NC Linear S_.indd
Transcription
NC Linear S_.indd
Digital Scale and DRO System NC Linear Scale Catalog No. E4189-539, 579 Exposed/sealed Type Linear Encoders for Numerical Motion/Position Control System Mitutoyo Linear Scales for Numerical Motion/ Position Control System The Linear Scales for the Numerical Motion Control System are high-accuracy linear measurement systems for a wide range of applications. These types of linear scales are designed to be integrated into precision machines and instruments including measuring machines and instruments, as well as machine tools, optics, data equipment, industrial robots, etc.. A wide variety of specifications are available, from the high-resolution type for ultra-precision positioning, to the long-scale type for control over a long distance. Select your linear scale according to the size, response speed, accuracy, or according to the specification of output signal, etc. that best suits your application. Two types of linear scales for the Numerical Motion Control System are available: the AT series have the high-accuracy glass scale and the detector head encased together in an aluminum casing for improved durability and resistance against vibration; the ultra-portable and lighter ST series have the scale and the detector head separately. Disk APPLICATIONS • Positioning dicing saw in semiconductor production process • Positioning IC tip for wire-bonding • Positioning the stage of microscope for observation of IC mask, measurement of pattern circuit, and quality control inspection • High-accuracy, full closed loop control of various machine tools • High-speed, high-accuracy installation of electronics in industrial robots • Improving seek-time of disk drive system Magnetic domain Recording track Optical head Motor Voice coil motor Linear scale Electronic beam Silicon wafer CCD camera XY table (linear scales built in) Workchamber Monitor Vacuum pump Linear scales 2 Index Linear Scale selection guide ————————————————4 - 8 ST models - sealed type - —————————————————————— 4 - 5 AT models - exposed type - ————————————————————— 6 - 7 Quality information ———————————————————8 - 9 Ultra precision manufacture eleven meters underground —————————— Products with CE marking —————————————————————— Measurement uncertainty ——————————————————————— Traceability system —————————————————————————— 8 8 8 9 Photoelectric detecting principles ——————————— 10 - 11 Exposed type incremental Linear Scale————————— 12 - 17 ST34C —————————————————————————————12 - 13 ST322/323 ———————————————————————————14 - 15 ST422 —————————————————————————————16 - 17 Sealed type incremental Linear Scale ————————— 18 - 29 AT202 —————————————————————————————18 - 19 AT211 —————————————————————————————20 - 23 AT332 —————————————————————————————24 - 25 AT353 —————————————————————————————26 - 27 AT553 —————————————————————————————28 - 29 Pulse signal unit ———————————————————————————30 - 31 PSU-200 ————————————————————————————30 - 31 Technical Information ———————————————— 32 - 37 Signal output: ST models ———————————————————————32 Signal output: AT models ———————————————————————33 Structure and Features of the AT Series Sealed type Linear Scale ———————34 Effect of Temperature on the Scale (linear-expansion coefficient) ——————35 Handling Precautions for the Linear Scale Signal Cable———————————35 Divisional Principle of the Electrical Unit (PSU: Pulse Signal Unit) ———————35 Alarm Functions ———————————————————————————36 Test methods to Evaluate the Linear Scale ————————————————37 Explanation of Terms —————————————————————————37 Linear scale Check Sheet to Order ST34C ——————————————— 38 Check Sheet to Order AT211 ——————————————— 39 Workpiece Sliding table Cutting tool Lead frame IC chip Linear scale Linear scales 3 Base Linear Scale Selection Guide ST models –exposed type– Features 1 The ST Series linear scales come in three models to suit diverse applications, from the 0.02µm high-resolution type to the 5µm reading type for low-resolution measurements. 2 The maximum effective measurement length is 500mm (ST34C), 350mm (ST322/323) or 1000mm (ST422). 3 Since they have no protective aluminum frames, the ST Series linear scales are smaller and lighter than the assembly types (AT Series). These compact scales occupy a very small amount of space and are therefore ideal for use in lightweight precision equipment or high-speed machines. Sectional dimension 2.8±0.1 22 18 Accuracy Effective range L0 L0 ≤ 300mm/12" ±0.5µm L0 ≥ 350mm/14" ±1.0µm 10mm/.4" to 500mm/20" (Oversize up to 1000mm/40" are available by specially ordered.) ±3µm 50mm/2" to 350mm/14" ±3µm 50mm/2" to 350mm/14" L0 ≤ 300mm/12" ±1µm 350mm/14"≤L0 ≤ 500mm/20" ±2µm 600mm/24"≤L0 ±3µm 10mm/1.4" to 1000mm/40" 0.8±0.2 0.8±0.2 Up to 75mm (L0) 4.8 +0.2 0 1±0.2 7 22.5 19 13 ST322 • Incremental linear encoder • Glass scale • (8±1)x10-6/K, scale thermalexpansion coefficient 1.8 1±0.2 7 22.5 19 13 ST323 • Incremental linear encoder • Glass scale • (8±1)x10-6/K, scale thermalexpansion coefficient 1.8 10.5±0.2 7.5 1.8 24.8 Up to 350mm (L0) 6 13.5±0.2 7.5 24.8 ST422 • Incremental linear encoder • Glass scale • (8±1)x10-6/K, scale thermalexpansion coefficient 18 22 ST34C • Incremental linear encoder • Glass scale • (8±1)x10-6/K, scale thermalexpansion coefficient 5.4±0.2 Model 4 The advance lithography technology developed in our special laboratory constructed 11 meters below ground achieves an ideal combination of high accuracy, high resolution and wide glass-scale range. 5 In addition to square-wave pulse output that can be used as position-information feedback signal in general servo-controlled systems, the ST Series linear scales provide additional interfaces for connection with various control systems such as digital value output, which is ideal for inputting data to a computer. 4.8 4 System Configuration Reflective glass scale Connector plug Detector head with cable Feedback cable* (*not available from Mitutoyo) Interface box Motion control unit Scale retaining springs Standard components PSU200 Signal cable Feedback cable* (*not available from Mitutoyo) Motion control unit Resolution Min. edge separation Maximum response speed Reference page 0.02µm 0.05µm 0.1µm 4µm* 125ns to 1µs 125ns to 1µs 125ns to 1µs 150 to 15mm/s (5.9"/s to .59"/s) 360 to 45mm/s (14"/s to 1.7"/s) 720 to 90mm/s (28"/s to 3.5"/s) 1200mm/s (47"/s)** Page 14 - 15 250ns 250ns 600mm/s (23"/s) 600mm/s (23"/s) 1200mm/s (47"/s)** Page 16 - 17 Vpp = 2V 1µm 2µm 40µm* 250ns 250ns 1500mm/s (59"/s) 1500mm/s (59"/s) 3000mm/s (118"/s)** Page 16 - 17 Vpp = 2V 2.5µm 5µm 100µm* 0.2µm 0.5µm 1µm 5µm 40µm* 125ns to 1µs 125ns to 1µs 125ns to 1µs 125ns to 1µs 1500 to 150mm/s (59"/s to 5.9"/s) 3600 to 450mm/s (141"/s to 17.7"/s) 5000 to 900mm/s (196"/s to 35.4"/s) 5000 to 1800mm/s (196"/s to 70.8"/s) 5000mm/s (196"/s)** Page 18 - 19 Output signal RS422 A B Vpp = 2V A B RS422 A B A B RS422 A B A B RS422 A B Vpp = 2V A B *Sinusoidal signal pitch **Sinusoidal signal 5 Linear Scale Selection Guide AT models –sealed type– Features 1 The scale and detector parts are enclosed by an aluminum frame, which ensures excellent durability and resistance to dust and vibration. 2 Ideal for table position control in machine tools Model 3 Signal adjustment is not necessary, making installation easy. 4 The detector head offers flexibility in installation. 5 Solid construction protects against the harmful effects of magnetic force. Sectional dimension Accuracy Effective range L0 L0 ≤ 1500mm/60" (3+3L0/1000)µm L0 ≥ 1600mm/64" (5+5L0/1000)µm 100mm/.4" to 3000mm/120" 37.5 20 22 52 58 AT211 • Incremental linear encoder • Glass scale • (8±1)x10-6/K, scale thermal-expansion coefficient • Two choice of scale mounting (multi-point or scale-end) 80 AT202 • Incremental linear encoder • Glass scale • (8±1)x10-6/K, scale thermal-expansion coefficient A B High accuracy type* (2+2L0/1000)µm Standard type (3+3L0/1000)µm *up to L0 = 500mm/20" 100mm/4" to 1500mm/60" A: Double-end fixing type B: Multi-point fixing type 37.5 80 AT332 • Absolute linear encoder • Glass scale • (8±1)x10-6/K, scale thermal-expansion coefficient • 110m/min response speed with 0.5µm resolution • Direct connection with FANUC NC controller L0 ≤ 1500mm/60" (3+3L0/1000)µm L0 ≥ 1600mm/64" (5+5L0/1000)µm 100mm/4" to 3000mm/120" L0 ≤ 1500mm/60" (3+3L0/1000)µm L0 ≥ 1600mm/64" (5+5L0/1000)µm 100mm/4" to 3000mm/120" (3+3L0/1000)µm 100mm/4" to 1500mm/60" 37.5±0.2 23 62 AT553 • Absolute linear encoder • Glass scale • (8±1)x10-6/K, scale thermal-expansion coefficient • 120m/min response speed with 0.05µm resolution • Direct connection with FANUC NC controller 95.5 AT353 • Absolute linear encoder • Glass scale • (8±1)x10-6/K, scale thermal-expansion coefficient • 120m/min response speed with 0.05µm resolution • Direct connection with FANUC NC controller 6 System Configuration Scale unit Connector plug Detector head Feedback cable* (*not available from Mitutoyo) Head cable Standard components Motion control unit Resolution Min. edge separation Maximum response speed Reference page 0.5µm 1µm 250ns 500ns 72m/min (47"/s) 72m/min (47"/s) Page 20 - 21 0.1µm 0.2µm 0.5µm 1µm 2.5µm 5µm 125ns to 1µs 125ns to 1µs 125ns to 1µs 250ns to 1µs 500ns to 1µs 1µs 42.6 to 5.4m/min (27"/s to 3.5"/s) 84 to 10.8m/min (55"/s to 8"/s) 120 to 27m/min (78"/s to 17"/s) 120 to 54m/min (78"/s to 35"/s) 120m/min (78"/s) 120m/min (78"/s) Page 22 - 25 0.5µm 250ns 110m/min (72"/s) Page 26 - 27 FANAC serial interface 0.05µm —— 120m/min (78"/s) Page 28 - 29 FANAC serial interface 0.05µm —— 120m/min (70"/s) Page 30 -31 Output signal RS422 A B RS422 A B RS422 A B FANAC serial interface 7 Quality Information Ultra precision manufacture eleven meters underground Mitutoyo Kiyohara Plant, which is a factory exclusively for the production of Linear Scales and other precision scales, has a complete system for producing master scales to be used in finished products, such as CMM, vision measuring system, profile projectors, and measuring microscopes. To improve the accuracy of scales and quality control technologies, the integral laboratory of Kiyohara Plant was constructed eleven meters underground. It provides an optimum environment (cleanliness factor: 100) for the ultraprecision manufacture and evaluation of scales. Its unique design and construction isolate the laboratory from external vibrations and ensure minimal variations in temperature and humidity. Measurement accuracy The measurement accuracy of every exposed/sealed type Linear Scale is determined in the factory and is detailed on attached inspection certificate. Products with CE marking Each model of Mitutoyo Linear Scale bears the CE mark. It indicates that the product complies with the requirements drawn up by the European Community for safety, health, environment and customer protection. 