MME 2012 - TU Ilmenau

MME 2012
PROGRAM
MME
2012
© Torsten Weilepp
Ilmenau
The 23rd Micromechanics and Microsystems
Europe Workshop
2012
Ilmenau
www.mme2012.org
© Kathrin Pöhler
MME
September 9 - 12, 2012
Ilmenau, Germany
Program MME 2012
Ilmenau, Germany
Program MME 2012
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Program MME 2012
Ilmenau, Germany
Table of Contents
WELCOME! ......................................................................................... 4
GENERAL INFORMATION .................................................................... 5
CONFERENCE BUILDING ........................................................................... 5
CONTACT ............................................................................................ 5
TRAVEL INFORMATION ............................................................................ 6
HOTELS ............................................................................................... 7
PROGRAM AND ORGANIZING COMMITTEE ........................................ 8
STEERING COMMITTEE ....................................................................... 9
INVITED SPEAKERS............................................................................ 10
PROGRAM AT A GLANCE .................................................................. 11
TABLE OF EXHIBITORS AND SPONSORS ............................................ 12
SCIENTIFIC SESSIONS ........................................................................ 13
OPENING CEREMONY ........................................................................... 13
SESSION A ........................................................................................ 13
Fabrication technologies and processes ...................................... 13
Industrial presentations .............................................................. 17
SESSION B ......................................................................................... 17
Sensing and actuation applications............................................. 17
SESSION C......................................................................................... 21
Microcomponent packaging and solutions ................................. 21
Device and process characterization ........................................... 21
Microfluidic components and systems ........................................ 23
SESSION D ........................................................................................ 25
Design and simulation tools ....................................................... 25
BioMEMS.................................................................................... 26
Micro-Nano integration .............................................................. 27
Materials .................................................................................... 28
System integration of MEMS, NEMS, RF-MEMS and MOEMS ....... 28
SOCIAL EVENTS................................................................................. 29
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Program MME 2012
Ilmenau, Germany
SCIENTIFIC GUIDED TOUR ................................................................. 30
FURTHER EVENTS .............................................................................. 31
GENERAL INFORMATION .................................................................. 32
MEALS AND REFRESHMENTS ................................................................... 32
INTERNET CAFÉ ................................................................................... 32
SPONSORS AND PARTNERS .............................................................. 33
IMPRINT ............................................................................................ 34
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Program MME 2012
Ilmenau, Germany
Welcome!
Dear colleagues, guests and friends
We cordially welcome you in Ilmenau! The MicroMechanics Europe 2012 is
the 23rd workshop in an impressive sequence of scientific meetings. The
conference has gained continuously growing attention and impact,
especially among young scientists.
We are looking forward to the presentation of more than 75 contributions
from 21 countries, enriched by the presentation of companies engaged in
the fields of micromachining, microengineering and technology for the
realization of (micro)sensors and actuators.
It is again very impressive to see which new ideas have been created in
micromachining. Although many micromechanical products are nowadays
available and all around us, e.g. in cars and smartphones, consumer devices
and industrial equipment, and lead to more functionality and much better
energy efficiency, the pool of ideas is obviously not yet dried out. Even after
nearly two dozens of years there are still very inspiring applications coming
up that motivate discussing them within the community. Especially two
directions seem to lead into the future: the integration of nanostructures
into MEMS and complex microsystems. So there will be enough topics to
discuss at MME 2012 and in the future!
We wish you inspiring days beyond day-to-day business, filled with fruitful
and intensive discussions, new contacts and ideas, and also relaxing and
restful moments when enjoying the beautiful environment as well as local
delicacies.
Have a great time – and please feel free to contact us for any further
information.
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Program MME 2012
Ilmenau, Germany
General Information
Conference Building
The conference takes place in the Humboldt Building on the campus of the
TU Ilmenau (Gustav-Kirchhoff-Platz 1). A walk from the city to the
conference building will take about 20 minutes.
The conference office opens at 8 o’clock on Monday and Tuesday.
Contact
Conference Management TU Ilmenau
E-Mail:
conferences@tu-ilmenau.de
Phone:
+49 3677 69-2520
Mobile:
+49 171 764 48 23
Fax:
+49 3677 69-1743
Organizing Committee MME 2012
Chair for Micromechanical Systems
E-Mail:
info@mme2012.org
Phone:
+49 3677 69-1295
Mobile:
+49 174 236 46 32 (Lars Dittrich)
Fax:
+49 3677 69-1840
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Program MME 2012
Ilmenau, Germany
Travel Information
Ilmenau is located almost in the centre of Germany, about 50 kilometres
south from Erfurt. You can reach Ilmenau by plane, train, or car.
We recommend to leave the A71 motorway using
the exit "Ilmenau Ost" and then follow the "UNI"
signs to the campus of the Ilmenau University of
Technology.
On campus, the signposting will help you find the
way to the conference building (Humboldtbau)
easily.
The airport Erfurt-Weimar (ERF) is the nearest
airport serving mainly charter flights. It might
be worth to check whether there are travel
connections to Erfurt airport.
www.flughafen-erfurtweimar.de
www.leipzig-halle-airport.de
www.frankfurt-airport.com
www.berlin-airport.de
www.bahn.de (railway)
Otherwise, we recommend the airports of
Frankfurt/Main (FRA), Leipzig (LEJ), or Berlin
(TXL or SXF). There are fast ICE train
connections from all of these airports to Erfurt.
