2007 Tutorial 2

Transcription

2007 Tutorial 2

TUTORIAL
ARCHIVE 2007
TUTORIAL 2
“AN OVERVIEW OF CRITICAL ISSUES IN IC
PACKAGING”
by
Charles Cohn – Senior Analyst, TechSearch
International
SEMICONDUCTOR PACKAGING has become increasingly critical as
the package becomes the limiting factor in integrated circuit (IC)
performance. This tutorial provides insight into the important
aspects of these critical packaging issues. Topics include an
overview of the IC packages used in volume production, trends
in IC packages such as body size, pin count, and package pitch.
Materials and test issues will also be addressed.
COPYRIGHT NOTICE
The papers in this publication comprise the proceedings of the 2007 BiTS Workshop. They reflect the
authors’ opinions and are reproduced as presented , without change. Their inclusion in this publication
does not constitute an endorsement by the BiTS Workshop, the sponsors, BiTS Workshop LLC, or the
authors.
There is NO copyright protection claimed by this publication or the authors. However, each presentation
is the work of the authors and their respective companies: as such, it is strongly suggested that any use
reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any
materials presented should be directed to the author/s or their companies.
All photographs in this archive are copyrighted by BiTS Workshop LLC. The BiTS logo and ‘Burn-in &
Test Socket Workshop’ are trademarks of BiTS Workshop LLC.
Tutorial 2
2007
Charles
Charles Cohn
Cohn
Senior
Senior Analyst
Analyst
March
March 11,
11, 2007
2007
TechSearch International, Inc.
www.techsearchinc.com
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© 2007 TechSearch International, Inc.
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•
Packaging of ICs is no longer the mundane process that took place at the
end of the chip supply chain. For most products, today’s packaging requires
high level coordination between silicon and package designers.
•
The proliferation of package technologies can be attributed to technical
(performance) and cost demands being placed on the package by the
device and system engineers.
•
The high performance, increased functionality and space-sensitive
applications have resulted in an increased rate of advanced IC package
solutions to satisfy the demand.
•
As a result of the extreme cost pressure that has been exerted on the
electronic industry, package solutions that offer the minimum level of
performance at the lowest cost will continue to be in demand.
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Package Technology Evolution
PoP
SiP
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Package Technology Evolution
1960 – 1985
1986 – 1995
1996 – 2000
CDIP, PDIP+
> 50 pkg types
SOIC, PLCC, QFP+
> 250
BGA, QFN, SiP+
> 1000
2001 – 2005
Modules, Cards, Stack
> 1500
Source: Amkor
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Board Level Packaging
Through Hole Mount Technology
Surface Mount Technology
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Prefabricated Metallized Ceramic Packages
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Prefabricated Ceramic/Plastic Packaging
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Postmolded Plastic Packaging
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Postmolded Plastic Packaging
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Typical QFP in a Postmolded Plastic Technology
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Driving Forces in Package Selection
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Product Application
Silicon Technology
Operating Frequencies
No. of Input/Output Requirements
Power Dissipation
Environmental Operating Conditions
Package Size
Board Packaging Density
Board Level Packaging Technology (Surface Mount/ThroughHole Mount)
Compatibility with Existing Handling Equipment
Time to Market
Cost Cost Cost Cost
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Next Generation IC Package Requirements
Smaller Package
High Density
Reduced Signal Line Length
High Performance
Package
High Thermal
Dissipation
Low Thermal Resistivity
Matched TCE Materials
Low Resist. Conductor Metal
Low Dielectric Constant, Dk & Low
Dissipation Factor, Df Materials
Improved Signal
Transmission
Lower Cross Talk Noise Design
Low Inductance
Matched Diff. Impedances
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Future Trends in IC Packages
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I/O count to increase
Lead/ball pitches will decrease
Packages will get thinner and lighter
IC pad pitches will get smaller
Area array pkgs. will grow in demand
Higher performance, multilayer packages will be in demand
Stacked die or modules such as system-in-package (SiP)
Demand for ICs without packages will grow
Package costs will decline
Faster time to market requirements
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IC Package Environments
•
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Severe Environment
Long Lifetime – Telecommunication
High Power Dissipation – Microprocessor
High Performance – High End Computer Systems
Automotive
Temperature
Mech. Shock
Driver Interior
-40°C to +85°C
Under Hood
-40°C to +125°C
On Engine
-40°C to +150°C
Exhaust & Combustion
-40°C to +200-600°C
During Ass’y (drop test)
3000 G’s
On the vehicle
50 – 5000 G’s
Mech. Vibration
15G, 100Hz to 2KHz
EM Impulses
Exposure to
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100 to 200 V/m
Common
Humidity, salt spray
In some applications
Fuel, oil, brake fluid
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PBGA Qualification Tests for High Performance
PACKAGE
PACKAGE
ASSEMBLY
ASSEMBLY
WIRE
WIREBOND
BONDSTRENGTH
STRENGTH
MIL-STD-883D,
MIL-STD-883D,MTD
MTD2011,
2011,Cond
CondDD
DIE
DIESHEAR
SHEARSTRENGTH
STRENGTH
MIL-STD-883D,
MIL-STD-883D,MTD
MTD2019
2019
PHYSICAL
PHYSICALDIMENSIONS
DIMENSIONS
MIL-STD-883D,
MIL-STD-883D,MTD
MTD2016
2016
ELEC. TEST
BURN-IN
BURN-INTEST
TEST
125ºC,
125ºC,24
24hrs.
