amat endura ii - jv01

AMAT ENDURA II JV01
OEM PRODUCT LINK
Location
Fishkill
Physical Condition
Serial Number
Vintage
Options
413647
6/1/2007- Cu Chambers
upgraded in 2011
Endura CuBS (Copper
Barrier/Seed) RFX PVD system,
Endura 2, 300mm, 3 load ports,(2)
SIP EnCoRe II RFX/Cu chambers
(2) EnCoRe II TaN chambers, 4
DMD Degas chambers
USE
Production
Wafer Size
300mm
Installed and Operational
Stand Alone
Chamber Type and Chamber Serial Number
Chamber 1 - Enc 2 TaN - 413647-PJ-ECH1
Chamber 2 - Enc 2 TaN - 413647-PJ-ECH2
Chamber 3 - SIP EnCoRe II RFX Cu 3011602-400-0002
Chamber 4 - SIP EnCoRe II RFX Cu 3011602-410-0001
Chamber C – DMD chamber 300351-077-0029
Chamber D- DMD chamber 300351-077-0028
Chamber E- DMD chamber 300351-077-0025
Chamber F – DMD chamber 300351-077-0030
The software level is 5.0_202.
GEO
35nm>
22nm CUBS Dev config
12−19−08