HAMAMATSU Photonics K. K.
Transcription
HAMAMATSU Photonics K. K.
1 HAMAMATSU Photonics K. K. Founed 1953 Based in Hamamatsu City, Japan 3600 Employees worldwide Product- and researchcenter in Japan 32 buildings / 177‘975 sqare metre Leading supplier of optoelectronic components and systems HAMAMATSU Photonics 2 The History of Hamamatsu 1948 Tokai Electronics Lab Established (Original Company of Hamamatsu). 1953 Hamamatsu TV Co. Ltd. Established began production of phototubes. 1956 Began Research project into Photomultiplier Tubes. 1961 Began production of the Vidicon Tube. 1969 Hamamatsu Corporation USA established. 1973 First factory in Toyooka is completed. 1978 Began sales of MCP’s, GaAsP and pin silicon diode. 1979 PMT production in New Jersey begins. 1982 20 inch PMT developed. 1983 Changed name to Hamamatsu Photonics HAMAMATSU Photonics 3 The History of Hamamatsu 1987 New Silicon wafer and assembly factory built. 1990 Production of PMT’s begins in China. 1992 Pet center opens at the Central Research Lab. 1996 InGaAs facility completed. 1997 New solid state & automated assembly facility completed. 1998 Expansion of Lamp fabrication facility. Back thinned CCD introduced. 2001 Toyooka 9th Bldg. Completed. 2002 Nobel Prize for Physics awarded to Prof. Koshiba on Kamiokande Experiment. 2003 50th anniversary since the company foundation. 2004 Held Photon Fair 2004 at Tokyo International Forum. 2005 “The Graduate School for the Creation of New Photonics Industries” started. 2008 CERN recognizes Hamamatsu Photonics for its contribution to the development of detectors for the Large Hadron Collider HAMAMATSU Photonics 4 HAMAMATSU Global Network HAMAMATSU Photonics 5 Divisions Electron Tube Division Solid State Division Systems Division Laser Group Central Research Laboratory HAMAMATSU Photonics 6 Electron Tube Division Developing and manufacturing advanced optical sensors, light sources and a whole range of related products designed for diverse applications in medicine, chemical analysis, measurement, industrial testing, academic research and a host of other fields 976 people - Toyooka Factory & Tenno Glass Factory HAMAMATSU Photonics 7 ETD – Fundamental technology & Know-how Glass Fabrication Vacuum Tube Technology Material processing HAMAMATSU Photonics 8 ETD – Fundamental technology & Know-how Electron-Optics Mechanics & Assembly Optics Design and Fabrication HAMAMATSU Photonics 9 ETD – Fundamental technology & know-how Low Noise Analog Electronics Scintillating Materials Low to High voltage power supplies HAMAMATSU Photonics 10 ETD – Optical Sensors Photomultiplier Tubes 70% PMT share of the world market Side-on PMT Major work involves developing iniaturized yet high-sensitivity sensor modules HAMAMATSU Photonics 11 ETD - Optical Sensors DNA analyzer AA spectrophotometer ICP emission spectrophotometer HAMAMATSU Photonics 12 ETD - Optical Sensors Flat panel PMT Near infrared PMT Metal package PMT (For biological function measurement) (For high energy physics experiments) HAMAMATSU Photonics 13 ETD – Optical Sensors Super Kamiokande Here, a total of 11,200 of 20-inch dia. PMTs are used to catch neutrinos and monitor proton decay. HAMAMATSU Photonics 14 ETD – Optical Sensors Whole-body pet The No.1 choice in academic research fields including high energy physics. Striving to develop new sensors by merging the features of semiconductors and electron tubes. Makes the world’s most sensitive and responsive optical sensors in the near infrared range. HAMAMATSU Photonics 15 ETD – Optical Sensors Ultra Bialkali photocathode PMTs Super Bialkali photocathode PMTs HAMAMATSU Photonics 16 ETD – Other Optical Sensors and Image Sensors Uvtron (Flame and UV sonsors) Quick Detection of Flame from a Distance ! Application Examples Flame detectors for gas/oil lighters and matches Combustion monitors for burners Detection of discharge (corona discharge of high voltage transmission lines, etc.) HAMAMATSU Photonics 17 ETD – Other Optical Sensors and Image Sensors Electron multipliers (For mass spectroscopy) MCP (For mass spectroscopy,semiconductor testing) HAMAMATSU Photonics 18 ETD - Application