, M.; Mastylo, R.; Spieß,
L.; Schäfer, J.A.
Friction and wear properties of WC/C nano-scale multilayer coatings on
technical surfaces
Tribology letters 44 (2011) 89-98
Kosinskiy, M.; Ahmed, S.I.-U.; Liu, Y.; Schäfer, J.A.
A compact reciprocating vacuum microtribometer
Tribology international 56 (2012) 81-88
Krapf, G.; Mammen, H.; Blumröder, G.; Fröhlich, T.
Influence of impurities of the fixed-point temperature of zinc: estimations
by the SIE method and practical limitations
Krapf, G.; Schalles, M.; Fröhlich, T.
Estimation of fixed-point temperatures - a practical approach
Measurement 44 (2011) 385-390
Kraus, A.; Hammadi, S.; Hisek, J.; Buß, R.; Jönen, H.; Bremers, H.;
Rossow, U.; Sakalauskas, Egidijus; Goldhahn, Rüdiger; Hangleiter, A.
Growth and characterization of InGaN by RF-MBE
Journal of crystal growth 323 (2011) 72-75
Krinichnyi, V.I.; Konkin, A.L.; Monkman, A.P.
Electron paramagnetic resonance study of spin centers related to charge
transport in metallic polyaniline
Krischok, S.; Ispas, A.; Zühlsdorff, A.; Ulbrich, A.; Bund, A.; Endres, F.
Ta and Nb Electrodeposition from Ionic Liquids
ECS Transactions 50 (2012) 229
Kühnel, M.; Ullmann, V.; Gerhardt, U.; Manske, E.
Automated setup for non-tactile high-precision measurements of
roundness and cylindricity using two laser interferometers
Kulbe, N.; Höfft, O.; Ulbrich, A.; Zein El Abedin, S.; Krischok, S.; Janek,
J.; Pölleth, M.; Endres, F.
Plasma Electrochemistry in 1-Butyl-3-methylimidazolium dicyanamide:
Copper nanoparticles from CuCl and CuCl2
Plasma Processes and Polymers 8 (2011) 32
Kumar, S.; Pandey, S.; Gupta, S.K.; Maurya, T.K.; Schley, P.; Gobsch,
G.; Goldhahn, R.
Band structure and optical properties of hexagonal In-rich InxAl1-xN alloys
Journal of physics: Condensed matter 23 (2011) 475801
Kürsten, D.; Cao, J.; Funfak, A.; Müller, P.; Köhler, J.M.
Cultivation of Chlorella vulgaris in microfluid segments and
microtoxicological determination of their sensitivity against CuCl2 in the
nanoliter range
Kutzschbach, P.; Strauß, T.
Untersuchungen zur Hydrodynamik in der Electroplating-Unit
Landmann, M.; Käske, M.; Thomä, R.S.
Impact of incomplete and inaccurate data models on high resolution
parameter estimation in multidimensional channel sounding
IEEE transactions on antennas and propagation 60 (2012) 557-573
Contact
Laqua, D.; Husar, P.
Intelligent power management enables autonomous power supply of
sensor systems for modern prostheses
Lazarenko, A.; Vovchenko, L.; Matzui, L.; Kozachenko, V.; Prylutskyy,
Y.; Scharff, P.; Ritter, U.
Thermal diffusivity of nanocarbon composites
Polymer composites 32 (2011) 14-17
Lazo, C.; Néel, N.; Kröger, J.; Berndt, R.; Heinze, S.
Tunneling magnetoresistance and exchange interaction in single-atom
contacts
Leineweber, A.; Lienert, F.; Glock, S.; Woehrle, T.; Schaaf, P.; Wilke,
M.; Mittemeijer, J.
X-ray diffraction investigations on gas nitrided nickel and cobalt
Zeitschrift für Kristallographie Proc. 1 (2011) 293-298
Leitner, M.; Fantner, G.E.; Fantner, E.J.; Ivanova, K.; Ivanov, T.;
Rangelow, I.; Ebner, A.; Rangl, M.; Tang, J.; Hinterdorfer, P.
Increased imaging speed and force sensitivity for bio-applications with
small cantilevers using a conventional AFM setup
Micron 43 (2012) 1399-1407
Leopold, S.; Kremin, C.; Ulbrich, A.; Krischok, S.; Hoffmann, M.
Formation of silicon grass: nanomasking by carbon clusters in cyclic deep
reactive ion etching
Journal of Vacuum Science & Technology B 29 (2011) 011002
Lerp, M.; Wilke, M.; Schmidt, U.; Treichert, G.; Schlütter, F.
Einbau nanoskaliger Partikel in Zinkpassivschichten zur Erhöhung der
Verschließ- und Korrosionsbeständigkeit
Galvanotechnik 103 (2012) 1882 - 1890
Ley, S.; Chilian, A.; Harczos, T.; Kátai, A.; Klefenz, F.; Husar, P.
Examining basilar membrane motion of an auditory model by using toneburst otoacoustic emissions
Li, D.; Kelly, P.; Kirner, R.; Sheridan, T.
Speckle orientation in paraxial optical systems
Applied Optics 51 (2012) A1-A10
Li, D.; Kelly, P.; Sheridan, T.
Three-dimensional static speckle fields. Part I. Theory and numerical
investigation
Journal of the Optical Society of America A 28 (2011) 1896-1903
Three-dimensional static speckle fields. Part II. Experimental investigation
Journal of the Optical Society of America A 28 (2011) 1904-1908
Li, S.; Roy, A.; Lichtenberg, H.; Merchan, G.; Kumar C.S.S.R.; Köhler,
J.M.
Local structure of ZnO micro flowers and nanoparticles obtained by
micro-segmented flow synthesis
ChemPhysChem 13 (2012) 1557-1561
Li, S.; Groß, A. G.; Günther, P. M.; Köhler, J. M.
Hydrothermal micro continuous-flow synthesis of spherical, cylinder-,
star- and flower-like ZnO microparticles
Liday, J.; Vogrinčič, P.; Ecke, G.
Some aspects of quantitative analysis of ternary alloys of group III-nitrides
by Auger electron spectroscopy
Journal of electrical engineering 62 (2011) 367-369
Linde, D.; Diebowski, S.; Greiner-Petter, C.; Schneider, G.
Evaluation of bone replacement materials in a rabbit cranial defect model
using micro CT and hard tissue histology
193
Linkohr, S.; Pletschen, W.; Kirste, L.; Himmerlich, M.; Lorenz, P.;
Krischok, S.; Polyakov, V.; Müller, S.; Ambacher, O.; Cimalla , V.
Plasma affected 2DEG Properties on GaN/AlGaN/GaN HEMTs
Physica status solidi C 9 (2012) 938
Linkohr, S.; Pletschen, W.; Polyakov, V.; Himmerlich, M.; Lorenz, P.;
Krischok, S.; Kirste, L.; Müller, S.; Ambacher, O.; Cimalla, V.
Influence of Plasma Treatments on the Properties of GaN/AlGaN/GaN
HEMT structures
Physica status solidi C 9 (2012) 1096
Löschel, J.; Laqua, D.; Husar, P.
Intelligent capacitive sensor array for removement detection from various
surfaces of tagged equipment in hospitals
Lüdtke, U.; Soubeih, S.; Halbedel, B.
Numerical simulation of induced alterations of flow patterns within glass
melts using external Lorentz forces
Journal of Iron and Steel Research 1 (2012) 471
Lux, R.; Beyer, P.
SiCr-legierte Federstahl-Drähte
Lux, R.; Kletzin, U.; Beyer, P.
Manufacturing highly loadable helical springs through optimization of
tempering processes in both spring steel wire and spring production
Wire journal international 45 (2012) 54-59
Machleidt, T.; Sparrer, E.; Manske, E.; Kapusi, D.; Franke, H.
Area-based optical 2.5D sensors for a nanopositioning and
nanomeasuring machine
Manske, E.; Füßl, R.
Untersuchungen zum Messunsicherheitsbudget nichtlinearer Teilmodelle
in der Präzisionslängenmesstechnik
VDI-Berichte (2011) 2149
Manske, E.; Hausotte, T.; Jäger, G.
Nanopositionier- und Nanomessmaschinen für die Anwendung in der
Mikro- und Nanotechnik
VDI-Berichte (2011) 2133
Manske, E.; Jäger, G.; Hausotte, T.; Füßl, R.
Recent developments and challenges of nanopositioning and
nanomeasuring technology
Manske, E.; Jäger, G.; Hausotte, T.
A multi-sensor approach for complex and large-area applications in micro
and nanometrology
Measure 7 (2012) 44-50
Manske, E.; Jäger, G.
Multi-sensor approach for multivalent applications in nanometrology
International journal of automation and smart technology 2 (2012) 141
Martínez-Vázquez, M.; Oikonomopoulos-Zachosa, C.; Maulwurf, K.;
Wollenschläger, F.; Stephan, R.; Hein, M.A.; Xia, L.; Müller, J; Estañ,
C.; Dombrowski, K.
Highly integrated antennas and front-ends for 60 GHz WLAN applications
International Journal of Microwave and Wireless Technologies 3 (2011)
157-170
Marton, M.; Kovalécík, D.; Zdravecká, E.; Varga, M.; Gajdoésová, L.;
Vavrinský, E.; Veselý, M.; Redhammer, R.; Hopfeld, M.
The influence of substrate bias on nanohardness of a-C:N films deposited
on CoCrMo alloy
Chemické listy 17 (2011) 832-833
Meyer, B.K.; Polity, A.; Reppin, D.; Becker, M.; Hering, P.; Klar, P.J.;
Sander, T.; Reindl, C.; Benz, J.; Eickhoff, M.; Heiliger, C.; Heinemann,
M.; Bläsing, J.; Krost, A.; Shokhovets, S.; Müller, C.; Ronning, C.
Binary copper oxide semiconductors: from materials towards devices
Physica status solidi B 249 (2012) 1487-1509
Michels, T.; Guliyev, E.; Klukowski, M.; Rangelow, I. W.
Micromachined self-actuated piezoresistive cantilever for high speed SPM
Miersch, J.; Beckmann, S.; Engler, F.; Simmen, K.; Laqua, D.; Husar, P.
Mobile R-wave detection system powered by a thermoelectric generator
Morgenbrodt, S.; Spieß, L.; Teichert, G.; Bamberger, M.; Schaaf, P.
Vergleichende Untersuchungen zur Bestimmung des Austenitgehalts
austenitisch-ferritischen Gusseisens mit Kugelgraphit (ADI)
Journal of Heat Treatment and Materials 67 (2012) 393-401
Mühlenhoff, S.; Mutschke, G.; Koschichow, D.; Yang, X.; Bund, A.;
Fröhlich, J.; Odenbach, S.; Eckert, K.
Lorentz-force-driven convection during copper magnetoelectrolysis in the
presence of a supporting buoyancy force
Electrochimica acta 69 (2012) 209-219
Müller, A.; Hofmann, N.; Manske, E.
Approaching nanometre accuracy in measurement of the profile
deviation of a large plane mirror
Mutschke, G.; Tschulik, K.; Uhlemann, M.; Bund, A.; Fröhlich, J.
Comment on "Magnetic Structuring of Electrodeposits"
Nacke, T.; Barthel, A.; Beckmann, D.; Friedrich, J.; Helbig, M.; Peyerl,
P.; Pliquett, U.; Sachs, J.
Messsystem für die impedanzspektroskopische BreitbandProzessmesstechnik
Nader, R.; Pezoldt, J.
Strain modification in epitaxial 2H-AlN layers on 3C-SiC/Si(111) pseudosubstrates
Diamond and Related Materials 20 (2011) 717
Nahar, S.; Khan, R.A.; Dey, K.; Sarker, B.; Das, A.K.; Ghoshal, S.
Comparative studies of mechanical and interfacial properties between
jute and bamboo fiber-reinforced polypropylene-based composites
Journal of thermoplastic composite materials 25 (2012) 15-32
Nechifor, R.; Ardelean, I.; Mattea, C.; Stapf, S.; Bogdan, M.
NMR relaxation dispersion of Miglyol molecules confined inside polymeric
micro-capsules
Magnetic resonance in chemistry 49 (2011) 730-733
Néel, N.; Berndt, R.; Kröger, J.; Wehling, O.; Lichtenstein, I.;
Katsnelson, I.
Two-Site Kondo Effect in Atomic Chains
Néel, N.; Ferriani, P.; Ziegler, M.; Heinze, S.; Kröger, J.; Berndt, R.
Energy-resolved spin-polarized tunneling and exchange coupling of Co
and Cr atoms on Fe islands on W(110)
Néel, N.; Kröger, J.; Berndt, R.
Two-Level Conductance Fluctuations of a Single-Molecule Junction
Nano Letters 11 (2011) 3593
Neudert, O.; Stapf, S.; Mattea, C.
Diffusion exchange NMR spectroscopy in inhomogeneous magnetic fields
Mascheck, M.; Schmidt, S.; Silies, M.; Yatsui, T.; Kitamura, K.; Ohtsu,
M.; Leipold, D.; Runge, E.; Lienau, C.
Observing the localization of light in space and time by ultrafast secondharmonic microscopy
Nature photonics 6 (2012) 293-298
Neudert, O.; Stapf, S.; Mattea, C.
Molecular exchange of n-hexane in zeolite sieves studied by diffusiondiffusion and T1-diffusion nuclear magnetic resonance exchange
spectroscopy
New journal of physics 13 (2011) 035018
Maus, C.; Stauden, T.; Ecke, G.; Tonisch, K.; Pezoldt, J.
Smooth ceramic titanium nitride contacts on AlGaN/GaN-heterostructures
Semicond. Sci. Technol. 27 (2012) 115007
Nielsen, J.K.; Maus, C.; Rzesanke, D.; Leisner, T.
Charge induced stability of water droplets in subsaturated environment
Atmospheric chemistry and physics 11 (2011) 2031-2037
Contact
194
Nomura, W.; Yatsui, T.; Kawazoe, T.; Naruse, M.; Runge, E.;
Lienau, Christoph; Ohtsu, M.
Direct observation of optical excitation transfer based on resonant optical
near-field interaction
Applied physics B 107 (2012) 257-262
Nowak, K.; Gross, W.; Nicksch, K.; Hanusch, C.; Helbig, M.;
Hohenberger, P.; Gebhard, M.M.; Schäfer, M.
Intraoperative lung edema monitoring by microwave reflectometry
Interactive cardiovascular and thoracic surgery 12 (2011) 540-544
Oeder, A.; Stoebenau, S.; Sinzinger, S.
Optimized free-form optical trapping systems
Optics letters 37 (2012) 274-276
Omrani, A.; Mollova, A.; Mattea, C.; Stapf, S.
Relaxation times and in situ kinetic analysis during network evolution of
epoxy via a nickel catalyst of imidazole
Thermochimica acta 516 (2011) 52-57
Ortlepp, T.; Miyajima, S.; Töpfer, H.; Fujimaki, A.
Josephson comparator with modified dynamic behavior for improved
sensitivity
Patschger, A.; Bliedtner, J.; Hild, M.; Bergmann, J.P.
Flexible and efficient laser remote welding of ultra-thin metal foils
Journal of laser Applications 24 (2012) 052005
Patschger, A.; Sahib, C.; Bergmann, J.P.; Bastick, A.
Process optimization through adaptation of shielding gas selection and
feeding during laser beam welding
Physics Procedia 12A (2011) 46-55
Pedrosa, P.; Alves, E.; Barradas, N. P.; Fiedler, P.; Haueisen, J.; Vaz, F.;
Fonseca, C.
TiNx coated polycarbonate for bio-electrode applications
Corrosion science 56 (2012) 49-57
Peter, M.; Kammel, R.; Ackermann, R.; Schramm, S.; Seifert, B.-U.;
Frey, K.; Blum, M.; Nolte, S.; Kunert, K.S.
Analysis of optical side-effects of fs-laser therapy in human presbyopic
lens simulated with modified contact lenses
Graefe's archive for clinical and experimental ophthalmology 250 (2012)
1813-1825
Pezoldt, J.; Kulikov, D.V.; Kharlamov, V.S.; Lubov, M.N.; Trushin, Y.V.
Multi-Scale Simulation of Nucleation and Growth of Nanoscale SiC on Si
Journal of Computational and Theoretical Nanoscience 9 (2012) 1941
Pezoldt, J.; Göckeritz, R.; Hähnlein, B.; Händel, B.; Schwierz, F.
T- and Y-branch three-terminal junction graphene devices
Material Science Forum 717-720 (2012) 683-686
Pezoldt, J.; Grieseler, R.; Schupp, T.; As, J.; Schaaf, P.
Mechanical properties of cubic SiC, GaN and AlN thin films
Materials Science Forum 717-720 (2012) 513-516
Pezoldt, J.; Hummel, C.; Schwierz, F.
Graphene field effect transistor improvement by graphene - silicon
dioxide interface modification
Physica E 44 (2012) 985-988
Presselt, M.; Herrmann, F.; Hoppe, H.; Shokhovets, S.; Runge, E.;
Gobsch, G.
Influence of phonon scattering on exciton and charge diffusion in
polymer-fullerene solar cells
Advanced energy materials 2 (2012) 999-1003
Prylutska, S.; Bilyy, R.; Overchuk, M.; Bychko, A.; Andreichenko, K.;
Stoika, R.; Rybalchenko, V.; Prylutskyy, Y.; Tsierkezos, N. G.; Ritter, U.
Water-soluble pristine fullerenes C60 increase the specific conductivity and
capacity of lipid model membrane and form the channels in cellular
plasma membrane
Journal of biomedical nanotechnology 8 (2012) 522-527
Prylutska, S.; Bilyy, R.; Schkandina, T.; Bychko, A.; Cherepanov, V.;
Andreichenko, K.; Stoika, R.; Rybalchenko, V.; Prylutskyy, Y.; Scharff,
P.; Ritter, U.
Effect of iron-doped multi-walled carbon nanotubes on lipid model and
cellular plasma membranes
Materials science and engineering C 32 (2012) 1486-1489
Prylutska, S.V.; Burlaka, A.P.; Prylutskyy, Y.I.; Ritter, U.; Scharff, P.
Pristine C60 fullerenes inhibit the rate of tumor growth and metastasis
Experimental oncology 33 (2011) 162-164
Quiroz, P.; Halbedel, B.; Bustamante, A.; González, J.C.
Effect of titanium ion substitution in the barium hexaferrite studied by
Mössbauer spectroscopy and X-ray diffraction
Hyperfine interactions 202 (2011) 97-106
Quiroz, P.; Halbedel, B.
A crystallization conditions study of the Ti-doped barium hexaferrite
powders synthesized with the glass crystallization technique for
microwave applications = Studie der Kristallisationsbedingungen von Tidotierten, mit der Glaskristallisationstechnik hergestellten
Bariumhexaferritpulvern für Mikrowellenanwendungen
Racko, J.; Mikolasek, M.; Harmatha, L.; Breza, J.; Hudec, B.; Fröhlich,
K.; Aarik, J.; Tarre, A.; Granzner, R.; Schwierz, F.
Analysis of leakage current mechanisms in RuO2-TiO2-RuO2 MIM structures
Journal of Vacuum Science & Technology B 29 (2011) 01AC08
Racko, J.; Mikolášek, M.; Benko, P.; Gallo, O.; Harmatha, L.; Granzner,
R.; Schwierz, F.
Coupled defect level recombination in the P-N junction
Racko, J.; Mikolášek, M.; Granzner, R.; Breza, J.; Donoval, D.;
Grmanová, A.; Harmatha, L.; Schwierz, F.; Fröhlich, K.
Trap-assisted tunnelling current in MIM structures
Central European journal of physics 9 (2011) 230-241
Rahman, M.; Dey, K.; Parvin, F.; Sharmin, N.; Khan, R.A.; Sarker, B.;
Nahar, S.; Ghoshal, S.; Khan, M.A.; Billah, M.M.; Zaman, H.U.;
Chowdhury, A.M.S.
Preparation and characterization of gelatin-based PVA film: effect of
gamma irradiation
International journal of polymeric materials 60 (2011) 1056-1069
Rangelow, I.W.
High-Speed Video Nano-Resonator
GIT: Labor-Fachzeitschrift 55 (2011) 405
Rathgeber, S.; Perlich, J.; Kühnlenz, F.; Türk, S.; Egbe, D.A.M.; Hoppe,
H.; Gehrke, R.
Correlation between polymer architecture, mesoscale structure and
photovoltaic performance in side-chain-modified poly(p-aryleneethynylene)-alt-poly(p-arylene-vinylene): PCBM bulk-heterojunction solar
cells
Polymer 52 (2011) 3819-3826
Presselt, M.; Herrmann, F.; Shokhovets, S.; Hoppe, H.; Runge, E.;
Gobsch, G.
Sub-bandgap absorption in polymer-fullerene solar cells studied by
temperature-dependent external quantum efficiency and absorption
spectroscopy
Chemical physics letters 542 (2012) 70-73
Reese, M.O.; Gevorgyan, S.A.; Jørgensen, M.; Bundgaard, E.; Kurtz,
S.R.; Ginley, D.S.; Olson, D.C.; Lloyd, M.T.; Morvillo, P.; Katz, E.A.;
Elschner, A.; Haillant, O.; Currier, T.R.; Shrotriya, V.; Hermenau, M.;
Riede, M.; Kirov, K.R.; Trimmel, G.; Rath, T.; Inganäs, O.; Zhang, F.;
Andersson, M.; Tvingstedt, K.; Lira-Cantu, M.; Laird, D.; McGuiness,
C.; Gowrisanker, S.; Pannone, M.; Xiao, M.; Hauch, J.; Steim, R.;
DeLongchamp, D.M.; Rösch, R.; Hoppe, H.
Consensus stability testing protocols for organic photovoltaic materials
and devices
Solar energy materials & solar cells 95 (2011) 1253-1267
Prylutska, S. V.; Burlaka, A. P.; Klymenko, P. P.; Grynyuk, I. I.;
Prylutskyy, Y.I.; Schütze, C.; Ritter, U.
Using water-soluble C60 fullerenes in anticancer therapy
Cancer nanotechnology 2 (2011) 105-110
Rehacek, V.; Hotovy, I.; Vojs, M.; Kups, T.; Spieß, L.
Nafion-coated bismuth film electrodes on pyrolyzed photoresist/alumina
supports for analysis of trace heavy metals
Electrochimica acta 63 (2012) 192-196
Contact
195
Reháécek, V.; Hotový, I.; Vojs, M.; Kotlár, M.; Kups, T.; Spieß, L.
Pyrolyzed photoresist film electrodes for application in electroanalysis
Reinmöller, M.; Ulbrich, A.; Ikari, T.; Preiß, J.; Höfft, O.; Endres, F.;
Krischok, S.; Beenken, D.
Theoretical Reconstruction and Elementwise Analysis of Photoelectron
Spectra for Imidazolium-Based Ionic Liquids
Phys. Chem. Chem. Phys. 13 (2011) 19526
Ritter, U.; Scharff, P.; Grechnev, G. E.; Desnenko, V.A.; Fedorchenko,
A.V.; Panfilov, A.S.; Prylutskyy, Y.I.; Kolesnichenko, Y.A.
Structure and magnetic properties of multi-walled carbon nanotubes
modified with cobalt
Carbon 49 (2011) 4443-4448
Ritter, U.; Tsierkezos, N.G.; Prylutskyy, Y.I.; Matzui, L.Y.; Gubanov,
V.O.; Bilyi, M.M.; Davydenko, M.O.
