OEM Manual for OPTIMET`S Mark10/10HD

Transcription

OEM Manual for
OPTIMET’S Mark10/10HD
Conoscopic Holography
Disclosure Restrictions:
Optimet Optical Metrology Ltd. provides this document without warranty of any kind either expressed or
implied. Optimet Optical Metrology Ltd. may make changes to this document without notice.
Disclaimer:
Optimet - Optical Metrology Ltd. disclaims responsibility for any labor, materials, or costs incurred by
any person or party as a result of using this document or any information contained herein. Optimet
Optical Metrology Ltd. or other affiliates shall not be liable for any damages (including, but not limited to,
consequential, indirect, or incidental, special damages or loss of profits or data) even if they were
foreseeable and Optimet Optical Metrology Ltd. has been informed of their potential occurrence, arising
out of or in connection with this document or its use.
Contact Information:
Europe and Israel:
USA and Canada:
Japan:
Optimet, Optical Metrology Ltd.
Tel: +972-2-548-2900
Fax: +972-2-586-5387
P.O.B. 45021, Jerusalem 9145001, Israel
support@optimet.com
mktg@optimet.com
http://www.optimet.com
Optimet, Optical Metrology Inc.
Tel: +1-978-657-6303
Fax: +1-978-657-6054
sales@optimet.com
http://www.optimet.com
Optimet Division
Ophir Japan Ltd.
TEL: +81-48-650-9966
FAX: +81-48-650-9977
info@ophirjapan.co.jp
http://ophirjapan.co. jp
OPTIMET MANUAL P/N 3J06009, Rev 2, July 24 2014
ConoProbe Mark 10 Manual
1-2
Table of Contents
Table of Contents ........................................................................................................................................ 1-3
1
Conoscopic Holography .................................................................................................................... 1-5
1.1
1.2
1.3
2
Classical vs. Conoscopic Holography ........................................................................................... 1-5
How does the ConoProbe Works.................................................................................................. 1-5
Advantages of Conoscopic Technology ....................................................................................... 1-6
Introduction ......................................................................................................................................... 2-7
2.1
Product Overview .......................................................................................................................... 2-7
2.2
Contents ........................................................................................................................................ 2-8
2.2.1
The OPTIMET Probe ............................................................................................................ 2-8
2.2.2
OPS communication box ...................................................................................................... 2-8
2.2.3
Lenses ................................................................................................................................... 2-8
2.2.4
Cables ................................................................................................................................... 2-8
2.2.5
OPTIMET Software installation ............................................................................................. 2-8
2.2.6
The SMART Probe Tester Program...................................................................................... 2-9
2.2.7
The Viewer Program ............................................................................................................. 2-9
2.3
Safety Warnings ............................................................................................................................ 2-9
2.4
Compatibility................................................................................................................................ 2-10
2.5
OPS communication box Description ......................................................................................... 2-11
3
Connecting the sensor ..................................................................................................................... 3-12
3.1
System Requirements ................................................................................................................. 3-12
3.2
Connecting the Probe ................................................................................................................. 3-12
3.3
Installing the OEM Software ....................................................................................................... 3-14
3.3.1
Communication Set-up ....................................................................................................... 3-14
3.3.2
Verifying the Network Connection with the Probe .............................................................. 3-15
3.3.3
LAN Card Installation with Custom IP Address .................................................................. 3-16
4
Smart32 OEM API Reference ........................................................................................................... 4-17
5
The Smart Probe Tester Program.................................................................................................... 5-18
5.1
Introduction ................................................................................................................................. 5-18
5.2
The Main Screen ......................................................................................................................... 5-18
5.3
Initializing the Probe .................................................................................................................... 5-20
5.4
Changing the Active sensor (Multi-sensors Only)....................................................................... 5-20
5.5
Changing the Active Lens ........................................................................................................... 5-20
5.6
Setting Diagnostic Mode ............................................................................................................. 5-21
5.7
Using the sensor Screen Dialog ................................................................................................. 5-21
5.7.1
The Signal Display .............................................................................................................. 5-22
5.7.2
Statistics Section ................................................................................................................. 5-22
5.7.3
Settings Field ...................................................................................................................... 5-22
5.7.4
Adjusting the Smart Probe Settings .................................................................................... 5-23
5.7.5
Using the Vertical Distance Scale ....................................................................................... 5-25
5.7.6
Optimizing Signal Quality .................................................................................................... 5-26
5.7.7
Analyzing the Signal............................................................................................................ 5-26
5.8
Acquiring Measurements ............................................................................................................ 5-33
5.8.1
Time mode .......................................................................................................................... 5-33
5.8.2
Pulse mode ......................................................................................................................... 5-33
5.8.3
Number of Measurements .................................................................................................. 5-33
5.8.4
Data Transfer Type ............................................................................................................. 5-33
5.8.5
Save File Format ................................................................................................................. 5-34
5.8.6
Performing an Acquisition of Measurements ...................................................................... 5-34
5.9
Other Functions........................................................................................................................... 5-34
5.9.1
ShowProbeDialog ............................................................................................................... 5-34
6
Working with Multiple Probes.......................................................................................................... 6-35
6.1
Introduction ................................................................................................................................. 6-35
1-3
6.2
6.3
7
Hardware Setup for Multi-Probe Acquisition ............................................................................... 6-35
Programming Applications to Work with Multiple Probes ........................................................... 6-36
The System Input/Output Description ............................................................................................ 7-37
7.1
Introduction ................................................................................................................................. 7-37
7.2
External Trigger Inputs ................................................................................................................ 7-37
7.2.1
Hardware Description.......................................................................................................... 7-37
7.2.2
External Trigger Signal ....................................................................................................... 7-37
7.2.3
Single ended Trigger signal ................................................................................................ 7-37
7.2.4
External Trigger Dilution of Signals..................................................................................... 7-37
7.3
Timing diagrams for the External Trigger ................................................................................... 7-38
7.3.1
General sequence ............................................................................................................... 7-38
7.3.2
Timing blow-up .................................................................................................................... 7-38
7.4
Analog Output ............................................................................................................................. 7-39
7.4.1
Analog Output Specifications .............................................................................................. 7-39
7.5
Start of Measurement Output (ROG – Read Out Gate).............................................................. 7-39
7.6
External Trigger Mode Operation................................................................................................ 7-41
7.6.1
Time between Pulses .......................................................................................................... 7-41
7.6.2
Hardware Configuration ...................................................................................................... 7-41
7.7
Timing Diagram elaborations ...................................................................................................... 7-42
7.7.1
Time Mode .......................................................................................................................... 7-42
7.7.2
External Triggering .............................................................................................................. 7-43
8
ConoProbe Mark 10/10HD OPS Embedded Auto-Exposure ......................................................... 8-44
8.1
8.2
8.3
8.4
8.5
9
Main Features ............................................................................................................................. 8-44
Algorithm Timing ......................................................................................................................... 8-44
The Algorithm .............................................................................................................................. 8-45
Mis-Measurements ..................................................................................................................... 8-45
Best Practices ............................................................................................................................. 8-45
Appendix A: ConoProbe Mark10/10HD Specifics .......................................................................... 9-46
9.1
9.2
Physical Dimensions ................................................................................................................... 9-46
Specifications and Lens Type ..................................................................................................... 9-48
10
Appendix B: ConoProbe Mark10/10HD OPS ............................................................................ 10-50
11
Application HW Interface ........................................................................................................... 11-51
11.1
12
12.1
12.2
12.3
13
Content ...................................................................................................................................... 11-51
Operational Modes ...................................................................................................................... 12-54
General ..................................................................................................................................... 12-54
Time Mode ................................................................................................................................ 12-54
External trigger Mode ................................................................................................................ 12-54
Appendix C: Mark10/10HD general information ...................................................................... 13-55
1-4
1 Conoscopic Holography
The ConoProbe uses an innovative technique known as conoscopic holography to perform
non-contact profile measurements. Conoscopic holography has many advantages over
classical holographic and other measurement techniques. This section illustrates how the
conoscopic holography can be used to provide accurate two-dimensional profile measurement
results.
1.1 Classical vs. Conoscopic Holography
In classical holography, a hologram is created by detecting and recording the interference
pattern formed between an object beam and reference beam using a coherent light source.
The object beam and reference beam propagate with the same velocity, but follow different
geometrical paths, creating an interference pattern that can be recorded and reconstructed
later using a similar light source.
