VTi Glovebox Brochure

Vacuum Technology Inc.
Super Purified Glove Box
Gas Purification System
Vacuum Technology Inc.
15 Great Republic Drive, Unit #4
Gloucester, Massachusetts 01930
USA
Toll-free: 1-800-577-5780
Phone: （978）879-4302
Fax:（978）879-4387
E-mail: info@vti-glovebox.com
Website: www.vti-glovebox.com
Business card
About Us
Vacuum Technology Inc. is a US based manufacturer that is committed to developing innovative products for clients around the world.
Product Features
High Capacity Purifier
Rapid removal of H2O and O2;
With its North American facility in Gloucester, Massachusetts USA , VTi offers Super Purified Glove Boxes, Gas Purification Systems as well as ancillary products
Attainable purity: H20＜1ppm, O2＜1ppm;
and accessories. In addition to the standard product lines, we are proud of our technical team’s ability to work together with our clients to create custom solutions.
Long interval between generations.
VTi’s high-quality products and dedicated service has been put in place to gain respect throughout the world-wide marketplace.
PLC Control and HMI
Through collaboration with various international market-leading manufacturers and through comprehensive technology sharing with Mikrouna (over fifteen years
Automatic Purging, Circulation, Regeneration, Pressure control;
of Glove Box experience) , VTi integrates research, manufacturing, sales and customer service with the goal of becoming a world-class leading company.
User Friendly Interface.
Efficient Valve Design - Less connections means low leakage
Vacuum Technology, Inc. will continue to develop innovative and high-quality products while providing excellent service in order to fulfill our Mission Statement:
“Achieving social goals through advancing technology.”
* Achieving Social Goals
Through Advancing Technology
Various valves to be integrated into one valve-seat made of stainless steel,
less pipe connector to reduce leakage.
Long Life Moisture and Oxygen Analyzers
P2O5 Moisture Sensor: Corrosion resistant, the sensor can be renewed by acid-cleaning
ning
when contaminated by HF or other corrosive atmosphere.
ZrO2 Oxygen Sensor: Solid sensor, long life, to be exposed in the air without consumption.
mption.
Components Sourced from Global “Best in Class” Suppliers
Different Models
From Single Workstation for R & D to multiple workstations for large scale production.
on.
Various Accessories can be integrated into the Glove Box
Moisture and Oxygen Analyzers, Solvent Trap, Freezer, Heated Antechamber, Cold Well,
Microscope Unit, Evaporator, Spin Coater, or many other configurations.
Multiple Options are available to create custom solutions
Wide Applications
Lithium Battery | Physical Chemistry | OLED & PLED | Organometallic | Solar Cell
ell |
Semi-Conductor | Catalyst | Material Handling | Fine Chemicals | Polymeric Materials
terials |
Powder Metallurgy | Special Welding | Special Lamps | Nuclear Technology |
Pharmaceutical | Many other applications
C e rt if ic a t e
Pr oduction Equi pm ent
马萨诸塞州
Gantry CNC Machining Center
CNC Turning Center
Q u a li t y C o m m i tmen t
Production process control is under strict ISO9001 guidelines. QC covers incoming
inspection, manufacturing process inspection and the final inspection before the Glove
Box is shipped.