hrs.Over
OverBias
Bias
(depending
on
application)
(depending on application)
FLAMMABILITY
FLAMMABILITY
UL
UL94-V-0,
94-V-0,OO22..INDEX
INDEX28%
28%MIN
MIN
CSAM TEST
MOISTURE
MOISTURE
PRECONDITIONING
PRECONDITIONING
33Reflows
Reflows(JEDEC
(JEDECLevel
Level2A)
2A)
TEMP.
TEMP. CYCLING
CYCLING(TC)
(TC)
MIL-STD-883D,
MIL-STD-883D,MTD
MTD1010,
1010,
Cond
B,
-55
to
+125ºC,
Cond B, -55 to +125ºC,1K
1KCy
Cy
ELEC. + CSAM
ELEC. TEST
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VISUAL INSP.
ELEC. TEST
SOLVENT
SOLVENTRESIST.
RESIST.
MIL-STD-883D,
MIL-STD-883D,MTD
MTD2015
2015
(ink
(inkonly)
only)
ELEC. TEST
VISUAL INSP.
COMPONENT
COMPONENTLEAD
LEADASS’Y
ASS’Y
SIMULATION
SIMULATIONSEQUENCE
SEQUENCE(CLASS)
(CLASS)
FLUX,
FLUX,33Reflows,
Reflows,CLEAN,
CLEAN,
(Target
(TargetJEDEC
JEDECLevel
Level2A)
2A)
ESD
ESD(HBM
(HBM&
&CDM)
CDM)
MIL-STD-883D,
MIL-STD-883D,MTD
MTD3015.7
3015.7
ELEC. TEST
VISUAL INSPEC.
ELEC. TEST
VISUAL INSPEC.
ELEC. TEST
CSAM TEST
SOLDER
SOLDERBALL
BALL
INTEGRITY
INTEGRITY
TEMP.
TEMP. HUM.
HUM.
BIAS
BIAS(THB)
(THB)
85ºC,
85%
85ºC, 85%RH,
RH,
Biased,
Biased,1000
1000hrs
hrs
..
(Alternate
(Alternateto
toTHB)
THB)
HAST
HAST
130ºC,
85%
RH,
130ºC, 85% RH,
Biased,
Biased,96
96hrs.
hrs.
ELEC. TEST
Unbiased
UnbiasedHAST
HAST
130ºC,
130ºC,85%
85%RH,
RH,
96
96//168
168hrs.
hrs.
(Alt.
(Alt.to
toHAST)
HAST)
STEAM
STEAMBOMB
BOMB
121ºC,
100%
121ºC, 100%RH,
RH,22
Atm
Atm168
168hrs
hrs(u/b)
(u/b)
LATCH
LATCHUP
UP(LU)
(LU)
JEDEC
JEDECSTD
STD##17
17
ELEC. TEST
HIGH
HIGHTEMP.
TEMP.
OPER.
