Lam Research AG Environmental Statement and Sustainability Report

Transcription

ENVIRONMENTAL STATEMENT AND
SUSTAINABILITY REPORT 2014
LAM RESEARCH AG, SEZ-STRASSE 1
9500 VILLACH, AUSTRIA
CONTENT
Foreword
4
Lam Research AG, Various Company Statistics 5, Location and Surroundings 6
Employees
7, Products und Technology 8, Innovation and Future 10
The Environmental Management System
11,
Mission, Vision, Core Values
Global Environmental, Health, Safety and Sustainability Commitment Policy 13
Stakeholder 14, Concise Description of the Management System,
Organization of the Environmental Management System 15, Representatives 16
Legal Compliance 17, Involvement of Employees 18
12
19,
Measures for States of Emergency 20
Programs for Improvement Health and Occupational Safety 21, Health and Primary Health,
Occupational Safety
Occupational Safety - Emergency Prevention, Safety at the workplace
Perks - Offers
Social
22, Canteen 23, Health 24
25, Local Activities 26, Cultural Activities 27
Identification and Assessment of the Environmental Impact
Core Indicators
28
30, Direct Environmental Aspects 31, Resources, Waste Management,
Water and Waste Water, Energy, Emissions, Handling of Hazardous Materials, Water Pollutants and
Contaminated Parts, Soil Protection and Legacy Issues, Noise, Indirect Environmental Aspects
35
Product-related Environmental Impacts, Inclusion of Suppliers and Disposal Companies
Environmentally-relevant Figures and Key Indicators, Environmental Controlling
Environmental Parameters, Input 38, Output, Basis for Calculation 39
Material Input, Raw Materials Products and Laboratory, Town Water 40
Energy Requirement 41, Pollution 42, Waste 44
Environmental Programs
46, Implementation of the Environmental Program 2012,
Implementation of the Environmental Program 2013
GRI 3.1 Content Index
Certificate of Validity
37
47, Environmental Program 2014 48
49
55
Date of Next Environmental Statement, Contact, Imprint
56
LAM RESEARCH AG – ENVIRONMENTAL STATEMENT AND SUSTAINABILITY REPORT 2014
2
The following Environmental Statement serves
as an information source for all stakeholders
who are interested in our environmental efforts.
Last year it was decided that the Environmental
Statement which has been published regularly
since 1997; should be broadened to a
Sustainability Report by including further aspects.
Scope of the Report
The report encompasses the requirements of EMAS-III-VO and the indicators of GRI 3.1 as is described in the
tables attached.
All data refer to the site in Villach, specifically to the business activities at the site in Villach, excluding GRI indicators as they are stated in the Proxy & Annual Report.
3
FOREWORD
The Lam Research Corporation is a significantly large supplier of wafer processing tools and the associated services for the semiconductor industry.
Lam Research AG, as a technology and/or market leader in single-wafer-cleaning processes collaborates to
overcome the demanding challenges in semiconductor processes.
The business activity of the Austrian Lam Company remains focused on the wafer cleaning market.
The proceeding expanded Environmental Policy: according to the GRI3.1 indicators documents the measures
taken at site under social, economic and ecological aspects. Lam Research lays a lot of value on the interests
and requirements of all stakeholders being met in the best possible manner in the realm of all business activities.
Lam Research AG strives for sustainability in all business relationships; in contact with the authorities as well as
the community, to be a reliable and stable partner.
These high goals can only be achieved when all or our employees act according to the Core Values and thereby
making a considerable contribution to maintaining our natural life base and consequent success of Lam Research. For this we would like to convey a special thank you to our employees.
Lam Research is obliged to continual optimization with regard to the requirements of the stakeholder in the
framework of business activities. According to the Core Values, it is of interest for Lam Research AG to maintain
a stable and long-term cooperation with partners/stakeholders. Integrity, trust and respect are a part of the Core
Values and are essential for cooperation.
One further source of information that is partly connected to the report is the Annual & Proxy Report which is
available on the corporate website.
Jackie Seto
Christian Bulfon
Georg Smounig
Ingo Bartz
Vice President
& General Manager
Spin Clean Division
Managing Director,
Business Operations Management
Health & Safety Manager
Environmental
Manager
4
LAM RESEARCH AG
Various Company Statistics
Company Name: Lam Research AG
Address: SEZ Strasse 1, 9500 Villach
Scope: Research, Development and Production of Process Tools for Semiconductor Manufacturing.
ANACE-Code: 28.99
Land Area and Dedicated Land
Land Surface Area: 78,898 m²
Land Surface Area (paved): 31,832 m²
Land Surface Area (unpaved): 32,181 m²
Land Surface Area (built up): 14,885 m²
Dedicated Land according to Municipality Villach: Building Area – Special Area – Technology Park
i.e regional planning restrictions - individual case approval
Employed – as at end 2013: 574
-ST
SE Z
RAILWAY LINE
DR A
RA
SS
E
U
5
LAM RESEARCH AG
Location and Surroundings
Lam Research AG is a subsidiary company of Lam Research Management GmbH (to 99.9%) with head office in
Villach and Lam Research International B.V (to 0.01%) with head office in the Netherlands. All of these companies
are 100% indirect subsidiaries of the parent company Lam Research Corporation (LRC) with head quarters in
Fremont, California, USA.
Lam Research AG site in Villach was first established as SEZ AG and was founded in 1986 as SEZ GmbH. As
early as 1988 SEZ AG was a pioneer for Single Wafer Wet Spin Clean technology, especially in Back End of Line
(BEOL). In 2008 SEZ AG was taken over by Lam Research Corporation.
The company is located in Villach between the long-distance railway line of the Austrian federal railways and the
river Drau at the end of SEZ-Strasse, on which only trade and industrial businesses are located.
The buildings and out-buildings include a variety of uses such as handling areas and similar utilities.
Stores 12%
Server Rooms (IT) 1%
Training Center/Prototyping/
Research/Apprentice
Workshops 6%
Social Reception Areas 3%
Meeting Rooms 3%
Waste – Collection Areas
<1%
CSBG (CUSTOMER SUPPORT
Business Group) 4%
Passages/Stairways/
Reception 12%
Kitchen/Canteen 2%
Offices 18%
Production – Clean Rooms
5%
Production – Clean Room
and Support Space 1%
Production – Support Space
2%
Laboratory – Clean Rooms
5%
Laboratory – Clean Room
and Support Space 5%
Laboratory – Support Space
5%
Building Systems Technology
15%
USE OF BUILDING AREA
Utilized Surface Area 24,173 m²
6
LAM RESEARCH AG
Employees
Motivated and excellently qualified employees are key to continued business success. It is priority to employ people from the region, recruitment takes place worldwide because of the high level of qualification required.
All employees of Lam Research AG are graded to 100% according to the state collective contract. Value is laid on
fair pay based on the internal Lam regulations relating to earning potential in the region, Lam Research AG is portrayed as a very attractive employer.
Lam Research AG invests with conviction in apprenticeships and affords hereby a contribution towards giving the
next generation a good basis for the entering the workforce. The apprentices of Lam Research AG are included
amongst the best in their respective class year compared to their counterparts. Since 2004, the average mark is
always better than 1.7 according to the Austrian school grading system. The portion of apprentices amongst employees amounts to ~6.3%.
Employee fluctuation amounts to ~3.7% and has been stable at this low level for years. The proportion of employees that work part-time is ~4.4%.
An interesting picture has gelled in terms of paternity and maternity leave over the past few years. In 2011 there
was no paternity leave taken but by 2013, 44% had taken paternity leave. Up until now, all people on paternity and
maternity leave have entered employment again.
Lam Research AG is aware that motivated and qualified employees are key to continuous success and therefore
encourages academic and personal development and growth amongst employees. During performance appraisals, specific and individual goals are set.
A wide variety of trainings is available, a number of which is compulsory such as “New hire EHS Certification, EHS
Risk Management, Foreign Trade Awareness".
Lam Research AG lays great value that no discrimination of employees will take place. In the current time span,
no cases of discrimination were reported.
Lam Research AG is very proud that people from more than 30 nations are employed. The company benefits
from the the climate of cultural diversity which facilitates different standpoints and approaches to problem solving
in business and in technical realms.
In Lam Research Performance Management & Development Process, which applies to all hierarchical levels and
divisions; goals are agreed upon that are aligned with the highest business objectives. Attainment of these performance and development goals is communicated in regular performance appraisals with employees and feedback is given to employees throughout the year. In this way, each employee is given the opportunity to improve
his/her performance and to contribute to the company
Lam practises a performance based culture in which each employee may undergo self-development without consideration of gender, race, color, language, religion, political orientation, national or social origin, member of a
minority group, wealth, birth or any other status.
7
LAM RESEARCH AG
Products and Technology
At Lam Research AG, machines (“spin processors”) are systems with an innovative etching method, which is protected by various patents. The methods are implemented in the processing of semiconductor wafers.
The spin-process technology, a rotary etching method developed by Lam Research AG, forms the basis of all
systems. At the heart of the spin processors are the process chambers, the wafer chuck (patented wafer holding
device) and a media application system. The application range of these products ranges from the processing of
wafer backsides (for the removal of coatings. e.g. of silicon oxide or metals) through silicon substrate etching
(thinning of wafers) to the processing of wafer fronts (cleaning steps). Spin processors are used to process slices
with a diameter of 6 inches to 12 inches.