8 Traceability system Mitutoyo, a manufacturer of precision measuring instruments, offers a wide variety of measuring machines and instruments that are in full compliance with the national standards of various countries. They are traceable to the national standards through the physical standards, which are calibrated by specified secondary standards owned by Mitutoyo. Our calibration laboratories are accredited to provide calibration services in three fields of length-measurement (length-measuring laser units, gauge blocks, and linear scales.) Traceability System of Length Standard Relationship between National Stanard Provision Scheme and Calibration Laboratory Accreditation Scheme under JCSS National Institute of Advanced Industrial Science & Technology (AIST) AIST 633nm Iodine Stabilized He-Ne Laser (National (Primary) Standard) JQA (Designated Calibration Organization) 633nm Iodine Stabilized He-Ne Laser (National (Sub-primary) Standard) Overseas NMls International comparisons Designated Calibration Laboratories once/3years Calibration with National Primary/Sub-Primary Standards and Issuing JCSS Calibration Certificate once/3years Mitutoyo Miyazaki Plant (Accredited Calibration Laboratory No.0030) 633nm Stabilized He-Ne Laser (Secondary Standard) (NITE) Accreditation Body Accredited Calibration Laboratories Assessment & Accreditation with Guide25 (ISO/IEC 17025), Proficiency Testing with Guide43 Accredited Calibration Laboratories once/3years Mitutoyo Tsukuba Cal. Center (Accredited Calibration Laboratory No.0031) 633nm Iodine Stabilized He-Ne Laser (Secondary Standard) once/2years Mitutoyo Utsunomiya Cal. Center (Accredited Calibration Laboratory No.0078) Standard Gauge Block (Secondary Standard) Calibration of User’s Reference Standards and Issuing JCSS Calibration Certificate User (Laboratories, plants, etc.) Iodine Absorption Stabilized HENe Laser as the standard for length measurement (at Tsukuba Calibration Center) Mitutoyo Kiyohara Plant (Accredited Calibration Laboratory No.0067) 633nm Stabilized He-Ne Laser (Secondary Standard) Interferometer as the standard for Linear Scale calibration (at Kiyohara Plant) Laser Length Measuring Machine (Working Standard) Standard Scale (Working Standard) Reference Gauge Block (Working Standard) Calibration of User’s Reference Standards and Issuing JCSS Calibration Certificate User (Laboratories, plants, etc.) Calibration Equipment (Working Standard) Gauge Block Laser Source Interferometer as the standard for Gauge Block calibration (at Miyazaki Plant) Standard Scale Measuring Instruments Accredited Calibration Laboratories Japan Singapore Taiwan USA UK The Netherlands AIST PSB NML NIST NPL NMi Germany Switzerland PTB OFMET Italy Brazil Malaysia Thailand Mexico IMGC IMMETRO SIRIM NIMT CENAM ILAC <MRA> JCSS JQA EA <MRA> APLAC <MRA> NITE Mitutoyo Miyazaki Plant Mitutoyo Tsukuba Cal.Center Mitutoyo Kiyohara Plant Mitutoyo Utsunomiya Cal.Center # 0030 # 0031 # 0067 # 0078 Mitutoyo Asia Pacific # LA19960102-C A2LA CNLA SAC RvA NKO UKAS DKD SAS DSM RBC SIT TISI EMA Mitutoyo Taiwan Mitutoyo America (IL) Mitutoyo America (MI) Mitutoyo (UK) Mitutoyo Neder land Mitutoyo Miyazaki Plant Mitutoyo Kawasaki Cal.Center Mitutoyo Mess geräte Mitutoyo Schweiz Mitutoyo Italiana Mitutoyo Sul Americana Mitutoyo (Malaysia) Mitutoyo Thailand Mitutoyo Mexicana # 0336 # 0750.01 # 1472.01 # 0332 # K 086 # K 107 # K 125 # DKDK-14501 # SCS 074 # 107 # 031 # SAMM 152 # Calibration 0016 # D-45 # : Accreditation No. AIST : JCSS: JQA: NITE: PSB: SAC: NML: CNLA: NIST: A2LA: NPL: UKAS: NMi: NKO: PTB: DKD: National Institute of Advanced Industrial Science and Technology Japan Calibration Service System Japan Quality Assurance Organization National Institute of Technology and Evaluation Singapore Productivity and Standards Board Singapore Accreditation Council National Measurement Laboratory Chinese National Laboratory Accreditation National Institute of Standards and Technology American Association for Laboratory Accreditation National Physical Laboratory United Kingdom Accreditation Service Nederlands Meetinstituut Nederlandse Kalibratie Organisatie Physikalisch-Technische Bundesanstalt Deutscher Kalibrierdienst 9 OFMET: SAS: IMGC: SIT: INMETRO: RBC: SIRIM: DSM: NIMT: TISI: CENAM: EMA: (ILAC): (APLAC): (EA): (MRA): Swiss Federal Office of Metrology Swiss Accreditation Service Istituto di Metrologia GUSTAVO COLONNETTI Servizio di Taratura in Italia Instituto Nacional de Metrologia Normalização e Qualidade Industrial Rede Brasileira de Calibração Standards and Industrial Research Institute of Malaysia Department of Standards Malaysia National Institute of Metrology Thailand Thailand Industrial Standard Institute Centro Nacional de Metrología Entidad Mexican de Acreditación, a.c. International Laboratory Accreditation Corperation Asia-Pacific Laboratory Accreditation Corperation European Accreditation Corperation Mutual Recognition Agreement Photoelectric detecting principles Incremental glass reflective linear encoder ST34C, ST322, ST323, ST422 Incremental glass transparent linear encoder AT202, AT211 The coherent light emitted from the LED (point light source) is gathered by the condenser lens and reflected on the grading face on the main scale. After passing through the index scale gratings, the light enters the photoelectric element to be converted to an electrical signal. At this time, the gratings on the main scale serve as diffraction gratings, so that a light-intensity distribution caused by Fresnel diffraction appears on the index scale. When the index scale moves relative to the main scale, this lightintensity distribution caused by diffraction also moves. The quantity of light received by the photoelectric element becomes the greatest when the luminous part of the light-intensity distribution aligns with the transmission part of the gratings on the index scale. The quantity of light becomes the smallest when the dark part aligns with the transmission gratings. Therefore, the light quantity changes in a sinusoidal manner when one scale moves continuously, where the light-intensity distribution created by the main scale is amplified twofold after passing through the gratings on the index scale. When the light-intensity distribution is amplified twofold, the period of change in light quantity becomes one-half the grating pitch on the main scale (4µm with the ST34C model, which has an 8µ m grating pitch). The electrical signal converted by the photoelectric element generates a sine wave having exactly the same pitch as this period (4µm). Four sets of light-receiving areas are provided in the vertical and horizontal directions to determine the direction of movement and achieve higher resolutions. Each of these light-receiving areas can output four-phase sine-wave signals having a phase difference of 90° (1/4 period). Each ST Series linear scale uses a preamplifier to convert these four-phase sine-wave signals to two-phase sine-wave signals having a phase difference of 90°, which are then converted to two-phase square waves via an internal electrical element to be finally output to the external device. (It is also possible to output two-phase sine waves.) The detector used in each AT Series linear scale consists of a light source (LED) and a photoelectric element, which face each other with the main scale and index scale between them. When the main scale moves relative to the index scale, the quantity of light that is transmitted through the gratings on the index scale varies with the same period as the grating pitch. This variation in light intensity is converted into electrical signals and output as two-phase sine waves with a phase difference of 90°. The counter for linear scale (AT115/102/111/112/181) divides these signals in order to determine the direction of the scale movement, then digitally displays the displacement of the scale. Each scale has absolute origin markings at a 50mm pitch for generation of pulse signal. The generated absolute origin signal is used to stop or start counting, thus making is easy to restore a machining reference or mechanical origin. Models AT202, AT211, AT353 and AT332 are each equipped with a dedicated preamplifier unit that converts two-phase sine waves to two-phase square waves and outputs the square-wave signals directly to the control unit. AT353 and AT332 are absolute scales in which the display is never reset to zero, even when the power is turned off. Main scale LED (light source) Index scale Condenser lens Reference point marking Index scale gratings Phototransistor (receiver) Main scale gratings Photoelectric element LED (light source) 10 Absolute glass transparent linear encoder AT332, AT353, AT553 • Absolute Linear Scales • Reinforced Alarm Functions The AT353, AT332 and AT553 linear scales are equipped with Mitutoyo's proprietary full-absolute detector. The absolute position patterns drawn on the main scale reflect both the capacitance and photoelectric detection principles, so the detector can read the pattern information in any position. This saves the effort of resetting the measurement origin over again each time the system is started or upon recovery from a sudden power failure. Even if the scale (detector) has been moved while the power supply was cut off, just turn on the power and the detector will read the absolute position on the scale. This design requires no backup power source, eliminating the need for cumbersome maintenance work such as the periodic replacement of batteries. The absolute linear scales have two built-in detectors--a capacitance detector and a photoelectric detector--to read the absolute patterns on the main scale. These detectors have separate alarm functions. In addition, the position data obtained by the two detectors are verified against each other, so malfunctions that cannot be detected by one detector's alarm circuit can be identified via the complementary functions of the two detectors. There are other functions to increase the reliability of alarm detection, such as a memory-check function and a watchdog timer to monitor the built-in processor against runaway action. If any of these functions should detect a scale error, an alarm signal will be output immediately to allow the user to identify the problem scale on the monitor of the CNC unit. Note) The alarm-signal monitor method varies, depending on the CNC unit to be connected. • Sufficient Environmental Resistance In addition to an advanced absolute detection function, these absolute linear scales are designed to offer excellent environmental resistance equal to or better than the conventional incremental scales. They also ensure sufficient resistance to external electromagnetic noise, which is often a concern in systems using capacitance detectors. Capacitance detector/circuit Position comparison Flow of position data Flow of alarm signal Photoelectric detector/circuit Alarm control/ judgment Memory Alarm (to the CNC unit) Watchdog timer Cycle COA Capacitance sensor ME (Division) Resolution 3768mm (512) 7.36mm 58.88mm (512) 0.115mm 0.92mm (512) Approx. 1.8µm 20µm (40) 0.05µm FI Photoelectric sensor OP 3768mm 11 Exposed type incremental Linear Scale with very fine resolution up to 0.02µm ST34C Features Technical data • 0.02µm/0.05µm/0.1µm resolution (selectable) • ±0.5µm/±1.0µm accuracy • Simultaneous sinusoidal signal (2 Vpp) and quadrature signal outputs • with scale reference mark • 1200mm/s max. traversing speed (for sinusoidal signal) • Compact design • 0.8±0.2mm wide scale/detector gap allowance • Alarm LED error indication with fault detection signal output for over speed and sinusoidal signal anomaly* errors *Vref≤0.5V or Vref≤2.9V for phase A/B Reflective glass scale Model Length standard ST34C Incremental linear encoder Reflective glas scale (8±1)x10-6/K thermal expansion coefficient 8µm scale grating pitch ±0.5µm (L0 ≤ 300mm/12") ±1.0µm (350mm/14" ≤ L0 ≤ 500mm/20") ±2µm (over 500mm/20") 10mm/.4", 25mm/1", 50mm/2", 75mm/3", 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14", 400mm/16", 450mm/18", 500mm/20" At every 50mm/2" intervals or one at midpoint of L0 (selectable) (less than 100mm/4": one at midpoint of L0) See the table below. See the table below. Quadrature signal: See the table below. Sinusoidal signal: 1200mm/s 0°C to 40°C +5V±5% DC/250mA max. Two 90° phase-shifted sinusoidal signals (signal period: 4µm) Two 90° phase-shifted quadrature signals Standard or reverse counting (selectable) 1m/40" or 0.5m/20" (selectable) Accuracy (at 20°C) Effective range* (L0) * Oversizes up to 1000mm/40" are special order. Scale reference point Resolution/electric division Minimum edge separation Maximum traversing speed Operating temperature Power supply/consumption Output signal Counting direction Head cable length Detecting head with cable Interface box Order No. of basic models • 0.1µm resolution 250ns edge separation 360mm/s max. traversing speed • ±0.5µm accuracy (±1.0µm: over 300mm/12") • Scale reference points at every 50mm interval of L0 (one at midpoint of L0: up to 75mm/3") • Standard counting direction • 1m/40" head cable Order No. 579-281 579-282 579-283 579-284 579-285 579-286 579-287 579-288 579-289 579-290 579-291 579-292 579-293 Effective range L0 10mm/.4" 25mm/1" 50mm/2" 75mm/3" 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" Quadrature signal Twelve choices of resolution/edge separation combination are available. Resolution (µm) 0.02 Electric division 40 Min. edge 125 separation (ns)*1 Max. traversing 150 speed (mm/s)*2 Model code A 0.02 40 250 0.02 0.02 0.05 40 40 80 500 1000 125 0.05 80 250 0.05 0.05 80 80 500 1000 0.1 200 125 0.1 200 250 0.1 200 500 0.1 200 1000 70 30 15 360 180 90 45 720 360 180 90 B C D E F G H J K L M *1 Assured within a range of -10% to +0%. *2 Approx. 