OPER.BIAS
BIAS(HTOB)
(HTOB)
MIL-STD-883,
MIL-STD-883,MTD
MTD1005
1005
Ta=125ºC,
Tj<150ºC,
Ta=125ºC, Tj<150ºC,
Over
OverBias
BiasVolt.,
Volt.,1000
1000hrs
hrs
ELEC. TEST
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BGAs
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BGA Types (by construction)
– PBGA
– TBGA
– CBGA/CCGA
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BGA Applications
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–
–
–
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Personal Computers (largest volume)
Game Machines
Workstation/Servers
Network Systems
Telecommunications
Military
Automotive
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PBGA Construction
Ag-Filled Die Attach
Silicon Die
Au Bond Wires
Thermal and
Ground Vias
BT/Glass PCB
0.80, 0.90
or 1.17 mm
Stand-Off
(Variable)
FR-4/Glass PCB
Silica-Filled
Epoxy Overmold
(or Glob-Top)
0.36, 0.56 or
0.60 mm
1.0, 1.27 or
1.50 mm
Pitch
Routing Vias
Solder Pads
62Sn/36Pb/2Ag or 63Sn/37Pb
or Pb-free (SAC alloy - 95.5Sn/4.0Ag/0.5Cu)
Solder Ball
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CBGA Construction
* Aluminum Lid
(Optional)
97Pb/3Sn C4 Joint
Thermal Paste
(Optional)
Silicon Die
Underfill
(Optional)
* Silicone Seal
Alumina
(Al2O3)
Ceramic
Substrate
10Sn/90Pb
Solder Balls
0.035” Solder Ball
1.0 or 1.27 mm
Pitch
63Sn/37Pb or Pb-free Solder
Ball Attach
* Hermetic Lid and Seal Available
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CBGA Solder Interconnects and Attachments
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CBGA Construction
Typical Ceramic Ball Grid Array
(624 Pin, 32 mm Body, 1.27 mm Pitch, 25x25 Array Shown)
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IBM’s High Pin Count CCGA
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IBM's 2,577 CCGA with 1.0mm pitch
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TBGA with Wire Bond
1 Metal Version
Solder
Mask
Liquid
Encapsulant
Die Mounted Directly into
Cavity of Heat Spreader
Solder Balls
Signal/Power
Bonds
Flex Tape Substrate
Copper Heat
Spreader
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PC High Performance Packaging Trends
•
•
PCs represent increased performance, lower prices
Personal computers were volume driver for IC packages in 1990s,
still driver for BGAs
– Ball grid arrays (i.e., chip sets)
– Flip chip (all CPUs for PCs now flip chip)
– Movement from ceramic to laminate technology
•
Major thermal issues for high-performance CPU packaging
– TIM1 materials currently include indium solder
– Critical need for development of improved thermal interface materials
(TIM)
•
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Integrated circuit I/O counts continue to grow
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Workstation/Servers, Network Systems, Telecom
•
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Sun Microsystems
– Highest pin count flip chip packages (728, 784, 1,012, 1,089, 1,155,
1,280, 1,677, 1,848 balls)
– 1,848-ball package with 42.5mm x 42.5mm body and 1.0mm ball pitch
in production
– SPARC processors still packaged in a ceramic LGA
Cisco Systems
– Ceramic CCGAs up to 1,657 I/O CCGA with flip chip inside
– Increasing use of laminate substrate (2,577-ball HyperBGA with a
52.5mm x 52.5mm body size in production)
Motorola Network Processor
– Packaged in a 480-ball TBGA with 37.5x37.5mm body size, 1.27mm
ball pitch
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PowerPC for Military Applications
from White Electronic Design
FC on Board
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What’s a CSP
•
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Chip Scale Package or Chip Size Package?
•
EIAJ/JEDEC defines CSP as a package with an edge
dimension no more than 1.2 times that of the die inside
Chip size – packages that have the same area as the chip
Package Area
Chip scale package is defined as:
≤ 1 .2
Die Area
EIAJ = Electronics Industries Alliance Japan
JEDEC = Joint Electron Device Engineering Council
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Typical Cross Section of a Plastic CSP Pkg.
Molding Compound
0.45 mm
Die Attach Epoxy
0.70 mm
Die
0.88 mm
(0.50 mm pitch)
1.36 mm
(0.80 mm pitch)
0.36 mm
0.21 mm
VTCSP
CSP
Rigid BT Substrate
Solder Ball
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Typical Cross Section of a μBGA™
Metal Can
(Optional)
Die
Elastomeric Encapsulant
Elastomer
Cu/Au Bond Ribbon
PWB
Eutectic Solder Bump
Cu/Polyimide Film
Source: Tessera
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CSPs Worldwide
Source: TechSearch International, Inc.