CNC Press Brake
Helium Mass Spectrometer Leak Detector
ABB Welding Robot
Glovebox Gallery
Glovebox Gallery
Super(1220/750/900)
Customized
ustomized Glove Box with Refrigerator
Refrigerato
Upure(1220/750/900)
(
/
/
)
Superstar(1220/750/900)
Customized
omized Isolator Glove Box with a Rectangular
Recta
ar Chamber
Universal(1800/750/900)
Customized Glove Box for a Solar Energy Application
Universal(2440/750/900)
Customized
ustomized Glove Box for a Solar Energy Application
Applicat
Universal(1220/1000/900)
Customized Glove Box for Sodium Battery
Energy Storage / Welding Production Line
Glovebox Gallery
Glovebox Gallery
马萨诸塞州
州
北京
北
京
Customized Glove Box for a Robotic Welding Project
P
Customized Glove Box for the Wireless Field
Customized Isolator Glove Box for the Electrolyte Field
Customized Isolator Glove Box
y Field
for Electrolyte
Customized
Box
C
t i d Glove
Gl
B for
f High
Hi h
Melting Metal / Tungsten Welding
Customized Isolator Glove Box
for the Pharmaceutical Industry
Glove Box for MOCVD
Customized Glove Box for the Nuclear Field
Production Line for Auto Xenon HID Lamps
Specialized Glove Box for Lithium Battery Production
Type and Size
Dimensions
Standard Glovebox
Double(face to face)
Tri-glove(side by side)
2440/750/900
1800/750/900
1220/1000/900
1500/7500/900
1800/750/900
1500/7500/900
1800/750/900
Depth and height size
mm(39.4in)
mm(29.5in)
Four(side by side)
4800/750/900
2400/1000/900
Four(face to face)
Six(face to face)
3600/1000/900 3660/1200/900
4800/1000/900 4800/1200/900
Eight(face to face)
Twelve(face to face)
mm(35.4in)
2440/750/900
1800/750/900
1200/1000/900
mm(35.4in)
1220/750/900
mm(35.4in)
Workstation
Dimension（mm）L/W/H
Double(side by side)
1220/750/900
mm(39.4in)
mm(31.5in)
mm(35.4in)
1220/750/900
mm(25.6in)
Advanced
Universal
mm(35.4in)
Single
Super/Upure
mm(35.4in)
Type
Items
Standard Glovebox
mm(47.2in)
4800/750/900
2400/1000/900
3600/1000/900 3660/1200/900
4800/1000/900 4800/1200/900
7320/1000/900
7320/1000/900
Length size
Control unit
Siemens S7
Siemens S7
Siemens S7
Touch screen
7〞Screen
7〞Screen
7〞Screen
mm(48.0in)
mm(70.9in),
Single
Purifier
Single
Blower
90m3/h
90/145/180m3/h
Vacuum pump
8m3/h
8/12/16m3/h
8/12/16m3/h
Moisture
﹤1ppm
﹤1ppm
﹤1ppm
Oxygen
﹤1ppm
﹤1ppm
﹤1ppm
Application
R&D type
For R & D in university
and Laboratory
Universal type
For both R&D and
small-scale production
mm(96.0in)
mm(59.1in)
mm(23.6in)
mm(23.6in)
mm(23.6in)
Double
90/145/180m3/h
Module combination
Production type
For large-scale production
mm(48.0in)
*Note:Upure is a special type of glove box, specially made for application of highly corrosive environment, such as Organic, Organometallic, Petrochemical etc.
mm(48.0in)
mm(48.0in)
mm(48.0in)
mm(48.0in)
mm(23.6in)
Specifications
Specifications
Glove Box
Main Antechamber
Box
Size:
Material：
External surface：
Internal surface：
Stainless steel type 304, thickness 3mm(1/8”)
White Paint(Brushed Stainless Steel available)
Brushed Stainless Steel
Inside dimension：
Modular length:1220mm/1500mm/1800mm/2440mm
48.0”/59.1”/70.9”/96.0”
Modular depth: 750mm/1000mm/1200mm
29.5”/39.4”/47.2”
Modular height:900mm
35.4”
Material:
External surface:
Internal surface:
Dia. 360mm(14.2”) or 400mm(15.7”), Length600mm (23.6”)
(other sizes available)
Stainless Steel type 304
White paint (Polished Stainless steel available)
Brushed Stainless Steel
Sliding tray:
Double door:
Stainless Steel type 304
Anodized Aluminum, 10 mm thick(2/5”); Vertical operation
with lifting mechanism(Interlocked door available)
Manometer:
Operation:
Analog display
Touch Screen
Automatic operation via solenoid valves
Sight Windows
Inclined, Safety Glass, thickness 8mm(1/3”) (Polycarbonate available)
Gloves Ports
POM(Polyoxymenthylen),double O-ring seal, 220mm(8.7”) Diameter
Gloves
Mini Antechamber
Butyl, 7” or 8 " cuff dia., 0.015”thick , 32” long (other material and size available)
Dust Filter
0.3μm, one gas inlet, one gas outlet
Shelves
Stainless Steel material, built in 2 levels(adjustable shelves available)
Box Light
Fluorescent lamp ,front and top mounted
Feed-throughs
KF40,1Electrical feed-through, 3~4 standby blind flanges (BNC, Signal, Liquid/Gas feed-throughs available)
Size:
Material:
External surface:
Internal surface:
Dia. 150 mm (5.9”)or Dia.100mm(3.9”), Length300mm(11.8”)
Stainless Steel type 304
Paint white (Polished Stainless Steel available)
Brushed Stainless Steel
Double door:
Manometer:
Operation:
Screw-lock (Interlocked double door available)
Analog display
Manual operation via hand valve
Specifications
Specifications
System Control
Gas Purification Unit
Purifier
Function：
Container material：
Absorber material：
Attainable purity：
Airtight Seal，Removal of H2O and O2
Stainless Steel type 304
4.5kg Copper catalyst
4.5kg Molecular sieve
Less than 1 ppm moisture and oxygen
PLC and HMI：
Siemens S7
Touch Screen：
Siemens 7”, color
Features：
Automatic control of Purging, Circulation Control,
Regeneration, Pressure,as well as self-diagnosis,
power failure re-start and password protection.