You can reach Ilmenau by train via Erfurt (ICE
station) where you can use the connecting
train to Ilmenau. The trip from Erfurt to
Ilmenau takes about an hour.
Be aware that a rail replacement bus service takes place from Plaue to
Ilmenau or Marlishausen to Ilmenau, respectively.
The connections (train + bus) leaving Erfurt at 2.47 p.m., 3.38 p.m. and
4.47 p.m. on Sunday will have an additional stop right in front of Hotel
Tanne (Station “Ilmenau Bad”). It is the next stop after Ilmenau ZOB /
Bahnhof. This extended service is provided especially for MME 2012 by the
Erfurter Bahn GmbH. All other busses end at Ilmenau ZOB / Bahnhof with
about 1 km walking distance to Hotel Tanne.
By car you should use exit “Ilmenau Ost” on the motorway A71
(Schweinfurt - Erfurt). Please be aware of the speed limits especially in the
tunnels on A71; there are many permanent speed control cameras!
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Program MME 2012
Ilmenau, Germany
Hotels
Hotel Tanne
Lindenstraße 38, 98693 Ilmenau
www.hotel-tanne-thueringen.de
info@hotel-tanne-thueringen.de
Phone:
+49 3677 6590
Fax:
+49 3677 659503
Hotel Lindenhof
Lindenstraße 3 - 11, 98693 Ilmenau
www.hotel-lindenhof.de
hotel-lindenhof@t-online.de
Phone: +49 3677 68000
Fax:
+49 3677 680088
Hotel Moosbach
Schmücker Straße 112, 98693 Manebach
www.hotel-moosbach.de
info@hotel-moosbach.de
Phone: +49 3677 849880
Fax:
+49 3677 894272
Hotel Gabelbach
Waldstraße 23 a, 98693 Ilmenau
www.gabelbach.com
info@gabelbach.com
Phone: +49 3677 8600
Fax:
+49 3677 860222
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Program MME 2012
Ilmenau, Germany
Program and Organizing Committee
Chair
Co-Chair
Martin Hoffmann
Per Ohlckers
Ilmenau University
of Technology
Germany
Vestfold University
College
Co-Chair
Co-Chair
Martin Hill
Samuli Franssila
Cork Institute of
Technology
Aalto University
Norway
Finland
Ireland
Andrea Schneider
Boris Goj
Conference
Management
Webmaster and
organization
Phone:
+49 3677 69-2520
Phone:
+49 3677 69-1295
Ilona Hirt
Lars Dittrich
Webmaster and
organization
Social activities
Phone:
+49 3677 69-1860
Phone:
+49 3677 69-1295
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Program MME 2012
Ilmenau, Germany
Steering Committee
Jose Higino Correia
DEI, University of Minho, Guimarães, Portugal
Peter Enoksson
Chalmers University of Technology, Sweden
Martin Hill
Cork Institute of Technology, Cork, Ireland
Michael Kraft
School of Electronics & Computer Science, University of Southampton, U.K.
Alexandru Muller
National Research and Development Institute for Microtechnology,
Romania
Patrick Pons
CNRS-LAAS, Toulouse, France
Robert Puers
KU Leuven, Belgium
Uwe Schnakenberg
IWE-RWTH-Aachen, Aachen, Germany
Miko Elwenspoek
University of Freiburg, Germany /University of Twente, The Netherlands
Per Ohlckers
Vestfold University College, Norway
Leon Abelmann
University of Twente, The Netherlands
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Program MME 2012
Ilmenau, Germany
Invited Speakers
“Biomimetic MEMS”
Prof. Dr. ir. Gijs Krijnen
Chair of Transducers Science & Technology group,
Chair of MEMS Design
MESA+ Research Institute, Faculty of Electrical
Engineering, University of Twente
Enschede, The Netherlands
Monday, September 10, 2012, 1:30 – 2.30 p.m.
“Conducting polymers as active
materials in microsystems”
Prof. Niels B. Larsen
DTU Nanotech,
Department of Micro- and Nanotechnology
Technical University of Denmark
Kgs. Lyngby, Denmark
Tuesday, September 11, 2012, 9:00 – 10.00 a.m.
“Micro optics in applied spectroscopy”
Dr. Matthieu Jean P Lacolle
SINTEF Information and Communication Technology
(ICT)
Department Microsystems and Nanotechnology
Oslo, Norway
Tuesday, September 11, 2012, 1:30 – 2.30 p.m.
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Program MME 2012
Ilmenau, Germany
Program at a Glance
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Program MME 2012
Ilmenau, Germany
Table of Exhibitors and Sponsors
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Program MME 2012
Scientific Sessions
Opening Ceremony
Humboldt Building, Audimax
Monday, September 10, 2012,
9:00 a.m.
Musical opening by
Markus Mehnert, member of the Fraunhofer Institute ISS and
Gabriel Gatzsche, member of Audanika GmbH Ilmenau.
9:35 a.m.
The participants will be welcome by
Professor Peter Scharff
Rector of the Ilmenau University of Technology
Professor Martin Hoffmann
Chair of the Organization Committee
Session A
Humboldt Building, Humboldt Lecture Hall
Monday, September 10, 2012, 10:00 a.m. - 12:30 p.m.
