Satis Vacuum

0317900
SATIS SP-200
Fast and flexible sputter
coater for ophthalmic
applications
Satis Vacuum
SATIS SP-200 Sputter Coater
Main features of the SP-200:
•
•
•
•
•
•
•
•
•
•
•
•
Easy to set up and operate
Fast process development
Sputtering system with load lock
Fast: as little as 14 minutes cycle time for
four-layer AR coatings
Capability for gradient layer technology (rugate)
Production of indices from 1.46 up to 2.05
Low- and high-temperature processes
High uniformity and reproducibility
Flexible and updateable
Network and remote control with PC
Low cost of ownership
Footprint I m2
Customer benefit:
The SP-200 sputtering system introduces a new
concept in optical coating for the ophthalmic industry. It provides completely automated operation
with the possibility of integrating loading and handling systems.The system is capable of rapid process
changeover and is ideally suitable for process development. The patented pulsed magnetron and gas
manifold system assures high deposition rates
(2 nm/s) with high run-to-run repeatability. It can
handle cold and hot processes with materials of
every refractive index from 1.46 up to 2.05 in the
visible spectrum. This allows the development of
coating systems for any type of ophthalmic application. For instance, the SP-200 can be used to
apply high-quality antireflection coatings as well as
mirror coatings for trendy sunglass lenses. With
its fast turnaround times, small footprint
and automation capability, the system is
extremely economical.
Applications and capabilities:
• AR coatings on glass and plastic lenses
. [vj|rror
coatings
for sunglass lenses
• Single- or multilayer AR coatings
• Special coatings for other applications
• Coating system development
• Innovative layer systems with gradient index
transitions
• Diopters from -6 to +6
Service and support:
System concept:
The SP-200 is a reactive sputtering system with a
6"target.The straightforward one-target operating
mode allows production of fully dense coatings
such as SiCh and Si N4. The layers are produced
simply by changing the gas flows into the system.
For example, SiCh and SÌ3N4 coatings with refractive indices of .46 and 2.05, respectively, can be
produced rapidly and accurately with the patented
gas inlet manifold and the advanced SATIS control
system. It is even possible to produce gradient
layer changes to reduce stress and laser damage
and to achieve new, advanced rugate filter designs.
With its built-in chiller and wheels, the self-contained system can be operated and maintained on
only I m2 of floor space. The concept is designed
to interface with automation and inline systems.
Satis Vacuum operates a worldwide service and
support network which is able to advise the customer
in all matters related to equipment or process
development. Additionally, SATIS provides its
customers with quality training and complements
this training with ongoing local R&D and testing
feedbackThis is backed up by a first-class technical
service team and a large inventory of spare parts
so that customers can produce quality on a consistent basis.
The experienced SATIS engineering and process
development team is able to effectively assist
customers in problem-solving.
Please contact your local office to discuss your
requirements and determine the options that best
address your needs.
o ». a ai
4-layer AR on CR39
Artuai Layer
Layer Type
Q Safety C«u,t
Q Ga-f-/ Power Supply
QW«. F.OW
Ease of use:
Process development and setup are extremely
easy and fast. The electronic control system provides access to all important parameters.
The simple touch screen interface is divided into
three access hierarchies. For the operator a "touch
and go" interface reduces instruction time and
handling errors. Full access for engineering and
process development assures great flexibility on
the same system.
Cleaning and maintenance are easy and economical.Tooling and process changes require only minutes.
Uniformity and reproducibility are guaranteed with a planetary
feedthrough system and the EPS-120 control system.The EPS-120
is able to adapt to changes due to racetrack phenomena and
other sputtering process characteristics.
Available options include:
• Parameter sets for non-silicon target, for
example for aluminum
• Angular planetary drive for curved lenses
• Lacquering system
Technical data:
max. 5 min
6"
3 I<VA
.5 kVA
adjust
EPS-120
• Pump times
• Target diameter
• Max. power
• Typical power
• Substrate holder
• Process control system
Optical cleaning systems
Flowbox
High-temperature version for mineral lenses
• Turbo pump system
• Load lock diameter
• Built-in chiller
• Pneumatic load system
• Compressed air
• Gas purity Ar; N2; O2
250 mm
6 bar
99.99
Further information is available on our homepage: www.satis-vacuum.ch
Dimensions
Top view
Front view
1096
645
1096
DUCK
Запросы направляйте по адресу:
DUCK GmbH, Bielefelder Str. 272
D-32791 Lage/Германия
тел.: (1049-5232) 9797-60. фате: 9797-62
e-mail: mail@dueck-wt.de
или в наше представительство в Москве:
Satis Vacuum
тел. /факс (095) 434-2546
The pacemakers in coating technology
SWITZERLAND
Email sales@satis-vacuum.ch
USA
Email sales@satis-vacuum.ch
Satis Vacuum Neuhofstrasse 12 CH-634I Baar/ZG
Phone 41-41-766 16 16 F a x 4 l - 4 l - 7 l 6 16 IO
Satis Vacuum of America Inc. PO Box ISO
Phone 877-409-9401 Fax 614-409-9306
ITALY
Email sales@satis.it
Satis Vacuum Via del Campaccio 13 I-20019 Settimo Milanese
Phone 39-02-33 55 61 Fax 39-02-33 50 12 00
ENGLAND
Email sales@satis-vacuum.co.uk
Satis Vacuum (UK) Ltd. Futura Park Aspinall Way Middlebrook
Bolton BL6 6PG Phone 01204 698 955 Fax 01204 469 147
GERMANY
Email sales@satis-vacuum.ch
Satis Vacuum Beethovenstrasse 30 D-63526 Erlensee
Phone 49-6183-73081 Fax 49-6183-72770
ASIA
Email satis@cyberway.com.sg
Satis Vacuum !9Tanglin Road # 04 - 18 Singapore 247909
Phone 65-737 97 I I Fax 65-735 07 I I
Groveport OH 43125