By 2013/31/12 almost 37% of the total working force at the Villach site was involved in Research and
Development.
At the customer typically a producer of microchips, the manufacturing process starts the transformation of ultra-pure silicon wafers in clean rooms.
The prerequisites for the use of particle-free and pure materials are exceptionally high. Therefore, the machines
delivered by us to a chip manufacturer for utilization in his clean-rooms are also produced under clean-room conditions. Hereby, it becomes clear why such large amounts of energy are necessary during the operation of the
production space and laboratories and in the preparation of the clean-room water for rinsing as well as for testing
of the systems.
In the clean rooms of the chip manufacturer, the silicon wafers undergo a long chain of process steps such a
photolithography, etching of windows in the oxide layer, layering of extremely thin oxides in high-temperature ovens, depositing of layers etc. up to the completion (approx. 100 process steps, cycle time up to 4 weeks).
An important section of the procedure in maintaining the exceptionally high clean requirements is the so called
wet chemical etching and cleaning process as well as the steps taken for the polymer residue stripping (after
plasma etching) or photo resist stripping.
At this point
• wafer backsides are etched free of deposited layers
• silicon wafers are thinned (at the end of the semiconductor production process,
in order to achieve specific electrical properties)
• the silicon slices are cleaned
• polymer residues are removed
• oxides are etched off or thinned
• the flexibility of the silicon slices is increased and the tensions in the crystal structure are reduced
• coatings and residues are removed
8
LAM RESEARCH AG
A minimization of the consumption of chemicals and water, as well as the consumption of process gas per wafer,
is imperative for customers due to the increased environmental awareness and cost consciousness, and thus,one
of the most important tasks for Lam Research.
From an environmental aspect the following benefits result from the spin-process technology:
•
•
•
•
•
higher yield and significantly less resource input is required
less energy-intensive clean-room surface is required
the water consumption is significantly lower
the use-life of the chemicals is longer
the waste disposal volumes are reduced
Ahead of all others, Asian memory chip manufacturers and contractors increasingly opted for single-wafer processes in the production of large chip volumes. The reason for this is the more flexible and precise processing of
single wafers. In this way, they are able to comply with the constantly increasing production demands, combined
with the change to the next chip technology with ever decreasing structure widths. In the course of Lam Research AG’s significant participation in the technology change, the market for single-wafer processes is expanding and should increase markedly in the coming years.
THE MECHANICAL WORKSHOP AND THE SYNTHETIC MATERIALS WORKSHOP SERVE FOR THE CONSTRUCTION
OF PROTOTYPES FROM VENDOR PARTS AS WELL AS SELF-MANUFACTURED COMPONENTS.
The prefabricated systems are completed in the clean-rooms, tested, and adjusted to the customer
requirements.
On site at Lam Research AG in Villach, clean-rooms are available covering an area of 1,251 m² for production and
1,160 m² for laboratories. In the laboratories our process engineers are able to process wafers on Lam Research
AG systems. This allows us to optimize existing process applications together with customers and industry partners, as well as to develop future applications.
In the Lam Research AG Technical Training Academy, training and safety requirements in accordance with the
customers as well as employees from the areas service production, process development, sales and software
development are offered. Training is provided for the Lam Research AG systems as well as system components.
9
LAM RESEARCH AG
Innovation and Future
The topmost goal of Lam Research AG business strategy is the satisfaction of customer interests with a complete
offer of products and services for all areas of wet chemical treatment by means of single-wafer processing.
By means of successful development, Lam has established itself as one of the few providers, internationally for
cleaning. The growing number of competitors from Asia and the technological development toward smaller and
smaller structures in the semiconductor industry, results in ever growing pressure on the accomplished market
position. It is vitally important to win new markets in order to secure and expand the cleaning division for the
future.
It is the expressed strategy of Lam Research AG that new technology is to be the leader of all Single Wafer Cleaning applications. The development of new products especially for the coming generation of semiconductors with
smaller structures is an essential part of success.
10
THE WHOLE ATTAINS MEANING
BY THE SUM OF THE DETAILS
L AM RESE ARCH AG – ENVIRONMENTAL STATEMENT AND SUSTAINABILIT Y REPORT 2014
11
THE ENVIRONMENTAL MANAGEMENT SYSTEM
Lam Research AG Villach orientates itself on the
Mission, Vision, Core Values of the Lam Research
Corporation.
Mission
Lam Research is dedicated to the success of our customers by being the world class provider of innovative productivity solutions to the semiconductor industry.
Vision
• Number one in customer trust
• Number one in market share
• A company where successful people want to work
• Best-in-class products and services
• Financial performance to:
- Fund the solutions our customers require
- Provide the return our shareholders expect
Core Values
What we believe, practice and reward
• Achievement
• Honesty and integrity
• Innovation and continuous improvement
• Mutual trust and respect
• Open communication
• Ownership and accountability
• Teamwork
• Think: customer, company, individual
12
13
Stakeholders – Interested Parties
Stakeholders with their requisites were defined based on the Core Values. However, qualitative aspects for Environmental Management were not considered.
• Customers expect a product with low energy consumption and low use of process chemicals. The business
relationship should be of a partnership nature and long-term.
• Shareholders-Owners expect that the company avoids risks that could cause a yield reduction.
• Employees expect an interesting work environment under good social conditions, work-life-balance, a secure place of employment and a fair salary.
• Suppliers expect, when there is economic success that the business relationship would be based on partnership and on aspects that can be planned.
• The public authorities, in the process of their controls, expect adherence to laws and provisions.
• The public at the site location expect that there are no disturbances that could be detrimental to quality of
life. Additionally, the direct and indirect opportunity for high quality jobs is of interest.
14
Concise Description of the Management System
Organizationally, the environmental management system is a part of the whole structure of Lam Research AG.
The environmental protection goals and strategies are compiled by management and in the framework of the Annual Operation Plan (AOP) are decided upon and verified.
Additionally it is a part of the system analysis and evaluation as an integral part of the Management Review on
site. The responsibility for implementation of the prescribed rules lies with the respective business sections.
Internal audits serve to evaluate whether the prescribed processes match the actual requirements, whether there
are actions for improvements for environmental aims and whether operative measures can be taken that act in
accordance with company goals. Internal audits take place at least once a year.
Organization of the Environmental Management System
At Lam Research AG.,the divisions Environment, Quality, Safety and Health are combined in the Division QEHS.
EH & S
General Manager Villach Operations
Environmental Management
Manager Health & Safet y
ENVIRONMENTAL CORE TE AM
HE ALTH AND SAFET Y TE AM
Purchasing
Specialist for Occupational Safet y
Development
Emergency Response Team incl.
Fire Protection Officer
Fire Safety Group/Fire Warden
First Aider
Safety Officer
Laborator y/Research /Toxins Officer
Facilities
Laborator y / Research
Material Management
Training & Education
15
Representatives
Within the organization, the following responsible persons are included to deal with environmental and safety
issues:
Environmental Representative (1 member of the top management):
…is responsible internally and externally for compliance with all environmental regulations and objectives of the
company. He decides on the contents and objectives of the environmental program and takes this into account
during the investment and financial planning. In addition, he defines the responsibilities and competences for environmental protection at the site.
Environmental Manager and Waste Manager
…is the central contact person for environmental issues and reports directly to management. He actively supports implementation of the environmental objectives and is responsible for environmental reporting, the coordination of operative environmental protection activities and provides information on laws and stipulations in cooperation with the Safety & Security Manager. The Environmental Manager is located in the central department
QEHS and is engaged in the maintenance and further development of the environmental management system.
Safety & Security Manager
…reports directly to management and supports with the implementation of occupational safety objectives as well
as object safety and the adherence to regulations in this regard. The requirements for hazardous goods is also
under the responsibility of the Safety & Security Manager.
Other Employees with Special Functions
…are nominated and, wherever legally required, notified to the authorities. These are: safety ombudsmen (7 employees), fire wardens (2 members), fire prevention officials (14 employees), license holders for the purchase of
poisonous substances (2 employees) and the occupational physician (1 external contractor).
In order to substantiate the objectives and to suppor t the employees with implementation, an Environmental Core Team is allocated:
The Environmental Core Team is a cross-functional team with members from those business areas in which environmentally-relevant aspects are to be applied. Based on the environmental strategy, all environmental activities
within the business are controlled and monitored here.
16
Legal Compliance
There is a documented process which describes on the one hand the conclusion of contracts with customers,
suppliers and further contractual partners, whereby it should be made certain that contracts that comply to the
legal stipulations are in place. On the other hand, it is described how contractual requirements are determined
and who the respective people are that are responsible.
Adherence to the legal requirements secures that the environment and legal safety regulations as well as their
respective tasks, persons and schedules are assigned and are captured in a databank. Updates of the legal requirements proceed regularly by means of an update service. The respective employee in his/her division is responsible for the implementation according to the set tasks and deadlines as has been captured in the
databank.
A list of the responsible persons and his/her assigned legal division is described in detail.
EXAMPLE FROM LEGAL DATABANK
Only available in German
17
Involvement of Employees
Communication
In order to implement and to live a management system, it is essential to involve employees from the various
divisions.
The communication of environmentally-relevant data is of significance, in order to identify potential for improvement. It is equally of importance from a legal perspective, that environmental data is communicated.
In this case, the members of the Core Team in particular must be seen as the carriers of information to the employees. Likewise, the Core Team also brings the interests of the employees to the Core Team meetings.