Structure-electrical resistivity relationship of N-doped multi-walled carbon
nanotubes
Journal of materials science 47 (2012) 2390-2395
Romero, M.F.; Feneberg, M.; Moser, P.; Berger, C.; Bläsing, J.; Dadgar,
A.; Krost, A.; Sakalauskas, E.; Goldhahn, R.
Luminescence from two-dimensional electron gases in InAlN/GaN
heterostructures with different In content
Applied physics letters 100 (2012) 212101
Sakalauskas, E.; Reuters, B.; Khoshroo, L.R.; Kalisch, H.; Heuken, M.;
Vescan, A.; Röppischer, M.; Cobet, C.; Gobsch, G.; Goldhahn, R.
Dielectric function and optical properties of quaternary AlInGaN alloys
Sakalauskas, E.; Tuna, Ö.; Kraus, A.; Bremers, H.; Rossow, U.; Giesen,
C.; Heuken, M.; Hangleiter, A.; Gobsch, G.; Goldhahn, R.
Dielectric function and bowing parameters of InGaN alloys
physica status solidi B 249 (2012) 485-488
Sakalauskas, E.; Wieneke, M.; Dadgar, A.; Gobsch, G.; Krost, A.;
Goldhahn, R.
Optical anisotropy of a-plane Al0.8In0.2N grown on an a-plane GaN
pseudosubstrate
Physica status solidi A 209 (2012) 29-32
Sánchez-Ferrer, A.; Fischl, T.; Stubenrauch, M.; Albrecht, A.; Wurmus,
H.; Hoffmann, M.; Finkelmann, H.
Liquid-crystalline elastomer microvalve for microfluidics
Advanced materials 23 (2011) 4526-4530
Sarov, Y.; Ivanov, T.; Frank, A.; Rangelow, I.W.
Thermally driven multi-layer actuator for 2D cantilever arrays
Applied physics A 102 (2011) 61-68
Rösch, R.; Krebs, F.C.; Tanenbaum, D.M.; Hoppe, H.
Quality control of roll-to-roll processed polymer solar modules by
complementary imaging methods
Schaaf, P.; Spiess, L.; Kups, T.; Romanus, H.; Grieseler, R.; Hopfeld, M.;
Wilke, M.; Stauden, T.; Lorenz, D.; Fischer, A.
Schichten über Schichten: innovative Beschichtungen für komplexe
Anwendungen
Vakuum in Forschung und Praxis 23 (2011) 24-32
Rösch, R.
Investigation of the degradation mechanisms of a variety of organic
photovoltaic devices by combination of imaging techniques - the ISOS-3
inter-laboratory collaboration
Energy & environmental science 5 (2012) 6521-6540
Schadewald, U.; Halbedel, B.
Migration of paramagnetic ions in glass melts under influence of a
magnetic field
Journal of iron and steel research international 19 Suppl. 1-2 (2012)
1068-1071
Rossbach, G.; Feneberg, M.; Röppischer, M.; Werner, C.; Esser, N.;
Cobet, C.; Meisch, T.; Thonke, K.; Dadgar, A.; Bläsing, J.; Krost, A.;
Goldhahn, R.
Influence of exciton-phonon coupling and strain on the anisotropic
optical response of wurtzite AlN around the band edge
Scheinert, S.; Grobosch, M.; Paasch, G.; Hörselmann, I.; Knupfer, M.;
Bartsch, J.
Contact characterization by photoemission and device performance in
P3HT based organic transistors
Rössler, E.; Mattea, C.; Mollova, A.; Stapf, S.
Low-field one-dimensional and direction-dependent relaxation imaging of
bovine articular cartilage
Rud, Y.; Prylutska, S.; Buchatskyy, L.; Prylutskyy, Y.; Scharff, P.; Ritter,
U.
Photodynamic inactivation of mosquito iridovirus (MIV) by C60 fullerenes
= Photodynamische Inaktivierung des Mosquito Iridovirus (MIV) durch C60
Fullerene
Rud, Y.; Buchatskyy, L.; Prylutskyy, Y.; Marchenko, O.; Senenko, A.;
Schütze, C.; Ritter, U.
Using C60 fullerenes for photodynamic inactivation of mosquito iridescent
viruses
Journal of enzyme inhibition and medicinal chemistry 27 (2012) 614-617
Rusu, D. E.; Ispas, A.; Bund, A.; Gheorghies, C.; Cârâc, G.
Corrosion tests of nickel coatings prepared from a Watts-type bath
Journal of coatings technology and research 9 (2012) 87-95
Ryu J.-W.; Hentschel M.; Kim S.W.
Quasiattractors in coupled maps and coupled dielectric cavities
Physical Review E 85 (2012) 056213
Sabitov, N.; Meinecke, T.; Kelly, P.; Sinzinger, S.
Two-step phase-shift interferometry with known but arbitrary reference
waves: a graphical interpretation
Applied Optics 51 (2012) 6831-6838
Šádeka, V.; Schröder, D.; Tsierkezos, N.G.
Clustering of palladium(II) chloride in acetonitrile solution investigated by
electrospray mass spectrometry
International journal of mass spectrometry 304 (2011) 9-14
Sakalauskas, E.; Behmenburg, H.; Schley, P.; Gobsch, G.; Giesen, C.;
Kalisch, H.; Jansen, R.H.; Heuken, M.; Goldhahn, R.
Dielectric function of Al-rich AlInN in the range 1-18 eV
Contact
196
Schnapp, D.; Weber, H.; Schilling, J.; Wilke, M.
Glimmentladungsanalyse (GD-OES) buntgehärteter Stahloberflächen
Materials Testing 54 (2012) 707 -713
Schober, A.; Fernekorn, U.; Lübbers, B.; Hampl, J.; Weise, F.;
Schlingloff, G.; Gebinoga, M.; Worgull, M.; Schneider, M.;
Augspurger, C.; Hildmann, C.; Kittler, M.; Donahue, M.
Applied nano bio systems with microfluidics and biosensors for threedimensional cell culture = Angewandte Nano-Bio-Systeme mit
mikrofluidischen und biosensorischen Elementen für die dreidimensionale
Zellkultur
Schrödner, M.; Schache, H.; Lindauer, H.; Schrödner, R.; Konkin, A.
Oscillations of the lophyl radical concentration during the photodecomposition of o-Cl-hexaarylbisimidazole
Journal of photochemistry and photobiology 233 (2012) 60-64
Schröter, T.J.; Johnson, S.B.; John, K.; Santi, P.A.
Scanning thin-sheet laser imaging microscopy (sTSLIM) with structured
illumination and HiLo background rejection
Biomedical optics express 3 (2012) 170-177
Schütze, C.; Ritter, U.; Scharff, P.; Fernekorn, U.; Prylutska, S.; Bychko,
A.; Rybalchenko, V.; Prylutskyy, Y.
Interaction of N-fluorescein-5-isothiocyanate pyrrolidine-C60 with a
bimolecular lipid model membrane
Materials science and engineering C 31 (2011) 1148-1150
Schwarz, U.; Linkohr, S.; Lorenz, P.; Krischok, S.; Nakamura, T.;
Cimalla, V.; Nebel, E.; Ambacher, O.
DNA-sensor based on AlGaN/GaN high electron mobility transistor
physica status solidi A 208 (2011) 1626
Schwierz, F.
Flat transistors get off the ground
Nature Nanotechnology 6 (2011) 135-136
Schwierz, F.
Graphene Transistors- Status, prospects, and problems
Micromaterials and Nanomaterials 14 (2012) 22-25
Sperl, A.; Kröger, J.; Berndt, R.
Electronic Superstructure of Lead Phthalocyanine on Lead Islands
J. Phys. Chem. A 115 (2011) 6973
Schwierz, F.
Industry-compatible graphene transistors
Nature 472 (2011) 41-42
Stelian, C.; Alferenok, A.; Lüdtke, U.; Kolesnikov, Y.; Thess, A.
Optimization of a Lorentz force flowmeter by using numerical modeling
Magnetohydrodynamics 47 (2011) 273-282
Schwierz, F.
Nanotechnology for telecommunications
IEEE Nanotechnol. Mag. 5 (2011) 34-38
Sternkopf, C.; Diethold, C.; Gerhardt, U.; Wurmus, J.; Manske, E.
Heterodyne interferometer laser source with a pair of two phase locked
loop coupled He-Ne lasers by 632.8 nm
Schwierz, F.
Nanoelectronics: flat transistors get off the ground
Nature nanotechnology 6 (2011) 135-136
Seeland, M.; Rösch, R.; Hoppe, H.
Luminescence imaging of polymer solar cells: visualization of progressing
degradation
Quantitative analysis of electroluminescence images from polymer solar
cells
Shakirov, T.M.; Fatkullin, N.F.; Khalatur, P.G.; Stapf, S.; Kimmich, R.
Computer aided simulation of the influence of collective effects on
polymer melt dynamics in a straight cylindrical tube: observation of the
onset stage of the corset effect
Polymer science A 54 (2012) 505-511
Shi, X.; Wang, J.; Stapf, S.; Mattea, C.; Li, W.; Yang, Y.
Effects of thermo-oxidative aging on chain mobility, phase composition,
and mechanical behavior of high-density polyethylene
Polymer engineering & science 51 (2011) 2171-2177
Shyu L.H.; Wang Y.C.; Chang C.P.; Tung P.C.; Manske, E.
Investigation on displacement measurements in the large measuring
range by utilizing multibeam interference
Sensor Letters 10 (2012) 1109-1112
Stubenrauch, M.; Fischer, R.; Fröber, U.; Witte, H.
BioMEMS for processing and testing of hydrogel-based bio-interfaces
Supplie, O.; Hannappel, T.; Pristovsek, M.; Döscher, H.
In situ access to the dielectric anisotropy of buried III-V/Si(100)
heterointerfaces
Physical review B 86 (2012) 035308.
Tanenbaum, D.M.; Dam, H.F.; Rösch, R.; Jørgensen, M.; Hoppe, H.;
Krebs, F.C.
Edge sealing for low cost stability enhancement of roll-to-roll processed
flexible polymer solar cell modules
Tanenbaum, D.M.; Hermenau, M.; Voroshazi, E.;Lloyd, M.T.; Galagan,
Y.; Zimmermann, B.; Hösel, M.; Dam, H.F.; Jørgensen, M.; Gevorgyan,
S.A.; Kudret, S.; Maes, W.; Lutsen, L.; Vanderzande, D.; Würfel, U.;
Andriessen, R.; Rösch, R.; Hoppe, H.; Teran-Escobar, G.; Lira-Cantu,
M.; Rivaton, A.; Uzunoglu, G.Y.; Germack, D.; Andreasen, B.; Madsen,
M.V.; Norrman, K.; Krebs, F.C.
The ISOS-3 inter-laboratory collaboration focused on the stability of a
variety of organic photovoltaic devices
RSC Advances 2 (2012) 882-893
Teichert, G.; Wilke, M.; Spieß, L.; Schaaf, P.
Komplexe Materialprüfung und Schadensanalyse - Praxisbeispiele aus
dem Ofenbau-, Beschichtungs- und Automobilbereich
Materials testing 53 (2011) 150-158
Siebert, R.; Schlütter, F.; Winter, A.; Presselt, M.; Görls, H.; Schubert,
U.S.; Dietzek, B.; Popp, J.
Ruthenium(II)-bis(4’-(4-ethynylphenyl)-2,2’:6’, 2’’-terpyridine) - a versatile
synthon in supramolecular chemistry : synthesis and characterization
Central European Journal of Chemistry 9 (2011) 990-999
Thiele, S.; Schwierz, F.
Modeling of the steady state characteristics of large-area graphene fieldeffect transistors
J. Appl. Phys. 110 (2011) 034506
Singh, R.; Sommer, M.; Himmerlich, M.; Wicklein, A.; Krischok, S.;
Thelakkat, M.; Hoppe, H.
Morphology controlled open circuit voltage in polymer solar cells
physica status solidi RRL 5 (2011) 247
Tkachov, G.; Hentschel, M.
Diffusion on edges of insulating graphene with intravalley and intervalley
scattering
Singh, S.; Köhler, J.M.; Schober, A.; Groß, G.A.
The Eschenmoser coupling reaction under continuous-flow conditions
Beilstein journal of organic chemistry 7 (2011) 1164-1172
Tonisch, K.; Jatal, W.; Niebelschütz, F.; Romanus, H.; Baumann, U.;
Schwierz, F.; Pezoldt, J.
AlGaN/GaN-heterostructures on (111) 3C-SiC/Si pseudo substrates for
high frequency applications
Thin solid films 520 (2011) 491-496
Singh, S.; Schober, A.; Gebinoga, M.; Groß, G.A.
Convenient method for synthesis of thiazolo[3,2-a]pyrimidine derivatives
in a one-pot procedure
Tetrahedron letters 52 (2011) 3814-3817
Sinzinger, S.; Oeder, A.; Stoebenau, S.; Kampmann, R.
Compact optical systems for micromanipulation: bringing optical
tweezers into industrial applications
Laser-Technik-Journal 9 (2012) 20-23
Sinzinger, S.
Optics design - bridge between new technologies and innovative
applications
Optical technologies in Germany; Berlin: Trias Consult (2011) 66
Sparrer, E.; Machleidt, T.; Hausotte, T.; Franke, H.; Manske, E.
A framework for using optical sensors in nanomeasuring machines over
I++/DME
Controlled Metalation of a Single Adsorbed Phthalocyanine
Angewandte Chemie International Edition 50 (2011) 5294
Demetalation of a single organometallic complex
J. American Chemical Society 133 (2011) 11007
Contact
Troshin, P.A.; Hoppe, H.; Peregudov, A.S.; Egginger, M.; Shokhovets,
S.; Gobsch, G.; Sariciftci, N.S.; Razumov, V.F.
[70]fullerene-based materials for organic solar cells
ChemSusChem 4 (2011) 119-124
Tsierkezos, N.G.; Rathsmann, E.; Ritter, U.
Electrochemistry on multi-walled carbon nanotubes in organic solutions
Journal of solution chemistry 40 (2011) 1645-1656
Tsierkezos, N.G.; Ritter, U.; Wetzold, N.; Hübler, A.C.
Non-enzymatic analysis of glucose on printed films based on multi-walled
carbon nanotubes
Microchimica acta 179 (2012) 157-161
Tsierkezos, N.G.; Ritter, U.
Application of electrochemical impedance spectroscopy for
characterisation of the reduction of benzophenone in acetonitrile
solutions
Physics and chemistry of liquids 49 (2011) 729-742
Determination of impedance spectroscopic behavior of
triphenylphosphine on various electrodes
Analytical letters 44 (2011) 1416-1430
197
Electrochemical and thermodynamic properties of hexacyanoferrate(II)/(III)
redox system on multi-walled carbon nanotubes
Journal of Chemical Thermodynamics 54 (2012) 35-40
Vrublevsky, I.; Chernyakova, K.; Bund, A.; Ispas, A.; Schmidt, U.
Effect of anodizing voltage on the sorption of water molecules on porous
alumina
Applied surface science 258 (2012) 5394-5398
Electrochemical responses and sensitivities of films based on multi-walled
carbon nanotubes in aqueous solutions
Journal of solution chemistry 41 (2012) 2047-2057
Vuong, Q.L.; Van Doorslaer, S.; Bridot, J.-L.; Argante, C.; Alejandro,
G.; Hermann, R.; Disch, S.; Mattea, C.; Stapf, S.; Gossuin, Y.S.
Paramagnetic nanoparticles as potential MRI contrast agents:
characterization, NMR relaxation, simulations and theory
Magnetic resonance materials in physics, biology and medicine 25 (2012)
467-478
Influence of concentration of supporting electrolyte on electrochemistry
of redox systems on multi-walled carbon nanotubes
Physics and chemistry of liquids 50 (2012) 661-668
Oxidation of dopamine on multi-walled carbon nanotubes
Thermodynamic studies on silver and thallium nitrate
International Journal of Thermophysics 32 (2011) 1950-1965
Tsierkezos, N.G.; Szroeder, P.; Ritter, U.
Application of films consisting of carbon nanoparticles for
electrochemical detection of redox systems in organic solvent media
Fullerenes, nanotubes & carbon nanostructures 19 (2011) 505-516
Wang, D.; Ji, R.; Albrecht, A.; Schaaf, P.
Ordered arrays of nanoporous gold nanoparticles
Beilstein Journal of Nanotechnologie 3 (2012) 651-657
Wang, D.; Ji, R.; Schaaf, P.
Formation of precise 2D Au particle arrays via thermally induced
dewetting on pre-patterned substrates
Beilstein Journal of Nanotechnology 2 (2011) 318-326
Wang, D.; Kups, T.; Schawohl, J.; Schaaf, P.
Deformation behavoir of Au/Ti multilayers under indentation
Journal of Materials Science: Materials in Electronics 23 (2012) 1077-1082
Wang, D.; Schaaf, P.
Nanoporous gold nanoparticles
Tsierkezos, N.G.; Szroeder, P.; Ritter, U.
Multi-walled carbon nanotubes as electrode materials for electrochemical
studies of organometallic compounds in organic solvent media
Monatshefte für Chemie 142 (2011) 233-242
Ni-Au bi-metallic nanoparticles formed via dewetting
Turkovic, V.; Engmann, S.; Gobsch, G.; Hoppe, H.
Methods in determination of morphological degradation of
polymer:fullerene solar cells
Thermal dewetting of thin Au films deposited onto line-patterned
substrates
Journal of Materials Science 47 (2012) 1605-1608
Turov, V.V.; Chehun, V.F.; Barvinchenko, V.N.; Krupskaya, T.V.;
Prylutskyy, Y.I.; Scharff, P.; Ritter, U.
Low-temperature 1 H-NMR spectroscopic study of doxorubicin influence
on the hydrated properties of nanosilica modified by DNA
Journal of Materials Science - Materials in Medicine 22 (2011) 525-532
Two-dimensional nanoparticle arrays formed by dewetting of thin gold
films deposited on pre-patterned substrates
Journal of Materials Science – Materials in Electronics 22 (2011) 1067
Uhlig, R.P.; Zec, M.; Brauer, H.; Thess, A.
Lorentz force eddy current testing: a prototype model
Journal of nondestructive evaluation 31 (2012) 357-372
Uhlig, R.P.; Zec, M.; Ziolkowski, M.; Brauer, H.; Thess, A.
Lorentz force sigmometry: a contactless method for electrical conductivity
measurements
Ulbrich, A.; Reinmöller, M.; Beenken, W.J.D.; Krischok , S.
Surface electronic structure of [XMIm]Cl probed by surface sensitive
spectroscopy
ChemPhysChem 13 (2012) 1718
Wang, F.; Néel, N.; Kröger, J.; Vázquez, H.; Brandbyge, M.; Wang, B.;
Berndt, R.
A three-state single molecular junction
Journal of Physics: Condensed Matter 24 (2012) 394012
Wang, F.; Wu, K.; Kröger, J.; Berndt, R.
Structures of phthalocyanine molecules on surfaces studied by STM
AIP Advances 2 (2012) 041402
Wang, Y. F.; Néel, N.; Kröger, J.; Vázquez, H.; Brandbyge, M.; Wang,
B.; Berndt, R.
Voltage-dependent conductance states of a single-molecule junction
Journal of Physics: Condensed Matter 24 (2012) 394012
Weber, J.; Laqua, D.; Williamson, A.; Husar, P.; Schober, A.
Capacitive sensor concept for monitoring neuronal activity in vitro
Usluer, Ö.; Kästner, C.; Abbas, M.; Ulbricht, C.; Cimrova, V.; Wild, A.;
Birckner, E.; Tekin, N.; Sariciftci, N.S.; Hoppe, H.; Rathgeber, S.;
Egbe, D.A.M.
Charge carrier mobility, photovoltaic, and electroluminescent properties
of anthracene-based conjugated polymers bearing randomly distributed
side chains
Journal of Polymer Science A 50 (2012) 3425-3436
Wee, L.K.; Chai, H.Y.; Supriyanto, E.
Three dimensional nuchal translucency assessment using magnetic
resonance reconstruction imaging
Journal of scientific and industrial research 71 (2012) 187-194
Vinzenz, X.; Hüger, E.; Himmerlich, M.; Krischok, S.; Busch, S.;
Wöllenstein, J.; Hoffmann, C.
Preparation and characterization of poly(L-histidine)/poly(L-glutamic acid)
multilayer on silicon with nanometer-sized surface structures
J. Colloid and Interface Science 386 (2012) 252
Wegfraß, A.; Diethold, C.; Werner, M.; Alferenok, A.; Resagk, C.;
Fröhlich, T.; Halbedel, B.; Lüdtke, U.; Thess, A.
Lorentzkraft – Anemometrie für die berührungslose Durchflussmessung
von Elektrolyten
Voges, D.; Carl, K.; Klauer, G.J.; Uhlig, R.; Schilling, C.; Behn, C.; Witte,
H.
Structural characterization of the whisker system of the rat
IEEE sensors journal 12 (2012) 332-339
Wegfraß, A.; Diethold, C.; Werner, M.; Fröhlich, T.; Halbedel, B.;
Hilbrunner, F.; Resagk, C.; Thess, A.
A universal noncontact flowmeter for liquids
Vorbringer-Dorozhovets, N.; Hausotte, T.; Manske, E.; Shen, C.; Jäger,
G.
Novel control scheme for a high-speed metrological scanning probe
microscope
Measurement Science & Technology, 22 (2011) 094012
Wegfraß, A.; Diethold, C.; Werner, M.; Resagk, C.; Fröhlich, T.;
Halbedel, B.; Thess, A.
Flow rate measurement of weakly conducting fluids using Lorentz force
velocimetry
Contact
198
Weis, H.; Hilbrunner, F.; Fröhlich, T.; Jäger, G.
Mechatronic FEM model of an electromagnetic-force-compensated load
cell
Weiß, M.; Steigenberger, J.; Geinitz, V.
Extreme Biegung berechnet
Weyrich, S.; Sprenger, S.; Böttrich, M.; Schmidt, P.; Laqua, D.; Ley, S.;
Husar, P.
Development of a phantom to modulate the maternal and fetal pulse
curve for pulse oximetry measurements
Wilke, M.; Teichert, G.; Gemma, R.; Pundt, A.; Kirchheim, R.;
Romanus, H.; Schaaf, P.
Glow discharge optical emission spectroscopy for accurate and well
resolved analysis of coatings and thin films
Thin Solid Films 520 (2011) 1660-1667
Williamson, A.; McClean, E.; Leipold, D.; Zerulla, D.; Runge, E.
The design of efficient surface-plasmon-enhanced ultra-thin polymerbased solar cells
Winkler N.; Leuthold J.; Lei Y.; Wilde G.
Large-scale highly ordered arrays of freestanding magnetic nanowires
Wong K.M; Alay-e-Abbas S.M.; Shaukat A.; Fang Y.G; Lei Y.
First-principles investigation of the size-dependent structural stability and
electronic properties of O-vacancies at the ZnO polar and non-polar
surfaces
Worsch, C.; Schaaf, P.; Harizanova, R.; Rüssel, C.
Magnetisation effects of multicore magnetite nanoparticles crystallised
from a silicate glass
Journal of materials science 47 (2012) 5886-5890
Wuttke, V.; Witte, H.; Kempf, K.; Oberbach, T.; Delfosse, D.
Influence of various types of damage on the fracture strength of ceramic
femoral heads
Biomedizinische Technik 56 (2011) 333-339
Yang, S.K.; Lapsley, M.I.; Cao, B.Q.; Zhao, C.L.; Zhao, Y.H.; Hao, Q.Z.;
Kiraly, B.; Scott, J.; Li, W.Z.; Wang, L.; Lei, Y.; Huang, T.J.
