silane production - GT Advanced Technologies

POLYSILICON
SILANE PRODUCTION
Supplying Basic Engineering Packages for Ultra-Pure Silane Production
The production technology package offered by GT Advanced Technologies to produce
silane, results in ultra-pure gas that can be sold on the merchant market or used for the
production of electronics-grade polysilicon or consumed in thin-film applications.
GT personnel have direct design, construction, commissioning, startup, analytical
and operational experience at several silane plants, and the company has supplied
technology to numerous additional clients. Continuously at the forefront, GT
supplied the silane production equipment and technology to SMP Ltd. in Korea,
which is a joint venture between MEMC Singapore (a subsidiary of MEMC Electronic
Materials Inc.) and Samsung Fine Chemicals.
The high volume hydrochlorination and silane production/purification package is
capable of producing approximately 12,500 MTA of silane from a single hydrochlorination fluid bed reactor (FBR) and a single silane production/purification line.
Cost of ownership is lowered by several million dollars because of lower capital costs
when compared to facilities utilizing a dual FBR and dual silane production/
purification approach. The capital expenditure is reduced by minimizing equipment and
simplifying the construction management complexity.
Market Leadership
• Hydrochlorination and Silane for the
SMP polysilicon facility
• Detailed design of modular silane
production plant via hydrochlorination
• Hydrochlorination and Silane for the
SMP polysilicon facility
• Largest installed hydrochlorination
base in the world, with more plants
coming online in 2014
Key Hydrochlorination and Silane Performance Metrics:
• Over 125 collective years of silane
• Hydrochlorination TCS conversion.............................................................>25%
production experience in design,
• Online time................................................................................................................>8,000 hours
• Purity..............................................................................................................................VLSI grade silane
• Annual capacity...........................................................up to 12,500 MTA silane from a single FBR
Growth Begins Here™
engineering and operations
POLYSILICON
Silane Production
Service Commitment
Silane and Chlorosilane Analytical Processes
GT Advanced Technologies is
In the hydrochlorination and silane production/purification processes, it is of the
utmost importance to remove impurities before the silane is used for polysilicon
production or sold to the merchant market. However, in order to accomplish
this, impurities must first be quantified as well as identified precisely where they
concentrate in the process. The Silane and Chlorosilane Analytical technology
package (sold separately) from GT allows accurate measurement of trace impurities
in silane and chlorosilanes to meet stringent quality requirements for the silane
merchant market or electronics-grade polysilicon producers.
dedicated to delivering the
highest levels of satisfaction
in the implementation of our
processes and equipment.
We respond to the needs of
our customers with proven
solutions, comprehensive
training and support.
About GT Advanced
Technologies
GT Advanced Technologies Inc. is
a leading diversified technology
company producing advanced
materials and innovative crystal
growth equipment for the
global consumer electronics,
power electronics, solar and
LED industries. Its technical
Facility Design Services Promote Shorter Schedules
In addition to supplying silane production and purification, GT provides complete
services to assist in building and safely operating a polysilicon manufacturing plant.
GT’s global support team of polysilicon experts is committed to meeting customer
requirements for polysilicon, silane and TCS production anywhere in the world.
Polysilicon producers that choose GT, benefit from our project execution
experience, comprehensive knowledge base and relationships with various FEED,
integration and EPC(M) service providers. Through these relationships, we’ve
created a proven workflow to expedite the design, construction, commissioning
and start-up for a new polysilicon facility or optimizing an existing polysilicon facilty.
GT Advanced Technologies’ personnel work with engineering design firms to merge
our process technologies with stage-gated project execution – from feasibility
studies to process commissioning and start-up.
innovations accelerate the use
of advanced materials, enabling
a new generation of products
across this diversified set of
global markets.
Worldwide Headquarters
243 Daniel Webster Highway, Merrimack, NH 03054 (USA)
Phone: +1 603.883.5200 Fax: +1 603.595.6993
www.gtat.com
Polysilicon Equipment Sales & Service
101 E. Front, Suite 401
Missoula, MT 59802 (USA)
Phone: +1 406.728.6200
Fax: +1 406.728.6230
Polysilicon@gtat.com
Regional Sales Offices
Hong Kong
Korea
Shanghai
Taiwan
Worldwide Product Support
24/7 Hotline: +1.855.425.4828
ProductSupport@gtat.com
© 2013-2014 GTAT Corporation. All rights reserved. Subject to change without notice. The GT logo is a trademark of GTAT Corporation. DS.POLY.041614