Fabrication technologies and processes
A 01
Fabrication of AZ4562 refractive microlenses array for light
enhancement on optical microsystems
R. P. Rocha, J. P. Carmo, J. H. Correia
University of Minho, School of Engineering,
Department of Industrial Electronics, Guimarães, Portugal
A 02
High precision high rate silicon etching process for nano-fabrication
Z. Sanaee, M. Poudineh, S. Mohajerzadeh
Thin Film and Nano-Electronic Lab, University of Tehran,
Tehran, Iran
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Program MME 2012
A 03
Fabrication and modeling of silicon micro-needles suitable for
inclination sensing
Z. Sanaee, M. Mehran, S. Mohajerzadeh
Nanoelectronic Center of Excellence, Thin Film and Nano-Electronic
Laboratory, School of Electrical & Computer Engineering,
University of Tehran, Tehran, Iran
A 04
Veils-free dry (ICP) etching of gold films with a vertical sharp
sidewall
S. Keskin1, A. Aydemir1, T. Akin1, 2
A 05
1
METU-MEMS Research and Applications Center,
Middle East Technical University, Ankara, Turkey
2
Middle East Technical University,
Dept. of Electrical and Electronics Engineering, Ankara, Turkey
Micro structured electrochromic device based on
poly (3,4-Ethylenedioxythiophene) (PEDOT)
T. Deutschmann, S. Roth, E. Oesterschulze
Physics and Technology of Nanostructures,
University of Kaiserslautern, Kaiserslautern, Germany
Nano Structuring Center, Department of Physics,
University of Kaiserslautern, Kaiserslautern, Germany
A 06
Controlled silicon grass generation using optical plasma emission
spectroscopy
S. Leopold, C. Kremin, M. Hoffmann
Micromechanical Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
A 07
Invasive neural electrodes structure fabrication based on aluminum
wafers
A. C. Peixoto1, A. F. Silva2, N. S. Dias3,4, J. H. Correia1
1
Department of Industrial Electronics, University of Minho,
Guimarães, Portugal
2
MIT Portugal Program, School of Engineering,
University of Minho, Guimarães, Portugal
3
Life and Health Sciences Research Institute (ICVS),
University of Minho, Braga, Portugal
4
DIGARC, Polytechnic Institute of Cávado and the Ave,
Barcelos, Portugal
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Program MME 2012
A 08
Fabrication of thick copper lines by film transfer method applied to
PDMS structural layers
M. Couty1,2,3, S. Nazeer1,2, T. H. N. Dinh1,2,4, E. Martincic1,2,
M. Woytasik1,2, M. Tatoulian3, E. Dufour-Gergam1,2
A 09
1
Univ. Paris-Sud, Laboratoire IEF, UMR-8622, Orsay, France
2
CNRS, Orsay, France
3
Laboratoire du Génie des Procédés Plasmas et Traitements de
Surface (LGPPTS), Chimie ParisTech, Paris, France
4
KFM Technology, Villebon Sur Yvette, France
On the influence of laser cutting manufacturing tolerances on the
spring rate of machined tubular springs
R. Hebel1, L. Dittrich2, M. Hoffmann2
A 10
1
LLT Applikation GmbH, Ilmenau, Germany
2
Micromechanical Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
Large area and broadband semi-reflective bragg mirror membrane
manufactured by PECVD
H. Bertin1, A. Bosseboeuf1, J. Moulin1, M. Pealat2, N. Roux2
A 11
1
Institut d’Electronique Fondamentale, Université Paris Sud, CNRS,
Orsay Cedex, France
2
Sagem, Groupe Safran, Massy, France
Development of ultra-small thin film diaphragms for pressure sensor
applications
T. Süss, C. Hierold
Micro and Nanosystems, Department of Mechanical and Process
Engineering, ETH Zurich, Zurich, Switzerland
A 12
Micro hot embossing and micro laser welding technologies for
fluidic applications
M. Baum1, J. Besser1, B. John2, B. Keiper2, J. Hänel2, M. Wiemer1,
T. Gessner1,3
1
Fraunhofer ENAS, Chemnitz, Germany
2
3D-Micromac AG, Chemnitz, Germany
3
Center for Microtechnologies
at Chemnitz University of Technology, Germany
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Program MME 2012
A 13
Full silicon-nitride probes with corner lithography wireframes for
scanning hall probe microscopy
K. Hatakeyama1, E. Sarajlic2, M. H. Siekman1, R. Huijink2,
L. Abelmann1
A 14
1
TST, MESA+ Research Institute, University of Twente,
The Netherlands
2
SmartTip B.V., The Netherlands
Thin LTCC membranes with integrated heaters and temperature
sensors
N. Gutzeit1, J. Müller1, C. Reinlein2, M. Appelfelder2, S. Gebhardt3
A 15
1
Electronics Technology Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
2
Fraunhofer Institute for Applied Optics and Precision
Engineering, Jena, Germany
3
Fraunhofer Institute for Ceramic Technologies and Systems,
Dresden, Germany
Silicon based sensors and functional components fabricated by
ICP-RIE cryogenic dry etching
S. Merzsch1, J. Kähler1, H. S. Wasisto1, L. Doering2, U. Brand2,
E. Peiner1, A. Waag1
A 16
1
Braunschweig University of Technology,
Institute of Semiconductor Technology, Braunschweig, Germany
2
Physikalisch-Technische Bundesanstalt (PTB),
Nano- and Micrometrology, Braunschweig, Germany
Fabrication of a Si-measurement cuvette using a new
multifunctional bonding method
S. Günschmann1, M. Fischer1, T. Bley2, I. Käpplinger3, W. Brode3,
H. Mannebach4, J. Müller1
1
Electronics Technology Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
2
ZeMA, Center for Mechatronics and Automation Engineering
Charitable GmbH, Saarbrücken, Germany
3
Siegert Thinfilm Technology GmbH, Hermsdorf, Germany
4
Hydac Electronic GmbH, Saarbrücken, Germany
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Program MME 2012
Industrial presentations
A 17
Modular micromechanical testing system
Simon Muntwyler1, Felix Beyeler1
1
FemtoTools, Zurich, Switzerland
LOT-Oriel, Darmstadt, Germany
A 18
Innovative products for the semiconductor, PV and MEMS industries
Gerald Wiltsche
Euris GmbH, München
A 19
CDA - compression injection molding for complex microstructures
on plastic
Pia Harju
CDA GmbH, Suhl
Session B
Humboldt Building, Humboldt Lecture Hall
Monday, September 10, 2012, 2:30 - 4:30 p.m.