Large-Scale Fabrication of Three-Dimensional Surface Patterns Using
Template-Defined Electrochemical Deposition
Advanced Functional Materials 23 (2012) 720-730
Zelle, D.; Fiedler, P.; Haueisen, J.
Artifact reduction in multichannel ECG recordings acquired with textile
electrodes
Zheng, H.; Kröger, J.; Berndt, R.
Spectroscopy of single donors at ZnO(0001) surfaces
Ziegler, M.; Néel, N.; Lazo, C.; Ferriani, P.; Heinze, S.; Kröger, J.;
Berndt, R.
Spin valve effect in single-atom contacts
New J. Phys. 13 (2011) 085011
Zimmermann, S.; Specht, U.; Spieß, L.; Romanus, H.; Krischok, S.;
Himmerlich, M.; Ihde, J.
Improved adhesion at titanium surfaces via laser-induced surface
oxidation and roughening
Materials Science & Engineering A 558 (2012) 755
Contact
199
Books / Book Chapters
Alt, W.; Böhm, V.; Kaufhold, T.; Lobutova, E.; Resagk, C.; Voges, D.;
Zimmermann, K.
Theoretical and experimental investigations of amoeboid movement and
first steps of technical realisation
Nature-inspired fluid mechanics: results of the DFG priority programme
1207 „nature-inspired fluid mechanics" 2006 - 2012
Heidelberg [u.a.]: Spring (2012) 3-23
Cimalla, I.; Gebinoga, M.; Schober, A.; Polyakov, V.; Lebedev, V.;
Cimalla, V.
AlGaN/GaN sensors for direct monitoring of nerve cell response to
inhibitors
Semiconductor device-based sensors for gas, chemical, and biomedical
applications
Boca Raton, Fla. [u.a.]: CRC Pre (2011) 1-42
Czink, N.; Garcia A., Alexis P.; Haneda, K.; Jacob, M.; Kåredal, J.;
Käske, M.; Medbo, J.; Poutanen, J.; Salmi, J.; Steinböck, G.; Witrisal,
K.
Channel measurements
In: Pervasive mobile and ambient wireless communications: COST action
2100
London, Springer (2012) 5-65
Engshuber, M.
Dem Fortschritt verpflichtet - 150 Jahre VDI in Thüringen
Thüringer Mitteilungen: das Magazin für Technik, Wissenschaft und
Wirtschaft (2011)
Große-Knetter, J.; Schaaf, P.
Das physikalische Praktikum: Handbuch 2011 für Studentinnen und
Studenten der Physik
Universitätsdrucke, Universitätsverlag Göttingen (2011)
Große-Knetter, J.; Schaaf, P.
Das physikalische Praktikum: Handbuch 2012 für Studentinnen und
Studenten der Physik
Universitätsdrucke, Universitätsverlag Göttingen (2012)
Helbig, M.
UWB for medical microwave breast imaging
In: Handbook of ultra-wideband short-range sensing: theory, sensors,
applications
Weinheim: Wiley-V (2012) 726-744
Herrmann, R.; Bonitz, F.
Non-destructive testing in civil engineering using M-sequence-based UWB
sensors
In: Handbook of ultra-wideband short-range sensing : theory, sensors,
applications
Husung, S.; Schorcht, H.-J.
Thüringen - ein Kernland der deutschen Büromaschinenindustrie
In: Dem Fortschritt verpflichtet - 150 Jahre VDI in Thüringen
Thüringer Mitteilungen: das Magazin für Technik, Wissenschaft und
Wirtschaft (2011) 32-36
Kallenbach, E.; Eick, R.; Quendt, P.; Ströhla, T.; Feindt, K.; Kallenbach,
M.; Radler, O.
Elektromagnete: Grundlagen, Berechnung, Entwurf und Anwendung
Vieweg + Teubner (2012)
Kmec, M.
Monolithically integration of M-sequence-based sensor head
applications
Koch M.; Düngen M.; Sturm S.
Innovationsfelder der Kunststofftechnik – Roadmap für die Thüringer
Kunststoffverarbeitungsindustrie
TU Ilmenau (2011) - ISBN 978-3-9812489-8-2
Koch, J.
Laserendbearbeitung metallischer Werkstoffe
Werkstofftechnik aktuell 5
TU IlmenauUniversitätsbiblithek (2011) - ISBN-13: 978-3939473954
Contact
200
Köhler, J.M.; Funfak, A.; Cao, J.; Kürsten, D.; Schneider, S.; Günther,
P.M.
Addressing of concentration spaces for bioscreenings by micro
segmented flow with microphotometric and microfluorimetric detection
In: Optical nano- and microsystems for bioanalytics
Springer Series on Chemical Sensors and Biosensors Vol.10 (2012) 47-81
Springer Berlin Heidelberg – ISBN 978-3-642-25497-0
Köhler, M.
Vom Urknall zum Cyberspace: fast alles über Mensch, Natur und
Universum
Wiley-VCH Verlag GmbH & Co. KGaA (2011) ISBN-13: 978-3527327393
Körber, R.; Höfner, N.; Burghoff, M.; Trahms, L.; Haueisen, J.;
Martens, S.; Curio, G.
Low field NMR as a tool for neuronal current detection: a feasibility study
in a phantom
In: Magnetic particle imaging: a novel SPIO nanoparticle imaging
technique
Springer Proceedings in Physics 140
Springer - Heidelberg [u.a.] (2012) 369-370 - ISBN-13: 978-3642241321
Kosch, O.; Thiel, F.; Schwarz, U.; Scotto di Clemente, F.; Hein, M.;
Seifert, F.
UWB cardiovascular monitoring for enhanced magnetic resonance
imaging
applications
Lutherdt, S.
Entwicklung und Erprobung einer Informationsplattform für Senioren zur
individualisierten Informationsgewinnung und Wahrnehmung spezifischer
Dienstleistungsangebote
In: AAL- und E-Health-Geschäftsmodelle: Technologie und
Dienstleistungen im demografischen Wandel und in sich verändernden
Wertschöpfungsarchitekturen
Gabler-Verlag Wiesbaden (2012) 213-238 ISBN 978-3-8349-3520-5
Narandžić, M.; Hong, A.; Kotterman, W.; Thomä, R.S.; Reichardt, L.;
Fügen, T.; Zwick, T.
Channel modeling
In: OFDM: concepts for future communication systems
Springer Berlin [u.a.] (2011) 15-31
Sachs, J.
Handbook of ultra-wideband short-range sensing: theory, sensors,
applications
Wiley-VCH Verlag GmbH & Co. KGaA (2012) ISBN: 9783527408535
Schaaf, P.
Materials for Energy and Power Engineering (Werkstoffe für die
Elektrotechnik)
Series: Werkstofftechnik Aktuell 7
Universtitätsverlag Ilmenau (2012) ISBN 978-3-86360-035-8
Schneider, M.
GREX - Software Guidance: Rev. 1.2009.11.19
Technische Universität Ilmenau (2011) URN: urn:nbn:de:gbv:ilm12011200360
Imaging techniques for studying OPV stability and degradation
In: Stability and degradation of organic and polymer solar cells.
John Wiley & Sons (2012) 39-70 ISBN: 978-1-119-95251-0
Sinzinger, S.; Cahill, B.P.; Metze, J.; Hoffmann, M.
Optofluidic microsystems for application in biotechnology and life
sciences
In: Optical nano- and microsystems for bioanalytics. Part V
Springer Series on Chemical Sensors and Biosensors 10
Springer Berlin Heidelberg (2012) 305-323 ISBN 978-3-642-25497-0
Stapf, S.
Diffusion and flow in fluids
In: eMagRes
John Wiley and Sons (2012) 967-985 Online ISBN: 9780470034590
Steinhoff, U.; Liebl, M.; Bauer, M.; Wiekhorst, F.; Trahms, L.;
Baumgarten, D.; Haueisen, J.
Spatially resolved measurement of magnetic nanoparticles using
inhomogeneous excitation fields in the linear susceptibility range (<1mT)
Magnetic particle imaging
Springer Proceedings in Physics 140
Springer Berlin Heidelberg (2012) 295-300
Süße, R.; Humbla, S.
Computerbuch: eine Einführung, verständlich erklärt
Wissenschaftsverlag Thüringen (2011) ISBN-13: 978-3936404500
Weber, C.
Design theory and methodology - contributions to the computer support
of product development/design processes
In: The future of design methodology
Springer-Verlag London Limited (2011) 91-104 ISBN: 978-0-85729-614-6
Zetik, R.
UWB localization
In: Handbook of ultra-wideband short-range sensing : theory, sensors,
applications
Zaikou, Y.; Barthel, A.; Nacke, T.; Pliquett, U.; Helbig, M.; Sachs, J.;
Friedrich, J.; Peyerl, P.
Measurement concept for broadband impedance spectroscopy analysers
for process applications
In Lecture Notes on Impedance Spectroscopy: Measurement, Modeling
and Applications Vol.1
CRC Press Taylor & Francis Group, LLC (2012) Print ISBN: 978-0-41568405-7
Contact
201
Selected Conference Proceedings
Abahmane, L.; Knauer, A.; Köhler, J.M.; Groß, A.G.
Synthesis of polypyridine derivatives using alumina supported gold
nanoparticles under micro continuous flow conditions
Abd El-Maksoud, R.; Hillenbrand, M.; Sinzinger, S.; Omar, M.F.
Measuring the refractive index of double-clad fibers using an
interferometric technique
DGaO-Proceedings - Erlangen-Nürnberg:
Dt. Gesellschaft für angewandte Optik 113 (2012)
Abd El-Maksoud, R.; Hillenbrand, M.; Sinzinger, S.
Ghost images for optical systems with tilted object plane
DGaO-Proceedings. - Erlangen-Nürnberg:
Dt. Gesellschaft für angewandte Optik 113 (2012)
Agla, K.A.; Wetzstein, O.; Ortlepp, T.; Töpfer, H.
Modeling of noise-induced jitter in low-power mixed-signal circuits using
a SystemC highlevel description
20th Telecommunications Forum (TELFOR); (2012)
IEEE Conference Proceedings (2012) 943-946
Alferenok, A.; Lüdtke, U.
Design Optimization of the Magnet System for the Lorentz Force
Velocimetry of Electrolytes
Proceedings of the 15th International Symposium on Applied
Electromagnetics and Mechanics (2011)
Alferenok, A.; Luedtke, U.
Optimization of the magnet system for the Lorentz Force Velocimetry of
low conducting materials
Proceedings of the 3rd International Conference on Engineering
Optimization (2012)
Aristizabal, E.; Günter, F.; Schaaf, P.
A new method to characterize material properties of copper by
microindentation
57th International Scientific Colloquium (IWK),
Workshop Materials for Energy and Power Engineering (2012)
Augsburg, K.; Gramstat, S.; Horn, R.; Ivanov, V.; Sachse, H.
Measures development for brake dust emissions with computational fluid
dynamics and particle imaging velocimetry
SAE technical papers (2011) 2011-01-2345
Augsburg, K.; Gramstat, S.; Horn, R.; Ivanov, V.; Sachse, H.; Shyrokau,
B.
Investigation of brake control using test Rig-in-the-Loop technique
SAE technical papers (2011) 2011-01-2372
Baeumler, M.; Cimalla, V.; Kirste, L.; Prescher, M.; Passow, T.;
Benkhelifa, F.; Bernhardt, F.; Wagner, J.; Eichapfel, G.; Krischok, S.;
Himmerlich, M.
Relationship between Refractive Index and Density for AlOx deposited on
4H n-SiC
Proc. of WOCSDICE-EXMATEC (2012)
Bartsch, H.; Barth, S.; Müller, J.
Embedded Ceramic Capacitors in LTCC
8th International Conference and Exhibition on Ceramic Interconnect and
Ceramic Microsystems Technologies, Erfurt, Germany (2012)
Bartsch, H.; Walther, F.; Krümmer, R.; Reimann, T.; Barth, S.; Müller, J.
Characteristics of buried capacitors in LTCC multilayer packages
Smart systems integration 2011, Dresden, Germany (2011)
Bergmann, J.P.; Patschger A.; Bastick, A.
UTILIZZO DI LASER IN FIBRA AD ELEVATA FOCALIZZAZIONE PER LA
SALDATURA – VANTAGGI E PROPRIETÀ
Proceeding of Giornate nazionali della saldatura (2011)
Bergmann, J.P.; Patschger, A.; Bastick, A.
Enhancing process efficiency due to high focusing with high brightness
lasers - applicability and constraints
Physics procedia 12 (2011) Part A, 66-74
Bergmann, J.P.; Stambke, M.
Potential of laser-manufactured polymer-metal hybrid joints
Physics procedia 39 (2012) 84-91
Contact
202
Bley, T.; Pignanelli, E.; Fischer, M.; Günschmann, S.; Müller, J.;
Schütze, A.
IR Optical Oil Quality Sensor System for High Pressure Applications
Mechatronics 2012 - The 13th Mechatronics Forum International
Conference, Linz, Austria, Proceedings Vol. 2/3, ISBN 978-3-99033-046-5
(2012) 351-358
Bönicke, H.; Ament, C.
Increased usability through user interface modification of development
and education tools for embedded systems
IEEE Conference Proceedings on Control Applications (2012) 675-680
Burkhardt, T.; Bruchmann, C.; Kamm, A.; Hornaff, M.; Beckert, E.;
Gebhardt, S.; Müller, J.; Hoffmann, M.; Eberhardt, R.; Tünnermann, A.
Smarte adaptive-optische Mikrosysteme – Aufbautechnologie und
thermomechanische Charakterisierung
Proc. Mikrosystemtechnik-Kongress 2011, (2011) Darmstadt
Burkhardt, M.; Sandfuchs, O.; Steiner, R.; Gatto, A.; Sinzinger, S.
Möglichkeiten und Grenzen der interferenzlithografischen Herstellung
modulierter Blazegitter
DGaO-Proceedings 112 (2011) 47
Burkhardt, M.; Fechner, R.; Erdmann, L.; Frost, F.; Steiner, R.;
Sandfuchs, O.; Schindler, A.; Gatto, A.; Sinzinger, S.
Imaging gratings with modulated blaze - realized by a combination of
holography and reactive ion beam etching
DGaO-Proceedings 113 (2012) A3
Döring, U.; Brecht, R.; Brix, T.
thinkMOTION - DMG-Lib goes Europeana
in: Mechanisms, transmissions and applications,
Springer (2012) 37-45
Englert, M.; Juschtschenko, W.; Hagemann, M.; Brinkmann, M.;
Sinzinger, S.
Analysis and optimization of volume diffusors
DGaO-Proceedings 112 (2011) B26
Fischer, M.; Mache, T.; Bartsch, H.; Müller, J.; Pawlowski, B.; Barth, S.
SiCer – An advanced substrate for 3D integrated nano and micro systems
Proc. Smart Systems Integration, Dresden (2011)
Fischer, M.; Mache, T.; Pawlowski, B.; Schabbel D.; Müller, J.
SiCer - A substrate to combine ceramic and silicon based micro systems
2012 IMAPS/ACerS 8th International Conference and Exhibition on
Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT),
Erfurt, Germany (2012)
Garcia Ariza, A. P.; Müller, R.; Wollenschläger, F.; Xia, L.; Elkhouly, M.;
Sun, Y.; Trautwein, U.; Thomä, R. S.
Dual-polarized architecture for channel sounding at 60 GHz with
digital/analog phase control based on 0.25µm SiGe BiCMOS and LTCC
technology
European Conference on Antennas and Propagation; 5 (Rome) :
Piscataway, NJ : IEEE (2011) 1454-1458
Garcia Ariza, P.; Müller, R.; Stephan, R.; Wollenschläger, F.; Schulz, A.;
Elkhouly, M.; Scheytt, C.; Trautwein, U.; Müller, J.; Thomä, R.; Hein,
M.A.
60 GHz Polarimetric MIMO Sensing: Architectures and Technology
Proc. 6th European Conference on Antennas and Propagation (EUCAP)
Prague (2012)
Garcia Ariza, P.; Müller, R.; Stephan, R.; Wollenschläger, F.; Schulz, A.;
Elkhouly, M.; Scheytt, C.; Trautwein, U.; Müller, J.; Thomä, R.; Hein,
M.A.
60 GHz Polarimetric MIMO Sensing
Training Schools 3rd MCM, EURO-COST, IC 1004 TD(12) 03028 Barcelona
(2012)
Geiling, T.; Welker, T.; Bartsch H.; Müller, J.
Design, fabrication, and operation of a nitrogen measurement device
based on LTCC
Proc. 8th Conference on Ceramic Interconnect and Ceramic Microsystems
Technologies, Erfurt (2012)
Geiling, T.; Welker, T.; Bartsch H.; Müller, J.
Measurement of nitrogen monoxide levels in gas flows with a micro total
analytical system based on LTCC
Technologies, San Diego (2011)
Geža, V.; Jakovičs, A.; Krieger, U.; Halbedel, B.
Modelling of electromagnetic heating and mixing conditions in glass melt
output equipment
International journal of computation & mathematics in electrical &
electronic engineering 30 (2011) 1467-1478
Hronec, P.; Kováéc, J.; éSkriniarová, J.; Shokhovets, S.; Schaaf, P.
Investigation of photonic crystal LED coupling properties using
spectroscopic ellipsometry
Göckeritz, R.; Schmidt, D.; Beleites, M.; Seifert, G.; Krischock, S.;
Himmerlich, M.; Pezoldt, J.
High temperature graphene formation on capped and uncapped SiC
Mater. Sci. Forum, Silicon Carbide and Related Materials 2010
(ECSCRM2010), 785 (2011) 679-680
Humbla, S.; Hein, M. A.
Proceedings of the 17th International Student Seminar Microwave and
Optical Applications of Novel Phenomena and Technologies,
Ilmenau (2011)
Göckeritz, R.; Tonisch, K.; Jatal, W.; Hiller, L.; Schwierz, F.; Pezoldt, J.
Side gate graphene and AlGaN/GaN unipolar devices
Adv. Mater. Res. 324 (2011) 427
Kampmann, R.; Kleindienst, R.; Rose, F.; Hartung, N.; Naglatzki, M.;
Sinzinger, S.
Laser power stabilization for improved ablation depth uniformity
Grewe, A.; Hillenbrand, M.; Sinzinger, S.
Optimized Alvarez phase plates for hyperspectral imaging
Kelly, P.; Meinecke, T.; Sabitov, N.; Sinzinger, S.; Sheridan, T.
Digital holography and phase retrieval: a theoretical investigation
Proceedings of SPIE 80740C (2011)
Günschmann S.; Fischer M.; Bley T.; Käpplinger I.; Brode W.;
Mannebach H.; Müller J.
Bonding of 2 mm thick silicon wafers using LTCC as an intermediate layer
Proc. Ceramic Interconnect & Ceramic Microsystems Technologies CICMT
2012, Erfurt (2012)
Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R. E.; Williams, O. A.;
Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V.
Dynamic characterization of thin aluminum nitride microstructures
Physica status solidi C 8 (2011) 479-481
Günschmann S.; Fischer M.; Bley T.; Käpplinger I.; Brode W.;
Mannebach H.; Steffensky J.; Müller J.
Fabrication of a Si-measurement cuvette using a new multifunctional
bonding method
Proc. 23rd Micromechanics and Microsystems Europe Workshop MME,
Ilmenau (2012)
Gutzeit, N.; Müller, J.; Reinlein, C.; Gebhardt, S.
LTCC membranes with integrated heating structures, temperature sensors
and strain gauges; 35th Internaitonal Spring Seminar on Electronics
Technology (2012) 399-405
Gutzeit, N.; Müller, J.; Reinlein, C.; Gebhardt, S.
Manufacturing and characterization of a deformable LTCC membrane
with integrated temperature sensors, strain gauges and heating
structures
Halbedel, B.; Krieger, U.; Werner, M.; Torres, J. O.; Schadewald, U.;
Quiroz, P.
Electromagnetic processing of materials at the Department InorganicNonmetallic Materials
Journal of iron and steel research international 19 (2012) Suppl.1-1, 135140
Heinicke, C.; Pulugundla, G.; Tympel, S.; Boeck, T.; Karcher, C.;
Schumacher, J.; Rahneberg, I.; Fröhlich, T.; Hilbrunner, F.; Thess, A.
Lorentz force velocimetry for local velocity measurement
Journal of iron and steel research international 19 (2012) Suppl. 1-1 578581
Heinrich, G.; Höger, I.; Bähr, M.; Stolberg, K.; Wütherich, T.;
Leonhardt, M.; Lawerenz, A.; Gobsch, G.
Investigation of laser irradiated areas with electron backscatter diffraction
Energy procedia 27 (2012) 491-496
Hillenbrand, M.; Mitschunas, B.; Homberg, S.; Sinzinger, S.
Novel vision aids for people suffering from Age-Related Macular
Degeneration
Hillenbrand, M.; Mitschunas, B.; Werner, J.; Sinzinger, S.; Abd ElMaksoud, R. H.
Optische Systeme ohne Rotationssymmetrie: Bestimmung von Bildlage
und Bildorientierung
Hiller, L.; Stauden, T.; Kemper, R.M.; Lindner, J.K.N.; As, D.J.; Pezoldt,
J.
ECR-etching of submicron and nanometer sized 3C-SiC(100) Mesa
structures
(ICSCRM2011) 901 (2012) 717-720
Kosc, I.; Hotovy, I.; Grieseler, R.; Rehacek, V.; Wilke, M.; Spiess, L.
Thin compound oxide films based on NiO and TiO2 for gas detection
Proceedings of the 17th International Conference on Applied Physics of
Condensed Matter, APCOM (2011)
Kotlár, M.; Vretenár, V.; Veselý, M.; Redhammer, R.; Schaaf, P.
Carbon nanotubes - properties and applications
Kraft, C.; Brömel, A.; Schönherr, S.; Hädrich, M.; Reislöhner, U.;
Schley, P.; Gobsch, G.; Goldhahn, R.; Wesch, W.; Metzner, H.
Phosphorus implanted cadmium telluride solar cells
Thin solid films 519 (2011) 7153-7155
Kraft, C.; Hädrich, M.; Metzner, H.; Reislöhner, U.; Schley, P.;
Goldhahn, R.
Investigation of the excitonic luminescence band of CdTe solar cells by
photoluminescence and photoluminescence excitation spectroscopy
Thin solid films 519 (2011) 7173-7175
Leineweber, A.; Lienert, F.; Glock, S.; Woehrle, T.; Schaaf, P.; Wilke,
M.; Mittemeijer, E. J.
X-ray diffraction investigations on gas nitrided nickel and cobalt
Zeitschrift für Kristallographie / Proceedings (2011) 293-298
Experimental exploration of the correlation coefficient of static speckles
in Fresnel configuration
Proceedings of SPIE 8133 (2012) 813310
Li, D.; Kirner, R.; Kelly, P.; Sheridan, T.
Speckle: two new metrology techniques.
Proceedings of SPIE 8429 (2012) 84290X-1
Linkohr, S.; Pletschen, W.; Polyakov, V.; Himmerlich, M.; Lorenz, P.;
Krischok, S.; Kirste, L.; Müller, S.; Ambacher, O.; Cimalla, V.
Influence of plasma treatments on the properties of GaN/AlGaN/GaN
HEMT structures
Lonij, Guido; Corves, Burkhard; Reeßing, Michael; Razum, Matthias
Application of the research environment e-Kinematix in mechanism
development
Advances in mechanisms design: proceedings of TMM 2012 (2012) 27-33
Lovasz, E.-C.; Perju, D.; Corves, B.; Brix, T.; Modler, K.-H.; Maniu, I.;
Gruescu, C. M.; Lovasz, A.; Ciupe, V.