Application-Specific Products Using Optical Sensors and Image Sensors Weak light detection unit (For low-light-level measurement) Fluorescence intensity measurement of one grain of polished rice (with husk and outer brown matter removed) HAMAMATSU Photonics 19 ETD - Application Application-Specific Products Using Optical Sensors and Image Sensors Pinhole tester UV power meter (For pinhole detection) (For UV intensity level control) HAMAMATSU Photonics 20 ETD - Application Application-Specific Products Using Optical Sensors and Image Sensors ICCD camera with high-speed electronic shutter (For fast-moving object observation) High-speed gated image intensifier unit (For fast-moving object observation) HAMAMATSU Photonics 21 ETD Graded glass seals, glass-to-metal seals Multiple pin embedding Precision-polished optical products Molded glass products HAMAMATSU Photonics 22 ETD – Light Sources Xenon lamps (For medical test, spectrophotometry and semiconductor) Mercury-xenon lamps (For semiconductor test, fluorescence microscopes) High stability due to unique electrode structure is the biggest feature. Wide lineup to meet expanding needs in the medical, semiconductor, LCD, computer and factory automation. HAMAMATSU Photonics 23 ETD – Light Sources Deuterium lamps (For spectrophotometry, environmental analysis) Xenon flash lamps (For medical and in-vitro test, FA, high-speed strobes) Hollow cathode lamps (For atomic absorption analysis) HAMAMATSU Photonics 24 ETD - Application Application-specific Products Using Light Sources Spot light source (For UV curing adhesive) Application Example UV Curing Catheter CD / DVD pick-up devices Sealing of LCD panel CCD packing Electric parts attachment HAMAMATSU Photonics 25 ETD – Application Application-specific Products Using Light Sources UV-LED Spot light source UV-LED module HAMAMATSU Photonics 26 ETD – Application Application-specific Products Using Light Sources UV to visible fiber light source (For environmental measurement, drug testing) Application Example Spectrophotometry Environmental measurement HPLC (High-performance liquid chromatography) Biological measurement Semiconductor inspection HAMAMATSU Photonics 27 X-Ray Related Products BGS joint IC bumps (50 µm) Microfocus X-ray source (For non-destrucitve X-ray inspection) HAMAMATSU Photonics 28 X-Ray Related Products Scintillator Plates ACS (Amorphous-carbon plate with CsI scintillator) High resolution, Large Format ALS (Aluminum plate with CsI scintillator) : High light output, Large Format FOS (Fiber Optics Plate with CsI scintillator) : X-ray shield, low energy X-ray detection HAMAMATSU Photonics 29 X-Ray Related Products HAMAMATSU Photonics 30 ETD – Electrostatic Remover Photoionizer (For removal of staticcharge) Application Example Packing of powdered product High speed moving objects (film, printed matter, etc.) IC / LCD / PDP process line Large size glass plate product PCB mounting, chip mounter Plastic component molding process HAMAMATSU Photonics 31 ETD – Stealth Dicing Technology Comparison of process quality on wafer surface In Stealth Dicing, a laser beam at a wavelength capable of transmitting through the material is condensed on an internal point in that material. This selectively forms a mechanical damage layer (stress layer) in a localized point near the light focus area so that the material is cut from the "inside". Blade Dicing Stealth Dicing HAMAMATSU Photonics 32 Solid State Division Searching out new semiconductor properties to define next-generation applications 801 people - Ichino Factory & Mitsue Factory HAMAMATSU Photonics 33 SSD – Fundamental technology & Know-how High Density High Accuracy Packaging Technology III-V Compounds Crystal and Process Technology Molded parts injection HAMAMATSU Photonics 34 SSD – Fundamental technology & Know-how Silicon Design And Process Hybridization Capability 3D Silicon Micromachining Technology HAMAMATSU Photonics 35 SSD – Fundamental technology & Know-how Direct Scintillation Deposition Capability Volume Manufacturing Optical Component Design Manufacturing and Integration Analog & Digital High Speed / Low noise Electronics