In conoscopic holography, however, the separate coherent beams are replaced by two
polarization components of a single beam traversing a uniaxial birefringent crystal. The
refractive index of light traveling through a birefringent crystal depends on the light's
polarization, thus two orthogonally polarized beams can propagate in the same optical path
with different propagation velocities. Since both beams propagate through the same path,
conoscopic holography is highly stable. With this method, it is possible to produce holograms
using incoherent light.. Signal processing algorithms developed at Optimet are then used to
retrieve the distance information from the recorded light interference pattern.
1.2 How does the ConoProbe Works
The ConoProbe emits an eye-safe laser beam,which is reflected by a polarizing beam splitter,
and hits the specimen being measured. Part of the scattered light travels back from the
specimen through an objective lens, passes the polarizing beam splitter and enters the
conoscopic unit that contains the birefringent crystal. The light is then detected by the probe’s
detector (refer to Figure A-16-1 ). The spatial frequency of the recorded interference pattern
depends on the distance between the measured object and the sensor.
Sensor
Conoscopic
Unit
Laser
Polarizing
beam splitter
Objective
lens
Specimen
Figure A-1-1: Schematic illustration of the probe
1-5
1.3 Advantages of Conoscopic Technology
Optimet's probes are based on the unique and patented conoscopic holography technique.
They are reliable, accurate and contain no moving parts. Our technology has major benefits
when integrated in measurement devices, compared to the standard triangulation method.
Two major advantages are:
• Collinearity: This collinearity allows the sensor to measure inside holes, through folding
optics, and also measure steeply inclined surfaces, even at angles of 85°. The ability to
incorporate relay optics also enables the sensor to be used simultaneously with the same
focusing lens of welding or cutting laser applications, and with machine vision applications.
The triangulation method is noncollinear, meaning that light travels out and back into the
measurement device in different optical paths. In contrast to triangulation, our probe's outgoing
laser beam share the same optical path as the returned signal.
• Low electronic noise dependency: In triangulation-based devices, image processing
algorithms are highly sensitive to electronic noise since they search for the light intensity
distribution on the sensor. In Optimet's probes, however, the entire sensor is used to evaluate
a single spatial frequency, making it much more noise resilient. Moreover, if some of the light
is blocked, other areas can provide sufficient measurement signal.
1-6
Introduction
2 Introduction
Thank you for purchasing an OPTIMET Ethernet Probe
This manual provides information for integrating the Hardware and Software of the sensor into
your system.
This chapter includes the following sections:
Product Overview – An overview of the probe
Contents - Descriptions of the various product components.
Safety Warnings – Safety warnings one should follow when handling and using the
probe.
Compatibility – A list of the supported operating systems and development
environments in which the sensor has been successfully integrated.
OPS communication box Description
– Description of the sensor OPS communication box.
2.1 Product Overview
OPTIMET’s high-speed Ethernet Family of Probes is the newest generation of single point
non-contact optical probes developed and manufactured by Optimet. These state-of-the art
probes are the result of over ten years of field experience and over 100 different OEM
applications around the world.
In accordance with OPTIMET’s line of non-contact probes, the Ethernet Family of Probes is
based on our unique and patented Conoscopic Holography technology. The sensor designed
for integration in a large variety of industrial applications such as: Quality Control, In-process
inspection, and Reverse Engineering
The probe’s embedded hardware is a "SOC” (system on a chip) platform and all data
processing, including pre-programmed functions, are in the sensor head. The exceptional
features of the sensor include:
• Optimum measurements up to 9000 Hz .
• Extensive angular coverage of over 170° width.
• Measurement of hard to measure geometries, steep grooves and angles.
• Low weight of 700 gram.
• Compact.
• Modular setup with interchangeable objective lenses enabling various standoffs
and working ranges in the same probe.
• Sub-micron precision with short focal length objectives.
• Simultaneous measurement on highly contrast objects without the need of user
interaction.
• Integration capability with relay optics.
• The sensor can act in a system as a Master synchronizer or as a Slave
synchronized by the system
• Possible to have multiple probes integrated and work in parallel, using standard
Ethernet LAN communication.
• The sensor also offers an optional analog output.
2-7
Introduction
2.2 Contents
The sensor package consists of the probe, the OPS communication box, a crossed (twistedpair) Ethernet cable, a D-15 to ODU cable connecting the sensor to the OPS communication
box, and a 12VDC power supply powering the system.
The software package contains the interface files: Smart32.DLL and a set of supporting files.
It also provides the following software utilities: a set of sample programs, the Smart Probe
Tester for scanning objects, and the Viewer for viewing profiles of scan results.
2.2.1 The OPTIMET Probe
The sensor is an optical non-contact “point” measurement sensor. Using Optimet’s patented
conoscopic holography technology the laser beam returned from the object surface is
translated into a measured distance. This is done using an opto/mechanical base and
implementation of mathematical algorithms in the electronics.
2.2.2 OPS communication box
The OPS communication box is the signal distribution hub and provides a connection between
the sensor and the host PC via an Ethernet 10/100/1000 LAN link. It also has an external
trigger input enabling measurements to be triggered externally, and a ROG (Read-Out Gate)
signal output for synchronizing systems where the sensor is the master device.
2.2.3 Lenses
A variety of lenses is available to the customer according to his needs and requirements. Each
lens is calibrated to a specific sensor in order to achieve optimal performance. The Serial
Number on the sensor should match the Serial Number on the Lenses.
2.2.4 Cables
The package contains the following cables:
A 15-pin D-Type to ODU connector cable (for connecting the sensor to the OPS
communication box). Length: 2 meters.
One Ethernet crossover cable. Length: 2 meters.
Power Supply
An AC to DC power supply supplying 12VDC @ 0.5Amp.
2.2.5 OPTIMET Software installation
The Optimet software installation contains important information about Optimet
software package.
Installation Contains:
1. SDK Installation
2. OEM Manual in PDF format
3. How to contact Optimet
4. Sample code in C, C++, C#.
2-8
Introduction
2.2.6 The SMART Probe Tester Program
The SMART Probe Tester Program allows you to experiment with the sensor by changing its
settings and by performing measurements without having to write your own program.
Using SMART Probe Tester, you can:
• Check the communication with the Probe
• Gain experience using the Probe’s controls through the sensor Tester’s
GUI.
• Obtain the best operating parameters for your Probe’s measurements.
• Configure the measurement working frequency and laser power.
• Select a lens to use.
• Perform infinite and finite stream measurements as well as measurement
acquisition to a buffer in a different thread.
The full source code for the Smart Probe Tester Program is in the SDK folder in
the Smart Probe Tester sub folder.
2.2.7 The Viewer Program
The Viewer program allows you to view specimen profiles created with SMART Scanner.
Using the Viewer, you can filter scan results to obtain optimal accuracy and export scan
information to other formats or to other programs. In addition, the Viewer can perform an
advanced analysis of the scan information. For more information about using the Viewer, refer
to the Viewer OEM manual.
2.3 Safety Warnings
Exercise caution when using and servicing both the Sensor and the Communication-Box.
The Sensor emits laser radiation of less than 1mW per Class II specifications.
Never stare directly into the beam.
The Sensor has no user serviceable components, and the laser radiation inside
the sensor can reach 3mW. The sensor is only to be opened or serviced by
qualified Optimet service personnel.
“ CAUTION- USE OF CONTROLS, ADJUSTMENTS OR
PERFORMING PROCEDURES OTHER THAN THOSE SPECIFIED
HEREIN MAY RESULT IN HAZARDOUS RADIATION EXPOSURE”
FDA Class II
IEC Class 2
Figure 1-1 Safety Warnings
2-9
Introduction
2.4 Compatibility
The OEM software is compatible with Windows™ 2000, Windows™ XP, Windows™ Vista,
Windows™ 7 or Windows™ 8. Smart32 SDK compiled as 32 bit. . The Smart32 has been
successfully integrated into systems written in the following development environments
(among others):
• Microsoft .NET C#
• VB.NET
• Visual C++ 6.0
• Labview 8.6 and higher
2-10
Introduction
2.5 OPS communication box Description
Figure 1–2 The OPS communication box
2-11
Connecting the sensor
3 Connecting the sensor
This chapter explains how to connect the sensor and install its support software. It includes the
following sections:
System Requirements – PC requirements for the sensor
Connecting theProbe – A description of how the sensor, the OPS
communication box unit, and the host PC are connected.
Connecting theInstalling the OEM Software - Installing Instructions on how to install
the OEM Software.
3.1 System Requirements
The Ethernet sensor uses a PC for operation. The PC must meet the following requirements:
A Pentium III processor (Pentium IV recommended).
At least 256MB physical RAM (512MB recommended).
SVGA display (800x600 resolution, 16 bit color palette).
A 10/100/1000 Ethernet LAN network connection.