Multilingual illustrated µ-thesaurus in mechanisms science
Mechanisms, transmissions and applications (2012) 47-58
Numerical simulation of induced alterations of flow patterns within glass
melts using external Lorentz forces
Journal of iron and steel research international 19 Suppl.1-1 (2012) 471
Ma, X.; Grewe, A.; Hillenbrand, M.; Sinzinger, S.
Design and integration of a multi-channel fluorescence detector
DGaO-Proceedings 113 (2012) P1
Contact
203
Mache, T.; Müller, J.; Thelemann, T.
Chemical selective coating of nickel / palladium / gold metallization on
screen-printed thick film on LTCC and Al2 O3 ceramic for high temperature
applications
Proc. Ceramic Interconnect & Ceramic Microsystems Technologies CICMT
2012, Erfurt (2012)
Manske, E.; Jäger, G.; Hausotte, T.; Machleidt, T.
Multisensor technology based on a laser focus probe for nanomeasuring
applications over large areas
Optical measurement systems for industrial inspection VII ; Pt. 1. Bellingham, Wash. (2011) 808203
Pezoldt, J.; Kalnin, A.A.
Defect interactions and polytype transitions
Adv. Mater. Res. 324 (2011) 217
Pezoldt, J.; Kups, T.; Stubenrauch, M.; Fischer, M.
Black luminescent silicon
Phys. Status Solidi C 8 (2011) 1021
Pezoldt, J.; Schröter, B.
Polarity control of CVD grown 3C-SiC on Si(111)
(ECSCRM2010) 91 (2011) 679-680
Manske, E.
Modular family of sensors for a nanopositioning and nanomeasuring
machine
International Symposium on Optomechatronic Technologies
IEEE Xplore (2012) DOI 10.1109/ISOT.2012.6403231
Piekarz, I.; Sorocki, J.; Wincza, K.; Gruszczynski, S ; Muller, J.; Welker,
T.
Meandered coupled-line single-section directional coupler designed in
multilayer LTCC technology
Telecommunications Forum (TELFOR), 20th Publication Year (2012) 983
Markweg, E.; Nguyen, T. T.; Weinberger, S.; Ament, C.; Hoffmann, M.
Development of a miniaturized multisensory positioning device for laser
dicing technology
Physics procedia 12 Part B (2011) 387-395
Predanocy, M.; Hotový, I.; Čaplovičová, M.; Řeháček, V.; Košč, I.;
Spiess, L.
Sputtered NiO thin films for organic vapours testing
ASDAM 2012
Megel, L.; Meinecke, T.; Kelly, P.; Sinzinger, S.
Lateral speckle size in Phase Retrieval systems
DGAO proceedings (2012)
Rentsch, S.; Müller, J.; Hein, M.
Tunability, Frequency and Temperature Behavior of Cofired LTCCIntegrated Barium-Strontium-Titanate up to 8 GHz
Technologies Erfurt (2012)
Meinecke, T.; Kelly, D.-P.; Sabitov, N.; Sinzinger, S.
Numerical propagation algorithms and phase retrieval techniques
Müller, J.; Stöpel, D.; Mache, T.; Schulz, A.; Drüe, K.-H.; Humbla, S.;
Hein, M.A.
Fineline Structuring on LTCC-Substrates for 60 GHz Line Coupled Filters
Proc. European Microelectronics Packaging Conference, Brighton (2011)
Müller, R.; Garcia Ariza, A. P.; Xia, L.; Wollenschläger, F.; Schulz, A.;
Lopez-Diaz, D.; Elkhouly, M.; Thomä, R.S.; Hein, M. A.; Müller, J.
60 GHz ultrawideband hybrid-integrated dual-polarized front-end in LTCC
technology
European Conference on Antennas and Propagation 5 (Rome)
Piscataway, NJ : IEEE (2011) 1449-1453.
Müller, A.; Jäger, G.; Manske, E.
Interferometric measurement of profile deviations of large precision
mirrors
Optical measurement systems for industrial inspection VII ; Pt. 1. Bellingham, Wash. (2011) 80821N
Quantitative evaluation of strain in epitaxial 2H-AlN layers
Adv. Mater. Res. 324 (2011) 213
Narandžić, M.; Schneider, C.; Käske, M.; Jäckel, S.; Sommerkorn, G.;
Thomä, R.
Large-scale parameters of wideband MIMO channel in urban multi-cell
scenario
Proceedings of the 5th European Conference on Antennas and
Propagation (EUCAP 2011); (2011) 3759-3763
Patschger, A.; Hild, M.; Bergmann, J.P.; Bliedtner, J.
Examinations on laser welded joints of ultra thin metallic foils
Proceedings of ICALEO (2012)
Patschger, A.; Bergmann, J.P.; Bliedtner, J.
Flexible and Efficient Laser Remote Welding of Ultra-Thin Metal Foils
Proceedings of ICALEO (2011)
Patschger, A.; Sahib, C.; Bergmann, J. P.; Bastick, A.
Process optimization through adaptation of shielding gas selection and
feeding during laser beam welding
Physics procedia 12 Part A (2011) 46-55
Pezoldt, J.; Grieseler, R.; Schupp, T.; As, D.J.; Schaaf, P.
Mechanical properties of cubic SiC, GaN and AlN thin films
(ICSCRM2011) 513 (2012) 717-720
Pezoldt, J.; Hummel, C.; Schwierz, F.
Graphene field effect transistor improvement by graphene-silicon dioxide
interface modification
Physica E 44 (2012) 985-988
Contact
204
Reuters, B.; Wille, A.; Holländer, B.; Sakalauskas, E.; Ketteniß, N.;
Mauder, C.; Goldhahn, R.; Heuken, M.; Kalisch, H.; Vescan, A.
Growth studies on quaternary AlInGaN layers for HEMT application
Journal of electronic materials 41 (2012) 905-909
Sattel, T.; Röser, D.; Gutschmidt, S.
Multi-physics modeling of an electro-thermally actuated micro-cantilever
for scanning probe microscopy
Proceedings of the ASME International Mechanical Engineering Congress
and Exposition - 2010 ; Vol. 8, Pt. B. (2012) 1057-1065
Schaaf, P.
Werkstofftechnik aktuell 7: Materials for energy and power engineering
Materials for energy and power engineering : (Werkstoffe für die
Elektrotechnik) ; Ilmenau University of Technology (2012)
Schäfer, E.; Steinwandt, J.; Bayer, H.; Krauß, A.; Stephan, R.; Hein, M.
A.
Slotted-waveguide antennas for mobile satellite communications at 20
GHz
Proceedings of the 17th International Student Seminar Microwave and
Optical Applications of Novel Phenomena and Technologies", Ilmenau,
Germany, (2011) 39-50
Schalles, M.; Blumröder, G.
Calculation of the effective emissivity of blackbodies made of alumina
Schulz, A.; Rentsch, S.; Xia, L.; Mueller, R.; Mueller, J.
A Low Loss Fully Embedded Stripline Parallel Coupled BPF for Applications
using the 60 GHz Band
Technologies San Diego (2011)
Schulz, A.; Welker, T.; Gutzeit, N.; Stöpel, D.; Wollenschläger, F.;
Müller, J.
Optimized cavities for microwave applications using the new low loss
LTCC material Du Pont 9k7
Device Concepts Using Two-Dimensional Electronic Materials (Graphene,
MoS2, etc.)
Proc. ICSICT (2012) S04_02
Device concepts using two-dimensional electronic materials: graphene,
MoS2, etc.
11th International Conference on Technology (2012)
IEEE Conference Publications (2012) 1-4;
Schwierz, F.
Graphene-based FETs
9th International Conference on Microsystems
IEEE Conference Publications (2012) 131-138
Ultrafast manipulation of the Rabi splitting in metal-molecular aggregate
hybrid nanostructures
Sensfuss, S.; Schacher, H.; Eisenhawer, B.; Andrae, G.; Pietsch, M.;
Shokhovets, S.; Himmerlich, M.; Klemm, E.; Kroll, M.; Pertsch, T.
Polymer Solar Cells blended with Silicon Nanowires
Proc. of International Symposium Technologies for Polymer Electronics TPE12, Rudolstadt, eds. H.-K. Roth & K. Heinemann (2012) 84-87
Vogt, C.; Sinzinger, S.; Adelsberger, H.; Maurer, R.; Schneider, F.;
Mandler, R.; Kuepper, L.; Rascher, R.; Sperber, P.
An experimental study on a flexible grinding tool
Advances in abrasive technology XIV: selected, peer reviewed papers from
the 14th International Symposium on Advances in Abrasive Technology
(ISAAT 2011), Stuttgart, Germany (2011) 91-96
Sparrer, E.; Machleidt, T.; Hausotte, T.; Manske, E.; Franke, K.-H.
Integration of CMM software standards for nanopositioning and
Micro- and nanotechnology sensors, systems, and applications III ; Pt. 2. Bellingham, Wash. (2011) 80312G
Volland, B. E.; Hauguth, M.; Ishchuk, V.; Rangelow, I. W.; Goodyear,
A. L.
Irregular film thickness distribution in C 4 F 8 inductively coupled plasma
polymer deposition
Spieß L.; Weidauer U.; Kais A.; Teichert G.
Zerstörungsfreie Materialuntersuchungen an einem Pferdemaulkorb aus
dem Jahr 1597 aus dem Angermuseum Erfurt
DGZFP Jahrestagung Graz (2012)
Wang, D.; Schönherr, S.; Ronning, C.; Schaaf, P.
Patterned Array of nanoporous Silicon
23rd Micromechanics and Microsystems Europe Workshop (MME) (2012)
Spieß, L.; Morgenbrodt, S.; Teichert, G.; Schaaf, P.
Restaustenitbestimmung-vergleichende Untersuchung mit
zerstörungsfreien Messmethoden
DGZfP-Jahrestagung (2011)
Steffanson, M.; Gorovoy, K.; Ramkiattisak, V.; Ivanov, T.; Król, J.;
Hartmann, H.; Rangelow, I. W.
ARCH-type micro-cantilever FPA for uncooled IR detection
Stelian, C.; Alferenok, A.; Lüdtke, U.; Kolesnikov, Y.; Thess, A.
Numerical optimization and calibration of a Lorentz force flowmeter
Proceedings of the 8th International PAMIR Conference on Fundamental
and Applied MHD ; Vol. 2. - Grenoble : I (2011) 707-711
Sternkopf, C.; Wurmus, J.; Gerhardt, U.; Manske, E.
Fiber coupled plane mirror heterodyne laser interferometer with two
phase locked loop coupled He-Ne lasers
Proceedings : 16th International Conference on Mechatronics Technology,
Tianjin, China (2012) MES16 154-157
Stingaciu, L. R.; Weihermüller, L.; Pohlmeier, A.; Stapf, S.; Vereecken,
H.
Determination of soil hydraulic properties using magnetic resonance
techniques and classical soil physics measurements
AIP conference proceedings. - Melville, NY : In Bd. 1330 (2011) 77-80
Stoebenau, S.; Kleindienst, R.; Kampmann, R.; Sinzinger, S.
Enhanced optical functionalities by integrated ultraprecision machining
techniques
Proceedings of the 11th International conference of the European Society
for Precision Engineering and Nanotechnology ; Vol. 2. - Bedford : Eusp
(2011) 148-151
Stöpel, D.; Drüe, K.-H.; Humbla, S.; Mache, T.; Rebs, A.; Reppe, G.;
Schulz, A.; Vogt, G.; Hein, M.; Müller, J.
Fine-Line Structuring of Microwave Components on LTCC Substrates
Tvarozek, V.; Flickyngerova, S.; Novotny, I.; Rehacek, V.; Rossberg, D.;
Kups, T.; Schaaf, P.; Sutta, P.
Enhancement of fingerprint topology by sputtered nano-columnar thin
films
Uhlig, P.; Stoepel, D.; Mueller J.; Mosch, S.
Fine Line Conductors in LTCC
IMAPS Nordic Annual Conference 2012; Proceedings, Helsingor, Denmark
(2012)
Ulrich, S.; Rösch, R.; Neubert, T.; Mushin, B.; Szyszka, B.; Gobsch, G.;
Hoppe, H.
Organic photovoltaic solar cells using thin tungsten oxide as interlayer
anode contact material
Proceedings 26th European Photovoltaic Solar Energy Conference and
Exhibition (2011) 605-607
Vasa, P.; Pomraenke, R.; Cirmi, G.; De Re, El.; Wang, W.Schwieger, S.;
Leipold, D.; Runge, E.; Cerullo, G.; Lienau, C.
Contact
Wegfraß, A.; Diethold, C.; Werner, M.; Resagk, C.; Hilbrunner, F.;
Development of a novel flow rate measurement device for poorly
conducting fluids using Lorentz force velocimetry
and Applied MHD ; Vol. 1. - Grenoble : I (2011) 353-356
Wegfraß, A.; Resagk, C.; Diethold, C.; Fröhlich, T.; Werner, M.;
Lorentz force velocimetry for poorly conducting fluids - development and
validation of a novel flow rate measurement device
Journal of iron and steel research international 19 Suppl. 1-2 (2012) 613
Welker, T.; Geiling, T.; Bartsch H.; Müller, J.
Design and fabrication of gas tight optical windows in LTCC
Welker, T.; Grieseler, R.; Müller, J.; Schaaf, P.
Bonding of ceramics using reactive NanoFoil®
Proc. 4th Electronic System Integration Technologies Conference,
Amsterdam (2012)
Werner, J.; Zhao, M.; Hillenbrand, M.; Sinzinger, S.
RBF-based optical surfaces
Werner, M.; Halbedel, B.
Assembling and test of a Halbach array magnet system for Lorentz force
velocimetry in electrolytes
Investigations and experiments of sophisticated magnet systems for a
first Lorentz force velocimeter for electrolytes
and Applied MHD ; Vol. 1. - Grenoble: I (2011) 435-439
Optimization of NdFeB magnet arrays for improvement of Lorentz force
velocimetry
IEEE transactions on magnetics 48 (2012) 2925-2928
Witte, H.; Stubenrauch, M.; Fröber, U.; Fischer, R.; Voges, D.;
Hoffmann, M.
Integration of 3-D cell cultures in fluidic microsystems for biological
screenings
Wollenschläger, F.; Müller, R.; Stephan, R.; Garcia Ariza, P.; Schulz, A.;
Thomä, R.; Müller, J.; Hein, M.A.
A wideband 60 GHz differential stripline-to-waveguide transition for
antenna measurements in low-temperature co-fired ceramics technology
Proc. 6th European Conference on Antennas and Propagation (EUCAP),
Prague (2012)
Wu, Y.; Kelly, D. P.
Laser light interaction in a strongly scattering turbid medium: theory and
experiment
DGAO proceedings (2012)
Wu, Y.; Kelly, D. P.
Monte-Carlo-Simulation von Licht im getrübten Medium
205
Zaikou, Y.; Barthel, A.; Nacke, T.; Pliquett, U.; Helbig, M.; Sachs, J.;
Friedrich, J.; Peyerl, P.
Measurement concept for broadband impedance spectroscopy analysers
for process applications
Lecture notes on impedance spectroscopy ; Vol. 1: Measurement,
modeling and applications (includes the proceedings of the International
Workshop on Impedance Spectroscopy) CRC Pre (2011) 83-88
Zec, M.; Uhlig, R. P.; Ziolkowski, M.; Brauer, H.; Thess, A.
Lorentz force sigmometry
Zetik, R.; Thomä, R.S.
Ultra-wideband channel sounder - design, construction and selected
applications
20th Telecommunications Forum 2012
Zschäck, S.; Büchner, S.; Nguyen, T. T.; Amthor, A.; Ament, C.
Adaptive control of high precision positioning stages with friction
International Conference on Automation and Information Sciences 2012
Contact
206
Selected Invited Talks
Al-Haddad A.; Fang Y.G.; Zhao H.P.; Lei Y.
Three-dimensional TiO2 nanotube arrays for photo-device application
76th Annual Conference of the DPG (2012) Berlin, Germany
Augustin, S.; Fröhlich, T.; Ament, C.; Güther, T.
High speed temperature sensors in emission systems of combustion
engines
IMEKO World Congress Korea (2012)
Bastian M.; Heidemeyer P.; Koch M.; Kretschmer K.; Rudloff J.
A physical – mathematical model describing the process behaviour of
planetary roller extruders
PPS-27, 27th World Congress of the Polymer Processing Society,
Marrakech (2011)
Diethold, C.; Hilbrunner, F.; Fröhlich, T.; Manske, E.
Nanopositioning system with combined force measurement based on
electromagnetic force compensated balances
Fang Y.G.; Wong K.M.; Devaux A.; Wen L.Y.; Decola L.; Lei Y.
Fabrication and the characterization of the electrical, optical and field
emission properties of regular ZnO and PbSe nanowires arrays
76th Annual Conference of the DPG, Berlin, Germany (2012)
Gavril (Donose), D.; Schmidt, U.; Gheorghies, C.; Kups, T.; Ispas, A.;
Bund, A.
Electrodeposition of Co and Co-Cu nanowires in porous alumina
substrates by pulse and pulse reverse plating
IKTS 2012 Symposium: Anodisieren – Vom Korrosionsschutz bis zur
Nanotechnologie
Grote F.; Mi Y.; Zhao H.P.; Lei Y.
High performance super-capacitors based on template-prepared onedimensional MnO2 nanostructures
Grote F.; Xu J.J.; Zhao H.P.; Lei Y.
Template-Fabrication of Highly Ordered MnO2 One-Dimensional
Nanostructure Arrays and their Device Applications as Super-Capacitors
Spring-Meeting of the German Physical Society, Dresden, Germany (2011)
Hilbrunner, F.; Weis, H.; Petzold, R.; Fröhlich, T.; Jäger, G.
Investigation on the impedance-frequenzcy-response for a dynamic
behaviour description of electromagnetic force compensated load-cells
Koch M.; Düngen M.; Woyan F.
Drive Power Calculation for Single Screw Extruders
Polymeric Materials 2012, Halle/Saale (2012)
Koch M.; Düngen M.
Anwendung des LEANTEC-Motor für Einschneckenextruder
Sonderkolloquium, Elektrotechnisches Institut der TU Dresden (2012)
Koch M.; Fiebig Ch.
Die geometrische Gestaltung von Faserverbundbauteilen
Schwarzheider Kunststoffkolloquium, Schwarzheide (2012)
Koch M.; Nicolai K.; Hartmann R.
Latentwärmespeicher für automobile Anwendungen (Einbettung von
PCM-Salzen in Kunststoffhüllen)
Koch M.; Nicolai K.; Schneidmadel St.
Bedingungen für die Einarbeitung leitfähiger Füllstoffe in Thermoplaste
Koch M.; Nicolai K.
Materialkennwerte von Faserverbundkunststoffen für technische
Anwendungen
Thüringer Werkstofftag, Weimar (2012)
Koch M.; Pfennig K.
Eigenschaftsverbesserung von Bauteilen aus Biokunststoffen durch InLine-Compoundierung
9. Internationales Symposium Werkstoffe aus Nachwachsenden
Rohstoffen – naro.tech Erfurt (2012)
Contact
Koch M.; Sturm S.
Technologiebewertung von Biokunststoffen – Megatrends und ihre
Auswirkungen auf die Kunststoffbranche
Mitteldeutscher Kunststofftag, Halle (2011)
Koch, M.
Energie- und Ressourceneffizienz als Technologietreiber der
Kunststoffverarbeitung
ThEGA Forum, Erfurt (2012)
Koch, M.
Forschungs- und Entwicklungsperspektiven für Biokunststoffe im Kontext
kunststofftechnologischen Innovationsmanagements
AVK-Arbeitskreis: Trends und Zukunftsmärkte für Kunststoffverarbeiter,
Hannover Messe (2012)
Koch, M.
Innovationsfelder der Kunststofftechnik
TecPart Jahrestagung (2012)
Koch, M.
Produktionsplanung und Prozessführung als Instrumente der
Energieeinsparung im Spritzgießbetrieb
2. Spritzgießtag TU Ilmenau, Ilmenau (2011)
Koch, M.
Von Megatrends zu Entwicklungstrends, dargestellt am Beispiel der
Thüringer Kunststoffindustrie
Innovationstag Thüringen, Erfurt (2011)
Koch, M.
Wandel in den Technologieschwerpunkten der Kunststoffindustrie
Mitteldeutscher Kunststofftag, Leipzig (2012)
Kühnel, M.; Hilbrunner, F.; Büchner, J.; Jäger, G.; Manske, E.; Fröhlich,
T.
Traceable determination of relevant material parameters of binocular
shaped force transducers and load cells
Lei Y.; Sun H.
A new hybrid three-dimensional surface nano-patterning technology for
nano-device applications
2nd Symposium on Functional Surfaces of Volkswagen Foundation,
Aachen, Germany (2011)
Lei Y.; Y., L.; Grote F.; P., H.
Template-Based Surface Nano-Patterning and Device Applications
Conference on Ceramic Interconnect and Ceramic Microsystems
Technologies (CICMT) 2012, Erfurt, Germany (2012)
Lei Y.
An ERC Grantee from China hosted in a German University
Tagung für Hochschulleitungen, Hochschulrektorenkonferenz,
Frankfurt (2011)
Lei Y.
Template-based Surface Nano-patterning with High Structural Regularity,
Tuneable Properties, and Device Applications
The MRS Spring Meeting 2012 San Francisco, USA (2012)
Mi Y.; Zhan Z.B; Sun H.; Grote F.; Zhao H.P.; Lei Y.
Highly sensitive gas sensorsbased on three-dimensional surface nanopatterns realized by UTAM nano-structuring technique
Ostendorp S.; Lei Y.; Wilde G.
Realizing advanced surface nano-structuringby utilizing porous anodic
alumina membranes:breaking the limits
International Conference on Micro and Nano Engineering,
Berlin, Germany (2011)
Ostendorp S.; Leuthold J.; Lei Y.; Wilde G.
Quantitative investigation and optimization of porous anodic alumina for
surface nanostructuring beyond existing limitations
Schaaf, P.; Pezoldt, J.; Michael, S.; Grieseler, R.; Stubenrauch, M.;
Klaus, J.; Tonisch, K.
Testing of ultra-sensitive materials for nano-electromechanical systems –
USENEMS
ECI (Engineering Conferences International) Conference on
Nanomechanical Testing in Materials Research and Development,
Lanzarote, Canary Islands, Spain (2011)
207
Device concepts using two-dimensional electronic materials: Graphene,
MoS2, etc.
IEEE International Conference on Solid-State and Integrated Circuit
Technology (ICSICT2012), Xi’an, China (2012)
Sun H.; Wong K.M.; Bartels S.; Wilde G.; Lei Y.
ALD Growth of Highly Ordered ZnO Nanotube Arrays with Tunable
Structures and Their Device Applications
Teichert, G.; Wilke, M.
Die optische Glimmentladungsspektroskopie (GD-OES) als Analysetool in
der Härtereitechnik. Grundlagen, Hartstoffschichten, wärmebehandelte
Proben sowie Schadensfälle
AWT-Härtereikreis Suhl (2012)
Vellacherj R.; Zhan Z.B.; Lei Y., P.
Three-dimensional surface nanostructures for Energy Storage
Applications
Wen L.Y.; Zhao H.P.; Grote F.; Vellacherj R.; Zhan Z.B.; Al-haddad A.;
Fang Y.G.; Wong K.M.; Lei Y.
Template-based surface nano-patterning to realize high performance
devices
Winkler N.; Leuthold J.; Peterlechner M.; Lei Y.; Wilde G.
Magnetic nanowire arrays prepared by electrodeposition using AAO
templates
Wong K.M.; Fang Y.G.; Devaux A.; Wen L.Y.; De Cola L.; Lei Y.