Further Education / Training
Information on environmental protection and environmental activities is important for gaining an understanding of
the benefits of an active environmental protection and the environmental management system. Therefore, new
employees are informed about the environmental management system by Lam Research AG during an introductory event. Further training measures are provided selectively for those employees that are confronted with environmentally-relevant aspects.
18
THE VALUE OF
HEALTHY ORGANISMS
RIPPLES THROUGH
FOR ALL TO BENEFIT
19
OCCUPATIONAL SAFETY
Occupational safety, environmental protection and protection of the employees’ health are inseparably connected with each other. They are essential components for creating satisfaction and optimum conditions at the
workplace. Therefore, at Lam Research AG the environmental department and the safety-related department are
combined into one division, QEHS. An example for common grounds is the handling of hazardous materials.
The handling of hazardous materials can cause a risk both to the environment as well as to humans, i.e. the employees. Therefore, the strategies for a reduction of the ecological burden as well as the burden to health must be
equal.
As a result of outstanding efforts in the form of various programs for primary prevention of work related accidents,
the accident rate at Lam Research AG in comparison to the other companies in the same branch, is extremely
low. All accidents have been counted except for commuting accidents.
Special attention is paid to events which were almost accidents. These events are not included in Austrian
statistics.
10
8
6
4
Accident rate
for 10 000 in %
12
Carinthia
Austria
Lam Research AG
2
0
2010
2011
2012
2013
ACCIDENT STATISTICS – BR ANCH CATEGORY – MECHANICAL ENGINEERING
Measures for States of Emergency
Situations that threaten the environment such as the leakage of chemicals or the emergence of chemical reactions or burns cannot be wholly excluded by means of strict preventative measures.
An extensive, wide-span of trained employees, over and above the legal requirements, facilitate the implementation of immediate actions to control such situations. The Safety and Security Manager is responsible for the coordination of this team.
Regular emergency practice with cooperation from the local fire-brigade, ambulance, police and public authorities should substantiate and contribute towards bringing such situations under control, in the event of an emergency. Simultaneously, these practices contribute towards increasing awareness amongst employees to prevent
danger situations.
20
OCCUPATIONAL SAFETY
Programs for Improvement Health and Occupational Safety
Health and Primary Health
Goal
Actions
Period
Responsible
Division
Improvement of health awareness,
information to all employees
Extended health checks, Spirometry,
Audiometry, immunization checks
and vaccinations, vision tests
Annually
Specialist for
Occupational
Safety,
Occupational
physician
Entire
company
Promotion of Work-Life-Balance.
Information to all employees
Free participation for walking events,
nordic walking programs
Annually
–
Entire
company
Occupational Safety - Emergency Prevention
Goal
Actions
Period
Responsible
Division
Emergency building evacuation smoothly and completely
Evacuation training
Annually
Specialist for
Occupational
Safety
Entire
company
Identification of critical aspects
and implementation of measures
for improvement
Compiling / revision of risk analysis
for all sections
Annually
Specialist for
Occupational
Safety
Entire
company
Actions
Period
Responsible
Division
Entire
company
Safety at the workplace
Goal
Ensuring the legal requirements
for adherence to light intensity
are met
Carrying out Lux measurements
(Lux = unit for light intensity)
Annually
Specialist for
Occupational
Safety,
Occupational
physician
Ensuring the legal requirements for
adherence to room temperature,
air speed and climate values
Carrying out temperature measurement, air stream speed, air humidity
2x
Annually
Specialist for
Occupational
Safety
Entire
company
Motivation program / awareness
for safety at the workplace
S.A.F.E (Safety Assessment for
Everyone)
Special training modules with various
focus in the area of safety
monthly
Specialist for
Occupational
Safety
Entire
company
21
WE ENSURE THAT ALSO
TOMORROW, HIGH QUALITY
NUTRITION WILL BE AVAILABLE
22
PERKS - OFFERS
Canteen
The canteen is contracted to an external company. According to their data, the proportion of organic products
comprises 25%. 82% of the products are purchased in Austria.
On the daily menu plan, a Balanced Choices Menu is offered. The variety of Balanced Choices was developed by
the knowledge of a team of nutritionists, dietologists and top chefs.
Balanced Choices vv concisely:
•
•
•
•
•
•
•
•
Fresh and locally prepared
Local and seasonal products
Nutrition-gentle preparation
Conscious use of fats and oils
Avoidance of preservatives
Low salt content
General avoidance of declarable additives
Max. 650 kcal per main meal
Additionally on offer are fresh fruits, yoghurts etc.
The lunch menu is very reasonably priced since it is subsidised by the company Lam Research AG.
23
PERKS - OFFERS
Health
Health is the most important prerequisite for a full and successful private and working life. Lam Research supports employees with numerous opportunities for health maintenance and healthy conduct.
ACTIVITY & SPORT
(WORK OUT @ LAM)
OCCUPATIONAL
PRIMARY HEALTH CARE
Aerobics
Work place ergonomics
Active Relaxation
Attitude Surveys
Immunizations
Lam Health Corner
Lam Health Pass
Lam Medical First Treatment
Magnetic Field Therapy
Smoker-weaning Program
Travel Primary Health Care
Back Relaxati on
and Massages
HEALTHY NUTRITION
Weight Reduction by means
of calorie-reduced menus
in the canteen
Relaxation Exercises
Revived and Health Back
Healthy Spine Light
Singing Bowls Meditation
Pilates
POWER & Energy Equipment
Ski gymnastics –
Fit for the winter
Sports & Energy Zone
Strength Training
OCCUPATIONAL
PSYCHOLOGICAL THERAPY
Coaching
Therapeutic Support
24
ENSURING A DIVERSE LIVING
ENVIRONMENT IS OF OUR CONCERN
25
SOCIAL
Lam Research AG lays a lot of value in being
in tune with the needs and requests of society.
In the current report time span, there were no complaints about
anti-competitive arrangements nor fines for violations against legal regulations.
Local Activities
Lam Research AG supports by means of various activities for example, children in need, youth and prevention
projects, local rescue services, several charity projects and local youth sports sponsorships.
Furthermore, Lam Research AG collaborates with various schools in the region and promotes projects with technical/scientific background. Likewise, the International School Carinthia was supported by Lam Research AG. As
founder member of the CIC (Carinthian International Club) Lam Research AG is committed to non-German
speaking employees who settle in Carinthia. The CIC offers these employees and their families a network which
is helpful in many different ways in order to orientate oneself and to be made to feel at home. The support
stretches from obligatory visits to authorities, searching for accommodation right up to and including language
courses and leisure activities for children.
As one of the largest private employers in the region, Lam Research AG also plays an important role as a customer for various regional companies (suppliers, gastronomy and the hotel sector).
26
SOCIAL
Cultural Activities
Lam Research AG has had a contract with the state art gallery of Carinthia for many years. Approximately 30
paintings and works of art from the state reserve gallery are exhibited regularly and over a longer period.
Apart from this, artists are invited; on Lam‘s initiative, to display their works of art. Art societies as well as friends
and acquaintances of employees may present their art on company premises at any time, free of charge as long
as the moral values are abided by, as set out by the mother company.
Lam Research AG is a private company and may not grant provocation a platform. As a result, works relating to
politics, religion or war are not displayed.
27
WE TURN OUR FOCUS
ON ISSUES WITH WHICH
WE CAN OPTIMIZE THE
ENVIRONMENT
28
IDENTIFICATION AND ASSESSMENT OF
THE ENVIRONMENTAL IMPACT
Lam Research AG evaluates activities and systems in accordance with their environmental impacts on resources,
waste, water, energy consumption, emissions, soil contamination and noise as well as with regard to legal regulations, both under normal conditions as well as in the case of faults. Additionally, the systems are evaluated on
the basis of whether they are in compliance with the state of the art technology.
The result of the evaluation is illustrated in the following table and provides the foundation for the Core Team, for
establishing measures for an improvement of the environmental performance and/or where specific changes can
take place.
x
x
2
x
Company Vehicles
x
x
x
x
2
Flights
x
x
x
x
3
Emergency Power (for EDP)
x
x
x
Air Conditioning Units
x
Compressors
x
x
Deionised Water (DI) System
Toxic Waste
x
Non-toxic Waste
x
x
x
x
x
Waste-acid Station
Design (Material Input/Output)
x
x
x
Product (Energy Consumption)
Purchasing
x
x
2
2
3
2
2
x
2
x
x
x
x
x
1
x
x
x
2
x
2
3
x
2
x
2
x
x
x
x
N ² Tank
x
2
x
Chemical Storage
Ground Use/ Buildings
x
2
1
x
Material supply and delivery (contaminated)
x
x
1
x
x
x
P R IOR I T Y
2
x
SA FE T Y
x
x
NOISE
EMISSIONS
x
x
GROUND
ENERGY
2
Exhaust Washer
WATER
x
WASTE
x
P R IOR I T Y
3
SA FE T Y
x
NOISE
x
GROUND
EMISSIONS
Furnaces
ENERGY
WATER
WASTE
System /Activit y / Process
DIR EC T EN V IRONMEN TA L IMPAC T S
Environmental impacts in the
case of faults, non-compliance
with guidelines, insuf ficient
training, etc.