Sensing and actuation applications
B 01
Static large-angle micromirror with aluminum nitride springs
S. Weinberger, Y. Cheriguen, M. Hoffmann
Micromechanical Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
B 02
Design of a biaxial nanoprobe utilizing Matlab Simulink
B. Goj, M. Hoffmann
Micromechanical Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
B 03
Electromagnetic changer for AFM tips
B. Goj1, N. Vorbringer-Dorozhovets2, C. Wystup1, M. Hoffmann1,
E. Manske2
1
Micromechanical Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
2
Measurement Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
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Program MME 2012
B 04
Gluing free assembly of an advanced 3D structure using visual
servoing
S. Dembélé, N. Piat, N. Marturi, B. Tamadatze,
FEMTO-ST Institute, UMR CNRS 6174 - UFC / ENSMM / UTBM
Automatic Control and Micro-Mechatronic Systems Department,
Besançon, France
B 05
Packaged MEMS magnetic field sensor based on magnetoelectric
composites
S. Marauska1, R. Jahns2, C. Kirchhof3, M. Claus1, E. Quandt3,
R. Knöchel2, B. Wagner1
B 06
1
Microsystems Technology, Fraunhofer Institute for Silicon
Technology ISIT, Itzehoe, Germany
2
High-frequency Laboratory, Institute of Electrical Engineering,
Christian-Albrechts-Universität, Kiel, Germany
3
Inorganic Functional Materials, Institute for Materials Science,
Christian-Albrechts-Universität, Kiel, Germany
Flexible and transparent pyroelectric polymer sensor for light spot
position detection
R. Barb, G. Buchberger, W. Hilber, B. Jakoby
Johannes Kepler University Linz, Institute of Microelectronics and
Microsensors, Linz, Austria
B 07
Fine dust measurement with electrical fields concept for a capacitive
setup
T. Geiling, S. Leopold, Y. Cheriguen, M. Hoffmann
Micromechanical Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
B 08
Monitoring MEMS switch closure time as a measure of reliability
C. Kosla, C. Do, M. Hill
Nimbus Centre, Cork Institute of Technology, Bishopstown,
Cork, Ireland
B 09
Design of biological sensors utilising mode-localisation in
electrostatically coupled microresonators
G. S. Wood1, S. H. Pu1,2, C. Zhao1, M. Kraft1
1
University of Southampton, Nano Research Group,
Highfield Campus, School of Electronics and Computer Science,
Southampton, United Kingdom
2
University of Southampton Malaysia Campus,
Nusajaya, Johor, Malaysia
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Program MME 2012
B 10
Design of an ultra-sensitive MEMS force sensor utilizing mode
localization in weakly coupled resonators
C. Zhao1, G. S. Wood1, S. H. Pu1,2, M. Kraft1
B 11
1
Nano Research Group, University of Southampton,
School Electronics and Computer Science, Highfield Campus,
Southampton, United Kingdom
2
University of Southampton Malaysia Campus,
Nusajaya, Johor, Malaysia
Fast video rate AFM silicon cantilever
M. Hofer, K.Gorovoy, I. W. Rangelow
Micro- and Nanoelectronic Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
B 12
Development of a humidity micro switch based on humidity
sensitive polymers
C. Bellmann1, R. Sarwar2, A. Steinke3, T. Frank3, H. F. Schlaak2,
G. Gerlach1
B 13
1
Technische Universität Dresden, Laboratory of Solid-State
Electronics, Dresden, Germany
2
Technische Universität Darmstadt, Laboratory of
Microtechnology and Electromechanical Systems,
Darmstadt, Germany
3
CiS research institute for microsensorical technology and
photovoltaics, Erfurt, Germany
Prototype energy harvesting wheel speed sensor for anti-lock
braking
D. Parthasarathy1, P. Enoksson1, R. Johansson2
B 14
1
Chalmers University of Technology, Gothenburg, Sweden
2
Volvo Group Trucks Technology, Advanced Technology and
Research, Gothenburg, Sweden
Effects on imaging by tilting electrostatic actuators in electron
microscopy
A. J. Been, R. Vermeer, L. A. Woldering, L. Abelmann
MESA+ Institute for Nanotechnology, University of Twente,
Enschede, The Netherlands
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Program MME 2012
B 15
Closed loop operation of time-based accelerometers
R. A. Dias1, R. F. Wolffenbuttel2, E. Cretu3, L. A. Rocha1
B 16
1
Institute of Polymer and Composites, University of Minho,
Campus Azurem, Guimarães, Portugal
2
Faculty EEMCS, Delft University of Technology,
Delft, The Netherlands
3
Elect. and Comp. Eng., University of British Columbia,
Vancouver, Canada
Optimization of the uniaxial nature of strain on cantilever for
MOSFET sensors
Y. Wang, S. J. N Mitchell, B. M. Armstrong
