High Speed 3D Surface Profiler

High Speed 3D Surface Profiler BW-H501
System Diagram
High-speed
camera
Support for a range of microscopes
Piezo system
CM Series
compact
microscope
MM Series
measurement
microscope
AZ Series
stereoscopic
microscope
LV Series
optical
microscope
Focuscope
image processor
made by Photron
BridgeElements X-Cycle Imager
image processing software
Specification
Optical microscope unit
Controller unit
Computer
Monitor
Software
Objective lens
Observation and
measurement range
Horizontal (H) μm
Vertical (V) μm
Working distance (mm)
Numerical aperture (NA)
Measurement optical system
Height measurement
LV100D-U etc.
Focuscope FCV100C
Dell P390 equivalent or higher
Dell TFT 20" monitor
BridgeElements
Two beam interference objective lens
(Standard configuration: 20x, other options)
2.5x
5x
10x
20x
3160
1580
790
395
3160
1580
790
395
10.3
9.3
7.4
4.7
0.075
0.13
0.3
0.4
White light interferometry
Effective resolving power*2: 0.1 μm
Display resolving power*3: NA
Repeating accuracy σ: 0.01 μm
50x*1
159
159
3.4
0.55
100x*1
79
79
2.0
0.7
Height measurement time
0.2 second/field
Height measurement range 40 μm
Correction
Surface correction,
4-dimensional curved surface correction
Digital enlargement
1/100 sub-pixel processing
Roughness measurement
2-dimensional roughness, 3-dimensional roughness
Profile display
Cursor measurement of distance between two points,
cursor measurement of height between two cursor points
Output
Output of processed images and roughness indices to
an Excel file
Automatic processing
Automatic processing of multiple height images
Three dimensional display Direct X display
Height calibration
Made by VLSI Standard Inc., standard step sample
(optional part)
*1: Requires a high-brightness illuminator *2: Smallest observable height difference *3: Height data cannot be given because it uses floating point (32-bit) numbers
Option Parts
High-brightness illuminator
Active vibration isolation table
Electrostatic adsorption plate
MAX-F310 made by Asahi Spectra Co., Ltd., 300 W xenon lamp, lamp service life: 1,000 hours
TS-150 made by Herz Co., Ltd., bench dimensions: 400 mm x 450 mm
BW-H101-2010T made by Astron Co., Ltd., adsorption area: 200 mm x 100 mm
Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. October 2008 ©2008 NIKON CORPORATION
The products detailed in the brochure are controlled by the Japanese Foreign Exchange and Foreign Trade Law and the International Export Control Regime. If there is a possibility that they may be utilized
for the development of weapons of mass destruction, etc., they shall not be exported without authorization from the government.
NIKON CORPORATION
6-3, Nishiohi 1-chome, Shinagawa-ku,
Tokyo 140-8601, Japan
phone: +81-3-3773-9026 fax: +81-3-3773-9062
http://nikon.com/products/instruments/index.htm
NIKON INSTRUMENTS INC.
1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.
phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A. only)
fax: +1-631-547-0306
http://www.nikoninstruments.com/
NIKON INSTRUMENTS EUROPE B.V.
Laan van Kronenburg 2, 1183 AS, Amstelveen, The Netherlands
phone: +31-20-44-96-222 fax: +31-20-44-96-298
http://www.nikoninstruments.eu/
NIKON INSTRUMENTS (SHANGHAI) CO., LTD.
CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030
(Beijing branch) phone: +86-10-5869-2255 fax: +86-10-5869-2277
(Guangzhou branch) phone: +86-20-3882-0552 fax: +86-20-3882-0580
Printed in Japan (0810-05) Am/M
NIKON SINGAPORE PTE LTD.
SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668
NIKON MALAYSIA SDN. BHD.
MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387
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KOREA phone: +82-2-2186-8410 fax: +82-2-555-4415
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CANADA phone: +1-905-625-9910 fax: +1-905-625-0103
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FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33
NIKON GMBH
GERMANY phone: +49-211-9414-0 fax: +49-211-9414-322
NIKON INSTRUMENTS S.p.A.
