ULTRA Quick Vision

Transcription

ULTRA Quick Vision
Vision Measuring Systems
CNC Vision Measuring System
ULTRA Quick Vision
Catalog No. E4224-361
Quick Vision Series — Flagship Model—
ULTRA Quick Vision
1
Advanced Technologies Supporting
Ultra High-accuracy Systems
Optimal Structural Design through FEM
Analysis
Main Body Structure Appropriate for
High-accuracy Systems
Structural design is optimized through
the use of infinite element method
(FEM) analysis. This results in maximum
rigidity for minimum weight, minimizing
deformations due to loading and
guaranteeing excellent geometrical
accuracy at all times.
The moving structure of a fixed bridge
table employed for ULTRA QV makes the
X axis and Y axis completely independent
of each other, providing the feature that
the moving accuracy of each axis is not
easily affected by the other. The X-axis and
Y-axis guides apply granite excellent in
abrasion resistance and thermal stability.
Ball Screw Floating Mechanism
Self-suction Air Pad
If a normal air pad is used for the Y axis, it is necessary to increase
the mass of the work stage to obtain appropriate rigidity. ULTRA QV
(Quick Vision) employs a special air pad called a self-suction type
that floats the air pad with compressed air and also generates an
absorption power with a vacuum zone provided under negative
pressure at the center of the pad. This achieves greater Y-axis rigidity
and stage weight reduction concurrently, thus enabling stable stage
drive.
ULTRA QV employs high-reliability ball screws in the floating
mechanism.
This floating mechanism will minimize the error due to axial fluctuation
that adversely affects
Ball Screw
Pulse Generator
kinetic performance
such as straightness
Servomotor
and improve the
driving speed.
Floating Mechanism
Guide Block
Nut
High-accuracy, High-resolution Scale
Compressed air
Guide plane
The length measuring systems, standard for individual axes, are
equipped with a high-resolution linear encoder system with a resolution of 0.01µm, respectively, which Mitutoyo has uniquely developed.
This scale uses crystal glass as its material, of which the thermal
expansion coefficient nearly equals zero, to minimize the scale expansion and contraction due to change in temperature and offer higherreliability measurement data.
Compressed air
Suction
Air pad
Vacuum suction
region
Conventional glass scale
Temperature Compensation Function
(Option)
The thermometer unit installed in the main body reads temperatures
at each axis and calculates the amount of expansion and contraction
of the body to compensate the measuring accuracy. This function
allows the accuracy to be guaranteed in a wide range of 20˚C±2˚C.
Additionally, the thermometer unit measures in real time workpiece
temperatures with two sensors, outputting the results in which
dimensions are converted to those at 20˚C.
2
Ultra high-accuracy crystallized glass scale
Ultra high-accuracy glass scales are
manufactured at the underground
laboratory of Mitutoyo Kiyohara
Production Department.
Air Server
To avoid the adverse effect of supplied
air temperature on the measuring system
structure, the air server supplies air always
maintained at a constant temperature.
Dimensions
1200
1102
400
70
400
890
1910
200
28
Unit: mm
325
325
280
215
215
1200
850
1735
650
Specifications
Model No.
Order No.
Range
XxYxZ
Magnification change system
Resolution / Scale unit
High-sensitivity CCD Camera
Illumination
(PRL: Programmable Ring Light)
Accuracy*1
(20˚C±0.2˚C)
Accuracy assurance environments*3
Surface
Contour
PRL
E1XY
E1Z (50mm stroke)*2
E1Z (Full stroke)
E2XY plane
Temperature range
Temperature variation
Temperature gradient
Repeatability within the visual field
Repeatability of auto-focus
Repeatability of laser auto-focus
Stage glass size
Max. stage loading
Dimensions (W x D x H)
Mass
Used air pressure
Supplied air flow rate
*1: Accuracy when measured at the center of the video screen
and in the middle of measuring stroke on a plane using the
5X objective and 1X tube lens
*2: Specified only for factory shipping inspection.
ULTRA QUICK VISION 404 PRO
363-511
363-517 (equipped with LAF)
400x400x200mm
Programmable power turret
(selectable from among magnifications of 1X, 2X, and 6X)
0.01µm / Linear Encoder*4
B&W
Halogen
Halogen
Halogen
(0.25+L/1000)µm
(1.0+2L/1000)µm
(1.5+2L/1000)µm
(0.5+2L/1000)µm
20±0.2˚C
0.5˚C/1H
1˚C/m
3σ=0.2µm
σ=0.4µm
—
σ=0.4µm
493x553mm
40kg
1200x1735x1910mm
2150kg
0.4MPa*5
150L/min*6
*3: Accuracy assurance environments in the case where no
temperature compensation is performed.
