RF/Microwave Die Attach of Gallium Nitride Devices Achieving Less
Transcription
RF/Microwave Die Attach of Gallium Nitride Devices Achieving Less
RF/Microwave Die Attach of Gallium Nitride Devices Achieving Less Than 1% Voiding in a Flux-Free Environment Bruce Wilson SST International Downey, CA IMAPS Chesapeake Chapter Winter Technical Symposium February 19, 2014 Conditons • Gold Tin preform material No Flux Used • Small table top reflow vacuum solder station • Customer provided samples and undersized preforms • Process profile techniques to reduce voiding • SAM results provided by customer Gold Tin Material • 80Au 20Sn flat sheet form 2 mils thick • Melting temperature 278°C • After initial reflow subsequent melting the alloy becomes more gold rich and the melting point is increased drastically • Review phase diagram • Disadvantage and Advantage AuSn Melting Point Changes • • • • 2% deviation at 18% tin melting point 350°C 4% deviation at 16% tin melting point 400°C Reference : Indium Corp. of America Disadvantage : Cannot reflow at same temperature • Advantage : AuSn can be used for both die attach and lid seal on same package AuSn Properties • Does not scavenge gold as conventional tin-rich solders • Tin content is tied up in gold-tin intermetallics • Forming Au5Sn during the soldering operation • Gold wetting reaction proceeds at a slow rate and scavenges gold less than Sn rich solders. • Thus more gold is available to prevent underlying nickel diffusing to the gold surface Unique Aspects of AuSn Solder • Visual appearance: shiny bright smooth silver color – indicative of proper reflow temperature • Dull rough or gold colored appearance – indicative of over-heating excessive reflow temperature • AuSn preforms do not require any chemical acid treatment to remove surface oxides as required by other Indium, Lead, or Tin based solder alloys • AuSn is brittle and not easily trimmed or cut Key Requirements for Gold Plating of Substrates and Lids • No Brighteners - additives added to the gold plating bath to enhance color appearance • Highest quality gold is needed • SST plating requirements: • Underlying nickel 50 to 150 micro inch nickel sulfamate per QC-N-290A followed by • Gold 1.25 microns thick Type III Grade A (99.9% minimum) per ASTM B488-01 Maximum Knoop hardness of 90 • Low phosphorous content 4 to 7% good for soldering wetting but high level 12 to 14% does not allow solder wetting and can cause micro cracking in the solder interface Equipment Issue with AuSn Sized Preforms • All AuSn supplied preforms 0.002 inch thickness • Supplied preforms not sized for either GaN or bond support die • 2 hand trimmed undersized preforms used side by side for each GaN die • Possible voiding from space between hand trimmed preforms during reflow • Typically preform is a single piece at 90-95% of die area for 1 to 2 mil thick preform material of AuSn • Substrate too thick for X Ray : required machine shop to remove about 50 mils of substrate for X Ray for 1st part • X Ray indicates essentially void free solder interface Preforms & Die (GaN & bond support) GaN device 102 mils by 37 mils Bond support die 130 mils by 30 mils Hand trimming of supplied preforms was required for assembly Used Hand Trimmed Multiple Preforms Non Ideal Case Typical preform size design is 90 to 95% of die area Using multiple preforms not advised Die Located Inside Graphite Insert With Bezel for GaN die Programmed Profile Used Run time 16 mins Void Reduction Features Used in the Reflow Profile After Run 1 310C 45 Seconds Reflow Solder has good shiny appearance Milled Backside of Thick Substrate To be Able to Use X Ray X Ray of Milled Substrate Run 1 Standard X Ray Contour X Ray Photos of Several Packages Run 4 Part 4A Run 5 Part 5A Run 6 Part 6A Run 7 Part 7A CSAM Scans of Voids Conclusion: SAM Void Summary of 20 Die (10 GaN Die & 10 Bond Support) Even with non ideal preform size. SST used two undersized preforms for each GaN die. SST still achieved an Average Total Void of < 0.6 % THANK YOU for your attention