Windows™ 2000, Windows™ XP, Windows™ Vista, Windows™ 7 or Windows™
8 operating systems.
3.2 Connecting the Probe
The OPS communication box unit must be connected to both the sensor and the host PC. To
connect the OPS communication box to the sensor and the PC (refer to Figure 2-1):
1. Connect the OPS communication box to the sensor using the 25-pin DType connector cable to the OPS communication box and 15-pin and 9pin D type to the sensor .
2. Connect the OPS communication box to the PC with an Ethernet
crossover cable.
3. Connect the OPS communication box to the power supply (12v @ 0.5
Amp).
To learn how to use the external trigger input, or for more information about the
analog output, encoder inputs, and start of measurement output (ROG), see
Chapter 6: The Input/Output Description.
.
Figures 2–1 and 2–2 display how the probe, the Connection Box, and the host
PC are connected.
Figure 2-1: OPS communication box Cables and Connections
3-12
Figure 2–2 sensor System Layout
WARNING:
When connecting or disconnecting the sensor to the OPS communication box, make
sure that the OPS communication box power is unplugged. Connecting or
disconnecting the sensor to the OPS communication box while its power is on could
damage the probe.
3-13
3.3 Installing the OEM Software
NOTE:
For installation in Windows™ 2000, Windows™ XP, Windows™ Vista, Windows™ 7 or
Windows™ 8, you must have administrator rights.
To install the software:
1. From the Setup folder, run Setup.exe. The Welcome screen appears.
2. Click Next. The Software License Agreement screen appears.
3. After you have read the agreement and accept its terms, click yes. The
Choose Destination Location screen appears.
4. Browse to the directory in which you want to install the OEM software, or
use the default directory. Click Next. The Select Program Folder appears.
5. Enter a name for the OEM program folder, or leave the default name, and
click Next. The Start Copying Files screen appears.
6. The setup program installs the OEM software in the selected directory.
After it has finished, the Setup Complete screen appears.
7. If required to restart your computer, click ‘Yes, I want to restart my
computer now.’ or ‘No, I will restart my computer later.’ Click Finish.
3.3.1 Communication Set-up
The sensor is connected to the host PC via an Ethernet port on the host PC. This port can be
configured by the connection wizard of either Windows™ 2000, Windows™ XP, Windows™ Vista,
Windows™ 7 or Windows™ 8. This wizard can be found by pressing the Network Connections
icon from the control panel of the host PC. This will start the connection wizard. Right click
the properties menu item on the network connection you will use for the probe. The network
properties dialog will then be displayed as shown below in figure 2-3. Remove the checks
from the first three items, Client for Microsoft Networks, File and Printer Sharing for Microsoft
Networks and QoS Packet Scheduler
Figure 2–3 The Network Properties dialog
Next, select the item Internet Protocol (TCP/IP) and click the Properties button. The General
page will appear. In this dialog do the following:
3-14
1. Click on the button labeled Use the following IP address:
2. Change the IP address field to 1.2.3.9
3. Change Subnet mask to 255.255.255.0
4. Make sure the Default Gateway field is empty.
After the changes have been made, verify that the settings are identical to those in figure 2–4, then
press OK.
Figure 2-4 The Network Properties dialog displaying TCP/IP properties.
After configuring the settings, rename the network connection to the sensor in the Network
Connections Window. See Figure 2-5.
Figure 2-5 Renaming the Network Connection.
3.3.2 Verifying the Network Connection with the Probe
The network communication with the sensor can be verified by running the Smart Probe
Tester utility “SmartProbeTester.exe” which is located in the …\Code Samples\Bin folder.
Please refer to Chapter 5 about how to use Smart Probe Tester program.
3-15
3.3.3 LAN Card Installation with Custom IP Address
For situations where the predefined LAN Card IP address (1.2.3.9), cannot be used, a custom
IP Address can be assigned to the LAN Card in the following way:
1. Open the Network Connections Property Dialog as shown in figures 2-3 and 24.
2. Assign the desired IP Address for the LAN card in the IP Address field
3. Set the Subnet mask to 255.255.255.0
4. Make sure the Default Gateway field is empty.
4. Press the OK button.
For example, the figure below shows the configuration for a LAN card whose address is
100.200.210.8.
Figure 2-6 Configuring the Internet Protocol Properties for Custom
LAN Card IP Assignment.
3-16
Smart32 OEM API Reference
4 Smart32 OEM API Reference
For further information read the SMART32 OEM API Reference:
"Optimet Point Sensor Software Development Guide"
Optimet Manual P/N 3J06050
4-17
The Smart Probe Tester Program
5 The Smart Probe Tester Program
5.1 Introduction
This chapter explains how to use the sensor Tester program to experiment with the sensor
and to acquire measurements. The entire source code for the application is included in the
SDK folder of the installation so that one can gain a better understanding of how to use the
Smart32 API. The user can also use the source code as basis for a custom sensor application
project. In order to successfully build the project, one needs to use Visual Studio 2008 C
The Main Screen – Describes the functions associated with the main screen of
the application.
Using the sensor Screen Dialog – Describes how to use the sensor screen
dialog to obtain optimal measurements.
Start of Measurement Output – (also called ROG) describes how to use the
Start of Measurement output signal to synchronize the current stage location with
the measurement
5.2 The Main Screen
Figure 5-1: The Probe Tester Main Screen
Figure 5-1 shows the main screen of the Probe Tester. To start the application and to
initialize the probe, press the <Init> button. If there is a problem in the initialization, (for
example, the sensor is not connected to the OPS communication box), an error message
will appear in the Error box. Otherwise, the various sensor parameters will be displayed in
5-18
their respective fields. A summary of the fields is shown below:
In the sensor Info window:
Host Adapter IP – The IP address of the host adapter.
Probe IP – The IP address of the probe.
Probe List – The list of detected probes
Number of Probes – The number of probes detected.
Max Freq – The maximum frequency supported by the probe.
Hardware Version – The probe’s hardware version
Hardware Version – The probe’s internal software version
Probe SN – The serial number of the probe.
In the Lens window:
Lens Count – The number of lenses in the sensor (including the “0” lens).
Active Lens Index – The index of the active lens
Lens List – List of all the lenses in the sensor by focal length.
Focal Length – The focal length of the active lens.
Distance Min – The minimum distance limit of the focal range of the active lens.
Distance Max – The maximum distance limit of the focal range of the active lens.
5-19
5.3 Initializing the Probe
All probes have auto connection functionality, make sure the Using Auto-Connect
checkbox is checked and press the <Connect> button. A list of the serial numbers of the
detected probes will appear in the sensor list box along with the number of probes
detected in the "Number of Probes" text box. Press the <Init> button to initialize them.
After initialization the main screen should look similar to the figure shown below in figure
5-2 . Note that the number of lenses, serial number, and other parameters will be specific
to your probe.
Figure 5-2: The sensor Tester Main Screen after initialization
Probe Type
Hardware/Software version
Conoprobe Mark10
10.2 and higher
5.4 Changing the Active sensor (Multi-sensors Only)
If more than one sensor is connected, the sensor List combo box will show the serial
number of the active probe, whose lens and other information is being displayed. By
selecting a different serial number from this list, the parameters on the screen will update
to show that of the new active probe. In order to change the parameters of a sensor as
described below, you must chose the serial number of the desired sensor to be sure it is
active. The active sensor will always be the same for a single connected probe.
5.5 Changing the Active Lens
The active lens of the active sensor can be clicking the desired lens index in the lens list
box. If the operation is successful, the new active lens will be highlighted in the list box
and the lens parameters will be updated to those of the active lens.
5-20
5.6 Setting Diagnostic Mode
After sensor initialization finished, user can set sensor diagnostic mode. Diagnostic mode
provides good signal quality regardless actual measurement. This mode is useful for software
development and testing.
NOTE
Initialization communication with sensor will disables diagnostic mode, if it was set previously.
5.7 Using the sensor Screen Dialog
Before one acquires measurements using the Probe Tester program, the signal coming from
the active sensor should first be analyzed with the sensor dialog. Based upon the quality of
the signal, the power, frequency, and sensor distance should be changed to obtain the best
measurements. Below is a discussion of how to understand the graphical output of the sensor
dialog in order to make these corrections.
When scanning an object, you must make sure that the signal quality is good and that you are
receiving optimal scan results. The sensor screen may be used to adjust the sensor settings in
order to control and analyze the signal quality. This section describes the sensor screen and
its components.
Figure 5-3 displays the sensor screen showing a sensor output signal with high SNR from an
object whose distance is 192.41 mm from the probe.