90% of the designed value. Model No. for special order Choose your specification and complete the 16-digit model No. Example: ST34C-0010BS-K11S-A ST34C Effective range L0 eg. 0010 (for 10mm/.4") 0025 (for 25mm/1") 0500 (for 500mm/20") 1000 (for 1000mm/40") Scale reference point A: one at midpoint of L0 B: at every 50mm/2" interval of L0 Accuracy (at 20°C) S: (±0.5µm) M: (±1.0µm) Determined by the effective range L0 12 Head cable length A: 1m/40" B: 2m/80" Alarm function S: alarm signal output H: high impedance Output signal 1: sinusoidal & quadrature 2: quadrature & reset Counting direction 1: standard 2: reverse Resolution & max. traversing speed A - M: See the table above. Dimensions 4-R 0.01/100 G 0.01/100 2.8±0.1 Head cable (1m) R4 M5, through 4 (x 2pcs.) (5) 68±0.2 80 14±0.2 19 22 (9) 5 Mounting surface 8 14.5 4 M3, depth 6 (x 2pcs.) 11 ø2 (for adjustment) L0/2 10±0.2 2 42±0.2 50 ø22 (18.8) Scale reference point Center of detector A 13±0.2 9.5 32±0.2 R4 4 ø6 M3, depth 6 (x 2pcs.) 4 Unit: mm Center of detector 32±0.2 36 L0 L1 0.05 A 18 0.8±0.2 21 5 (L1-L0)/2 25 M3, depth 6 (x 2pcs.) (18.8) 21 5 22 2-ø4.5 0.8±0.2 +0.5 0 Spring B 25 35 1.5 0.4 5.4±0.2 Mounting surface 12 Spring A L2 18 0.05 A 4.8 +0.2 0 11 or more Center of detector 5.4±0.2 2 ø2 (for adjustment) 14±0.2 L2 0.4 22 (20) 11 14.5 M3, depth 6 (x 2pcs.) Scale reference points (every 50mm intervals) 4 (20) L1 L0 36 32±0.2 2 1.5 35 G: Machine guide way 13±0.2 9.5 32±0.1 Center of detector 2-ø4.5 0.01/100 G 0.01/100 A Effective range L0 10mm/.4" 25mm/1" 50mm/2" 75mm/3" 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" Overall length L1 30mm/1.18" 45mm/1.77" 70mm/2.76" 90mm/3.54" 140mm/5.51" 190mm/7.48" 240mm/9.45" 290mm/11.42" 340mm/13.39" 390mm/15.35" 440mm/17.32" 490mm/19.29" 540mm/21.26" Retaining interval L2 — — — — 50mm/1.97" 75mm/2.95" 100mm/3.94" 60mm/2.36" 75mm/2.95" 85mm/3.35" 100mm/3.94" 75mm/2.95" 80mm/3.15" 13 Mass 0.25kg/.55 lbs. 0.25kg/.55 lbs. 0.25kg/.55 lbs. 0.25kg/.55 lbs. 0.3kg/.66 lbs. 0.32kg/.70 lbs. 0.34kg/.75 lbs. 0.36kg/.79 lbs. 0.38kg/.84 lbs. 0.4kg/.88 lbs. 0.42kg/.92 lbs. 0.44kg/.97 lbs. 0.46kg/1.01 lbs. Number of scale retaining spring supplied — — — — Type A (1pc.), type B (2pcs.) Type A (1pc.), type B (2pcs.) Type A (1pc.), type B (2pcs.) Type A (1pc.), type B (4pcs.) Type A (1pc.), type B (4pcs.) Type A (1pc.), type B (4pcs.) Type A (1pc.), type B (4pcs.) Type A (1pc.), type B (6pcs.) Type A (1pc.), type B (6pcs.) Exposed type incremental Linear Scale with very thin/compact detector head ST322/323 Features Technical data: ST322 • 1µm/2µm (ST323: 2.5µm/5µm) resolution (switchable) • ±3µm accuracy • Simultaneous sinusoidal signal (2 Vpp) and quadrature signal outputs • with scale reference mark • 1500mm/s max. traversing speed (ST322: 600mm/s max.) • Ultra compact design • 1±0.2mm wide scale/detector gap allowance Model Length standard Accuracy (at 20°C) Effective range (L0) Scale reference point Resolution Electric division Minimum edge separation Maximum traversing speed Operating temperature Power supply/consumption Output signal Detecting head with cable Counting direction Head cable length ST322 Incremental linear encoder Reflective glass scale (8±1)x10-6/K thermal expansion coefficient 40µm scale grating pitch ±3µm 50mm/2", 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14" At every 50mm/2" intervals of L0 (L0=50mm/4" model: one at midpoint) 1µm or 2µm (switchable) 40 or 20 220ns 600mm/s (sinusoidal signal with -3dB cutoff) (50mm/s for detecting a scale reference point signal) 0°C to 40°C +5V±5% DC/250mA max. Two 90° phase-shifted sinusoidal signals (signal period: 40µm) Two 90° phase-shifted quadrature signals Standard/reverse counting (switchable) 1m/40" Interface box Reflective glass scale Technical data: ST323 Model Length standard Order No.: ST322 Order No. 579-601 579-602 579-603 579-604 579-605 579-606 579-607 Effective range L0 50mm/2" 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" Order No.: ST323 Order No. 579-611 579-612 579-613 579-614 579-615 579-616 579-617 Effective range L0 50mm/2" 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" Accuracy (at 20°C) Effective range (L0) Scale reference point Resolution Electric division Minimum edge separation Maximum traversing speed Operating temperature Power supply/consumption Output signal Counting direction Head cable length ST322 Incremental linear encoder Reflective glass scale (8±1)x10-6/K thermal expansion coefficient 100µm scale grating pitch ±3µm 50mm/2", 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14" At every 50mm/2" intervals of L0 (L0=50mm/4" model: one at midpoint) 2.5µm or 5µm (switchable) 40 or 20 220ns 1500mm/s (sinusoidal signal with -3dB cutoff) (50mm/s for detecting a scale reference point signal) 0°C to 40°C +5V±5% DC/250mA max. Two 90° phase-shifted sinusoidal signals (signal period: 50µm) Two 90° phase-shifted quadrature signals Standard/reverse counting (switchable) 1m/40" Detecting head traveling direction Counting Direction Standard counting (PA goes ahead) 1 8 PA PB Reverse counting (PB goes ahead) PA PB 14 (9.8) Unit: mm 30 7 7 Scale reference points (every 50mm intervals) 20 L1±1 // 0.05 B (ST323) A A 0.01 0.01 // 0.02 G // 0.05 G (ST322) (ST323) 80 6 72±0.2 4 Head cable Braided shield portion (100mm), must clamp and ground hear. 41±0.2 // 0.05 A (ST323) Detector L0 // 0.02 B // 0.03 A 4.1 8 0.5 1 10 0.01 // 0.05 G (ST323) Scale 10±1 1.8 B 2-ø2.2 25±0.1 12 0.01 // 0.02 G (ST322) 22.5 B 19 13 2.5 6.5 0.8±0.1 1±0.2 53 Dimensions 5 G: Machine guide way 10 ø4.5 Max. 36 Overall length L1 70mm/2.76" 120mm/4.72" 170mm/6.69" 220mm/8.66" 270mm/10.63" 320mm/12.60" 370mm/14.57" Mass 0.24kg/.53 lbs. 0.24kg/.53 lbs. 0.24kg/.53 lbs. 0.25kg/.55 lbs. 0.25kg/.55 lbs. 0.25kg/.55 lbs. 0.25kg/.55 lbs. 15 9.8 0.5 9.8 25.5 22.3 13.8 ø3.5 Effective range L0 50mm/2" 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 14.8 16 6 3.5x6 Exposed type incremental Linear Scale 5000mm/s maximum traversing speed ST422 Features Technical data • 0.2µm/0.5µm/1µm/2µm resolution (switchable) • ±1µm/±2µm/±3µm accuracy • Simultaneous sinusoidal signal (2 Vpp) and quadrature signal outputs • with scale reference mark • 5000mm/s max. traversing speed • Compact design • 1.2±0.2mm wide scale/detector gap allowance • Alarm LED error indication with fault detection signal output for over speed and sinusoidal singal anomaly* errors *Vref≤0.5V or Vref≤2.9V for phase A/B Model Length standard ST422 Incremental linear encoder Reflective glass scale (8±1)x10-6/K thermal expansion coefficient 40µm scale grating pitch ±1.0µm (L0 ≤ 300mm/12") ±2.0µm (350mm/14" ≤ L0 ≤ 500mm/20") ±3.0µm (600mm/24" ≤ L0 ≤ 1000mm/40") 10mm/.4", 25mm/1", 50mm/2", 75mm/3", 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24", 700mm/28", 800mm/32". 900mm/36", 1000mm/40" At every 50mm/2" intervals or one at midpoint of L0 (selectable) (less than 100mm/4": one at midpoint of L0) See the table below. See the table below. 5000mm/s (sinusoidal signal with -3dB cutoff) (Quadrature signal: see the table below.) 0°C to 40°C +5V±5% DC/200mA max. Two 90° phase-shifted sinusoidal signals (signal period: 40µm) Two 90° phase-shifted quadrature signals Standard or reverse counting (selectable) 1m/40" Accuracy (at 20°C) Effective range (L0) Scale reference point Resolution/electric division Minimum edge separation Maximum traversing speed Operating temperature Power supply/consumption Output signal Interface box Counting direction Head cable length Detecting head with cable Quadrature signal Reflective glass scale Order No. Order No. 579-631 579-632 579-633 579-634 579-635 579-636 579-637 579-638 579-639 579-640 579-641 579-642 579-643 579-644 579-645 579-646 579-647 579-648 Effective range L0 10mm/.4" 25mm/1" 50mm/2" 75mm/3" 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 800mm/32" 900mm/36" 1000mm/40" Resolution (µm) Electric division Edge separation (ns)*1 Max. traversing speed (mm/s)*2 5 8 125 5000 5 8 250 5000 5 8 500 3600 5 8 1000 1800 1 40 125 5000 1 40 250 3600 1 40 500 1800 1 40 1000 900 Resolution (µm) Electric division Edge separation (ns)*1 Max. traversing speed (mm/s)*2 0.5 80 125 3600 0.5 80 250 1800 0.5 80 500 900 0.5 80 1000 450 0.2 200 125 1500 0.2 200 250 700 0.2 200 500 300 0.2 200 1000 150 *1 Assured within a range of -10% to +0%. *2 Approx. 90% of the designed value. Counting Direction When the SW1-8 of interface box is OFF. PA PB Detecting head traveling direction When the SW1-8 of interface box is ON. PA PB 16 Unit: mm 4 Dimensions Cable clamp 0.4 16 6 ø3.5 Head cable (1m) 2-M2.5, through hole 10.5±0.2 68±0.2 80 5 7.5 4 R4 (5) R4 Head cable Braided shield portion (100mm), must clamp and ground hear. 50 3.5x6 42±0.2 10 1 A 12 3.5 (24.8) 10 20 Scale reference points (every 50mm intervals) 1.8 19 (1.2) Head cable connector 10±1 4.6 25 2-M2.5, through hole 7.5 ( 1.2 ) Head cable connector B 4.8 L0 25 (2) 4.6 4.7 (24.8) 5.5 30 A 4.6 Scale reference points (every 50mm intervals) 2-M2.5, through hole X 6 L1±1 3.5 1 30 (L1-L0)/2 0.7 5 13.5±0.2 4.6 20 22 5 B 25 35 2-ø4.5 0.4 1.2 L2 L2 L0 (L1-L0)/2 Scale retaining spring B 12 +0.5 0 5 21 10 G: Machine guide way Scale retaining spring A Scale retaining spring 25 35 Effective range L0 10mm/.4" 25mm/1" 50mm/2" 75mm/3" 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 800mm/32" 900mm/36" 1000mm/40" 2-ø4.5 0.4 Overall length L1 30mm/1.18" 45mm/1.77" 70mm/2.76" 90mm/3.54" 140mm/5.51" 190mm/7.48" 240mm/9.45" 290mm/11.42" 340mm/13.39" 390mm/15.35" 440mm/17.32" 490mm/19.29" 540mm/21.26" 640mm/25.20" 740mm/29.13" 840mm/33.07" 940mm/37.01" 1040mm/40.94" (2) 5 21 5.5 L1±1 4.7 1.2 Retaining interval L2 — — — — — — — — — — 100mm/3.94" 75mm/2.95" 80mm/3.15" 100mm/3.94" 85mm/3.35" 100mm/3.94" 90mm/3.54" 100mm/3.94" 17 Mass 175.4g/.39 lbs. 176.2g/.39 lbs. 177.5g/.39 lbs. 178.8g/.39 lbs. 180.1g/.40 lbs. 182.7g/.40 lbs. 185.3g/.41 lbs. 187.9g/.41 lbs. 190.5g/.42 lbs. 193.1g/.42 lbs. 288.8g/.64 lbs. 301.8g/.66 lbs. 314.8g/.69 lbs. 340.8g/.75 lbs. 366.8g/.81 lbs. 392.8g/.86 lbs. 418.8g/.92 lbs. 444.8g/.98 lbs. Number of scale retaining spring supplied — — — — — — — — — — Type A (1pc.), type B (4pcs.) Type A (1pc.), type B (6pcs.) Type A (1pc.), type B (6pcs.) Type A (1pc.), type B (6pcs.) Type A (1pc.), type B (8pcs.) Type A (1pc.), type B (8pcs.) Type A (1pc.), type B (10pcs.) Type A (1pc.), type B (10pcs.) Sealed type incremental Linear Scale Suitable for feedback system of NC machine tools AT202 Features Technical data • 0.5µm/1µm resolution (switchable) • (3+3L0/1000)µm/(5+5L0/1000)µm accuracy • Quadrature signal outputs (conforming to RS422A) • with scale reference mark • 72m/min max. traversing speed • Wide selection of effective range L0 from 100mm/4" to 3000mm/120" Scale unit Detecting head Signal cable Order No. Order No. 539-411 539-412 539-413 539-414 539-415 539-416 539-417 539-418 539-419 539-421 539-423 539-424 539-425 539-426 539-427 539-428 539-429 539-430 539-431 539-432 539-433 539-434 539-435 539-436 539-437 539-438 539-439 539-440 539-441 539-442 Effective range L0 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" 1600mm/64" 1700mm/68" 1800mm/72" 2000mm/80" 2200mm/88" 2400mm/96" 2500mm/100" 2600mm/104" 2800mm/112" 3000mm/120" Model Length standard Accuracy (at 20°C, L0: mm) Effective range (L0) Scale reference point Resolution/electric division Minimum edge separation Maximum traversing speed Vibration (IEC68-2-6) Shock (IEC68-2-27) Detecting head sliding force Dust/water protection level Operating temperature Power supply/consumption Output signal Counting direction Head cable length Effective range L0 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" AT202 Incremental linear encoder Transparent glass scale (8±1)x10-6/K thermal expansion coefficient 20µm scale grating pitch (3+3L0/1000)µm (L0 ≤ 1500mm/60") (5+5L0/1000)µm (L0 ≥ 1600mm/64") 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24", 700mm/28", 750mm/30", 800mm/32". 