Synthesize and characterization of the properties of intrinsic defects in
size-controlled surface ZnO nanowires by multiple spectroscopic
techniques
Wong K.M.; Wen L.Y.; Fang Y.G.; Grote F.; Sun H.; Lei Y.
Fabrication and Characterization of Well-Aligned Zinc Oxide Nanowire
Arrays and their realizations in Schottky-Device Applications
Xu F.; Yang S.K.; Grote F.; Zhao H.P.; Lei Y.
Surface Patterning Technique using Polystyrene Sphere Templates for
Fabricating Diverse Nanostructures and Broad Applications
Yang S.K.; Xu F.; Winkler N.; Zhao H.P.; Lei Y.
Surface Nano-Patterning in Realizing Large-Scale Ordered Arrays of
Metallic Nanoshells with Controllable Structures and Properties
Zhan Z.B.; Mi Y.; Sun H.; Grote F.; Zhao H.P.; Lei Y.
Sensitive gas sensor device obtained from the combination of 3D surface
nano- patterns technique with atomic layer deposition
Zhan Z.B.; Vellacherj R.; Wen L.Y.; Zhao H.P.; Lei Y.
Research of photocatalytic mechanism using tunable
metal/semiconductor nanosized heterostructures
Zhao H.P.; Yang S.K.; Grote F.; Xu F.; Lei Y.
Surface Patterning using Nano-Templates For Realizing Highly Ordered
Nanostructure Arrays with Controllable Properties
The Spring-Meeting of the German Physical Society, Dresden, Germany
(2011)
Contact
208
Conference Contributions (selected)
Improvement of the magnet system sensitivity for the flow rate
measurement based on Lorentz force velocimetry considering low
conducting fluids by means of numerical modeling
Workshop Elektroprozesstechnik Ilmenau (2011)
Baitinger, H.; Sternkopf, C.; Vorbringer-Dorozhovets, N.; Hausotte, T.;
Percle, B.; Manske, E.; Jäger, G.
Interferometry for the next generation of nanopositioning and
11th International conference of the European Society for Precision
Engineering and Nanotechnology (2011)
Optimization of Halbacharrays for the Lorentz Force Velocimetry of low
conducting materials using numerical simulation
Workshop Elektroprozesstechnik Ilmenau (2012)
Balzer, F.G.; Gerhardt, U.; Hausotte, T.; Albrecht, K.; Manske, E.;
Jäger, G.
Application of a novel fibre-coupled confocal sensor in a nanopositioning
and nanomeasuring machine
12th International Conference of the European Society for Precision
Ammon, D.; Detschew, V.
Vorgehensmodell zur Entwicklung wissensbasierter Software für die
medizinische Dokumentation
eHealth2011 - Health Informatics meets eHealth - von der Wissenschaft
zur Anwendung und zurück (2011) Wien
Balzer, F. G.; Hofmann, N.; Percle, B.; Hausotte, T.; Manske, E.; Jäger,
G.
Recent advances in 3-D tactile micro- and nanometrology
11th International conference of the European Society for Precision
Amthor, A.; Zschäck, S.; Ament, C.
Dynamical friction modelling and adaptive compensation on the
nanometer scale
IECON 2011: 37th Annual Conference of the IEEE Industrial Electronics
Society (2011) Melbourne, Australia
Bärenklau, M.; Muhsin, B.; Moreno, Javier G.; Rösch, R.; Horn, A.;
Gobsch, G.; Stute, U.; Hoppe, H.
Polymer solar modules: laser structuring and quality control by lock-in
thermography
MRS fall meeting, Boston, Massachusetts, USA. (2011)
Aristizabal, E.; Günter, F.; Schaaf, P.
A new method to characterize material properties of copper by
microindentation
Materials for energy and power engineering; TU Ilmenau (2012)
Basta, N.; Dreher, A.; Caizzone, S.; Sgammini, M.; Antreich, F.;
Kappen, G.; Irteza, S.; Stephan, R.; Hein, A.; Schäfer, E.; Richter, A.;
Khan, A.; Kurz, L.; Noll, G.
System Concept of a Compact 2x2 GNSS Array Receiver 7
German Microwave Conference (GeMiC), Ilmenau, Germany (2012)
Arnold, C.; Lambeck, S.; Ament, C.
A fuzzy concept for climate management in preventive conservation: an
approach to define and manage climate setpoints using fuzzy decision
making
IEEE International Conference on Fuzzy Systems, Taipei, Taiwan (2011)
Augsburg, K.; Gramstat, S.; Horn, R.; Ivanov, V.; Sachse, H.; Shyrokau,
B.
Test-rig-in-the-loop (TRIL) application to controllable brake processes
EuroBrake 2012, Dresden, Germany
Augsburg, K.; Gramstat, S.; Stengl, B.
Visualisation possibilities of the friction zone of dry-running friction
couples
Augsburg, K.; Heimann, S.
The brake drag torque of disc brakes
Augsburg, K.; Horn, R.; Sachse, H.
Characterization of particulate emissions of vehicle wheel brakes
Innovation in mechanical engineering - shaping the future
56th IWK, International Scientific Colloquium, TU Ilmenau (2011)
Augsburg, K.; Sachse, H.; Horn, R.; Gramstat, S.
Brake dust emission Combustion generated nanoparticles
15th International ETH-Conference on Combustion Generated
Nanoparticles, Zürich; ETH-NPC - Niederrohrdorf (2011)
Augsburg, K.; Sachse, H.; Krischok, S.; Horn, R.; Rieker, M.; Scheder,
D.
Brake dust measurement
Augustin, S.; Fröhlich, T.; Ament, C.; Güther, T.
High speed temperature sensors in emission systems of combustion
engines
XX IMEKO World Congress: Bexco, Busan, Republic of Korea (2012)
Augustin, S.; Fröhlich, T.; Mammen, H.; Ament, C.; Güther, T.
Thermoelemente für den Einsatz in Abgassystemen von
Verbrennungsmotoren
Sensoren und Messsysteme 2012: 16. GMA/ITG-Fachtagung, Nürnberg
Augustin, S.; Fröhlich, T.; Mammen, H.; Pufke, M.
Determination of the dynamic behavior of high-speed temperature
sensors
Sensor + Test Conference 2011, Wunstorf, Germany
Augustin, S.; Fröhlich, T.; Marin, S.; Breitkreutz, P.; Lehmann, H.
Fixpunktthermometer für kleine Rohrquerschnitte
Sensoren und Messsysteme 2012: 16. GMA/ITG-Fachtagung, Nürnberg
Contact
Bastian, M.; Heidemeyer, P.; Schwalme, G.; Koch, M.
A new closed loop mold temperature control technique by means of
online thermography
69th annual technical conference of the Society of Plastics Engineers
2011, (ANTEC 2011)
Bayer, H.; Krauss, A.; Stephan, R.; Hein, A.
Multimode monopulse tracking feed with dual-band potential for landmobile satellite communications in Ka-band
6th European Conference on Antennas and Propagation, Rome (2011)
Bayer, Hendrik; Krauß, Alexander; Stephan, Ralf; Hein, Matthias A.
A dual-band multimode monopulse tracking antenna for land-mobile
satellite communications in Ka-band
6th European Conference on Antennas and Propagation, Prague (2012)
Bergmann, J.P.; Petzoldt, F.; Nagel, F.:
Möglichkeiten und Perspektiven zum stoffschlüssigen Fügen von Kupfer
mit Aluminium Verbindungen durch Pressschweißverfahren
DVS Congress, Hamburg (2011)
Bergmann, J.P.; Petzoldt, F.; Nagel, F.
Fügen und Oberfläche – der Zusammenhang am Beispiel des
Diffusionsschweißen und des Laserstrahlfügens von Mischverbindungen
14. Werkstofftechnisches Kolloquium und 9. Industriefachtagung
Oberflächen- und Wärmebehandlungstechnik (2011)
Bergmann, J.P.; Stambke, M.; Griebel, M.; Bastick, A.
Ansätze und Methoden zur Erhöhung der Effizienz beim
Laserstrahlschweißen
DVS Congress; Saarbrücken (2012)
Bergmann, J.P.; Schürer, R.; Stambke, M.; Günther, K.; Schricker, K.
Kopplung von Wärmequellen beim Schweißen - Potenziale
DVS Congress; Saarbrücken (2012)
Biller, S.; Domey, J.; Fiedler, P.; Holzhey, R.; Richert, H.; Haueisen, J.
Dissolution of magnetically marked tablets: investigations in a physical
phantom
Annual international conference of the IEEE Engineering in Medicine and
Biology Society (EMBC) San Diego, California, USA, (2012)
Bischoff, J.; Manske, E.; Baitinger, H.
Modeling of profilometry with laser focus sensors
SPIE Optical Metrology Symposium
Bellingham, Wash., USA (2011)
Bitencourt, A.C.P.; Theska, R.; Wagner, A.; Lepikson, H.A.;
Weingärtner, W.L. W.
A novel approach in the application of flexure bearings in primary torque
standard machines
International conference of the European Society for Precision
Engineering and Nanotechnology; Como, (2011)
209
Bonitz, F.; Wagner, N.; Kupfer, K.; Mueller, B.; Schilling, K.; Sachs, J.;
Schlaeger, S.
Ultra wideband measurements for spatial water content estimation in
subsoil
9th International Conference on Electromagnetic Wave Interaction with
Water and Moist Substances (2011)
Böttcher, A.; Schneider, C.; Vary, P.; Thomä, R. S.
Dependency of the power and delay domain parameters on antenna
height and distance in urban macro cell
5th European Conference on Antennas and Propagation (2011)
Böttcher, A.; Vary, P.; Schneider, C.; Narandzic, M.; Thomä, R. S.
Estimation of the radio channel parameters from a circular array with
directional antennas
IEEE 73rd Vehicular Technology Conference (VTC Spring), Budapest,
Hungary (2011)
Böttcher, A.; Vary, P.; Schneider, C.; Thomä, R. S.
Cross correlation characteristics of large scale parameters in urban macro
cell
IEEE Vehicular Technology Conference (VTC Fall), San Francisco,
California, USA (2011)
Braunschweig, M.; Weiß, M.; Liebermann, K.
Supply of measurement results of spring wire tests on the internet
Brinkmann, M.; Englert, M.; Hagemann, M.; Sinzinger, S.
Realistic ray-tracing of surface and volume diffusers
International Light Simulation Symposium 2012, Nürnberg, Germany
Brückner, S.; Supplie, O.; Barrigón, E.; Dobrich, A.; Luczak, J.; Löbbel,
C.; Rey-Stolle, I.; Kleinschmidt, P.; Döscher, H.; Hannappel, T.
In situ control of Si(100) and Ge(100) surface preparation for the
heteroepitaxy of III-V solar cell architectures
AIP conference (2012)
Büchner, S.; Zschäck, S.; Amthor, A.; Ament, C.; Eichhorn, M.
Dynamic friction modeling and identification for high precision
mechatronic systems
38th Annual Conference on IEEE Industrial Electronics Society; Montreal,
Canada (2012)
Dittrich, L.; Endrödy, C.; Hoffmann, M.
Design and technology concept for a novel micropump coping without
moving mechanical components
23rd Micromechanics and Microsystems Europe Workshop: MME 2012
Ilmenau, Germany (2012)
Dittrich, L.; Endrödy, C.; Hoffmann, M.
Dimensionierung und Technologiekonzept für eine neuartige
Mikropumpe ohne bewegliche mechanische Bauteile
Mikro-Nano-Integration : Beiträge des 4. GMM-Workshops, Berlin (2012)
Dreher, A.; Basta, N.; Caizzone, S.; Kappen, G.; Sgammini, M.;
Meurer, M.; Irteza, S.; Stephan, R.; Hein, A.; Schäfer, E.; Khan, A.;
Richter, A.; Bieske, B.; Kurz, L.; Noll, G.
Compact Adaptive Multi-antenna Navigation Receiver
Satellite Division Technical Meeting of the Institute of Navigation, IONGNSS 2012, Nashville, Tennessee, USA (2012)
Eichhorn, M.; Kremer, U.
Opportunities to parallelize path planning algorithms for autonomous
underwater vehicles
Oceans 2011; Hilton Waikoloa Village, Kona, Hawai'i (2011)
Eichhorn, M.; Woithe, H. C.; Kremer, U.
Parallelization of path planning algorithms for AUVs concepts,
opportunities, and program-technical implementation
Oceans, 2012; The Ocean Resort, Yeosu, Republic of Korea (2012)
Erbe, T.; Weber, C.; Paetzold, K.
Actuation principle selection - an example for trade-off assessment by
CPM-approach
18th International Conference on Engineering Design; Copenhagen,
Denmark (2011)
Exner, N.; Ifland, M.; Warweg, O.; Westermann, D.
Smart Metering aus Netz- und Kundenperspektive = Smart metering
from grid and customer perspective
Internationaler ETG-Kongress 2011: Umsetzungskonzepte nachhaltiger
Energiesysteme - Erzeugung, Netze, Verbrauch; Würzburg (2011)
Fehling, T.; Fröhlich, T.; Heydenbluth, D.; Geyer, M.; Schüler, R.
Vacuum transfer system for loading the Sartorius prototype mass
comparator CCL1007
NCSL International Workshop & Symposium Washington (2011)
Cao, J.; Goldhan, J.; Schneider, S.; Martin, K.; Köhler, J. M.
Risk enhancement by caffeine-consumption: drug-caffeine interference
detected by microcombinatorial screenings using micro fluid segment
technique
23rd Micromechanics and Microsystems Europe Workshop, MME 2012;
Fiedler, P.; Biller, S.; Griebel, S.; Haueisen, J.
Impedance pneumography using textile electrodes
Biology Society (EMBC); San Diego, California, USA (2012)
Cepnik, C.; Wallrabe, U.; Radler, O.; Rosenbaum, S.; Ströhla, T.
On a novel optimization approach of electromagnetic energy harvesters
4th International Conference on Modeling, Simulation and Applied
Optimization (ICMSAO), Kuala Lumpur (2011)
Fiedler, P.; Griebel, S.; Fonseca, C.; Vaz, F.; Zentner, L.; Zanow, F.;
Haueisen, J.
Novel Ti/TiN dry electrodes and Ag/AgCl: a direct comparison in
multichannel EEG
5th European Conference of the International Federation for Medical and
Biological Engineering (2012)
Dahlke, K.; Geyer, C.; Dees, S.; Helbig, M.; Sachs, J.; Scotto di
Clemente, F.; Hein, M.; Kaiser, A.; Hilger, I.
Effects of cell structure of Gram-positive and Gram-negative bacteria
based on their dielectric properties
7. German Microwave Conference (GeMiC), Ilmenau, Germany (2012)
De Novellis, L.; Sorniotti, A.; Gruber, P.; Shead, L.; Ivanov, V.;
Höpping, K.
Torque vectoring for electric vehicles with individually controlled motors:
state-of-the-art and future developments
EVS 26: Electric Vehicle Symposium Los Angeles, CA. (2012)
Deißler, T.; Janson, M.; Zetik, R.; Thielecke, J.
Infrastructureless indoor mapping using a mobile antenna array
19th International Conference on Systems, Signals and Image Processing
(IWSSIP 2012), Vienna, Austria (2012)
Di Clemente, F. S.; Stephan, R.; Schwarz, U.; Hein, M.
Miniature body-matched double-ridged horn antennas for biomedical
UWB imaging
IEEE Antennas and Wireless Propagation Conference, APWC 2012, Cape
Town, South Africa (2012)
Diethold, C.; Hilbrunner, F.; Fröhlich, T.; Manske, E.
Nanopositioning system with combined force measurement based on
electromagnetic force compensated balances
Contact
210
Flügge, J.; Beckert, E.; Jennett, N.; Maxwell, T.; Petit, D.; Rudtsch, S.;
Salgado, J.; Schalles, M.; Schödel, R.; Voigt, D.; Voigt, M.
The EMRP project thermal design and dimensional drift
Fremerey, M.; Gorb, S.; Mämpel, J.; Witte, H.
Biologisch inspirierte Haftstrukturen für Zwecke der Robotik
Bionik: Patente aus der Natur : Innovationspotentiale für
Technologieanwendungen, Bionik und Bildung ;
Fünfter Bionik-Kongress, Hochschule Bremen, Bremen (2011)
Fremerey, M.; Kasper, D.; Witte, H.; Gorb, S.; Heepe, L.; Mämpel, J.
Shifting allometry: combination of macroscopic engineering with
microscopic biomimetics allows realization of new robot functions in
meso dimension
7th German Conference on Robotics, Munich (2012)
Füßl, R.; Manske, E.; Kreutzer, P.
Modeling of 3D-measurement chains in nanopositioning and
14th Joint International IMEKO TC1+TC7+TC13 Symposium
JenTower Jena, Germany (2011)
Garcia Ariza, P.; Müller, R.; Stephan, R.; Wollenschläger, F.; Müller, J.;
Thomä, R.; Hein, A.
60 GHz Real‐time Sensing: Architectures and Technology
European Conference on Antennas and Propagation, EuCAP2012, Prague,
Czech Republic (2012)
Garcia, P.; Thomä, S.
Polarimetric Ultrawideband MIMO radar for security check points:
detecting and classifying subjects carrying wires
Gattnar, E.; Ekinci, O.; Detschew, V.
A novel generic clinical reference process model for event-based process
times measurement
Business information systems Workshops: BIS 2011 international
workshops and BPSC international conference, Poznań, Poland (2011)
A novel way of standardized and automized retrieval of timing
information along clinical pathways
MIE 2011; Oslo; Norway (2011)
Clinical process modeling and performance measurement in hospitals
15th IEEE International Enterprise Distributed Object Computing
Conference Workshops (EDOCW), Helsinki, FinlandE (2011)
Health care performance monitoring using an inpatient reference process
model and clinical KPIs
Electronic healthcare: 4th international conference, eHealth 2011,
Málaga, Spain
Optimierung von klinischen Behandlungsabläufen durch die
standardisierte und automatisierte Erfassung von klinischen
Prozessparametern
eHealth2011 - Health Informatics meets eHealth - von der Wissenschaft
zur Anwendung und zurück: Grenzen überwinden - Continuity of Care;
Wien (2011)
Geiling, T.; Leopold, S.; Cheriguen, Y.; Hoffmann, M.
Fine dust measurement with electrical fields concept for a capacitive
setup
Geinitz, V.; Weiß, M.; Kletzin, U.; Beyer, P.; Liebermann, K.
Anstieg der elastischen Kennlinie aus dem Zug- und Torsionsversuch
Tagung Werkstoffprüfung 2011, Berlin (2011)
Geinitz, V.; Weiß, M.; Kletzin, U.; Beyer, P.
Relaxation of helical springs and spring steel wires
56th IWK, International Scientific Colloquium, TU Ilmenau, Ilmenau (2011)
Gevorgyan, V.; Kletzin, U.
Contact pressure and wear in helical compression springs
Geža, V.; Jakovičs, A.; Krieger, U.; Halbedel, B.
Effectiveness of different approaches for EM force driven glass melt
mixing in annular tube
8th International PAMIR Conference on Fundamental and Applied MHD;
Grenoble (2011)
Ginani, L. S.; Theska, R.
A novel approach to laser scanning microscopy using error correction
algorithms
International Symposium on Measurement Technology and Intelligent
Instruments 10 ; Daejeon (2011)
A novel approach to optical aberrations correction in laser scanning
microscopy for surface metrology
Design and construction of a laser scanning microscope for surface
metrology
Engineering and Nanotechnology 11; Como (2011)
Model based error correction for optical aberrations in laser scanning
microscopes
Contact
Engineering and Nanotechnology; Bedford (2012)
Optisch scannender Kollisionsschutz für hochpräzise Messeinrichtungen
Jahrestagung Deutsche Gesellschaft für Angewandte Optik;
Ilmenau (2011)
Göckeritz, R.; Hähnlein, B.; Händel, B.; Schwierz, F.; Pezoldt, J.
T- and Y-Branched Three-Terminal Junction Graphene Devices
International Conference on Silicon Carbide and Related Materials
(ICSCRM 2011), Cleveland, Ohio (2011)
Göckeritz, R.; Tonisch, K.; Jatal, W.; Schwierz, F.; Pezoldt, J.
Side gate graphene and AlGaN/GaN FETs
Mediterranean Conference on Innovative Materials and Applications
(CIMA Beirut 2011), Beirut, Lebanon (2011)
Göckeritz R.; Tonisch, K.; Jatal, W.; Hiller, L.; Schwierz, F.; Pezoldt, J.
Side gate graphene and AlGaN/GaN unipolar nanoelectronic devices
1st Mediterranean Conference on Innovative Materials and Applications
(CIMA 2011), Crowne Plaza Hotel, Beirut, Lebanon (2011)
Goecke, S.-F.; Bergmann, J.P.; Witte, K.-H.
Die Effizienzfabrik - Schwerpunkte und Analysemöglichkeiten aus Sicht
der Schweißtechnik zur ressourceneffizienten Fertigung
DVS Congress 2012: Große Schweißtechnische Tagung, DVSStudentenkongress; Saarbrücken, Düsseldorf (2012)
Goj, B.; Dittrich, L.; Erbe, T.; Hoffmann, M.; Dumstorff, G.
Entwurf und Herstellung hybrider dreiachsiger Sensormodulkonzepte
Mikrosystemtechnik-Kongress 2011; Darmstadt (2011)
Goj, B.; Hoffmann, M.
Design of a biaxial nanoprobe utilizing Matlab Simulink
23rd Micromechanics and Microsystems Europe Workshop : MME 2012
Goj, B.; Vorbringer-Dorozhovets, N.; Wystup, C.; Hoffmann, M.;
Manske, E.
Electromagnetic changer for AFM tips
23rd Micromechanics and Microsystems Europe Workshop : MME 2012
TU Ilmenau, Ilmenau, Germany (2012)
Goj, B.; Vorbringer-Dorozhovets, N.; Wystup, C.; Manske, E.;
Hoffmann, M.
Electromagnetic changer for AFM-tips
23rd Micromechanics Europe Workshop Ilmenau (2012)
Gonzalez, J.; Bärenklau, M.; Schoonderbeek, A.; Mushin, B.; Haupt,
O.; Rösch, R.; Gobsch, G.; Teckhaus, D.; Hoppe, H.; Stute, U.
Thin-film organic solar modules - processing and laser ablation
26th European Photovoltaic Solar Energy Conference and Exhibition; CCH
Congress Centre and International Fair, Hamburg, Germany (2011)
Gratkowski, M.; Schmidt, S.; Gießler, F.; Eiselt, M.; Güllmar, D.; Witte,
O.; Haueisen, J.
Time-frequency-space components of somatosenory evoked potentials in
rats
5th European Conference of the International Federation for Medical and
Biological Engineering (2012)
Grewe, A.; Hillenbrand, M.; Sinzinger, S.
Adaptive confocal approach to hyperspectral imaging
EOS annual meeting 2012, (EOSAM 2012); Aberdeen, Scotland, UK (2012)
Grewe, A.; Sinzinger, S.; Stoebenau, S.; Amberg, M.
Realisierung eines integrierten mikrooptischen Fluoreszenzdetektors
Griebel, S.; Fiedler, P.; Streng, A.; Haueisen, J.; Zentner, L.
Erzeugung von Schraubenbewegungen mittels nachgiebiger Aktuatoren
Mechanismentechnik in Ilmenau, Budapest und Niš : TU Ilmenau (2012)
Griebel, S.; Voges, D.; Schilling, C.; Haueisen, J.; Zentner, L.