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Pitch Trends for Mobile Phone IC Packages
•
•
Jisso Japan Council roadmap shows fine pitch trends for cell phone
packages
Requires fine pitch test sockets
(Fine Pitch BGA)
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Green Packaging Adoption Rates
Almost all mobile phones have IC packages with lead free solder balls
Estimated Adoption Rates by Packaging Subcontractors
Estimated Percent of
Units Shipped
in 2005
Percent of Units
Forecasted in 2006
Pb-free
20%–50%
50%–80%
Halogen-free Mold Compound
5%–40%
30%–60%
Halogen-free Laminate
Substrates
15%–40%
50%–75%
“Green” Packaging
Technology
Source: SEMI and TechSearch International, 2005 Global Semiconductor Packaging Materials Outlook (January 2006)
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Driver for CSP Growth
•
Mobile phones as volume driver
– More than a billion handsets expected to ship in 2007
– Mobile phones contain an average 15 CSPs, including wafer level
packages, stacked die packages, and SiP
– Mobile phones drive volumes for stacked die packages and system-inpackage (SiP)
•
Wafer level packaging demand driven by memory, IPDs, analog
devices, power devices, and others
– Applications range from diodes to DRAMs
– Mobile phones main application
– Potential for DRAM package in mobile phones
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Trends in Mobile Phones: Increased Integration
• New features are being incorporated in the phone
•
•
–
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–
–
Driven by market forces
–
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Technology convergence
New form factors
Smaller, thinner, lighter
Cheaper
Reduced time to market
Environmental
Challenges
–
–
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–
–
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WLAN
Bluetooth
FM Radio
MP3 Player
Camera
Cost
Density
Reliability
Technology selection
Co-design
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High Volume Production of CSPs
•
Lead frame-based packages:
Bumped Chip Carrier (BCCTM), MicroLeadframe MLF®, MLP, QFNs, and
Small Outline Non-lead Pkgs. (SONs)
•
Flex-based packages:
µBGA® from Tessera’s licensees, TI’s µStar BGA™ and other wire bond
on tape packages
•
Laminate-based packages:
ChipArrayTM(CABGA), Intel’s Very Thin Profile Fine Pitch BGA (VFBGA)
and Easy BGA, and other wire bond on laminates
•
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Stacked CSPs, Package-on-package (PoP), Package-in-package (PiP)
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Amkor’s MicroLead FrameTM Package
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Amkor’s MicroLead FrameTM Package
Cross-section
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Fujitsu’s Bump Chip Carrier (BCC++) Process Flow
Used for RF devices in wireless applications
Source: Fujitsu Microelectronics
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MicroStar BGA™ Package Structure
ENCAPSULANT
WIRE BOND
CHIP
DIE PASTE
Cu PATTERN
0.5mm dia / 0.8mm BALL PITCH
Sn/Pb : near eutectic
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VIA
CUSTOMER PWB
FLEX SUBSTRATE (POLYIMIDE,
TOPSIDE Cu ONLY)
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VFLGA package - MicroStar Junior ™
Wire bond
Chip
Encapsulation
0.75
0.05
Land Grid Array
0.50mm pitch
Land
Die bond
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Polyimide Tape substrate
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Sharp’s Dual Stage Wire Bonding
Source: Sharp.
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Sharp Development History and Packaging Roadmap
Source: Sharp.
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Intel’s Four-die Stacked Package
Source: Intel
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STATSChipPAC’s 4+1 Stacked Die Package
Source: STATSChipPAC
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Camera Module ＆ LCD Board
FBGA(L) 277pin
10x10x1.0t
P=0.50
Substrate 0.30ｔ
4layer(1+2+1)
FOMA
N900i
ROHM
QFN20pin
4.2x4.2x0.8t
FBGA(L) 111pin
10x11x1.4t
P=0.80
Substrate 0.15ｔ
2 layer
4 chips stacked
(3chips+1spacer)
SON 8pin
3x3x1.0t
P=0.65
0.250
0.030
Source: TPSS
(A Japan teardown Co.)
