ISO vs. ASME: The Basics of Surface Profile Filtering

Transcription

ISO vs. ASME: The Basics of Surface Profile Filtering
ISO vs. ASME:
The Basics of Surface Profile Filtering
Presented by: Tim Ballinger, Bruker-Nano, Inc.
April 24th, 2012
© Copyright Bruker Corporation. All rights reserved
Presentation Overview
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A brief history of ISO and ASME
ISO vs. ASME
The basics of surface profiler filtering
Roughness and waviness
Improvements in software ease of use
Practical applications of stylus profilers
How stylus and noise can filter data
References
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ASME History
• ASME was founded in 1880 to provide
a setting for engineers to discuss the
concerns brought by the rise of
industrialization and mechanization.
• ASME gained prominence after a boiler
explosion caused the Grover Shoe
Factory Disaster in Brockton, MA on
March 10, 1905 (killing 58 people and
injuring 150)
• Having established the Boiler Testing
Code in 1884, ASME formed a Boiler
Code Committee in 1911.
• The ASME code was later incorporated
into laws in most US states and
Canadian provinces.
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Grover Shoe Factory Disaster
Brockton, MA
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ISO History
• Began in 1926 in New York as the International Federation of
the National Standardizing Associations (ISA).
• Focused heavily on mechanical engineering.
• It was disbanded in 1942 during the second World War.
• In 1946, delegates from 25 countries, met at the Institute of
Civil Engineers in London, to form an international organization
• “To facilitate the international coordination and unification of
industrial standards".
• Even the name of the organization is standardized. The name,
"ISO" is not an acronym but was derived from the Greek word
"isos" meaning "equal".
• The relation to standards is that if two objects meet the same
standard, they should be equal.
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ISO vs. ASME
• European automakers typically apply ISO standards and
US automakers apply ASME standards.
• ISO is predominate in western European countries like
Germany, France, and Italy.
• But not necessarily in eastern European countries like
Poland, Hungary, and Romania (These countries have
adopted ASME, because it provides them access to the
US market).
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ISO and ASME and Stylus Profiler Filtering
• Stylus Profiler: Collects data from the sample surface “Real Profile”
• Total Profile: Unfiltered data produced by the stylus profiler
• Primary Profile: Data after the short cutoff filter is applied
(cutoff spatial frequency of λs to remove noise).
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The Long and Short of Filtering
• Primary Profile Example: Both high frequency roughness and low
frequency waviness (as well as shape – curvature)
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The Long and Short of Filtering
• Primary Profile Example: Both high frequency roughness and low
frequency waviness (as well as shape – curvature)
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The Long and Short of Filtering
• Roughness Profile Example: Sampling length is equal to the filter
cutoff wavelength used to separate roughness from waviness (λc).
• Spatial frequency > cutoff wavelength = “roughness profile”
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The Long and Short of Filtering
• Waviness Profile Example: Sampling length is equal to the filter
cutoff wavelength used to separate roughness from waviness (λc).
• Spatial frequency < cutoff wavelength = “waviness profile”
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The Long and Short of Filtering
• Shape Profile Example: The waviness profile can be filtered once
more, at an even longer cutoff wavelength, in order to separate the
waviness and form
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The Long and Short of Filtering: Definitions
• Traversing Length: Distance of the scan (total profile)
• Evaluation Length: Selected portion of the scan for evaluation
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Total and primary profiles – Sampling length = evaluation length
• Sampling Length: < evaluation length.
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Roughness and waviness profiles – Sampling length = cutoff length (λc).
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The Long and Short of Filtering
• Sampling Length: < evaluation length.
• Segments of a profile showing distance between peaks and adjacent
valleys, as well as identification of additional peaks
• Based on ISO 4288 standards.
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ISO vs. ASME – Ra Example
ISO 4287 & 4288
ASME B46.1
Ra = (Ra1 + Ra2 + • • • + Ran)/n
Where Ran calculated on a roughness
profile over the sampling length n. n is a
number of sampling lengths.