Those in the case where temperature compensation is
performed are as follows.
• Accuracy-assured temperature range: 20±2˚C
• Temperature variation: 0.5˚C/H
• Temperature gradient: 1˚C/m
3
*4: Thermal expansion coefficient: (0±0.02)X10-6/K
*5: An air source is required to maintain the original air pressure
between 0.5 and 0.9MPa.
*6: Indicates the flow rate under normal conditions.
"Ultra-high Accuracy"
Measurement Achieved
by "ULTRA"
The Ultimate Flagship
Machine Newly Born
from Drastic Speedup
and Higher Accuracy
Mitutoyo Has Attained
the Summit of Vision
Measurement
4
Software
QVPAK Advancing for More User-friendliness
A Group of Diverse Tools for Correctly Detecting Workpiece Edges
One-Click Point Tool
This is a basic tool for capturing one point.
One-Click Circle Tool
This tool is appropriate for
capturing a circle.
One-Click Line Tool
This tool is appropriate for
capturing a line.
One-Click Arc Tool
This tool is appropriate for
capturing an arc and the
radius of a corner.
Maximum/Minimum Tool
This tool evaluates the
maximum or minimum point
within the range.
Pattern Search
This tool captures the
position of a pattern that has
been registered beforehand.
It is optimal for positioning
the alignment mark.
Area Centroid Tool
This tool evaluates the
position of a feature's
centroid. It is appropriate
for positioning a different
feature.
Auto Trace Tool
This is a form measuring tool
that can autonomously track
an unknown feature.
5
One-click Measuring Tool Set-up
Removal of Abnormal Points
The tool size, orientation, and threshold value of a measuring tool are
automatically set with one click of the mouse.
Abnormal points such as dust, burrs, and cracks are removed.
The removal threshold detection level can be set arbitrarily.
Various Auto-focus Functions Equipped as Standard
Surface Focus Tool
This is a general vision
focusing tool.
Multi-point auto focus
Pattern Focus Tool
This focusing tool is optimal
for transparent or low-contrast
surfaces.
Edge Focus Tool
This is a tool for focusing on a
beveled edge.
Targeting the auto-focus tool (surface and
pattern) on separate areas allows multiple
heights (1344 points at max.) to be measured.
Maximum and minimum heights as well as the
average height can be found.
Smart Recovery Function
Example of individual layout of focus tools
Example of display with the DV graphics
Increase in Edge Detection Capability
The capability of detecting a noisy edge has increased by analyzing modest
changes in brightness and differences in texture on the target surface.
Depending on the unevenness of workpieces and the condition of
alignment, an edge detection error or auto-focus error may result during
part program execution.
The Smart Recovery function corrects the illumination condition or the
position and angle of a tool to automatically perform remeasurement.
Noisy edge
Example of multiple-height measurement
Noisy edge
Brightness analysis
Brightness analysis
AI Illumination Tool
This tool can automatically set the optimal light intensity adjustment and
light intensity correction at procedure creation time, thereby increasing
detection repeatability.
Edge of Screen
Brightness Tool
Dual Area Contrust Tool
6
Morphological Filter
Application Software
Automatic Measurement Management
Software
Form Evaluation and Analysis Software
FORMPAK-QV
QV Part Manager
FORMPAK-QV performs tolerancing and form analysis from form data
obtained with the QV Auto Trace tool and laser probe.
QV Part Manager is the execution program management software for
multiple workpieces arranged on the measurement stage.
Measurement can be performed even if
parts are not arranged at constant pitch.
Multiple kinds of workpiece can be
arranged in a column (row).
Multiple kinds of
workpieces can
be registered.
Measuring Support
Offline Teaching
EASYPAG
DXF
CAD Option
CAD Option displays CAD data on the Graphic window to enhance ease
of measurement.
IGES
EASYPAG creates measurement part programs for QVPAK using 2D CAD
data. It reduces the number of man-hours for creating part programs, thus
allowing a decrease in lead time.
Inspection Certificate Creation Software
Measure Report-QV
This software, which is based on the commercial
spreadsheet software Microsoft Excel, can easily
customize an inspection certificate.
Pitch circle measurement
PAGPAK
DXF
IGES
Tool Edit Screen
CSV
NC Data
EXcelon data
Gerber data
PAGPAK is the offline teaching software for creating QVPAK part programs
using NC data, CAD data and Gerber data.
MesureLink SPC-Super
Various statistical calculation processing can be performed from measurement results. It is also possible to display control charts in real time.
QV Eio
Can implement the external
control interface between a
PC and QVPAK.