ITALY phone: +39-55-3009601 fax: +39-55-300993
NIKON AG
SWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861
Code No. 2CE-KGWH-1
NIKON UK LTD.
UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584
NIKON GMBH AUSTRIA
AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40
NIKON BELUX
BELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45
High Speed
3D Surface Profiler
X-cycle leads the way to a new world of optical microscopy
Piezo actuator + High-speed camera = X-cycle high-speed image acquisition
Enables real-time
height observation
With the X-cycle method, an objective lens performs cyclical scans, while the optical images generated are captured by a highspeed camera. Height images are calculated at high speed and displayed in real time.
Real-time height image
High-speed display of height images at 5
frames per second. The heating stage allows
you to observe and analyze the deformation
process of film and gel samples in real time.
High-speed camera
Optical microscope
Z-axis cyclic scanning
using piezo force
Image capture at
900 frames per second
High precision
height measurement
High speed image processor
Achieves repeatable precision of 10 nm using
white light interferometry. With high precision
measurement exceeding that of earlier types,
it is now possible to analyze and evaluate the
surface roughness of objects.
Two beam interference objective lens + X-cycle = Fringe cycle high-precision height image capture
With the fringe cycle method, the coordinate value on the Z axis with the maximum local
focus measure is taken as the height of each pixel. Generating an interference fringe on
the surface of the object with a two beam interference objective lens generates a very
high focus measure, achieving effective height resolution of 100 nm and repeatable
precision of σ = 10 nm, delivering height image capture with high-precision.
Z axis
Optically diffusive surfaces
present no difficulty
1
2
1
Maximum
local
focus
point
2
3
3
1
Observation and analysis of optically diffusive
surfaces, a weakness of conventional optical
systems, presents no difficulty. The profiler can be
used to evaluate the surface of ceramic coated film
and diffuser plates.
Z axis
2
Metallic cutting work surface
Boundary region of the electrode/resin of a PC board
160 μm square measurement results using a 50x
objective lens. The single point toolbytes are
measured clearly.
Metal and plastic parts with a reflection
coefficient differing by around 100 times can
be measured simultaneously without difficulty.
BridgeElements Image Linking Software
BridgeElements Base
The main BridgeElements screen. Here you can run image input and
analysis modules, perform control, and save images. You can also
process a number of specified images automatically.
Y axis
X-Cycle Imager
Image Transformer
Correct height images captured with X-Cycle Imager, and display roughness indices and cross section profiles.
3
Load
Save
1 Image input modules 2 Image processing modules
3 Saved images: The images currently saved in BridgeElements.
You can perform a number of processes previously specified with the
pointer.
Surface correction
Set a specified location as a reference plane.
Arbitrary height difference measurement
Display the difference in height between two
points specified on a cross section profile.
4-dimensional curved surface correction
Curved surfaces at specified locations are treated
as planar, making it easy to detect minute heights
on curved surfaces.
Roughness index calculation
(Two and three dimensional)
Calculate and display the two dimensional
roughness index for a cross section profile based
on the specified standard length, as well as the
three dimensional roughness of the surface.
2 Enlargement
2
3
3 Analysis
1 Correction
4
1 Live image: Currently output real-time omnifocal image.
2 Omnifocal image: Displays a freeze-frame omnifocal image of the
currently displayed sample.
3 Live height image: Currently output real-time height image.
4 Height Image: Captures live height images and can display them with
pseudocolors.
* Image File Grabber is also available for capturing images in standard formats
such as BMP and JPEG.
3
Image processing Multiple windows can be open. You can easily compare the shapes of samples, change the measurement
conditions for comparison, and perform other operations.
modules
A height image input module unique to BW-H501. Height images for a
specified time undergo accumulative addition, and random noise
components are suppressed.
2
X axis
Maximum local focus point
Image input modules Load observed and saved images.
1
1
Output and display
at 5 frames per second
High-definition enlargement of a specified location
using sub-pixel processing.
3D Viewer
High-speed, high-definition three dimensional display. In addition to displaying
height in pseudocolor, you can paste specified color images.
Example: Surface roughness of the merge lip of a hard disk head
1 3D display of height image
2 3D display of height image after 4D curved surface correction
1
2