Nachgiebiger Mechanismus sucht biologisch inspirierte Verbesserung
Fünfter Bionik-Kongress, Hochschule Bremen, Bremen (2011)
Grieseler, R.; Tonisch, K.; Klaus, J.; Stubenrauch, M.; Michael, S.;
Pezoldt, J.; Schaaf, P.
Testing of mechanical properties of AlGaN thin films by Eigenmode
detection on micro-electromechanical systems (MEMS)
39th International conference on metallurgical coatings & thin films (39th
ICMCTF), San Diego, California, USA (2012)
211
Grimm, M.; Krah, A.; Murtaza, N.; Sharma, K.; Landmann, M.; Thomä,
R.; Heuberger, A.; Hein, M.
Over-the-air testbed for directional spectrum sensing
4th International Conference on Cognitive Radio and Advanced Spectrum
Management, CogART 2011, Barcelona, Catalonia, Spain (2011)
Grimm, M.; Krah, A.; Murtaza, N.; Sharma, K.; Landmann, M.; Thomä,
S.; Heuberger, A.; Hein, M.
Performance Evaluation of Directional Spectrum Sensing Using an OverThe-Air Testbed
4th International Conference on Cognitive Radio and Advanced Spectrum
Management, CogART 2011, Barcelona, Catalonia, Spain (2011)
Grimm, M.; Sharma, K.; Thomä, R.; Hein, A.
Mitigation of nonlinear induced interference in cognitive wideband
receivers
7th Karlsruhe Workshop on Software Radio, WSR2012, Karlsruhe,
Germany (2012)
Grimm, M.; Sharma, K.; Thomä, R.; Hein, M.
Non-linearly Induced Interference and its Mitigation in Cognitive
Wideband Receivers
18th European Wireless Conference - EW 2012, Poznan, Poland (2012)
Guddei, B.; Ahmed, I.
Rollreibungsmessung an einzelnen Kugeln im Ebene-Kugel-Ebene-Kontakt
Triebologie-Fachtagung 2011 der GfT; Göttingen (2011)
Günther, M.; Schneider, S.; Groß, G. A.; Köhler, J. M.
Adressierung mehrdimensionaler Konzentrationsräume in der
Mikrofluidsegmenttechnik
Günther, P. M.; Köhler, J. M.
Metal polymer multiscale material formed by arranging metal
nanoparticles in self patterned spin-on films
WSEAS international conferences (AIKED '11; SEPADS '11; EHAC '11; ISPRA
'11; NANOTECHNOLOGY '11; ICOAA '11; IPLAFUN '11; EE '11; CM '11; WHH
'11; GES '11); Cambridge, UK (2011)
Gutjahr, T.; Ulmer, H.; Kruse, T.; Markert, H.; Ament, C.
Advanced approaches for the identification of dynamic engine behavior
with probabilistic modeling
6th Conference Design of Experiments (DoE) in Engine Development;
Berlin (2011)
Gutzeit, N.; Müller, J.; Reinlein, C.; Appelfelder, M.; Gebhardt, S.
Thin LTCC membranes with integrated heaters and temperature sensors
Hähnlein, B.; Händel, B.; Schwierz, F.; Pezoldt, J.
Properties of graphene side gate transistors
9th European Conference on Silicon Carbide and Related Materials
(ECSCRM2012), Saint Petersburg, Russia (2012)
Halbedel, B.; Ziolkowski, M.; Brauer, H.
Potenziale des elektromechanischen Zerkleinerungsprinzips
Workshop Elektroprozesstechnik; Seminar- und Ferienhaus “Zur Talsperre"
Ilmenau, Ortsteil Heyda (2011)
Hamouda, M.; Sachs, J.; Fischer, G.; Weigel, R.; Ussmueller, T.
High precision wireless synchronization receiver for M-sequence UWB
Radio systems
Ultra-Wideband (ICUWB) (2012)
Hampl, J.; Weise, F.; Fernekorn, U.; Schober, A.
Mikro-Bioreaktorsystem zur 3D-Kultivierung mit polymeren Zellträgern
Hampl, S.; Cimalla, V.; Polster, T.; Hoffmann, M.
AlN-based piezoelectric bimorph microgenerator utilizing low-level nonresonant excitation
Smart sensors, actuators and MEMS V; Prague, Czech Republic (2011)
Hampl, S.; Laqua, D.; Heidrich, N.; Cimalla, V.; Lebedev, V.; Polster, T.;
Hoffmann, M.
AlN-basierte piezoelektrische Mikrogeneratoren zur Energieversorgung
miniaturisierter Implantate = AlN-based piezoelectric microgenerator for
energy supply of miniaturized implants
Haueisen, J.; Fiedler, P.; Griebel, S.; Zentner, L.; Fonseca, C.; Vaz, F.;
Zanow, F.
Dry electrodes for electroencephalography: novel titanium based
Contact
212
electrodes
Hausotte, T.; Percle, B.; Gerhardt, U.; Dontsov, D.; Manske, E.; Jäger,
G.
Homodyne interference signal demodulation for nanopositioning and
Hausotte, T.; Percle, B.; Vorbringer-Dorozhovets, N.; Baitinger, He.;
Balzer, F.; Gerhardt, U.; Manske, E.; Jäger, G.; Dontsov, D.
Interferometric measuring systems of nanopositioning and
10th IMEKO Symposium Laser Metrology for Precision Measurement and
Inspection in Industry (LMPMI) 2011; Physikalisch-Technische
Bundeanstalt (PTB) Braunschweig (2011)
Hebel, R.; Dittrich, L.; Hoffmann, M.
On the influence of laser cutting manufacturing tolerances on the spring
rate of machined tubular springs
Heidrich, N.; Knöbber, F.; Cimalla, V.; Lebedev, V.; Sah, R. E.;
Pletschen, W.; Ambacher, O.; Hampl, S.
AlN-basierte mikroelektromechanische Strukturen für Implantate
Heidrich, N.; Knöbber, F.; Sah, R. E.; Pletschen, W.; Hampl, S.; Cimalla,
V.; Lebedev, V.
Biocompatible AlN-based piezo energy harvesters for implants
16th International Solid-State Sensors, Actuators and Microsystems
Conference (TRANSDUCERS); Beijing, China (2011)
Hein, A.; Helbig, M.; Kmec, M.; Sachs, J.; Scotto di Clemente, F.;
Stephan, R.; Hamouda, M.; Ussmueller, T.; Weigel, R.; Robens, M.;
Wunderlich, R.; Heinen, S.
UWB radar-based cardiac motion detection in medical diagnostics
IEEE Antennas and Wireless Propagation Conference, APWC 2012,
Cape Town, South Africa (2012)
Hein, A.
Ultra-wideband radar sensors for biomedical diagnostics and imaging
2012 IEEE International Conference on Ultra-Wideband, ICUWB 2012,
Syracuse/NY, USA (2012)
Hein, M.; Helbig, M.; Kmec, M.; Sachs, J.; Scotto di Clemente, F.;
Stephan, R.; Hamouda, M.; Ussmueller, T.; Weigel, R.; Robens, M.;
Wunderlich, R.; Heinen, S.
Ultra-wideband active array imaging for biomedical diagnostics
IEEE Antennas and Wireless Propagation Conference, APWC 2012,
Cape Town, South Africa (2012)
Heinemann, S.; Augsburg, K.
Methodische Ansätze zur Untersuchung des Restbremsmomentes von
Scheibenbremsen
XXX. Internationales-Symposium - Bremsen-Fachtagung; Bad
Neuenahr/Germany (2011)
Heinrich, G.; Kießling, R.; Laades, A.; Lawerenz, A.; Gobsch, G.
Planar metal contact areas formed with laser assistance - a new approach
in laser ablation for local front-side openings
EU PVSEC 2012, 27th European Photovoltaic Solar Energy Conference and
Exhibition; Frankfurt, Germany (2012)
Helbig, M.; Hein, M. A.; Herrmann, R.; Kmec, M.; Sachs, J.; Schilling,
K.; Scotto di Clemente, F.; Hilger, I.; Dahlke, K.; Rauschenbach, P.
Experimental active antenna measurement setup for UWB breast cancer
detection
IEEE International Conference on Ultra-Wideband (ICUWB), Syracuse, New
York, USA (2012)
Helbig, M.; Hilger, I.; Kmec, M.; Rimkus, G.; Sachs, J.
Experimental phantom trials for UWB breast cancer detection
7th German Microwave Conference (GeMiC); Ilmenau (2012)
Helbig, M.; Kmec, M.; Sachs, J.; Geyer, C.; Hilger, I.; Rimkus, G.
Aspects of antenna array configuration for UWB breast imaging
6th European Conference on Antennas and Propagation (EUCAP),
Prague (2012)
Herrmann, R.; Sachs, J.; Kmec, M.; Grimm, M.; Rauschenbach, P.
Ultra-Wideband Sensor System for Remote Monitoring of Vitality at Home
EuRAD (2012)
Hess, D.; Sattel, T.
Double-lane change optimization for a stochastic vehicle model subject to
collision probability constraints
14th International IEEE Conference on Intelligent Transportation Systems
(ITSC), Washington, DC, USA (2011)
Hesse, M.; Weber, C.; Diestelkamp, H.
Bewertung von Methoden zur Herstellbarkeitsabsicherung von
Serienfahrzeugen
Design for X: Beiträge zum 22. DfX-Symposium, Hamburg (2011)
Hesse, M.; Weber, C.
Manufacturability and validation methods in passenger car development an industrial case study
Design 2012: 12th International Design Conference, Dubrovnik, Croatia
(2012)
Heyne, M.; Balzer, F.; Theska, R.
Experimental investigation of the stiffness of planar ball guides
Heyne, M.; Erbe, T.; Theska, R.; Mehner, H.
Wälzreibverhalten von Kugel-Ebene-Kontakten in planaren Führungen :
Versuchsaufbau und Vorversuche
Tagung mit Fachausstellung Gleit- und Wälzlagerungen; Schweinfurt
(2011)
Heyne, M.; Erbe, T.; Theska, R.
Einflüsse auf die Messung des Traganteils planarer Wälzführungen
Tagung mit Fachausstellung Gleit- und Wälzlagerungen; Schweinfurt
(2011)
Heyne, M.; Mehner, H.; Erbe, T.; Theska, R.
Experimental investigation in the friction characteristics of high precision
planar ball guides
Engineering and Nanotechnology ; Como (2011)
Holle, W.; Weber, C.; Husung, S.
Virtuelles Produkt und Montagekosten
22nd International Scientific Conference Mittweida; Mittweida (2012)
Holstein, P.; Surek, D.; Münch, H.-J.; Tharandt, A.; Gramstat, S.
Maschinendiagnose mit erweitertem Frequenzbereich
Statusberichte zur Entwicklung und Anwendung der
Schallemissionsanalyse : 18. Kolloquium Schallemission, Wetzlar (2011)
Holstein, P.; Surek, D.; Tharandt, A.; Münch, H.-J.; Gramstat, S.
Möglichkeiten der Maschinendiagnose mit Ultraschall
Fortschritte der Akustik : DAGA 2011; 37. Jahrestagung für Akustik;
Düsseldorf (2011)
Hörselmann, I.; Scheinert, S.
Multi-frequency transconductance technique on OFET's
5th International Symposium Technologies for Polymer Electronics, TPE
12; Rudolstadt; Germany (2012)
Huba, A.; Muka, I.; Schrödner, M.; Schilling, C.; Köhring, S.; Witte, H.
Results of modeling the mechanical behavior of an ionic polymer-metalcomposite for assembling as an actuation system
Humbla, S.; Kaleem, S.; Müller, J.; Rentsch, S.; Stephan, R.; Stöpel, D.;
Trabert, F.; Vogt, G.; Hein, A.
On-Orbit Verification of a 4×4 Switch Matrix for Space Applications
based on the Low Temperature Co-fired Ceramics Technology
Husung, S.; Holle, W.; Hilmer, F.; Weber, C.
Permanently estimation of assembly costs during product development
12th International Design Conference, Dubrovnik, Croatia (2012)
Husung, S.; Sladeczek, C.; Rath, M.; Brix, S.; Brix, T.; Weber, C.
Audiovisuelle VR-Simulation am Beispiel einer Pick-and-Place Maschine
14. IFF-Wissenschaftstage, 8. Fachtagung Digitales Engineering und
virtuelle Techniken, Magdeburg (2011)
Heyne, M.; Mehner, H.; Erbe, T.; Theska, R.
Initial investigations of rolling friction characteristics in planar ball guides
with a novel measurement set-up
International Symposium on Measurement Technology and Intelligent
Instruments ; Daejeon (2011)
Irteza, S.; Murtaza, N.; Caizzone, S.; Stephan, R.; Hein, A.
Compact planar L-band antenna arrays with optimal diversity
performance
International Conference on Electromagnetics in Advanced Applications,
ICEAA 2011, Torino, Italy (2011)
Hilber, S.; Bergmann, J.P.; Bliedtner, J.
Feinschneiden von refraktären Metallfolien mittels CO2- und
Picosekunden-Laser
12. Nachwuchswissenschaftlerkonferenz mitteldeutscher Fachhochschulen, Hochschule Harz, Wernigerode (2011)
Irteza, S.; Schäfer, E.; Volmer, C.; Sgammini, M.; Stephan, R.; Hennig,
E.; Hein, A.
Noise characterization of a multi-channel receiver using a small antenna
array with full diversity for robust satellite navigation
2012 IEEE International Conference on Wireless Information Technology
and Systems, ICWITS 2012, Maui, Hawaii, USA (2012)
Hilbrunner, F.; Weis, H.; Petzold, R.; Fröhlich, T.; Jäger, G.
Investigation on the impedance-frequency-response for a dynamic
behaviour description of elecromagnetic force compensated load-cells
XX IMEKO World Congress; Bexco, Busan, Republic of Korea (2012)
Hillenbrand, M.; Wenzel, C.; Ma, X.; Feßer, P.; Sinzinger, S.
Hyperchromatic confocal sensor systems
8th EOS Topical Meeting on Diffractive Optics, Delft, Netherlands (2012)
Hiller, L.; Stauden, T.; Kemper, R.M.; As, D.J., N.; Pezoldt, J.
ECR-etching of Submicron and Nanometer sized 3C-SiC(100) Mesa
Structures
2011 International Conference on Silicon Carbide and Related Materials
Hiller, L.; Tonisch, K.; Pezoldt, J.
SiC/Si pseudosubstrates for AlgaN nanoelectronic devices
Hofer, M.; Gorovoy, K.; Rangelow, I. W.
Fast video rate AFM silicon cantilever
Hoffmann, M.; Bartsch, H.; Fischer, M.; Hampl, S.; Kremin, C.;
Leopold, S.; Müller, J.; Polster, T.; Stubenrauch, M.
Mikro-Nano-Integration in der Sensorik - Nanostrukturen als neue Option
10. Dresdner Sensor-Symposium: Dresden (2011)
Hofmann, A.; Laqua, D.; Husar, P.
Piezoelectric energy harvesting as opportunity of powering intelligent
implants and prostheses
Power and Energy Student Summit 2012; Ilmenau (2012)
Contact
Isern-Gonzlez, J.; Hernández-Sosa, D.; Fernández-Perdomo, E.;
Cabrera-Gámez, J.; Domínguez-Brito, A. C.; Prieto-Marañón, V.;
Eichhorn, M.
Application of iterative-optimization techniques to solve hold track
problem in glider navigation
Oceans 2011; Hilton Waikoloa Village, Kona, Hawai'i (2011)
Ispas, A.; Hölscher, J.; Gong, X.; Schneider, C.; Ascheid, G.; Thomä,
R.S.
Modeling and performance evaluation for mobile ricean MIMO channels
IEEE International Conference on Communications (ICC) 2012; Ottawa,
ON, Canada (2012)
Ispas, A.; Schneider, C.; Ascheid, G.; Thomä, R.S.
Performance evaluation of downlink beamforming over non-stationary
channels with interference
IEEE 22nd International Symposium on Personal Indoor and Mobile Radio
Communications (PIMRC); Toronto, Canada (2011)
Ispas, A.; Schneider, C.; Dartmann, G.; Gong, X.; Ascheid, G.; Thomä,
R.S.
Analysis of mismatched downlink beamforming over non-stationary
channels with interference
XXXth URSI general assembly and scientific symposium; Istanbul, Turkey
(2011)
Ivanov, V.; Augsburg, K.; Savitski, D.
Torque vectoring for improving the mobility of all-terrain electric vehicles
12th European Regional Conference of the ISTVS: Gerotek Test Facilities,
Pretoria, South Africa (2012)
213
Ivanov, V.
Fuzzy methods in ground vehicle engineering : state-of-the-art and
advanced applications
8th International Conference on Structural Dynamics, EURODYN 2011 :
Leuven, Belgium (2011)
Jäger, G.
Challenges and limitations of nanomeasuring technology
IEEE International Instrumentation and Measurement Technology
Conference (I2MTC), Congress Graz, Graz, Austria (2012)
Jannek, D.; Keller, A.
Radiologische Technik und Strahlenschutz in der Ausbildung an der TU
Ilmenau - Erfahrungen mit dem neuen Bachelor/Master-Studiengang
43. Jahrestagung der Deutschen Gesellschaft für Medizinische Physik;
Friedrich-Schiller-Universität Jena (2012)
Jatal, W.; Tonisch, K.; Baumann, U.; Schwierz, F.; Pezoldt, J.
AlGaN/GaN based HEMTs on SiC/Si-substrates: influences on high
frequency performance
Kemper, R.M.; Hiller, L.; Stauden, T.; Pezoldt, J.; Duschik, K.; Niendorf,
T.; Maier, H.J.; Meertens, D.; Tillmann, K.; As, D.J.; Lindner, J.K.N.
Growth of cubic GaN on 3C-SiC/Si(001) nanostructures in anti-phase
domains
17th International Conference on Molecular beam Epitaxy (MBE2012),
Nara, Japan (2012)
Kemper, R.M.; Hiller, L.; Stauden, T.; Pezoldt, J.; Meertens, D.;
Luysberg, M.; Tillmann, K.; Riedl, T.; As, D.J.; Lindner, J.K.N.
TEM investigations of GaN thin films grown on nanostructured 3CSiC/Si(001) substrates
First European Mineralogical Conference (EMC2012), Frankfurt, Germany
(2012)
Kikova, T.; Linß, S.; Gavrilova, I.; Böhm, S.; Witte, H.; Zentner, L.
Adaptives Antidekubitus-LagerungsmodulBionik
Fünfter Bionik-Kongress, Hochschule Bremen (2011)
Kirchner, S.; Sendler, J.; Augsburg, K.
Brake pedal feeling of decoupled braking systems for electric and hybrid
electric vehicles
EuroBrake 2012; Dresden, Germany (2012)
John, K.; Theska, R.; Erbe, T.
The use of deflecting elements in interferometric applications advantages and challenges
Kirchner, S.; Sendler, J.; Augsburg, K.
Braking systems of electric and hybrid electric vehicles under ergonomic
aspects:
Electric Vehicle Symposium (EVS 26), Los Angeles, CA, USA (2012)
Jovanoska, S.; Thomä, R.
Multiple target tracking by a distributed UWB sensor network based on
the PHD filter
15th International Conference on Information Fusion (2012)
Kleindienst, R.; Cimalla, V.; Eickhoff, M.; Grewe, A.; Schwarz, U. T.;
Teubert, J.; Sinzinger, S.
Micro-nano integration of a III-N nanowire based opto-chemical detector
EOS annual meeting 2012, (EOSAM 2012); Aberdeen, UK (2012)
Just, T.; Laqua, D.; Husar, P.
In-vivo signal transmission using an intra-corporal RF transmitter
2011 Annual international conference of the IEEE Engineering in Medicine
and Biology Society (EMBC), Boston, MA, USA (2011)
Kleindienst, R.; Kampmann, R.; Stoebenau, S.; Sinzinger, S.
Synthetic design and integrated fabrication of multifunctional hybrid
beam shapers
Laser beam shaping XII; San Diego, CA, USA (2011)
Kaleem, S.; Humbla, S.; Rentsch, S.; Hein, M.
Compact Ka-band Reconfigurable Switch Matrix with Power Failure
Redundancy
Kleinschmidt, P.; Döscher, H.; Supplie, O.; Dobrich, A.; Brückner, S.;
Hannappel, T.
MOVPE preparation of double-layer stepped silicon(100) for III-V-onsilicon solar cells
EU PVSEC 2012, 27th European Photovoltaic Solar Energy Conference and
Exhibition; Frankfurt, Germany (2012)
Kaleem, S.; Humbla, S.; Rentsch, S.; Trabert, J.; Stöpel, D.; Müller, J.;
Hein, A.
Microwave crossovers using cascaded couplers for switching applications
2012 IEEE International Conference on Wireless Information Technology
and Systems, ICWITS 2012, Maui, Hawaii, USA (2012)
Kaleem, S.; Humbla, S.; Rentsch, S.; Trabert, J. F.; Stöpel, D.; Müller,
J.; Hein, Matthias A.
Compact Ka-band reconfigurable switch matrix with power failure
redundancy
7th German Microwave Conference (GeMiC); TU Ilmenau; Germany
(2012)
Käske, M.; Schneider, C.; Kotterman, W.; Thomä, R.S.
Solving the problem of choosing the right MIMO measurement antenna :
embedding/de-embedding
5th European Conference on Antennas and Propagation (EUCAP); Rome,
Italy (2011)
Käske, M.; Schneider, C.; Thomä, R.S.; Pamp, J.
Application of the channel synthesis approach to evaluate the
performance of an experimental 4-port application antenna
6th European Conference on Antennas and Propagation (EUCAP),
Prague (2012)
Käske, M.; Thomä, R.S.
Analysis of angular parameters of dense multipath components in an
urban macro-cell scenario
5th European Conference on Antennas and Propagation (EUCAP 2011)
(2011)
Multi-step scanning probe lithography (SPL) on calixarene with overlay
alignment
SPIE advanced lithography (2012)
Kellerer, T.; Radler, O.; Ströhla, T.
Advantages of a new magnetic measurement method in the quality
management
Fachtagung Mechatronik 2011; Dresden (2011)
Contact
214
Kmec, M.; Helbig, M.; Herrmann, R.; Rauschenbach, P.; Sachs, J.;
Schilling, K.
Toward Integrated µNetwork Analyzer
EUROEM (2012)
Kmec, M.; Helbig, M.; Sachs, J.; Rauschenbach, P.
Integrated ultra-wideband hardware for MIMO sensing using pnsequence approach
IEEE International Conference on Ultra-Wideband (2012)
Knübel, A.; Aidam, R.; Kiste, L.; Leancu, C.-C.: Wagner, J.; Himmerlich,
M.; Eisenhardt, A.; Krischok, S.; Pezoldt, J.; Schley, P.; Sakalauskas, E.;
Goldhahn, R.; Koblmüller, G.
Properties of carbon-doped InN(0001) films grown by molecular beam
epitaxy
9th International conference on Nitride Semiconductors (ICNS-9),
Glasgow, Scotland (2011)
Köhler, J. M.; Günther, P. M.; Funfak, A.; Cao, J.; Knauer, A.; Li, S.;
Schneider, S.; Gross, G. A.
From droplets and particles to hierarchical spatial organization:
nanotechnology challenges for microfluidics
WSEAS international conferences; Cambridge, UK (2011)
Komensky, T.; Jurcisin, M.; Ruman, K.; Kovac, O.; Laqua, D.; Husar, P.
Ultra-wearable capacitive coupled and common electrode-free ECG
monitoring system
Biology Society (EMBC); San Diego, California, USA (2012)
Kosch, O.; Scotto di Clemente, F.; Hein, A.; Seifert, F.