Ra = (|Z1| + |Z2| + • • • + |ZN|)/N
Where N is a number of data points of
roughness profile over an evaluation
length. Z is height value of roughness
profile
• ISO 4287 computes the values over the entire evaluation length
(and sometimes computes the values within a sampling length)
• ISO 4288 and ASME B46.1, modifies this computation methodology
to include estimates of parameters (computed over one sampling
length) versus average value of parameters (computed over all
available sampling lengths within the evaluation length)
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Filtering Example – Stylus Profiler
• Total Profile (Raw unleveled data)
• DektakXT Quick-Analyzer Software (Select Data Leveling)
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Filtering Example – Stylus Profiler
• Select Leveling Type (2-point or linear fit)
• Select Roughness button to display filtering options
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Filtering Example – Stylus Profiler
• Filter Analysis Settings displayed
• Select ISO 4287 or ASME B46.1
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Filtering Example – Stylus Profiler
• Filter Analysis Settings displayed
• Select ISO 4287 or ASME B46.1
• Select Filter Type
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Filtering Example – Stylus Profiler
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Filter Analysis Settings displayed
Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
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Filtering Example – Stylus Profiler
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Filter Analysis Settings displayed
Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
Or Select Short & Long Cutoff
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Filtering Example – Stylus Profiler
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Filter Analysis Settings displayed
Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
Or Select Short & Long Cutoff
Select Pa: Total or Primary Profile
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Filtering Example – Stylus Profiler
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Filter Analysis Settings displayed
Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
Or Select Short & Long Cutoff
Select Ra: Roughness Profile
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Filtering Example – Stylus Profiler
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Filter Analysis Settings displayed
Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
Or Select Short & Long Cutoff
Select Wa: Waviness Profile
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Filtering Example – Stylus Profiler
• Filtered Analytical Results for Ra, Wa & Pa
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Filtering Example – Stylus Profiler
• Database results comparing multiple measurements
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Filtering Example – Stylus Profiler
• 3D Measurement (DektakXT Stylus Profiler)
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Filtering Example – Stylus Profiler
• 3D Cross-section Roughness and Area Roughness
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3D Resolution and Filtering
3D Area
Surface
Texture
How Profile Density Filters Data
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Depends on the spacing between
each individual profile (1um min.)
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3D maps can be generated from
10 or 10,000 profiles
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High resolution 3D maps can
take hours to complete
MEMS
10mm x 10mm
Micro Fluidic
Channels
3D images created from multiple individual profiles
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Large Map Areas
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How Stylus Size and Shape Filters Data
60°
2 um
Radius
12.5um
Radius
• 2um radius stylus is specified 45°
for
surface texture measurements
• 60º cone angle tip (ASME compliance)
• Larger tips (such as
12.5um radius) act as
a filter to smooth data
• 45º cone angle tip (ISO compliance)
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How Data Point Density Filters Data
Lateral Resolution: Data Point Density:
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Too few data points can act to smooth surface profile
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DektakXT offers up to 120,000 data points per scan
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DektakXT maximum data point density = 0.003um/data point
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How Noise Can Filter Data
Ways to Reduce Noise:
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Stable Platform: Lower noise
floor achieved with stable sensor
support
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Vibration Isolation: Filter out
external noise & vibration
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Electronics: Low-noise
electronics and shielded cables
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Environmental Enclosure:
Reduces affects of acoustic noise
and air currents
Built-In Vibration Isolators
Low Noise Single-Arch Support
Measurement repeatability
of better than 5 Angstroms
achieved with DektakXT
Environmental
Enclosure
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Selecting the Right Tool for the Job
• AFM: Highest resolution with multiple modes and applications
• Optical Profiler: High Z resolution, non-contact high-speed 3D scans
• Stylus Profiler: High measurement repeatability of 2D profiles
Atomic Force Microscopy
Nanoscale characterization of electrical,
magnetic, compositional and material
properties
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Optical Profiling
Non-contact 3D measurement of
surface texture and roughness
Stylus Profiling
Measure thin film step heights,
stress and surface texture
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Application Paper & References
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“ISO Standardized Filtering for
DektakXT Stylus Profiler”
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Provides more detailed information on
the various ISO and ASME parameters
for measuring roughness and waviness
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Available on the Bruker website:
www.Bruker.com
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“ISO Geometrical Tolerancing Reference
Guide” by Alex Krulikowski (Compares
and contrasts ISO and ASME standards)
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ISO 4287, Geometrical Product
Specifications (GPS)
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ISO 4288, Geometrical Product
Specifications (GPS)
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ASME B46.1-2002 (Surface Roughness,
Waviness, and Lay)
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Questions?
Email: tim.ballinger@bruker-nano.com
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26.Copyright
April 2012
©
Bruker Corporation. All rights reserved
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