SCREEN And SOKUDO

SCREEN and SOKUDO
Secondary Equipment and Parts
Remanufacturing and Refurbishment
Joerg Gundrum
Manager
Munich Refurbishment Center
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Secondary Equipment Market is complex and growing
 The availability of affordable equipment allows Semiconductor
Fabs to upgrade faster and more cost effective
 The secondary equipment market reached $6.0 billion
in sales 2010
 77% increase over 2009 for secondary equipment
 13% of total equipment spending for secondary equipment
Source: SEMI and Semico Secondary Semiconductor Equipment Market Study, Mai 2011
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Key Advantages
Only the Original Equipment Manufacturer (OEM)
ensures high quality refurbishment because….
 Detailed knowledge on equipment history
 Full access to the manufacturing records
 Authorized to provide software licenses
 Can provide certified equipment support
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Munich Refurbishment Center MRC
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SK80B
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Sourcing SCREEN and SOKUDO Equipment
Remanufacturing and refurbishment
Spare part remanufacturing and refurbishment
Unit modification
Customized solutions
FC821L
DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Our Experience
Track Systems:
 60/80A
 60/80B
 200W
 SK-2000
 SCRUBBER
Wet Stations:
 AS2000
 MP2000
 SPW612
 SPW813
 WS620/WS820
 FC821L
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
The Way to your Refurbished Equipment
 Equipment sourcing
 DNS pre-owned equipment
 Buyback
 Customer owned
Customer
Request
Audit &
Quotation
Shipment
Shipment
to MRC
PO
Source
Inspection
Refurbishment
(optional)
Training
(optional)
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
High Quality Standards
Each peace of equipment goes through our
superior refurbishment process
 Factory trained engineers
 Standardized refurbishment
procedures
 Remanufacturing to the original
factory specification
 OEM spare parts only
 Latest version software upgrades
 CE marking
 Detailed inspection report
 Installation
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Standard OEM Refurbishment Services
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Default replacement of key parts
Robot overhaul
Detailed function test procedure
Onsite installation
Warranty
DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Spare Part Remanufacturing and Refurbishment
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Spin Motor Repair & Refurbishment
Available for SK60/80A, SK60/80B, 200W
Test bench
Test certificate
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
ETU / ACU Repair and Refurbishment
 Electro Thermostatic Unit repair
SK80B and SK200W
ETU
 Air Conditioning Unit repair
SK2000
SK2000
ACU
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Resist Pump Service
Repair and Spare Part service for IDI-Cybor pumps
 IDI 300 Series
 IDI 400 Series
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
MRC Customized Development
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
SK80B MEMS Upgrade
 MEMS edge grip chuck
 Developed for wafer thickness from 250µm to 850µm
 Available for 150mm and 200mm wafers
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
100mm and 150mm wafer processing change 80B
 “Quick and Easy” change by software
 No hardware modification required
Double-side Scrubber SS-80BW
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL
Summary
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Cost effective equipment for ramp of matured technologies
Customized Solutions
OEM guaranteed service, spare part and software support
Access to knowledge/experience of worldwide service and
process support organization
 OEM approved refurbishment center (the only one in Europe)
THE ONLY OFFICIAL SOURCE
http://www.screen-dsd.de/en/refurbished-tools.html
Our team of experienced engineers at the MRC is available
to help you with any secondary equipment needs or questions.
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DAINIPPON SCREEN DEUTSCHLAND CONFIDENTIAL