Online Teaching
QV Eio supported example
Operation Unit
QV Eio
Control Unit
QV
QVPAK
Handling robot
Fixture
QV 3DCAD-OnLine
The software allows the machine to travel to the position specified on a 3DCAD model and
execute measurement. This drastically improves the operability and part program creation
efficiency compared with operations under joystick control.
QV Eio-PC
QVPAK can be controlled from
an external PC via RS-232C.
QV status can be output using
an external I/O board.
QV Eio-PC usage example (System using PATLITE)
QV-JMP Export
Outputs QVPAK measurement results to JMP in the SPC software.
7
Application Hardware
Laser Auto Focus
(Factory-installed Option)
Objects
This hardware allows high-speed focusing or height measurement in a
microscopic region with the objective transmission TTL laser.
Objective
QV-SL0.5X
QV-SL1X
QV-HR1X
QV-HR2.5X
QV-SL2.5X
QV-5X
QV-10X
QV-HR10X
QV-25X
Turret lens mag. Monitor mag.
1X
15X
2X
30X
6X
90X
1X
30X
2X
60X
6X
180X
1X
75X
2X
150X
6X
450X
1X
150X
2X
300X
6X
900X
1X
300X
2X
600X
6X
1800X
1X
750X
2X
1500X
6X
4500X
View Field
12.54 x 9.4
6.27 x 4.7
2.09 x 1.56
6.27 x 4.7
3.13 x 2.35
1.04 x 0.78
2.5 x 1.88
1.25 x 0.94
0.41 x 0.31
1.25 x 0.94
0.62 x 0.47
0.2 x 0.15
0.62 x 0.47
0.31 x 0.23
0.1 x 0.07
0.25 x 0.18
0.12 x 0.09
0.04 x 0.03
Objective
Laser
Laser spot diameter
Repeatability
Laser safety
Working distance
30.5mm
52.5mm
40.6mm
QV-5X *1
Visible-light laser wavelength: 690 (nm)
3µm
σ=0.4µm or less
Class 1 laser product
*1: The QV-5X lens is supplied as standard for an LAF-equipped system.
Temperature Compensation Unit
(Factory Option)
40.6mm
60mm
This unit detects temperatures with the main body temperature sensors attached to each axis
and two sensors dedicated to a workpiece. The unit finally outputs data converted to
dimensions at 20˚C after calculating the expansion and contraction quantities of each main
body and workpiece.
It is also possible to output dimensions at a reference temperature of 23˚C used in electric and
electronics industry although 20˚C is generally assumed as the reference temperature at
measurement
33.5mm
30.5mm
20mm
13mm
The monitor magnificatio and fiel of view values are for the PRO machine.
QV-10X, QV-25X: Depending on the workpiece the illumination may be insufficien at a turret
lens magnificatio of 2X and 6X.
QV-25X:
The PRL illumination is restricted in its usable position.
Calibration glass chart &
Compensation glass chart
RGB color Filtering unit
The color filterin function can be added to the vertical reflecte illumination or programmable ring light in Quick Vision models that use a halogen light source. This function enhances the visibility of low-reflection
surfaces on colored workpieces, facilitating edge detection. This function
can also be retrofitte to a conventional Quick Vision. In addition, a yellow filte enables vision measurement in the yellow light region, which
provides high sensitivity
Calibration Glass Chart
This is a chart for calibration of CCD pixel
sizes and offsets between power turrets.
Compensation Glass Chart
This is a glass chart of "on-screen
compensation" for compensating on-screen
distortions an optical system has and "autofocus compensation" for reducing auto-focus
variations resulting from the difference in
pattern and texture of an object.
Red filter used
8
Coordinate Measuring Machines
Vision Measuring Systems
Form Measurement
Optical Measuring
Sensor Systems
Test Equipment and
Seismometers
Digital Scale and DRO Systems
Small Tool Instruments and
Data Management
Mitutoyo Corporation
Note: All information regarding our products, and in particular the illustrations, drawings, dimensional and performance data contained in this pamphlet, as well as other
technical data are to be regarded as approximate average values. We therefore reserve the right to make changes to the corresponding designs, dimensions and weights.
The stated standards, similar technical regulations, descriptions and illustrations of the products were valid at the time of printing. Only quotations submitted by ourselves
may be regarded as definitive.
20-1, Sakado 1-chome,
Takatsu-ku, Kawasaki-shi,
Kanagawa 213-8533, Japan
T +81 (0) 44 813-8230
F +81 (0) 44 813-8231
http://www.mitutoyo.co.jp
70.00 1002 (PA) AeBU, Printed in Japan
Export permission by the Japanese government may
be required for exporting our products according to
the Foreign Exchange and Foreign Trade Law. Please
consult our sales office near you before you export
our products or you offer technical information to a
nonresident.