900mm/36", 1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52", 1400mm/56", 1500mm/60", 1600mm/64", 1700mm/68", 1800mm/72", 2000mm/80", 2200mm/88", 2400mm/96", 2500mm/100", 2600mm/104", 2800mm/112" At every 50mm/2" intervals of L0 0.5µm/40 or 1µm/20 250ns (0.5µm resolution) or 500ns (1µm resolution 72m/min (3m/min when detecting a scale ref ≤150m/s2 (55 to 2000Hz) ≤200m/s2 (1/2Sin, 11ms) 5N or less IP53 (scale unit) 0°C to 45°C +5V±5% DC/200mA max. Two 90° phase-shifted quadrature signals Standard or reverse counting (switchable) 5m/16.4feet Travel range L1 120mm/4.72" 170mm/6.69" 220mm/8.66" 270mm/10.63" 330mm/12.99" 380mm/14.96" 430mm/16.93" 480mm/18.90" 540mm/21.26" 650mm/25.59" 760mm/29.92" 810mm/31.89" 860mm/33.86" 960mm/37.80" 18 Mount interval L2 248mm/9.76" 298mm/11.73" 348mm/13.70" 398mm/15.67" 458mm/18.03" 508mm/20.00" 558mm/21.97" 608mm/23.94" 668mm/26.30" 778mm/30.63" 888mm/34.96" 938mm/36.93" 988mm/38.90" 1088mm/42.83" Overall length L3 268mm/10.55" 318mm/12.52" 368mm/14.49" 418mm/16.46" 478mm/18.82" 528mm/20.79" 578mm/22.76" 628mm/24.72" 688mm/27.09" 798mm/31.42" 908mm/35.75" 958mm/37.72" 1008mm/39.69" 1108mm/43.62" Mass 1.9kg/4.18 lbs. 2.0kg/4.40 lbs. 2.1kg/4.62 lbs. 2.2kg/4.84 lbs. 2.3kg/5.06 lbs. 2.3kg/5.06 lbs. 2.4kg/5.28 lbs. 2.5kg/5.50 lbs. 2.6kg/5.72 lbs. 2.9kg/6.38 lbs. 3.1kg/6.82 lbs. 3.2kg/7.04 lbs. 3.3kg/7.26 lbs. 3.6kg/7.92 lbs. Dimensions Unit: mm L3 10 37.5 20 10 L0 27 10 27 7 31±0.2 7 ø17 (47.4) 2-M6x1.0 through ø9 Countersunk, depth 4.5 (both sides) 60±0.2 90 42 G: Machine guide // 0.2 G (16) 29 7 11.6 12.6 8 // 0.1 A ø10.5 36 (41.2) 1.5±0.2 Spar mounting surface // 0.2 G 29 X 80 1.5±0.2 49.5 32 37 A 10 L2 L1 7 7 10 10 20 20 View from X direction Detecting head mounting surface 10 Spar mounting surface L4-1 L4-2 L4-3 L4-3 20 Bracket 6 8 Adjustable 28.5 Mounting method 1 Adjustable 6 2.2 Bracket 23.5 Mounting method 1 6 Detecting head mounting surface Effective range L0 Travel range L1 Mount interval L2 Overall length L3 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" 1600mm/64" 1700mm/68" 1800mm/72" 2000mm/80" 2200mm/88" 2400mm/96" 2500mm/100" 2600mm/104" 2800mm/112" 3000mm/120" 1060mm/41.73" 1160mm/45.67" 1260mm/49.61" 1360mm/53.54" 1460mm/57.48" 1560mm/61.42" 1690mm/66.54" 1790mm/70.47" 1890mm/74.41" 2100mm/82.68" 2300mm/90.55" 2500mm/98.43" 2600mm/102.36" 2700mm/106.30" 2900mm/114.17" 3100mm/122.05" 1188mm/46.77" 1288mm/50.71" 1388mm/54.65" 1488mm/58.58" 1588mm/62.52" 1688mm/66.46" 1818mm/71.57" 1918mm/75.51" 2018mm/79.45" 2228mm/87.72" 2428mm/95.59" 2628mm/103.46" 2728mm/107.40" 2828mm/111.34" 3028mm/119.21" 3228mm/127.09" 1208mm/47.56" 1308mm/51.50" 1408mm/55.43" 1508mm/59.37" 1608mm/63.31" 1708mm/67.24" 1838mm/72.36" 1938mm/76.30" 2038mm/80.24" 2248mm/88.50" 2448mm/96.38" 2648mm/104.25" 2748mm/108.19" 2848mm/112.13" 3048mm/120.00" 3248mm/127.87" 19 Posion L4-1 594mm/23.39" 644mm/25.35" 694mm/27.32" 744mm/29.29" 794mm/31.26" 844mm/33.23" — — 3100mm/122.05" — — 1314mm/51.73" 1364mm/53.70" 1414mm/55.67" 1514mm/59.61" 1614mm/63.54" Supporting bracket Interval L4-2 — — — — — — 610mm/24.02" 650mm/25.59" 670mm/26.38" 740mm/29.13" 800mm/31.50" 1300mm/51.18" 1340mm/52.76" 1400mm/55.12" 1500mm/59.06" 1600mm/62.99" Mass Interval L4-3 — — — — — — — — — — — 650mm/25.59" 670mm/26.38" 700mm/27.56" 750mm/29.53" 800mm/31.50" 4.0kg/8.80 lbs. 4.3kg/9.46 lbs. 4.5kg/9.90 lbs. 4.7kg/10.34 lbs. 4.9kg/10.78 lbs. 5.1kg/11.22 lbs. 5.4kg/11.88 lbs. 5.6kg/12.32 lbs. 5.8kg/12.76 lbs. 6.3kg/13.86 lbs. 6.7kg/14.74 lbs. 7.4kg/16.28 lbs. 7.6kg/16.72 lbs. 7.8kg/17.16 lbs. 8.2kg/18.04 lbs. 8.6kg/18.92 lbs. Sealed type incremental Linear Scale Suitable for feedback system of NC machine tools AT211 Features Technical data • 0.1µm/0.2µm/0.5µm/1µm/2.5µm/5µm resolution (selectable) • (2+2L0/1000)µm/(3+3L0/1000)µm accuracy • Two choices of mounting method for easy installation. Frame mounting: Ensures high resistance to vibration (200m/s2) and shock (250m/s2). End mounting: Can be installed on a nonmachined surface. • With scale reference mark • 120m/min max. traversing speed • Provides LED alarm indication for easy diagnostics. • Direct connection with a machine controller via a quadrature signal output (conforming to RS-422A). Scale unit Detecting head Model Length standard AT211 (double-end fixing) AT211 (multi-point fixing) Incremental linear encoder Transparent glass scale (8±1)x10-6/K thermal expansion coefficient 20µm scale grating pitch (3+3L0/1000)µm or (2+2L0/1000)µm (available up to L0: 500mm/20") 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24", 700mm/28", 750mm/30", 800mm/32". 900mm/36", 1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52", 1400mm/56", 1500mm/60" At every 50mm/2" intervals or one at midpoint/left end/right end of L0 (selectable) See the table below. See the table below. See the table below. Not assured ≤200m/s2 (55 to 2000Hz) Not assured ≤250m/s2 (1/2Sin, 11ms) 5N or less IP53 (scale unit) Available 0°C to 45°C +5V±5% DC/200mA max. Two 90° phase-shifted quadrature signals Standard or reverse counting (selectable) 0.3m/.98feet, 1m/3.2feet, 3m/9.8feet, 4m/13.1feet, 5m/16.4feet, 6m/19.6feet, 7m/22.9feet, 8m/26.2feet, 9m/29.5eet (selectable) Accuracy (at 20°C, L0: mm) Effective range (L0) Scale reference point Resolution/electric division Minimum edge separation Maximum traversing speed Vibration (IEC68-2-6) Detecting head sliding force Dust/water protection level Compressed air supply Operating temperature Power supply/consumption Output signal Counting direction Head cable length Signal cable Quadrature signal Resolution (µm) Electric division Minimum edge separation (ns)*1 Max. traversing speed (m/min)*2 5 4 1000 2.5 8 500 2.5 8 1000 1.0 20 250 1.0 20 333 1.0 20 500 1.0 20 1000 120 120 120 120 120 108 54 Resolution (µm) Electric division Minimum edge separation (ns)*1 Max. traversing speed (m/min)*2 0.5 40 125 0.5 40 250 0.5 40 333 0.5 40 500 0.5 40 1000 0.2 100 250 0.2 100 250 120 108 78 54 27 84 42.6 Resolution (µm) Electric division Minimum edge separation (ns)*1 Max. traversing speed (m/min)*2 0.2 100 333 0.2 100 500 0.2 100 1000 0.1 200 125 0.1 200 250 0.1 200 333 0.1 200 500 0.1 200 1000 31.8 21.6 10.8 42.6 21.6 15.6 10.8 5.4 *1 Assured within a range of -10% to +0%. *2 Approx. 90% of the designed value. 20 HOW TO ORDER AT211 • The AT211 linear scale can be customized with a choice of specifications. Please select the specifications for respective items that best suit your application. When placing an order, specify the model number followed by an 16-digit number consisting of the corresponding specification codes. • If you have no specific preference for a given item, please choose the standard specification. • Use the check sheet given below for the selection of specification codes. Unit: mm (Example) AT211-0500A1S-L1-AB Scale unit ALARM Scale alarm indicator (LED) Signal cable Head cable 56.4 50 Spec. you need Code Conduit-armed cable (3m) A Normal cable (3m) B Conduit-armed cable (5m) C Normal cable (5m) D Conduit-armed cable (7m) E Normal cable (7m) F Head cable At the right end 10 10 Spec. you need Standard (PA signal goes ahead) Reverse (PB signal goes ahead) MADE IN JAPAN Effective range end ø10.5 Normal cable (0.3m or 1m) ø9 34 30 Detector head Code 1 2 4 Mounting method Spec. you need Remarks Multi-point fixing Durable against vibration Double-end fixing Space-saving design Coil-covered cable (0.3m) Lead wires Counting direction AT211 30 ø6.5 At the midpoint of effective range At the left end Code A B C D E F G H J K 34 At every 50mm/2" intervals Code 1 2 3 4 Conduit-armed cable (3m, 5m, or 7m) Scale alarm LED Spec. you need Coil-covered cable (0.3m) Normal cable (0.3m) Normal cable (1m) Normal cable (3m) w/o connector Normal cable (4m) w/o connector Normal cable (5m) w/o connector Normal cable (6m) w/o connector Normal cable (7m) w/o connector Normal cable (8m) w/o connector Normal cable (9m) w/o connector Scale reference point Spec. you need At every 50mm intervals At the middle point of effective range At the left end of effective range At the right end of effective range 47.4 ø6.5 Code S H Normal cable (3m, 5m, or 7m) 56.4 50 Scale alarm LED 41.2 Accuracy (at 20°C)* Spec. you need Remarks ±0.5µm — ±1.0µm L0≤ 500mm only *Depending on the effective range 41.2 Signal cable ø6.5 47.4 45 L: 3m to 9m Color of lead Function 0V White Black 0V +5V Brown Red +5V Orange PA PA Yellow Green PB Blue PB Violet PZ Gray PZ Pink ALM AT211 MADE IN JAPAN Code A B Detecting headtraveling direction Double-end fixing Standard counting (PA goes ahead) PA PB Reverse counting (PB goes ahead) PA PB Resolution & maximum response speed Multi-point fixing Res. 0.1µm 0.2µm Effective range Spec. you need 100mm (4") 150mm (6") 200mm (8") 250mm (10") 300mm (12") 350mm (14") 400mm (16") 450mm (18") 500mm (20") 600mm (24") Code 0100 0150 0200 0250 0300 0350 0400 0450 0500 0600 Spec. you need 700mm (28") 750mm (30") 800mm (32") 900mm (36") 1000mm (40") 1100mm (44") 1200mm (48") 1300mm (52") 1400mm (56") 1500mm (60") Code 0700 0750 0800 0900 1000 1100 1200 1300 1400 1500 0.5µm 1.0µm 2.5µm 5.0µm Spec. you need Code Min.edge gap Max. response speed 710mm/s 125ns A 360mm/s 250ns B 260mm/s 333ns C 180mm/s 500ns D 90mm/s 1000ns E 1400mm/s 125ns F 710mm/s 250ns G 530mm/s 333ns H 360mm/s 500ns J 180mm/s 1000ns K 2000mm/s 125ns L 1800mm/s 250ns M 1300mm/s 333ns N 900mm/s 500ns P 450mm/s 1000ns Q 2000mm/s 250ns R 2000mm/s 333ns S 1800mm/s 500ns T 900mm/s 1000ns U 2000mm/s 500ns W 2000mm/s 1000ns X 2000mm/s 1000ns Y 21 Head cable without connector ALM signal Alarm circuit 1KΩ Equivalent to TC7S08 (TOSHIBA C-MOS) ALM HIGH LOW (When alarm occurs) Conduit-armed signal cable Coil-covered head cable Mounting Dimensions: Double-end fixing type Unit: mm L3 22 A L2-1 9 9 L4-1 1 0.2 G L4-3 5 0.1 G Middle support Scale unit mounting surface le) ø5 (ho (Fixed) 28±0.2 17.5 (Fixed) 17 35 52 21.5 10 (Fixed) 7 14 80±0.2 (3.150±.008) 94 (3.70) L0 Countersunk, depth 6.5 Signal cable 16 (56.4) (50) 2-M6x1.0 through ø9 countersunk, depth 4.5 (both sides) Coil spring (ø9) (50) (30) G: Machine guide way (34) (41.2) (ø10.5) (47.4) L1 Head cable (0.3m) 19 (.75) Flexible metallic tube 2-ø7 through ø14 countersunk, depth 6.5 (both sides) Scale alarm display LED L2-2 17 0.1 G 80±0.2 0.2 G Support C (Fixed) 17 Middle support 1 Effective range L0 Travel range L1 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" 120mm/4.72" 170mm/6.69" 220mm/8.66" 270mm/10.63" 330mm/12.99" 380mm/14.96" 430mm/16.93" 