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Wafer Thinning Issues for Stacked Die
•
•
•
•
•
Typical wafer thinned by mechanical back grinding
– Thickness of 75 µm in production today
– New methods for wafer thinning in development
– Development work with thickness of 50 to 25 µm
Flip chip die must be thicker than wire bond die
Most wafers are 200 mm, some 300 mm in diameter
New developments in wafer tape
Challenges in dicing are mechanical, including:
– Handling
– Chipping
– Flaking
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Dicing Before Grinding Process
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New Dicing Technology
•
•
•
•
Laser cutting
–
–
–
–
–
–
–
–
–
–
Synova (water jet guided laser)
XSiL
Disco
Shibuya Kogyo
ALSI
ESI
EO Technics
NewWave
Panasonic
Singulase
Laser scribing followed by dicing blade (for low-K silicon technology)
– Advanced Dicing Technologies (ADT)
– Disco
Laser control break
– Hamamatsu Photonics
Plasma
– Panasonic
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System-in-Package
•
SiP is a functional system or subsystem assembled into a single
package
– Contains one or more die
– More than just memory die, contains logic
– Typically combined with other components such as passives, filters,
antennas, and/or mechanical parts
– Components are mounted together on a substrate to create a customized,
highly integrated product for a specific application
– Die may be stacked, but stacking is not required
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System-in-Package
•
•
•
SiPs may utilize a combination of advanced packaging including
–
–
–
–
–
Drivers for SiP
– Greater functionality in a smaller area is the driver for consumer and
portable products
– High performance is the main driver for computers, telecommunications,
and military/aerospace
– Some applications such as medical driven by both
– Applications, such as network systems, driven by the need to decrease
motherboard layer counts and complexity
Examples of SiP
–
–
–
–
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Bare die (wire bond or flip chip)
Wafer level packages
Pre-packaged die such as CSP
Stacked packages
Stacked die
Mobile phones
Consumer product such as camcorders and cameras
Military
High performance SiP applications such as computers and network
systems
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System-in-Package Applications
•
•
•
•
•
•
•
•
•
•
•
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Mobile phones
MP3 players
Digital still cameras
Digital camcorders
Personal digital assistants
Laptop computers
Mid-range consumer products
Automotive electronics
Medical electronics
Industrial applications
Defense electronics
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Why SiPs?
According to Renesas (A Mitsubishi/Hitachi Co.) Customer Survey
Source: Renesas Technology
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TI’s SiP
•
•
•
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TI’s processor and SDRAM stacked in package
TI’s digital baseband and SRAM stacked die package found
in Nokia’s 6225 CDMA phone
Package also found in Nokia’s N-Gage GSM platform
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Package-on-Package (PoP)
•
Individual packages are stacked on top of each other
– Separate package for logic
– Separate package for memory
•
•
At least 10 major OEMs in handset and digital still camera market
adopting PoP
Infrastructure developments were required
– Standardization of pin-out footprints for the top stacked package
– Required development of package stacking equipment (now 5
equipment suppliers offer PoP mounter)
– IC package subcontractor (some early examples)
– Board level assembly service provider does
stacking of packages (most cases) and 5
major EMS providers in production or
development
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Stacked Die vs. PoP – Trade-offs
Stacked Die
PoP
Prospects
• IDM (Independent Device Mfg.)
ownership
• Smaller body size and lower package
profile
Prospects
• OEM (Original Equipment Mfg.)
ownership
• Flexible memory sources, facilitate
memory capacity increases
• Tested at individual package level for
Known Good Device
Concerns
• KGD required for high product yield
• Single-sourced product
• New development needed to change a
device or handle die shrink
• Compound yield and multi test
Concerns
• Slightly larger / thicker Package
stack
• Co-design for bottom and top
packages
• Infrastructure for package stacking
Source: Amkor
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PoP Board Mounting Height
Now
1.6mm (no cavity substrate)
1.4mm (cavity substrate for either package)
Th
Th inn
Lo inn er s
we er ub
r b mo str
1.2mm (cavity substrate for both packages)
all ldi ate
he ng
ig
ht
Source: Amkor
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PoP Warpage Control
•
•
•
Varied by material set and size, thickness
Need to see the warpage of both top and bottom package
Warpage at reflow temperature is more important
Mold compound and die
attach material differences
Top Package
150
+: Crying
-: Smiling
resin A
resin B
Warpage (um)
150
100
Warpage (um)
100
Bottom Package
50
0
-50
-100
50
-150
0
25'C
260'C
25'C
-50
-100
-150
25'C
BITS3.07
183'C
260'C
183'C
25'C
Source: Amkor
March 11 - 14, 2007
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Intel’s Folded Stacked Configurations
Source: Intel
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59
59
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2007
Intel’s SiP in Motorola’s E680 Tri-band phone
•
•
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Folded flex technology has been adopted in Motorola’s
E680 Tri-band phone
Folded flex uses two-metal layer tape
March 11 - 14, 2007
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Package-in-Package (PiP)
•
•
•
•
•
BITS3.07
Two or more packages assembled together and overmolded so end
result is a single package that interconnects to the product board
Also called a stacked module package by Qualcomm
Typically more expensive than stacked die package, but allows for
flexibility in configuration of the memory
Allows memory to be fully tested before assembly
Done by IC package subcontractor such as STATSChipPAC or
Amkor
March 11 - 14, 2007
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Stacked Module Package (SMP)
Source: Qualcomm.