In the signal display area, the X-axis of the graph represents the pixel number of the CMOS
Detector, and the Y-axis represents the units of intensity. The signal’s frequency and
wavelength depend on the distance between the sensor lens and the object.
Figure 5-3: The sensor Dialog
The sensor screen is divided into several sections:
1. Signal Display – Located on the upper right-hand side of the sensor
screen. For more information about the signal display, refer to
Section 5.7.1
2. Statistics Section – Located under the signal display to the left. For
more information about the Statistics section, refer to Section 5.7.2.
3. Settings Field – Located to the right of the Statistics section. For more
5-21
information about the Settings section, refer to Section 5.7.3.
4. Vertical Distance Scale – Located on the left side of the sensor screen.
For more information about the vertical distance scale, refer
to Section 5.7.5
To return to the main window, click OK or Cancel in the sensor screen. By
pressing OK the values for the probes power and frequency will be set, pressing
Cancel will set the parameters to their previous values before opening the dialog.
5.7.1 The Signal Display
Scattered light reflected off the object enters the probe’s optical system and is detected by two
CMOS detectors inside the probe.
The signal display allows you to analyze and optimize the signal quality. This section explains
how to read and understand the signal display in order to analyze the signal quality.
You can enlarge a section of the signal display graph for easier viewing. To enlarge a section
of the graph, hold down the left mouse button and drag the cursor from the top-left to the
bottom-right of the section you want to enlarge.
To zoom out, hold down the left mouse button and drag the cursor over the graph from
bottom-right to top-left.
5.7.2 Statistics Section
Table 5-1: Statistics Section Fields
describes the fields in the Statistics section of the sensor screen.
Table 5-1: Statistics Section Fields
Field
Description
Z
The height of the object.
Signal quality (Snr)
Signal to noise ratio. The percentage of the signal’s power out of
the total reading (Signal/(signal+noise)).
Total
The estimated total amount of light in the picture.
5.7.3 Settings Field
Table 5-2 Settings Section Fields
Describes the fields in the Settings section of the Smart Probe screen.
Table 5-2 Settings Section Fields
Field
Description
Power
Valid power settings range from 0 to 63. One power unit is equivalent to
approximately 40-50 fine power units. For most applications, set the
power level above 10 for more accurate measurements (refer to Section
3.5.5.3 Setting laser power level)
Fine power
Fine-tune the power level to achieve a better Snr. Effective at low Power
levels 6-11.
Frequency
The Working Frequency sets the CMOS detectors’ exposure time for
every measurement. The exposure time equals 1/frequency.
5-22
5.7.4 Adjusting the Smart Probe Settings
You can adjust various sensor settings to ensure that the object is within the working range,
and the power level and Working Frequency are set correctly.
5.7.4.1 Adjusting the Smart Probe Height
You may have to adjust the height of the sensor so that the object is within the working range
of the lens installed. To position the sensor at the correct distance from the object:
• Increase the power level until the laser spot becomes visible. This can be done by
adjusting the power in the Settings section of the sensor Screen.
• Move the object so that the sensor is over a relatively flat portion of the object
between the highest and lowest points you want to measure. When the
sensor is over the object, a red dot appears on the object. The red dot marks
the exact point the sensor is measuring.
• Move the sensor up or down until the distance from the lens to the point
measured on the object is approximately the standoff of the lens. As you
move the sensor up and down, watch the size of the red dot on the object. If
the red dot gets smaller and more focused, the lens is moving towards its
optimum distance. If you do not see the laser spot, increase the laser power.
• If the sensor Screen is activated, you can fine-tune the sensor height after the
laser spot is focused, using the vertical distance scale on the sensor Screen.
If a valid reading is indicated, but the measured distance moves in the
opposite direction than expected (i.e., as you move the object closer to the
probe, the cursor moves lower on the scale in the sensor Screen), you are in
the region of the reversed fringes. Increase the sensor height until you are
within the normal range. This may occur with 25 and 50mm lenses
• Place the object as close as possible to the center of the working range. If the
cursor is not approximately at the center of the range, adjust the height of the
probe. If you change the height of the probe, readjust the power level.
• Move the object so that the laser beam is on the highest point that you want
to measure on the object and check the distance by using the vertical
distance scale in the sensor screen to make sure the object is still within
range. Then move the object so the laser beam falls on the lowest point that
you want to measure on the object and check that the object is still within
range. If necessary, adjust the probe’s height so that all areas of the object
that you want to measure are within range.
5.7.4.2 Setting the Working Frequency (Data Acquisition Rate)
Set the Working Frequency according to the following guidelines:
• In general, it is preferable to work with the highest Working Frequency possible, since
measurement error can be minimized by better use of averaging filters.
• As a general rule, for shorter focal lengths - use higher working frequencies, for darker
(light absorbing) surfaces and higher angles-use lower frequencies. Start with 1000 –
1500 for lenses up to 75 and 500-700 for lenses from 100mm up.
• If you are acquiring measurements with a moving table, then calculate the correlation
working frequency – table velocity in such a way to allow sufficient measurement points
on the desired feature.
5.7.4.3 Setting the Laser’s Power Level
In general, there is a direct relationship between the Working Frequency and the
corresponding required laser power. This means that if you are working at high CMOS
5-23
frequencies you will require a higher laser power level, and if you are working at low CMOS
frequencies you will require a lower laser power level.
The laser power level should be set at 11 or higher. When the power level is below 9, the
wavelength is unstable. This may cause an unacceptably high uncertainty of measurement.
To configure for optimal signal quality, you should set the initial laser power to 20 when
working with lenses greater than 25 mm. When working with 25 mm lenses, set the initial laser
power to 11. Gradually change the power while monitoring the following parameters in 5.7.2.
• Total is within the acceptable range between 1200 and 16,000; in extreme
cases (objects with different surface finishes, steep angles, etc.) values from
900 to 18000 will allow a fair measurement. If the Total is too low, then increase
the power level. If the Total is too high, then decrease the power level.
• SNR is at its’ maximal value over the range of the power.
NOTE:
When scanning with or 25mm lens, on diffusive white materials, it may be necessary to scan
using a power level lower than 11.
To set the laser’s power level:
• In the Settings section of the sensor screen (see Figure 5-4), set the Power field to 0.
• Increase the power while monitoring the SNR. Continue to increase the
power level until the SNR decreases, and then decrease the power by one
level. Repeat the process to set the Fine power field.
Figure 5-4 Settings Section of the sensor Screen
NOTES:
If the SNR begins to decrease only when the power level is less than 11,
increase the Working Frequency and repeat the process.
This procedure is sufficient in most cases. However, for optimal tuning of
the system, results obtained with the SNR reading are not sufficient and
you must also use the signal display. For more information about using the
signal display, refer to Section 5.6.6 Optimizing Signal Quality
5-24
5.7.5 Using the Vertical Distance Scale
Use the vertical distance scale to ensure that the object is within the working range of the lens.
The vertical distance scale provides a graphical and digital display of the lens’ working range
and the object’s position within the working range. Figure 5-5 displays the vertical distance
scale.
Figure 5-5: sensor Screen - The Vertical Distance Scale
The numbers on the left side of the vertical distance scale represent the working range of the
lens. The bottom number represents the furthest point (from the lens) in the working range,
and is always 0. The top number represents the length of the working range. The middle
number represents the actual distance from the object’s surface at the point where the laser
beam is directed and the bottom of the working range. If this point is not within the working
range, the message Out of Range appears across the screen.
The numbers on the right side of the vertical distance scale represent the sensor location
relative to the working range. The bottom number represents the farthest distance that the lens
can measure. The top number represents the nearest distance that the lens can measure. The
middle number represents the absolute distance from the lens to the object’s surface at the
point where the laser beam is directed.
The location of the object’s surface is indicated graphically by a horizontal cursor in the middle
column.
For example, in Figure 5-5, the working range is 1.6493 mm and is located between
14.83 mm and 12.951 mm from the probe. The sensor is currently directed at a point in the
object surface that is near the top of the working range, 13.181 mm from the probe.
Move the object so that the laser beam is on the highest point that you want to measure on the
object and check the vertical distance scale to make sure the object is still within range. Then
move the object so the laser beam falls on the lowest point that you want to measure on the
object and check that the object is still within range. If necessary, adjust the probe’s height so
that all areas of the object that you want to measure are within range.
5-25
Place the object as close as possible to the center of the working range. When the laser beam
falls on a point halfway between the highest and lowest points you want to measure, the
cursor in the vertical distance scale should be approximately at the center of the range. If the
cursor is not approximately at the center of the range, adjust the height of the probe. If you
change the height of the probe, readjust the power level.