Box Pressure set：
between +/- 10mbar,over +/- 12mbar system
automatic protection.
Vacuum Pump
8m3/h or 12m3/h (16 m3/h available)
Gas Circulation
Rotary vane pumpwith oil mist filter and Gas ballast control unit
Working gas：
Nitrogen, Argon or Helium
Encapsulated Blower： 90m3/h(145m3/h or 180m3/h available)
(Dry pump is available)
Regeneration
Valves
Operation：
Regeneration Gas：
PLC automatically controlled
Working gas mixed with Hydrogen(5-10%)
Main valves：
Electro-pneumatic angle valves DN 40 KF
Control valves：
Integrated solenoid(Brass)
Separate Gas Purification System
Accessories
Function
Operation:
Easy access to the glove box
Control:
Manual or PLC
Power:
110V/50Hz or 220V/50Hz
Working gas:
Nitrogen, Argon or Helium
Regeneration gas: Working gas mixed with
Hydrogen(5~10%)
Moisture Analyzer
Oxygen Analyzer
Type
Mk100
Mk200
Mk300
Mk400
Mk500
Mk600
Purifier
Single
Double
Single
Double
Single
Double
Main pipe
DN40
DN40
DN50
DN50
DN63
DN63
Circulation capacity
90 m³ / h
90 m³ / h
145 m³ / h
145 m³ / h
180 m³ / h
180 m³ / h
Copper catalyst
4.5 kg
2 x 4.5 kg
8 kg
2 x 8 kg
12 kg
2 x 12 kg
Molecular sieve
4.5 kg
2 x 4.5 kg
8 kg
2 x 8 kg
12 kg
2 x12 kg
Items
Measuring range: 0～1000ppm
ZrO2 Sensor: Solid sensor, long life,
to be exposed in the air without
consumption
Aviation Plug
Measuring range：0～500ppm
P2O5 Sensor: Corrosion resistant,
the sensor can be renewed by
acid-cleaning while contaminated by
HF or other corrosive atmosphere
Electrical Feedthrough
BNC Feedthrough
Solvent Absorber
To be built inside glove box,
to absorb solvent vapour
Absorbent: Activated carbon 2.3kg
Gas/Fluid Feedthrough
Accessories
Accessories
Microscope Unit
Type: TV Microscope, 1/3" CCD colourful
Magnification: Max. 300 times,
continuously adjustable
Monitor: PHLIP 17”, with flexible support
Up and Down lighting source: LED, ring
Platform : Movable, easy to align the
objective and lens centre
Refrigerator
Left-mounted, door inside of box
Inner dimension :
L×W×H=250mm×200mm×400mm
Lowest temperature:-40˚C (-55˚C available)
Vacuum Rectangular
Antechamber
De-Electrostatic Unit
Oil Mist Filter
Prevent oil mist
Applicable to all kinds of compact type
rotary vane vacuum pump
Effectively remove localized static charges
Effective ionization range: 12"
Pulse rate and ionic balance controls allow for
effective calibration and adjustment of the Counter SPI
to give optimum ion balance and output
Filter
0.30 μm, remove particles
or filter pollutants
Vacuum Angle Valve
Body material: aluminum or stainless steel
Bellows seal
With the pilot valve
Vacuum to 100Pa
Double door to be
operated electrically or
pneumatically
Customized sizes
De-Dusting Unit
With two filter, switchable
Stainless steel shell
Filter accuracy:3mm
High performance circulation unit
Main pipe Stainless steel DN40
Heated Antechamber
Temperature range: Ambient
temperature to 120˚C
With temperature controller
Vacuum Plasma Sealing Unit
For sealing of vacuum glass vessel
First perform glass vessel’s evacuating and
gas-refilling then complete sealing in glove box
VACUUM SUBLIMATION EQUIPMENT
Accessories
Application
Solvent Purification System
Rectangular Chamber
Customized sizes available
The double door to be
operated
Applicable for solvent drying and purification by
removing water, oxygen etc.