School of Electronics, Electrical Engineering and Computer
Science, Queen’s University Belfast, Belfast, United Kingdom
B 17
Electrically tunable diffractive optical elements and DFB lasers based
on polymer-LC composites and elastomers
J. Stumpe1,2, O. Sakhno1, Y. Gritsai1, R. Rosenhauer1, S. Döring2,
M. Kollosche2, G. Kofod2
B 18
1
Fraunhofer Institute for Applied Polymer Research,
Golm-Potsdam, Germany
2
University of Potsdam, Institute of Physics, Potsdam, Germany
Comparing silicon deposition techniques for visible-blind detector
fabrication
A. Emadi1, P. Enoksson2, J. H. Correia3, R. F. Wolffenbuttel1
1
Faculty EEMCS, Delft University of Technology,
Delft, The Netherlands
2
Micro and Nanosystems, MC2,
Chalmers University of Technology, Gothenburg, Sweden
3
Dept. of Industrial Electronics, University of Minho,
Campus Azurem, Guimarães, Portugal
20
Program MME 2012
Session C
Humboldt Building, Humboldt Lecture Hall
Tuesday, September 11, 2012, 10:00 a.m. - 12:30 p.m.
Microcomponent packaging and solutions
C 01
Reliability of thermosonic bonded palladium wires in high
temperature environments up to 350 °C
W. Heiermann1, T. Geruschke1, K. Grella1, M. Bartsch2,
T. Bormann1, M. Ruß1, H. Vogt1
C 02
1
Fraunhofer Institute for Microelectronic Circuits and Systems
IMS, Duisburg, Germany
2
University of Duisburg - Essen, Institute of Experimental Physics
and CENIDE, Duisburg, Germany
Successful fabrication of polymer based low voltage electrostatic
actuators
N. Lange1,2, F. Wippermann1, E. Beckert1, R. Eberhardt1,
A. Tünnermann1,2
C 03
1
Friedrich Schiller University of Jena, Institute of Applied Physics,
Jena, Germany
2
Fraunhofer Institute for Applied Optics and Precision
Engineering, Jena, Germany
Tungsten-siliconnitride medium for mega- to gigayear data storage
J. de Vries1, L. Abelmann1, A. Manz2, M. Elwenspoek1,2
1
MESA+ Institute for Nanotechnology, University of Twente,
Enschede, The Netherlands
2
Freiburg Institute for Advanced Studies,
School of Soft Matter Research, Freiburg, Germany
Device and process characterization
C 04
Investigation of piezoresistive effect in p-type silicon using four
point bending method
T. H. Tan1, D. W. McNeill1, P. Baine1, J. H. Montgomery1,
S. J. N Mitchell1, H. Wadsworth2, S. Strahan2, I. Bailie2
1
School of Electronics, Electrical Engineering and Computer
Science, Queen’s University Belfast, United Kingdom
2
Schrader Electronics Ltd.
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Program MME 2012
C 05
The influence of surface tension on anisotropic wet etching of
silicon
A. Brockmeier1,2, F. J. Santos Rodriguez1, U. Hilleringmann2
C 06
1
Infineon Technologies Austria AG, Villach, Austria
2
University of Paderborn, Department of Electrical Engineering
and Information Technology, Paderborn, Germany
Stress controlled piezoelectric AlN-MEMS-Resonators with
molybdenum electrodes for GHz applications
H. Mehner1, K. Brueckner2, D. Karolewski3, S. Michael3,
M. A. Hein2, M. Hoffmann1
C 07
1
Micromechanical Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
2
RF and Microwave Research Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
3
Institute of Microelectronic and Mechatronic Systems,
Ilmenau, Germany
Optical and electrical characterization of in-plane modes of
AlN-based piezoelectric vibrating MEMS
V. Ruiz1, T. Manzaneque1, J. Hernando-García1, A. Ababneh2,
H. Seidel3, E. Vikhagen4, J. L. Sánchez-Rojas1
C 08
1
Área de Tecnología Electrónica,
Universidad de Castilla-La Mancha, Ciudad Real, Spain
2
Hijjawi Faculty for Engineering Technology, Yarmouk University,
Irbid, Jordan
3
Chair of Micromechanics, Microfluidics/Microactuators,
Faculty of Natural Sciences and Technology II,
Saarland University, Saarbrücken, Germany
4
Optonor, Trondheim, Norway
TiO2/SiO2 optical filters based on Fabry-Perot resonators for
endoscopy
M. F. Silva, C. G. Costa, L. M. Goncalve, J. H. Correia
University of Minho, Dept. Industrial Electronics, Campus Azurem,
Guimaraes, Portugal
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Program MME 2012
C 09
Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin
film membranes
O. Sardan Sukas1, H. Yagubizade1, J. W. Berenschot1,
M. J. de Boer1, M. D. Nguyen1,2, L. Abelmann1
C 10
1
MESA+ Institute for Nanotechnology, University of Twente,
Enschede, The Netherlands
2
SolMateS BV, Enschede, The Netherlands
Structural analysis of ultrasharp silicon microneedles
C. O'Mahony
Microsystems Centre, Tyndall National Institute,
University College Cork, Cork, Ireland