HAMAMATSU Photonics 36 SSD – Silicon Photodiodes Surveying instrument Surveying instruments use Si photodiodes to measure distances and angles. Si photodiodes X-ray CT scanner Si photodiodes are widely used in the detection section of X-ray CT scanners. Si photodiode arrays Surface-mount Si photodiodes HAMAMATSU Photonics 37 SSD - Silicon Photodiodes Types and applications Environmental measurement, banking machines, medical equipment, semiconductor manufacturing equipment Si photodiodes for general photometry and camera applications Camera exposure meters, copiers, illuminometers Si PIN photodiodes Optical fiber communications, optical power monitors, high-energy physics research Si photodiode arrays Multichannel spectrophotometry, laser beam alignment, 3D shape measurement Si photodiode with amp; cooled Si photodiodes Low-light-level measurement, optical disc pickup, spatial light transmission Si APD (avalanche photodiode) Spatial light transmission, distance sensors, optical fiber communications, low-level photometry Baggage inspection, non-destructive inspection Si photodiodes for precision photometry and spectrophotometry X-ray detectors HAMAMATSU Photonics 38 SSD – Photo IC Photo IC is an optical sensor consisting of a photosensitive element and a signal processing circuit integrated onto a single chip or single package Photo IC diodes Automated passenger gates Light modulation photo IC and infrared LED are used to detect passengers entering or leaving train station ticket gates. For laser beam sync detection Light modulation photo IC HAMAMATSU Photonics 39 SSD – Photo IC Types and applications Light modulation photo IC Paper detection in OA machines, optical switches, automated passenger gates Photo IC for laser beam sync detection Print start timing detection for laser printers Photo IC for optical links Optical fiber communications Photo IC for optical switches Optical switches Photo IC for encoder Encoder Photo IC diode Energy-saving sensors for televisions, LCD panel light control, light level detection HAMAMATSU Photonics 40 SSD – PSD (Position Sensitive Detector) PSD is an optoelectronic position sensor utilizing photodiode surface resistance. Unlike discrete element detectors such as CCD, PSD provides continuous position data (X or Y coordinate data) and features high position resolution and fast response. One-dimensional PSD One-dimensional PSD Two-dimensional PSD HAMAMATSU Photonics 41 SSD – PSD (Position Sensitive Detector) Features Applications Excellent position resolution Position/angle measurement Wide spectral response range Distortion/vibration measurement High-speed response Simultaneous detection of light intensity and position (gravity center of light spot) Lens reflection/refraction measurement Laser displacement meters High reliability Distance sensors Optical switches Camera auto focus HAMAMATSU Photonics 42 SSD – Infrared Detectors Detection of substances on asteroid surfaces InGaAs linear image sensor we developed for near infrared spectrophotometry is mounted in the HAYABUSA (falcon)” - Japan’s asteroid explorer. Infrared detectors Asteroid explorer “HAYABUSA (falcon)” [by courtesy of JAXA (Japan Aerospace Exploration Agency)] HAMAMATSU Photonics 43 SSD – Infrared Detectors Features and applications InGaAs PIN photodiodes InGaAs linear image sensors PbS, PbSe photoconductive detectors Optical fiber communications, optical power meters, laser diode monitors, gas analyzers, NIR (near infrared) photometry Optical communications, Radiation thermometers, Spectrophotometers Radiation thermometers, flame detectors, water content meters, gas analyzers, film thickness gauges InSb photoconductive/photovoltaic detectors Radiation thermometers, gas analyzers, spectrophotometers, remote sensing InAs photovoltaic detectors Spectrophotometers, laser monitors MCT (HgCdTe) photoconductive detectors /photovoltaic detectors Two-color detectors Photon drag detectors Radiation thermometers, water content meters, gas analyzers, spectrophotometers, film thickness gauges, FTIR, remote sensing Flame monitors, Fire detectors, Spectrophotometers, Laser monitors CO2 laser