5.7.6 Optimizing Signal Quality
The ideal signal would be sinusoidal except in its center area. The Z values are calculated
from the dominant frequency of the signal’s FFT. As the signal’s resemblance to a sine
increases, the measurement precision increases.
To optimize the signal quality, follow these guidelines:
•
Strengthen the signal. Always try to have the strongest signal without
saturation. You can control the signal strength through the power and
Working Frequency settings. First adjust the laser power. If this is
inadequate, adjust the Working Frequency. For more information about
adjusting the power and Working Frequency settings, refer to
Section 5.7.4 Adjusting the Smart Probe settings
•
Consider the object’s surface and set the sensor settings accordingly. For
more information on various surface types, refer to Section 5.7.3:
Considering the Object’s Surface
5.7.7 Analyzing the Signal
Analyze the signal quality to ensure that the power level, Working Frequency, and other
parameters are set correctly, as well as to ensure that the sensor is positioned correctly in
relation to the object. You can analyze the signal quality:
• Using the Signal to Noise Ratio (SNR).
• Using the Total values
5.7.7.1 Using the sensor Screen Graph
The sensor screen graph displays the raw signals detected by the CMOSs. This graph is very
useful in analyzing the signal and improving signal quality.
5.7.7.2 Ideal sensor Signal Graph
In an ideal sensor signal graph, the channels appear as two perfect sine waves that are out of
phase by 180°. The Figure 5-6 shows an example of a good signal.
Figure 5-6: An Example of a Good sensor Signal
5-26
5.7.7.3 Saturated Signal
A saturated signal occurs when the laser power level is set too high. In a saturated signal, the
bottom of the wave is clipped, as shown in Figure 5-7. To improve a saturated signal, reduce
the power level. However, if you are measuring a reflective surface, a semi-saturated signal
results in the best SNR ratio.
Figure 5-7: A Saturated Signal
5.7.7.4 Fully Saturated Signal
A fully saturated signal occurs when the laser power is too high and/or the Working Frequency
is too low. When the signal is fully saturated, the SNR ratio is very low (close to 0) and an outof-range message appears on the vertical distance scale. To improve the signal, lower the
power level and/or raise the Working Frequency. The Figure 5-8 illustrates a fully saturated
signal.
Figure 5-8: A Fully Saturated Signal
5-27
5.7.7.5 Low-Level Signal
A low-level signal occurs when the amount of light reflected off the object is not enough for the
CMOS detectors. This may occur if the object’s surface has low reflectivity or if the object’s
surface scatters the laser light (like the reflection from a mirror-like ball). To improve the signal,
raise the power level and/or lower the Working Frequency. The Figure 5-9 illustrates a ‘flat’,
low-level signal.
Figure 5-9: A Low-Level Signal
5.7.7.6 Signal due to multiple reflection or split last spot
A signal due to multiple reflection or split spot (different distances measured simultaneously) is
shown in Figure 5-10.
Figure 5-10: sensor signals from multiple reflection or split laser spot
5-28
5.7.7.7 Smart Probe too close to object
The Frequency graph, as well as other indicators, may indicate that the sensor is too close to
the object you are measuring. If this is the case, increase the distance between the sensor and
the object until the object is within working range. The following circumstances indicate that
the sensor is too close to the object:
• The signal graph looks similar to the graph displayed in Figure 5-11. The
signal is wider and starts before pixel 300.There is a low SNR value
• Numbers appear on the vertical distance scale, but the cursor in the middle of
the scale moves in the opposite direction than expected (i.e., as you move
the object closer, the cursor moves lower on the scale). These numbers are
not correct. As you move the sensor further, an out-of-range message
appears and then the correct numbers begin to appear on the scale. For
more information about the vertical distance scale, refer to Section 5.7.5.
Figure 5-11: sensor too close to object
5-29
5.7.7.8 Probe too far from object
The Frequency graph, as well as other indicators, may indicate that the sensor is too far from
the object you are measuring. If the sensor is too distant from its target, decrease the distance
between the sensor and the object until the object falls within the working range. The following
circumstances indicate that the sensor is too far from the object:
• The signal graph looks similar to the graph displayed in Figure 5-12. The
signal looks ‘narrow’ and starts beyond pixel 500.
• An out-of-range message appears on the vertical distance scale. As you
move the sensor further and reenter the working range of the lens, the
applicable numbers reappear on the vertical distance scale. For more
information about the vertical distance scale, refer to Using the Vertical
Distance Scale
• There is a low SNR value.
Figure 5-12: sensor too far from object
5.7.7.9 Using the Signal to Noise (SNR) Ratio
In the sensor screen, the Signal quality (SNR) field represents the signal to noise ratio. SNR
characterizes the measurement quality and may range from 0% to 100%. A high SNR value
indicates high signal quality, which results in high measurement quality. Generally, a SNR
value below 30% indicates a not reliable measurement, and a SNR value above 50% indicates
accurate measurement results.
NOTE
Values between 30% and 50% are acceptable only if they are consistent over
the entire object to be measured. This may occur in the case of
semitransparent or absorbing materials, usually plastics or ceramics; use of
objectives with large focal length (75mm and up) is recommended.
5-30
5.7.7.10 Using Total
The Total represents a value proportional to the area limited by the signal envelope and
increases with signal intensity. Signals with small total values may not be as accurate as
expected, even though the SNR is high. Recommended values: 2000 to 16000, though values
of 1200 to 18000 may still yield accurate results in most cases.
5.7.7.11 Considering the Object’s Surface
The optical properties of different surface types can affect the measurement results. Following
are some guidelines on the optical properties of various surface types.
• Materials that scatter light tend to provide good, even signals. Some
examples are paint, molded plastics, and matte surface metals.
• Light-colored materials reflect more light than dark-colored materials and
therefore need a lower power setting. Adjust the laser power accordingly.
• Reflective surfaces with simple contours (flat surfaces, simple angles, etc)
may be difficult to measure. For best results, try tilting the object so that it
forms an angle of about 0.5-2.5 degrees around an axis parallel to the
probe’s bottom plane. This deflects the reflected beam away from the
instrument’s optical axis. With partially reflective surfaces, it is also
recommended to eliminate bad points in the scan.
• Reflective surfaces with complex contours (waves, holes, etc.), and
translucent surfaces, cannot be measured unless coated with paint or talcum
powder. To coat a purely reflective surface, do one of the following:
• Apply a thin, flat layer of white spray paint to the surface. Apply the layer in
several very thin coats until the surface is about half coated. It is not
necessary to cover the surface completely. If the spray paint is carefully
applied, the added thickness should be less than 1.5 µm and the
measurement results are only affected to the extent of 0.5 - 1 µm.
• Apply a non-permanent coating by dusting the object very lightly with talcum
powder (baby powder) or spraying it with a spray spot remover, which also
applies a thin coat of talc to the surface. If done carefully, this method applies
a coat with a thickness of about 1 µm.
• The angle formed by the object’s surface and the laser beam has a strong
effect on the quality of measurement. When the object’s surface is nonreflective, the sensor can measure the object at an angle of up to 85 degrees.
If the object’s surface is reflective, the maximum angle is smaller. Try to keep
from exceeding these measurement angles wherever possible.
•
•
•
If you are measuring an angle, rotate the object to find an angle that results in
a good signal throughout the scanning area
When scanning with a 25mm lens, on diffusive white materials, it may be
necessary to scan using a power level lower than 11. Note that the resultant
measurements may not be stable over time.
When scanning non-homogeneous surfaces with both diffusive and reflective
components (for example, an object that is black and white, or an object that
is partly reflective and partly non-reflective), you should perform multiple
scans. Change the laser power level between scans so that every portion of
the object is scanned at least once with the appropriate settings. Then
combine the results into one full scan of the object using the highest SNR
When using a lens with a working range that is smaller than the required
height range, you cannot measure the whole object in a single scan. In this
case, you can perform several scans at different heights in order to cover the
5-31
entire required height range. You can set the reference heights for each scan
as follows:
o Set a reference height using an external encoder.
o Measure a reference height on the object surface using the
Smart.
o Measure the reference height on an external reference
surface (e.g. gage blocks) using the Smart.
o After performing the multiple scans, the scans can be combined into a single
image as follows:
o
o
•
•
Correct the Z values by adding the various reference heights.
For each point scanned, choose the optimal Z value from the different
measurements, based on maximal SNR
When measuring objects which return a very low signal intensity (for
example: objects made of graphite or black rubber), and using a large lens
(75mm and up), the sampling rate can be set as low as 20Hz, in order to
increase the exposure time and the Total value
When scanning features that generate multiple reflections (grooves, blind
holes, etc.) it is recommended to scan in the direction of the sensor base
plane. This is due to the fact that the probe’s optical aperture is smaller in this
direction than in the perpendicular direction. In order to get better results or to
eliminate bad measurements it is recommended to scan in the direction of the
smallest aperture value, so that the parasite signals (from multiple reflections)
are minimized.