C 11
Low-cost uncooled infrared detector using microcantilever arrays
with optical readout
M. Steffanson1, K. Gorovoy1, R. Kampmann2, R. Kleindienst²,
S. Sinzinger2, I. W. Rangelow1
C 12
1
Micro- and Nanoelectronic Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
2
Technical Optic Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
Inverse kinematics of a new five degree-of-freedom spatial parallel
micromanipulator
K. Kobus, G. Karpiel, D. Prusak
AGH University of Science and Technology,
Department of Robotics and Mechatronics, Kraków, Poland
C 13
Impact force modelling for MEMS ohmic switch
C. Do, M. Lishchynska, M. Hill
Nimbus Centre, Cork Institute of Technology, Bishopstown,
Cork, Ireland
Microfluidic components and systems
C 14
Bistable polymer micro valve with a thermo-pneumatic actuator
A. Barth, C. Gerhardy, W. K. Schomburg
RWTH Aachen University, Konstruktion und Entwicklung von
Mikrosystemen (KEmikro), Aachen, Germany
23
Program MME 2012
C 15
Design and technology concept for a novel micropump coping
without moving mechanical components
L. Dittrich, C. Endrödy, M. Hoffmann
Micromechanical Systems Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
C 16
Microfabrication of low thermal mass heated nebulizer chips for
mass spectrometry
M. Wirtssohn1, L. Sainiemi2, M. Haapala2, S. Franssila1
C 17
1
Department of Materials Science and Engineering,
Aalto University, Finland
2
Division of Pharmaceutical Chemistry, University of Helsinki,
Finland
A novel temperature control method for shortening thermal cycling
time to achieve rapid polymerase chain reaction (PCR) in a
disposable polymer microfluidic device
M. Bu1,2, I. R. Perch-Nielsen2, K. S. Sørensen1,2, J. Skov2, Y. Sun1,
D. D. Bang3, M. E. Pedersen2, M. F. Hansen1, A. Wolff1
1
Technical University of Denmark, DTU Nanotech, Kgs. Lyngby,
Denmark
2
DELTA, Hørsholm, Denmark
3 Technical University of Denmark, National Food Institute,
Søborg, Denmark
C 18
Electrochemically etched porous silicon membrane with precisely
sized micropores for contaminant filtration
A. A. Hamzah, H. E. Zainal Abidin, J. Yunas, C. F. Dee, B. Y. Majlis
Universiti Kebangsaan Malaysia, Institute of Microengineering and
Nanoelectronics (IMEN), Bangi, Selangor, Malaysia
C 19
Electrospray deposition from fountain pen AFM probes
J. Geerlings1, E. Sarajlic1,2, J. W. Berenschot1, L. Abelmann1,
N. R. Tas1
1
MESA+ Research Institute, University of Twente, Enschede, The
Netherlands
2
SmartTip B.V., Enschede, The Netherlands
24
Program MME 2012
Session D
Humboldt Building, Humboldt Lecture Hall
Tuesday, September 11, 2012, 2:30 - 4:30 p.m.
Design and simulation tools
D 01
Concept and simulation of a fluidic particle transporter with
pneumatic actuation
A. Rockenbach1, C. Brücker2, U. Schnakenberg1
D 02
1
RWTH Aachen University, Institute of Materials in Electrical
Engineering 1, Aachen, Germany
2
TU Bergakademie Freiberg, Institute for Mechanics and
Fluid Dynamics, Freiberg, Germany
Comsol models of two different microphones membrane with a
piezoresistive sensing element
L. Petricca1, P. Ohlckers1, D. Wang2
D 03
1
Vestfold University College; IMST, Borre, Norway
2
Sintef, Oslo, Norway
Analytical electromechanical model for CMUTs with multi-layered,
non-uniform-thickness diaphragm
P. Pursula1,2, J. Saarilahti1, O. Paul2, V. Viikari1
D 04
1
VTT Technical Research Centre of Finland, Espoo, Finland
2
IMTEK Department of Microsystems Engineering, University of
Freiburg, Freiburg, Germany
Determination of influence coefficients to calculate the thermal
expansion of ball screws for instationary loads
J. Edler
Graz University of Technology, Institute of Production Engineering,
Graz, Austria
D 05
Influence of the nonlinearity introduced by the van der Waals force
on the behaviour of NEM resonators
M. Zanaty1,2,3, R. Jansen2, V. Rochus2, M. Abbas3, A. Witvrouw2,
H. A. C. Tilmans2, X. Rottenberg2
1
KACST-Intel Consortium Center of Excellence in Nanomanufacturing Applications (CENA), Riyadh, KSA
2
IMEC v.z.w., Leuven, Belgium
3
Department of Electrical Engineering, Faculty of Engineering,
Assiut University, Egypt
25
Program MME 2012
D 06
New modelling approach for micro energy harvesting systems based
on model order reduction enabling truly system-level simulation
T. Aftab1, D. Hohlfeld2, E. B. Rudnyi3, T. Bechtold3, J. G. Korvink1
D 07
1
Freiburg University, Institute for Microsystems Engineering,
Freiburg, Germany
2
Reutlingen University, Reutlingen, Germany
3