480mm/18.90" 540mm/21.26" 640mm/25.20" 740mm/29.13" 780mm/30.71" 840mm/33.07" 940mm/37.01" 1040mm/40.94" 1140mm/44.88" 1240mm/48.82" 1340mm/52.76" 1440mm/56.69" 1540mm/60.63" 5 15 11 2-M4x0.7, depth 5 1 0.1 A 1 19 1.5±0.2 Support B (Fixed) L4-2 Mount interval Mount interval Overall length L2-1 L2-2 L3 258mm/10.16" 308mm/12.13" 358mm/14.09" 408mm/16.06" 468mm/18.43" 518mm/20.39" 568mm/22.36" 618mm/24.33" 678mm/26.69" 778mm/30.63" 878mm/34.57" 918mm/36.14" 978mm/38.50" 1078mm/42.44" 1178mm/46.38" 1278mm/50.31" 1378mm/54.25" 1478mm/58.19" 1578mm/62.13" 1678mm/66.06" 242mm/9.53" 292mm/11.50" 342mm/13.46" 392mm/15.43" 452mm/17.80" 502mm/19.76" 552mm/21.73" 602mm/23.70" 662mm/26.06" 762mm/30.00" 862mm/33.94" 902mm/35.51" 962mm/37.87" 1062mm/41.81" 1162mm/45.75" 1262mm/49.69" 1362mm/53.62" 1462mm/57.56" 1562mm/61.50" 1662mm/65.43" 276mm/10.87" 326mm/12.83" 376mm/14.80" 426mm/16.77" 486mm/19.13" 536mm/21.10" 586mm/23.07" 636mm/25.04" 696mm/27.40" 796mm/31.34" 896mm/35.28" 936mm/36.85" 996mm/39.21" 1096mm/43.15" 1196mm/47.09" 1296mm/51.02" 1396mm/54.96" 1496mm/58.90" 1596mm/62.83" 1696mm/66.77" 22 Support A (Fixed) ø5 L4-3 (ho le) Scale unit mounting surface Supporting bracket Position L4-1 Position L4-2 Interval L4-3 — — — — — — — — — — — — — — — — — — — — — — — — 339mm/13.35" 331mm/13.03" — 389mm/15.31" 381mm/15.00" — 439mm/17.28" 431mm/16.97" — 459mm/18.07" 451mm/17.76" — 489mm/19.25" 481mm/18.94" — 539mm/21.22" 531mm/20.91" — 589mm/23.19" 581mm/22.87" — — — 430mm/16.93" — — 460mm/18.11" — — 490mm/19.29" — — 530mm/20.87" — — 560mm/22.05" Mass 1.4kg/3.08 lbs. 1.4kg/3.08 lbs. 1.5kg/3.30 lbs. 1.5kg/3.30 lbs. 1.6kg/3.52 lbs. 1.6kg/3.52 lbs. 1.7kg/3.74 lbs. 1.8kg/3.96 lbs. 1.9kg/4.18 lbs. 2.0kg/4.40 lbs. 2.1kg/4.62 lbs. 2.2kg/4.84 lbs. 2.2kg/4.84 lbs. 2.3kg/5.06 lbs. 2.4kg/5.28 lbs. 2.5kg/5.50 lbs. 2.6kg/5.72 lbs. 2.8kg/6.16 lbs. 2.9kg/6.38 lbs. 3.0kg/6.60 lbs. Normal signal cable Coil-covered head cable Mounting Dimensions: Multi-point fixing type 20 A 14.3 58 25 40 0.5±0.2 19 0.1 A 100±0.2 100±0.2 100±0.2 Air supply hole (M5) at both ends ø5 drill ø8.6 countersunk (both sides), depth 6.5 Fixing screw: Hex socket headed screw M4x20 or longer 80±0.2 94 L0 Flexible metallic tube (4.8) L2 5.5 0.1 G L2 Unit: mm 0.1 G L3 (4.8) 46±0.2 Scale unit mounting surface L1 Signal cable (19) (16) Head cable (0.3m) 2-M6x1.0 through ø9 countersunk, depth 4.5 (both sides) Coil spring (50) (30) (ø9) G: Machine guide way (34) (41.2) (ø10.5) (47.4) (56.4) (50) Scale alarm display LED 80±0.2 2-M4x0.7, depth 5 10 Scale unit mounting surface (When installing in a reversed direction) Scale unit mounting surface (When installing in a regular direction) Effective range L0 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" Travel range L1 120mm/4.72" 170mm/6.69" 220mm/8.66" 270mm/10.63" 330mm/12.99" 380mm/14.96" 430mm/16.93" 480mm/18.90" 540mm/21.26" 640mm/25.20" 740mm/29.13" 780mm/30.71" 840mm/33.07" 940mm/37.01" 1040mm/40.94" 1140mm/44.88" 1240mm/48.82" 1340mm/52.76" 1440mm/56.69" 1540mm/60.63" Mount interval L2 19.5mm/.77" 44.5mm/1.75" 19.5mm/.77" 44.5mm/1.75" 24.5mm/.96" 49.5mm/1.95" 29.5mm/1.16" 49.5mm/1.95" 29.5mm/1.16" 29.5mm/1.16" 29.5mm/1.16" 49.5mm/1.95" 29.5mm/1.16" 29.5mm/1.16" 29.5mm/1.16" 29.5mm/1.16" 29.5mm/1.16" 29.5mm/1.16" 29.5mm/1.16" 29.5mm/1.16" Overall length Number of L3 mounting holes 239mm/9.41" 3 289mm/11.38" 3 339mm/13.35" 4 389mm/15.31" 4 449mm/17.68" 5 499mm/19.65" 5 549mm/21.61" 6 599mm/23.58" 6 659mm/25.94" 7 759mm/29.88" 8 859mm/33.82" 9 899mm/35.39" 9 959mm/37.76" 10 1059mm/41.69" 11 1159mm/45.63" 12 1259mm/49.57" 13 1359mm/53.50" 14 1459mm/57.44" 15 1559mm/61.38" 16 1659mm/65.31" 17 23 Mass 1.4kg/3.08 lbs. 1.4kg/3.08 lbs. 1.5kg/3.30 lbs. 1.5kg/3.30 lbs. 1.6kg/3.52 lbs. 1.6kg/3.52 lbs. 1.7kg/3.74 lbs. 1.8kg/3.96 lbs. 1.9kg/4.18 lbs. 2.0kg/4.40 lbs. 2.1kg/4.62 lbs. 2.2kg/4.84 lbs. 2.3kg/5.65 lbs. 2.4kg/5.28 lbs. 2.5kg/5.50 lbs. 2.6kg/5.72 lbs. 2.7kg/5.94 lbs. 2.8kg/6.16 lbs. 3.0kg/6.60 lbs. 3.1kg/6.82 lbs. 0.1 G 0.03/100 Sealed type absolute Linear Scale Suitable for feedback system of high-speed NC machine tools AT332 Features Technical data • Hybrid real absolute glass scale with electrostatic capacitance/photoelectric technology • No origin point restoration required • 0.5µm resolution • (3+3L0/1000)µm/(5+5L0/1000)µm accuracy • Direct connection with FANUC NC controller • 109.8m/min max. traversing speed • Wide selection of effective range L0 from 100mm/4" to 3000mm/120" Scale unit Signal cable Detecting head Model Length standard Accuracy (at 20°C, L0: mm) Effective range (L0) Resolution Maximum traversing speed Vibration (55 to 2000Hz) Shock (1/2Sin, 11ms) Detecting head sliding force Dust/water protection level Operating temperature Power supply/consumption Output method Output interface Head cable length AT332 Capacitance/photoelectric composite absolute linear encoder Transparent glass scale (8±1)x10-6/K thermal expansion coefficient 20µm scale grating pitch (3+3L0/1000)µm (L0 ≤ 1500mm/60") (5+5L0/1000)µm (L0 ≥ 1600mm/64") 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24", 700mm/28", 750mm/30", 800mm/32". 900mm/36", 1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52", 1400mm/56", 1500mm/60", 1600mm/64", 1700mm/68", 1800mm/72", 2000mm/80", 2200mm/88", 2400mm/96", 2500mm/100", 2600mm/104", 2800mm/112", 3000mm/120" 0.5µm 109.8m/min ≤150m/s2 (IEC68-2-6) ≤200m/s2 (IEC68-2-27) 5N or less IP53 (scale unit) 0°C to 45°C +5V+5%/-3% DC/300mA max. Differential line driver EIA RS-422A, compatible with the FANUC high-speed serial interface 2m/6.5feet Order No. Order No. 539-501 539-502 539-503 539-504 539-505 539-506 539-507 539-508 539-509 539-511 539-513 539-514 539-515 539-516 539-517 539-518 539-519 539-520 539-521 539-522 539-523 539-524 539-525 539-526 539-527 539-528 539-529 539-530 539-531 539-532 Effective range L0 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" 1600mm/64" 1700mm/68" 1800mm/72" 2000mm/80" 2200mm/88" 2400mm/96" 2500mm/100" 2600mm/104" 2800mm/112" 3000mm/120" Output Connector Pin Assignment 8 1 9 Pin No. 1 2 3 4 5 15 Function A phase A phase B phase B phase Z phase I/O O O O O O • Output connector: RM21WTR-15P (Manufacturer: Hirose Denki) • Applicable plug (standard accessory): RM21WTPK-15S (Manufacturer: Hirose Denki) Pin No. 6 7 8 9 10 Function Z phase GND GND NC NC I/O O I I Scale Origin Position and Counting Direction Pin No. 11 12 13 14 15 Function SIN (check) REQ SIN (check) +5V +5V I/O I I I I I Scale origin position At the midpoint of effective range Counting direction The serial data will increase when the detector moves this direction. System Configuration Linear Scale Connector Connector FANUC NC controller Head cable (2m/40") Standard accessory 24 Feedback cable (max. 28m/91.8feet) Ground the shield to the earth bar. Air intake 10 27 7 11.6 60±0.2 26 Countersunk depth 6.5 90 G: Machine guide way // 0.2 G 7 10 10 20 20 View from X direction Detecting head mounting surface Middle support L4-2 L4-3 20 L4-3 Adjustable 28.5 6 6 Scale unit mounting surface 8 Middle support Mounting method A Scale unit mounting surface 8 12.6 ø8 Head cable (2m) 7 // 0.1 A ø18 36 // 0.2 G 54 ø31 1.5±0.2 29 X 10 Unit: mm 10 31±0.3 27 7 15±0.2 49.5 80 37 A L3 L2 L1 L0 10 37.5 20 11 (hex) Countersunk, depth 5 Dimensions L4-1 Adjustable 23.5 Mounting method B Middle support 6 10 2.2 Detecting head mounting surface Effective range L0 Travel range L1 Mount interval L2 Overall length L3 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" 1600mm/64" 1700mm/68" 1800mm/72" 2000mm/80" 2200mm/88" 2400mm/96" 2500mm/100" 2600mm/104" 2800mm/112" 3000mm/120" 120mm/4.72" 170mm/6.69" 220mm/8.66" 270mm/10.63" 330mm/12.99" 380mm/14.96" 430mm/16.93" 480mm/18.90" 540mm/21.26" 650mm/25.59" 760mm/29.92" 810mm/31.89" 860mm/33.86" 960mm/37.80" 1060mm/41.73" 1160mm/45.67" 1260mm/49.61" 1260mm/49.61" 1460mm/57.48" 1560mm/61.42" 1690mm/66.54" 1790mm/70.47" 1890mm/74.41" 2100mm/82.68" 2300mm/90.55" 2500mm/98.43" 2600mm/102.36" 2700mm/106.30" 2900mm/114.17" 3050mm/120.07" 248mm/9.76" 298mm/11.73" 348mm/13.70" 398mm/15.67" 458mm/18.03" 508mm/20.00" 558mm/21.97" 608mm/23.94" 668mm/26.30" 778mm/30.63" 888mm/34.96" 938mm/36.93" 988mm/38.90" 1088mm/42.83" 1188mm/46.77" 1288mm/50.71" 1388mm/54.65" 1488mm/58.58" 1588mm/62.52" 1688mm/66.46" 1818mm/71.57" 1918mm/75.51" 2018mm/79.45" 2228mm/87.72" 2428mm/95.59" 2628mm/103.46" 2728mm/107.40" 2828mm/111.34" 3028mm/119.21" 3228mm/127.09" 268mm/10.55" 318mm/12.52" 368mm/14.49" 418mm/16.46" 478mm/18.82" 528mm/20.79" 578mm/22.76" 628mm/24.72" 688mm/27.09" 798mm/31.42" 908mm/35.75" 958mm/37.72" 1008mm/39.69" 1108mm/43.62" 1208mm/47.56" 1308mm/51.50" 1408mm/55.43" 1508mm/59.37" 1608mm/63.31" 1708mm/67.24" 1838mm/72.36" 1938mm/76.30" 2038mm/80.24" 2248mm/88.50" 2448mm/96.38" 2648mm/104.25" 2748mm/108.19" 2848mm/112.13" 3048mm/120.00" 3248mm/127.87" Position L4-1 — — — — — — — — — — — — — — 594mm/23.39" 594mm/23.39" 694mm/27.32" 744mm/29.29" 794mm/31.26" 844mm/33.23" — — 740mm/29.13" — 1314mm/51.73" 1364mm/53.70" 1414mm/55.67" 1514mm/59.61" 1614mm/63.54" 25 Supporting bracket Interval L4-2 — — — — — — — — — — — — — — — — — — — — 610mm/24.02" 650mm/25.59" 670mm/26.38" — 800mm/31.50" 1300mm/51.18" 1340mm/52.76" 1400mm/55.12" 1500mm/59.06" 1600mm/62.99" Mass Interval L4-3 — — — — — — — — — — — — — 3.5kg/7.70 lbs. — — — — — — — — — 6.2kg/13.64 lbs. — 650mm/25.59" 670mm/26.38" 700mm/27.56" 750mm/29.53" 800mm/31.50" 1.7kg/3.74 lbs. 1.8kg/3.96 lbs. 1.9kg/4.18 lbs. 2.0kg/4.40 lbs. 2.1kg/4.62 lbs. 2.2kg/4.84 lbs. 2.3kg/5.06 lbs. 2.4kg/5.28 lbs. 2.5kg/5.50lbs. 2.8kg/6.38 lbs. 3.0kg/6.60 lbs. 3.1kg/6.82 lbs. 3.2kg/7.04 lbs. — 3.9kg/8.80 lbs. 4.2kg/9.24 lbs. 4.4kg/9.68 lbs. 4.6kg/10.12 lbs. 4.8kg/10.56 lbs. 5.0kg/11.00 lbs. 5.3kg/11.66 lbs. 5.5kg/12.10 lbs. 5.7kg/12.54 lbs. — 6.6kg/14.52 lbs. 7.3kg/16.06 lbs. 7.5kg/16.50 lbs. 7.7kg/16.94 lbs. 8.1kg/17.82 lbs. 8.5kg/18.70 lbs. Sealed type absolute Linear Scale with very fine resolution up to 0.05µm AT353 Features Technical data • Hybrid real absolute glass scale with electrostatic capacitance/photoelectric technology • No origin point restoration required • 0.05µm resolution • (3+3L0/1000)µm/(5+5L0/1000)µm accuracy • Direct connection with FANUC NC controller • 120m/min max. traversing speed • Wide selection of effective range L0 from 100mm/4" to 3000mm/120" Scale unit Detecting head Signal cable Model Length standard Accuracy (at 20°C, L0: mm) Effective range (L0) Resolution Maximum traversing speed Vibration (55 to 2000Hz) Shock (1/2Sin, 11ms) Detecting head sliding force Dust/water protection level Operating temperature Power supply/consumption Output signal Output interface Signal cable length AT353 Capacitance/photoelectric composite absolute linear encoder Transparent glass scale 8x10-6/K thermal expansion coefficient 20µm scale grating pitch (3+3L0/1000)µm (L0 ≤ 1500mm/60") (5+5L0/1000)µm (L0 ≥ 1600mm/64") 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24", 700mm/28", 750mm/30", 800mm/32". 