Environmental impacts
during normal operation
x
1
2
x
2
x
INDIR EC T EN V IRONMEN TA L IMPAC T S
Development and Documentation regarding
Recycling and Waste Disposal
x
Packaging
x
x
Transport
x
Dismounting and Disposal
x
x
x
x
x
x
x
x
x
x
x
2
x
2
2
x
Utilization – Effects during Use (Energy, Floor
Space)
2
x
2
2
x
x
2
The priority number is obtained by multiplying the factors probability of occurrence, severity of impacts and possibility of perception. Since each factor is weighted
between 1 and 10. this results in a risk priority number (RPN) between 1 and 1000.
Four intervention limits result from this: 1.minor environmental relevance, no direct need for action (RPN 1 to 9); 2. medium environmental relevance, medium-term need
for action i.e. regular checks (RPN 10 to 124); 3. high environmental relevance, short-term need for action (RPN 125 to 499); 4. immediate actions (RPN 500 to 1000)
29
Core Indicators
2010
2011
2012
2013
ENERGY EFFICIENCY
Total Energy Consumption (Electricity, Gas, Motor Vehicle)
MWh
8,314.37
8,630.20
9,624.63
10,116.76
Renewable Energy (from Electricity Supply)
MWh
2,233.10
4,645.17
6,795.02
7,145.14
Material Efficiency
Synthetic Material
t
120.26
102.19
84.90
86.53
Stainless Steel
t
131.24
94.28
76.07
76.71
Aluminium
t
229.39
180.22
139.92
148.67
Electronic Components
t
77.43
57.75
50.02
48.12
Packaging Wood
t
326.00
264.00
204.00
210.00
Packaging Synthetic Material
t
11.57
10.32
8.35
8.63
Systems bought back for Reconditioning
t
36.77
102.52
63.38
34.63
Total
t
932.66
811.28
626.64
613.29
WAT ER
Drinking Water
m³
5,876
16,869
8,868
7,694
Water for generating DI water
m³
13,454
14,204
19,063
23,053
Total
m³
19,330
31,073
27,931
30,747
Non-toxic Waste
t
117.15
170.10
115.00
110.96
Toxic Waste
t
281.70
419.42
560.35
685.63
Scrap /Old Material
t
49.33
73.91
53.54
40.58
Total
t
448.18
663.43
728.89
837.17
Land Surface Area (built up)
m²
40,028
40,028
46,717
46,717
Land Surface Area (not built on)
m²
38,977
38,977
32,181
32,181
Total
m²
78,898
78,898
78,898
78,898
t
2,548.18
2,697.93
1,992.05
1,859.45
t
3.56
6.46
6.85
5.94
Waste
BIOLOGIC A L DI V ERSI T Y
EMIS SIONS
CO ² total (Motor Vehicles, Flights, Heating, Electricity, Emergency
Power)
NO x total (Motor Vehicles, Emergency Power, Flights, Heating,
Exhaust Washer)
OU T P U T
Total Output Amount (Production)
t
938.03
822.91
627.59
678.16
Waste Water (estimated)
m³
15,300
26,812
22,200
23,831
Energy Efficiency/Output
MWh/t
8.86
10.49
15.34
14.92
Energy Efficiency from non-renewable energy
MWh/t
6.48
4.84
4.51
4.38
t/t
0.99
0.99
1.00
0.90
m³/t
20.61
37.76
44.51
45.34
Material Efficiency/Output
Water/Output
WA ST E PER OU T P U T
Non-toxic Waste/Output
t/t
0.12
0.21
0.18
0.16
Toxic Waste/Output
t/t
0.30
0.51
0.89
1.01
Old Material/Output
t/t
0.05
0.09
0.09
0.06
CO ² total/Output
t/t
2.72
3.28
3.17
2.74
NO x total/Output
t/t
0.004
0.008
0.011
0.009
EMIS SION PER OU T P U T
30
Direct Environmental Aspects
Resources
In the semiconductor industry, the possibility of a free choice of material is greatly limited due to the requirements
such as purity, material selection, customer demands, specification, process results as well as chemical and
acid resistance under partly high temperatures and stressors. Therefore, the main focus in the protection of resources is placed on material utilization (quantity in kg) compared with the output performance. The output performance of Lam Research AG is a result of the capacity of the processable wafer-areas of the machines and the
number of accessible transistors, reflected as a factor. Thus, the number of dispatched machines as well as the
state of the semiconductor technology of the customers who are supplied by Lam Research is taken into account. This point of view is important in that, an increase in technology is directly related to higher demands for
material and resources.
Waste Management
The guidelines laid down in the Waste Management Act, namely to avoid any waste in the first place, stands in
the foreground for Lam Research AG. Great emphasis is placed on good waste logistics. A waste segregation
concept is illustrated on the intranet, which shows employees how to dispose of waste properly with the help of
a color guidance system.
The relevant waste quantities of Lam Research AG are treated as follows:
The inorganic and organic acids and acid mixtures (with a water percentage of approx. 90%) are neutralized in a
chemico-physical waste treatment plant. Chemical residues and lab wastes are incinerated in a hazardous waste
incineration plant.
Waste paper and packaging materials are processed into paper or corrugated cardboard in Austrian paper mills
and packaging factories, 70% of packages made of plastic and composite materials are processed into granulated material and the remaining 30% are recycled thermally.
The domestic-like industrial waste is processed in a mechanical waste splitting plant. Various refuse-derived fuels are produced in the splitting plant, which are used as energy sources in the cement industry as well as in
residue recycling plants. The share remaining from the splitting plant with a low heating value is processed in a
bio-mechanical waste treatment plant and subsequently dumped. In total, a maximum of only 10% of the industrial waste is dumped.
The waste management concept was conceptualized in 2012, the update of the data follows in the framework of
the Environmental Statement.
Water and Waste Water
Town water is used for sanitary water and for the production of DI water. DI water is deionized ultra-pure water
and is put to use in the laboratories and in production. DI water is tested regularly for purity.
The accumulating rain water is left to seep out on the own land, as stipulated in the regulations. Sanitary water
and DI water as well as the condensate of air cooling systems are fed into the public sewerage system. These
waste waters do not contain any operational pollutants. The DI water, for safe use in the plants, is regularly
checked for absolute purity. Emission measurements of the waste waters are not officially prescribed and are
also not performed since no contamination is possible.
31
Energy
The economic handling of limited sources of energy is the prime objective of a sustainable energy supply. An
EDP-supported domestic process control engineering system has been in operation on site since 1997. It comprises the majority of plants and the air conditioning system and is effective mainly by reducing the consumption
of electricity and gas. Investments into optimizing energy conservation, in the past, contributed significantly to
improved energy savings. One of these optimizations was circulating air operation, dependant on the fresh as
well as outgoing air temperature, was used for temperature control in the clean-room area. This resulted in a calculated saving of approx. 200,000 kWh per year.
The fine tuning and adjustment of the domestic process control system, particularly the aeration and air conditioning takes place regularly on the basis of the analysis of processed data. This knowledge is used for future
projects.
The proportion of renewable energy increased since 2010 from 27% to 71% of the total energy consumption and
since August 2011, 100% of electrical energy was drawn from renewable energy.
27%
71%
2010
2013
ILLUSTR ATION OF THE DEVELOPMENT OF RENEWABLE ENERGY
The equipping with heat meters in the fourth quarter of 2012, allows for an almost 80 percent calculation accuracy of the heat and cold recovery. In 2014, the system will be completed. By means of compressors and refrigerators, 329,400 kWh of heat and cooling recovery was measured.
Heat recovery in the exhaust air duct in the newly built laboratory IV amounts to 106,400 kWh. Since it is possible
to pre-cool fresh air in the summer, a cooling recovery of 375,400 kWh was achieved. The total measurable recovery for the year 2013 amounts to 81,200 kWh which is equivalent to 8.2% of the energy consumption of electricity and gas. Consequently, there was also a reduction in CO ² emission. The proportion of energy recovery can
be further increased through the optimization of house facilities over the middle term.
Exhaust
Scrubber
Exchanger
Laboratory IV
Exhaust
freeze-proof water
circulation pump
Air
Cooling
register
Heating
Air
register ventilation
Exchanger for
preheating
or precooling
Outside
Fresh air
SCHEMATIC OF HEAT RECOVERY
Investment goes hand in hand with innovation with environmental protection in mind. The efforts are integrated
within projects and are not regarded separately.
32
Emissions
Direct emissions result from the motor vehicles provided by Lam Research AG; which are used for business purposes, by the heating demand on site, by the monthly test operation of the emergency power generator as well
as the residual emissions from the exhaust washer.
Beyond that, a relatively large number of flown miles accumulates annually, in fulfillment of the function as the
customers' partner, in the role of a service provider and within the course of business trips within defined business processes. In this case, Lam Research AG views itself as the contributor towards a global problem and
aims to design corporate processes in such a way that modern communication media (e.g. video conference
systems, Live Meetings) can be used more intensively worldwide as well as keeping business processes as lean
as possible so that road and air traffic can be minimized.
The heating systems are driven by gas. The systems have a nominal thermal output of 2.36 MW and are state-ofthe-art technology.
The air conditioning fluid in the air conditioning systems and cool dryers comprises 12.9% HCFC’s and 85.4%
HFC’s. No air conditioning fluid is emitted. The HCFC systems are older systems which still fall into the legal regulations and time periods.