Low purity grade industrial solvents can be purified
into high purity grade
The following solvents can be purified alone or
together:
Hydrocarbon compound such as benzene, ethane,
Chlorine hydrocarbons such as ethylene dichloride,
Dipolar non-protonic solvents such as acetonitril,
dimethyl amide, nitromethane,
Alcoholate such as methane, ethanol, butanol,
Ethers (ether), esters, amines, carbonate and their
derivatives
Sublimation is the endothermic (absorbs energy) phase transition of a substance from solid state into the
vapor phase without passing through the liquid phase. Based on this process organic opto-electronic materials
can be purified to reach the high purity grades which is required to manufacture high-performance OLED
devices and organic solar cells.
Features
Separate temperature control at four different zones
Temperature curve free set and save
Transparent tube design
Liquid nitrogen trap
Technical Data
Vacuum Furnace
Cold Well
To to be built on the bottom of glove box
Stainless steel well
Size:. Dia 160mm, Deep 200mm, (customized
size on request)
DEWAR is filled with Liquid Nitrogen or Dry Ice
coolant for low temperature work
Vertical or horizontal type
Max temperature1200˚C/2200˚C
Ultimate pressure:1x10-4Pa/5 x10-6Pa
Dimension: to be customized on request
Program-controlled temperature-rising
and evacuating
Cooling system failure protection
Ultimate vacuum pressure 6×10-4pa
Max. heating temperature 600˚C
Glove Box Integrated Evaporator
Glovebox Integrated Vacuum Deposition System
Application
For the preparation of Metal Film, Semi-Conductor Film, Oxidizing Film as well as Organic Film.
Applicable for R&D in the field of new material research before moving into large scale production.
Application
Organic electroluminescent display screen
Technical Data
Preparation of High uniform film
Limit Pressure：
Pumping time：
6 x10-5Pa
≤40min (from atmosphere to 8 x 10-4 Pa)
Substrate holder unit：
Max. substrate size of 120*120mm. I piece
With lifting mechanism, Up and down in range of 50mm
With rotating mechanism, 5~30rpm, adjustable continuously
Max. temperature on substrate, 300˚C
Organic evaporation source：
2 Beam source furnaces, Single quartz crucible capacity≥2cc
Max. temperature -500˚C, adjustable continuously
Thermal evaporation source：
2 thermal evaporation boats, made up by 4 electrodes
with water-cooling unit
10V, 300A, max. output power 3kW
FTM-V quartz crystal oscillation
film thickness monitor：
Thickness display range: 0--99μ9999Àº
Synthesizing of semi-conductor material
Deposition of refractory metal
Technical Data
Dimensions of pretreatment chamber(mm)：
Ø300-500 × H300-450
Dimensions of organic and metal chamber(mm)： Ø500-800 × H600-1000
Chamber material：
SUS 304
Size: 2”-10”
Substrate：
Running speed: 5-20rpm
Temperature: 300˚C
Ultimate vacuum pressure：
1.3 × 10-5 pa
Number of organic deposition source：
4-8sets, power: 600W
Number of metal deposition source：
2-6sets, power: 2000W~5000W
Distance from source to substrate(mm)：
260-600(adjustable)
Integrated Glove box with antechamber：
Size: 1220 × 750 × 900mm
H2O,O2 less than 1ppm