detection HAMAMATSU Photonics 44 SSD – Image Sensors X-ray image of cellular phone (side view) X-ray image of a cellular phone taken from the side with a flat panel sensor. Flat panel sensor NMOS linear image sensors CCD area image sensors InGaAs linear image sensors HAMAMATSU Photonics 45 SSD – Image Sensors Image sensor types and applications InGaAs linear image sensors DWDM wavelength monitors, optical spectrum analyzers, NIR multichannel spectrometers, radiation thermometers Low-light-level detection, fluorescence spectrophotometry, Raman spectroscopy, DNA sequencers NMOS linear image sensors Multichannel spectrophotometry, image readout systems CMOS linear image sensors Multichannel spectrophotometry, industrial measurement and testing CCD area image sensors Flat panel sensors Non-destructive inspection, digital X-ray imaging HAMAMATSU Photonics 46 SSD - LED LEDs (light emitting diodes) are opto-semiconductors that convert electric energy into optical energy. Compared to laser diodes, LEDs offer advantages such as lower cost and longer service life. Metal package type Resin-potted package type Plastic package type HAMAMATSU Photonics 47 SSD - LED Major applications Optical switch Optical encoder Light source for detection Surveying Optical communications HAMAMATSU Photonics 48 SSD – Related Products for Opto-semicondutors Related Products for Opto-semiconductors ITS (Intelligent Transport System) Distance sensors used in ITS detect the approach, passage and height of cars in real time. APD module Distance sensor Multichannel detector heads Photosensor amplifiers HAMAMATSU Photonics 49 SSD – Related Products for Opto-semicondutors Features and applications Photosensor amplifiers Current-to-voltage conversion amplifiers for amplifying weak photocurrent with low noise PSD signal processing circuits Circuit boards ideal for evaluating PSD characteristics APD modules High-speed, high-sensitivity photodetectors using APD (avalanche photodiode) Distance sensors Used in ITS (Intelligent Transport System) for detecting the approach, passage and height of cars in real time. Multichannel detector heads Contains driver/amplifier circuits for various types of image sensors. HAMAMATSU Photonics 50 SSD – Mini-spectrometers Polychromators integrated with optical elements, an image sensor and a driver circuit Optical component layout (TM series) HAMAMATSU Photonics 51 SSD – Mini-spectrometers Major applications Spectral evaluation of light sources Taste analyzers Water content measurement Film thickness measurement Analysis of sunlight and illumination HAMAMATSU Photonics 52 SSD – Optical Communication Devices Applications Optical fiber communications Product name Trunk line, broadcasting equipment Photodiodes, photodiodes with amp, laser diodes FA, OA, home network, vehicle-mount Photodiodes, photo IC, LED Spatial light transmission Photodiodes, infrared LED, light transmitter/receiver modules (for automobile VICS) DWDM (Dense wavelength division multiplexing) InGaAs linear image sensors LAN High-speed optical networks make LAN environments much more convenient. HAMAMATSU Photonics 53 SSD – Optical Communication Devices ROSA Pigtail type Receptacle type Metal package type Red LED and photo IC for optical links HAMAMATSU Photonics 54 Systems Division Imaging technologies created after years of meticulous effort are put to work in semiconductor, biotechnology, medical care and a host of other fields. 413 people - Jako Factory HAMAMATSU Photonics 55 SD – Biotech Field 1 Gene Expression Hamamatsu offers various systems for observation and analysis of gene expression. These systems use a high sensitivity camera to capture faint light emissions at very low light levels. AQUACOSMOS/VIM Imaging of light emitted from rice plant infected by bacteria HAMAMATSU Photonics 56 SD – Biotech Field 1 Protein Function Hamamatsu provides sophisticated systems to support analysis of the intracellular interaction of various proteins and observation of behavior mechanisms on the molecular level. AQUACOSMOS/ASHURA Measurement utilizing the FRET between molecules HAMAMATSU Photonics 57 SD – Biotech Field 1 