The exhaust washer is designed for the main components HF and NOx. The non-volatile acids; phosphoric acid
and sulphuric acid may reach the exhaust washer as entrained droplets, where, subsequently they are washed
out. Hydrogen peroxide and ozone is also destroyed in the exhaust washer.
Readjustment of the washer’s feed with potash alkali is required due to the enrichment with acids. This is performed automatically by means of measuring the pH value.
Indirect emissions result from the fact that Lam Research AG has no direct access to public means of transport
and that there has been an evident trend in recent years indicating that public transport providers are reducing
their services more and more. Due to the increased flexibility of working times, lift clubs are being used less and
thus more trips are performed using private motor vehicles. The proportion of employees driving to and from the
workplace by car is approximately 85%.
Handling of Hazardous Materials, Water Pollutants and Contaminated Parts
Since there are currently no available alternatives for the hazardous materials being used (acids, alkalis, solvents), it is of particular importance to regulate the handling of these materials.
As a basic principle, a release must be performed by the Safety & Security Manager; and if necessary in coordination with the Environmental Manager, for the procurement of hazardous materials or water pollutants that were
not yet in use, before the article can be procured. In this way. it is ensured that the stipulated storage quantities
cannot be exceeded. Equally, the relevant safety data sheet must be provided before the release. All employees
who might come into contact with these materials are instructed and/or trained regularly. The materials are registered in a database of articles; in addition, the handling/storage of the chemicals in the lab area is illustrated in
a data base of chemicals.
In order to ensure that no hazard can originate from any contaminated parts of systems that were in operation, a
cleaning procedure is performed. A decontamination statement must be enclosed with all contaminated parts
before they are returned to Lam Research AG. This serves as information for the parts to be processed further
without risk.
33
Soil Protection and Legacy Issues
Contaminations resulting from an operation of the systems can be excluded, since all areas in which water pollutants are being handled have been designed with an impermeable floor and alarm systems. From what we
know about the land, prior to purchase, no soil contaminations (legacy issues) exist on Lam Research AG
properties.
The Lam Research AG property is 78,898m² large, of which 59% has been built on.
Noise
Noise emissions are hardly of any relevance, except during the building or renovation phases, since there are no
other significant sources of noise within the plant except for the delivery of work materials and the dispatch of the
finished products and wastes. All conceivable measures are taken to reduce the noise pollution during construction periods. It must also be pointed out that the route Klagenfurt – Spittal/Drau of the Austrian federal railways
borders on Draubodenweg towards the north-east. This route is very heavily frequented and in itself represents
a major source of noise.
34
Indirect Environmental Aspects
Product-related Environmental Impacts
This table shows primarily the possibilities and efforts derived from research, development and construction for
a minimization of the damaging effects caused by the Lam Research AG product as well as the damaging effects
to the environment caused by the application used for the production of semiconductor chips.
Product Phase
Indirect Environmental Impact
Intervention Options, Actions
Design (material selection)
Both the consumption of resources as well as
the accumulation of waste is higher during production in the case of an increased material
demand. Higher emissions, more noise caused
by a greater transportation frequency are also
a consequence
Development of tools with lower material demand
related to the customer benefit (output)
Development with regard to
recycling and disposal
When systems are taken out of service, a variety of environmentally-harmful waste is produced
By means of selecting the work materials, the selected
connection system, etc., the later disposal options are
defined to a major part
Packaging
Packaging waste is created at the customer
when the systems are unpacked. Due to the size
of the systems the proportion of packaging is
high. This is mainly wood
Product packaging: Very low intervention options,
since we are very heavily bound to customer
requirements and standard requirements (SEMI).
By means of optimization, there is a possibility for
reduction in material
Transport
The transport of our products leads to an
increase in traffic volume and the environmental
issues related thereto with regard to emissions,
noise, etc.
99% of deliveries are made by air. The possibility of
intervening by selecting the means of transport is very
low. For the forwarding to and from the airport, freight
companies are contracted to perform this task using
trucks
Utilization –
effects during use
During utilization of the systems at the
customer, chemicals are used and electrical
power is consumed. Apart from that, energy
is used to operate the clean-rooms
By increasing the throughput of the systems as well
as a modification of the process-relevant parts,
significant savings can be achieved
Utilization –
effects during use
During disposal of the chemicals, Persistent
Organic Pollutants (toxic substances that are
particularly difficult to decompose) are released
The development of chemical processes; in which
highly diluted chemicals can be used or where a
switch to inorganic substances is possible, is undertaken primarily by customers. Lam Research AG
can influence a reduction of the consumption
Dismounting and disposal
The possibility of soil contamination and a
hazard to personnel exists in the case of an
improper disposal of the systems
Details on harmless decommissioning and
dismounting as well as information with regard to an
environmentally compatible disposal is contained in
the technical documentation. During the specification
phase of the product, together with the customer,
possible country-specific laws or industrial standards
are taken into account
35
Inclusion of Suppliers and Disposal Companies
During the purchase of office supplies such as EDP, value is placed on articles that have the least environmental
impact. Additionally, Lam Research AG places value on the supplier being active in making his contribution to
protection of the environment. The same business conditions that apply to Lam Research also apply to suppliers.
Lam internal regulations for choice of suppliers excludes the risk of child labour and slavery as well as any possibility of violation of human rights.
In the MyLam Supplier Document Viewer; where all documents concerning requirements of Lam Research AG
for the suppliers, the environmentally-relevant requirements of Lam Research AG are also stipulated.
The copier paper used at Lam Research AG has the Austrian or EU Eco-label environmental stamp of excellence
on it. The letter paper that exhibits the company logo is FSC certified and the environmental core team in Villach,
has triggered that the company envelopes also to become FSC certified. This goal will be implemented as soon
as the current supply in the stores has been depleted.
The cleaning of the building of Lam Research AG is carried out by an EMAS approved company. The two factors
of mechanics and chemicals are combined in an ecologically worthwhile manner to obtain good cleaning results
for the highest environmental protection. With regard to the mechanics, is included amongst others, the use of
high-tech microfiber covers for the cleaning of floors and other surfaces with the minimum amount of chemicals.
The cleaning chemicals that are used are free of halogens, formaldehyde, chlorised and aromatic hydrogen peroxides. A special dose mechanism avoids any possible overdose.
The transport of machine parts from our outsourcing partners in Slovakia and in the Czech Republic to Villach
takes place by truck. It is being encouraged that these trips and the combined environmental consequences are
kept as low as possible. An example of this is to combine the parts so that delivery occurs once per week.
Awareness is awakened that the trucks do not make an empty trip, rather that parts, possible returns etc. are
simultaneously transported back.
The disposal company that accepts the Lam Research AG wastes is specialized in the recycling and reutilization
of waste materials. Close contact exists and there are regular exchanges of information between the Lam Research AG Waste Manager and the disposal company.
36
TO ENSURE THAT THE SEEDS
GERMINATE, IT IS NATURAL FOR US
TO PROTECT THE ENVIRONMENT
37
ENVIRONMENTALLY-RELEVANT FIGURES AND
KEY INDICATORS, ENVIRONMENTAL CONTROLLING
Environmental Parameters
The output performance of Lam Research AG is a result of the capacity of the processable wafer-areas of the
machines and the number of accessible transistors, reflected as a factor. Thus, the number of dispatched machines as well as the state of the semiconductor technology of the customers who are supplied by Lam Research is taken into account. This point of view is important in that, an increase in technology is directly related
to higher demands for material and resources.
The relevant input-output data relative to employee numbers and output transistors since 2010 are shown in
summary in the following tables. The number of employees at Lam Research AG ranged between 494 in 2010
and 586 persons in 2013 (annual average).