CADFEM GmbH, Grafing, Germany
Thermal analysis methods for automated design of composite
materials in Termet software
I. Farmaga, O. Matviykiv, M. Lobur, P. Shmigelskyi
Lviv Polytechnic National University, CAD Department,
Lviv, Ukraine
D 08
Simulation, development and characterization of platinum
microheater on polyimide membrane
M. Predanocy1, I. Hotovy1, I. Kosc1, V. Rehacek1, I. Kostic2,
L. Spiess3
1
Slovak University of Technology, Faculty of Electrical Engineering
and Information Technology, Bratislava, Slovakia
2
Institute of Informatics, Slovak Academy of Sciences,
Bratislava, Slovakia
3
Materials of Electronics Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
BioMEMS
D 09
Bio instrument for determining the viability of cells on the basis of
the impedance measurement
A. Rösner, T. Frank, I. Tobehn, A. Steinke
CiS research institute for microsensorical technology and
photovoltaics, Erfurt, Germany
D 10
Risk enhancement by caffeine-consumption: drug-caffeine
interference detected by microcombinatorial screenings using
micro fluid segment technique
J. Cao1, J. Goldhan1, S. Schneider1, K. Martin2, J. M. Köhler1
1
Dept. Physical Chemistry and Micro Reaction Technology,
Institute for Chemistry and Biotechnology,
Ilmenau University of Technology, Germany
2
Hans Knöll Institute for Natural Products Research,
Department Bio Pilot Plant, Jena, Germany
26
Program MME 2012
D 11
Study of population dynamics of E. Coli in a microfluidic landscape
incorporating a toxic gradient
K. Kolari1, D. Mojzita1, I. Stuns1, M. Penttilä1, K. Hjort1,2
D 12
1
VTT Technical Research Centre of Finland, Espoo, Finland
2
Microsystem Technology, Engineering Sciences,
Uppsala University, Uppsala, Sweden
Study on cellar behaviors on different micro/nano structures of
anodic aluminum oxide template
Y. K. Shen1,2, H. M. Hsiao3, W. J. Chen3
D 13
1
School of Dental Technology, Collage of Oral Medicine,
Taipei Medical University, Taipei, Taiwan, R.O.C.
2
Center for Biomedical Microdevice, Taipei Medical University,
Taipei, Taiwan, R.O.C.
3
Department of Mechanical Engineering,
National Taiwan University, Taipei, Taiwan, R.O.C
New ways of measuring pull-in voltage and transient behavior of
parallel-plate capacitive MEMS transducers
C. Glacer1,2, A. Dehé2, M. Nawaz2, R. Laur1
1
Institute for Electromagnetic Theory and Microelectronics (ITEM),
University of Bremen, Bremen, Germany
2
Infineon Technologies AG, Neubiberg/Munich, Germany
Micro-Nano integration
D 14
Synthesis of ZnO nanoflowers and their wettabilities and
photocatalytic properties
X. D. Guo1, L. E. Heleseth1, Q. Z. Zhao2
D 15
1
Department of Physics and Technology, University of Bergen,
Bergen, Norway
2
State Key Laboratory of High Field Laser Physics,
Shanghai Institute of Optics and Fine Mechanics,
Chinese Academy of Sciences, Shanghai, China
Contact mechanics and needle like surfaces for micro-nano
integration
S. Keshavarzi1,2, U. Mescheder2, H. Reinecke1, A. Kovacs2
1
University of Freiburg, IMTEK, Freiburg, Germany
2
Hochschule Furtwangen University, IAF, Furtwangen, Germany
27
Program MME 2012
D 16
In-situ grown of nanostructured zinc oxide layer for conductometric
gas microsensors
J. Gonzalez-Chavarri, I. Castro-Hurtado, G. G. Mandayo,
E. Castaño
Ceit and Tecnun, San Sebastián, Spain
Materials
D 17
Patterned array of nanoporous silicon
D. Wang1, S. Schönherr2, C. Ronning2, P. Schaaf1
D 18
1
Materials of Electronics Group, IMN MacroNano®,
Ilmenau University of Technology, Germany
2
Institute for Solid State Physics, Friedrich-Schiller-University Jena,
Jena, Germany
Future electrode materials for supercapacitors in intelligent wireless
sensor system
H. Staaf, P. Enoksson, P. Lundgren
Chalmers University of Technology, Gothenburg, Sweden
System integration of MEMS, NEMS, RF-MEMS and MOEMS
D 19
Contactless pin-flange adapter for high-frequency measurements
S. Rahiminejad1, E. Pucci2, S. Haasl3, P. Enoksson1
D 20
1
Chalmers University of Technology, Department of
Microtechnology and Nanoscience, Gothenburg, Sweden
2
Chalmers University of Technology, Department of Signals and
Systems, Gothenburg, Sweden
3
Royal Institute of Technology, Stockholm, Sweden
Monolithic integration of MOEMS on CMOS backplanes using
surface micromachining techniques
M. List, M. Friedrichs, M. Müller
Fraunhofer Institut für Photonische Mikrosysteme IPMS,
Dresden, Germany
28
Program MME 2012
Social Events
Sunday, September 9
4:00 – 7:00 p.m.
Hotel Tanne, Ilmenau
Welcome reception
7:30 – 9:00 p.m.