900mm/36", 1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52", 1400mm/56", 1500mm/60", 1600mm/64", 1700mm/68", 1800mm/72", 2000mm/80", 2200mm/88", 2400mm/96", 2500mm/100", 2600mm/104", 2800mm/112", 3000mm/120" 0.05µm 120m/min ≤150m/s2 (IEC68-2-6) ≤200m/s2 (IEC68-2-27) 5N or less IP53 (scale unit) 0°C to 45°C +5V+5%/-3% DC/250mA max. Absolute position serial data EIA RS-422A, compatible with the FANUC high-speed serial interface 5m/16.4feet Order No. Order No. 539-541 539-542 539-543 539-544 539-545 539-546 539-547 539-548 539-549 539-551 539-553 539-554 539-555 539-556 539-557 539-558 539-559 539-560 539-561 539-562 539-563 539-564 539-565 539-566 539-567 539-568 539-569 539-570 539-571 539-572 Effective range L0 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" 1600mm/64" 1700mm/68" 1800mm/72" 2000mm/80" 2200mm/88" 2400mm/96" 2500mm/100" 2600mm/104" 2800mm/112" 3000mm/120" Output Connector Pin Assignment 8 1 9 Pin No. 1 2 3 4 5 15 Function 0V 0V +5V +5V SD • Output connector: RDAD-15P-LNA (Manufacturer: Hirose Denki) • Applicable plug (standard accessory): HDAB-15S (Manufacturer: Hirose Denki) Pin No. 6 7 8 9 10 Function _SD REQ _REQ A phase (test) B phase (test) Pin No. 11 12 13 14 15 Scale Origin Position and Counting Direction Function +5V NC 0V NC GND Scale origin position At the midpoint of effective range Counting direction The serial data will increase when the detector moves this direction. System Configuration Linear Scale Connector Connector FANUC NC controller Signal cable (5m/16.4feet) Standard accessory 26 Feedback cable (max. 28m/91.8feet) Ground the shield to the earth bar. Dimensions Unit: mm L3 L2-1 L2-2 (Adjustable) ø8 (Adjustable) (Fixed) 0.2 G 7 1.5±0.2 50.5 95.5 Detecting head mounting surface 2- 66±0.3 15 Scale unit mounting surface 60±0.2 15 C1 23 L2-2 80 7 7.5 Air intake (M5) (at both ends) 32.5 A 0.1 A Countersunk, depth 6.5 11.6 60±0.2 90 Head cable (5m) (Flexible metallic tube) L0 L1 0.2 G View from X direction G: Machine guide Detecting head mounting surface 2.5 11 (hex.) Countersunk, depth 5 7 12.6 8 (42) 41.2 36 (ø16) ø10.5 (46.3) 1.5±0.2 (0.5) 29 X Effective range L0 Travel range L1 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" 1600mm/64" 1700mm/68" 1800mm/72" 2000mm/80" 2200mm/88" 2400mm/96" 2500mm/100" 2600mm/104" 2800mm/112" 3000mm/120" 120mm/4.72" 170mm/6.69" 220mm/8.66" 270mm/10.63" 330mm/12.99" 380mm/14.96" 430mm/16.93" 480mm/18.90" 540mm/21.26" 650mm/25.59" 760mm/29.92" 810mm/31.89" 860mm/33.86" 960mm/37.80" 1160mm/45.67" 1160mm/45.67" 1260mm/49.61" 1360mm/53.54" 1460mm/57.48" 1560mm/61.42" 1690mm/66.54" 1790mm/70.47" 1890mm/74.41" 2100mm/82.68" 2300mm/90.55" 2500mm/98.43" 2600mm/102.36" 2700mm/106.30" 2900mm/114.17" 3050mm/120.07" Supporting bracket Position L2-1 Interval L2-2 65mm/2.55" 100mm/3.93" 65mm/2.55" 150mm/5.90" 65mm/2.55" 200mm/7.87" 65mm/2.55" 250mm/9.84" 220mm/8.66" 150mm/5.90" 245mm/9.64" 175mm/6.88" 270mm/10.62" 200mm/7.87" 295mm/11.61" 225mm/8.85" 325mm/12.79" 250mm/9.84" 380mm/14.96" 300mm/11.81" 435mm/17.12" 350mm/13.77" 460mm/18.11" 375mm/14.76" 485mm/19.09" 400mm/15.74" 535mm/21.06" 450mm/17.71" 585mm/23.03" 500mm/19.68" 635mm/25.00" 275mm/10.82" 685mm/26.96" 300mm/11.81" 735mm/28.93" 325mm/12.79" 785mm/30.90" 350mm/13.77" 835mm/32.87" 375mm/14.76" 900mm/35.43" 400mm/15.74" 950mm/37.40" 425mm/16.73" 1000mm/39.37" 450mm/17.71" 1105mm/43.50" 335mm/13.18" 1205mm/47.44" 370mm/14.56" 1305mm/51.37" 400mm/15.74" 1355mm/53.34" 315mm/12.40" 1405mm/55.31" 325mm/12.79" 1505mm/59.25" 350mm/13.77" 1605mm/63.18" 375mm/14.76" Scale unit mounting surface Overall length L3 No. of bracket Mass 230mm/9.05" 280mm/11.02" 330mm/12.99" 380mm/14.96" 440mm/17.32" 490mm/19.29" 540mm/21.25" 590mm/23.22" 650mm/25.59" 760mm/29.92" 870mm/34.25" 920mm/36.22" 970mm/38.18" 1070mm/42.12" 1170mm/46.06" 1270mm/50.00" 1370mm/53.93" 1470mm/57.87" 1570mm/61.81" 1670mm/65.74" 1800mm/70.86" 1900mm/74.80" 2000mm/78.74" 2210mm/87.00" 2410mm/94.88" 2610mm/102.75" 2710mm/106.69" 2810mm/110.62" 3010mm/118.50" 3210mm/126.37" 2 2 2 2 3 3 3 3 3 3 3 3 3 3 3 5 5 5 5 5 5 5 5 7 7 7 9 9 9 9 1.7kg/3.74 lbs. 1.8kg/3.96 lbs. 1.9kg/4.18 lbs. 2.0kg/4.40 lbs. 2.1kg/4.62 lbs. 2.2kg/4.84 lbs. 2.3kg/5.06 lbs. 2.4kg/5.28 lbs. 2.5kg/5.50lbs. 2.8kg/6.38 lbs. 3.0kg/6.60 lbs. 3.1kg/6.82 lbs. 3.2kg/7.04 lbs. 3.5kg/7.70 lbs. 3.9kg/8.80 lbs. 4.2kg/9.24 lbs. 4.4kg/9.68 lbs. 4.6kg/10.12 lbs. 4.8kg/10.56 lbs. 5.0kg/11.00 lbs. 5.3kg/11.66 lbs. 5.5kg/12.10 lbs. 5.7kg/12.54 lbs. 6.2kg/13.64 lbs. 6.6kg/14.52 lbs. 7.3kg/16.06 lbs. 7.5kg/16.50 lbs. 7.7kg/16.94 lbs. 8.1kg/17.82 lbs. 8.5kg/18.70 lbs. 27 Sealed type absolute Linear Scale Slim spar design with very fine resolution up to 0.05µm AT553 Features Technical data • Hybrid real absolute glass scale with electrostatic capacitance/photoelectric technology • No origin point restoration required • 0.05µm resolution • (3+3L0/1000)µm accuracy • High resistance to vibration (200m/s2) and shock (250m/s2) • Direct connection with FANUC NC controller • 120m/min max. traversing speed • Wide selection of effective range L0 from 100mm/4" to 1500mm/60" Scale unit Model Length standard AT553 Capacitance/photoelectric composite absolute linear encoder Transparent glass scale 8x10-6/K thermal expansion coefficient 20µm scale grating pitch (3+3L0/1000)µm 100mm/4", 150mm/6", 200mm/8", 250mm/10", 300mm/12", 350mm/14", 400mm/16", 450mm/18", 500mm/20", 600mm/24", 700mm/28", 750mm/30", 800mm/32". 900mm/36", 1000mm/40", 1100mm/44", 1200mm/48", 1300mm/52", 1400mm/56", 1500mm/60" 0.05µm 120m/min ≤150m/s2 (IEC68-2-6) ≤200m/s2 (IEC68-2-27) 5N or less IP53 (scale unit), IP64 (interface unit) 0°C to 45°C +5V+5%/-3% DC/270mA max. Absolute position serial data EIA RS-422A, compatible with the FANUC hig 5m/16.4feet Accuracy (at 20°C, L0: mm) Effective range (L0) Resolution Maximum traversing speed Vibration (55 to 2000Hz) Shock (1/2Sin, 11ms) Detecting head sliding force Dust/water protection level Operating temperature Power supply/consumption Output signal Output interface Head cable length Detecting head with signal cable Output Connector Pin Assignment 8 1 9 Order No. Order No. 539-761 539-762 539-763 539-764 539-765 539-766 539-767 539-768 539-769 539-771 539-773 539-774 539-775 539-776 539-777 539-778 539-779 539-780 539-781 539-782 Effective range L0 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" Pin No. 1 2 3 4 5 15 • Output connector: D-Sub 15P • Applicable plug (standard accessory): D-Sub 15S Function 0V 0V +5V +5V ST Pin No. 6 7 8 9 10 Function _ST REQ _REQ A phase (test) B phase (test) Scale Origin Position and Counting Direction Pin No. 11 12 13 14 15 Function +5V NC 0V NC GND Scale origin position At the midpoint of effective range Counting direction The serial data will increase when the detector moves this direction. System Configuration Linear Scale Interface unit Connector Connector FANUC NC controller Head cable (5m/16.4feet) Standard accessory 28 Signal cable (4m/13.1feet) Feedback cable (max. 28m/91.8feet) Ground the shield to the earth bar. Dimensions Unit: mm L3 Interval between mounting holes =100mm x (n-1) (4.8) 23 15.5 14 L2 8.5 5 1.5 62 43 45.2±0.2 30 4 n-ø (4.8) 1±0.2 66±0.2 22 L0 L1 Effective range L0 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350mm/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" 31±0.2 40 2-M6, through hole 13.4 20 4.5 4.5 (41.2) (16) 71±0.2 80 Travel range L1 120mm/4.72" 170mm/6.69" 220mm/8.66" 270mm/10.63" 320mm/12.59" 370mm/14.56" 420mm/16.53" 470mm/18.50" 520mm/20.47" 620mm/24.40" 720mm/28.34" 770mm/30.31" 820mm/32.28" 920mm/36.22" 1020mm/40.15" 1120mm/44.09" 1220mm/48.03" 1320mm/51.96" 1420mm/55.90" 1520mm/59.84" Mount interval L2 12.5mm/.49" 37.5mm/1.47" 12.5mm/.49" 37.5mm/1.75" 12.5mm/.49" 37.5mm/1.47" 12.5mm/.49" 37.5mm/1.47" 12.5mm/.49" 12.5mm/.49" 12.5mm/.49" 37.5mm/1.47" 12.5mm/.49" 12.5mm/.49" 12.5mm/.49" 12.5mm/.49" 12.5mm/.49" 12.5mm/.49" 12.5mm/.49" 12.5mm/.49" 2-M6x1.0 through ø9 Countersunk, depth 4.5 (both sides) ø6.5 ø6.5 (47) 92 84 Overall length L3 225mm/8.85" 275mm/10.82" 325mm/12.79" 375mm/14.76" 425mm/16.73" 475mm/18.70" 525mm/20.66" 575mm/22.63" 625mm/24.60" 725mm/28.54" 825mm/32.48" 875mm/34.44" 925mm/36.41" 925mm/36.41" 1125mm/44.29" 1225mm/48.22" 1325mm/52.16" 1425mm/56.10" 1525mm/60.03" 1625mm/63.97" 29 Number of mounting holes 3 3 4 4 5 5 6 6 7 8 9 9 10 11 12 13 14 15 16 17 Mass 1.19kg/2.61 lbs. 1.24kg/2.72 lbs. 1.29kg/2.83 lbs. 1.34kg/2.94 lbs. 1.39kg/3.05 lbs. 1.44kg/3.16 lbs. 1.49kg/3.27 lbs. 1.55kg/3.41 lbs. 1.60kg/3.52 lbs. 1.70kg/3.74 lbs. 1.80kg/3.96 lbs. 1.85kg/4.07 lbs. 1.90kg/4.18 lbs. 2.00kg/4.40 lbs. 2.11kg/4.64 lbs. 2.21kg/4.86 lbs. 2.31kg/5.08 lbs. 2.41kg/5.30 lbs. 2.51kg/5.52 lbs. 2.62kg/5.76 lbs. Pulse signal conversion interface PSU-200 Featrues Technical data • +5VDC external power supply. • Applicable with Linear Scales with the sinusoidal signal output. • Quadrature signal output (conforming to EIA standard RS422-A). • Alarm function for detecting broken wires or short circuits in the detector, over-speed and fluctuation errors in the input signal from the detector. • LED indications Origin signal input Alarm for power supply (voltage drop and noise) • DIP switch functions Direction switching Mode switching (high impedance/alarm signal output) Division selection (4/8/10/20/40/80/100/200) Min. edge interval selection (1000/500/250/125/62.5ns) Code No. Number of axes Number of deviation Functions Power supply Consumption Operating temperature Mass 539-005 1 axis 4, 8, 10, 20, 40, 80, 100 or 200 (switchable) Division setting: 4/8/10/20/40/80/100/200 Min. edge interval setting: 1000/500/250/125/62.5ns Direction switching LED for alarm indication: Broken wires and short circuits in the scale, abnormal signal, overspeed Alarm output mode switching: High impedance output/alarm signal output External alarm reset (photocoupler input) LED for origin detection LED for low-level power supply voltage warning 5VDC±5% on the power terminal 200mA (except the scale) 0°C to 40°C Approx. 620g (1.4 lbs) Applicable Linear Scales AT115 Vpp = 2V A B Input Connector AT102 • Connector: D-Sub 15S Pin No. 1, 2 3, 4 5 6 7 8 9 10 - 14 15 AT111 AT112 øA AT181 øB V ref = 2.5V V p-p = 2V See the leaflet of DRO System (E4072) for details. 30 Signal name 0V +5V ØA ØB Vref ØZ AL NC F.GND V p-p V ref GND 100 PA PB Phase B PB PZ 17 14 PZ 15 AL 7 0V 0V 0V 0V 1.2kΩ AL (anode) AL (cathode) Reset input R1 2kΩ *2 TTL F.G Line receiver AM26C32: T1 R1: 560Ω R2: 110Ω 4 5 6 2-ø5 +5V TLP521 R2 *1 +5V +5V R1 R1 *1 +5V +5V R1 R2 19 AL Line driver AM26C31: T1 R1 18 Phase Z +5V R2 1 2 Maximum response speed 3 +V 10 Deviation Min. edge interval*3 4 62.5ns 125ns 250ns 500ns 1ms 62.5ns 125ns 250ns 500ns 1ms 62.5ns 125ns 250ns 500ns 1ms 62.5ns 125ns 250ns 500ns 1ms 62.5ns 125ns 250ns 500ns 1ms 62.5ns 125ns 250ns 500ns 1ms 62.5ns 125ns 250ns 500ns 1ms 62.5ns 125ns 250ns 500ns 1ms Ry 11 20 +V Shield -V When using relay When using photocoupler OUTPUT connector Reset input: Design the connection so that the current of the alarm reset input is between 3mA and 10mA. An alarm can be reset by supplying a voltage of 5V to 12V between the anode and cathode terminals because a resistor (1.2kW) is provided inside the PSU200. If the voltage is grater than 12V, add an appropriate external resistor. 10 B Output Connector • Connector: MR20RM [Manufacturer: Honda Tsushin] • Applicable plug (standard accessory): MR20LF [Manufacturer: Honda Tsushin] V OH PA 8 RS422 A V OL 20 Pin No. 1, 2 3, 4 5 6 7 8 9 10 - 14 15 Signal name 0V +5V ØA ØB Vref ØZ AL NC F.GND 40 80 PA 100 PB PB td, d V OH = 2.5V (min.) V OL = 0.5V (max.) td: Edge interval d: Resolution 200 PZ Z-phase pulse width (20±10mm) PZ 190 Phase A R1 16 175 mounting hole pitch PA Control device Unit: mm 28 15 Connecting cable PSU 200 Dimensions 7.5 Arrangement of cable connection The Z-phase pulse width depends on the Linear Scale connected. (This is for AT100 series Linear Scale.) Input signal pitch*2 4µm 8µm 120m/min 240m/min 120m/min 240m/min 120m/min 240m/min 120m/min 240m/min 60m/min 120m/min 120m/min 240m/min 120m/min 240m/min 120m/min 240m/min 60m/min 120m/min 30m/min 60m/min 120m/min 240m/min 120m/min 240m/min 96m/min 192m/min 48m/min 96m/min 24m/min 48m/min 120m/min 240m/min 96m/min 192m/min 48m/min 96m/min 24m/min 48m/min 12m/min 24m/min 96m/min 192m/min 48m/min 96m/min 24m/min 48m/min 12m/min 24m/min 6m/min 12m/min 48m/min 96m/min 24m/min 48m/min 12m/min 24m/min 6m/min 12m/min 3m/min 6m/min 38.4m/min 76.8m/min 19.2m/min 38.4m/min 9.6m/min 19.2m/min 4.8m/min 9.6m/min 2.4m/min 4.8m/min 19.2m/min 38.4m/min 9.6m/min 19.2m/min 4.8m/min 9.6m/min 2.4m/min 4.8m/min 1.2m/min 2.4m/min 20µm 600m/min 600m/min 600m/min 600m/min 300m/min 600m/min 600m/min 600m/min 300m/min 150m/min 600m/min 600m/min 480m/min 240m/min 120m/min 600m/min 480m/min 240m/min 120m/min 60m/min 480m/min 240m/min 120m/min 60m/min 30m/min 240m/min 120m/min 60m/min 30m/min 15m/min 192m/min 96m/min 48m/min 24m/min 12m/min 96m/min 48m/min 24m/min 12m/min 6m/min * The maximum response speed may be limited depending on the response speed of the scale itself. 