HiPace 700 M ®

Transcription

HiPace 700 M ®
A PASSION FOR PERFECTION
HiPace® 700 M
Vacuum Generation / Turbopumps / Magnetically Levitated
HiPace® 700 M with TM 700, DN 160 CF-F
5-axis magnetically levitated turbopump with a pumping speed of 685 l/s for N2
Integrated digital magnetic bearing controller TM 700
Installation in any orientation; flexible through connectivity of up to 4 accessory parts
With integrated water cooling for maximum gas throughput
Interfaces: RS-485, Remote (Profibus/DeviceNet on request)
The turbopump features extremely low vibration and is oil-free
With patented In-field sensor calibration
Including venting valve and patented "pulsed venting"
Protection Class: IP 54
Extensive accessories expand the range of applications
Dimensions
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Page 2
Vacuum Generation / Turbopumps / Magnetically Levitated
Technical Data
HiPace® 700 M with TM 700, DN 160 CF-F
Bearing
Compression ratio for Ar
Compression ratio for H2
Compression ratio for He
Compression ratio for N2
Cooling method, optional
Cooling method, standard
Cooling water consumption
Cooling water temperature
Electronic drive unit
Flange (in)
Flange (out)
Fore-vacuum max. for N2
Gas throughput at 0.1 hPa HV for Ar
Gas throughput at 0.1 hPa HV for H2
Gas throughput at 0.1 hPa HV for He
Gas throughput at 0.1 hPa HV for N2
Gas throughput at full rotational speed for Ar
Gas throughput at full rotational speed for N2
Interfaces
Low vibrations
Mounting orientation
Operating voltage
Permissible magnetic field max.
Protection category
Pumping speed for Ar
Pumping speed for H2
Pumping speed for He
Pumping speed for N2
Rotation speed ± 2 %
Rotation speed variable
Run-up time
Sound pressure level
Ultimate pressure according to PNEUROP
Magnetically Levitated
> 1 · 1011
2 · 105
> 1 · 107
> 1 · 1011
Air, convection
Water
80 l/h
15-35 °C | 59-95 °F | 288-308 K
with TM 700
DN 160 CF-F
DN 25 ISO-KF
8 hPa | 6 Torr | 8 mbar
16 hPa l/s | 12 Torr l/s | 16 mbar l/s
9 hPa l/s | 6.75 Torr l/s | 9 mbar l/s
16 hPa l/s | 12 Torr l/s | 16 mbar l/s
16 hPa l/s | 12 Torr l/s | 16 mbar l/s
8 hPa l/s | 6 Torr l/s | 8 mbar l/s
13 hPa l/s | 9.75 Torr l/s | 13 mbar l/s
RS-485, Remote
yes
in any orientation
48 (± 5 %) V DC
5 mT
IP 54
660 l/s
480 l/s
600 l/s
685 l/s
49200 min-1
20-100 %
4 min
<= 45 dB (A)
< 5 · 10-10 hPa | < 3.75 · 10-10 Torr |
< 5 · 10-10 mbar
G 1/8"
20.8 kg | 45.86 lb
Venting connection
Weight
Order number
HiPace® 700 M
www.pfeiffer-vacuum.com
PM P04 452
Page 3
Vacuum Generation / Turbopumps / Magnetically Levitated
Accessories
Accessory for TC 400/1200 and TM 700
Y-connector, shielded, M12 for accessories
Adapter and control cables
Control cable for pumping stations 0.7 m
HiPace - ACP connection cable
Air cooling
Air cooling, shielded, for HiPace 400/700/800
and 300700/800 M with TC 400 PB/TM 700
CF-F, Mounting kit
Set of hexagon screws for trough hole, DN 160
CF-F
Set of stud screws for trough hole, DN 160 CFF
CF-F, Sealings, splinter shields, protection
screens
Protection screen for DN 160 CF-F
Splinter shield for turbopumps, DN 160 CF-F
Connection cables
Connection cable for HiPace with TC 400/TM
700 to power supply TPS/DCU
310/311/400/401
Control and display units
Accessories package for HPU - Power supply,
software and PC cable
DCU 002, Display control unit
HPU 001, handheld programming unit
DCU with integrated power supply
DCU 400, Display control unit incl. power supply
Fore-vacuum safety valves
TVV 001 fore-vacuum safety valve, 115 V AC
TVV 001 fore-vacuum safety valve, 230 V AC
Interface and extension cables
Interface cable, M12 m straight / M12 m
straight, 3 m
Mains cables
Mains cable 115 V AC, NEMA 5-15 to C13, 3 m
Mains cable 208 V AC, NEMA 6-15 to C13, 3 m
Mains cable 230 V AC, CEE 7/7 to C13, 3 m
Relay boxes
Relay box, shielded, for backing pumps, 1phase 20 A for TC 400/1200, TM 700 and TCP
350, M12
RS-485
USB converter to RS-485 interface
Y-Connector M12 to RS-485
Sealing gas
Sealing gas throttle for HiPace 300/400/700 and
800
Sealing gas valve, shielded for HiPace
300/400/700 and 800 with TC 400 and TM 700
Shielded heating suitable for TC 400 PB, TC
1200 and TM 700
Heating jacket, shielded, for HiPace
400/700/800 with TC 400 PB/TM 700, 115 V
AC, UL plug
Heating jacket, shielded, for HiPace
400/700/800 with TC 400 PB/TM 700, 208 V
AC, UL plug
Heating jacket, shielded, for HiPace
400/700/800 with TC 400 PB/TM 700, 230 V
AC, safety plug
www.pfeiffer-vacuum.com
P 4723 013
PM 061 675 AT
PM 071 142 -X
PM Z01 363
PM 016 691 -T
PM 016 693 -T
PM 016 339
PM 016 318
PM 061 352 -T
PM 061 005 -T
PM 061 348 -T
PM 051 510 -T
PM C01 823
PM Z01 206
PM Z01 205
PM 061 283 -T
P 4564 309 ZE
P 4564 309 ZF
P 4564 309 ZA
PM 071 285 -X
PM 061 207 -T
P 4723 010
PM Z01 317
PM Z01 312
PM 071 271 -T
PM 071 270 -T
PM 071 269 -T
Page 4
Vacuum Generation / Turbopumps / Magnetically Levitated
Accessories
TPS-19" rack module
TPS 401, mains pack 19" rack module 3HU
TPS wall rail fitting
TPS 400, mains pack for wall/standard rail
fitting
Venting accessory with small flange, G 1/8",
hoses, air drier
TTV 001, air drier for venting turbopumps
Venting valve (normally closed)
Venting valve, shielded, 24 V DC, G 1/8", for
connection to TC 400/1200 and TM 700
Vibration damper
Vibration damper for HiPace 700, DN 160 CF-F
www.pfeiffer-vacuum.com
PM 061 347 -T
PM 061 343 -T
PM Z00 121
PM Z01 291
PM 006 493 -X
Page 5
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vacuum solutions worldwide, technological perfection,
competent advice and reliable service.
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perfect vacuum solution?
Please contact us:
Pfeiffer Vacuum GmbH
Headquarters · Germany
T +49 6441 802-0
info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.com
All data subject to change without prior notice. (10/28/2014)
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