Information Transmission Systems and equipment for observation and analysis of information transmitted on cells and tissues under a microscope. AQUACOSMOS/RATIO Intracellular Ca2+ concentration imaging HAMAMATSU Photonics 58 SD – Biotech Field 2 Imaging-based Plate Reader for HTS and Assay Development FDSS6000 (Function Drug Screening System) These systems offer automated high speed and high throughput screening by a combination of multi-dispenser and microplate auto-conveyor devices. A high-sensitivity 2-dimensional sensor with 384 wells for batch measurements and a high-output multi-wavelength excitation unit ensure quick and highly precise assays. FDSS6000 High-level information screening analysis HAMAMATSU Photonics 59 SD – Biotech Field 2 FDSS/RayCatcher (Luminescence Plate Reader) It is a luminescence plate reader that is compatible with 96, 384 and 1536 well plate. A high sensitive detection of extreme weak luminescence in the wavelength range of 350nm-720nm is possible based on newly developed 2 dimensional luminescence sensor. Luminescent Cell Viability Assay FDSS/RayCatcher HAMAMATSU Photonics 60 SD – Medical Field Oxygen Monitors These systems continuously and non-invasively measure oxygen in the brain and tissues by irradiating the body or organism with an extremely small and safe amount of light. NIRO-200 Measurement principles Measurement data loaded into a PC HAMAMATSU Photonics 61 SD – Medical Field Pathology Slide Observation NanoZoomer Digital Pathology is a system for scanning tissue glass slides and converting to high resolution digital slides. NanoZoomer Digital Pathology HAMAMATSU Photonics 62 SD – Semiconductor Field Failure Detection and Analysis These systems locate, visualize and analyze failures inside semiconductor devices by detecting weak light emissions, heat emissions or electrical changes caused from the failures. iPHEMOS-TP Failure analysis by detecting light emission HAMAMATSU Photonics 63 SD – Semiconductor Field Thickness Measurement These instruments optically measure wafer thickness with no contact with the wafer surface. Wafer thickness can be monitored even during wet etching. Measurement of wafer thickness distribution HAMAMATSU Photonics 64 SD – Semiconductor Field Internal Observation Chip internal observation Void observation of SOI wafer HAMAMATSU Photonics 65 SD – Semiconductor Field Plasma Monitor This device monitors the plasma emissions created during semiconductor manufacturing processes such as etching, sputtering and CVD. Multiband Plasma Process Monitor HAMAMATSU Photonics 66 SD - FPD Measurement Field Quantum Yields Measurement for Organic LED Materials The absolute luminescence quantum yield is measured precisely by employing a mult-channel detector, excitation light source, and integrating sphere. Quantum Yields Measurement Syatem Quantum efficiency measurement examples HAMAMATSU Photonics 67 SD - FPD Measurement Field Brightness Light Distribution Characteristics Measurement This system measures emission brightness and emission angle characteristics when a current or voltage is applied to organic LED materials sample. Organic LED Defect Repair This is a system to detect defective pixels of organic LED panels (emission of failure location) and repair using laser technique. HAMAMATSU Photonics 68 SD – Spectrophotometry Field Multi-channel Detection This system is a multi-channel detector integrating a polychromator and a high-sensitivity optical detector into a compact design. Chromaticity coordinate display Photonic Multichannel Analyzer PMA-12 3D display Spectrum HAMAMATSU Photonics 69 SD – Spectrophotometry Field Fluorescence Lifetime Measurement This system measures fluorescence occurring at high speeds and low light levels by simultaneously detecting multiple wavelengths with high sensitivity, using the time-resolved photon counting method. Picosecond Fluorescence Lifetime Measurement System Fluorescence lifetime analysis image HAMAMATSU Photonics 70 SD – Optical Communication Fields Laser Beam Measurement These systems make overall measurements of instantaneous spatial characteristics of light beams such as lasers. The