31 Technical Information Signal output: ST models Output Connector Pin Assignment Scale output signal • Output connector: • A/B-phase sinusoidal signal Wave cycle: ST34C ST322 ST323 ST422 D-Sub 15P 4µm 40µm 100µm 40µ Phase A 9 Vref.= 2.5V DC typically Vpp= 2V typically Vref.= 2.5V DC typically Vpp= 2V typically Pin No. 1 2 3 4 5* 6* 7 8 Phase difference: 90° typically Phase B 8 1 • A/B-phase quadrature signal (PA, PB, PA and PB) Function 0V (for grounding) 0V (for grounding) +5V (Vcc) +5V (Vcc) Phase A sine wave Phase B sine wave Vref. (Vcc/2) PZ quadrature 15 Pin No. 9 10 11 12 13 14 15 Function ALM (Alarm signal) PA quadrature PA quadrature PB quadrature PB quadrature PZ quadrature F.G. * ST34C with quadrature/reset signal output 5: Reset input AL (anode) 6: Reset input AL (cathode) PA PA +V TLP521 PB 1.2kΩ AL (anode) PB AL (cathode) λ 5 6 Ry -V When using relay Reset input ST34C ST322 ST323 ST422 +V When using photocoupler Reset input: Design the connection so that the current of the alarm reset input is between 3mA and 10mA. An alarm can be reset by supplying a voltage of 5V to 12V between the anode and cathode terminals because a resistor (1.2kΩ) is provided inside the scale. If the voltage is grater than 12V, add an appropriate external resistor. Min. edge separation (λ) Resolution (λ/4) 125ns - 1µs 0.05µm - 0.1µm 220ns 1µm - 2µm 220ns 2.5µm - 5µm 125ns - 1µs 0.2µm - 5µm • Applicable plug (standard accessory): • Scale reference signal (PZ and PZ) D-Sub 15S PZ PZ Arrangement of cable connection 200µm±100µm Note: Phase difference of PZ signal and PA signal (or PB signal) cannot have influence. I/F box Phase A Phase B • A/B-phase sinusoidal signal output circuit Phase A and phase B PA, PB, ALM R1 10 R1 12 AL Line driver AM26C31: T1 AL 9 - +5V 3 4 2 10Ω 0V Vref. µPC844 32 F.G 15 R1 2kΩ 1 + R1: 560Ω R2: 110Ω R2 +5V PA, PB, ALM R1 R1 8 14 R1 R2 13 PZ +5V R2 11 Phase Z µPC844 Applicable line receiver (equivalent to AM26LS32) • Reference signal (Vref) output circuit Vcc/2≈2.5V PB PZ 10Ω - + Vref. (Vcc/2≈2.5V) • A/B-phase quadrature signal output circuit PA PB Signal output circuits Control device Connecting cable PA Shield TTL Line receiver AM26C32: T1 Scale Reference Signal Output Point Counting Direction (ST34C*) ST34C: At every 50mm/2" intervals or one at midpoint of L0 (less than 100mm/4": one at midpoint of L0) ST322: At every 50mm/2" intervals of L0 (L0 =50mm/4" model: one at midpoint) ST323: At every 50mm/2" intervals of L0 (L0 =50mm/4" model: one at midpoint) ST422: At every 50mm/2" intervals or one at midpoint of L0 (less than 100mm/4": one at midpoint of L0) *ST322, ST323 and ST422: Refer to the respective pages. Signal output: AT models Incremental scale type Scale output signal Scale Reference Signal Output Point • A/B-phase quadrature signal (PA, PB, PA and PB) AT202: At every 50mm/2" intervals of L0 AT211: At every 50mm/2" intervals of one at midpoint/left end/right end of L0 Output Connector Pin Assignment • Output connector: D-Sub 15P Pin No. 1 2 3 4 5 6 7 8 • Scale reference signal (PZ and PZ) Signal output circuits Function 0V 0V +5V +5V PA quadrature PA quadrature PB quadrature PB quadrature D-Sub 15S • Reference signal (Vref) output circuit Arrangement of cable connection Scale PA PA Counting Direction PB PB PZ PZ Standard counting (PA goes ahead) +5V PA +5V PB * AT211, AT332, AT353 and AT553: Refer to the respective pages. Function PZ quadrature PZ quadrature +5Ve Not connected 0V Not connected F.G. • Applicable plug (standard accessory): • A/B-phase sinusoidal signal output circuit Detecting head traveling direction Pin No. 9 10 11 12 13 14 15 +5V Reverse counting (PB goes ahead) 0V PA 0V PB 0V F.G 33 Control device Connecting cable R1 +5V 5 R2 6 R1 7 R1 R2 8 R1 R1 9 R2 10 +5V 3 R1 Line receiver SN75ALS195: T1 4 11 1 2 13 14 R1: 560Ω R2: 110Ω Shield Technical Information Structure and Features of the AT Series Sealed Linear Scale Joint Mechanism of the AT Series Detector (Adoption of simple joint structure offering high rigidity) Adoption of Rubber Lip Thrust Method (Mitutoyo's Proprietary Technology) The thrust part (see the figure below) pushes aside water like the structure at the bottom of a ship. The detector head and slider (sensor) are connected by a ball-joint, as shown in the figure. This structure eliminates error in the detector head's direction of movement, thus ensuring accurate detection even when the directions of the slider and detector head are offset. This assures ample degree of freedom upon installation. The structure is very simple, but it provides high rigidity and excellent durability. Resonance Points on the Linear Scale Each object has its own natural frequency as determined by the shape, length, material, etc. The scale frame also has its natural frequency and resonates at specific cycles. In general, the natural frequency of the machine tool is different from the natural frequency of the scale frame, so problems won't occur under normal cutting conditions. However, the following measures should be taken if the natural frequencies of the machine tool and scale agree under given conditions. 1. Increase the rigidity of the scale-mounting bracket. 2. Add an intermediate support at the center to Scale side move the resonance point. 3. Install the scale in a location where machine vibration does not easily Scale sideMachine sidetransmit. Machine side 4. Operate the machine inside the specified cutting conditions. Advantage of Special Waterproof Connectors Adopting waterproof, oil-proof connectors enables the separation of the signal cable, making installation and maintenance easy. Signal Cable Conduit The signal cable is enclosed in a spiral, stainless-steel conduit for protection. The stainless cover will not rust or corrode, so the proper function of the cable is ensured over an extended period. Air Supply (improvement of dust/oil resistance) The dust/oil resistance of the assembly linear scale can be improved by supplying clean air to the scale unit. Connect a pipe to one of the screw holes (M5) provided on both sides of the scale unit to supply air. (Available with AT202, AT332, AT353 and AT553) Supply air pressure: 50kPa (approx. 0.5kg/cm2) Air-flow rate: 10 to 20Nl/min. Adoption of Specially Formed Urethane Rubber Lip with Reinforcing Wire Resistance to oil and dust has been improved. (Available with AT202, AT332 and AT353) Recommended air equipment 1. Air equipment 2. Air filter 1 3. Air filter 2 4. Air filter 3 5. Differential 6. Regulator 7. Flow-rate 8. Pressure gage Specifications Nominal filtration rating 5µm Nominal filtration rating 0.1µm, minimum oil-removal raitio 99.9% Nominal filtration rating 0.01µm, minimum oil-removal ratio 99.9999% Used for monitoring the life of the air pressure gage filter 3 Capable of setting the pressure to 50kPa (approx. 0.5kg/cm2) Capable of setting the flow rate to 10 to 20NL/min adjustment valve Capable of confirming a pressure of 50kPa (approx. 0.5kg/cm2) Note: Do not set the flow rate too high, since doing so may cause the dust in the ambient air to be sucked in. 34 Maintenance of the Dustproof Rubber To maintain the dustproof property of the rubber and extend its life, at least once a year apply small amounts of quality silicone grease (Shin-Etsu Silicone G-30L) to the contacting area of the rubber and detector head. (Maintenance intervals vary slightly, depending on the operating condition of the scale.) Effect of Temperature on the Scale (linear-expansion coefficient) pulled by the aluminum and the coefficient becomes unstable. To solve this problem, the adjoining surface in the linear scale is affixed elastically, allowing the linear-expansion coefficient of the frame to conform to the coefficient of the glass unit. (A custom low-expansion glass specification is available.) Mitutoyo's standard linear scales have a linear-expansion coefficient of (8 ±1) x 10-6/°C. With the assembly linear scales, however, the frame is made of aluminum (linear-expansion coefficient of approx. 23x10-6/°C), while the main scale placed inside the frame is made of glass (linear-expansion coefficient of approx. 8x10-6/°C). Therefore, in a natural state the glass is Handling Precautions for the Linear-Scale Signal Cable When installing a Mitutoyo linear scale, pay attention to the following points regarding the handling of the signal cord. When using the cable in a fixed application If the signal cable is fixed to the machine, etc., and its radius of curvature does not change, set the radius of curvature to R50 or greater. If a cable bear cannot be used due to wiring limitations, install a protective rubber bushing, etc., at the cable-fixing point, as shown in Figure 3, to prevent the area immediately near the fixing point from receiving sudden bending force. (* Figure 3 doesn't apply to the AT Series.) If the cable moves, determine the wiring route carefully so as to prevent the cable from contacting the machine parts, etc. Avoid letting the cable rub the machine, since it will cause the cable cover to wear. When using the cable in a moving application When the detector is installed to the moving component of the machine, the cable receives repeated bending force. In this case the cable should be wired with some allowance, by setting its radius of curvature to R100 or greater. The moving cable should ideally be protected with a cable bear, etc., as shown in Figure 2. Other The signal cable is designed to withstand repeated bending of approx. 2 million times (based on R100). If the cable will be subject to more bending cycles, provide relay connectors to allow the moving part of the cable to be replaced. This will facilitate maintenance. The ST Series can also be connected to robot cables. 35 Technical Information Divisional Principle of the Electrical Unit (PSU: Pulse Signal Unit) Resistance Division Method AD Division Method Phase-difference signals are generated by a resistance circuit using phase-A, phase-B and phase-A (reversed phase of A) signals. (In the circuit below, 10 signals of 0°, 18°, 36° ... 