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62
62
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Internal Stacking Module (ISM)
Source: Qualcomm
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63
63
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SIP Engine Package Comparison
Note: QCT = Qualcomm CDMA Technologies,
where CDMA = Code Division Multiple Access
BITS3.07
Source: Qualcomm
March 11 - 14, 2007
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Medical Applications for SiP
•
•
•
Applications
– Pacemakers, defibrillators, and other implantable devices
– Portable defibrillators
– Wireless communications inside the implantable (Zarlink has RF
transceiver designed to link implantable to base station)
– X-ray detectors for nuclear medicine and ultrasound equipment
(Philips expected to use SiP, thin film with integrated passives)
– Smart pills (capsule endoscopy)
– Hearing aids
MSE System’s example
– MSE test module 11mm x 11mm x 1.5mm with 169 solder balls on a
0.8mm pitch
– Includes stacked die (ASIC processor/controller and SRAM)
– Substrate is a BT-resin, 4-layer
Zarlink Semiconductor’s example
–
–
–
–
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Based on technology developed from Telecom SiP
Mixed IC technology (SiGe, CMOS)
Provides better performance (shorter interconnect lengths)
Small size 1-inch x 1-inch SMT package
March 11 - 14, 2007
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SyChip’s SiP CSM
•
•
•
SyChip’s Module is A WLAN IEEE
802.11g Embedded Module
True Plug-and-Play
– Incorporates WiFi, VoIP, Bluetooth
– All software included so user does not
need RF design capability
Thin-Film-on-Silicon Targeted for
Mobile Phones
– Small footprint 11 x 9 x 0.9 mm
– Includes all components and software
– Flip chip devices mounted on
substrate with integrated passives
– Packaged in a chip scale module
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Freescale’s New RCP SiP Technology
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March 11 - 14, 2007
67
67
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68
68
Tutorial 2
2007
Typical Ring & Plate FCBGA Cross Section
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March 11 - 14, 2007
69
69
Tutorial 2
2007
Flip Chip Bump Family
High T solder
Low T solder
High T Solder to Laminate
C4 (high T), eutectic (low T)
Conductive adhesive bump
Polymer Flip Chip
ACF
Au bump
Conductive adhesive
Au Bump with ACF
Au Bump with ICA
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Solder Bump Flip Chip
•
•
•
•
•
•
Die size
I/O count
Minimum I/O pitch
Bump diameter
Bump height
Package height
up to 24 mm
1,000s
150 microns
<150 microns typical
100 microns typical
0.4 to 0.75 mm
Source: Amkor
Source: SyChip
Source: ASE
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IBM’s C4 (Controlled Collapse Chip Connection)
Evaporation Process
and print or dip
in PbSn
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72
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IBM BiCMOS Chip with 2,648 C4 Bumps
Source: IBM.
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March 11 - 14, 2007
73
73
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Electroplated Solder Bump Process
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Bumping Trends: Back to the Future
•
•
•
•
•
•
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Early IBM bump was copper ball
Early bumps were copper posts with solder
– Citizen Watch
– Automotive electronics
Widespread adoption of the high-Pb bump using evaporation
process (C4 bump)
– Licensed and put into production by Motorola, AMD
– Cross licensing agreement with Intel, but plating process used in
production
Industry moved to electroplated bumps for flip chip
– Intel
– TI
– IBM, Motorola/Freescale Semiconductor, AMD, TSMC
Some companies use printing, but plating favored for fine pitch
Copper pillar process being adopted by some companies
March 11 - 14, 2007
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Advanpack Solutions Pte Ltd.