Note that the width of the spot size increases faster in this direction (parallel
to base) than in the other direction when moving close to the working range
limits and generally yields a higher measurement ‘noise’.
5-32
5.8 Acquiring Measurements
After the parameters for a scan are set, one can perform a variety of measurement acquisition
scans by pressing the Measurement Acquisition button. After this button is pressed, the
Measurement Acquisition screen appears:
Figure 5-13: The Measurement Acquisition Dialog
5.8.1 Time mode
In Time mode measurements are taken at preset time intervals and are controlled by an
internal clock. The period between measurements is equal to 1/scan frequency.
5.8.2 Pulse mode
In Pulse mode measurements are acquired when triggered by external pulses generated by a
motor encoder, wave generator or other source. A measurement is acquired at an interval of
pulses determined by the dilution factor. Therefore, a dilution of 2, a measurement will be
acquired at every other pulse. For more information about operating the sensor in pulse
mode, please refer to the OEM manual.
5.8.3 Number of Measurements
There are two possible ways of determining the quantity of measurements during a scan
session.
• Infinite – Measurements will be continuously acquired in a single scan until
the user presses the <Stop> button. This option only works for a single scan.
• Finite – A fixed number of measurements are acquired for each scan. The
number of scans is entered in the Number of Scans box.
5.8.4 Data Transfer Type
There are three possible data delivery types that can be utilized to acquire measurements:
• Single sensor Stream – Acquires measurements through the single sensor
stream measurement functions
5-33
•
•
Single sensor Buffer – Acquires measurements through the single sensor
buffer measurement functions,
Multi sensor – Acquires measurements through the multi-probe
measurement functions.
5.8.5 Save File Format
After the scanning parameters have been set, the desired data transfer type, and mode, press
the <Run>
Measurements can be saved in one of three formats
• Text – Saves measurements in standard text format.
• Job – Saves measurements in a format which one can use the viewer tool.
Only works for single sensor acquisition.
• CSV – Saves measurement in a format suitable for a viewing by in
spreadsheet.
5.8.6 Performing an Acquisition of Measurements
After the scanning parameters have been set, the desired data transfer type, and mode, press
the <Run> button to start the measurement acquisition process. After a successful run, the
measurements will appear in the data format selected in the Save File Format box. When job
file is selected for the saved file format, the viewer will be invoked and one can visually see
and analyze the data. See Figure 5-14 below:
Figure 5-14: A job file being displayed by the Viewer application
For an-depth treatment on how to use the Viewer to analyze measurement data, please look
at the Viewer help file.
5.9 Other Functions
5.9.1 ShowProbeDialog
The sensor dialog helps the user set up the object for optimal scanning. The sensor dialog
displays the parameters of the current lens and single point scan results with SNR, and the
user can try to improve the scan quality by changing the power level and/or the distance
between the sensor and the object.
5-34
Working with Multiple Probes
6 Working with Multiple Probes
6.1 Introduction
This chapter will explain how to integrate the ability to simultaneously receive measurements
from more than one probe. One may use up to 64 probes to perform multi-probe
measurement acquisition. Note: the maximum number of probes that can operate on a single
host PC depends on the size of the network hub and its processing power.
6.2 Hardware Setup for Multi-Probe Acquisition
To work with more than one probe, a network hub of bandwidth 100Mbps or greater must be
used to serve a connection between the probes and the host PC. First configure the LAN card
of the host PC as described in 3.3. The ETHERNET cable from the host PC then should be
connected to the network hub. Each sensor will then be connected to this hub. See the figure
below.
Communication
BOX
RJ
45
RJ
45
PWR
Communication
BOX
RJ
45
RJ
45
PWR
Communication
BOX
RJ
45
RJ
45
PWR
Fast
Ethernet
10/100
HUB/
Switch
RJ
45
RJ
45
LAN
Card
A
PC
RJ
45
LAN
Card
B
RJ
45
Communication
BOX
RJ
45
PWR
PWR
RJ
45
External
Trigger from
encoder
Automatic IP recognition and allocation of sensor based on Initial IP exist or manually
entered into PC Lan card.
System can be expanded using several Lan cards and Fast Ethernet Hub/Switch units.
Additional SW procedures in Application SW in order to separate data stream and
categorize it by sensor (using S/N of probe)
6-35
Working with Multiple Probes
6.3 Programming Applications to Work with Multiple Probes
The Smart32 API exports the CSmart class that is scalable to the number of probes detected
on the local subnet of the LAN discussed above. After the system is powered on, the software
application must call the Smart32 function DiscoverProbes which finds all connected and
powered probes on the local subnet and returns their number. The application must create a
new instance of CSmart for each detected probe. For software examples in C++ please refer
to Optimet API and the software code for the Probe Tester application located in the Smart32
Interface folder of the SDK.
6-36
The System Input/Output Description
7 The System Input/Output Description
7.1 Introduction
This chapter reviews the input/output discrete signals as follows:
External Trigger Input – Describes how to use external triggers to drive the
probe.
Analog Output – Describes how to use analog output to obtain additional
measurement information.
Start of Measurement Output – (also called ROG) describes how to use the
Start of Measurement output signal to synchronize the current stage location with
the measurement
7.2 External Trigger Inputs
The sensor can be externally triggered to perform a measurement at a pre-set rate. This
feature is used to synchronize the sensor to the host system.
The sensor can measure up to the maximum rate in any of the measurement modes. This
section describes the hardware and software interface of the external trigger inputs.
7.2.1 Hardware Description
On the connection terminal of the OPS communication box, there is a connection used for an
external trigger input. The input is a standard differential TTL level signal
Pin Number
Description
7
(+)Enc AX (External trigger signal).
8
(-)Enc AX.
Table 6-1 Trigger pin assignments
7.2.2 External Trigger Signal
Triggering is established on the RISING-EDGE of the signal (+)Enc AX with a minimum pulse
width of 10 µsec.
7.2.3 Single ended Trigger signal
Case using a single ended signal- the signal should be connected to the (+)Enc AX
And signal (-)Enc AX should be puuled-up to +5V with a 10K resistor.
7.2.4 External Trigger Dilution of Signals
In addition the External trigger mode facilitates an option for diluting of the incoming triggers.
Dilution is performed by a soft-ware command
.
Example 1: Using trigger input rising edges, with 200 Hz frequency (short positive pulses),
and N=1. In this case, there are 200x1 active edges. Measurements are at 200 Hz.
Example 2: Using trigger input rising edges, with 10000 Hz frequency (short positive pulses),
and N=20. In this case, there are 10000 active edges, and measurements are at 10000/20
7-37
=500 Hz.
7.3 Timing diagrams for the External Trigger
7.3.1 General sequence
Internal
ROG
Ext_Trig
Data
Accumulating
Data
Readout
Calculations
& Output
Figure 6-1 General sequence
7.3.2 Timing blow-up
In te rn a l
ROG
E x t _ T r ig
D a ta
A c c u m u l a t in g
D a ta
R eadout
C a lc u la t io n s
& O u tp u t
1 /S e t F re q
300uSec
250uS ec
Figure 6-2 Timing blow-up
7-38
7.4 Analog Output
The sensor features an analog output voltage that indicates the measured Z value. It
does not provide other information about the measurement, such as the SNR Etc.
7.4.1 Analog Output Specifications
Table 6-1 below defines the analog output specifications.
This analog output is used for display only and should not be used to drive mechanisms.
Voltage Output, Z = Minimum
-4.5V +/- 5 mV
Voltage Output, Z = Maximum
+4.5V +/- 5 mV
(1)
(1)
.
(1)
.
Resolution (Bits)
11
.
Output uncertainty of measurement
(relative to Z values)
W.R./1000 +/- 0.1% of differential height or
(1) (2)
actual used range
.
Output Noise Level
10 mV peak-to-peak (max)
Output Impedance
100 ohm.
Maximum Current Drive
(normal operation)
1 mA
Absolute Maximum Current Drive
20 mA
Output Rise/Fall Time
200 us (0 to 99%, step change in voltage).
Initial Output Value (after power up)
0.0V +/- 5mV.
(4)
(1) (3)
.
.
(5)
.
Table 6-2 Analog Output Specifications
NOTES:
(1) Analog output is generated using a 12 bit digital-to-analog converter, which yields an lsb of +/2.4mV. For practical reasons 10mV should be considered the uncertainty of measurement.
