HiPace 700 M ®
Transcription
HiPace 700 M ®
A PASSION FOR PERFECTION HiPace® 700 M Vacuum Generation / Turbopumps / Magnetically Levitated HiPace® 700 M with TM 700, DN 160 CF-F 5-axis magnetically levitated turbopump with a pumping speed of 685 l/s for N2 Integrated digital magnetic bearing controller TM 700 Installation in any orientation; flexible through connectivity of up to 4 accessory parts With integrated water cooling for maximum gas throughput Interfaces: RS-485, Remote (Profibus/DeviceNet on request) The turbopump features extremely low vibration and is oil-free With patented In-field sensor calibration Including venting valve and patented "pulsed venting" Protection Class: IP 54 Extensive accessories expand the range of applications Dimensions www.pfeiffer-vacuum.com Page 2 Vacuum Generation / Turbopumps / Magnetically Levitated Technical Data HiPace® 700 M with TM 700, DN 160 CF-F Bearing Compression ratio for Ar Compression ratio for H2 Compression ratio for He Compression ratio for N2 Cooling method, optional Cooling method, standard Cooling water consumption Cooling water temperature Electronic drive unit Flange (in) Flange (out) Fore-vacuum max. for N2 Gas throughput at 0.1 hPa HV for Ar Gas throughput at 0.1 hPa HV for H2 Gas throughput at 0.1 hPa HV for He Gas throughput at 0.1 hPa HV for N2 Gas throughput at full rotational speed for Ar Gas throughput at full rotational speed for N2 Interfaces Low vibrations Mounting orientation Operating voltage Permissible magnetic field max. Protection category Pumping speed for Ar Pumping speed for H2 Pumping speed for He Pumping speed for N2 Rotation speed ± 2 % Rotation speed variable Run-up time Sound pressure level Ultimate pressure according to PNEUROP Magnetically Levitated > 1 · 1011 2 · 105 > 1 · 107 > 1 · 1011 Air, convection Water 80 l/h 15-35 °C | 59-95 °F | 288-308 K with TM 700 DN 160 CF-F DN 25 ISO-KF 8 hPa | 6 Torr | 8 mbar 16 hPa l/s | 12 Torr l/s | 16 mbar l/s 9 hPa l/s | 6.75 Torr l/s | 9 mbar l/s 16 hPa l/s | 12 Torr l/s | 16 mbar l/s 16 hPa l/s | 12 Torr l/s | 16 mbar l/s 8 hPa l/s | 6 Torr l/s | 8 mbar l/s 13 hPa l/s | 9.75 Torr l/s | 13 mbar l/s RS-485, Remote yes in any orientation 48 (± 5 %) V DC 5 mT IP 54 660 l/s 480 l/s 600 l/s 685 l/s 49200 min-1 20-100 % 4 min <= 45 dB (A) < 5 · 10-10 hPa | < 3.75 · 10-10 Torr | < 5 · 10-10 mbar G 1/8" 20.8 kg | 45.86 lb Venting connection Weight Order number HiPace® 700 M www.pfeiffer-vacuum.com PM P04 452 Page 3 Vacuum Generation / Turbopumps / Magnetically Levitated Accessories Accessory for TC 400/1200 and TM 700 Y-connector, shielded, M12 for accessories Adapter and control cables Control cable for pumping stations 0.7 m HiPace - ACP connection cable Air cooling Air cooling, shielded, for HiPace 400/700/800 and 300700/800 M with TC 400 PB/TM 700 CF-F, Mounting kit Set of hexagon screws for trough hole, DN 160 CF-F Set of stud screws for trough hole, DN 160 CFF CF-F, Sealings, splinter shields, protection screens Protection screen for DN 160 CF-F Splinter shield for turbopumps, DN 160 CF-F Connection cables Connection cable for HiPace with TC 400/TM 700 to power supply TPS/DCU 310/311/400/401 Control and display units Accessories package for HPU - Power supply, software and PC cable DCU 002, Display control unit HPU 001, handheld programming unit DCU with integrated power supply DCU 400, Display control unit incl. power supply Fore-vacuum safety valves TVV 001 fore-vacuum safety valve, 115 V AC TVV 001 fore-vacuum safety valve, 230 V AC Interface and extension cables Interface cable, M12 m straight / M12 m straight, 3 m Mains cables Mains cable 115 V AC, NEMA 5-15 to C13, 3 m Mains cable 208 V AC, NEMA 6-15 to C13, 3 m Mains cable 230 V AC, CEE 7/7 to C13, 3 m Relay boxes Relay box, shielded, for backing pumps, 1phase 20 A for TC 400/1200, TM 700 and TCP 350, M12 RS-485 USB converter to RS-485 interface Y-Connector M12 to RS-485 Sealing gas Sealing gas throttle for HiPace 300/400/700 and 800 Sealing gas valve, shielded for HiPace 300/400/700 and 800 with TC 400 and TM 700 Shielded heating suitable for TC 400 PB, TC 1200 and TM 700 Heating jacket, shielded, for HiPace 400/700/800 with TC 400 PB/TM 700, 115 V AC, UL plug Heating jacket, shielded, for HiPace 400/700/800 with TC 400 PB/TM 700, 208 V AC, UL plug Heating jacket, shielded, for HiPace 400/700/800 with TC 400 PB/TM 700, 230 V AC, safety plug www.pfeiffer-vacuum.com P 4723 013 PM 061 675 AT PM 071 142 -X PM Z01 363 PM 016 691 -T PM 016 693 -T PM 016 339 PM 016 318 PM 061 352 -T PM 061 005 -T PM 061 348 -T PM 051 510 -T PM C01 823 PM Z01 206 PM Z01 205 PM 061 283 -T P 4564 309 ZE P 4564 309 ZF P 4564 309 ZA PM 071 285 -X PM 061 207 -T P 4723 010 PM Z01 317 PM Z01 312 PM 071 271 -T PM 071 270 -T PM 071 269 -T Page 4 Vacuum Generation / Turbopumps / Magnetically Levitated Accessories TPS-19" rack module TPS 401, mains pack 19" rack module 3HU TPS wall rail fitting TPS 400, mains pack for wall/standard rail fitting Venting accessory with small flange, G 1/8", hoses, air drier TTV 001, air drier for venting turbopumps Venting valve (normally closed) Venting valve, shielded, 24 V DC, G 1/8", for connection to TC 400/1200 and TM 700 Vibration damper Vibration damper for HiPace 700, DN 160 CF-F www.pfeiffer-vacuum.com PM 061 347 -T PM 061 343 -T PM Z00 121 PM Z01 291 PM 006 493 -X Page 5 Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 info@pfeiffer-vacuum.de www.pfeiffer-vacuum.com All data subject to change without prior notice. (10/28/2014) Vacuum solutions from a single source