•
•
Copper Pillar bump process
–
–
–
–
–
–
–
Incoming wafer/preclean
Sputter Ti, Cu
Photoresist (2 passes 35µm each for 70µm thickness)
Expose/develop photoresist
Plate copper, solder
Resist strip to form column
Etch and reflow
Pillar bump
– Copper post is 100µm pillar (Cu post <65µm ±10 µm, Solder cap
30-35µm ±15 µm)
– Less than 100µm pitch on pillar tip, eutectic solder or other on top
– Bump pitch 150 µm, 46µm min. space
– Promises better coplanarity, higher standoff, consistent flow under
die for underfill
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Chipworks Finds Intel’s Copper Pillar in Presler Processor
(Internal Code Processor)
Source: Chipworks.
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Citizen’s Watch Bump Structure
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78
78
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2007
Stud Bump Bonding (SBB)
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Source: Matsushita.
March 11 - 14, 2007
79
79
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2007
Gold Wafer Bumping (Process)
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Gold Bumped Devices
•
LCD drivers (main application)
– Chip on glass (COG)
– Chip on film (COF)
– Tape automated bonding (TAB)
•
•
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Medical devices
RFID tags
March 11 - 14, 2007
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81
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2007
Delphi’s on-engine module
FC on Board (17)
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82
82
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2007
Seagate HDD with Flip Chip
Source: Seagate
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March 11 - 14, 2007
83
83
Tutorial 2
2007
Intel’s Pentium IV Motherboard w/ PBGA Chipset
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March 11 - 14, 2007
84
84
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2007
Intel’s CPU for XBox Game Machine
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March 11 - 14, 2007
85
85
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2007
Xilinx VIRTEX-II
Field Programmable Gate Array – FCBGA Pkg.
BITS3.07
March 11 - 14, 2007
86
86
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2007
PMC-Sierra Flip Chip
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March 11 - 14, 2007
87
87
Tutorial 2
2007
Carsem’s FC on Leadframe (FCOL)
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88
88
Tutorial 2
2007
Sony’s PoP
Source: Sony
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March 11 - 14, 2007
89
89
Tutorial 2
2007
Solder Bump Pitch Trends
•
DSP
– TI was in production with 160µm bump pitch for three years
– Found not to need tight bump pitch, current designs 180 µm
– Finer pitch in future
•
ASICs
– Bump pitch of 200-180 µm in production today, moving to 150 µm in
the future
•
Network server processors
– Bump pitch of 180 µm moving to 150 µm
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Cu/Low-k Integration Issues
(Replacing the SiO2 with low-k dielectric and Cu metallization)
•
•
Industry issues with
copper/low-k silicon
technology
IMD Delamination
– Low-k is susceptible to
mechanical stress
– CTE mismatch between low- k
IMD (Inter-Metal Dielectric) and
metal stack
– Industry forgot about the
package
New package material sets
characterized for low-k silicon
assembly
– Mold compounds for QFP and
BGA
– New formulations of underfill
materials
– Improved substrate designs
BITS3.07
Underfill
Silicon
Source: LSI Logic
March 11 - 14, 2007
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91
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2007
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Wafer Level Packages
•
•
•
•
•
•
Die size
I/O count
Minimum I/O pitch
Bump diameter
Bump height
Package height
<5 mm
4 to 100
400 microns
250 to 500 microns
180 to 400 microns
0.5 to 1.2 mm
Source: Texas Instruments
Source: Samsung
Source: International Rectifier
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Wafer Level CSP Categories
Package Construction
Companies
Redistribution/Bump
ASE, Amkor/Unitive, Dallas
Semiconductor (Maxim), Hitachi,
FlipChip International, National
Semiconductor, PacTech,
Renesas, Seik o Epson, SPIL,
STMicroelectronics,
STATSChipPAC
Metal post/bump with epoxy resi n
Casio, Fujitsu/Shinko Electric,
Oki Elec tric, Fujikura
Encapsulated bond
FormFactor, Tessera
Encapsulated beam lea d
ShellCase (Xintec, Sanyo)
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Expansion of Wafer Level Packaging
•
Wafer level packaging of all types expanding
– Form factor driven
– Performance driven
•
Increased use in portable electronics applications
–
–
–
–
–
–
•
Watch modules
Personal digital assistants
Mobile phones
Consumer products such as digital cameras/camcorders
MiniDisk
Laptop computers
New service providers expanding capacity
– Almost two dozen companies (merchant and captive)
– Increasing number of devices
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March 11 - 14, 2007
95
95
Tutorial 2
2007
Bourns’ Products in Sony Ericsson Phone
Integrated
Passive Devices
in WLP
Source: Bourns
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96
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2007
Panasonic’s Mini SD Drive
WL-CSP(OKI)
47 pins
Top view
Source: TPSS
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Passive
Side view
March 11 - 14, 2007
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Nokia 702 Main Board
Main Board:56.3×104.15×0.90mmｔ
WLP
PHILIPS
Terminal to Receiver
4 Grand Terminal
For LCD
Backlight for Key Board
LED 4pcs
WLP
PHILIPS
WLP
Infineon
《Key Board》
Sub Board:36.8×53.3×0.70mmｔ
Source: TPSS
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Advantages of WLP
Conventional Packaging
Fab.