(2) Accuracy refers to analog output voltage relative to the Z value measured by the system. The
measurement accuracy of Z is not included in this value.
(3) Value depends on the measurement method and detection system employed and the environment
in which the measurement is made (lens, material, speed).
(4) Maximum Current Drive is based on a 1% error deviation from calibrated voltage output.
(5) This refers to maximum limit to avoid damage to the output buffer.
7.5 Start of Measurement Output (ROG – Read Out Gate)
A pin located on the OPS communication box labeled “ROG” facilitates the “start of
measurement “signal.
In this section the term ‘measurement’ is defined as the integration of a light pattern on a
CMOS, which is used to calculate the distance from the sensor to the object being measured.
The CMOS chip contains photodiode sensors, which accumulate an electrical charge
proportional to the amount of light integrated. This electrical charge is then converted to an
analog signal. The analog signal is outputted from the CMOS chip and analyzed in the probe.
The measurement time is controlled by the signal ROG. When the ROG is high, the analog
signal reflecting the previous measurement is outputted, and the CMOS integrates the light
entering the photodiode sensors for the next measurement. When the ROG is low, the
photodiode sensors are discharged. (Note that the photodiode sensors continue to integrate
light even when the ROG is low). Therefore, the new measurement begins and the previous
measurement ends when the ROG goes high.
The ROG is high for approximately 1/Sampling Frequency. The Sampling frequency is in the
7-39
range of 50 – 9000 Hz; therefore, ROG is high for between approximately 1/freq ms. ROG is
low for 5.0 µs.
Figure 6-3 contains a timing diagram of the ROG signal:
ROG
Mesuring Frequency
Integration N
Integration N+1
Integration N+2
Clculation N-1
Calculation N
Clculation N+1
Output N-2
Output N-1
Output N
Figure 6-3 Timing Diagram of the ROG signal
In order to prevent saturation of the photodiode sensors, they are constantly being emptied. In
other words, the ROG signal is active all the time, even when no measurements are requested
via the software. A modified ROG signal (called START_OF_MEASUREMENT) is generated
from the ROG signal. START_OF_MEASUREMENT is active only for measurements
requested by the user.
Figure 6-4 contains a timing diagram of the START_OF_MEASUREMENT signal:
Figure 6-4 Timing Diagram of the START_OF_MEASUREMENT signal
It is anticipated that the customer hardware will latch the current location of the stages when it
detects a rising edge on the START_OF_MEASUREMENT signal. This information will be
used to provide the precise location of the measurements.
NOTES:
START_OF_MEASUREMENT is a standard 5V TTL output. The reference
GND voltage to this signal may be taken from the OPS communication box
connection.
The first START_OF_MEASUREMENT pulse is extraneous and should be
ignored.
The measurement window is active until after the end of the final
measurement. Therefore there are likely to be additional
START_OF_MEASUREMENT pulses at the end of the scan. These
additional START_OF_MEASUREMENT pulses should be ignored.
7-40
7.6 External Trigger Mode Operation
When driving the sensor in external trigger mode, missing or incorrect measurements may
occur. Readings of zero distance or measurements that were expected but never registered
indicate missing or incorrect measurements. These errors may be caused by problems with
any of the following:
7.6.1 Time between Pulses
The sensor can measure at up to a rate of 9000Hz (3000Hz in the Standard version). The
sensor can perform each measurement as long as the pulse timing of the external trigger is
greater than or equal to 1/9000 sec (1/3000 sec in the Standard version).
Remark: The above is valid for ideal external pulses without Jitter. Jitter can cause the pulse
timing to be lower than 1/9000 sec resulting in missed measurements.
In case of known jitter the sensor frequency should be set to a lower frequency to suite the
anount of the jitter
7.6.2 Hardware Configuration
If the external trigger inputs are not properly connected to the OPS communication box, the
pulses may be badly timed and which can cause measurements to be missed. Check the
hardware configuration to ensure that:
a. Standard TTL or CMOS type receivers are used at the input.
b. The correct current drive is being used (2.2 mA minimum to 5 mA
maximum).
c. A good common ground exists between OPS communication box and system
7-41
7.7 Timing Diagram elaborations
7.7.1 Time Mode
TIMING MODE FREQ = 1KHz
1KHz --- 1 mSEC
0.5uS
N
ROG
N+1
N+2
Integration
300 uSec.
Read out
Calculations
N-1
300 uSec.
N
N+1
300 uSec.
300 uSec.
Communication
Transmit/receive
300 uSec.
TIMING MODE FREQ = 3KHz
333mSEC
mSEC
3KHz 0.33
ROG
N
N+1
N+2
N
N+1
N+2
N
N+1
N+2
300 uSec.
300
N-1uSec.
300 uSec.
300 uSec.
Calculations
300 uSec.
300 uSec.
300 uSec.
300 uSec.
Communication
Transmit/receive
300 uSec.
300 uSec.
300 uSec.
300 uSec.
N
N+1
N+2
Integration
Read out
N
N+1
N
N+2
300 uSec.
N+1
300 uSec.
300 uSec.
300 uSec.
300 uSec.
300 uSec.
300 uSec.
N+2
300 uSec.
7-42
7.7.2 External Triggering
EXT-PULSE MODE PULE
Repetition = 1KHz
Freq = 3Khz
1KHz --- 1 mSEC
EXTERNAL 0.5uS
PULSE
N
N+1
N+2
300NuSec.
N+1
N
Integration
N
300 uSec.
Read out
300 uSec.
300 uSec.
N
Calculations
300 uSec.
300 uSec.
N
Communication
Transmit/receive
300 uSec.
300 uSec.
EXTERNAL PULSE MODE
Repetition = 3KHz FREQ = 3KHz
333music
mSEC
3KHz 0.33
External pulse
N
N+1
N+2
N
N+1
N+2
300 uSec.
300
N-1uSec.
300 uSec.
Calculations
300 uSec.
300 uSec.
300 uSec.
300 uSec.
Communication
Transmit/receive
300 uSec.
300 uSec.
300 uSec.
300 uSec.
N
N+1
N+2
Integration
N
Read out
N+1
N
N+2
300 uSec.
N+1
N
N+2
300 uSec.
N+1
300 uSec.
300 uSec.
300 uSec.
300 uSec.
300 uSec.
300 uSec.
N+2
300 uSec.
7-43
ConoProbe Mark 10 OPS Embedded Auto-Exposure
8 ConoProbe Mark 10 OPS Embedded AutoExposure
8.1 Main Features
•
•
•
Embedded Auto-Exposure operates in probes based on Hamamatsu detectors using
the electronic shatter detectors feature (controlling the time of integration).
The auto-exposure operates within the preset of CMOS_Frequency and Laser_Power
limitations.
The auto exposure monitors the the TOTAL parameter. When a preset upper or lower
TOTAL limit is exceeded, the algorithm is triggered to bring the TOTAL back with in the
limits.
8.2 Algorithm Timing
Initial situation is CMOS freq, is set and init exposure is set to 100% of CMOS freq. Total is
calculated on-the-flight between start/end pixel at the end of the second cycle (read out cycle),
by the end of the second cycle the exposure/unexposure is calculated and is ready for the
coming cycle .
And so on, meaning auto exposure calculations dose not add latency to output measurements.
ROG
Exposure
100% Exp.
Exposure
Integration1
Un Exposure
50% Exp.
Exposure
Integration2
Un Exposure
Integration1
Un Exposure Exposure
Signal
above limit
Integration1
goto
37.5% Exp
Same for Read 0
ALL
Exposure
Un Exposure
Un Exposure
Exposure
Integration4
Un Exposure
Integration3
Exposure
Un Exposure
Read 2
Exposure
Integration4
Exposure
Un Exposure
Integration3
Integration2
Exp 1
Exposure
Integration3
Integration2
Read 1
Exp 0
Exposure
Exposure
Integration4
Read 3
Exp 2
Exp 3
8-44
ConoProbe Mark 10 OPS Embedded Auto-Exposure
8.3 The Algorithm
Starting at 100% exposure time, the total is checked. If it exceeds the upper limit, the exposure
time is reduced by 25% until total reaches a value below upper limit.
If the total value is below lower limit the exposure time is increased by 25% of the un-exposure
time, until the total reaches a value above lower limit.
The maximum value of exposure time is set by CMOS frequency where the minimum
exposure time is constant for all frequencies
8.4 Mis-Measurements
The number of cycles that can create a mis-measurement due to the Auto Exposure algorithm
depends on the contrast between the objects, and can vary between 1-9 cycles (CMOS
frequency periods) .