Input
2010
2011
2012
2013
EL EC T R ICI T Y/ G A S / MOTOR V EHICL ES
MWh total electricity
MWh
5,940.02
6,080.92
6,795.02
7,145.14
MWh gas
MWh
2,136.80
2,365.35
2,492.42
2,798.60
MWh from motor vehicles and
emergency power generators
MWh
237.55
183.94
337.19
173.02
Total
MWh
8,314.37
8,630.21
9,624.63
10,116.76
Synthetic Materials
kg
120,264
102,188
84,904
86,525
Electronic components
kg
77,428
57,754
50,021
48,122
Stainless steel
kg
131,238
94,283
76,074
76,712
Aluminum
kg
229,388
180,221
139,920
148,669
Packaging - wood
kg
326,000
264,000
204,000
210,000
Packaging - plastics
kg
11,572
10,321
8,351
8,633
Solvents
kg
820
750
1,520
1,166
Total
kg
896,710
709,517
564,790
579,827
WOR K M AT ER I A L S ( PRODUC T )
WOR K M AT ER I A L S ( L A B )
Toxins
l
3,783
4,514
8,020
3,588
Acids organic
l
243
111
635
631
Acids inorganic
l
5,643
6,352
9,248
10,157
Alkalis organic
l
110
92
23
763
Alkalis inorganic
l
3,268
2,428
3,773
2,595
Oxidants inorganic
l
5,853
6,970
10,590
12,970
Solvents
l
2,446
4,294
4,410
6,600
Total
l
21,346
24,761
36,699
37,304
Total town water
m³
19,330
31,073
27,931
30,747
Thereof DI production
m³
13,454
14,204
19,063
23,053
l
24,240
18,769
34,407
17,655
494
571
624
586
TOW N WAT ER
F UEL
Motor Vehicles (Business Trips)
PERSONS EMPLOY ED ON SI T E
(mean value)
38
Output
2010
2011
2012
2013
875.0
1028.5
1183.4
1922.4
kg
938,030
822,910
627,590
678,160
Hazardous wastes
kg
281,695
419,423
560,354
685,627
Non-hazardous wastes
kg
117,149
170,099
114,999
110,956
Waste materials
kg
49,328
73,909
53,542
40,575
Total quantity of all disposed of wastes
kg
448,172
663,431
728,895
837,158
CO ² from cars and emergency power generators
kg
62,988
49,067
90,043
46,133
CO ² from air miles
kg
698,761
1,413,960
1,404,914
1,255,163
CO ² from heating
CO ² from electricity supply
kg
426,164
471,745
497,088
558,153
kg
1,360,265
763,156
0
0
CO ² Total
kg
2,548,178
2,697,928
1,992,045
1,859,449
kg
2.34
2.35
0
0
NO x from cars and emergency power supplies
kg
142
128
245
135
NO x from air miles
kg
2,900
5,868
5,831
5,209
NO x from heating
kg
338
375
395
443
NO x from exhaust washer
kg
179
91
377
162
NO x Total
kg
3,559
6,462
6,848
5,949
L A M R ESE A RCH AG PRODUC T OU T PU T
Output Performance (Factor)
Spin-processors
WA ST E
POL LU TA N T EMIS SION CO ²
R A DIOAC T I V E WA ST E
From electricity supply
POL LU TA N T EMIS SION NO x [ kg ]
Basis for Calculation (Sources)
CO ² /Radioactive Waste
Electricity Consumption
Account from Electricity Supplier
CO ² and NO x
Heating
Energy Report 1996 of Austrian Federal Government
Austrian Airborne Pollutants Inventory
CO ² and NO x
Motor Vehicles, Emergency
Power Generator
Manufacturer’s Specification + 20%
(Reference - measurement)
CO ² and NO x
Flights
GEMIS 4.8. Flights-Passenger-International 2005/2010
Average Consumption
Motor Vehicles
Manufacturer’s Specification + 20%
(Reference - measurement)
39
Material Input
100%
80%
60%
40%
20%
2010
2011
2012
0%
2013
INPUT/OUTPUT-TR ANSISTORS
As was discussed before, the material input refers to the number of transistors multiplied with wafer surfaces,
since these output factors also include the technological state of the systems and in turn the customer benefit.
Since 2013, the systems were able to process smaller structures and therefore, this factor was increased.
By means of the advanced technology as well as intensified effort to recondition the systems, the material input
relative to the Lam Research Output since 2010 has sunk by more than 67%. Specifically by means of reconditioning of systems in 2013, a saving of 7.7% was realized.
Raw Materials Products and Laboratory
In thousand kg
500
20
0
0
2010
2011
2012
2013
2010
R AW MATERIALS INPUT PRODUCT
In thousand kg
40
1.000
2011
2012
2013
R AW MATERIALS INPUT L ABOR ATORY
The proportion of raw materials input for the product is a result of number and type of the produced systems as
well as the number of reconditioned systems.
In the laboratory, various chemicals come into operation. This proportion is prescribed by tests for further development of chemical processes for the processing of semiconductor wafers. The increase of input materials as
well as the increase of use in the laboratories increased by approximately 75% in the relevant time period.
Town Water
2010
Town Water total
m³
19,330.00
Water for generating DI water
m³
Drinking Water
m³
2011
2012
2013
31,073.00
27,931.00
30,747.00
13,454.00
14,204.00
19,063.00
23,053.00
5,876.00
16,869.00
8,868.00
7,694.00
A large proportion of the water requirement is used for the generating of deionised water for use in the laboratory
as well as tests in 2011 where drinking water was required for cooling. The increase in the use of deionized water
was higher in 2013 than the input materials in the laboratory. The conclusion is that the input materials had been
diluted strongly with DI water.
40
Energy Requirement (Electricity/Gas)
2010
2011
2012
2013
ELECTRICITY CONSUMPTION
4.000
2.500
2010
2011
2012
2013
In thousand kWh
6.000
3.500
In thousand kWh
8.000
1.500
GAS CONSUMPTION
The requirement for electrical energy and gas is a result of several factors. An essential point is the running of the
energy-intensive clean rooms. Particularly in the laboratories, air is extracted by the scrubbers and then air is
pumped back and depending on the season must be heated or cooled as the case may be. The laboratory area
was expanded substantially in 2012, and consequently the proportion of clean room area was significantly increased. As is illustrated in the environmental program, to decrease the gas consumption, further analyses of
various influencing factors such as the calculation of the emittance of heat in various areas by means of heat meters, will be undertaken.
10
2.200
8
1.800
6
1.400
4
1.000
2
600
0
Transistors
The exhaust fumes of the machines in the additional Laboratory IV, takes place over heat exchangers in the
exhaust stream of the gas scrubbers to reduce energy consumption. The air will amount to approximately
2 x 15 m³/h. The achievable heat exchange depends on production process parameters and therefore cannot be
quantified in advance exactly, however these are possible to measure at any time.
200
2010
2011
2012
Energy demand/Output-Transistors
2013
Output-Transistors
When one calculates the achievable transistor density on the semiconductor wafer then, the total energy consumption reduces markedly; with regard to output.
The total energy consumption 2013 comprises fuel, gas and electricity as follows:
Fuel 2%
Gas 28%
Electricity 70%
The largest proportion, over the last number of years is electricity consumption. Therefore, it had been decided in
August 2011, to draw electricity from renewable energy sources so as to reduce the CO ² emission and in turn, the
environmental burden. This includes radioactive waste.
41
Pollution
1.000
3
In thousand kg
1.500
2
1
0
2010
2011
2012
0
2013
2010
2011
2012
2013
RADIOACTIVE WASTE KG/A FROM ELECTRICITY CONSUMPTION
Accrued at energy supplier
CO ² FROM ELECTRICIT Y CONSUMPTION
Motor Vehicles 2%
1.200
800
400
In thousand kg
1.600
Heating 30%
0
2010
2011
2012
2013
Flights 68%
ANNUAL CO ² EMISSIONS FROM
MAN AIR KILOMETERS (BUSINESS TRIPS)
CO ² EMISSIONS TO SOURCE
The proportion of pollutant emission from air miles is the highest. Unfortunately, in 2011 a marked increase had to
be taken into account since the incorporation of Lam Research AG into the the Lam Research Corporation resulted in increased air traffic. Besides that, a large development project which forced a pooling of resources on
site with Fremont resources caused an increase in air traffic. Through the increased use of conference rooms with
the most modern equipment and through Live Meetings between sites, which is linked by EDP and can be directly accessed, an even further increase in air traffic could be avoided.
28
24
CO ² kg/m²
20
NO x g/m²
16
CO g/m²
12
2010
2011
2012
2013
ANNUAL EMISSION OF AIR POLLUTANTS FROM FURNACES /m² USABLE SURFACE
There is no clear trend that can be identified concerning the emission of pollutants from furnaces with relation to
gas consumption. To decrease the gas consumption, as described before, the exhaust fumes of the machines
will be relayed over heat exchangers.
The current measurements at the furnaces lie under the limits according to the Furnace Regulation §18.
42
250
140
200
100
150
60
20
100
2010
2011
2012
Emission in g/km
Emission in thousand kg
2013
ANNUAL EMISSION OF CO ² FROM MOTOR VEHICLES (POOL AND CAR HIRE)
CO ²/km (g)
CO ² (kg)
As a result of change of contract, the meter reading was much shorter in 2011 than in 2012. Therefore, the proportion of CO ² from motor vehicles for business trips for 2011 was much shorter than for 2012 and is given as an
average. The CO ² emission from motor vehicles per driven km had decreased since more motor vehicles with
modern technology were used.
In summary, CO ² emission from 2011 had decreased markedly as a result of the transfer of electricity consumption to renewable energy.
3.000
2.500
2.000
1.500
2010
2011
2012
2013
2011
2012
2013
1.000
CO ² /a
CO ² – TOTAL
CO ²/Out
2010
in thousand kg
3.500
CO ²/m²
CO ²/Employee
Emissions from the gas scrubber
Computed value including chemicals
2010
2011
2012
2013
NO ²
kg
178.57
90.70
376.90
161.96
H²F ²
kg
1.90
2.73
4.84
7.31
kg
1.82
2.08
2.40
2.91
SO 4²-
The amount of emissions from the gas scrubber is a result of the development activities and the necessary chemicals used.
43
Waste
Since 2012 waste presses for domestic waste, paper and cardboard are on site. Hereby, the amount of available
space could be put to better use. Besides that, the number of trips for waste transport could be decreased
dramatically.
Hazardous Waste
2010
2011
2012
2013
700
600
400
300
200
in thousand kg
500
100
0
Acids and
Acid Mixtures
(Inorganic)
Other diluted
concentrates
Alkali and
alkaline Mixtures
Plastic Containers
contaminated
Electronic devices with
haz. Components
Hazardous wastes are created nearly exclusively by tests performed in the labs. These tests serve for the further
development of our products and a further increase is expected. To keep these increases; through the increased
use of the laboratory in bounds, various scenarios for waste disposal were tested, which, because of their bad
cost-benefit ratio were not realized. For this reason, the practise of using an authorised waste disposal company
up until now, is maintained.