Fab.
Process
Die Level
Packaging
Board Level
Packaging
System
WFP
Source: Samsung
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Wafer Level
Packaging
(Fab.
Fab. + WFP)
Board Level
Packaging
System
March 11 - 14, 2007
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Advantages of WLP
Comparison of Typical Package Type
For the same size die, package size is quite different!!
<Lead Frame PKG(TSOP)>
Advantages
<BGA PKG(FBGA)>
<WFP>
Samsung’s Wafer Level Fabricated PKG.
9 Small form factor : Die size = Package size
9 Improvement of electrical performance :
• Shorter RDL length than Au wire
9 Process simplicity/Low cost :
• Simple assembly process
• Short TAT
• No substrate : Wiring/BGA on the die
Source: Samsung
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Disadvantages of WLP
Disadvantages
9 Large Die Difficulties
• Solder Joint Reliability
• Chip Crack during Die Handling
• Difficulties in Component Biz.
The larger the worse.
9 System Manufacturer (Customer) Friendliness/Preference:
• Customers should be more careful in handling WFP dies.
• Customers may invest new SMT equipments.
Source: Samsung
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P/Active™ Device Packaged in a CSP
from California Micro Devices (CAMD)
Source: CAMD.
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2007
Micro SMD (Surface Mount Device) Wafer Level Chip Scale Packages
Source: National Semiconductor.
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103
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International Rectifier’s FlipFET (Power MOSFET) WLP
Source: International Rectifier
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104
104
Tutorial 2
2007
Tessera’s ShellOP Wafer Level Chip Size Package
(Glass-silicon-glass sandwich structure)
Source: ShellCase.
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105
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Fujikura’s WLP
Source: Fujikura
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Casio Micronics WLP Process
Source: Casio Micronics
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2007
Fujitsu’s Super CSP Structure
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March 11 - 14, 2007
108
108
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2007
Littelfuse Diode Arrays for ESD Protection
Source: Littelfuse
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2007
DRAM Package Trends
•
•
Higher speed DRAM or modules that require higher density are
increasingly using FBGA
Graphics applications (higher speed) use FBGA package
– Better electrical performance
– Smaller size package so more memory on the module (number of
slots limited, so want more density per module)
•
Some DDR2 (Dynamic Data Rate) makers are using wafer level
packages
– Micron shipped a limited number of DDR2 SDRAM in wafer level
package (uses bumps instead of wires)
– Samsung announced DDR2 SDRAM in 60 I/O wafer level package
– TwinMOS ships Twister module (SO-DIMM) with WLP
•
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DDR3 expected to use WLP or flip chip on laminate substrate,
not wire bond
March 11 - 14, 2007
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WLP for DRAM
Future production of DDR3 is expected to use WLP.
WLP provides better electrical performance and
higher density on the module. Footprint changes with
die shrinks and test are concerns.
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TechSearch International, Inc.
(www.techsearchinc.com)
•
Founded in 1987 by E. Jan Vardaman and based in Austin, Texas
offering consulting services including:
– Semiconductor packaging and assembly trends
– Semiconductor packaging materials
– Market forecasts and technology licensing
BITS3.07
•
Research topics include flip chip, BGAs, CSPs (inc. stacked die
and WLP), SiP, 3D Integration with through silicon vias (TSV)
•
Analysts with mixture of materials science, chemistry, assembly
and process development, reliability, marketing, economic,
strategy, competitive analysis, and modeling backgrounds
•
Extensive contacts (>15,000) throughout North America, Europe,
Japan, China, Hong Kong, Taiwan, Korea, Singapore, Malaysia,
Thailand, and The Philippines
March 11 - 14, 2007
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2007 Tutorial 2

Transcription

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