8.5 Best Practices
In order to achieve good results, take a measurement on two different surfaces.
The initial setting should be made on a dark surface, to fully open the exposure. When
measuring a bright surface, shorten the exposure time so as not to saturate the sensors.
8-45
Appendix A: ConoProbe Mark10/10HD Specifics
9 Appendix A: ConoProbe Mark10/10HD Specifics
9.1 Physical Dimensions
NOTE:
Optimet reserves the right to make changes to its products without notice, and
advises all customers to contact Optimet in order to obtain the latest
information.
Figure 1–2 ConoProbe Mark10 Dimensions no Lens
9-46
Appendix A: ConoProbe Mark10/10HD Specifics
LENS
L
F50; F75;
167
F100; F150
F200
165
F250
168
LENS
L
LENS
L
LENS
L
85DS
153
25G
164
F40
198.5
ConoProbe Mark 10 – with lenses dimension.
9-47
9.2 Specifications and Lens Type
Below is a table of specifications that are arranged by type and focal length. All lenses that come with the specific Mark10/10HD are custom
calibrated to that particular probe.
Technical Specifications
Vertical Axis Z
Working Range (mm)
(4)
Standoff (mm)
Standoff tolerance (±mm)
(1)
Static Resolution (µm)
(2)
Precision (µm)
(5)
Linearity (±%)
(3)
Reproducibility 1σ (µm)
Lateral Axis X
(9)
Lateral resolution (µm)
(6)
Laser Spot Size (X) (µm)
(7)
Angular coverage (°)
Weight
Lens (g)
Sensor (g)
Communication Box (g)
Data Handling
Data Rate
Interface
Communication
Control Discrete Signal
(Optional) Analog signal
(8)
Working temperature
Light source
Type
Wavelength
Output
Laser Class
Lens Assembly Type (By Focal Length in mm)
Standard**
High Definition**
250*
75
100
150
200
16HD* 25GHD* 40HD*
50HD
DS***
85
1.4
45
0.2
<0.1
2
0.075
0.4
2
42
0.5
<0.1
2.5
0.075
0.5
30
75
2
0.1
12
0.05
4
4
6
150
6
10
150
10
15
150
28
36
170
40
140
20
20
16*
25G
40
50
0.6
9.5
0.1
<0.1
2
0.075
0.15
1.8
18
0.4
<0.1
3
0.075
0.4
4
44
1
<0.1
4
0.075
0.6
8
44
1
<0.1
6
0.075
1
18
70
2
<0.1
10
0.075
2
35
95
3
0.1
15
0.075
4
70
145
6
0.35
35
0.075
15
125
200
7
0.75
70
0.075
25
180
250
9
0.1
100
0.075
35
0.2
9.6
0.05
<0.1
0.5
0.075
0.1
0.6
18.25
0.1
<0.1
1
0.075
0.2
5
16
150
12
18
150
14
25
150
15
26
170
25
35
170
35
43
170
50
60
170
72
84
170
94
107
170
2
4
150
460
40
140
20
20
20
20
20
20
460
700
96
Up to 9,000 pps
Ethernet 10/100/1000 UDP
ROG – output
External trigger – input
Boundary ranging ±4.5 V ± 0.004V
Linearity 0.1%
Max Data rate – up to 7,000 pps
18 to 35°C
Red laser
655 nm
<1 mW
class II - FDA (CDRH) 1040.10 ; class 2 – IEC 60825-1
NOTES:
*
will be released on request
** Other external lenses may be delivered upon request.
*** For DS 85mm lens, performance is guaranteed for the central 80% of the working range.
(1)
The Z-resolution of the sensor may be defined as follows: the smallest, reliable differential
measurement that can be made by the ConoProbe system in its Z-axis.
(2)
As measured on a flat diffusive surface. sampling step of spot size, average over 200 points
in each scan. Estimated over a relative distance of about half working range (WR) in the
middle of WR. Entire working range has up to 2 times less precision.
(3)
As measured on a flat diffusive surface, average of 5 scans offset in “y” direction. sampling
step of spot size, average over 200 points in each scan. Estimated over a relative distance
of about half working range (WR) in the middle of WR.
(4)
The distance from the tip of the objective lens housing to the center of the working range.
(5)
Measured on a flat angled diffusive surface, ratio of maximum measurement error over the
full working range.
(6)
Spot size is the minimum effective width measurement that contains 50% of the energy
delivered.
(7)
Up to 60° the precision is dependent on the typical precision of the used lens [at least 200
points scan, covering maximum 80% of working range, on surface per note (1)], between 60°
to 85° the angular precision is better than 0.5°.
(8)
The sensor is calibrated at 22-24°C. The precision has a temperature dependence of
0.02%/°C of all lenses beside lenses 200 mm and 250 mm that has 0.07%/°C.
(9)
Define as the minimum scan step within dynamic resolution increasing by 20%.
Appendix B: ConoProbe Mark10/10HD OPS
10 Appendix B: ConoProbe Mark10/10HD OPS
Optimet Position Synchronizer (OPS) is a special firmware module embedded in Optimet probe's
electronics which records encoders output and synchronizes the accurate position of up to 3
system axis together with the sensor measurements.
The OPS supports up to three axis, incremental encoder data or Pulse and direction commands.
10-50
Application HW Interface
11 Application HW Interface
11.1 Content
OPS Communication Box
The OPS communication box is located between the sensor and the PC. Its function is to
supply the probe's electrical power, communication to PC, and provides the sensor with
the three motion encoders signals.
Harness
The Harness supports a 25 pin D-Type connector on the OPS communication box side and
15 pin and 9 pin D-Type connector on the sensor side.
Sensor
The sensor is a Mark 10 ConoProbe. It has two D-Type connectors located in its back; one
(15 pin) for standard communication and power supply and the 9 Pin for encoder input
signals.
11-51
Connection Diagram
- Incremental encoder connection
- Pulse & Direction connection
11-52
•
Please use Connection label on back of OPS communication box for proper
connections in regard to the pin No on connector.
Electrical requirements
- All encoder input signals are of TTL, CMOS compatible levels.
- Encoder input signals are differential connected directly to encoders.
- +5v Supply on communication terminal max current = 1Amp
- In case single ended signals are used each negative signal of the axis (suffix N) has to be
“pulled up” with a 1K Ohm resistor connected to +4.5v (pin3 on communication terminal).
- Same rules apply for Pulse/Direction signals.
- For proper operation all system components should be on Common Ground.
11-53
Operational Modes
12 Operational Modes
12.1 General
The sensor can be operated both in Time-Mode or External Trigger-Mode. In both cases –
encoders / pulse & direction - pulse counting accompanies each measurement and the
information is sent to the PC via the Ethernet communication.
Using Incremental encoders the number of encoder lines is multiplied by four, using rising and
falling edges of each encoder output (for example. - Encoder X (A), Encoder X (B)).
Sampling of encoder position is done with a high frequency clock enabling very fast movement
and high signal rate of encoder.
Establishing the exact position of the encoders in relation to the sensor measurement point of
time is set in the middle of the optical data acquisition performed by the sensor (independent of
the data acquisition frequency).
Each “begin_of_measurement” command all Encoders counting outputs are cleared and a new
session of encoder pulses counting begins.
12.2 Time Mode
In Time Mode the sensor performs its standard tasks and is controlled by application API
commands with extensions that enable receiving the measurement with the encoder information.
The setup for measurement is as with the standard Mark 10 probe.
12.3 External trigger Mode
In External trigger Mode the sensor performs its standard tasks and is controlled by application
API commands with extensions enabling receiving the measurement with the encoder
information. The setup for measurement is as with the standard Mark 10 probe.
Encoder input AX(+) is used as the external trigger for this mode (in parallel to positioning
counting)
All Dilution calculations are done the same way as with the standard Mark 10 sensor
12-54
Appendix C: Mark10/10HD general information
13 Appendix C: Mark10/10HD general information
Probe
ConoProbe Mark 10
Size
80X160X60 mm
Weight
700gr
Communication
Ethernet
Software
Smart32.dll, .NET Assembly
Linearity
0.1%
Lens availability
Extended lenses & periscopes
TV camera option
Yes
Multiple sensor interface to
one PC
Yes
Angle coverage
170 degrees on both axes
Intensity dynamic range
Large
CMM interface capability
No
Robustness
Very robust
Measuring speed
Up to 9000 Hz
Temperature dependence
0.02 % /˚C
Temperature compensation
No
Auto Exposure control
Yes
ROHS electronics
Yes
Input power
12V DC
13-55

OEM Manual for OPTIMET`S Mark10/10HD

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