Non-Hazardous Waste
2010
2011
2012
2013
80
70
50
40
30
20
in thousand kg
60
10
0
Domestic-like
Industrial Waste
Total wood
Biogenic Waste
Electric/Electronic
devices > or < 50cm
Bulk garbage
for relocation
Lam Research AG, has set itself up increasingly for the reconditioning of systems that have been bought back
from customers. These are delivered in large-volume and heavy wooden packages, which is proportional to the
amount of wood waste.
44
Scrap Material
2010
2011
2012
2013
25
15
10
in thousand kg
20
5
0
Cardboard
Used Paper
Plastic and
composite packaging
Metals,
scrap metals
Aluminium
NE-metal scrap
and staninless
steel
Copper
cables
Glass
waste
70
110
60
95
50
80
40
65
30
20
in kg/employee
in thousand kg
Domestic-like Industrial Waste / Employee
50
2010
2011
2012
Domestic-like
industrial waste
Domestic-like
industrial waste
per employee
2013
2010
2011
2012
2013
800
700
600
500
400
300
200
100
0
in thousand kg
The increase in domestic-like industrial waste per employee could, for the first time, be cut short since 2011.
Additionally, the total amount of domestic-like industrial waste could be reduced.
Hazardous waste
Non hazardous
waste
Scrap
In this overview, it can be seen that toxic waste, as a result of intensive development activities and the extended
laboratory work, has increased markedly whilst the proportion of non-toxic waste and scrap materials has
dropped since 2011.
45
PROGRAMMED
FOR SUSTAINABILITY
46
ENVIRONMENTAL PROGRAMS
Project Aim
Effective
Comments on the Implementation
Reduction of the waste transport
and the associated transport by
compression of waste up to 1/6 of
the volume
8/2012
3 Waste presses were acquired
1. Residual waste
2. Paper & Cardboard
3. Synthetic material packaging
Limiting energy consumption (electricity/gas) by installing heat
exchangers in the exhaust flow of
the gas scrubbers in Laboratory IV
12/2012
The laboratory has been in operation since Q4 2012 and is not yet utilized to
capacity so that a significantly high potential exists. Since commissioning, a
reduction of 34,200 kWh has been achieved
Re-calculate potential of
pre-heating / pre-cooling of air for
the air conditioning system
5/2012
The analysis has shown that no significant economically viable solution is possible
Analyse the possibility of converting
from gas to district heating
12/2012
The costs for the conversion to district heating are currently too high
Improvement of the waste-relevant
techniques and processes
12/2012
The waste management concept was completely revamped. The waste-relevant
concepts were adapted and are described in detail and form the basis for further
improvements. In the light of these views, the acquisition of waste presses was
defined. (see above)
The amount of domestic-like industrial waste per employee could be reduced to
the values as of 2010
Potential and Project Goal
Date
Comments on the Implementation
Saving of approx. 75,000 kWh
of electricity by exchanging 580
halogen bulbs with LED spotlights
End
2013
500 Halogen Lamps were taken out of operation. Furthermore, 71 halogen lamps
will be replaced with LEDs. Up to now, the calculated energy saving comprises
55,000 kWh annually
Emergency lights / Emergency Exit
electricity saving
End
2013
40% of emergency exit lights have been replaced with LEDs
Reduction of extent of external wafer
cleaning (reclaim service) to reduce
transport to external wafer cleaners
to a minimum
End
2013
In the first phase in 2013 about 61% of „bare Si Wafer“ could be reclaimed
in-house
Potential analysis to determine the
energy recovered by means of heat
exchangers
End
2013
Postponed to 2014
Environmental Statement to be
supplemented with a Sustainability
Report
End
2013
Application Level C defined according to GRI 3.1 and sustainability aspects
compiled. Synchronisation according to Annual & Proxy Report
47
ENVIRONMENTAL PROGRAMS
Environmental Program 2014
The following measures are planned for 2014 to increase the environmental efficiency of Lam Research AG.
Potential and Project Goal
Date
Description of measures to be taken
Responsible
(Division)
Reduction of extent of external wafer cleaning
(reclaim service) to 0%, to reduce transport
(CO ² potential) to external wafer cleaners to
a minimum
End
2014
Used wafers will be inspected and as the case
may be will be cleaned in the clean rooms by
the test machines so that they can be reused
Lab-Team
Potential analysis to determine the energy
recovered by means of heat exchangers
May
2014
Expanding the installation of heat meters will be
done mid 2014 when a new air conditioner will
be commissioned
Facilities
Reduce electricity consumption in production.
Calculated potential 110,000 kWh
End
2013
Model for implementation to be conceptualized
L&P
Reduction of high pressure air in production.
Calculated potential 890,000 m³
End
2014
Model for implementation to be conceptualized
L&P
Q3/2014
Quarterly reports / Newsletter on the Intranet –
Start in 2nd half of the year
QEHS
Improvement for Environmental
Communication
48
ORIGINATING FROM
THE SOURCE, CHANNELING
THROUGH NATURE
49
GRI 3.1 CONTENT INDEX
Current
Document
( Page )
Aspect
1.
Strategy and Analysis
1.1
Statement from the most senior decision maker of the organization
4
1.2
Description of key impacts, risks, and opportunities
29
2.
Organizational Profile
2.1
Name of the organization
5
2.2
Primary brands, products, and/or services
8
2.3
Operational structure of the organization, including main divisions,
operating companies, subsidiaries, and joint ventures
2.4
Location of organization’s headquarters
2.5
( P) rox y Statement &
( A ) nnual Repor t 2013
( Page )
Status
c
A 14 - 26
p
c
c
A 7-9
c
5/6/15
c
5/6
c
Number of countries where the organization operates, and names of
countries with major operations
6
c
2.6
Nature of ownership and legal form
6
c
2.7
Markets served (including geographic breakdown, sectors served,
and types of customers/beneficiaries
2.8
Scale of the reporting organization, including Number of employees,
Number of operations, net sales, total capitalization broken down in
terms of debt and equity, and quantity of products or services provided
5
2.9
Significant changes during the reporting period regarding size,
structure, or ownership
6
2.10
Awards received in the reporting period
3.
Report Parameters
A 10/11
c
A 5/6/10
c
c
nr
Report Profile
3.1
Reporting period (e.g., fiscal/calendar year) for information
provided
3.2
Date of most recent previous report (if any)
3.3
Reporting cycle (annual, biennial, etc.)
55
c
3.4
Contact point for questions regarding the report or its contents
55
c
55
c
na
Report Scope and Boundary
3.5
Process for defining report content, including determining materiality,
prioritizing topics within the report, and identifying stakeholders the
organization expects to use the report
3
p
3.6
Boundary of the report
3
c
3.7
State any specific limitations on the scope or boundary of the report
na
3.8
Basis for reporting on joint ventures, subsidiaries, leased facilities,
outsourced operations, and other entities that can significantly affect
comparability from period to period and/or between organizations
na
3.9
Data measurement techniques and the bases of calculations,
including assumptions and techniques
3.10
Explanation of the effect of any re-statements of information provided
in earlier reports, and the reasons for such restatement
na
3.11
Significant changes from previous reporting periods in the scope,
boundary, or measurement methods applied in the report
na
39
p
GRI Content Index
3.12
Table identifying the location of the Standard Disclosures in the report
50 - 54
c
Assurance
3.13
Policy and current practice with regard to seeking external assurance
for the report
na
Page references refer to this report and/or the Proxy Statement & Annual Report 2013
c – fulfilled completely, p – partially fulfilled, nr – not reported, na – not applicable
50
Current
Document
( Page )
Aspect
4.