UWB radar-based cardiac motion detection in medical diagnostics
IEEE Antennas and Wireless Propagation Conference, APWC 2012, Cape
Town, South Africa (2012)
Kosch, O.; Thiel, F.; Scotto di Clemente, F.; Hein, A.; Seifert, F.
Monitoring of human cardio-pulmonary activity by multi-channel UWB
radar
Kosch, O.; Thiel, F.; Seifert, F.; Sachs, J.; Hein, A.
Motion detection In-Vivo by multi-channel ultrawideband radar
Kotterman, W.; Heuberger, A.; Thomä, R.S.
On the Accuracy of Synthesised Wave-Fields in MIMO-OTA Set-Ups
EUCAP (2011)
Kotterman, W.; Landmann, M.; Heuberger, A.; Thomä, R.S.
New Laboratory for Over-The-Air Testing and Wave Field Synthesis
XXX URSI General Assembly and Scientific Symposium (2011)
Krah, A.; Grimm, M.; Murtaza, N.; Kotterman, W.; Landmann, M.;
Heuberger, A.; Thomä, R.; Hein, M.
Over-The-Air Test Strategy and Testbed for Cognitive radio Nodes
XXX URSI General Assembly and Scientific Symposium (2011)
Krapf, G.; Schalles, M.; Mammen, H.; Hilbrunner, F.; Augustin, S.;
Blumröder, G.; Fröhlich, T.
Long term stability of miniature fixed-point cells used in self-calibrating
thermometers
Sensor + Test Conference 2011; Wunstorf, Germany (2011)
Krauss, A.; Bayer , H.; Stephan , R.; Hein, A.
A low-profile user terminal antenna for mobile bi-directional Ka-band
satellite communications
34th ESA Antenna Workshop on Satcom User Terminal Antennas, ESTEC,
Noordwijk, The Netherlands (2012)
Leopold, S.; Paetz, D.; Knoebber, F.; Polster, T.; Ambacher, O.;
Sinzinger, S.; Hoffmann, M.
Tunable refractive beam steering using aluminum nitride thermal
actuators
SPIE Photonics West (MEMS adaptive optics V); San Francisco, CA, USA
(2011)
Leschik, J.; Harasim, A.; Müller, J.
Intelligentes hermetisch dichtes LTTC-Gehäuse mit integrierter Sensorik
für die Avionik
3. Landshuter Symposium Mikrosystemtechnik; Hochschule Landshut
(2012)
Li, Y.; Wang, P.; Gou, T.; Li, P.; Hong, A.; Sommerkorn, G.; Thomä, R.
S.
Experimental results based on macro-cell metropolitian propagation
measurements in Shanghai
European wireless 2011: 17th European Wireless Conference, Vienna,
Austria (2011)
Lin, E.; Fang, J.; Jacobs, H. O.
Gas Phase Electrodeposition: A Programmable Localized Deposition
Method for Rapid Combinatorial Investigation of Nanostuctured Devices
and 3D Bulk Heterojunction Photovoltaic Cells
Mater. Res. Soc. Symposium, San Francisco, USA (2012)
Linß, S.; Erbe, T.; Theska, R.; Zentner, L.
The influence of asymmetric flexure hinges on the axis of rotation
Krauss, A.; Bayer, H.; Stephan, R.; Hein, A.
Low-profile Ka-band satellite terminal antenna based on a dual-band
partially reflective surface
Europ. Conference on Antennas and Propagation, EuCAP2012, Prague,
Linß, S.; Erbe, T.; Zentner, L.
Design and simplified manufacturing of large-deflective flexure hinges
based on polynomial contours
Krauß, A.; Bayer, H.; Stephan, R.; Hein, M. A.
A dual-band circularly-polarised leaky-wave antenna for mobile Ka-band
satellite communications
IEEE-APS Topical Conference on Antennas and Propagation in Wireless
Communications (APWC), 2011 Torino, Italy (2011)
Linß, S.; Erbe, T.; Zentner, L.
On polynomial flexure hinges for increased deflection and an approach
for simplified manufacturing
Thirteenth World Congress in Mechanism and Machine Science;
Universidad de Guanajuato, Guanajuato City, México (2011)
Kreutzer, P.; Füßl, R.; Manske, E.
Analysis of the cosine error in measurements using the nanopositioning
and nanomeasuring machine
26th annual meeting of the American Society for Precision Engineering;
Denver Marriott City Center Hotel, Denver, Colorado, USA (2011)
Linß, S.; Griebel, S.; Kikova, T.; Zentner, L.
Pneumatically driven compliant structures based on the multi-arc
principle for the use in adaptive support devices
Kühnel, M.; Hilbrunner, F.; Büchner, J.; Jäger, G.; Fröhlich, T.
Traceable determination of relevant material parameters for the mass and
force metrology
NCSL International Workshop & Symposium Washington (2011)
Kühnel, M.; Hilbrunner, F.; Büchner, H.-J.; Jäger, G.; Manske, E.;
Fröhlich, T.
Traceable determination of mechnical parameters of binocular shaped
force transducers according to EN ISO 376
Kühnel, M.; Hilbrunner, F.; Fröhlich, T.
Climate chamber for a high temperature stability
Sensor + Test Conference 2011; Wunstorf, Germany (2011)
Lange, G.; Schmidt, D.
Innovatives funktionsoptimiertes Leichtbau-Hybridmaterial aus
Aluminiumschäumen und Kunststoffen
18. Symposium Verbundwerkstoffe und Werkstoffverbunde; Chemnitz
(2011)
Lange, G.; Schmidt, D.
Leichtbau mit hybriden Werkstoffsystemen aus Aluminiumschaum und
Kunststoff
32. EFB-Kolloquium Blechverarbeitung 2012; Bad Boll (2012)
Leopold, S.; Polster, T.; Geiling, T.; Hoffmann, M.
Erzeugung nadelförmiger Nanostrukturen aus Aluminiumnitrid (AIN)
durch reaktives Plasmaätzen
Beiträge des 3. GMM-Workshops, Mikro-Nano-Integration; Stuttgart
(2011)
Leopold, S.; Kremin, C.; Hoffmann, M.
Controlled silicon grass generation using optical plasma emission
spectroscopy
23rd Micromechanics and Microsystems Europe Workshop: MME 2012;
Contact
Liptaj, M.; Galajda, P.; Kmec, M.
An integrated amplifier kit for enhanced UWB applications
22nd International Conference Radioelektronika 2012, Brno, Czech
Republic (2012)
Liptaj, M.; Galajda, P.; Kmec, M.
Recent fully differential amplifier in 0.35 µm SiGe BiCMOS technology for
UWB applications
21th International Conference Radioelektronika 2011, Brno, Czech
Republic (2011)
Lira-Cantu, M.; Tanenbaum, D. M.; Norrman, K.; Voroshazi, E.;
Hermenau, M.; Lloyd, M.T.; Teran-Escobar, G.; Galagan, Y.;
Zimmermann, B.; Hösel, M.; Dam, H. F.; Jørgensen, Mikkel; G., Suren;
Lutsen, L.; Vanderzande, D.; Hoppe, H.; Rösch, R.
Combined characterization techniques to understand the stability of a
variety of organic photovoltaic device: the ISOS-3 inter-laboratory
collaboration
SPIE optics + photonics (Reliability of photovoltaic cells, modules,
components, and systems V), San Diego, CA, USA (2012)
Lobutova, E.; Li, L.; Voges, D.; Resagk, C.
Micro PIV measurements of the internel flow of Amoeba proteus under
influence of an electrical field
Dt. Ges. für Laser-AnemometrieGALA e.V. 19. Fachtagung, Ilmenau
(Lasermethoden in der Strömungsmesstechnik) (2011)
Lobutova, E.; Voges, D.; Resagk, C.
Strömungsmechanische Untersuchungen der Zytoplasmaströmung von
Amoeba proteus = Investigations of the cytoplasm flow of amoeba
proteus
20. Fachtagung Lasermethoden in der Strömungsmesstechnik, Karlsruhe
(2012)
Lonij, G.; Corves, B.; Razum, M.; Reeßing, M.; Brix, T.
e-Kinematix: virtuelle Forschungsumgebung zur Unterstützung der
Getriebeentwicklung
9. Kolloquium Getriebetechnik, Chemnitz (2011)
215
Lovasz, E.-C.; Perju, D.; Corves, B.; Brix, T.; Modler, K.-H.; Lovasz, A.
Multilingual illustrated µ-thesaurus of "mechanism" indexing terms
Thirteenth World Congress in Mechanism and Machine Science;
Universidad de Guanajuato, Guanajuato City, México (2011)
Lubov, M.N.; Pezoldt, J.; Trushin, Y.V.
Kinetic Monte Carlo simulation of impurity effects on nucleation and
growth of SiC clusters on Si(100)
Lüdtke, U.; Soubeih, S.; Halbedel, B.; Krieger, U.; Kelm, A.
Numerische Simulation der Strömung einer Glasschmelze unter dem
Einfluss von extern generierten Lorentzkräften
Workshop Elektroprozesstechnik : Seminar- und Ferienhaus Zur Talsperre"
Numerische Simulation der Strömung in einer Glaswanne mit BarriereBoostelektroden unter dem Einfluss von extern generierten
Lorentzkräften
Workshop Elektroprozesstechnik: Seminar- und Ferienhaus Zur Talsperre",
Luhn, T.; Strombeck, A.; Bergmann, J.P.; Schürer, R.
Energieeffizienz beim Fügen mittels Rührreibschweißen
DVS Congress 2012: Große Schweißtechnische Tagung, DVSStudentenkongress ; Saarbrücken - Düsseldorf (2012)
Lutherdt, S.; Federspiel, M.; Renhak, K.; Stiller, C.; Roß, F.; Lienert, K.;
Oswald, M.
WEITBLICK - ein Assistenzsystem zur Verbesserung der gesellschaftlichen
Teilhabe durch individualisierte Informationen über Dienstleistungen und
Ermöglichung von deren Inanspruchnahme
4. Deutscher AAL-Kongress mit Ausstellung, Berlin (2011)
Lux, R.; Kletzin, U.; Beyer, P.
Optimised heat treatment during wire and spring manufacture
Innovation in mechanical engineering - shaping the future : proceedings ;
Malz, E.; Thomä, S.; Zetik, R.; Semashko, P.; Garzia Ariza, P.
Polarimetric Ultrawideband Radar – Principles and Applications
IEEE International Conference on Ultra-Wideband (2012)
Malz, E.; Scheiber, R.; Mittermayer, J.; Snoeij, P.; Attema, E.
Sentinel-1 FDBAQ performance validation using TerraSAR-X data
IEEE International Geoscience and Remote Sensing Symposium (IGARSS)
2012; Munich, Germany (2012)
Malz, E.; Zetik, R.; Semashko, P.; Thomä, R. S.; Garzia A., Alexis P.
Polarimetric ultrawideband radar
IEEE International Geoscience and Remote Sensing Symposium (IGARSS)
2012; Munich, Germany (2012)
Manske, E.; Hausotte, T.; Jäger , G.
Nanopositionier-und Nanomessmaschinen für die Anwendung in der
Mikro- und Nanotechnik
4. Fachtagung Metrologie in der Mikro- und Nanotechnik 2011; Erlangen
(2011)
Manske, E.; Jäger, G.; Füßl, R.; Balzer, F.; Machleidt, T.
Nanomess- und Nanopositioniergeräte für die nanometergenaue
Positionierung, Messung und Bearbeitung von Oberflächen und
Strukturen : Schwerpunkt: B5 Nanomessmaschinen
Vorträge der 16. GMA/ITG-Fachtagung (Sensoren und Messsysteme
2012); Nürnberg (2012)
Manske, E.; Jäger, G.; Hausotte, T.
Prospects of multi-sensor technology for large-area applications in microand nanometrology
Reflecting on the past - looking into the future: NCSL International,
workshop & symposium, National Harbor, MD (2011)
Marton, M.; Kotlár, M.; Michniak, P.; Wilke, M.; Grieseler, R.; Hopfeld,
M.; Schaaf, P.; Veselý, M.
Incorporation of copper nanoparticles into DLC films during growth by
DC PE-CVD method
57th International Scientific Colloquium (IWK), TU Ilmenau (2012)
Mashi, M.; Ament, C.
A knowledge-based system for measuring the quality of the distribution
of salami slices on pizza crusts
2011 IEEE Jordan Conference on Applied Electrical Engineering and
Contact
216
Computing Technologies (AEECT); University of Jordan, Amman, Jordan
(2011)
Mehner, H.; Brückner, K.; Karolewski, D.; Michael, S.; Hein, A.;
Hoffmann, M.
Stress-controlled piezoelectric AlN-MEMS-resonators with Molybdenum
electrodes for GHz applications
23rd Micromechanics and Microsystems Europe Workshop, MME 2012,
Ilmenau, Germany(2012)
Mextorf, H.; Sachs, J.; Daschner, F.; Kent, M.; Knochel, R.
Free-space moisture prediction of small objects using m-sequences
Michniak, P.; M.Vojs; Behul, M.; Veselý, M.; Tvarožek, V.; Vincze, A.;
Wilke, M.; Kups, T.; Rossberg, D.; Schaaf, P.
Boron doped diamond for trace metal detection
57th International Scientific Colloquium (IWK), TU Ilmenau (2012)
Müller, J.; Stöpel, D.; Mache, T.; Schulz, A.; Drüe, H.; Humbla, S.; Hein,
A.
Fineline structuring on LTCC substrates for 60 GHz line-coupled filters
Contribution to 2011 European Microelectronics and Packaging
Conference, EMPC 2011, Brighton, UK (2011)
Müller, L.; Hoffmann, M.
Silicium-Metall Nanostrukturen mit ultrahoher Absorption im infraroten
Strahlungsbereich
Mikro-Nano-Integration: Beiträge des 4. GMM-Workshops, Berlin (2012)
Müller, L.; Kremin, C.; Hoffmann, M.
Mittels Nanostrukturierung optimierte Bimorph-Biegeaktoren großer
Auslenkung
Müller, R.; Garcia, P.; Xia L.; Wollenschläger, F.; Thomä, R.S.; Hein, A.
60 GHz Ultra-wideband Dual-Polarized Front-End in LTCC Technology
Europ. Conference on Antennas and Propagation, EuCAP2011, Rome,
Italy (2011)
Müller, R.; Wollenschläger, F.; Schulz, A.; Elkhouly, M.; Hein , A.;
Müller, J.; Thomä, S.; Garcia Ariza, P.
60 GHz Ultrawideband Front-Ends with Gain Control, Phase Shifter, and
Wave Guide Transition on LTCC Technology
Europ. Conference on Antennas and Propagation, EuCAP2012, Prague,
Czech Republic, (2012)
Müller, R.; Wollenschläger, F.; Schulz, A.; Elkhouly, M.; Trautwein, U.;
Hein, A.; Müller, J.; Garcia Ariza, P.; Thomä, S.
60 GHz Ultrawideband Front-Ends with Gain Control, Phase Shifter, and
Wave Guide Transition in LTCC Technology
Satellite Division Technical Meeting of the Institute of Navigation, IONGNSS 2012, Nashville, Tennessee, USA (2012)
Müller, R.; Wollenschläger, F.; Schulz, A.; Elkhouly, M.; Trautwein, U.;
Hein, Matthias A.; Müller, J.; Garcia A.; Alexis, P.; Thomä, R.S.
60 GHz ultrawideband front-ends with gain control, phase shifter, and
wave guide transition in LTCC technology
6th European Conference on Antennas and Propagation (EUCAP) 2012,
Prague (2012)
Murtaza, N.; Grimm, M.; Krah, A.; Heuberger, A.; Thomä, R.; Hein, A.
Multi-band direction-sensitive cognitive radio node
Communications, IEEE APWC 2011, Torino, Italy (2011)
Murtaza, N.; Zameshaeva, E.; Hein, A.
Reconfigurable decoupling and matching network for a cognitive
antenna
40th European Microwave Conference, Manchester, UK (2011)
Mynttinen, I.; Runge, E.; Li, P.
Parameter estimation of an industrial evaporator with hybrid dynamics by
smooting approach Proceedings
8th International Conference on Informatics in Control, Automation and
Robotics, Noordwijkerhout, The Netherlands (2011)
Nader, R.; Pezoldt, J.; Masri, P.
Quantitative evaluation of strain in epitaxial 2H-AlN layers on 3CSiC/Si(111) pseudo-substrates
Quantitative evaluation of strain in epitaxial 2H-AlN layers
1st Mediterranean Conference on Innovative Materials and Applications
(CIMA 2011), Crowne Plaza Hotel, Beirut, Lebanon (2011)
Narandžić, M.; Käske, M.; Sommerkorn, G.; Schneider, C.; Thomä, R.;
Jäckel, S.
Variation of estimated large-scale MIMO channel properties between
repeated measurements
IEEE 73rd Vehicular Technology Conference (VTC Spring), Budapest,
Hungary (2011)
Nguyen, T. T.; Amthor, A.; Ament, C.
Communication of the multi laser tracker system used as position
feedback sensor
SPIE eco-photonics 2011 (First European Conference on Ecophotonics);
Strasbourg, France (2011)
Nowack, T.; Mämpel, J.; Bender, M.; Witte, H.; Kurtz, P.
Schnittstellengestaltung für die Robotik - komplexe Probleme einer
Mensch-Maschine-Schnittstelle
9. Berliner Werkstatt Mensch-Maschine-Systeme (2011)
Paasch, G.; Scheinert, S.; Grobosch, M.; Hörselmann, I.; Knupfer, M.;
Bartsch, J.
The influence of hole injection barriers on organic field-effect transistors:
connection with photoemission data
Patscher, A.; Hild, M.; Srocka, S.; Bliedtner, J.; Bergmann, J.P.
Beitrag zur Prozessauslegung beim Mikrolaserschweißen an ultradünnen
metallischen Folien
8. Jenaer Lasertagung 2012
Patschger, A.; Hild, M.; Bergmann, J. P.; Bliedtner, J.
Remote-Schweiß-Strategien zum Fügen ultradünner metallischer Folien
12. Nachwuchswissenschaftlerkonferenz mitteldeutscher
Fachhochschulen, Hochschule Harz, Wernigerode (2011)
Percle, B.; Klöckner, J.; Manske, E.; Fengler, W.
Signal and data processing in high-precision measuring machines - a case
of study of NPMM-200
Percle, B.; Klöckner, J.; Manske, E.; Fengler, W.
Teilsystem zur positionsbezogenen Messdatenverarbeitung für eine
Nanopositionier- und Nanomessmaschine
17. VIP-KongressVDE Verlag GmbH Berlin (2012)
Pezoldt J.; Kalnin A.A.
Defect interactions and polytype transitions
Pezoldt, J.; Grieseler, R.; Schupp, T.; As, D.J.; Schaaf, P.
Mechanical properties of cubic SiC, GaN and AlN films
2011 International Conference on Silicon Carbide and Related Materials
Pezoldt, J.; Tonisch, K.; Jatal, W.; Baumann, U.; Schwierz, F.
High frequency AlGaN/GaN-HEMTs on silicon substrates
Pezoldt, J.; Stauden, T.; Morales, M.; Polychroniadis, K.; Voelskow,
M.; Skorupa, W.
SiC growth modification and stress reduction in FLASiC assisted liquid
phase epitaxy
Workshop on “Subsecond thermal processing of Advanced Materials
2011" (subtherm-2011), Dresden, Germany (2011)
Polster, T.; Hoffmann, M.; Mehner, H.; Oeder, A.; Sinzinger, S.
Optisch gepulste Mikroplasmaquelle für die Integration von
Nanotomographie in eine Nanomessmaschine
Polster, T.; Leopold, S.; Hoffmann, M.
Airborne particle generation for optical tweezers by thermo-mechanical
membrane actuators
SPIE microtechnologies (Smart sensors, actuators and MEMS V), Prague,
Contact
Polster, T.; Leopold, S.; Stauden, T.; Hoffmann, M.
Untersuchungen zur Nanoporosität von AIN Membranen
3. GMM-Workshops, Stuttgart (2011)
Predanocy, M.; Hotovy, I.; Kosc, I.; Rehacek, V.; Kostic, I.; Spieß, L.
Simulation, development and characterization of platinum microheater
on polyimide membrane
Rädlein, E.
Local initiators of glass alteration
12th International Conference on Architectural and Automotive Glass;
Tampere, Finland (2011)
Rahneberg, I.; Hilbrunner, F.; Fröhlich, T.
Novel concept of a high precision 6-DOF force/torque transducer
NCSLI Annual Conference USA (2011)
Reich, R.; Kletzin, U.
Fatigue damage parameters and their use in estimating lifetime of helical
compression springs
Renner, F.; Kapsch, R.-P.; Büermann, L.; Jannek, D.
Erarbeitung von Ionisationskammermodellen für EGSnrc im
Zusammenhang mit einem Benchmark-Experiment
43. Jahrestagung der Deutschen Gesellschaft für Medizinische Physik :
Resagk, C.; Wegfraß, A.; Diethold, C.; Werner, M.; Hilbrunner, F.;
A novel contactless flow rate measurement device for poorly conducting
fluids using Lorentz force velocimetry
International Symposium THMT 12: turbulence, heat and mass transfer 7;
University of Palermo, Italy, Begell Hou (2012)
Rieche, M.; Komenský, T.; Husar, P.
Radio Frequency Identification (RFID) in medical environment: Gaussian
Derivative Frequency Modulation (GDFM) as a novel modulation
technique with minimal interference properties
2011 Annual international conference of the IEEE Engineering in Medicine
and Biology Society; Boston, MA, USA (2011)
Röhr, S.; Ammon, D.; Detschew, V.
Methodischer Entwurf und technische Implementierung klinischer
Behandlungspfade - ein Erfahrungsbericht
eHealth2011 - Health Informatics meets eHealth; Wien; Österreich (2011)
Sabitov, N.; Grewe, A.; Sinzinger, S.
Simultaneous trapping and observation optics for micro-opto-fluidic
systems
EOS annual meeting 2012, Aberdeen, Scotland, UK (2012)
Sachs, J.; Helbig, M.; Herrmann, R.; Kmec, M.; Schilling, K.; Zaikov, E.
Remote Vital Sign Detection for Rescue, Security, and Medical Care by
Ultra-Wideband Pseudo-Noise Radar
Ad Hoc Networks (2012)
Sachs, J.; Kmec, M.; Herrmann, R.; Helbig, M.; Schilling, K.
Integrated Pseudo-Noise Device with Network Analyzer Performance for
UWB Sensing and Component Test
ISSSE (2012)
Sachs, J.; Kmec, M.; Rauschenbach, P.; Herrmann, R.; Schilling, K.;
Helbig, M.
Toward Integrated Ultra-Wideband MiMo-Sensors
GeMiC (2012)
Sachs, J.; Zaikov, E.; Helbig, M.; Herrmann, R.; Kmec, M.;
Rauschenbach, P.; Schilling, K.
Trapped Victim Detection by Pseudo-Noise Radar
International Conference on Wireless Technologies for Humanitarian
Relief (2011)
Schalles, M.; Blumröder, G.
Berechnung des effektiven Emissionsgrades von Referenzstrahlern aus
Aluminiumoxid
Sensoren und Messsysteme 2012: Vorträge der 16. GMA/ITG-Fachtagung,
Nürnberg (2012)
217
Schalles, M.; Fröhlich, T.
Neuartiges Kalibrierstrahlersystem zur Präzisionskalibrierung von
Strahlungsthermometern
XXV. Messtechnisches Symposium des Arbeitskreises der Hochschullehrer
für Messtechnik e.V.; Karlsruhe (2011)
Schalles, M.; Fröhlich, T.