St. Jakobus Church, Ilmenau
Concert “Jump for Joy”
Gospel, blues ballades and classic jazz
Afterwards
Hotel Tanne, Ilmenau
Get-together
All lecturers, participants, guests and
companies are kindly welcome to the
reception.
You are kindly invited to enjoy
Thuringia’s hospitableness in an
informal atmosphere.
Monday, September 10
5:00 – 8:00 p.m.
Excursion
Travelling as in the age of the industrial
revolution: steam locomotive trip to
Thuringia’s most altitudinous station
We invite you to join a trip with the
steam train Rennsteigbahn to the
Rennsteig station.
Afterwards
Hotel Tanne, Ilmenau
Get-together
Enjoy a convivial get-together away
from purchasing decisions,
presentations and business deals.
Everything is laid on for a fun evening
after a successful day at the congress.
29
Program MME 2012
Tuesday, September 11
5:00 – 8:00 p.m.
Social event packages
(All social event packages start
at the same time)
Package 1: Hike to the Kickelhahn
Package 2: Guided tour of a tourist
mine and through the Ilmenauer Fass
Package 3: Bobsled ride on a
competition racing track
Afterwards
Private party
BH Student’s Club
Scientific Guided Tour
Wednesday, September 12
9:00 – 10:00 a.m.
Scientific guided tour ZMN
Center for Micro- and
Nanotechnologies
All lecturers and participants are kindly
invited to take part in the guided tour
through the ZMN.
Meeting place:
Being a central institution of the
University, the Center for Micro- and
Nanotechnologies (ZMN) provides a
platform of technologies for basic and
for applied research in the field of micro
and nano systems.
30
Program MME 2012
Further Events
Wednesday, September 12
10:00 a.m. – 12.00 noon
Brokerage Event
Humboldt Building
An information and face2face
networking event in the field of
micromechanics and microsystems
Enterprise Europe Network Thueringen
and Ilmenau University of Technology
are organising a face2face networking
event in collaboration with the regional
cluster for micro and nano technology,
MNT Mikro-Nanotechnologie Thüringen
e.V.
1:00 – 6:00 p.m.
Humboldt Building
Micro-Nano-Conference 2012
"nano goes makro"
MNT Mikro-Nanotechnologie Thüringen
e.V., a cluster initiative of currently 45
research institutes and high-technology
companies in Thuringia, Germany,
invites you to this event day of
microsystems-, nano- and plastic
processing technologies.
31
Program MME 2012
General Information
Meals and Refreshments
At the Workshop, refreshments will be offered during the coffee breaks in
the foyer of the conference building.
All participants may take advantage of the catering service in the Mensa
(refectory) of the university. You can get there within a few walking minutes
from the conference building.
Tickets for Lunch on Monday, September 10 and Tuesday, September 11,
will be handed out in the conference office. The Mensa-Room IV is reserved
only for the participants of the MME Workshop.
The cafeteria “MINI” at the Humboldt Building also provides meals and
beverages on a limited scale (direct payer).
Opening period: 11:00 a.m. – 2:00 p.m.
Internet Café
Throughout the MME-Workshop there are computers linked to the Internet
available at the information desks, Lecture Room 210, Humboldt Building
for the use of participants.
SSID: TUI-Guest
You will be redirected to https://1.1.1.1/login.html
(accept the invalid connection certificate)
Login: mme2012@tu-ilmenau.de
Password: tui12mme
In all lecture rooms WLAN is available.
In order to make sure that your presentation goes off smoothly, please save
your PowerPoint presentation for the conference by September 3, 2012 as
follows: www.mme2012.org -> Authors Guidelines
32
Program MME 2012
Ilmenau, Germany
Sponsors and Partners
The Organization Committee of the MME 2012 would like to thank all
sponsors and partners for their support.
Oxford Instruments
GmbH
LOT-Oriel GmbH &
Co. KG
Wiesbaden,
Germany
Darmstadt, Germany
Euris GmbH
Roth & Rau
MicroSystems GmbH
München, Germany
HohensteinErnstthal, Germany
MINITRON
Elektronik GmbH
CDA GmbH
Suhl, Germany
Ingolstadt, Germany
Enterprise Europe
Network c/o STIFT
Nikon GmbH
Düsseldorf, Germany
Erfurt, Germany
Erfurter Bahn GmbH
SIOS Meßtechnik
GmbH
Erfurt, Germany
Ilmenau, Germany
Compugraphics Jena
GmbH
IOP Publishing Ltd.
Jena, Germany
Bristol,
United Kingdom
MicroChemicals
GmbH
LLT Applikation
GmbH
Ulm, Germany
Ilmenau, Germany
33
Program MME 2012
Ilmenau, Germany
Imprint
Publisher:
Rector of the Ilmenau University of Technology
Univ.-Prof. Dr. rer. nat. habil. Dr. h. c. Prof. h. c. mult. Peter Scharff
Editor:
Marketing Department
(Phone: +49 3677 69-2520)
Andrea Schneider
conferences@tu-ilmenau.de
Faculty of Mechanical Engineering
IMN MacroNano
®
Chair for Micromechanical Systems
Univ.-Prof. Dr.-Ing. habil. Martin Hoffmann
Boris Goj, Ilona Hirt
Editorial Deadline
August 23, 2012
© Ilmenau University of Technology (Thür.) 2012
34