( Page )
Status
Governance, Commitments, and Engagement
Governance
4.1
Governance structure of the organization
P 14 - 19
c
4.2
Indicate whether the Chair of the highest governance body is also
an executive officer
P 5 - 13
c
4.3
For organizations that have a unitary board structure, state the
number and gender of members of the highest governance body
that are independent and/or non-executive members
4.4
Mechanisms for shareholders and employees to provide
recommendations or direction to the highest governance body
P 17
c
4.5
Linkage between compensation for members of the highest
governance body, senior managers, and executives, and the
organization’s performance
P 20
c
4.6
Processes in place for the highest governance body to ensure
conflicts of interest are avoided
P 16
c
4.7
Process for determining the composition, qualifications, and expertise
of the members of the highest governance body and its committees
P 15/16
p
4.8
Internally developed statements of mission or values, codes of
conduct, and principles
4.9
Procedures of the highest governance body for overseeing the
organization’s identification and management of economic,
environmental, and social performance
P 15/18
c
4.10
Processes for evaluating the highest governance body’s own
performance, particularly with respect to economic, environmental,
and social performance
P 16/17
c
A 9 - 11
p
na
13/14
c
Commitments to External Initiatives
4.11
Explanation of whether and how the precautionary approach or
principle is addressed by the organization
4.12
Externally developed economic, environmental, and social charters,
principles, or other initiatives to which the organization subscribes
or endorses
26/27
c
4.13
Memberships in associations (such as industry associations) and/or
national/international advocacy organizations
26
c
4.14
List of stakeholder groups engaged by the organization
14
c
4.15
Basis for identification and selection of stakeholders with whom to
engage
14
c
4.16
Approaches to stakeholder engagement, including frequency of
engagement by type and by stakeholder group
14
p
4.17
Key topics and concerns that have been raised through stakeholder
engagement, and how the organization has responded to those key
topics and concerns, including through its reporting
nr
Economic Performance Indicators
Management Approach
P 4/5
c
EC1
Direct economic value generated and distributed
A 34
c
EC2
Financial implications and other risks and opportunities for the
organization’s activities due to climate change
EC3
Coverage of the organization’s defined benefit plan obligations
EC4
Significant financial assistance received from government
EC51)
Range of ratios of standard entry level wage by gender compared to
local minimum wage
EC6
Policy, practices, and proportion of spending on locally-based suppliers
nr
EC7
Procedures for local hiring and proportion of senior management
hired from the local community
nr
EC8
Development and impact of infrastructure investments and services
provided primarily for public benefit
26
p
EC91)
Understanding and describing significant indirect economic impacts,
including the extent of impacts
26
p
nr
23 - 26
c
nr
7
c
1) Additional Indicator
51
Current
Document
( Page )
Aspect
( Page )
Status
Economic Performance Indicators
Management Approach
4
EN1
Materials used by weight or volume
38
c
EN2
Percentage of materials used that are recycled input materials
30/40
p
EN3
Direct energy consumption by primary energy source
38
c
EN4
EN51)
Indirect energy consumption by primary source
38
c
Energy saved due to conservation and efficiency improvements
32/41
c
EN61)
Initiatives to provide energy-efficient or renewable energy based
products and services
41
c
EN71)
Initiatives to reduce indirect energy consumption and reductions
achieved
32
c
EN8
Total water withdrawal by source
na
EN91)
Water sources significantly affected by withdrawal of water
na
EN101)
Percentage and total volume of water recycled and reused
na
EN11
Location and size of land owned, leased, managed in, or adjacent to,
protected areas and areas of high biodiversity value outside
protected areas
na
EN12
Description of significant impacts of activities, products, and services
on biodiversity in protected areas and areas of high biodiversity value
outside protected areas
na
EN131)
Habitats protected or restored
na
EN141)
Strategies, current actions, and future plans for managing impacts
on biodiversity
na
EN151)
Number of IUCN Red List species and national conservation list
species with habitats in areas affected by operations, by level of
extinction risk
na
EN16
Total direct and indirect greenhouse gas emissions by weight
30/33/39
c
EN17
Other relevant indirect greenhouse gas emissions by weight
30/33/39
c
EN181)
Initiatives to reduce greenhouse gas emissions and reductions
achieved
32
c
EN19
Emissions of ozone-depleting substances by weight
39
c
EN20
NO x, SO x and other significant air emissions by type and weight
39
c
EN21
Total water discharge by quality and destination
EN22
Total weight of waste by type and disposal method
30
c
31/44/45
c
EN23
Total number and volume of significant spills
34
c
EN241)
Weight of transported, imported, exported, or treated waste deemed
hazardous
39
c
EN251)
Identity, size, protected status, and biodiversity value of water bodies
and related habitats significantly affected by the reporting
organization’s discharges of water and runoff.
EN26
Initiatives to mitigate environmental impacts of products and services,
and extent of impact mitigation
EN27
Percentage of products sold and their packaging materials that are
reclaimed by category
nr
EN28
Monetary value of significant fines and total number of non-monetary
sanctions for noncompliance with environmental laws and regulations
na
EN291)
Significant environmental impacts of transporting products and other
goods and materials
35/36
p
EN301)
Total environmental protection expenditures and investments by type
32
p
na
9/40
c
52
Current
Document
( Page )
Aspect
( Page )
Status
Labor Practices and Decent Work Performance Indicators
Management Approach
7
LA1
Total workforce by employment type, employment contract, and region
7
c
LA2
Total number and rate of new employee hires and employee turnover
7
c
LA31)
Benefits provided to full-time employees that are not provided to
temporary or part time employees
LA4
Percentage of employees covered by collective bargaining agreements
LA5
Minimum notice period(s) regarding operational changes
LA61)
Percentage of total workforce represented in formal joint
management–worker health and safety committees
16
c
LA7
Rates of injury, occupational diseases, lost days, and absenteeism,
and total number of work-related fatalities
20
p
LA8
Education, training, counseling, prevention, and risk-control programs
in place
7/23/24
c
LA91)
Health and safety topics covered in formal agreements with trade unions
na
LA10
LA111)
Average hours of training per year per employee
nr
Programs for skills management and lifelong learning
nr
LA121)
Percentage of employees receiving regular performance and career
development reviews
7
c
LA13
Composition of governance bodies and breakdown of employees
per employee category according to gender, age group, minority
group membership, and other indicators of diversity
7
p
LA14
Ratio of basic salary and remuneration of women to men by
employee category
LA15
Return to work and retention rates after parental leave, by gender
nr
7
c
nr
nr
7
c
Human Rights Performance Indicators
P 15
references to Code of Ethics
Management Approach
HR1
Percentage and total number of significant investment agreements
and contracts that include clauses incorporating human rights
concerns, or that have undergone human rights screening
HR2
Percentage of significant suppliers, contractors, and other business
partners that have undergone human rights screening, and actions
taken
HR3
Total hours of employee training on policies and procedures
concerning aspects of human rights
HR4
Total number of incidents of discrimination and corrective actions
taken
HR5
Operations and significant suppliers identified in which the right to
exercise freedom of association and collective bargaining may be violated or at significant risk, and actions taken to support these rights
HR6
Operations and significant suppliers identified as having significant
risk for incidents of child labor
36
c
HR7
Operations and significant suppliers identified as having significant
risk for incidents of forced or compulsory labor
36
c
HR81)
Percentage of security personnel trained in the organization’s policies
or procedures concerning aspects of human rights
nr
HR91)
Total number of incidents of violations involving rights of indigenous
people
na
HR10
Percentage and total number of operations that have been subject to
human rights reviews and/or impact assessments
nr
HR11
Number of grievances related to human rights filed, addressed and
resolved through formal grievance mechanisms
nr
nr
36
c
nr
7
c
nr
53
Current
Document
( Page )
Aspect
( Page )
Status
Society Performance Indicators
Management Approach
13/14
SO1
Percentage of operations with implemented local community
engagement, impact assessments, and development programs
SO2
Percentage and total number of business units analyzed for risks
related to corruption
SO3
Percentage of employees trained in organization’s anti-corruption
policies and procedures
nr
SO4
Actions taken in response to incidents of corruption
nr
SO5
Public policy positions and participation in public policy development
and lobbying
SO61)
Total value of financial and in-kind contributions to political parties,
politicians, and related institutions
SO71)
Total number of legal actions for anticompetitive behavior, anti-trust,
and monopoly practices and their outcome
26
c
SO8
Monetary value of significant fines and total number of non-monetary
sanctions for noncompliance with laws and regulations
26
c
SO9
Operations with significant potential or actual negative impacts on
local communities
nr
SO10
Prevention and mitigation measures implemented in operations with
significant potential or actual negative impacts on local communities
nr
26
p
A 25/26
26
p
nr
Product Responsibility Performance Indicators
Management Approach
13
c
PR1
Life cycle stages in which health and safety impacts of products and
services are assessed for improvement
nr
PR21)
Total number of incidents of non compliance with regulations and
voluntary codes concerning health and safety impacts of products
and services during their life cycle
nr
PR3
Type of product and service information required by procedures,
and percentage of significant products and services subject to such
information requirements
PR41)
voluntary codes
nr
PR51)
Practices related to customer satisfaction
nr
PR6
Programs for adherence to laws, standards, and voluntary codes
related to marketing communications
nr
PR71)
voluntary codes concerning marketing communications
nr
PR81)
Total number of substantiated complaints regarding breaches of
customer privacy and losses of customer data
nr
PR9
Monetary value of significant fines for noncompliance with laws
and regulations concerning the provision and use of products and
services
nr
35
c
54
CERTIFICATE OF VALIDITY
As an independent reviewing organization
TÜV Nord Austria GmbH, A-1190 Vienna, Mooslackengasse 17, Registration Number: AT-V-0026,
was assigned.
Declaration of Validity
Die TÜV Nord GmbH
as an independent reviewer, has assessed according to the UMG BGBl.I/96/2001
the environmental management system, the process of the environmental assessment,
the Management Review and the environmental policy of
Lam Research AG
located at
SEZ-Strasse 1, A-9500 Villach
according to the requirements of
Regulation (EG) Nr. 1221/2009 (EMAS III-V).
The Environmental Statement 2014 is declared valid.
Vienna, 01. June 2014
DI Thomas A. Reautschnigg
Leading Environmental Assessor
The Declaration of Validity of the consolidated Environmental Policy is valid until April 2016.
The TÜV Nord Austria GmbH is an accredited Environmental Review organization according to UMG BGBl.I/96/2001,
Registration Number AT-V-0026.
Translation from the original certificate which appears in German.
55
Date of the next Enviromental Statement
The next consolidated environmental statement shall be published in May 2016.
An updated and validated environmental statement shall be issued annually.
Contact
Lam Research AG
9500 Villach, Austria
SEZ-Strasse 1
Telefon +43 4242 204-0
Fax +43 4242 204-21
VillachEnvironment@lamresearch.com
www.lamresearch.com
Imprint
Responsible for the contents: Ingo Bartz, Lam Research AG, Villach
Layout: Boris Trost
July 2014; data as of December 2013
This environmental statement is also available in German
Verified
environmental
management
REG.NO. AT-000127
56

Lam Research AG Environmental Statement and Sustainability Report

Transcription

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