system can be integrated with the LEPAS series Laser Beam Profiler, optical systems and cameras. LEPAS-12 HAMAMATSU Photonics 71 SD – Optical Communication Fields Ultra-short Pulse Measurement Sampling Optical Oscilloscope Optical Fiber Chromatic Dispersion Measurement HAMAMATSU Photonics 72 SD – FA (Factory Automation) Fields X-Ray Non-Destructive Inspection Hamamatsu provides various cameras specially designed for internal inspection using X-rays and observation of X-ray diffraction images. X-Ray Line Scan Camera Foreign matter in can HAMAMATSU Photonics 73 SD – FA (Factory Automation) Fields General Image Measurement TDI camera is useful for a wide range of imaging applications requiring high speed operation with high sensitivity. TDI Camera HAMAMATSU Photonics 74 Laser Group Creating new markets for semiconductor lasers 125 people - Miyakoda Factory HAMAMATSU Photonics 75 LG - Overview Established in 2000 / 110 members Annual turnover 10M Euro (10% for overseas) High Power Laser Diode Module Single Chip Laser Diode & Module HAMAMATSU Photonics 76 Various applications of Laser Diodes High Power Laser Diode Module Academic Research Processing HAMAMATSU Photonics 77 Various applications of Laser Diodes Print Single Chip Laser Diode & Module Measuring Medical HAMAMATSU Photonics 78 Central Research Laboratory Using light to seek out new “knowledge” 267 people - Hamakita Research Park HAMAMATSU Photonics 79 Research - Medical Diagnosis PET (Positron Emission Tomography) The only equipment in the world capable of imaging metabolic activity in a living body Whole-body PET scanner Hamamatsu Photonics researches and develops whole-body and head PET scanners. PET helps study brain and heart functions as well as find and pinpoint diseases such as cancer. FDG images of brain tumor (tomographic brain images taken with PET) HAMAMATSU Photonics 80 Research - Medical Diagnosis Optical CT Research in the practical application of the optical CT Research is being conducted that will put our optical CT to practical use in compiling information from inside living organisms, using light that is non-harmful to the organism. Visualization of three high-absorption areas existing inside a solid phantom with a diameter of 8 cm HAMAMATSU Photonics 81 Research - Optical Information Processing Intelligent vision system “ 1 KHz ” Image-processing system An intelligent vision system is an ultra-high speed visual information processing system that integrates photodetector, image processing and actuator control functions.By combining this system with an optical information system using a spatial light modulator (SLM), we aim to achieve information processing both with a high degree of parallelism and at ultra-high speeds. Vision Camera HAMAMATSU Photonics 82 Research - Agriculture Laser plant factory experiments Succeeded in cultivating rice plants by using high-power semiconductor lasers as light sources. Laser plant factories are expected to Improve food crop yield per unit area. Alleviate food shortages by super-forced cultivation. Semiconductor lasers used for experiments Optical environment research on plant growth such as rice HAMAMATSU Photonics 83 Research - Energy Working to make laser nuclear fusion a realty In a joint effort with the Institute of Laser Engineering at Osaka University, we have developed high-power laser diodes as a pumping light source for solid-state lasers. Successful laser nuclear fusion will create clean energy by irradiating incredibly powerful solidstate laser beams onto a fuel pallet filled with deuterium contained in seawater. HAMAMATSU Photonics 84 Research - Energy Institute of Laser Engineering, Osaka University Concept drawing of laser nuclear power plant “Koyo” Glass laser (amplifier section) Fusion chamber HAMAMATSU Photonics 85 Research - Energy Exterior of 110kW laser diode (LD) arrays One LD array (called a “bar”) has a width of 10 mm. 25 LD bars are stacked vertically (10 mm in height) and 40 stacks of LD bars are lined up horizontally (approx. 420 mm in width). The whole unit consists of a total of 1000 (25 x 40) LD bars. HAMAMATSU Photonics 86 Sabine Schütz 87