Neuartiges Kalibrierstrahlersystem zur Präzisionskalibrierung von
Strahlungsthermometern
AHMT-Symposium Shaker-Verlag (2011)
Scheinert, S.; Hörselmann, I.
Cutoff frequency of organic field effect transistors: a simulation study
Schilling, C.; Schrödner, M.; Kempf, W.; Olivera, M.; Witte, H.;
Köhring, S.; Fremerey, M.
IPMC's - auf dem langen Weg zum künstlichen Muskel
Fünfter Bionik-Kongress, Hochschule Bremen, (2011)
Schmidt, D.; Albrecht, R.; Lange, G.
Analyse von schmelz- und pulvermetallurgisch hergestellten
geschlossenporigen Metallschäumen auf Aluminium-Basis
46. Metallographie-Tagung, Rostock (2012)
Schmidt, D.; Albrecht, R.; Lange, G.
Investigation to distribution of additives in open- and closed-cell
aluminum foam
International Conference on Innovative Technologies: IN-TECH 2012,
Rijeka (2012)
Schmidt, D.; Lange, G.
Hybride Werkstoffsysteme aus offen- und geschlossenporigen
Aluminiumschäumen und Kunststoffen
Leichtbau und nachhaltige Mobilität : 5. Landshuter LeichtbauColloquium; Hochschule Landshut (2011)
Hybride Werkstoffsysteme aus zellularen metallischen Werkstoffen und
thermoplastischen Kunststoff für zukünftige multifunktional
Anwendungen
15. Werkstofftechnischen Kolloquium; Chemnitz (2012)
New function-optimized hybrid material of aluminium foam and polymer
IN-TECH 2011: International Conference on Innovative Technologies,
Bratislava, Slovakia (2011)
Schmidt, T.; Müller, A.
Überprüfung der Schutzwirkung von Gehörschutzotoplastiken in der
betrieblichen Praxis mit Hilfe eines Personalisierten Miniaturisierten
Lärmdosimeters
37. Jahrestagung für Akustik; Fortschritte der Akustik: DAGA 2011;
Düsseldorf (2011)
Schneider, C.; Thomä, R.S.
Evaluation of LTE link-level performance with closed loop spatial
multiplexing in a realistic urban macro environment
6th European Conference on Antennas and Propagation (EUCAP) 2012,
Prague (2012)
Schneider, M.; Hoffmann, M.
Non-electrical-power temperature-time integrating sensor for RFID based
on microfluidics
SPIE microtechnologies (Smart sensors, actuators and MEMS V);: Prague,
Czech Republic (2011) 80661V
Schneider, S.; Budden, M.; Günther, M.; Schwieger, S.; Köhler, J. M.;
Kielpinski, M.; Henkel, T.
Elektrisch geschaltete Mikrofluidsegmente für die Segment-on-DemandTechnik
Schwab, A.; Kapsch, R.-P.; Renner, F.; Jannek, D.
Eine Methode zur Bestimmung der kinetischen Energie von Elektronen an
der hochenergetischen Beamline des PTB-Forschungsbeschleunigers
43. Jahrestagung der Deutschen Gesellschaft für Medizinische Physik,
Schwierz, F.
Graphene transistors 2011
2011 International Symposium on VLSI Technology, Systems, and
Applications (VLSI-TSA); Hsinchu, Taiwan (2011)
Contact
218
Scotto di Clemente, F.; Hein, A.; Pancera, E.; Stephan, R.; Wiesbeck,
W.
Compact permittivity-matched ultra-wideband antennas for biomedical
imaging
Scotto di Clemente, F.; Helbig, M.; Sachs, J.; Schwarz, U.; Stephan, R.;
Hein, A.
Permittivity-matched compact ceramic ultra-wideband horn antennas for
biomedical diagnostics
European Conference on Antennas and Propagation, EuCAP2011, Rome,
Italy (2011)
Serebryakova, E.; Blau, K.; Hein, A.
Singly and doubly terminated balanced input comb-line filters for currentmode class-S power amplifiers
10th International Conference on Telecommunications in Modern
Satellite, Cable and Broadcasting Services – TELSIKS 2011, Nis, Serbia;
(2011)
Serebryakova, E.; Blau, K.; Hein, A.
Singly terminated reconstruction filters for current-mode class-S power
amplifiers
International Microwave Symposium 2011 (IMS2011), Microwave
Symposium Digest (MTT), 2011 IEEE MTT-S International; Baltimore, USA,
(2011)
Shen, G.; Zetik, R.; Yan, H.; Javanoska, S.; Thomä, S.
Localization of Active UWB Sensor Nodes in Multipath and NLOS
Environments
EUCAP (2011)
Shen, G.; Zetik, R.; Yan, H.; Jovanoska, S.; Malz, E.; Thomä, R. S.
UWB localization of active nodes in realistic indoor environments
Loughborough Antennas and Propagation Conference (LAPC);
Loughborough University, UK (2011)
Shen, J.C.; Dorozhovets, N.; Hausotte, T.; Manske, E.; Jywe, W.Y.; Liu,
C.H.
Active probe control of a metrological atomic force microscopy
18th IFAC World Congress; Milano, Italy (2011)
Sheridan, J.; Kelly, P.
Opto-numeric systems: lenses and pixels
Digital Holography and Three-Dimensional Imaging; Miami, USA (2012)
Shyrokau, B.; Wang, D.; Augsburg, K.; Ivanov, V.
Modelling and control of hysteresis-characterized brake processes
EuroBrake 2012; Dresden, Germany (2012)
Shyrokau, B.; Wang, D.; Vantsevich, V.; Augsburg, K.; Ivanov, V.
Multi-task integrated vehicle dynamics control
13th EAEC European Automotive Congress, Valencia (2011)
Sondermann, M.; Scheibe, H.; Theska, R.
Lens mounts in optical high performance systems with small diameters
Spieß, L.; Grieseler, R.; Wilke, M.; Teichert, G.; Schaaf, P.
Bestimmung von Werkstoffkenngrößen mittels der instrumentierten
Eindringhärteprüfung
DGZfP-Jahrestagung 2011 Zerstörungsfreie Materialprüfung; Bremen
(2011)
Spieß, L.; Morgenbrodt, S.; Teichert, G.; Schaaf, P.
Restaustenitbestimmung-vergleichende Untersuchung mit
zerstörungsfreien Messmethoden
DGZfP-Jahrestagung 2011 Zerstörungsfreie Materialprüfung; Bremen
(2011)
Steffanson, M.; Gorovoy, K.; Kampmann, R.; Kleindienst, R.;
Sinzinger, S.; Rangelow, I. W.
Low-cost uncooled infrared detector using microcantilever arrays with
optical readout
Stoebenau, S.; Kleindienst, R.; Hofmann, M.; Sinzinger, S.
Computer-aided manufacturing for freeform optical elements by
ultraprecision micromilling
SPIE Optics + Photonics (Optical manufacturing and testing IX); San
Diego, CA, USA (2011)
Tanenbaum, D. M.; Hermenau, M.; Voroshazi, E.; Lloyd, M. T.;
Galagan, Y.; Zimmermann, B.; Hösel, M.; Dam, H. F.; Jørgensen, M.;
Gevorgyan, S.; Kudret, S.; Maes, W.; Lutsen, L.; Vanderzande, D.;
Würfel, U.; Andriessen, R.; Rösch, R.; Hoppe, H.
Stability and degradation of organic photovoltaics fabricated, aged, and
characterized by the ISOS 3 inter-laboratory collaboration
2012 SPIE Optics + Photonics International Meeting (Organic
photovoltaics XIII); San Diego, CA, USA (2012)
Thess, A.; Wegfraß, A.; Diethold, C.; Werner, M.; Fröhlich, T.;
Halbedel, B.; Hilbrunner, F.; Resagk, C.
Noncontact electromagnetic flow measurement in electrolytes
23rd International Congress of Theoretical and Applied Mechanics :
Beijing, China (2012)
Tonisch, K.; Benzig, R.; Ecke, G.; Pezoldt, J.
AlGaN solid solution grown on 3C-SiC(111)/Si(111) pseudosubstrates
Torres P., Jose O.; Halbedel, B.
A novel electromagnetic mixer for the glass melt homogenization evaluation with a numerical and physical model
Workshop Elektroprozesstechnik: Seminar- und Ferienhaus “Zur
Talsperre", Ilmenau, Ortsteil Heyda (2012)
Trabert, J. F.; Blau, K.
Dynamic range of a P-I-n-diodes based SP4T switch-IC for broadband Kaband satellite communication applications
7th German Microwave Conference (GeMiC); Ilmenau, Germany (2012)
Trautwein, U.; Baker, D.; Käske, M.; Thomä, R.S.
Practical aspects of the direction finding accuracy of compact wideband
arrays for V/UHF frequencies
Communications (APWC); Cape Town, WP, South Africa (2012)
Urdzík, D.; Zetík, R.; Kocur, D.; Rovnáková, J.
Shadowing effect investigation for the purposes of person detection and
tracking by UWB radars
7th German Microwave Conference (GeMiC); Ilmenau; Germany (2012)
Voges, D.; Schilling, C.; Witte, H.
Didaktische Aufbereitung einiger Prinzipien der Werkstoff-Bionik für
Studierende der Ingenieurwissenschaften
Fünfter Bionik-Kongress, Hochschule Bremen (2011)
Wagner, A.; Theska, R.; Bitencourt, A. C. P.; Lepikson, H. A.;
Weingärtner, W. L.
New approach to overcome the limitations in small torque realization
Engineering and Nanotechnology ; Como (2011)
Wagner, A.; Theska, R.; Bitencourt, A. C. P.; Lepikson, H. A.;
Weingärtner, W. L.
Novel approaches to reduce the uncertainty of torque standard machines
for small torques
Weber, C.; Husung, S.; Brix, T.; Brix, S.; Sladeczek, C.
Auralisation of acoustical product properties for technical systems in
virtual environments
Weber, C.
Idea - invention - innovation: strategies, approaches, research challenges
12th International Design Conference, Dubrovnik, Croatia (2012)
Weber, C.
Produkte und Produktentwicklungsprozesse abbilden mit Hilfe von
Merkmalen und Eigenschaften - eine kritische Zwischenbilanz
Design for X: Beiträge zum 23. DfX-Symposium; Hamburg (2012)
Wegfraß, A.; Diethold, C.; Werner, M.; Resagk, C.; Hilbrunner, F.;
Entwicklung einer neuen Durchflussmesstechnik zur Vermessung
elektrisch schwachleitfähiger Fluide mittels Lorentzkraft Anemometrie =
Development of a novel flow rate measurement device for poorly
conducting fluids using Lorentz Force Velocimetry
Lasermethoden in der Strömungsmesstechnik: 19. Fachtagung; Ilmenau
(2011)
Weinberger, S.; Markweg, E.; Nguyen, T.; Hoffmann, M.; Ament, C.
Positionserfassung von flexiblen Roboterarmen mit einem optischen
Mikrotrackersystem
Weise, F.; Hampl, J.; Klett, M.; Schober, A.
Mikropumpe für Mikrobioreaktoren
Weiß, M.; Steigenberger, J.; Geinitz, V.; Beyer, P.
Extreme bending of spring steel wire - theory and experiment
Welker, T.; Geiling, T.; Müller, J.;
3D Integration in LTCC am Beispiel einer Mikroreaktionskammer
IMAPS-Konferenz, München (2011)
Anwendung von Halbacharrays in der Lorentzkraftanemometrie
Workshop Elektroprozesstechnik: Seminar- und Ferienhaus „Zur Talsperre"
Wollenschläger, F.; Stephan, R.; Xia, L.; Müller, J.; Müller, R.; Garcia
A., Alexis P.; Thomä, R. S.; Hein, M. A.
A compact dual-polarized wideband patch antenna array for the
unlicensed 60 GHz band
5th European Conference on Antennas and Propagation (EUCAP 2011);
(2011)
Yan, H.; Shen, G.; Zetik, R.; Malz, E.; Jovanoska, S.; Thomä, R. S.
Stationary symmetric object detection in unknown indoor environments
Loughborough Antennas and Propagation Conference (LAPC);
Loughborough University, UK (2011)
Zameshaeva, E.; Stöpel, D.; Humbla, S.; Hein, A.; Vendik, B.
180° analogue microwave phase shifter based on composite right/left
handed transmis-sion line for L-band applications
Fifth International Congress on Advanced Electromagnetic Materials in
Microwaves and Optics, Metamaterials 2011, Barcelona, Spain (2011)
Zetik, R.; Röding, M.; Thomä, S.
UWB localization of moving targets in shadowed regions
Zetik, R.; Thomä, R.S.
UWB Measurements and Data Analysis in Automotive Scenarios
EUCAP (2011)
Zetik, R.; Jovanoska, S.; Thomä, R.S.
Simple method for localisation of multiple tag-free targets using UWB
sensor network
IEEE International Conference on Ultra-Wideband (ICUWB); Bologna, Italy
(2011)
Zschäck, S.; Amthor, A.; Ament, C.
Decentralized high precision motion control for nanopositioning and
37th Annual Conference of the IEEE Industrial Electronics Society (IECON
2011); Melbourne, Australia (2011)
Zschäck, S.; Büchner, S.; Amthor, A.; Ament, C.
Maxwell Slip based adaptive friction compensation in high precision
applications
38th Annual Conference on IEEE Industrial Electronics Society (IECON
2012); Montreal, Canada (2012)
Zschäck, S.; Klöckner, J.; Amthor, A.; Ament, C.; Fengler, W.
Regelung von Nanopositionier- und Nanomessmaschinen mittels einer
modularen FPGA-Plattform
3. Landshuter Symposium Mikrosystemtechnik; Landshut (2012)
Weinberger, S.; Cheriguen, Y.; Hoffmann, M.
Static large-angle micromirror with aluminum nitride springs
Contact
219
Eisentraut, Katja (2011)
Entwicklung einer Klassenbibliothek zur Modellierung von medizinischen
Prozesssen
Fachgebiet Biosignalverarbeitung
Theses
Venia Legendi
Beenken, Wichard Johann Daniel
Excitons in conjugated polymers : a theoretical study based on quantum
chemistry
(2011)
Hausotte, Tino
Nanopositionier- und Nanomessmaschinen: Geräte für hochpräzise
makro- bis nanoskalige Oberflächen- und Koordinatenmessungen
(2011)
Meinhardt, Jürgen
Entwicklung nanostrukturierter Kohlenstoff-FluorPlasmapolymerschichten für Mikrosysteme
(2011)
Shokhovets, Sviatoslav
Excitons and exciton-phonon complexes in the room-temperature optical
response of wurtzite GaN and ZnO
(2011)
Ströhla, Tom
Vorteile, Potential und Grenzen einfacher Modelle im Entwurf
elektromagnetischer Energiewandler im Umfeld leistungsfähiger
Rechenhilfsmittel
(2012)
Thiel, Florian
Evaluation elektromagnetischer Breitband-Sensoren für biomedizinische
Anwendungen
(2012)
Doctorate Theses
Abahmane, Lahbib (2011)
Untersuchung Nanopartikel-katalysierter organischer Synthesen im
Mikrodurchflussprozess
Fachgebiet Physikalische Chemie/Mikroreaktionstechnik
Beruscha, Frank (2012)
Nutzerorientierte Gestaltung haptischer Signale in der Lenkung : zum
Einsatz direktionaler Lenkradvibrationen in Fahrerassistenzsystemen
Fachgebiet Kraftfahrzeugtechnik
Bumberger, Jan (2012)
Evaluation, analysis and optimization of direct-push sensor systems
Fachgebiet Theoretische Elektrotechnik
Cimalla, Irina Nicoleta (2011)
AlGaN/GaN sensors for direct monitoring of fluids and bioreactions
Zentrum für Mikro- und Nanotechnologien
Cuibus, Florina Maria (2012)
Electrochemical removal of nitrate from waste water
Fachgebiet Elektrochemie und Galvanotechnik
Distelrath-Lübeck, Anika (2012)
Untersuchungen zum Mechanismus der Abscheidung strukturierter
Schichten aus sechswertigen Chrom-Elektrolyten
Fachgebiet Elektrochemie und Galvanotechnik
Duft, Denis (2011)
Laborexperimente zur Mikrophysik der Wolken
Fachgebiet Experimentalphysik II/Umweltphysik
Egloff, Thomas (2011)
Ortsauflösendes Nah-Infrarot-Spektrometer basierend auf einem MikroOpto-Elektro-Mechanischem-System (MOEMS)
Fachgebiet Technische Optik
Eichardt, Roland (2012)
Improving condition and sensitivity of linear inverse problems in magnetic
applications
Fachgebiet Biomedizinische Technik
Contact
220
Erismis, Harun (2011)
Sol-Gel induzierte Leitfähigkeitsmodulation von Netzwerken aus
Kohlenstoffnanoröhren (CNTs) und deren Ursachen
Fachgebiet Chemie
Finsterbusch, Martin (2011)
Degradation mechanisms of solid oxide fuel cell cathodes
Fachgebiet Technische Physik I
Fröber, Ulrike (2011)
Mikrosystembasierte Zellkultivierung und Zellmanipulation zur
Applikation mechanischer Reize auf Zellen
Fachgebiet Biomechatronik
Gerbach, Ronny (2012)
Zerstörungsfreie Charakterisierung mikromechanischer Strukturen für
produktionsbegleitende Anwendungen
Fachgebiet Mikromechanische Systeme
Ghoshal, Sushanta (2012)
Study of polymer film formation and their characterization using NMR,
XRD and DSC
Fachgebiet Technische Physik II/Polymerphysik
Großmann, Marcus (2012)
Transmission strategies for broadband wireless systems with MMSE turbo
equalization
Fachgebiet Elektronische Messtechnik
Guliyev, Elshad (2012)
Eine Nanopositioniervorrichtung mit integrierten piezoresistiven Sensoren
für Hochgeschwindigkeits-Rastersondenmikroskopie-Anwendungen
Fachgebiet Mikro- und nanoelektronische Systeme
Hagemann, Malte (2011)
Lichttechnische und elektrooptische Optimierung organischer
Leuchtdioden
Hänsel, Thomas (2011)
Oberflächenanalytische Untersuchungen an kohlenstoffbasierten
Materialien
Fachgebiet Technische Physik I
Hauguth, Maik (2012)
Modellierung von Transportprozessen neutraler und ionisierter Spezies in
mikro- und nanostrukturierenden Ätzprozessen
Hecht, Kerstin (2012)
Entwicklung eines Laserstrahlpolierverfahrens für Quarzglasoberflächen
Fachgebiet Anorganisch-nichtmetallische Werkstoffe
Heimann, Stefan (2012)
Methodische Ansätze zur Untersuchung des Restbremsmomentes von
Scheibenbremsen
Herrmann, Ralf (2011)
M-sequence based ultra-wideband radar and its application to crack
detection in salt mines
Hilgers, Peter (2012)
Verteilte Zustandsschätzung nichtlinearer Systeme
Fachgebiet Systemanalyse
Hopf, Markus Klaus (2011)
Der dynamische Innenwiderstand von Blei-Akkumulatoren :
experimentelle Analyse und Methode zur Ladezustandsschätzung
Husung, Stephan (2012)
Simulation akustischer Produkteigenschaften unter Nutzung der Virtual
Reality während der Produktentwicklung
Fachgebiet Konstruktionstechnik
Jauernig, Uta (2012)
Herstellung funktioneller Dünnschichtelemente auf den Stirnflächen von
Lichtleitfasern mittels hochauflösender lithografischer
Strukturierungsverfahren
Junghähnel, Manuela (2012)
Herstellung und Chakterisierung von transparenten, elektrisch leitfähigen
TiO2:Nb-Dünnschichten durch Gleichstrom- und Puls-Magnetron-Sputtern
Fachgebiet Anorganisch-nichtmetallische Werkstoffe
Kanka, Mario (2011)
Bildrekonstruktion in der digitalen inline-holografischen Mikroskopie
Klee, Sascha (2012)
Selektive Farbkanalstimulation des menschlichen visuellen Systems
Koch, Jürgen (2011)
Laserendbearbeitung metallischer Werkstoffe
Fachgebiet Werkstoffe der Elektrotechnik
Król, József (2012)
Beitrag zur Integration von thermomechanischen flüssigkristallinen
Elastomeren als Aktor in die Mikromechanik
Li, Shuning (2012)
Monodisperse ZnO micro and nanoparticles obtained by micro segmented
flow synthesis
Fachgebiet Physikalische Chemie/Mikroreaktionstechnik
Mach, Matthias (2011)
Designoptimierung keramischer Mehrlagenmodule unter den Aspekten
des thermischen Managements und der Bauelemente-Zuverlässigkeit
Fachgebiet Elektroniktechnologie
Sondermann, Mario (2011)
Mechanische Verbindungen zum Aufbau optischer Hochleistungssysteme
Fachgebiet Feinwerktechnik
Spiegler, Andreas (2012)
Dynamics of biologically informed neurals mass models of the brain
Vogler, Bastian (2011)
Integrierte Gatetreiber in SOI-Technologie für 600 V- und 1200 VLeistungssysteme
Fachgebiet Festkörperelektronik
Wacker, Matthias (2012)
Dynamic phase analysis of MEG and EEG signals
Walther, Christian (2012)
Multikriteriell evolutionär optimierte Anpassung von unscharfen
Modellen zur Klassifikation und Vorhersage auf der Basis hirnelektrischer
Narkose-Potentiale
Weis, Christoph (2012)
Single ion impact detection & scanning probe aligned ion implantation
for quantum bit formation
Williamson, Adam (2011)
Black silicon for photodiodes: experimentally implemented and FDTD
simulated
Mastylo, Rostyslav (2012)
Optische und taktile Nanosensoren auf der Grundlage des
Fokusverfahrens für die Anwendung in Nanopositionier- und
Nanomessmaschinen
Fachgebiet Prozessmesstechnik
Neher, Jochen (2012) Rechnerische und experimentelle Untersuchungen
der Schallabstrahlung bei Fahrzeuggetrieben Fachgebiet
Kraftfahrzeugtechnik
Nie, Yaru (2012)
Surface silanization of carbon nanofibers and nanotubes for altering the
properties of epoxy composites
Fachgebiet Chemie
Reinlein, Claudia (2012)
Thermo-mechanical design, realization and testing of screen-printed
deformable mirrors
Rentsch, Sven (2011)
Bestimmung von Materialkennwerten zur Realisierung von Hoch- und
Höchstfrequenzkomponenten in LTCC
Fachgebiet Elektroniktechnologie
Schneider, Matthias (2012)
Entwicklung eines generischen Planungs- und Managementsystems für
Verbände heterogener autonomer maritimer Fahrzeuge
Schneider, Michael (2011)
Überwachung und Prognose von Bauteilgeometrien mit Computational
Intelligence
Schühler, Mario (2012)
Zum Entwurf planarer Antennen mit Hilfe periodischer Strukturen
Fachgebiet Hochfrequenz- und Mikrowellentechnik
Sendler, Jan (2012)
Untersuchungen zur ergonomiegerechten Gestaltung der MenschMaschine-Schnittstellen von aktuellen Pkw-Bremsanlagen
Shen, Guowei (2012)
Localization of active nodes within distributed ultra-wideband sensor
networks in multipath environments
Contact
221
98693 Ilmenau
Germany
Phone: +49 3677 69-3401
Fax:
+49 3677 69-3499
macronano@tu-ilmenau.de
www.macronano.de
BIANNUAL REPORT 2009 2010
at Technische Universität Ilmenau
CONTACT

contact - TU Ilmenau

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