162° are generated.) Next, these sine-wave signals are respectively converted to rectangularwave signals. (In the circuit below, The rectangular-wave signals are finally synthesized at every other phase difference using exclusive-OR logic to generate two-phase rectangular waves having phases A and B.) In this method, processing uses the phase A and phase B input from the scale and the phase-difference signal data stored in ROM corresponding to the interpolation number. A pulse is generated to make the result constant, and the ROM data is updated accordingly. As the scale moves, phases A and B change and a pulse is output to conform to the change. This pulse is output as an up/down signal. This method is ideal when the division number is high, since a highly accurate, compact division circuit can be realized without being affected by the characteristics of resistance and other circuit elements. Alarm Functions Detection of detector open/short-circuit error Detection of detector circuit error Detect an open-circuit or short-circuiting with 0 V of the phase-A/B signal lines from the linear scale, or other similar errors. Detect an error in the incremental count or absolute count in the absolute linear scale. Detection of excess response speed of detector feed (overspeed) Detection of CPU error (detection of internal error) When the CPU in the linear scale, counter, etc., has for some reason stopped operating normally, it is detected as an error. Detect an excessive feed speed of the linear scale (detector) beyond the maximum feed speed, or other similar errors. Note: Certain alarm functions cannot be used, depending on the product. Please check the specific alarm functions available with each product. The allowable range of each alarm detection varies from one product to another. Detection of input signal error Detect an amplitude voltage, DC voltage or phase difference of the phase-A/B signals from the linear scale being outside each allowable range, or other similar errors. Alarm Detection Functions Available with Each Product Product name Drop in line voltage ST34C ST322 ST323 ST422 AT202 AT211 AT332 AT353 AT553 AT115 AT102 AT111 AT112 AT181 PSU200 When the line voltage supplied to the linear scale, PSU, etc. (particularly a device using a DC power supply) has dropped below the allowable range, it is detected as an error. Detection of momentary power failure When a momentary power failure has occurred or otherwise the line voltage supplied to the PSU, counter, etc. (a device using an AC power supply) has dropped below the allowable range, it is detected as an error. Detection of scale error Detect an error that has occurred inside the linear scale. 36 Scal error Over speed ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ Input signal error ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ Scale Open/ Detection error shot-circuit circuit detection error error ✔ CPU error ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ ✔ Test Methods to Evaluate the Linear Scale Operating temperature range test Vibration test (acceleration test) Check for operation and signal error under the specified conditions. Check for error at specific non-resonant frequencies using a jig (at around 10 G). Temperature cycle (dynamic characteristic) test Check for error in current-carrying state under the specified conditions. Noise test The linear scales conform to the following standards: EMC directives EN61326-1+A1: 1998 Vibration test (sweep test) Check for error in the frequency range from 30 Hz to 300 Hz at a constant G (3 G). Package drop test The linear scales conform to JIS Z 0200 (heavy-article drop test). Explanation of Terms Absolute GP-IB Refers to a measurement system where all position coordinates are measured with respect to a fixed origin regardless of the coordinate value measured immediately before. A function that shifts the origin of the coordinate system relative to a fixed origin. Origin offset requires the storage of a permanent origin. A standard general-purpose interface bus used to connect a measuring instrument to another measuring instrument or to a computer. The GPIB standard was established by the Institute of Electrical and Electronic Engineers (IEEE) in the U.S. • If they are GP-IB-compliant, measuring instruments by different manufacturers can be connected to the same GP-IB system network. • Devices with varying speeds of data transmission can be used in the same network. • Data can be transmitted from one device to multiple devices. Unlike RS-232C, Centronics or BCD, data transmission between devices is not limited to one-on-one correspondence. Origin restoration RS-422 Incremental Refers to a measurement system where all displacements are measured from a position measured immediately before. Origin offset A function that causes each axis to decelerate and stop exactly at a position specific to the machine, using the limit switches installed in the machine. A balanced interface standard. A balanced configuration has perfectly symmetrical feed and return paths. One advantage of RS-422 is that it ensures excellent transmission capability at a single power source of +5V. Sequence control Indicator accuracy A type of control in which the respective control steps are executed in accordance with the predetermined order. Refers to the maximum value of (measured value) - (true value) when the scale is fed by the maximum stroke. Since length-measuring units are not governed by any international standard such as ISO, each manufacturer adopts its own indicator accuracy standard. The values shown in this catalog are measured by Mitutoyo's scale-accuracy indication method using a laser length-measuring device. Numerical control A type of control in which the tool position relative to the work is given by a corresponding numerical control command. Binary output Error in narrow range Binary numbers in which each place is valued as 2 to the nth power starting at zero (20, 21, 22, 23, and so on). Although the specific pitch varies depending on the type of scale, the gratings engraved in the scale usually have a 20µm pitch. "Error in narrow range" refers to the error generated when the length of this unit pitch is measured at resolution pitch intervals (e.g., 1µm intervals). RS-232C A type of serial interface used to transmit data between transmission devices located relatively close to each other. The RS-232C standard was established by EIA in the U.S. in 1969. It defines a communication protocol useful mainly when connecting a PC with an external device. Protection grade • IP54 protection grade Type Line-driver output Line-driver output is characterized by a high operating speed of several tens to hundreds of nanoseconds and a relatively long transmission range of several hundred meters. In the linear scale system, a differential-voltage line driver (RS422A-compliant) is used as the interface with the NC controller. Level Description BCD Human safety and protection against foreign matter 5: Protected against dust Protected against harmful dust Protection against water 4: Splash-proof type Exposure to splashing water from all directions produces no produces no harmful effect. • IP53 protection grade A method in which a number between 0 and 9 comprising each digit in a decimal number is represented by a four-bit binary code. BCD is monodirectional output data using the TTL or open-collector output mode. Type Level Description 37 Human safety and protection against foreign matter 5: Protected against dust Protected against harmful dust Protection against water 3: Protected against sprinkled water Sprinkling water from all directions has no negative effect on operation. Check Sheet to Order ST34C Example: ST34C-0150AS-E11S-B • The ST34C linear scale can be customized with a choice of specifications. Please select the specifications for respective items that best suit your application. When placing an order, specify the model number followed by an 11-digit number consisting of the corresponding specification codes. • If you have no specific preference for a given item, please choose the standard specification. • Use the check sheet given below for the selection of specification codes. Item Effective range L0 Item Scale reference point Specification you need 10mm/.4" 25mm/1" 50mm/2" 75mm/3" 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350m/14" 400mm/16" 450mm/18" 500mm/20" Code 0010 0025 0050 0075 0100 0150 0200 0250 0300 0350 0400 0450 0500 Specification you need At every 50mm interval At the midpoint Code A B Item Accuracy (at 20°C) Specification you need ±0.5µm (10mm ≤ L0 ≤ 300mm ±1.0µm Code S M Item Resolution/ max. traversing speed Specification you need 0.02µm (125ns*)/150mm/s 0.02µm (250ns*)/70mm/s 0.02µm (500ns*)/30mm/s 0.02µm (1000ns*)/15mm/s 0.05µm (125ns*)/360mm/s 0.05µm (250ns*)/180mm/s 0.05µm (500ns*)/90mm/s 0.05µm (1000ns*)/45mm/s 0.1µm 125ns*)/720mm/s 0.1µm (250ns*)/360mm/s 0.1µm (500ns*)/180mm/s 0.1µm (1000ns*)/90mm/s Code A B C D E F G H J K L M *Edge separation assured within a range of -10% to 0%. 38 Item Counting direction Specification you need Standard (PA goes ahead) Reverse (PB goes ahead) Code 1 2 Item Output signal Specification you need Sine wave and quadrature Quadrature and reset signal Code 1 2 Item Alarm output Specification you need Alarm signal High-impedance Code S H Item Head cable Specification you need Cable length: 1m/40" Cable length: 0.5m/20" Code A B Check Sheet to Order AT211 Example: ST34C-0150AS-E11S-B • The AT211 linear scale can be customized with a choice of specifications. Please select the specifications for respective items that best suit your application. When placing an order, specify the model number followed by an 16-digit number consisting of the corresponding specification codes. • If you have no specific preference for a given item, please choose the standard specification. • Use the check sheet given below for the selection of specification codes. Item Effective range L0 Specification you need 100mm/4" 150mm/6" 200mm/8" 250mm/10" 300mm/12" 350m/14" 400mm/16" 450mm/18" 500mm/20" 600mm/24" 700mm/28" 750mm/30" 800mm/32" 900mm/36" 1000mm/40" 1100mm/44" 1200mm/48" 1300mm/52" 1400mm/56" 1500mm/60" Code 0100 0150 0200 0250 0300 0350 0400 0450 0500 0600 0700 0750 0800 0900 1000 1100 1200 1300 1400 1500 Item Mounting method Specification you need Multi-point fixing Double-end fixing Code A B Item Scale reference point Specification you need At every 50mm interval At the midpoint At the left end At the right end Code 1 2 3 4 Item Accuracy (at 20°C) Specification you need (3+3L0/1000)µmm (2+2L0/1000)µmm Code S H Specification you need Standard (PA goes ahead) Reverse (PB goes ahead) Code 1 2 Item Counting direction Item Resolution/ max. traversing speed Specification you need 0.1µm (125ns*)/710mm/s 0.1µm (250ns*)/360mm/s 0.1µm (333ns*)/260mm/s 0.1µm (500ns*)/180mm/s 0.1µm (1000ns*)/90mm/s 0.2µm (125ns*)/1400mm/s 0.2µm (250ns*)/710mm/s 0.2µm (333ns*)/530mm/s 0.2µm (500ns*)/360mm/s 0.2µm (1000ns*)/180mm/s 0.5µm 125ns*)/2000mm/s 0.5µm (250ns*)/1800mm/s 0.5µm (333ns*)/1300mm/s 0.5µm (500ns*)/900mm/s 0.5µm (1000ns*)/450mm/s 1.0µm (250ns*)/2000mm/s 1.0µm (333ns*)/2000mm/s 1.0µm (500ns*)/1800mm/s 1.0µm (1000ns*)/900mm/s 2.5µm (500ns*)/2000mm/s 2.5µm (1000ns*)/2000mm/s 5.0µm (1000ns*)/2000mm/s Code A B C D E F G H J K L M N P Q R S T U W X Y *Edge separation assured within a range of -10% to 0%. Item Head cable Specification you need Coil-covered cable*: 0.3m/12" Normal cable*: 0.3m/12" Normal cable*: 1m/40" Normal cable**: 3m/120" Normal cable**: 4m/16" Normal cable**: 5m/200" Normal cable**: 6m/240" Normal cable**: 7m/280" Normal cable**: 8m/320" Normal cable**: 9m/360" Code A B C D E F G H J K *Provided with a waterproof connector. **no connector provided. Item Signal cable *Provided with a waterproof connector. 39 Specification you need Conduit-armed cable*: 3m/120" Normal cable*: 3m/120" Conduit-armed cable*: 5m/200" Normal cable*: 5m/200" Conduit-armed cable*: 7m/280" Normal cable*: 7m/280" Code A B C D E F 247.000606 (7) AFP, Printed in Japan Mitutoyo Corporation 20-1, Sakado 1-Chome, Takatsu-ku, Kawasaki-shi, Kanagawa 213-8533, Japan Phone (044) 813-8230 Fax (044) 813-8231 http://www.mitutoyo.co.jp Note: All information regarding our products, and in particular the illustrations, drawings, dimensional and performance data contained in this pamphlet, as well as other technical data are to be regarded as approximate average values. We therefore reserve the right to make changes to the corresponding designs, dimensions and weights. The stated standards, similar technical regulations, descriptions and illustrations of the products were valid at the time of printing. In addition, the latest applicable version of our General Trading Conditions will apply. Only quotations submitted by ourselves may be regarded as definitive.
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